Ultraviolet Light Source Patents (Class 250/365)
  • Patent number: 11113428
    Abstract: A shippable data transfer device includes a data storage medium encased in a chamber surrounded by an anti-tamper casing. The anti-tamper casing includes an anti-tamper layer with identifying elements arranged in a unique or otherwise identifiable pattern. The anti-tamper layer is configured to actively re-arrange, alter, or obscure the identifying elements in response to a breach of the anti-tamper casing.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: September 7, 2021
    Assignee: Amazon Technologies, Inc.
    Inventors: John Totah, Shan Cheng, Frank Charles Paterra
  • Patent number: 11097026
    Abstract: A disinfectant transmissive material incorporated into a case for a mobile device or a supporting surface of a disinfecting charger to enable disinfection of hard to reach areas. The case can be self-disinfecting. The disinfecting charger can have monitoring and safety systems that detect proximity and provide user feedback on safety, disinfection, and charge status along with automatic interlocks to protect the user from overexposure to disinfectant.
    Type: Grant
    Filed: June 10, 2019
    Date of Patent: August 24, 2021
    Assignee: UV Partners, Inc.
    Inventor: David W Baarman
  • Patent number: 10934040
    Abstract: Sealing a package with a visually transparent sealing label is described. The visually transparent sealing label contains an ultraviolet blocking component to prevent transmission of ultraviolet radiation through the label to the surface of the package. The package comprises an activatable component that upon excitation with ultraviolet radiation emits luminescence. The presence of the sealing label on the package may be verified by illuminating the sealing label with ultraviolet radiation and by observing whether the level of luminescence from the package material under the sealing label is lower than a limit value.
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: March 2, 2021
    Assignee: UPM RAFLATAC OY
    Inventors: Jari Herranen, Pasi Lehtonen, Markku Pietarinen, Jari Hirvonen
  • Patent number: 10900898
    Abstract: A security feature has a plurality of luminescent surface elements, wherein luminescence lifetime varies between the surface elements. In order to verify the security feature, a lock-in imager is used. The security feature is illuminated with excitation light, which is intensity-modulated with a modulation frequency. The luminescent light emitted by the security feature is detected synchronously with the modulation frequency in a plurality of pixels. This is used to determine a measure of a phase shift between the excitation light and the luminescent light in different pixels. The security feature is verified taking account of the measure of the phase shift in different pixels.
    Type: Grant
    Filed: September 12, 2017
    Date of Patent: January 26, 2021
    Assignee: CSEM Centre Suisse d'Electronique et de Microtechnique SA— Recherche et Développement
    Inventors: Jonas Reinhardt, Christoph Hofer, Stefano Cattaneo
  • Patent number: 10859367
    Abstract: A fluid flow orifice locating system for locating fluid flow orifices on a component includes a light source, an image capture device, and a controller operably connected to the image capture device. The controller is configured and disposed to create a fluid flow orifice map of the component based on contrast differences on a surface of the component.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: December 8, 2020
    Assignee: General Electric Company
    Inventors: Yusuf Eren Ozturk, Jonathan Matthew Lomas, Thomas Robert Reid
  • Patent number: 10752544
    Abstract: There is provided a production method of a resin composite module for a vehicle, which includes a resin module substrate, and a silicone-based polymer hard coat which is formed on the resin module substrate. The method includes forming the hard coat by coating a silicone-based polymer onto the resin module substrate, and radiating an ultraviolet ray onto at least a part of a surface of the hard coat such that a hardness thereof becomes 0.8 GPa or more as evaluated by a nanoindentation method. The radiating the ultraviolet ray uses a light source unit which includes a light source and emits an ultraviolet ray having a wavelength of 360 nm or less from an emission surface thereof and radiates the ultraviolet ray onto the surface of the hard coat while a distance from the emission surface to the surface of the hard coat is 10 mm or less.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: August 25, 2020
    Assignee: KOITO MANUFACTURING CO., LTD.
