Irradiation Of Objects Or Material Patents (Class 250/492.1)
  • Patent number: 10525284
    Abstract: Systems and methods for managing motions of an anatomical region of interest of a patient during image-guided radiotherapy are disclosed. An exemplary system may include an image acquisition device, a radiotherapy device, and a processor device. The processor device may be configured to determine a primary plane of motion of the anatomical region of interest and determine a plurality of 2D slices parallel to the primary plane. The plurality of 2D slices may define a 3D volume substantially enclosing the anatomical region of interest. The processor device may also be configured to control the image acquisition device to acquire a plurality of 2D images based on the plurality of 2D slices and determine a motion of the anatomical region of interest based on at least a subset of the acquired plurality of 2D images. The processor device may be further configured to control radiation delivery based on the determined motion.
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: January 7, 2020
    Assignee: Elekta LTD
    Inventor: Martin Emile Lachaine
  • Patent number: 10520251
    Abstract: A UV light curing system is provided. The UV light curing system includes: a UV light source; a primary reflector for reflecting light emitted by the UV light source in a direction of an enclosure, the enclosure at least partially surrounding an object of interest; and a secondary reflector on an opposite side of the enclosure with respect to the primary reflector, the secondary reflector being positioned along a portion of a length of the enclosure, the secondary reflector surrounding at least 40% of the enclosure at the portion of the length of the enclosure.
    Type: Grant
    Filed: January 13, 2016
    Date of Patent: December 31, 2019
    Assignee: Heraeus Noblelight America LLC
    Inventors: Darrin Leonhardt, William Curtis Harper
  • Patent number: 10524343
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; a target supply unit that supplies a droplet of a target substance to a plasma generation region in the chamber; a first pipe at least partly covering a trajectory of the droplet and having a first opened end part as an upstream end part and a second opened end part as a downstream end part in a trajectory direction; a second pipe at least partly covering the first pipe with a gap between the second pipe and the first pipe, and having a third end part, opened and extending downstream of the second end part of the first pipe in the trajectory direction, as a downstream end part in the trajectory direction; and a gas supply unit that supplies gas flowing through the gap and causes the gas to flow in the trajectory direction out of a gas exit.
    Type: Grant
    Filed: June 3, 2019
    Date of Patent: December 31, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Takanobu Ishihara, Toshihiro Nishisaka, Yutaka Shiraishi
  • Patent number: 10504685
    Abstract: Magnetic field strength of a converging lens is repeatedly and alternately changed between first strength and second strength. The information about a first aperture image in the case where the magnetic field strength is the first strength and the information about a second aperture image in the case where the magnetic field strength is the second strength are produced. A first movement instruction for the first and second aperture images is given based on the first information and the second information during repetitive changes of the magnetic field strength. Based on the first movement instruction, a first deflector is controlled. A second movement instruction for the first and second aperture images is given based on the first information and the second information during repetitive changes of the magnetic field strength. Based on the second movement instruction, a second deflector is controlled.
    Type: Grant
    Filed: January 9, 2019
    Date of Patent: December 10, 2019
    Assignee: Shimadzu Corporation
    Inventor: Takehiro Ishikawa
  • Patent number: 10497485
    Abstract: Systems and methods for formulating a radioactive liquid using a disposable container are described. The disposable container includes a flexible sidewall defining an interior space for containing the radioactive liquid during formulation. The flexible sidewall is constructed of sterile, pyrogen-free material to prevent contamination of the radioactive liquid. The flexible sidewall includes a first portion and a second portion. The disposable container also includes an access port and a dispense port. The access port is defined by the first portion of the flexible sidewall to provide access to the interior space. The dispense port is defined by the second portion of the flexible sidewall for the radioactive liquid within the interior space to be dispensed through.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: December 3, 2019
    Assignee: Curium US LLC
    Inventors: Kevin B. Graves, Bryan S. Petrofsky, Sumit Verma, John Schmitz, Greg Bushman, Jesse Gurley, IV, Paul Hibbeln
  • Patent number: 10478642
    Abstract: A particle beam treatment apparatus includes: a rotating gantry configured to axially rotate in a state where a bed fixed to a stationary system is disposed inside the rotating gantry and an irradiation port of a beam is fixed to a body of the rotating gantry; a tunnel structure configured to have at least a horizontal floor surface and have an internal space in which at least a part of the bed is accommodated; and a rotation supporter configured to cause the tunnel structure to be stationary in the stationary system independently of axis rotation of the rotating gantry by rotationally displacing the tunnel structure with respect to an inner side surface of the rotating gantry.
