Methods Patents (Class 250/424)
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Patent number: 8710473Abstract: A droplet generation and detection device may include: a droplet generation unit for outputting a charged droplet; at least one droplet sensor including a magnetic circuit including a coil configured of an electrically conductive material, the magnetic circuit being disposed such that the charged droplet passes around the magnetic circuit, and a current detection unit for detecting current flowing in the coil and outputting a detection signal; and a signal processing circuit for detecting the charged droplet based on the detection signal.Type: GrantFiled: October 28, 2011Date of Patent: April 29, 2014Assignee: Gigaphoton Inc.Inventors: Hakaru Mizoguchi, Kouji Kakizaki, Osamu Wakabayashi, Masahiro Inoue
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Publication number: 20140110598Abstract: Various embodiments provide an ion source device and a method for providing the ion source. An exemplary ion source device can include an arc chamber, a filament, a reflector, a slit outlet, a source gas inlet, and/or a cleaning gas inlet. The filament can be configured to generate thermo-electrons in the arc chamber. The reflector can be configured to reflect the thermo-electrons back to the arc chamber. The slit outlet can be configured to exit a gaseous material out of the arc chamber. The source gas inlet and the cleaning gas inlet can be located on a same sidewall of the arc chamber configured to respectively introduce an ion source gas and an inert cleaning gas into the arc chamber.Type: ApplicationFiled: December 3, 2013Publication date: April 24, 2014Applicant: Semiconductor Manufacturing International (Shanghai) CorporationInventors: LULEI WU, LEON SHAN, CHUNRONG DONG
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Patent number: 8704171Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.Type: GrantFiled: November 20, 2012Date of Patent: April 22, 2014Assignee: MKS Instruments, Inc.Inventors: Timothy Roger Robinson, Mark Attwood, Xing Chen, William M. Holber, Mark Philip Longson, Jonathan Henry Palk, Ali Shajii, John A. Smith
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Publication number: 20140103205Abstract: An ion source is formed by a chamber 2. A capillary tube 6 forms an inlet to the chamber. A heater 7 is associated with the capillary tube to heat air drawn into the chamber. An electrode 4 is provided in the chamber and maintained at a voltage in the range 100 to 500 volts. In use the source is connected to an analyser such as a mass spectrometer 10. The capillary tube is open to the atmosphere. Pressure in the chamber is reduced, and pressure in the analyser is further reduced. An electrical potential is applied to the electrode to create a discharge within the chamber. Ionisation of air molecules within the chamber leads to ionisation of any sample molecules present in the chamber. Ions are swept into the analyser for analysis.Type: ApplicationFiled: October 15, 2013Publication date: April 17, 2014Applicant: Scientific Analysis Instruments LimitedInventors: Victor Carl Parr, Alex Pollard
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Patent number: 8698114Abstract: An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.Type: GrantFiled: February 5, 2013Date of Patent: April 15, 2014Assignee: Gigaphoton Inc.Inventors: Masato Moriya, Hideo Hoshino, Hakaru Mizoguchi, Osamu Wakabayashi
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Patent number: 8692208Abstract: An ion supply device includes an ion generator for generating ions for removing static electricity, a carrier gas supply unit for supplying to the ion generator a carrier gas for carrying the ions generated in the ion generator, and an ion supply nozzle for blowing the ions and the carrier gas from the ion generator through a blow-off opening toward an electricity removal target from which static electricity is to be removed. A slit is provided at the blow-off opening and has an increased width as the slit gets distant from the electricity removal target. The ion supply nozzle includes an internal flow path and a plurality of internal fins provided at a portion of the internal flow path near the blow-off opening so that the ions and the carrier gas blown from the slit is uniformly distributed along a lengthwise direction of the slit.Type: GrantFiled: April 26, 2013Date of Patent: April 8, 2014Assignee: Tokyo Electron LimtedInventor: Yudo Sugawara
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Publication number: 20140083976Abstract: A cluster beam generating method that generates a cluster beam includes steps of mixing a gas source material and a liquid source material in a mixer; supplying a cluster beam including clusters originating from the gas source material and clusters originating from the liquid source material that are mixed in the mixer from a nozzle; and adjusting a temperature of the nozzle using a temperature adjusting portion that adjusts a temperature of the nozzle, thereby controlling a ratio of the clusters originating from the gas source material and the clusters originating from the liquid source material in the cluster beam.Type: ApplicationFiled: November 29, 2013Publication date: March 27, 2014Applicants: Tokyo Electron Limited, HYOGO PREFECTUREInventors: Noriaki TOYODA, Isao YAMADA, Masaki NARUSHIMA