    Inventors: Nobuyuki Horikawa, Yasuaki Tsutsumi, Masaru Kaneko, Masayuki Kobayashi
  • Patent number: 10673879
    Abstract: An enterprise threat detection (ETD) forensic workspace is established according to a particular timeframe and permitting defining a selection of data types from available log data for an evaluation of events associated with one or more entities. A chart is defined illustrating a graphical distribution of a particular data type in the forensic workspace. A snapshot associated with the chart is generated, the snapshot saving a copy of all data necessary to re-create the chart into an associated snapshot object. The snapshot is associated with a snapshot page for containing the snapshot and the snapshot page is saved within the ETD forensic workspace.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: June 2, 2020
    Assignee: SAP SE
    Inventors: Florian Chrosziel, Jona Hassforther, Thomas Kunz, Harish Mehta, Rita Merkel, Kathrin Nos, Wei-Guo Peng, Eugen Pritzkau, Marco Rodeck, Hartwig Seifert, Nan Zhang, Thorsten Menke, Hristina Dinkova, Lin Luo
  • Patent number: 10660981
    Abstract: An apparatus for destroying pathogens includes a platform and an LED matrix panel. The platform has a portion configured to permit passage of ultraviolet light therethrough. The LED matrix panel is disposed below the portion of the platform and includes a grid and a plurality of discreetly-controlled, ultraviolet light LEDs (UV LEDs). The grid defines a plurality of cells. Each UV LED is associated with one cell such that the cells direct the ultraviolet light emitted by the UV LEDs upwardly through the portion of the platform to sanitize an object supported on the portion of the platform.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: May 26, 2020
    Assignee: HARBOR INNOVATIONS, LLC
    Inventors: Rachel Dombrowsky, Christopher Montalbano, Andrew Martin, Philip Beamer
  • Patent number: 10615565
    Abstract: The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply pulsed voltage to the pair of electrodes, a wavelength selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, and a controller. The controller is configured to measure a duty in a predetermined period before starting the second burst oscillation and a length of a suspension period from a time of ending the first burst oscillation to a time of starting the second burst oscillation, and perform a first control of the spectral width varying unit based on the duty and the length of the suspension period.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: April 7, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Furusato, Keisuke Ishida, Takeshi Ohta, Takahito Kumazaki, Osamu Wakabayashi
  • Patent number: 10532119
    Abstract: An apparatus for destroying pathogens includes a platform and an LED matrix panel. The platform has a portion configured to permit passage of ultraviolet light therethrough. The LED matrix panel is disposed below the portion of the platform and includes a grid and a plurality of discreetly-controlled, ultraviolet light LEDs (UV LEDs). The grid defines a plurality of cells. Each UV LED is associated with one cell such that the cells direct the ultraviolet light emitted by the UV LEDs upwardly through the portion of the platform to sanitize an object supported on the portion of the platform.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: January 14, 2020
    Assignee: HARBOR INNOVATIONS, LLC
    Inventors: Rachel Dombrowsky, Christopher Montalbano, Andrew Martin, Philip Beamer
  • Patent number: 10492269
    Abstract: Embodiments of a photoarray system are provided. In one embodiment, a photoarray system includes a lixel array comprising a plurality of lixels each supporting one or more radiation sources; a power source associated with the lixel array; and a control system associated with the power source and each of the radiation sources, the control system comprising a master processor-readable medium configured to store at least a portion of data that specifies at least one lixel illumination pattern, the control system further comprising master processing structure configured to regulate use of power individually by each of the radiation sources based on the at least one lixel illumination pattern.
    Type: Grant
    Filed: January 27, 2015
    Date of Patent: November 26, 2019
    Assignee: Innova Technology Inc.
    Inventor: Thomas A. D. Burgmann
  • Patent number: 10416080
    Abstract: The present invention refers to a device for sensing photoluminescent materials, said device comprising at least a source of light configured to generate a beam of light that is transmitted to the outside of said device and hits a photoluminescent material; a photon counting detector configured to receive a response light generated by the illumination of photoluminescent material with said beam of light and convert it into an electrical signal; a signal processing electronic system configured to process said generated electrical signal; and a signal transmission means configured to transmit the signals generated by the said signal processing electronic system towards the outside of the said device.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: September 17, 2019
    Assignee: OURO NEGRO TECNOLOGIAS EM EQUIPAMENTOS INDUSTRIAIS S/A
    Inventors: Leone Pereira Masiero, Luiz Carlos Guedes Valente
  • Patent number: 10345714
    Abstract: Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.
