Abstract: A method and a portable device for assessing the occurrence of an agent in a sample. A sample is illuminated with photons emanating from a portable device to produce photons reflected, emitted, or absorbed from a set of multiple points in the sample having a defined geometric relationship. The portable device is used to simultaneously illuminate the sample and analyze the photons reflected, emitted, or absorbed from the set of multiple points using spectroscopic methods, including infrared, fluorescence, and UV/visible. The agent assessed may include a hazardous agent, a chemical agent, a biological agent, a microorganism, a bacterium, a protozoan, a virus, and combinations thereof.

Abstract: An illumination beam irradiation apparatus for use in pattern inspection systems is disclosed, which is less in deterioration of optical components and in attenuation of illumination light. The illumination apparatus includes a light source which yields a fundamental wave, a beam-shaper unit which performs beam-shaping of the fundamental wave so that this wave has a prespecified shape, and a pattern generator unit which operates, upon receipt of the beam-shaped fundamental wave, to convert this incoming wave into illumination light with a shorter wavelength to thereby generate illumination light of a prespecified shape. The illuminator also includes an image relay unit for guiding the illumination light that was generated by the pattern generator to fall onto a workpiece under inspection, such as a photomask or else.

Abstract: An adaptor is designed as an accessory to an ultraviolet transilluminator for the excitation of fluorescent molecules or labels in a planar array of biochemical samples such as a two-dimensional electrophoresis gel to enable the emissions resulting from the excitation to be detected and quantified. The adaptor is constructed to overlay the transilluminator and contains both a fluorescent dye that upon excitation by ultraviolet light emits light in the visible spectrum, and a conditioning substance that selects a portion of the wavelength band of the visible light produced by the fluorescent dye. The adaptor converts the ultraviolet light from the transilluminator to visible light while limiting the emissions reaching the detector to those that emanate from the sample. By the use of this adaptor, the transilluminator is adapted for use with samples labeled with dyes that are excitable by visible light and avoids exposure of the samples and the user to ultraviolet light.

Abstract: A measuring device for quantitative determination of optical characteristic values for detecting photo- and/or electrochemical decomposition reactions taking place on surfaces of photocatalytically active substrates.

Abstract: A method, apparatus and system for sorting contaminated glass from a stream of glass particles used light of a wavelength suited to inducing fluorescence in the contaminated glass pieces. Automatic cleaning mechanisms are included in some embodiments to facilitate removal of coatings which would prevent the contaminated particles from fluorescing. The identified particles are then automatically separated from the remaining particles.

Abstract: In an image reader, if a first and second light sources alternately light-up when a conveying unit conveys an imaging target medium, a visible light data group that is based on a reflected light, of a wavelength inside a visible spectrum, of a first light having a wavelength inside the visible spectrum and a visible light external data group that is based on the reflected light, of the wavelength inside the visible spectrum, of a second light having a wavelength outside the visible spectrum are alternately generated. By scanning the imaging target medium once and by collecting multiple visible light data group, first image data of the imaging target medium, based on the first light, is generated. Furthermore, by collecting multiple visible light external data group, second image data of the imaging target medium, based on the second light, is also generated.

Abstract: The present invention presents an exposure device, which includes an optical source for emitting a UV ray, a lighting system for shaping the UV ray into a collimated light beam, an aperture member for producing rectangular first and second light beams based on the light beam from lighting system by using the first and second rectangular windows, first and second spatial light modulators for spatially modulating the first and second light beams, respectively, and first and second projection lighting systems for guiding the modulated first and second light beams to the object.

Abstract: The disclosure relates generally to methods and apparatus for using telescope optics and a fiber array spectral translator-based (“FAST”) spectroscopic system for improved imaging, spectral analysis, and interactive probing of a sample. In an embodiment, the confocality of a fiber array spectral translator-based spectroscopic system is improved through the use of structured illumination and/or structured collection of photons. User input may be received and acted upon to allow a user to interactively in real time and/or near real time view and analyze specific regions of the sample.

Abstract: A system for use in analyzing a pharmaceutical composition having multiple constituents comprising a luminescence sensor, the sensor being adapted to direct a plurality of radiation pulses to the pharmaceutical composition and detect luminescence emitted from each composition constituent as a function of time, the sensor being further adapted to provide at least one luminescence signal corresponding to the detected luminescence of each constituent, and control means in communication with the sensor for controlling the sensor and analyzing the luminescence signal.