    Type: Grant
    Filed: May 24, 2018
    Date of Patent: November 19, 2019
    Assignees: KABUSHIKI KAISHA TOSHIBA, Toshiba Energy Systems & Solutions Corporation
    Inventors: Kunihiko Kinugasa, Kiyohiko Kitagawa, Hideo Kobayashi, Shigeru Kasai, Kazutaka Maeta, Yoshifumi Nagamoto
  • Patent number: 10479018
    Abstract: An additive manufacturing apparatus including a scanner for directing a laser beam on to layers of flowable material to selectively solidify the material to form an object in a layer-by-layer manner. The scanner includes an optical component operable under the control of a first actuator to reflect the laser beam over a first range of angles in a first dimension and the or a further optical component operable under the control of a second actuator to reflect the laser beam over a second range of angles in the first dimension, wherein the second actuator provides a faster dynamic response but a smaller range of movement of the laser beam than the first actuator.
    Type: Grant
    Filed: March 29, 2016
    Date of Patent: November 19, 2019
    Assignee: RENISHAW PLC
    Inventors: Ceri Brown, Nicholas H H Jones, David G J Ewing, Geoffrey McFarland
  • Patent number: 10471632
    Abstract: When cleaning a mold using a mold cleaning system, three-dimensional image data of a molding surface of the mold is acquired by a camera, movement of arms is controlled by a control device based on the acquired image data, and a laser head is moved along the molding surface while a laser beam provided from a laser oscillator is irradiated to remove contamination adhered to the molding surface. Cleaning is performed on a specific site, using a relatively small laser head, or also using a relatively large laser head, or cleaning is performed using a laser head having a variable laser irradiation width and setting an appropriate laser irradiation width for each site to be cleaned.
    Type: Grant
    Filed: November 4, 2016
    Date of Patent: November 12, 2019
    Assignee: The Yokohama Rubber Co., LTD.
    Inventors: Kensuke Matsumura, Masayuki Watanabe, Yusaku Miyazaki
  • Patent number: 10477732
    Abstract: A light irradiation device includes a light emitting unit, a cooling unit, a supply unit, and a driving unit. The light emitting unit emits light while generating heat. The cooling unit includes a channel through which a coolant flows, a first surface on which the light emitting unit is mounted, and a second surface that faces a direction opposite to the first surface. The supply unit is disposed facing the second surface in one direction that the second surface faces and supplies the coolant to the cooling unit. The driving unit is disposed facing the second surface in the one direction and includes a driving board that drives the light emitting unit.
    Type: Grant
    Filed: April 3, 2018
    Date of Patent: November 12, 2019
    Assignee: FUJI XEROX CO., LTD.
    Inventors: Michiaki Murata, Akira Sakamoto, Atsuyuki Kitamura, Hiroyuki Tsukuni, Akira Mihara, Naoya Kamigaito, Satoshi Tejima, Junichiro Hayakawa
  • Patent number: 10456602
    Abstract: A particle therapy system capable of reducing the installation area and also suppressing a variation in the irradiation beam position is provided. A synchrotron generates a charged particle beam, and a beam delivery system irradiates an irradiation target with a charged particle beam extracted from the synchrotron thereby forming a radiation field. A rotating gantry is provided with the beam delivery system and is rotatable around the irradiation target. Dispersion measuring devices, each of which measures the dispersion of the charged particle beam at the position of the irradiation target at a plurality of rotation angles of the rotating gantry, are also provided. The orbit center of the charged particle beam extracted from the synchrotron and the rotation axis of the rotating gantry are located on substantially the same straight line.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: October 29, 2019
    Assignee: Hitachi, Ltd.