    Type: Grant
    Filed: June 12, 2017
    Date of Patent: July 9, 2019
    Assignee: Cymer, LLC
    Inventors: Thomas Frederick Allen Bibby, Jr., Omar Zurita, Abhishek Subramanian, Thomas Patrick Duffey
  • Patent number: 10203247
    Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: February 12, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Gregory R. Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick A. Shaughnessy, Anatoly Shchemelinin, Ilya Bezel, Muzammil A. Arain, Anatoly A. Vasiliev, James Andrew Allen, Oleg Shulepov, Andrew V. Hill, Ohad Bachar, Moshe Markowitz, Yaron Ish-Shalom, Ilan Sela, Amnon Manassen, Alexander Svizher, Maxim Khokhlov, Avi Abramov, Oleg Tsibulevsky, Daniel Kandel, Mark Ghinovker
  • Patent number: 10117958
    Abstract: An apparatus for destroying pathogens includes a platform and an LED matrix panel. The platform has a portion configured to permit passage of ultraviolet light therethrough. The LED matrix panel is disposed below the portion of the platform and includes a grid and a plurality of discreetly-controlled, ultraviolet light LEDs (UV LEDs). The grid defines a plurality of cells. Each UV LED is associated with one cell such that the cells direct the ultraviolet light emitted by the UV LEDs upwardly through the portion of the platform to sanitize an object supported on the portion of the platform.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: November 6, 2018
    Assignee: Harbor Innovations, LLC
    Inventors: Rachel Dombrowsky, Christopher Montalbano, Andrew Martin, Philip Beamer
  • Patent number: 9801965
    Abstract: A solution for disinfecting flowable products, such as liquids, suspensions, creams, colloids, emulsions, powders, and/or the like, as well as accessories and products relating thereto, such as containers, caps, brushes, applicators, and/or the like, using ultraviolet radiation is provided. In an embodiment, an ultraviolet impermeable cap is configured to enclose a volume corresponding to a flowable product. At least one ultraviolet radiation source can be mounted on the cap and be configured to generate ultraviolet radiation for disinfecting the enclosed area. The ultraviolet radiation source can be configured to only generate ultraviolet radiation when the volume is enclosed by the ultraviolet impermeable cap.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: October 31, 2017
    Assignee: Sensor Electronic Technology, Inc.
    Inventors: Timothy James Bettles, Alexander Dobrinsky, Michael Shur, Remigijus Gaska
  • Patent number: 9772714
    Abstract: This disclosure provides methods and systems for mitigating pathogen transmission via a touch surface of a touch input device. Mitigation is accomplished through selective touch surface sterilization and through touchscreen user interface reorganization. The touch surface includes a pixel array for illuminating selected portions of the touch surface with ultraviolet light of a sterilization wavelength based upon the received touch inputs. The selective illumination may occur while receiving a touch input or after an accumulation of touch inputs have been received. The user interface may also be reorganized based on received touch inputs in order to locate user interface icons to lesser touched locations of the touch surface.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: September 26, 2017
    Assignee: International Business Machines Corporation
    Inventors: Guy Cohen, James R. Kozloski, Clifford A. Pickover
  • Patent number: 9665017
    Abstract: Various embodiments provide systems and methods for extreme ultraviolet (EUV) lithography light source. An exemplary system can include a laser radiation apparatus configured to provide laser radiation. The system can further include an EUV light excitation source material configured to receive the laser radiation to generate an EUV light. The laser radiation can generate droplets from the EUV light excitation source material. The system can further include a collector configured to collect the EUV light. The collector can include a plurality of reflective mirrors surrounding the EUV light excitation source material. The plurality of reflective mirrors can be movable. The collector can further include a mirror control system synchronized with the laser radiation apparatus and configured to set the plurality of reflective mirrors to be in one of a reflective state for reflecting the EUV light and a non-reflective state for preventing contamination by the droplets.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: May 30, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventor: Emily Shu
  • Patent number: 9579410
    Abstract: The present invention relates to a self-powered, footwear sanitizing system configured to substantially neutralize biological contaminants on the soles of shoes when a wearer of the shoes steps onto the system, the system has a method to generate sanitizing radiation of 254 nm (UVC), a means for delivering sanitizing radiation from the mat to the underside of a wearer's shoes and a piezo-electric or mechano-luminescence generator to power the system.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: February 28, 2017
    Inventors: Corinne K. Simmons, James A. Brunner
  • Patent number: 9546964