Abstract: A phosphor (photo-luminescent) material based authentication system in which a blend (mixture) of at least two, preferably three or more, phosphor materials are used as a photo-luminescent security marking which is applied to or incorporated within an article/document to be authenticated. Preferably, the phosphor materials are each excitable by “eye safe” excitation radiation comprising visible light of wavelength 380 nm to 780 nm. Moreover, when excited the security marking preferably also emits visible light thereby minimizing any risk of damage to an operator's eye in the event of accidental exposure to the excitation radiation and/or light generated by the photo-luminescent marking. The authenticity of the article/document can be authenticated by verification of the composition of the phosphor by exciting the marking and comparing one or more selected parameters of light emitted by the security marking with corresponding parameters of the characteristic emission spectrum of the authentic phosphor blend.

Abstract: A system for detecting atmospheric contamination, the system comprising a laser operable to generate an infrared light beam comprising a longitudinal component and a transverse component, the laser remote from the atmospheric contamination, and a processor operable to process a flouresence resulting from contact between the atmospheric contamination and an ultraviolet light being generated from the longitudinal and transverse components of the infrared light of the laser, wherein the processor determines the identity of the fluorescence by comparing the fluorescence to known fluorescence.

Abstract: An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

Abstract: A system for sanitizing an enclosed structure comprises a first sensor, a second sensor, a third sensor, a germicidal ultraviolet light source, a motor, and a controller. The first sensor detects the presence of humans or animals within the enclosed structure. The second sensor detects the position of at least one door of the enclosed structure. The third sensor detects tampering with the system. The ultraviolet light source provides electromagnetic radiation in the ultraviolet range. The motor moves the ultraviolet light source from an inactive position to an active position and from the active position to the inactive position. The controller receives inputs from the first sensor, the second sensor, and the third sensor, and transmits outputs to the ultraviolet light source and the motor.

Abstract: An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light source apparatus includes an EUV light generation chamber provided with a window, a driver laser which generates a laser beam, a concave lens which enlarges the laser beam, a convex lens which collimates the enlarged laser beam, a parabolic concave mirror which is arranged in the EUV light generation chamber and reflects the collimated laser beam to collect the laser beam to a target material, a parabolic concave mirror adjusting mechanism which adjusts position and angle of the parabolic concave mirror, an EUV light collector mirror which collects EUV light, and a purge gas supply unit which supplies a purge gas for protecting the window and the parabolic concave mirror.

Abstract: A method used to detect and identify biological substances suspended in air in the form of aerosols or clouds including generating a remote infrared light beam directed toward the atmospheric contamination, producing an ultraviolet light beam from the infrared light beam by compression via the air through which the IR beam travels, and producing fluorescence of the atmospheric contamination, when the generated ultraviolet light contacts the atmospheric contamination. The fluorescent signals are then processed in order to identify the nature of the atmospheric contamination.

Abstract: A two-dimensional image sensor is disclosed. The image sensor includes an array of photodetectors directed towards a first side. Emitters directed towards the first side are also provided, with the emitters emitting infrared light when illuminated by ultraviolet light. An ultraviolet light source is provided for illuminating the emitters, and a filter prevents ultraviolet light from illuminating the photodetectors.

Abstract: An apparatus for easily shooting an invisible image (such as an invisible two-dimensional bar code) latent on an object. The operation of the apparatus is made intuitive and simple and may be incorporated into cameras peripheral to computers and mobile telephones. A novel framing and focusing system is also disclosed.

Abstract: An apparatus (10) for detecting a particle (12) labelled with a fluorescent marker is disclosed. The apparatus (10) has a flow cell (16) being adapted to contain a fluid (14) in which the particle (12) is suspended. A light source (28) is operatively coupled to the flow cell (16) and arranged for emitting a stimulating light (28) which is effective in optically exciting the fluorescent marker (12) for emitting a fluorescent light (30). The apparatus (10) also includes a spatial filter (50) across an optical path between the particle (12) and a time gated detector (32) operatively coupled to the flow cell (16) for detecting the fluorescent light (30).