    Inventors: Fuutarou Ebina, Takamichi Aoki
  • Patent number: 10449265
    Abstract: A high efficiency ultra-violet air purification system is disclosed. The system includes an apparatus for purifying air. The apparatus includes a chamber having a hollow interior and having an inlet and an outlet, the chamber having an inner reflective surface. The apparatus further includes an ultraviolet (UV) light source mounted within the hollow interior of the chamber between the inlet and the outlet. The apparatus further includes a honeycomb structure mounted to each of the inlet and the outlet of the UV chamber, the honeycomb structure having an array of hexagonal passages that are orthogonal to the inner reflective surface of the chamber, each hexagonal passage being at least partly coated with a UV catalyst and a UV light absorption coating.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: October 22, 2019
    Assignee: Blutec, LLC.
    Inventor: Rolf Engelhard
  • Patent number: 10444636
    Abstract: Vacuum ultraviolet rays are emitted to a surface to be processed of a substrate to be processed by a light source. During an emission period in which the vacuum ultraviolet rays are emitted from the light source to the substrate, part of the vacuum ultraviolet rays is received by an illuminometer, and illuminance of the received vacuum ultraviolet rays is measured. A light receiving surface of the illuminometer is located at a constant height that is based on the surface to be processed of the substrate during the emission period of the vacuum ultraviolet rays. An exposure amount of the substrate is calculated based on the illuminance measured by the illuminometer. Emission of the vacuum ultraviolet rays from the light source to the substrate is stopped based on the calculated exposure amount of the substrate.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: October 15, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masaya Asai, Masahiko Harumoto, Yuji Tanaka, Chisayo Nakayama
  • Patent number: 10434604
    Abstract: A system to provide a texture to a surface of a component for use in a semiconductor processing chamber is provided. The system includes an enclosure comprising a processing region, a support disposed in the processing region, a photon light source to generate a stream of photons, an optical module operably coupled to the photon light source, and a lens. The optical module includes a beam modulator to create a beam of photons from the stream of photons generated from the photon light source, and a beam scanner to scan the beam of photons across the surface of the component. The lens is used to receive the beam of photons from the beam scanner and distribute the beam of photons at a wavelength in a range between about 345 nm and about 1100 nm across the surface of the component to form a plurality of features on the component.
    Type: Grant
    Filed: April 17, 2018
    Date of Patent: October 8, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Gang Peng, David W. Groechel, Jenn C. Chow, Tuochuan Huang, Han Wang
  • Patent number: 10422632
    Abstract: The present disclosure relates to a device for distance measurement for a laser processing system, comprising a collimator lens system, which is set up to collimate an optical measuring beam, a deflection lens system, which defines an optical axis, wherein the deflection lens system comprises at least one transmissive optical element, which is displaceable relative to the optical axis, in order to deflect the collimated optical beam from the optical axis, and a focusing lens system, which is set up to focus the deflected measuring beam onto a workpiece.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: September 24, 2019
    Assignee: Precitec GmbH & Co. KG
    Inventor: Rüdiger Moser
  • Patent number: 10413753
    Abstract: The disclosed systems and methods for Image-Guided Radiation Therapy (IGRT), utilises an iterative approach which adjusts a treatment plan based on inter- or intra-fraction images to improve the accuracy of the radiation delivered during the overall treatment. The prescribed dose of radiotherapeutic radiation is mapped onto the patient's anatomy using an image acquired of the region, which is to be the target for radiotherapeutic radiation. Following beam-angle-optimisation, fluence optimisation and segmentation, the efficiency of delivery of each segment is determined using an objective function, and the segments ranked according to their efficiency. The plan proceeds with the choice of the most efficient segment (or segments) to be delivered first.