    Abstract: A defect detection system for an extreme ultraviolet lithography mask comprises an extreme ultraviolet light source (1), extreme ultraviolet light transmission parts (2, 3), an extreme ultraviolet lithography mask (4), a photon sieve (6) and a collection (7) and analysis (8) system. Point light source beams emitted by the extreme ultraviolet light source (1) are focused on the extreme ultraviolet lithography mask (4) through the extreme ultraviolet light transmission parts (2, 3); the extreme ultraviolet lithography mask (4) emits scattered light and illuminates the photon sieve (6); and the photon sieve (6) forms a dark field image and transmits the same to the collection (7) and analysis (8) system. The defect detection system for the extreme ultraviolet photolithographic mask uses the photon sieve to replace a Schwarzchild objective, thereby realizing lower cost, relatively small size and high resolution.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: January 17, 2017
    Assignee: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES
    Inventors: Hailiang Li, Changqing Xie, Ming Liu, Dongmei Li, Jiebin Niu, Lina Shi, Xiaoli Zhu
  • Patent number: 9470985
    Abstract: A lithographic apparatus comprises an illumination system configured to condition a radiation beam, a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, and a sensor. The sensor (S) comprises a photodiode (2) provided on a face (8) of a semiconductor substrate (4) towards which the radiation beam is directed during operation of the lithographic apparatus, a first radiation blocking material (10) being provided around the photodiode on the face of the semiconductor substrate, and a second radiation blocking material (12) is provided on a side (14) of the semiconductor substrate upon which the radiation beam is incident during operation of the lithographic apparatus.
    Type: Grant
    Filed: February 21, 2013
    Date of Patent: October 18, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Fabrizio Evangelista, Derk Jan Wilfred Klunder, Cornelis Cornelia De Bruijn
  • Patent number: 9448179
    Abstract: A gas analyzing apparatus includes a gas analyzing unit, a luminescence inducing component generating unit, and a measurement signal calculating unit. The gas analyzing unit receives a sample gas containing a component gas and/or a standard gas and the luminescence inducing gas. The gas analyzing unit is configured to output a detection signal based on an intensity of a reaction light generated by the interaction between the component gas and the luminescence inducing component. The luminescence inducing component generating unit generates the luminescence inducing gas by electric discharge generated repeatedly at specified intervals. The measurement signal calculating unit calculates a first measurement signal based on a first detection signal, based on the reaction light generated when the sample gas and the luminescence inducing gas are introduced, and a second detection signal, based on the reaction light generated when the standard gas and the luminescence inducing gas are introduced.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: September 20, 2016
    Assignee: HORIBA, LTD.
    Inventors: Yusuke Mizuno, Takuji Oida, Misato Arakawa
  • Patent number: 9421738
    Abstract: A method of producing electrons via photoemission comprising providing diamond doped p-type with boron, treating a surface of the diamond by exposing it to atomic hydrogen inside an ultrahigh vacuum chamber, illuminating the surface with photons, and extracting the photoemitted electrons. A chemically stable visible light photoemission electron source comprising a diamond film having a surface terminated with hydrogen and a light source.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: August 23, 2016
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Jonathan L. Shaw, Jeremy Hanna
  • Patent number: 9354327
    Abstract: Radiation detection is disclosed. A radiation detection package includes a radio-photoluminescent glass (RPLG), an EMR source and a photodetector. The EMR source includes an input lead, and is configured to emit first energy in a predetermined band of EMR in a downstream direction toward the RPLG in response to receipt of an input signal on the input lead of the EMR source. The photodetector has an output lead, and is configured to detect second energy that is emitted by the RPLG in an emission band of EMR in response to the receipt of the first energy in the predetermined band of EMR, and generate a first output signal on the output lead indicative of an amount of the second energy.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: May 31, 2016
    Assignee: Lockheed Martin Corporation
    Inventors: David P. Summerlot, Matthew W. Kelley, Joseph M. Turchiano
  • Patent number: 9301380
    Abstract: A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted by radial field lines to a large area annular array of beam dumps.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: March 29, 2016
    Assignee: PLEX LLC
    Inventor: Malcolm W. McGeoch
  • Patent number: 9228225
    Abstract: The invention provides a novel class of xanthene dyes, some of which are functionalized to allow their coupling to conjugation partners of interest, e.g. biomolecules, drugs, toxins and the like. Also provided are conjugates of the dyes, methods of preparing and using the dyes and their conjugates and kits including the dyes and their conjugates.