Abstract: An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

Abstract: In an EUV focusing mirror in which there are several thin concave nested high precision mirrors in the form of an ellipsoid of revolution, a paraboloid of revolution, a Wolter type or the like, the sides which do not constitute the reflection surfaces are made in the shape of a knife edge at the radiation incident ends of the respective mirrors in order not to be shielded by the thickness of the radiation incidence sides of the respective mirrors. Likewise, the radiation exit ends of the respective mirrors are made in the form of a knife edge. This yields an advantageous far-field distribution use of the mirrors for an EUV radiation source device and the degree of reduction of the light intensity can be made smaller than in the conventional case.

Abstract: An optical apparatus minimizes autofluorescence and stray light as well as leakage of excitation light and efficiently utilizes illuminating light from a fluorescence illumination optical system to allow observation of a bright fluorescence image. An observation apparatus has an objective, an observation optical system unit including a variable magnification optical system, and an imaging optical system unit including an imaging lens and an eyepiece. A fluorescence illumination apparatus, which is provided separately, is removably attached to the observation apparatus. The fluorescence illumination apparatus has a light source, a collector lens unit, and a reflecting member placed between the objective and the observation optical system unit at a position displaced from the optical axis of the objective to make light from the light source incident on the objective. An excitation filter is provided between the light source and the reflecting member.

Abstract: A phosphor for use, for example, with an ultraviolet LED to provide a broad-spectrum white light approximating diffuse sunlight, that includes quantum dots spaced from an activator material by a capping layer surrounding the quantum dots. This approach of spacing an activator material from the quantum dots provides improved spectral output for quantum dots of materials such as zinc sulfide.

Abstract: A device for the identification of security features on an identification card, wherein the device includes a housing having a pair of circuit boards, a pair of light-emitting diodes and a magnification apparatus to allow for operation during both daylight and darkness.

Abstract: A fluorescence detecting system includes a stimulating light projector which projects onto an object part which has been dosed with a fluorescence agent first stimulating light in the exciting wavelength range of the fluorescence agent and second stimulating light which differs from the first stimulating light in the wavelength band and is in the exciting wavelength range of the auto-fluorescence material contained in the object part, and a fluorescence information obtainer which obtains the fluorescence from the fluorescence agent information based on the fluorescence from the fluorescence agent emitted from the object part in response to projection of the first stimulating light and the auto-fluorescence information based on the auto-fluorescence emitted from the object part in response to projection of the second stimulating light. The fluorescence agent is a fluorescence agent which does not emit fluorescence in response to projection of the second stimulating light.

Abstract: A projecting device includes a light source, a filtering component, a reflecting mirror, a digital micro-mirror device, a projecting lens, and a panel. The filtering component changes lights emitted from the light source into substantially parallel polarized ultraviolet lights. The reflecting mirror reflects the substantially parallel polarized ultraviolet lights to the digital micro-mirror device. The digital micro-mirror device includes microscopic mirrors arranged in a rectangular array configured to be adjustable to reflect the substantially parallel polarized ultraviolet lights reflected by the reflecting mirror to the projecting lens. The projecting lens diverges the substantially parallel polarized ultraviolet lights. The panel includes a transparent substrate, a first fluorescence material layer, a second fluorescence material layer, and a third fluorescence material layer.

Abstract: A luminescence sensor, comprising a non-transparent substrate structure (2) having at least one aperture (5) intended to comprise an analyte and a transparent substrate structure (3), which is arranged to or adjacent said first structure (2). The aperture has a smallest lateral dimension, which is smaller than half the effective wavelength of an excitation radiation, such as light at a wavelength of 700 nm, resulting in an effective wavelength in water of about 538 nm. The transparent structure has a trench (4) with a surface portion provided with ligands with an affinity towards a target molecule. The trench results in that a luminophore attached to the target molecule will be positioned at the entrance surface of the aperture, where the excitation energy is largest.

Abstract: A sanitizing apparatus for writing utensils comprising a housing assembly and an ultraviolet and ozone generating assembly housed therein. The housing assembly comprises a top wall, a base and four walls. The first and second walls are perpendicularly disposed with respect to the third and fourth walls. The third and fourth walls are lateral walls. The housing assembly also comprises an angled wall that protrudes outwardly beyond the top wall and beyond the first wall defining a tray that terminates with a lip for preventing the writing utensil from falling off. A battery compartment is also housed within the housing assembly. The ultraviolet and ozone generating assembly radiates the writing utensil within the housing assembly with rays and ozone, to effectively sterilize bacteria and biological germs existing on the writing utensil. A visual indicator notifies a user when the ultraviolet and ozone generating assembly is operating.