    Type: Grant
    Filed: February 8, 2018
    Date of Patent: September 17, 2019
    Assignee: ELEKTA AB (PUBL)
    Inventors: Charis Kontaxis, Gijsbert Herman Bol, Bas Willem Raaymakers
  • Patent number: 10416574
    Abstract: A lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate held on a substrate table, the lithographic apparatus further comprising a cooling apparatus (40) for cooling the substrate, wherein the cooling apparatus comprises a cooling element (42, 44) located above the substrate table and adjacent to the exposure area, the cooling element being configured to remove heat from the substrate.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: September 17, 2019
    Assignee: ASML Netherlands B.V
    Inventors: Adrianus Hendrik Koevoets, Sander Catharina Reinier Derks, Franciscus Johannes Joseph Janssen, Jim Vincent Overkamp, Jacobus Cornelis Gerardus Van Der Sanden
  • Patent number: 10415133
    Abstract: A method for planning a beam path for material deposition is provided in which a structure pattern having features of varying size is analyzed to determine the size of each feature. A beam path throughout the structure pattern is determined and the beam current required for each point in the structure pattern is configured. Configuring the beam current required for each point involves determining the acceptable beam dose for that point. Relatively small features require a low beam current for high accuracy and relatively large features can be formed using a higher beam current allowing faster deposition. Each feature in the structure pattern is deposited at the highest beam current acceptable to allow accurate deposition of the feature.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: September 17, 2019
    Assignee: FEI Company
    Inventor: Aurelien Philippe Jean Maclou Botman
  • Patent number: 10420202
    Abstract: According to some embodiments, an accelerator control device has a high-frequency power controller and a timing controller. The high-frequency power controller supplies high frequency power for accelerating a charged particle beam to an accelerator. The timing controller controls an operation timing of a blocker that blocks the charged particle beam emitted from the accelerator based on a current value of the charged particle beam circulating in the accelerator.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: September 17, 2019
    Assignees: Toshiba Energy Systems & Solutions Corporation, National Institutes for Quantum and Radiological Science and Technology
    Inventors: Munemichi Matsumoto, Takuji Furukawa, Kota Mizushima, Katsushi Hanawa
  • Patent number: 10415781
    Abstract: This monolithic light source for a motor-vehicle lighting module includes an emission area formed by a plurality of emitting elements and configured so that the emitting elements are arranged in at least three selectively activatable segments, these at least three selectively activatable segments including a first segment and a second segment, which are symmetric to each other with respect to a plane of symmetry and which have a contact zone that extends along this plane of symmetry, and a third section, which extends from one end of this contact zone and which extends symmetrically on either side of the plane of symmetry.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: September 17, 2019
    Assignee: VALEO VISION
    Inventors: Marie Pellarin, Vanesa Sanchez, Benoit Delande
  • Patent number: 10401736
    Abstract: An atmosphere in a processing chamber in which a substrate is stored is discharged by a suction device. At a time point at which oxygen concentration in the processing chamber is lowered to predetermined exposure starting concentration, emission of vacuum ultraviolet rays from a light source to the substrate is started. The emission of the vacuum ultraviolet rays to the substrate is stopped at a time point at which the exposure amount of the substrate increases to a predetermined set exposure amount. The exposure starting concentration is defined in advance to be higher than 1% and lower than oxygen concentration in the air, and is defined in advance such that ozone generated from oxygen atoms by the emission of the vacuum ultraviolet rays do not damage the film on the surface to be processed of the substrate.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: September 3, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masaya Asai, Masahiko Harumoto, Yuji Tanaka, Chisayo Nakayama
  • Patent number: 10396764
    Abstract: A high-voltage pulse generator including a plurality of stages and an electrode for returning current to ground, connected in series, each of the stages including at least one energy storage element connected in series with a spark gap. The spark gaps are distributed on an axis, the odd-numbered energy storage elements are arranged on one side of the spark gap axis, and the even-numbered energy storage elements are arranged on the other side of the spark gap axis, such that the circuit formed by the plurality of stages and the current return electrode have a reduced inductance during a discharge phase of the generator, with respect to a generator including the same components laid out according to a conventional architecture.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: August 27, 2019
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Francis Lassalle
  • Patent number: 10391333
    Abstract: Provided are a treatment apparatus using proton and ultrasound and a method for treating cancer using the same. The treatment apparatus includes a proton generator configured to emit a proton beam to a tumor of a human body, an ultrasound generator configured to emit an ultrasonic beam to the tumor in a direction crossing an emission path of the proton beam, and a sensor configured to measure an acoustic signal generated during the emission of the proton beam.