    Type: Grant
    Filed: November 8, 2010
    Date of Patent: January 5, 2016
    Assignee: BIOSEARCH TECHNOLOGIES, INC.
    Inventors: Mark Reddington, Matt Lyttle
  • Patent number: 9006680
    Abstract: A solution for disinfecting flowable products, such as liquids, suspensions, creams, colloids, emulsions, powders, and/or the like, as well as accessories and products relating thereto, such as containers, caps, brushes, applicators, and/or the like, using ultraviolet radiation is provided. In an embodiment, an ultraviolet impermeable cap is configured to enclose a volume corresponding to a flowable product. At least one ultraviolet radiation source can be mounted on the cap and be configured to generate ultraviolet radiation for disinfecting the enclosed area. The ultraviolet radiation source can be configured to only generate ultraviolet radiation when the volume is enclosed by the ultraviolet impermeable cap.
    Type: Grant
    Filed: March 18, 2014
    Date of Patent: April 14, 2015
    Assignee: Sensor Electronic Technology, Inc.
    Inventors: Timothy James Bettles, Alexander Dobrinsky, Michael Shur, Remigijus Gaska
  • Patent number: 8974871
    Abstract: A curing machine to cure a UV-curable adhesive adhering on a workpiece, the workpiece having a slot thereon and a hole on a sidewall of the slot. The hole receives the UV-curable adhesive, the curing machine can include a curing mechanism. The curing mechanism can include a base plate holding a curing assembly and the curing assembly can include a holding member, at least one UV lamp being coupled to the holding member. Axis of the at least one UV lamp can intersect with the holding member at an angle of less than 90 degrees. A workpiece being positioned on the base plate, the UV lamp can irradiate directly an inside or an outside of a sidewall through the hole in the sidewall of the slot.
    Type: Grant
    Filed: August 5, 2014
    Date of Patent: March 10, 2015
    Assignees: Fu Ding Electronical Technology (Jiashan) Co., Ltd., Hon Hai Precision Industry Co., Ltd.
    Inventors: Jun-Min Fei, Huo-Zhong Wu, Jian-Hua Xu
  • Patent number: 8975605
    Abstract: This specification relates to an improved method, process and apparatus for disinfecting and sterilizing all types of surfaces and indoor air and room air contaminated with microorganisms. The improved apparatus consists of a multi-wavelength narrow spectral width UV source that is more effective than mercury based 254 nm germicidal lamps for destroying the DNA and outer shell or membrane of virus, bacteria, spores and cists.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: March 10, 2015
    Inventor: S. Edward Neister
  • Patent number: 8977796
    Abstract: Disclosed is a disinfecting docking station for at least one portable electronic device, such as a medical technician's tablet computer, that has at least one recharging connector. An enclosure is adapted to receive the at least one portable electronic device therein through an openable side that includes a selectively closable door. Each electronic device is exposed to a disinfecting wavelength of light, such as UV light, to disinfect the surface of the device. The enclosure includes supports that minimally contact each device so that the device will be substantially exposed to the UV light. A control circuit monitors the exposure time and level, and is programmable to activate the UV light based on pre-set criteria. The enclosures may be stacked and provide power and network connectivity to each device while docked therein.
    Type: Grant
    Filed: December 10, 2013
    Date of Patent: March 10, 2015
    Assignee: Readydock, Inc.
    Inventors: David G. Engelhardt, William A. Saimond
  • Patent number: 8933417
    Abstract: A lens and reflector unit for optical measurements includes first and second convex surface sections of the lens and reflector unit. Both have their respective central normal lines. A first flat surface section has a normal direction that divides the angle between the central normal lines into equal halves. A third convex surface section has a third central normal line, and the fourth convex surface section has a fourth central normal line. A second flat surface section has a normal direction that divides the angle between the third and fourth central normal lines into to equal halves.
