Abstract: One embodiment provides a pyranometer, including: a pyranometer housing; and at least one radiation sensor; wherein the at least one radiation sensor is electrically isolated from the pyranometer housing and thermally coupled to the pyranometer housing by at least one supporting element, wherein the supporting element is connected to the pyranometer housing and is configured to support the at least one radiation sensor. Other aspects are described and claimed.

Abstract: A target debris collection device for extreme ultraviolet (EUV) light source apparatus, includes a baffle body extending within an EUV vessel between a collector and an outlet port of the EUV vessel to allow EUV light reflected from the collector to pass through an internal transmissive region thereof, a discharge plate provided in a first end portion of the baffle body adjacent to the collector to collect the target material debris on an inner surface of the baffle body, a guide structure to guide the target material debris collected in the discharge plate to a collection tank, and a first heating member provided in the guide structure to prevent the target material debris from being solidified.

Abstract: The invention relates to a medical device for the observation of a partly fluorescent object such as tissue comprising at least one fluorophore. The fluorophore absorbs light in at least one spectral excitation waveband and emits fluorescent light in at least one spectral emission waveband. In order to be able to observe also non-fluorescent regions in the tissue without complicated filter arrangement, the medical device according to the invention comprises at least one filter system which comprises, in a filter plane, comprises a filter area and a transmission window. The filter area comprises a band pass filter having at least one passband comprising the at least one excitation waveband. The transmission window has a passband which is wider than the passband of the filter area and is cross-shaped. The at least one filter system is configured to simultaneously receive light through the filter area and the entire transmission window.

Abstract: A printing apparatus that performs a first control of performing discharge of ultraviolet curable ink from a printing head and irradiation of ultraviolet rays from an ultraviolet irradiation unit while performing a first movement along a main scanning direction and a second movement along a sub scanning direction from a print start position side to a print end position side, and a second control of performing irradiation of ultraviolet rays from the ultraviolet irradiation unit without performing discharge of ultraviolet curable ink from the printing head while performing the first movement and the second movement from the print end position side to the print start position side, and in which a movement speed of the first movement in the second control is faster than a movement speed of the first movement in the first control.

Abstract: The present invention includes a prism having a light incidence surface and a film formation surface, a metal film disposed on the film formation surface, and a trapping body secured to the metal film. Excitation light is irradiated from an excitation light irradiation part onto an analysis chip installed in a chip holder, and excitation light reflected by the analysis chip is detected. The information outputted by the excitation light irradiation part is acquired.

Abstract: A shippable data transfer device includes a data storage medium encased in a chamber surrounded by an anti-tamper casing. The anti-tamper casing includes an anti-tamper layer with identifying elements arranged in a unique or otherwise identifiable pattern. The anti-tamper layer is configured to actively re-arrange, alter, or obscure the identifying elements in response to a breach of the anti-tamper casing.

Abstract: A method, system, and apparatus for rendering a security mark on a recording medium can involve creating a metameric pair of fluorescent inks with a first fluorescent ink among the metameric pair of fluorescent inks that blocks UV light and a second fluorescent ink among the metameric pair of fluorescent inks that does not block UV light, configuring at least one fluorescent ink among the metameric pair of fluorescent inks with a first pattern based on a constant pixel high surface and at least one other fluorescent ink among the metameric pair of fluorescent inks with a second pattern based on a substantial amount of white space, and defining a security mark for rendering on a recording medium with the metameric pair of fluorescent inks and based on the first pattern and the second pattern.

Abstract: A process is disclosed to precisely control the total amount of UV energy applied to images printed onto the exterior of a 3D object, such as a container like a wine bottle. The process includes establishing a UV dosage energy value to optimally cure an applied layer of ink expressed via an inkjet printing head onto the surface of the object, doing a partial cure of a printed ink layer, using a formula to calculate a power scale factor for the printed 3D object, and then based on the power scale factor tailoring a final cure step by controlling the amount of UV energy applied to the object to obtain an optimum cure result on the 3D object. The process allows for the control of a number of variables in the printing system to consistently apply an optimal amount of UV energy to the printed images.

Abstract: A flow reactor has a fluidic module with a first major outer surface. The module contains a fluid passage and has a transmittance through the first major outer surface to the fluid passage of at least 20% over a range of wavelengths. The reactor has an illumination module comprising one or more radiation sources, which can emit within the range, positioned within an enclosure. The enclosure has a back wall and a side wall and an opening opposite the back wall. An edge of the side wall surrounds the opening. The illumination module is positioned such that the opening of the illumination module faces the first major outer surface of the fluidic module. The side wall comprises a telescoping portion such that a distance from the back wall of the enclosure to the edge of the side wall is adjustable.