Abstract: A sterilization device includes a shell, an ultraviolet ray lamp tube fixed with a lamp support on an upper end of the shell, an inner quartz tube around the lamp tube, an outer quartz tube around the inner quartz tube, a stainless steel tube around the outer quartz tube, an inner passage between the inner and the outer quartz tubes, an outer passage between the outer quartz tube and the stainless steel tube, and a guiding member on the lower end of the shell; the guiding member has guiding holes to guide water along a spiral path, and a water inlet on a lower portion thereof, which communicates with the guiding holes; a covering member is threadedly engaged with an outer side of the lower end of the shell; the water inlet of the guiding member extends through the covering member; the covering member has a water outlet hole.

Abstract: An apparatus and method are provided for differentiating multiple detectable signals by excitation wavelength. The apparatus can include a light source that can emit respective excitation light wavelengths or wavelength ranges towards a sample in a sample retaining region, for example, in a well. The sample can contain two or more detectable markers, for example, fluorescent dyes, each of which can be capable of generating increased detectable emissions when excited in the presence of a target component. The detectable markers can have excitation wavelength ranges and/or emission wavelength ranges that overlap with the ranges of the other detectable markers. A detector can be arranged for detecting an emission wavelength or wavelength range emitted from a first marker within the overlapping wavelength range of at least one of the other markers.

Abstract: A light emitting device comprising a light producing element configured to generate ultraviolet light having a wavelength of from about 250 nm to about 400 nm and a self-activating phosphor comprising an ordered oxyfluoride compound is provided. The nitrogen-free or nitrogen-containing ordered oxyfluoride compound has a formula: A3-3a/2RaMO4-?1-w?F1-?2-w—Nw where A is Sr alone or Sr mixed with Ba and/or Ca such that A comprises at least about ? mole % of Sr and up to about ? mole percent of Ba and/or Ca; R is a rare earth element or a mixture of rare earth elements; M is Al, Ga, In, W, Mo, Bi, or mixtures thereof; 0<a?0.3; ?1 and ?2 are both from about 0.01 to about 0.1; and 0?w?0.05 such that 0?w??0.1 and 0?w??0.15. The ultraviolet light excites the self-activating phosphor such that the self-activating phosphor emits visible light having a wavelength of from about 380 to about 750 nm.

Abstract: A system and method for full width scanning color analysis of a printed media sheet are disclosed. The full width array spectrophotometer system includes one or more substantially linear elongated illumination arrays of closely spaced multiple illumination sources. The sources include sets of illumination sources, including a first set of different color illumination sources and a second set including one or more UV-emitting illumination sources. The sets are arranged to span a printer paper path or other object path to illuminate a band extending transversely across a printed print media sheet or other object moving in the path. A full width array light imaging sensor includes an elongated array of multiple closely spaced photodetectors for detecting plural colors and is positioned adjacent to and extending substantially parallel to the linear array(s) to receive radiation reflected from the transverse illuminated band.

Abstract: A method and a system for producing a change in a medium disposed in an artificial container. The method places in a vicinity of the medium at least one of a plasmonics agent and an energy modulation agent. The method applies an initiation energy through the artificial container to the medium. The initiation energy interacts with the plasmonics agent or the energy modulation agent to directly or indirectly produce the change in the medium. The system includes an initiation energy source configured to apply an initiation energy to the medium to activate the plasmonics agent or the energy modulation agent.

Abstract: The invention concerns the use of the fluorescence polarization phenomenon to improve detection of fluorescent signals during a fluorescence resonance energy transfer (FRET). In particular, the invention concerns a method for improving signal/noise ratio in a FRET measurement. The invention also concerns an apparatus for measuring fluorescence following an energy transfer between a donor fluorescent compound and an acceptor fluorescence compound in a measurement medium.

Abstract: The invention is directed to a resolution-enhanced luminescence microscopy method in which a sample is excited to the emission of luminescence radiation through irradiation by excitation radiation, and an image of the luminescing sample is acquired. A first partial volume of the sample is irradiated by a first laser radiation field of the excitation radiation, and a second partial volume of the sample is irradiated by a second laser radiation field of the excitation radiation. The first partial volume of the sample and the second partial volume of the sample overlap one another partially but not completely. Only the first laser radiation field is modulated with a first frequency, and luminescence radiation is detected from the first partial volume of the sample with modulation filtering so that luminescence radiation from the second partial volume of the sample is suppressed.