    Type: Grant
    Filed: January 18, 2010
    Date of Patent: January 13, 2015
    Assignee: Wallac Oy
    Inventor: Pauli Salmelainen
  • Publication number: 20150001405
    Abstract: There is provided a particle detector that detects biogenic particles with high sensitivity. The particle detector includes a collecting member having a principal surface and configured to electrostatically collect particles on the principal surface, an irradiation unit configured to irradiate the particles collected on the principal surface with excitation light, a light receiving unit configured to receive fluorescence emitted from the particles by irradiation of the particles with the excitation light, and a detection unit configured to detect biogenic particles from the particles collected on the principal surface on the basis of a fluorescence intensity in the light receiving unit. The particle detector further includes a filter disposed between the principal surface and the light receiving unit cut light with a wavelength emitted by irradiation of the excitation light from a substance that is generated on the principal surface when the particles are electrostatically collected.
    Type: Application
    Filed: November 30, 2012
    Publication date: January 1, 2015
    Inventors: Hideaki Fujita, Haruki Kamiyama, Tomonori Kamo, Akihiro Suzuki
  • Patent number: 8901524
    Abstract: An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: December 2, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Takeshi Asayama, Kouji Kakizaki, Akira Endo, Shinji Nagai
  • Patent number: 8895947
    Abstract: An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: November 25, 2014
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Yoshinori Honda, Fumitsugu Fukuyo, Takashi Suzuki, Norio Ichikawa, Takeaki Hattori, Koji Kawai, Shucheng Chu
  • Patent number: 8872131
    Abstract: Some aspects of the invention may be related to an ultraviolet (UV) water disinfection system and a method of assembling such system. The system may be designed to treat, inactivate, disintegrate and/or remove at least two predetermined different types of contaminations. The system may include a chamber to carry the water containing the predetermined types of contaminations. The system may further include one or more first-type UV lamps having a first UV emission spectrum and one or more second-type UV lamps having a second UV emission spectrum different than the first spectrum. A location of the one or more first-type UV lamps and the one or more second-type UV lamps may be determined such that a combined UV impact function matches with a combined sensitivity response function of the two or more predetermined different types of contaminations in the water each having a different response function.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: October 28, 2014
    Assignee: Atlantium Technologies Ltd.
    Inventors: Ytzhak Rozenberg, Mike Kertser, Tovit Lichi, Zohar Vardiel, Itay Kreisel
  • Patent number: 8872126
    Abstract: A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: October 28, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Umeda, Toshiyuki Hirashita
  • Patent number: 8866111
    Abstract: A radiation source for generating EUV from a stream of molten fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporize at least some of the droplets of fuel, whereby radiation is generated. The fuel droplet generator has a nozzle, a feed chamber, and a reservoir, with a pumping device arranged to supply a flow of fuel in molten state from the reservoir through the feed chamber and out of the nozzle as a stream of droplets. The feed chamber has an outer face in contact with a drive cavity filled with a liquid, and the liquid is driven to oscillate by a vibrator with the oscillation transmissible to the molten fuel in the feed chamber from the outer face of the feed chamber through the liquid.
    Type: Grant
    Filed: July 4, 2012
    Date of Patent: October 21, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Erik Roelof Loopstra, Johan Frederik Dijksman
  • Patent number: 8857465
    Abstract: The invention relates to a method for realizing a vacuum in at least one vacuum chamber. The method comprises providing an arrangement comprising a plurality of vacuum chambers, wherein each vacuum chamber is connected to a shared vacuum system. The shared vacuum system comprises a plurality of turbo molecular pumps, at least one common fore pump, and a piping system comprising one or more pipes for connecting the at least one common fore pump to each of the plurality of turbo molecular pumps. Each turbo molecular pump is separately connected to a corresponding vacuum chamber. The piping system further comprises flow regulators for controlling a flow within the piping system. The method further comprises selecting at least one vacuum chamber for pump-down, and separately pumping down the at least one selected vacuum chamber by means of the shared vacuum system.