    Type: Grant
    Filed: January 15, 2018
    Date of Patent: August 27, 2019
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Dong-Ho Shin, Sang Kyun Lee, Seunghwan Kim, Moon Youn Jung
  • Patent number: 10384307
    Abstract: A laser machining system includes a laser oscillator, a laser machining head, and a reflection unit. The laser oscillator outputs laser light. The laser machining head, which includes a first optical member for collecting the laser light, emits the collected laser light. The reflection unit, which includes a reflective member for reflecting the laser light emitted from the laser machining head, radiates the reflected laser light onto a work.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: August 20, 2019
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Noriyuki Matsuoka, Yasushi Mukai, Atsuhiro Kawamoto, Junji Fujiwara
  • Patent number: 10370252
    Abstract: Embodiments of methods of altering the color of diamonds are disclosed. In an embodiment, a method for altering the color of diamonds includes identifying and selecting a diamond having a suitable nitrogen content, HPHT processing the selected diamond under diamond-stable conditions to alter the color of the selected diamond from a first color to a second color, irradiating the HPHT-processed diamond with an electron source having an energy between about 1 MeV and about 20 MeV so as to alter the color of the selected diamond from the second color to a third color, and annealing the irradiated diamond either under partial vacuum conditions, or under HPHT diamond-stable conditions so as to alter the color from the third color to a fourth color (e.g., pink, red, or purple, depending on the nitrogen content of the selected diamond).
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: August 6, 2019
    Assignee: US SYNTHETIC CORPORATION
    Inventor: Louis McConkie Pope, II
  • Patent number: 10373795
    Abstract: Provided are new techniques for fault analysis in IC semiconductor devices, including system designs and methods to enable the probing of circuitry within an IC device under test (DUT) using electron beam (e-beam) techniques while the DUT is being stimulated electrically, or while the device is active on its own or within a host system mounted in a circuit board or other module. The DUT could be a packaged IC, or an IC in some unpackaged form. To create a local evacuated volume immediately outside the e-beam tool, a sealing element is sealed against or around the DUT for a localized seal. Such an arrangement obviates the need for vacuum feedthroughs of possibly thousands of signals required to operate and monitor the DUT, and further enables probing of a DUT while it is operating in its normal environment, such as installed on a circuit board in its system, or on a tester.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: August 6, 2019
    Assignee: FEI Company
    Inventors: Yakov Bobrov, Cecelia Anne Campochiaro
  • Patent number: 10357583
    Abstract: Provided is an apparatus for disinfecting objects of various shapes and sizes. The apparatus includes a housing enclosing a disinfecting chamber, and an ultraviolet light source arranged to emit ultraviolet light into the disinfecting chamber to deactivate at least a portion of a biologically-active contagion present on the object. A peripheral wall of the housing that extends about a portion of the disinfecting chamber comprises an ultraviolet-reflective material so that the ultraviolet light impinging on the peripheral wall is reflected generally away from the peripheral wall and toward an interior of the disinfecting chamber. A door is adjustable between open and closed orientations. A floor at the bottom of the disinfecting chamber includes an ultraviolet-reflective surface that reflects the ultraviolet light impinging on the floor generally away from the floor toward the interior of the disinfecting chamber.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: July 23, 2019
    Assignee: Diversey, Inc.
    Inventor: Roderick M. Dayton
  • Patent number: 10357664
    Abstract: The invention is directed to a method for controlling a process of monitoring the position of at least a part of a patient's body (1) during a radiation treatment, the method comprising the following steps: a) providing an energy value which is dependent on the radiation energy applied to the patient's body (1); b) controlling the time at which the monitoring process is performed, in accordance with the energy value.