Abstract: A cleaning and sanitizing apparatus for handheld devices may comprise a cuboid-shaped unit body having a top end and a base end, a slot opening, a user interface and microcontroller system for governing the individual components of the said cleaning and sanitizing apparatus for handheld devices, a gripping and carriage apparatus, a removeable cleaning solution reservoir, a pump and sprayer apparatus for dispensing cleaning solution, a moveable cleaning roller apparatus for cleaning the surfaces of handheld devices as such devices are lowered into and raised from the said unit body, and an irradiation chamber located at the base of the cuboid shaped body including at least one germicidal ultraviolet lamp array housed inside the said unit body. The apparatus may further comprise a wireless induction charging module configured to charge a handheld device while the handheld device is within the enclosure or compartment.

Abstract: A shippable data transfer device includes a data storage medium encased in a chamber surrounded by an anti-tamper casing. The anti-tamper casing includes an anti-tamper layer with identifying elements arranged in a unique or otherwise identifiable pattern. The anti-tamper layer is configured to actively re-arrange, alter, or obscure the identifying elements in response to a breach of the anti-tamper casing.

Abstract: A disinfectant transmissive material incorporated into a case for a mobile device or a supporting surface of a disinfecting charger to enable disinfection of hard to reach areas. The case can be self-disinfecting. The disinfecting charger can have monitoring and safety systems that detect proximity and provide user feedback on safety, disinfection, and charge status along with automatic interlocks to protect the user from overexposure to disinfectant.

Abstract: Sealing a package with a visually transparent sealing label is described. The visually transparent sealing label contains an ultraviolet blocking component to prevent transmission of ultraviolet radiation through the label to the surface of the package. The package comprises an activatable component that upon excitation with ultraviolet radiation emits luminescence. The presence of the sealing label on the package may be verified by illuminating the sealing label with ultraviolet radiation and by observing whether the level of luminescence from the package material under the sealing label is lower than a limit value.

Abstract: A security feature has a plurality of luminescent surface elements, wherein luminescence lifetime varies between the surface elements. In order to verify the security feature, a lock-in imager is used. The security feature is illuminated with excitation light, which is intensity-modulated with a modulation frequency. The luminescent light emitted by the security feature is detected synchronously with the modulation frequency in a plurality of pixels. This is used to determine a measure of a phase shift between the excitation light and the luminescent light in different pixels. The security feature is verified taking account of the measure of the phase shift in different pixels.

Abstract: A fluid flow orifice locating system for locating fluid flow orifices on a component includes a light source, an image capture device, and a controller operably connected to the image capture device. The controller is configured and disposed to create a fluid flow orifice map of the component based on contrast differences on a surface of the component.

Abstract: There is provided a production method of a resin composite module for a vehicle, which includes a resin module substrate, and a silicone-based polymer hard coat which is formed on the resin module substrate. The method includes forming the hard coat by coating a silicone-based polymer onto the resin module substrate, and radiating an ultraviolet ray onto at least a part of a surface of the hard coat such that a hardness thereof becomes 0.8 GPa or more as evaluated by a nanoindentation method. The radiating the ultraviolet ray uses a light source unit which includes a light source and emits an ultraviolet ray having a wavelength of 360 nm or less from an emission surface thereof and radiates the ultraviolet ray onto the surface of the hard coat while a distance from the emission surface to the surface of the hard coat is 10 mm or less.

Abstract: An enterprise threat detection (ETD) forensic workspace is established according to a particular timeframe and permitting defining a selection of data types from available log data for an evaluation of events associated with one or more entities. A chart is defined illustrating a graphical distribution of a particular data type in the forensic workspace. A snapshot associated with the chart is generated, the snapshot saving a copy of all data necessary to re-create the chart into an associated snapshot object. The snapshot is associated with a snapshot page for containing the snapshot and the snapshot page is saved within the ETD forensic workspace.

Abstract: An apparatus for destroying pathogens includes a platform and an LED matrix panel. The platform has a portion configured to permit passage of ultraviolet light therethrough. The LED matrix panel is disposed below the portion of the platform and includes a grid and a plurality of discreetly-controlled, ultraviolet light LEDs (UV LEDs). The grid defines a plurality of cells. Each UV LED is associated with one cell such that the cells direct the ultraviolet light emitted by the UV LEDs upwardly through the portion of the platform to sanitize an object supported on the portion of the platform.

Abstract: The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply pulsed voltage to the pair of electrodes, a wavelength selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, and a controller. The controller is configured to measure a duty in a predetermined period before starting the second burst oscillation and a length of a suspension period from a time of ending the first burst oscillation to a time of starting the second burst oscillation, and perform a first control of the spectral width varying unit based on the duty and the length of the suspension period.