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Patent number: 8681471Abstract: An ion generator 10a has an ejection head 18 as an opposite electrode and a discharge electrode 16, and generates air ions by corona discharge. A nozzle 14 supporting the discharge electrode 16 is attached to a base member 12 formed with an air supply path 11, and the nozzle 14 is formed with an exposure surface 24 for exposing the tip end portion 16b of the discharge electrode 16 and a tapered surface 25. The nozzle 14 is formed with air guide holes 26 which communicate with the air supply path 11, and ejection ports of the air guide holes 26 are open on the tapered surface 25. Compressed air ejected from the ejection port is flowed along the tapered surface 25 so that outside air surrounding the nozzle 14 is involved in the compressed air, and sprayed in a front direction of the discharge electrode 16.Type: GrantFiled: April 14, 2011Date of Patent: March 25, 2014Assignee: Koganei CorporationInventor: Yoshinari Fukada
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Patent number: 8680482Abstract: A method for aligning the axis of an atom beam with the orientation of an electric field at a particular location within an enclosure for use in creating a charged particle source by photoionizing a cold atom beam. The method includes providing an atom beam in the enclosure, providing a plurality of electrically conductive devices in said enclosure, evacuating the enclosure to a pressure below about 10?6 millibar, and aligning the axis of the atom beam with the orientation of the electric field, relative to each other, within less than about two degrees. Alignment may be facilitated by applying at least one voltage to the electrically conductive devices, mechanically tilting the atom beam's axis orientation of the electric field relative to each other and/or causing a deflection of the atom beam.Type: GrantFiled: August 8, 2013Date of Patent: March 25, 2014Assignee: The United States of America, as represented by the Secretary of Commerce, NISTInventors: Jabez J. McClelland, Brenton J. Knuffman, Adam V. Steele
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Patent number: 8674321Abstract: The present invention provides a method of obtaining a bright source of ions with narrow energy spread for focused ion beam applications using micro plasmas. As a preferred embodiment, a high pressure microplasma source operating in a normal glow discharge regime is used to produce a cold bright focused beam of Xe+ and/or Xe2+ ions having ion temperature of the order of 0.5-1 eV and a current density on the order of 0.1-1 A/cm2 or higher.Type: GrantFiled: May 22, 2012Date of Patent: March 18, 2014Assignee: Tiza Lab, L.L.C.Inventors: Vladimir V. Makarov, Sergey Macheret
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Publication number: 20140070094Abstract: An ionization device includes: a holding portion configured to hold a sample; a probe configured to arrange a liquid on a surface of the sample to form a liquid bridge between the probe and the sample; an electrode configured to form, at the probe, a Taylor cone for ionizing a substance contained in the sample, and to release the ionized substance from the Taylor cone; a voltage applying unit configured to apply a voltage to the electrode; and a light source configured to emit laser light that irradiates the Taylor cone. A mass spectrometer including the ionization device, and an image display system including the mass spectrometer are also disclosed.Type: ApplicationFiled: September 4, 2013Publication date: March 13, 2014Applicant: CANON KABUSHIKI KAISHAInventor: Yoichi Otsuka
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Publication number: 20140061500Abstract: An atmospheric pressure ion source, employing the principle of electrospray ionization, chemical ionization, or photo-ionization, comprises a spray probe for spraying a liquid into an ionization chamber and has an exhaust port through which residual spray mist and waste gas, such as evaporated solvent, are extracted. The ion source further comprises an exhaust system comprising a conduit which is connected to the exhaust port. The conduit has a transition from a first cross-section to a second cross section at a point downstream of the exhaust port wherein the second cross section is reduced in relation to the first cross section. Gas is injected via a gas injector into the conduit in a region of the transition to create a low pressure region that removes unwanted material from the chamber.Type: ApplicationFiled: September 3, 2012Publication date: March 6, 2014Applicant: BRUKER DALTONICS, INC.Inventors: Zicheng YANG, Roy P. MOELLER, Stephen ZANON