    Type: Grant
    Filed: August 26, 2015
    Date of Patent: July 23, 2019
    Assignee: Brainlab AG
    Inventors: Stefan Vilsmeier, Stephan Erbel
  • Patent number: 10340115
    Abstract: A charged particle beam device is provided that performs proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like. The charged particle beam device includes: an optical element which adjusts a charged particle beam emitted from a charged particle source; an adjustment element which adjusts an incidence condition of the charged particle beam with respect to the optical element; and a control device which controls the adjustment element, wherein the control device determines a difference between a first feature amount indicating a state of the optical element based on the condition setting of the optical element, and a second feature amount indicating a state where the optical element reaches based on the condition setting and executes adjustment by the adjustment element when the difference is greater than or equal to a predetermined value.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: July 2, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Muneyuki Fukuda, Yoshinori Momonoi, Akihiro Miura, Fumihiro Sasajima, Hiroaki Mito
  • Patent number: 10319564
    Abstract: A multi charged particle beam writing apparatus includes an irradiation time calculation circuit to calculate an irradiation time of a beam to each pixel, for each of a plurality of pixels which are obtained by dividing a writing region of a target object and each of which serves as an irradiation unit region per beam of multi charged particle beams, a gray-scale value calculation circuit to calculate, for each pixel, a gray-scale value of gradation by gray scale levels by dividing the irradiation time by a quantization unit, and a gray-scale value correction circuit to correct, for each of a plurality of groups each composed of adjacent pixels, dose errors each caused by gradation, by gray scale levels, of the irradiation time which occur in the adjacent pixels in a group concerned, by increasing or decreasing the gray-scale value of at least one pixel in the group concerned by 1.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: June 11, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Hiroshi Matsumoto
  • Patent number: 10317800
    Abstract: A maskless photolithoghrapic system includes a laser point-by-point scanning exposure unit, a plane-projection exposure unit, a mobile station and a calculation control unit that decomposes a pattern to be exposed, so that a pattern portion with a precision requirement below a pre-determined threshold is exposed by the laser point-by-point scanning exposure unit, and a pattern portion with a precision requirement greater than the pre-determined threshold is exposed by the plane-projection exposure unit; when conducting laser point-by-point scanning exposure on a sample on the mobile station, the light emitted by the laser point-by-point scanning exposure unit moves relative to the sample according to the pattern portion with a precision requirement below the pre-determined threshold; and when conducting plane-projection exposure on the sample, the plane-projection exposure unit emits light with a corresponding pattern shape onto the sample according to the graph with a precision requirement greater than the p
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: June 11, 2019
    Assignee: Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
    Inventors: Xuanming Duan, Xianzi Dong, Meiling Zheng
  • Patent number: 10308550
    Abstract: A device for applying radiation to a target is provided. The device includes a radiation emitter to emit electromagnetic radiation having a peak emission wavelength in the range from 10 nm-1 mm, and a first reflector that extends in a length direction with a concave cross section. The first reflector defines a cavity area having a perimeter, and includes an inward facing reflective border for at least 50% of the perimeter of the cavity area. Radiation is provided to the cavity area with an intensity distribution I and a maximum intensity Imax. The cavity area includes a focal area defined by all points at which a normalized intensity I/Imax is greater than 0.2. A width of the focal area is 0.0001-0.5 times a width of the cavity area.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: June 4, 2019
    Assignees: Heraeus Noblelight America LLC, Heraeus Noblelight GmbH
    Inventors: Johanna Heck, Darrin Leonhardt, David Sprankle, Michael Peil, Jörg Diettrich
  • Patent number: 10300302
    Abstract: Provide a particle beam transport system that contribute to reduction of construction period and cost for a particle beam treatment facility including plural treatment rooms accommodating a particle-beam irradiation equipment. A particle beam transport system 10 includes: a main line 31 configured to transport a particle beam generated by an accelerator outward; a branch line 22 branching from the main line 31; irradiation equipments 30 (30a-30d) provided at respective ends of the branch line 22 and configured to irradiate a patient with the particle beam, wherein at least a part of the main line 31 and the branch line 22 is configured as plural segments 20; and beam characteristics of the particle beam of each of the plural segments 20 are substantially equal at both ends.