Abstract: An apparatus for destroying pathogens includes a platform and an LED matrix panel. The platform has a portion configured to permit passage of ultraviolet light therethrough. The LED matrix panel is disposed below the portion of the platform and includes a grid and a plurality of discreetly-controlled, ultraviolet light LEDs (UV LEDs). The grid defines a plurality of cells. Each UV LED is associated with one cell such that the cells direct the ultraviolet light emitted by the UV LEDs upwardly through the portion of the platform to sanitize an object supported on the portion of the platform.

Abstract: Embodiments of a photoarray system are provided. In one embodiment, a photoarray system includes a lixel array comprising a plurality of lixels each supporting one or more radiation sources; a power source associated with the lixel array; and a control system associated with the power source and each of the radiation sources, the control system comprising a master processor-readable medium configured to store at least a portion of data that specifies at least one lixel illumination pattern, the control system further comprising master processing structure configured to regulate use of power individually by each of the radiation sources based on the at least one lixel illumination pattern.

Abstract: The present invention refers to a device for sensing photoluminescent materials, said device comprising at least a source of light configured to generate a beam of light that is transmitted to the outside of said device and hits a photoluminescent material; a photon counting detector configured to receive a response light generated by the illumination of photoluminescent material with said beam of light and convert it into an electrical signal; a signal processing electronic system configured to process said generated electrical signal; and a signal transmission means configured to transmit the signals generated by the said signal processing electronic system towards the outside of the said device.

Abstract: Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.

Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract: An apparatus for destroying pathogens includes a platform and an LED matrix panel. The platform has a portion configured to permit passage of ultraviolet light therethrough. The LED matrix panel is disposed below the portion of the platform and includes a grid and a plurality of discreetly-controlled, ultraviolet light LEDs (UV LEDs). The grid defines a plurality of cells. Each UV LED is associated with one cell such that the cells direct the ultraviolet light emitted by the UV LEDs upwardly through the portion of the platform to sanitize an object supported on the portion of the platform.

Abstract: A solution for disinfecting flowable products, such as liquids, suspensions, creams, colloids, emulsions, powders, and/or the like, as well as accessories and products relating thereto, such as containers, caps, brushes, applicators, and/or the like, using ultraviolet radiation is provided. In an embodiment, an ultraviolet impermeable cap is configured to enclose a volume corresponding to a flowable product. At least one ultraviolet radiation source can be mounted on the cap and be configured to generate ultraviolet radiation for disinfecting the enclosed area. The ultraviolet radiation source can be configured to only generate ultraviolet radiation when the volume is enclosed by the ultraviolet impermeable cap.

Abstract: This disclosure provides methods and systems for mitigating pathogen transmission via a touch surface of a touch input device. Mitigation is accomplished through selective touch surface sterilization and through touchscreen user interface reorganization. The touch surface includes a pixel array for illuminating selected portions of the touch surface with ultraviolet light of a sterilization wavelength based upon the received touch inputs. The selective illumination may occur while receiving a touch input or after an accumulation of touch inputs have been received. The user interface may also be reorganized based on received touch inputs in order to locate user interface icons to lesser touched locations of the touch surface.

Abstract: Various embodiments provide systems and methods for extreme ultraviolet (EUV) lithography light source. An exemplary system can include a laser radiation apparatus configured to provide laser radiation. The system can further include an EUV light excitation source material configured to receive the laser radiation to generate an EUV light. The laser radiation can generate droplets from the EUV light excitation source material. The system can further include a collector configured to collect the EUV light. The collector can include a plurality of reflective mirrors surrounding the EUV light excitation source material. The plurality of reflective mirrors can be movable. The collector can further include a mirror control system synchronized with the laser radiation apparatus and configured to set the plurality of reflective mirrors to be in one of a reflective state for reflecting the EUV light and a non-reflective state for preventing contamination by the droplets.

Abstract: The present invention relates to a self-powered, footwear sanitizing system configured to substantially neutralize biological contaminants on the soles of shoes when a wearer of the shoes steps onto the system, the system has a method to generate sanitizing radiation of 254 nm (UVC), a means for delivering sanitizing radiation from the mat to the underside of a wearer's shoes and a piezo-electric or mechano-luminescence generator to power the system.