Abstract: A lithographic apparatus includes a radiation system including a radiation source for the production of a radiation beam, and a contaminant trap arranged in a path of the radiation beam. The contaminant trap includes a plurality of foils or plates defining channels that are arranged substantially parallel to the direction of propagation of said radiation beam. The foils or plates can be oriented substantially radially with respect to an optical axis of the radiation beam. The contaminant trap can be provided with a gas injector which is configured to inject gas at least at two different positions directly into at least one of the channels of the contaminant trap.

Abstract: Exciting light is irradiated through a dielectric material block toward an interface between the dielectric material block and a metal film formed on one surface of the dielectric material block, such that total reflection conditions may be satisfied. An intensity of analysis fluorescence produced by an analysis fluorescent substance, which is contained in a sample and produces the analysis fluorescence by being excited by an evanescent wave oozing out from the interface when the exciting light impinges upon the interface, is normalized in accordance with an intensity of reference fluorescence produced by a reference fluorescent substance, which has been located at a position for excitation by the exciting light.

Abstract: A system and method for fluorescence excitation and detection having distinct optical paths is disclosed. A system for detecting fluorescence comprises a light source that emits an excitation light into an illumination tube; a plurality of collection optics located around an aperture in the illumination tube for collecting fluorescence; and a detector for determining the amount of fluorescence. A method for detecting fluorescence comprises emitting an excitation light from a light source into an illumination tube; directing the excitation light to an excitation filter; illuminating a sample with the excitation light to generate an emission light; and detecting the optical characteristics of the emission light using a plurality of collection optics located around the illumination tube.

Abstract: A system according to one embodiment includes a light source for generating light fringes; a sampling mechanism for directing a particle through the light fringes; and at least one light detector for detecting light scattered by the particle as the particle passes through the light fringes. A method according to one embodiment includes generating light fringes using a light source; directing a particle through the light fringes; and detecting light scattered by the particle as the particle passes through the light fringes using at least one light detector.

Abstract: Disclosed herein is a method of identifying a unidentified substance, comprising directing light from a light emitting source directly upon a stationary unidentified substance; collecting fluorescence from the unidentified substance in a detector; wherein the detector comprises a lock-in detection system; analyzing the fluorescence; and identifying the unidentified substance. Disclosed herein is a detection system comprising a light emitting source; a circuit board; wherein the trigger is operative to trigger a pulse of electrons from the circuit board to the light emitting source; a detector; and a central processing unit, wherein fluorescence generated from an unknown unidentified substance that is illuminated by light from the light emitting source is collected in the detector and analyzed in the central processing unit.

Abstract: A UV light source water disinfection system includes a UV light source that is driven or controlled by a ballast. Improved start-up scenarios are provided by use of a separate heating wire around the lamp or employing an inductive-coupled system to provide initial high power requirements. The UV lamp is discontinuously operated in order to extend the life of the system, save energy, and periodically dose standing water to prevent regeneration of undesired microorganisms.

Abstract: An electron-beam dimension measuring apparatus includes: electron-beam irradiating means for irradiating a surface of a sample with an electron beam; a stage on which the sample is placed; a photoelectron generating electrode disposed so as to face the sample; ultraviolet light irradiating means for emitting ultraviolet light; and control means for causing the ultraviolet light irradiating means to irradiate the sample and the photoelectron generating electrode with the ultraviolet light for a predetermined length of time, to cause the sample and the photoelectron generating electrode to emit photoelectrons, for applying a voltage to the photoelectron generating electrode, the voltage applied to supply energy corresponding to a difference between energy of photoelectrons emitted by the sample and energy of photoelectrons emitted by the photoelectron generating electrode, and thereby for controlling an electric potential of the surface of the sample to set the electric potential at 0 V.

Abstract: An optical property measuring method and an optical property measuring apparatus according to an aspect of the invention are operable to select bi-spectral characteristics relatively close to bi-spectral characteristics of a fluorescent sample, out of multiple bi-spectral characteristics stored in advance, based on a relative ratio between excitation efficiencies of the fluorescent sample illuminated by excitation illuminations whose spectral distributions are different from each other, in calculating an optical property of the fluorescent sample. The inventive optical property measuring method and optical property measuring apparatus are advantageous in calculating an optical property of a fluorescent sample easily and with high precision.