    Type: Grant
    Filed: July 7, 2016
    Date of Patent: May 28, 2019
    Assignees: KABUSHIKI KAISHA TOSHIBA, Toshiba Energy Systems & Solutions Corporation
    Inventors: Shigeki Takayama, Ikuo Watanabe, Yoshifumi Nagamoto, Takeshi Yoshiyuki, Takashi Yazawa
  • Patent number: 10300510
    Abstract: A high-speed method and system for inspecting a stream of parts using at least one transparent traveling carrier of a conveyor subsystem are provided. The subsystem has a forward reach and a return reach. The method includes controllably receiving a stream of parts in rapid succession on the at least one traveling carrier and utilizing the subsystem to transfer the stream of parts in rapid succession to a part inspection station. The bottom surface of each part is illuminated through its traveling carrier with radiant energy when the part is located at the inspection station to generate reflected radiation signals which travel through its traveling carrier. A bottom image of each illuminated bottom surface is formed from the reflected radiation signals at an imaging location between the forward and return reaches at the inspection station. The bottom images are detected at the imaging location.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: May 28, 2019
    Assignee: General Inspection LLC
    Inventors: Nathan Andrew-Paul Kujacznski, James W. St. Onge, Michael G. Nygaard
  • Patent number: 10293183
    Abstract: An object of the present invention is to provide a particle beam treatment system that can realize the reduction of treatment time for a specific patient, compared with treatment time in a conventional type. A control unit of a control system controls a beam routing system and irradiation devices so as to maintain the occupation of an accelerator when a certain treatment room of plural treatment rooms once occupies the accelerator except intentional operation to release the occupation of the accelerator or the occurrence of system failure.
    Type: Grant
    Filed: May 18, 2016
    Date of Patent: May 21, 2019
    Assignee: Hitachi, Ltd.
    Inventors: Naofumi Ishiguro, Isao Furuse, Tomoaki Hirane, Haruki Arita
  • Patent number: 10290466
    Abstract: An apparatus and methods of improving the ion beam quality of a halogen-based source gas are disclosed. Unexpectedly, the introduction of a noble gas, such as argon, to an ion source chamber may increase the percentage of desirable ion species, while decreasing the amount of contaminants and halogen-containing ions. This is especially beneficial in non-mass analyzed implanters, where all ions are implanted into the workpiece. In one embodiment, a first source gas, comprising a dopant and a halogen is introduced into an ion source chamber, a second source gas comprising a hydride, and a third source gas comprising a noble gas are also introduced. The combination of these three source gases produces an ion beam having a higher percentage of pure dopant ions than would occur if the third source gas were not used.
    Type: Grant
    Filed: November 10, 2017
    Date of Patent: May 14, 2019
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller, Svetlana B. Radovanov, Min-Sung Jeon, Peter F. Kurunczi, Christopher J. Leavitt
  • Patent number: 10291904
    Abstract: An installation process for a sensor associated with a passenger conveyance system, the process including at least partially automatically calibrating a sensor coordinate system to a world coordinate system via a calibration matrix, wherein the sensor coordinate system is at least partially obtained using a depth map.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: May 14, 2019
    Assignee: Otis Elevator Company
    Inventors: Alan Matthew Finn, Hui Fang, Arthur Hsu
  • Patent number: 10285253
    Abstract: An extreme ultraviolet light source device includes a pair of disk-shaped discharge electrodes which face each other with their peripheral portions being spaced from each other, a pulsed power supply unit for supplying pulsed power to the discharge electrodes, a raw material supply unit for supplying onto the discharge electrodes raw materials that emit extreme ultraviolet light, and an energy beam irradiation unit for irradiating the raw materials on curved surfaces of the discharge electrodes with an energy beam to vaporize the raw materials. At least one of the paired discharge electrodes has a tapered surface at a peripheral portion of at least one of two circular surfaces thereof. The tapered surface inclines radially outward such that the thickness of the discharge electrode decreases in the radially outward direction.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: May 7, 2019
    Assignee: USHIO DENKI KABUSHIKI KAISHA
    Inventors: Yusuke Teramoto, Akihisa Nagano, Hideyuki Urakami
  • Patent number: 10265427
    Abstract: An electron beam irradiation device which can uniformly project electron beams to the entire outer surface of a container by using a small-sized low-energy electron accelerator. When each of the side surface portions of the container is irradiated with the electron beams by supporting a bottom surface portion of the container, a position of the container is moved by the supporting portion so that a distance between each of the side surface portions of the container and an irradiation window of the electron accelerator is made substantially equal. Subsequently, when an upper surface portion and a bottom surface portion of the container are irradiated with the electron beams by holding the side surface portion of the container, the position of the container is moved by the holding portion so that the distances between the upper surface portion and the bottom surface portion of the container and the irradiation windows of the electron accelerators become substantially equal.