Abstract: A defect detection system for an extreme ultraviolet lithography mask comprises an extreme ultraviolet light source (1), extreme ultraviolet light transmission parts (2, 3), an extreme ultraviolet lithography mask (4), a photon sieve (6) and a collection (7) and analysis (8) system. Point light source beams emitted by the extreme ultraviolet light source (1) are focused on the extreme ultraviolet lithography mask (4) through the extreme ultraviolet light transmission parts (2, 3); the extreme ultraviolet lithography mask (4) emits scattered light and illuminates the photon sieve (6); and the photon sieve (6) forms a dark field image and transmits the same to the collection (7) and analysis (8) system. The defect detection system for the extreme ultraviolet photolithographic mask uses the photon sieve to replace a Schwarzchild objective, thereby realizing lower cost, relatively small size and high resolution.

Abstract: A lithographic apparatus comprises an illumination system configured to condition a radiation beam, a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, and a sensor. The sensor (S) comprises a photodiode (2) provided on a face (8) of a semiconductor substrate (4) towards which the radiation beam is directed during operation of the lithographic apparatus, a first radiation blocking material (10) being provided around the photodiode on the face of the semiconductor substrate, and a second radiation blocking material (12) is provided on a side (14) of the semiconductor substrate upon which the radiation beam is incident during operation of the lithographic apparatus.

Abstract: A gas analyzing apparatus includes a gas analyzing unit, a luminescence inducing component generating unit, and a measurement signal calculating unit. The gas analyzing unit receives a sample gas containing a component gas and/or a standard gas and the luminescence inducing gas. The gas analyzing unit is configured to output a detection signal based on an intensity of a reaction light generated by the interaction between the component gas and the luminescence inducing component. The luminescence inducing component generating unit generates the luminescence inducing gas by electric discharge generated repeatedly at specified intervals. The measurement signal calculating unit calculates a first measurement signal based on a first detection signal, based on the reaction light generated when the sample gas and the luminescence inducing gas are introduced, and a second detection signal, based on the reaction light generated when the standard gas and the luminescence inducing gas are introduced.

Abstract: A method of producing electrons via photoemission comprising providing diamond doped p-type with boron, treating a surface of the diamond by exposing it to atomic hydrogen inside an ultrahigh vacuum chamber, illuminating the surface with photons, and extracting the photoemitted electrons. A chemically stable visible light photoemission electron source comprising a diamond film having a surface terminated with hydrogen and a light source.

Abstract: Radiation detection is disclosed. A radiation detection package includes a radio-photoluminescent glass (RPLG), an EMR source and a photodetector. The EMR source includes an input lead, and is configured to emit first energy in a predetermined band of EMR in a downstream direction toward the RPLG in response to receipt of an input signal on the input lead of the EMR source. The photodetector has an output lead, and is configured to detect second energy that is emitted by the RPLG in an emission band of EMR in response to the receipt of the first energy in the predetermined band of EMR, and generate a first output signal on the output lead indicative of an amount of the second energy.

Abstract: A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted by radial field lines to a large area annular array of beam dumps.

Abstract: The invention provides a novel class of xanthene dyes, some of which are functionalized to allow their coupling to conjugation partners of interest, e.g. biomolecules, drugs, toxins and the like. Also provided are conjugates of the dyes, methods of preparing and using the dyes and their conjugates and kits including the dyes and their conjugates.

Abstract: A solution for disinfecting flowable products, such as liquids, suspensions, creams, colloids, emulsions, powders, and/or the like, as well as accessories and products relating thereto, such as containers, caps, brushes, applicators, and/or the like, using ultraviolet radiation is provided. In an embodiment, an ultraviolet impermeable cap is configured to enclose a volume corresponding to a flowable product. At least one ultraviolet radiation source can be mounted on the cap and be configured to generate ultraviolet radiation for disinfecting the enclosed area. The ultraviolet radiation source can be configured to only generate ultraviolet radiation when the volume is enclosed by the ultraviolet impermeable cap.

Abstract: Disclosed is a disinfecting docking station for at least one portable electronic device, such as a medical technician's tablet computer, that has at least one recharging connector. An enclosure is adapted to receive the at least one portable electronic device therein through an openable side that includes a selectively closable door. Each electronic device is exposed to a disinfecting wavelength of light, such as UV light, to disinfect the surface of the device. The enclosure includes supports that minimally contact each device so that the device will be substantially exposed to the UV light. A control circuit monitors the exposure time and level, and is programmable to activate the UV light based on pre-set criteria. The enclosures may be stacked and provide power and network connectivity to each device while docked therein.

Abstract: This specification relates to an improved method, process and apparatus for disinfecting and sterilizing all types of surfaces and indoor air and room air contaminated with microorganisms. The improved apparatus consists of a multi-wavelength narrow spectral width UV source that is more effective than mercury based 254 nm germicidal lamps for destroying the DNA and outer shell or membrane of virus, bacteria, spores and cists.