    Type: Grant
    Filed: January 2, 2013
    Date of Patent: October 14, 2014
    Assignee: Mapper Lithography IP B.V.
    Inventor: Sander Baltussen
  • Patent number: 8853657
    Abstract: A regenerative ring resonator in the path of a light beam includes a discharge chamber having electrodes and a gain medium between the electrodes; an optical coupler that is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler; and an attenuation optical system in the path of the light beam within the resonator, the attenuation optical system having a plurality of distinct attenuation states, with each attenuation state defining a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the light beam.
    Type: Grant
    Filed: July 28, 2012
    Date of Patent: October 7, 2014
    Assignee: Cymer, LLC
    Inventors: Robert J. Rafac, Rostislav Rokitski
  • Patent number: 8847182
    Abstract: The invention relates to extreme ultraviolet “EUV” radiation generating systems that include a vacuum chamber where a target material can be positioned at a target position for generation of EUV radiation, and a beam guiding chamber for guiding a laser beam from a driver laser device towards the target position. The EUV radiation generating apparatus includes an intermediate chamber which is arranged between the vacuum chamber and the beam guiding chamber, a first window which seals the intermediate chamber in a gas-tight manner for entry of the laser beam from the beam guiding chamber and a second window which seals the intermediate chamber in a gas-tight manner for exit of the laser beam into the vacuum chamber. The invention also relates to a method for operating the EUV radiation generating apparatus.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: September 30, 2014
    Assignee: TRUMPF Laser— und Systemtechnik GmbH
    Inventors: Martin Lambert, Andreas Enzmann
  • Patent number: 8841641
    Abstract: An extreme ultraviolet light source apparatus in which a target material is irradiated with a laser beam and turned into plasma and extreme ultraviolet light is emitted from the plasma may include: a chamber in which the extreme ultraviolet light is generated; an electromagnetic field generation unit for generating at least one of an electric field and a magnetic field inside the chamber; and a cleaning unit for charging and separating debris adhered to an optical element inside the chamber.
    Type: Grant
    Filed: May 28, 2013
    Date of Patent: September 23, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Kouji Kakizaki, Shinji Nagai, Tatsuya Yanagida
  • Patent number: 8785895
    Abstract: A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber may include a target generator having a nozzle, a first pipe configured to cover the nozzle, a cover opening provided in the first pipe to allow the target material to pass through the first pipe, and a first valve configured to open and close the cover opening.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: July 22, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Umeda, Taku Yamazaki, Hakaru Mizoguchi, Toshihiro Nishisaka
  • Patent number: 8785892
    Abstract: Devices and corresponding methods of use are described herein that may include an enclosing structure defining a closed loop flow path and a system generating a plasma at a plasma site, e.g. laser produced plasma system, where the plasma site may be in fluid communication with the flow path. For the device, a gas may be disposed in the enclosing structure which may include an ion-stopping buffer gas and/or an etchant. A pump may be provided to force the gas through the closed loop flow path. One or more heat exchangers removing heat from gas flowing in the flow path may be provided. In some arrangements, a filter may be used to remove at least a portion of a target species from gas flowing in the flow path.
    Type: Grant
    Filed: June 11, 2012
    Date of Patent: July 22, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander I. Ershov, Igor V. Fomenkov
  • Patent number: 8779403
    Abstract: An apparatus and a method for generating extreme ultra violet radiation are provided. The apparatus for generating extreme ultra violet radiation includes a light source, a first reflecting mirror on which source light emitted from the light source is incident, a second reflecting mirror on which first reflected light reflected by the first reflecting mirror is incident, a focus mirror on which second reflected light reflected by the second reflecting mirror is incident, the focus mirror reflecting third reflected light back to the second reflecting mirror, and a gas cell on which fourth reflected light reflected by the second reflecting mirror is incident.
    Type: Grant
    Filed: December 11, 2013
    Date of Patent: July 15, 2014
    Assignees: Samsung Electronics Co., Ltd., Fine Semitech Corp.