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Publication number: 20140061501Abstract: A novel composition, system and method thereof for improving beam current during silicon ion implantation are provided. The silicon ion implant process involves utilizing a first silicon-based co-species and a second species. The second species is selected to have an ionization cross-section higher than that of the first silicon-based species at an operating arc voltage of an ion source utilized during generation and implantation of active silicon ions species. The active silicon ions produce an improved beam current characterized by maintaining or increasing the beam current level without incurring degradation of the ion source when compared to a beam current generated solely from SiF4.Type: ApplicationFiled: August 28, 2013Publication date: March 6, 2014Inventors: Ashwini K. Sinha, Lloyd Anthony Brown, Serge Marius Campeau
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Patent number: 8664622Abstract: An apparatus comprises an ionization chamber for providing ions during a process of ion implantation, and an electron beam source device inside the ionization chamber. The electron beam source device comprises a field emission array having a plurality of emitters for generating electrons in vacuum under an electric field.Type: GrantFiled: April 11, 2012Date of Patent: March 4, 2014Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Hong Hwang, Chun-Lin Chang, Chi-Ming Yang, Chin-Hsiang Lin, Wen-Yu Ku
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Patent number: 8664000Abstract: Electrospray ionization techniques are used to generate reagents that ionize analytes for mass spectrometric analysis by charge transfer. Such techniques may be performed under ambient conditions. Suitable precursors for such reagents include ionizable nonpolar solvents, such as toluene or xylenes, polar solvents, such as water or alchohols, inert gases, such as helium or nitrogen, or combinations thereof. Environmental conditions in the ionization chamber of the mass spectrograph can be manipulated to generate a selected ion of an analyte in preference to other ions.Type: GrantFiled: August 30, 2012Date of Patent: March 4, 2014Assignee: The Trustees of the Stevens Institute of TechnologyInventors: Zhihua Yang, Athula Buddhagosha Attygalle
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Patent number: 8664621Abstract: This device (2) for generating an ion beam (4) including a liquid metal ion source (18) is characterized in that the ion source is surrounded by a cryogenic trap (28) maintained at a low temperature, this cryogenic trap being able to trap volatile chemical species (G) by condensing them before they can reach the ion source.Type: GrantFiled: September 14, 2009Date of Patent: March 4, 2014Assignee: Centre National de la Recherche Scientifique (C.N.R.S.)Inventors: Jacques Gierak, Ralf Jede
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Publication number: 20140054471Abstract: The present invention concerns a device for shaping an electron beam of a machine for intraoperative radiation therapy (IORT—Intra Operative Radiation Therapy) using a tubular applicator (3) having a duct through which the electron beam is transmitted, the device being characterised in that it comprises a slab (1), provided with a hole (2) corresponding to the duct of the tubular applicator (3), and at least one planar element (10) comprising an upper plate (11) and a lower plate (12) removably attachable to each other through first mechanical coupling means (13), said at least one planar element (10) being removably attachable to the slab (1) through second mechanical coupling means (13, 14) so that the arrangement of said at least one planar element (10) with respect to the slab (1) is adjustable so as to define an aperture (20) of lower area than that of the section of the duct of the tubular applicator (3), the upper plate (11) of each planar element (10) being made of a first sterilisable biocompatible mType: ApplicationFiled: October 13, 2011Publication date: February 27, 2014Applicant: S.I.T. - Sordina IORT Technologies S.p.A.Inventors: Giuseppe Felici, Alessia Ciccotelli, Vincenzo Iacoboni, Fabio De Angelis, Nicola Mangiaracina, Aquilino Gava
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Publication number: 20140054470Abstract: A method for optimizing performance of a static neutralizing power supply coupled to a controller and configured to provide an output to at least one ionizer includes, (a) during a first time period, sensing a current flow to the at least one ionizer, and (b) comparing, in the controller, an expected current flow to the sensed current flow. A difference between the expected and sensed current flows is proportional to a charge on an object to be neutralized proximate the at least one ionizer. The method further includes (c) adjusting, by the controller and based on the comparison, one or more properties of the output to the at least one ionizer to neutralize the charge on the object during a second time period following the first time period, and (d) periodically repeating steps (a)-(c) for successive first and second time periods.Type: ApplicationFiled: August 22, 2012Publication date: February 27, 2014Applicant: ILLINOIS TOOL WORKS INC.Inventors: John A. GORCZYCA, Manuel C. BLANCO, Steven J. MANDRACHIA
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Patent number: 8653474Abstract: The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.Type: GrantFiled: February 28, 2013Date of Patent: February 18, 2014Assignee: FEI CompanyInventors: Roderick Boswell, Orson Sutherland