Abstract: A curing machine to cure a UV-curable adhesive adhering on a workpiece, the workpiece having a slot thereon and a hole on a sidewall of the slot. The hole receives the UV-curable adhesive, the curing machine can include a curing mechanism. The curing mechanism can include a base plate holding a curing assembly and the curing assembly can include a holding member, at least one UV lamp being coupled to the holding member. Axis of the at least one UV lamp can intersect with the holding member at an angle of less than 90 degrees. A workpiece being positioned on the base plate, the UV lamp can irradiate directly an inside or an outside of a sidewall through the hole in the sidewall of the slot.

Abstract: A lens and reflector unit for optical measurements includes first and second convex surface sections of the lens and reflector unit. Both have their respective central normal lines. A first flat surface section has a normal direction that divides the angle between the central normal lines into equal halves. A third convex surface section has a third central normal line, and the fourth convex surface section has a fourth central normal line. A second flat surface section has a normal direction that divides the angle between the third and fourth central normal lines into to equal halves.

Abstract: There is provided a particle detector that detects biogenic particles with high sensitivity. The particle detector includes a collecting member having a principal surface and configured to electrostatically collect particles on the principal surface, an irradiation unit configured to irradiate the particles collected on the principal surface with excitation light, a light receiving unit configured to receive fluorescence emitted from the particles by irradiation of the particles with the excitation light, and a detection unit configured to detect biogenic particles from the particles collected on the principal surface on the basis of a fluorescence intensity in the light receiving unit. The particle detector further includes a filter disposed between the principal surface and the light receiving unit cut light with a wavelength emitted by irradiation of the excitation light from a substance that is generated on the principal surface when the particles are electrostatically collected.

Abstract: An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.

Abstract: An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.

Abstract: A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.

Abstract: Some aspects of the invention may be related to an ultraviolet (UV) water disinfection system and a method of assembling such system. The system may be designed to treat, inactivate, disintegrate and/or remove at least two predetermined different types of contaminations. The system may include a chamber to carry the water containing the predetermined types of contaminations. The system may further include one or more first-type UV lamps having a first UV emission spectrum and one or more second-type UV lamps having a second UV emission spectrum different than the first spectrum. A location of the one or more first-type UV lamps and the one or more second-type UV lamps may be determined such that a combined UV impact function matches with a combined sensitivity response function of the two or more predetermined different types of contaminations in the water each having a different response function.

Abstract: A radiation source for generating EUV from a stream of molten fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporize at least some of the droplets of fuel, whereby radiation is generated. The fuel droplet generator has a nozzle, a feed chamber, and a reservoir, with a pumping device arranged to supply a flow of fuel in molten state from the reservoir through the feed chamber and out of the nozzle as a stream of droplets. The feed chamber has an outer face in contact with a drive cavity filled with a liquid, and the liquid is driven to oscillate by a vibrator with the oscillation transmissible to the molten fuel in the feed chamber from the outer face of the feed chamber through the liquid.

Abstract: The invention relates to a method for realizing a vacuum in at least one vacuum chamber. The method comprises providing an arrangement comprising a plurality of vacuum chambers, wherein each vacuum chamber is connected to a shared vacuum system. The shared vacuum system comprises a plurality of turbo molecular pumps, at least one common fore pump, and a piping system comprising one or more pipes for connecting the at least one common fore pump to each of the plurality of turbo molecular pumps. Each turbo molecular pump is separately connected to a corresponding vacuum chamber. The piping system further comprises flow regulators for controlling a flow within the piping system. The method further comprises selecting at least one vacuum chamber for pump-down, and separately pumping down the at least one selected vacuum chamber by means of the shared vacuum system.

Abstract: A regenerative ring resonator in the path of a light beam includes a discharge chamber having electrodes and a gain medium between the electrodes; an optical coupler that is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler; and an attenuation optical system in the path of the light beam within the resonator, the attenuation optical system having a plurality of distinct attenuation states, with each attenuation state defining a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the light beam.

Abstract: The invention relates to extreme ultraviolet “EUV” radiation generating systems that include a vacuum chamber where a target material can be positioned at a target position for generation of EUV radiation, and a beam guiding chamber for guiding a laser beam from a driver laser device towards the target position. The EUV radiation generating apparatus includes an intermediate chamber which is arranged between the vacuum chamber and the beam guiding chamber, a first window which seals the intermediate chamber in a gas-tight manner for entry of the laser beam from the beam guiding chamber and a second window which seals the intermediate chamber in a gas-tight manner for exit of the laser beam into the vacuum chamber. The invention also relates to a method for operating the EUV radiation generating apparatus.