    Inventors: Dong-Gun Lee, Eok-Bong Kim, Jong-Ju Park, Seong-Sue Kim
  • Patent number: 8772744
    Abstract: UV-C light assembly is designed to kill germs (bacteria, molds, protozoa, virus, and yeast) in the forced airstreams of HVAC systems, thus preventing the spreading of germs into other rooms or spaces. An air-flow activated switch is invented for turning on the UV-C lights when airstreams pass through and turning off when airstreams stop in the HVAC systems. The UV-C light assembly is installed inside duct through air filter's opening. The UV-C germicidal assembly is an easy add-on to an existing HVAC system for indoor air purification. The UV-C light sources are either LEDs or fluorescent tubes.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: July 8, 2014
    Inventor: Benjamin Dengfa Liu
  • Patent number: 8748828
    Abstract: The present invention includes an interposer disposed on a surface of a substrate, a light sensing array sensor disposed on the interposer, the light sensing array sensor being back-thinned and configured for back illumination, the light sensing array sensor including columns of pixels, one or more amplification circuitry elements configured to amplify an output of the light sensing array sensor, the amplification circuits being operatively connected to the interposer, one or more analog-to-digital conversion circuitry elements configured to convert an output of the light sensing array sensor to a digital signal, the ADC circuitry elements being operatively connected to the interposer, one or more driver circuitry elements configured to drive a clock or control signal of the array sensor, the interposer configured to electrically couple at least two of the light sensing array sensor, the amplification circuits, the conversion circuits, the driver circuits, or one or more additional circuits.
    Type: Grant
    Filed: September 18, 2012
    Date of Patent: June 10, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: David L. Brown, Guowu Zheng, Yung-Ho Chuang, Venkatraman Iyer
  • Patent number: 8748829
    Abstract: An ultraviolet curing system separates the source of ultraviolet radiation and the controller, allowing an operator to stand at a relatively great distance away from the ultraviolet radiation when applied. The apparatus includes a base unit and a source of intense ultraviolet (UV) radiation coupled to the base unit by way of a pivoting arm. A controller, disposed remotely from the base unit, allows an operator to activate the source of UV radiation at a distance of at least several feet away from the source. The preferred embodiment allows an operator to control the UV radiation at a distance of 10 to 100 feet or more using a wired or wireless interconnection between the controller and the base unit. A detachable infrared lamp may be optionally disposed along side the UV source.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: June 10, 2014
    Inventor: Ronald Lipson
  • Patent number: 8742381
    Abstract: A radiation source includes an uncapped Mo/Si multilayer mirror, and a cleaning apparatus configured to remove a deposition comprising Sn on the uncapped Mo/Si multilayer mirror. The cleaning apparatus is configured to provide a gas comprising one or more of H2, D2 and HD and one or more additional compounds selected from hydrocarbon compounds and/or silane compounds in at least part of the radiation source, to produce hydrogen and/or deuterium radicals and radicals of the one or more additional compounds, from the gas, and to supply the hydrogen and/or deuterium radicals and radicals of the one or more additional compounds to the uncapped Mo/Si multilayer mirror to remove at least part of the deposition.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: June 3, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Martin Jacobus Johan Jak
  • Patent number: 8742380
    Abstract: A target supply device is provided that may include a pair of rails arranged to face each other, the rails having electrically conductive properties, a target transport mechanism configured to supply a target material into a space between the rails and in contact with the rails, and a power supply connected to the rails and configured to supply a current to the target material through the rails. Methods and systems using the target supply device are also provided.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: June 3, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Hideo Hoshino, Tatsuya Yanagida
  • Patent number: 8698112
    Abstract: An apparatus, configured to generate extreme ultraviolet light by irradiating a target material by a laser beam from a laser apparatus to turn the target material into plasma, includes a chamber with an inlet for introducing the laser beam into the chamber, the chamber including an electrically conductive structural member; and a target generator including an electrode having a first through-hole through which a charged target passes, an electrical insulator for holding the electrode, and a shielding member having a second through-hole, through which the charged target passes, the shielding member being positioned between a plasma generation region and at least the electrical insulator. The target generator generates the charged target of a liquid target material and output the charged target toward the plasma generation region inside the chamber, and the shielding member has electrically conductive properties and is connected electrically to the electrically conductive structural member of the chamber.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: April 15, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Takayuki Yabu, Kouji Kakizaki, Takanobu Ishihara, Tamotsu Abe, Osamu Wakabayashi