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Publication number: 20140042337Abstract: A wide ion beam source includes a plurality of RF windows arranged in a predetermined relationship, a single plasma chamber disposed on a first side of the plurality of RF windows, a plurality of RF antennas, each RF antenna of the plurality of RF antennas disposed on a second side of a respective RF window of the plurality of RF windows, the second side being opposite the first side, and a plurality of RF sources, each RF source coupled to a respective RF antenna of the plurality of RF antennas, wherein a difference in frequency of a first RF signal produced by a first RF source coupled to a first RF antenna from that of a second RF signal produced by a second RF source coupled to an RF antenna adjacent to the first RF antenna is greater than 10 kHz.Type: ApplicationFiled: August 7, 2013Publication date: February 13, 2014Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Costel Biloiu, Joseph C. Olson, Edward W. Bell, Manny Sieradzki
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Publication number: 20140042336Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.Type: ApplicationFiled: March 8, 2013Publication date: February 13, 2014Applicant: KLA-TENCOR CORPORATIONInventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Alan Panzer
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Patent number: 8642975Abstract: To prevent a reduction in an amount of an ion emission while preventing generation of electromagnetic noise. A high-voltage generating circuit section (2) that supplies a high voltage to an ion generating element (1) that generates ions is housed in a housing (3), and sealed with filled resin (22). An emission port (12) for emitting the generated ions is formed in the housing (3), and an outer surface of the housing except the emission port is covered with a shield case (30). A passage port (33) communicating with the emission port is formed in the shield case. A periphery of the passage port of the shield case is covered with an electrically insulating covering sheet (36) so that emitted ions do not adhere to the shield case. The ions emitted from the emission port do not adhere to the shield case covered with the covering sheet.Type: GrantFiled: October 31, 2011Date of Patent: February 4, 2014Assignees: Sharp Kabushiki Kaisha, Denso CorporationInventors: Yoshiyuki Noda, Makoto Kitahira, Akihito Namikawa, Kenichi Kato, Kazushi Shikata
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Publication number: 20140027631Abstract: Disclosed herein are systems and methods that allow analysis of macromolecular structures using laserspray ionization at intermediate pressure or high vacuum using commercially available mass spectrometers with or without modification and with the application of heat. The systems and methods produce multiply-charged ions for improved analysis in mass spectrometry.Type: ApplicationFiled: October 25, 2011Publication date: January 30, 2014Applicant: WAYNE STATE UNIVERSITYInventor: Sarah Trimpin
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Patent number: 8633451Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).Type: GrantFiled: June 20, 2008Date of Patent: January 21, 2014Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, Colin A. Sanford, John Notte, IV, Alexander Groholski, Mark D. DiManna
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Patent number: 8624502Abstract: An ion source is disclosed including: a chamber disposed about a longitudinal axis and containing a gas, a magnetic confinement system configured to produce a magnetic field in a confinement region within the chamber, an electron cyclotron resonance driver which produces a time varying electric field which drives the cyclotron motion of electrons located within the confinement region, the driven electrons interacting with the gas to form a confined plasma. During operation, the magnetic confinement system confines the plasma in the confinement region such that a portion of atoms in the plasma experience multiple ionizing interactions with the driven electrons to form multiply ionized ions having a selected final ionization state.Type: GrantFiled: July 16, 2009Date of Patent: January 7, 2014Assignee: Alpha Source LLCInventor: Glenn B. Rosenthal
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Patent number: 8624181Abstract: A time-of-flight mass spectrometer (TOF MS) includes an ion gate, an ion guide downstream of the ion gate, and a TOF analyzer downstream of the ion guide. The TOF MS is operated with an adjustable duty cycle to limit the amount of ions entering a TOF analyzer and avoid saturating a detector system of the TOF MS. The duty cycle is adjusted by controlling the ion gate. The ion guide emits ions as a continuous beam, without trapping the ions. The ion guide may be operated as a collision cell. The TOF MS may also include a mass filter upstream of the ion guide.Type: GrantFiled: March 15, 2013Date of Patent: January 7, 2014Assignee: Agilent Technologies, Inc.Inventor: Kenneth Newton