Abstract: The present invention aims at reducing background noise derived from a substance that is present in the vicinity of a target substance such as a DNA and protein and attached to the surface of a substrate without an effect on a fluorescent dye labeling the target substance. The substrate that has a probe and is capable of interacting with the target substance is irradiated with noise removing light such that an evanescent field is generated on the surface of the substrate. A target substance and a foreign particle, which are non-specifically stuck to the surface of the substrate, are decomposed by the evanescent field generated by the irradiation with the noise removing light. The evanescent field present near the surface of the substrate has almost no effect on the probe.

Abstract: A method and system is provided that takes advantage of the atmospheric transmission properties of the Hydrogen Lyman-? radiation line (121.6 nm wavelength) to illuminate a sample with high energy VUV photons at least partially in an atmospheric environment. Thus, according to the principles of the present invention, a sample is illuminated by radiation at the Hydrogen Lyman-? radiation line (121.6 nm wavelength), at least partially in an atmospheric environment, and luminescent radiation from the sample at longer wavelengths is detected. The high energy illuminating photons generate luminescent radiation from the sample at longer wavelengths, typically in the visible wavelength range, and this radiation can then be imaged, e.g. with a normal visible microscope.

Abstract: There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength ?193 nm. The projection objective includes an object plane, a first mirror, a second mirror, a third mirror, a fourth mirror; and an image plane. The object plane, the first mirror, the second mirror, the third mirror, the fourth mirror and the image plane are arranged in a centered arrangement around a common optical axis. The first mirror, the second mirror, the third mirror, and the fourth mirror are situated between the object plane and the image plane. The chief ray, when incident on an object situated in the object plane, in a direction from the primary light source, is inclined away from the common optical axis.

Abstract: A method includes illuminating a mixture of materials in a wet-end of a paper process, where the mixture includes an ultraviolet-activated material. The method also includes measuring light from the mixture and determining a property of the ultraviolet-activated material based on the measured light. The method may further include adjusting an operation in the wet-end of the paper process based on the determined property of the ultraviolet-activated material. The determined property could include a quantity of fluorescent material in recycled material used to form stock for a paper machine and/or a quantity of fluorescent material in stock provided to a headbox in the paper process. Adjusting the operation in the wet-end could include adjusting an amount of one or more materials used to form stock provided to the headbox, such as a fluorescent whitening agent, fixative, fluorescent fiber, fluorescent pigment, fluorescent particle, fluorescent highlight, fluorescent planchette, or fluorescent quencher.

Abstract: A sterilization device includes a shell, an ultraviolet ray lamp tube fixed with a lamp support on an upper end of the shell, an inner quartz tube around the lamp tube, an outer quartz tube around the inner quartz tube, a stainless steel tube around the outer quartz tube, an inner passage between the inner and the outer quartz tubes, an outer passage between the outer quartz tube and the stainless steel tube, and a guiding member on the lower end of the shell; the guiding member has guiding holes to guide water along a spiral path, and a water inlet on a lower portion thereof, which communicates with the guiding holes; a covering member is threadedly engaged with an outer side of the lower end of the shell; the water inlet of the guiding member extends through the covering member; the covering member has a water outlet hole.

Abstract: A camera obtains an observation image of a sample by capturing the image of the sample on which an ultraviolet light generated by a light source device is irradiated. An image processing unit of a controlling device generates a synthesis observation image of the sample based on a plurality of observation images of the sample, which are obtained by being captured by the camera in the same field of view with switching of the wavelength band of the ultraviolet light irradiated on the sample. A display unit of the controlling device displays the image generated by the image processing unit.

Abstract: An illumination system is used to illuminate a specified illumination field of an object surface with EUV radiation. The illumination system has an EUV source and a collector to concentrate the EUV radiation in the direction of an optical axis. A first optical element is provided to generate secondary light sources, and a second optical element is provided at the location of these secondary light sources, the second optical element being part of an optical device which includes further optical elements, and which images the first optical element into an image plane into the illumination field. Between the collector and the illumination field, a maximum of five reflecting optical elements are arranged. These optical elements reflect the main beam either grazingly or steeply. The optical axis, projected onto an illumination main plane, is deflected by more than 30° between a source axis portion and a field axis portion.

Abstract: An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.