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Publication number: 20130320202Abstract: A method for aligning the axis of an atom beam with the orientation of an electric field at a particular location within an enclosure for use in creating a charged particle source by photoionizing a cold atom beam. The method includes providing an atom beam in the enclosure, providing a plurality of electrically conductive devices in said enclosure, evacuating the enclosure to a pressure below about 10?6 millibar, and aligning the axis of the atom beam with the orientation of the electric field, relative to each other, within less than about two degrees. Alignment may be facilitated by applying at least one voltage to the electrically conductive devices, mechanically tilting the atom beam's axis orientation of the electric field relative to each other and/or causing a deflection of the atom beam.Type: ApplicationFiled: August 8, 2013Publication date: December 5, 2013Applicant: United States of America, as represented by the Secretary of Commerce, NISTInventors: Jabez McClelland, Brenton Knuffman, Adam Steele
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Patent number: 8592779Abstract: An ionizing device 2 includes an ionization chamber 2a having an ionization space 2b for ionizing sample molecules A, filaments 23a and 23b to have an electron impact on the sample molecules A in the ionization space 2b, to ionize the sample molecules A, and an electric discharge tube 29 to irradiate the sample molecules A in the ionization space 2b with ultraviolet light, to ionize the sample molecules A.Type: GrantFiled: March 16, 2007Date of Patent: November 26, 2013Assignees: Hamamatsu Photonics K.K., Rigaku CorporationInventors: Shigeki Matsuura, Yoshihiro Takata, Tadashi Arii, Satoshi Otake
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Publication number: 20130307405Abstract: A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transport ions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.Type: ApplicationFiled: July 22, 2013Publication date: November 21, 2013Applicant: ILLINOIS TOOL WORKS INC.Inventors: Aleksey KLOCHKOV, Peter GEFTER, Steven Bernard HEYMANN, Leslie W. PARTRIDGE, Greenberry Bedford BROWN, Matthew T. ANTONELLI
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Publication number: 20130306856Abstract: An ionization method for use with mass spectrometry or ion mobility spectrometry is a small molecule compound(s) as a matrix into which is incorporated analyte. The matrix has attributes of sublimation or evaporation when placed in vacuum at or near room temperature and produces both positive and negative charges. Placing the sample into a region of sub-atmospheric pressure, the region being in fluid communication with the vacuum of the mass spectrometer or ion mobility spectrometer, produces gas-phase ions of the analyte for mass-to-charge or drift-time analysis without use of a laser, high voltage, particle bombardment, or a heated ion transfer region. This matrix and vacuum assisted ionization process can operate from atmosphere or vacuum and produces ions from large (e.g. proteins) and small molecules (e.g. drugs) with charge states similar to those observed in electrospray ionization.Type: ApplicationFiled: May 21, 2013Publication date: November 21, 2013Inventors: Sarah Trimpin, Ellen dela Victoria Inutan
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Patent number: 8575565Abstract: An ion beam source that emits an ion beam in a direction of a substrate is provided. A cathode with a discharge opening defined therein is included. An anode is also included and spaced apart from the cathode. Ions are set to be emitted in an area proximate to the discharge opening in a direction similar to the direction from the anode to the discharge opening. First and second ceramic walls at least partially define a discharge channel between the anode and the cathode. At least one magnet generates a magnetic field in an area proximate to the discharge opening.Type: GrantFiled: October 10, 2011Date of Patent: November 5, 2013Assignee: Guardian Industries Corp.Inventor: Maximo Frati
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Patent number: 8569723Abstract: An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles including ion emitted from the plasma region toward the direction of the magnetic field, a first charged particle collector (receiver) mounted at both sides of an axis of the magnetic field in the magnetic field region in order to collect (receive) the charged particles converged by the magnetic field, a target supply unit supplying a target from a nozzle located outside a converging region in which the charged particles are to be converged inside the magnetic field region in an extreme ultraviolet light generating chamber, and a target collector located at a position opposite to the nozzle, the target retrieval portion retrieving a residual target which does not contribute to generation of the plasma.Type: GrantFiled: July 14, 2011Date of Patent: October 29, 2013Assignee: Gigaphoton Inc.Inventors: Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki, Tamotsu Abe
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Publication number: 20130277570Abstract: The invention relates to a device for performing electron capture dissociation on multiply charged cations. Provided is an electron emitter which, upon triggering, emits a plurality of low energy electrons suitable for efficient electron capture reactions to occur. Further, the device contains a particle emitter being located proximate to the electron emitter and being capable, upon triggering, to emit a plurality of high energy charged particles substantially in a direction towards the electron emitter in order that the electron emitter receives a portion of the emitted plurality of high energy charged particles and emission of the plurality of low energy electrons is triggered. A volume capable of containing a plurality of multiply charged cations is located in opposing relation to the electron emitter such that the volume receives the plurality of low energy electrons upon emission as to allow electron capture dissociation to occur.Type: ApplicationFiled: April 18, 2012Publication date: October 24, 2013Applicant: BRUKER DALTONICS, INC.Inventors: Melvin Andrew PARK, Desmond Allen KAPLAN
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Patent number: 8563924Abstract: An ionization device comprises: a plasma source configured to generate a plasma. The plasma comprises light, plasma ions and plasma electrons. The plasma source comprises an aperture disposed such that at least part of the light passes through the aperture and is incident on a gas sample. The ionization device further comprises an ionization region; and a plasma deflection device comprising a plurality of electrodes configured to establish an electric field, wherein the electric field substantially prevents the plasma ions from entering the ionization region.Type: GrantFiled: June 28, 2011Date of Patent: October 22, 2013Assignee: Agilent Technologies, Inc.Inventors: James Edward Cooley, Sameer Kothari
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Patent number: 8563945Abstract: In various embodiments of the invention, a cargo container can be monitored at appropriate time intervals to determine that no controlled substances have been shipped with the cargo in the container. The monitoring utilizes reactive species produced from an atmospheric analyzer to ionize analyte molecules present in the container which are then analyzed by an appropriate spectroscopy system. In an embodiment of the invention, a sorbent surface can be used to absorb, adsorb or condense analyte molecules within the container whereafter the sorbent surface can be interrogated with the reactive species to generate analyte species characteristic of the contents of the container.Type: GrantFiled: June 22, 2012Date of Patent: October 22, 2013Assignee: Ionsense, Inc.Inventor: Brian D. Musselman
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Publication number: 20130270454Abstract: An apparatus comprises an ionization chamber for providing ions during a process of ion implantation, and an electron beam source device inside the ionization chamber. The electron beam source device comprises a field emission array having a plurality of emitters for generating electrons in vacuum under an electric field.Type: ApplicationFiled: April 11, 2012Publication date: October 17, 2013Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Hong HWANG, Chun-Lin CHANG, Chi-Ming YANG, Chin-Hsiang LIN, Wen-Yu KU
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Patent number: 8558192Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10?2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.Type: GrantFiled: October 19, 2011Date of Patent: October 15, 2013Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, John Notte, IV, Randall G. Percival
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Publication number: 20130264475Abstract: Selective ionization at atmospheric or near atmospheric pressure of a sample diluted in air is provided in multiple steps. Initially, components of air and/or other gas are ionized to generate reactive ions. The reactive ions are then filtered using a high frequency filter to yield selected reactive ions. Thereafter, the selected reactive ions are reacted with sample molecules of a sample being analyzed in a charge transfer process. Depending on the properties of the sample molecules, the filter may select some reactive ions to enter the sample zone and block others entirely thus controlling ion chemistry and charge transfer yields in the sample zone. The described system is directed to controlling ions at the ion source level, using a high frequency filter technique, in connection with subsequent analysis. The method generates the ions of choice for subsequent analysis in such platforms as ion mobility and differential mobility spectrometers.Type: ApplicationFiled: April 8, 2013Publication date: October 10, 2013Applicant: Implant Sciences CorporationInventors: Dmitriy V. Ivashin, Said Boumsellek
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Patent number: 8552408Abstract: Provided is a particle beam irradiation apparatus capable of highly reliable measurement of a dose of each beam and capable of highly sensitive measurement of a leakage dose caused by momentary beam emission.Type: GrantFiled: February 7, 2011Date of Patent: October 8, 2013Assignees: Kabushiki Kaisha Toshiba, National Institute of Radiological SciencesInventors: Katsushi Hanawa, Yasushi Iseki, Nobukazu Kakutani, Takuji Furukawa, Taku Inaniwa, Shinji Sato, Kouji Noda
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Publication number: 20130255577Abstract: An apparatus to generate negative hydrogen ions includes an ion source operative to generate positive hydrogen ions, a first component to adjust positive molecular hydrogen ion species in the ion source, a second component to adjust extraction voltage for extraction of the positive molecular hydrogen ions from the ion source, and a charge exchange cell comprising charge exchange species to convert the extracted positive molecular hydrogen ions to negative hydrogen ions. The adjusted extraction voltage is effective to generate an ion energy to maximize negative ion current yield in the charge exchange cell based upon a product of extraction efficiency of the positive molecular hydrogen ions and a peak in charge exchange efficiency for converting a species of the positive molecular hydrogen ions to negative hydrogen ions through charge exchange between the extracted hydrogen ions and charge exchange species.Type: ApplicationFiled: March 13, 2013Publication date: October 3, 2013Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventor: Shengwu Chang
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Patent number: 8546753Abstract: An electrospray ion source apparatus comprises: a plurality of emitter capillaries, each comprising an internal bore for transporting a portion of a liquid sample from a source, an electrode portion for providing a first applied electric potential and an emitter tip for emitting a cloud of charged particles generated from the liquid sample portion; a counter electrode for providing a second applied electric potential different from the first applied electric potential; and at least one shield electrode disposed at least partially between the counter electrode and the emitter tip of at least one of the emitter capillaries for providing a third applied electric potential intermediate to the first and second applied electric potentials, wherein the at least one shield electrode is configured such that provision of the third applied electric potential to the at least one shield electrode minimizes electric field interference effects between the plurality of emitter capillaries.Type: GrantFiled: July 16, 2012Date of Patent: October 1, 2013Assignee: Thermo Finnigan LLCInventors: Viatcheslav V. Kovtoun, Eloy R. Wouters, R. Paul Atherton
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Patent number: 8541757Abstract: An assembly includes a cold ion source and a chip. The cold ion source is fixed to the chip so that ions from the ion source can enter an acceleration channel in the chip. In one specific example, the ion source includes an ion exchange membrane that produces cold ions in that the ions as produced have an energy of less than 30 eV. The chip includes a substrate (such as a semiconductor substrate or a glass substrate) and a dielectric layer disposed on substrate, where the acceleration channel is a channel formed into the dielectric layer. In one specific example, the assembly is part of a Direct Write On Wafer (DWOW) printing system. The DWOW printing system is useful in semiconductor processing in that it can direct write an image onto a 300 mm diameter wafer in one minute.Type: GrantFiled: August 14, 2012Date of Patent: September 24, 2013Assignee: Transmute, Inc.Inventors: Kim L. Hailey, Robert O. Conn
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Publication number: 20130234036Abstract: A laser-ablation plasma generator generates laser-ablation plasma from a target in a vacuum vessel. An ion beam extractor generates an ion beam by extracting ions included in the laser-ablation plasma from the vacuum vessel. An ion detector detects unintended ions other than intended ions, which are obtained by ionizing the elements in the target, out of ions in the vacuum vessel and outputs a detection signal representing a value which is a number of the unintended ions or a mixing ratio of the unintended ions to the intended ions as a detection result. The ion source using the laser beam makes it possible to normally monitor unintended ions other than intended ions out of ions in the vacuum vessel.Type: ApplicationFiled: February 20, 2013Publication date: September 12, 2013Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Akiko KAKUTANI, Kiyoshi HASHIMOTO, Kiyokazu SATO, Takeshi YOSHIYUKI, Tsutomu KURUSU
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Patent number: 8530853Abstract: A system for producing a charged particle beam from a photoionized cold atom beam. A vapor of neutral atoms is generated. From these atoms, an atom beam having axial and transverse velocity distributions controlled by the application of laser light is produced. The produced atom beam is spatially compressed along each transverse axis, thus reducing the cross-sectional area of the produced beam and reducing a velocity spread of the produced beam along directions transverse to the beam's direction of propagation. Laser light is directed onto at least a portion of the neutral atoms in the atom beam, thereby producing ions and electrons. An electric field is generated at the location of the produced ions and electrons, thereby producing a beam of ions traveling in a first direction and electrons traveling in substantially the opposite direction. A vacuum chamber contains the atom beam, the ion beam and the electron beam.Type: GrantFiled: February 8, 2012Date of Patent: September 10, 2013Assignee: The United States of America, as represented by the Secretary of Commerce, NISTInventors: Adam V. Steele, Brenton J. Knuffman, Jabez J. McClelland
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Patent number: 8530834Abstract: A method of enhanced speciation of both positive and negatives species in an analyte is disclosed. The method can include producing a first analyte solution comprising an analyte composition and an effective amount of silver triflate, and analyzing the first analyte solution with an electrospray ionization mass spectrometer. The method can also include producing a second analyte solution comprising a portion of the analyte composition and an effective amount of a compound of formula I, and analyzing the second analyte solution with an electrospray ionization mass spectrometer. The compound of formula I is [NX+][OH?], where X is a linear, branched, or cyclic C1-C10 alkane; an aryl; a heterocyclic aromatic; or a heterocyclic moiety.Type: GrantFiled: February 6, 2012Date of Patent: September 10, 2013Assignee: Florida State University Research Foundation, Inc.Inventors: Alan G. Marshall, Priyanka Juyal, Ryan P Rodgers
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Patent number: 8530854Abstract: Various technologies described herein pertain to a micro gas-puff based source of neutrons, x-rays, and/or energetic particles. The micro gas-puff based source can generate plasma, which can emit neutrons, x-rays, and the like. The micro gas-puff based source includes a diode, which further includes an anode and a cathode. Further, a chamber is between the anode and the cathode. Moreover, a MEMS gas supply can inject a puff of gas between the anode and the cathode within the chamber, where the MEMS gas supply shapes the puff of gas to form a quasispherical density profile of gas created in various of geometries. Further, a pulsed power supply applies a voltage across the anode and the cathode to cause compression of the puff of gas to form the plasma.Type: GrantFiled: October 9, 2012Date of Patent: September 10, 2013Assignee: Sandia CorporationInventors: Mark S. Derzon, Paul C. Galambos
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Patent number: 8530832Abstract: Improved apparatuses and methods are provided for ionizing samples and analyzing the samples with mass spectrometry.Type: GrantFiled: October 3, 2011Date of Patent: September 10, 2013Assignee: Agilent Technologies, Inc.Inventors: Alexander Mordehai, Mark H. Werlich, Craig P. Love, James L. Bertsch
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Patent number: 8525125Abstract: A liquid metal ion source for use in an ion mass spectrometric analysis method contains, on the one hand, a first metal with an atomic weight ?190 U and, on the other hand, another metal with an atomic weight ?90 U. One of the two types of ions are filtered out alternately from the primary ion beam and directed onto the target as a mass-pure primary ion beam.Type: GrantFiled: March 15, 2013Date of Patent: September 3, 2013Assignee: ION-TOF Technologies GmbHInventors: Felix Kollmer, Peter Hoerster, Andreas Duetting
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Patent number: 8526560Abstract: A method is provided for producing neutrons, comprising: providing a converter foil comprising deuterium clusters; focusing a laser on the foil with power and energy sufficient to cause deuteron ions to separate from the foil; and striking a surface of a target with the deuteron ions from the converter foil with energy sufficient to cause neutron production by a reaction selected from the group consisting of D-D fusion, D-T fusion, D-metal nuclear spallation, and p-metal. A further method is provided for assembling a plurality of target assemblies for a target injector to be used in the previously mentioned manner. A further method is provided for producing neutrons, comprising: splitting a laser beam into a first beam and a second beam; striking a first surface of a target with the first beam, and an opposite second surface of the target with the second beam with energy sufficient to cause neutron production.Type: GrantFiled: November 8, 2012Date of Patent: September 3, 2013Assignee: NPL Associates, Inc.Inventors: George H. Miley, Xiaoling Yang
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Patent number: RE44603Abstract: A non-radioactive atmospheric pressure device for ionization of analytes comprises an atmospheric pressure chamber having an inlet for carrier gas, a first electrode at one end, and a counter-electrode at the other end of the chamber for creating an electrical discharge in the carrier gas thus creating metastable neutral excited-state species. Optionally, a grid is provided to generate electrons or ions by contact with the excited-state species. The carrier gas containing the excited-state species or the electrons generated therefrom is directed at an analyte at atmospheric pressure near ground potential to form analyte ions.Type: GrantFiled: October 21, 2011Date of Patent: November 19, 2013Assignee: Jeol USA, IncInventors: Robert B. Cody, James A. Laramee