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: April 23, 2019
    Assignee: AIREX CO., LTD.
    Inventors: Koji Kawasaki, Daisuke Kakuda, Jun Masudome
  • Patent number: 10241416
    Abstract: An illumination system for illuminating a mask in a scanning microlithographic projection exposure apparatus has an objective with an object plane, at least one pupil surface and an image plane in which a mask can be arranged. A beam deflection array of reflective or transparent beam deflection elements is provided, where each beam deflection element is adapted to deflect an impinging light ray by a deflection angle that is variable in response to a control signal. The beam deflection elements are arranged in or in close proximity to the object plane of the objective.
    Type: Grant
    Filed: March 13, 2015
    Date of Patent: March 26, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Markus Deguenther, Michael Layh
  • Patent number: 10238893
    Abstract: The present disclosure relates to methods and systems for radiotherapy. Embodiments of the present disclosure may receive a medical image including images of a target and an organ at risk (OAR). Some embodiments may also receive a target dose and a constraint on an OAR dose. Some embodiments may also generate a dose application plan based on the target dose and the constraint. Generation of the dose application plan may include determining a placement of an arc along which radiation is to be applied based on the target dose and a location of the target; dividing the arc into a plurality of segments; determining a dose rate associated with each segment; calculating a predicted OAR dose based on the determined dose rate; and comparing the predicted OAR dose with the constraint on the OAR dose to determine whether the predicted OAR dose satisfies the constraint on the OAR dose.
    Type: Grant
    Filed: April 11, 2017
    Date of Patent: March 26, 2019
    Assignee: Elekta, Inc.
    Inventor: Brett Mathew Sloman
  • Patent number: 10213625
    Abstract: In one embodiment of the invention, a method for irradiating a target is disclosed. A proton beam is generated using a cyclotron. A first information is provided to an energy selection system. An energy level for the protons is selected using an energy selection system based on the first information. The first information comprises a depth of said target. The proton beam is routed from the cyclotron through a beam transfer line to a scanning system. A second information is provided to the scanning system. The second information comprises a pair of transversal coordinates. The proton beam is guided to a location on the target determined by the second information using a magnet structure. The target is irradiated with the protons.
    Type: Grant
    Filed: January 9, 2017
    Date of Patent: February 26, 2019
    Assignee: Varian Medical Systems Particle Therapy GMBH
    Inventor: Holger Goebel
  • Patent number: 10217654
    Abstract: The present disclosure describes a method and apparatus for determining whether components in a semiconductor manufacturing system are authorized for use in that system. By embedding an identification feature in the component, it is possible for a controller to determine whether that component is qualified for use in the system. Upon detection of an unauthorized component, the system may alert the user or, in certain embodiments, stop operating of the system. This identification feature is embedded in a component by using an additive manufacturing process that allows the identification feature to be embedded in the component without subjecting the identification feature to extreme temperatures.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: February 26, 2019
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Craig R. Chaney, Adam M. McLaughlin
  • Patent number: 10199148
    Abstract: In particle beam irradiation equipment, a control unit causes a storage unit to store, as position information of reference positions, position information of electromagnets that is acquired at the time of their first alignment, by cameras, and then acquires displacement amounts, based on the position information of the reference positions stored in the storage unit and from position information of the electromagnets acquired at the time of their realignment, by the cameras.
    Type: Grant
    Filed: November 28, 2014
    Date of Patent: February 5, 2019
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Toshihiro Otani, Takaaki Iwata
  • Patent number: 10195461
    Abstract: A particle therapy apparatus for irradiating a diseased part of a patient's eye with a charged particle beam comprises a particle accelerator to generate the particle beam, a movable irradiation nozzle adapted to direct the particle beam towards the patient's eye according to different beam directions, and a patient support adapted to receive and hold the patient in a treatment position. The apparatus further comprises a pencil beam scanning subsystem configured to scan the particle beam over the diseased part of the patient's eye, a movable marker arranged in such a way that it is visible by the patient while he is in the treatment position and a controller configured to move said marker to a pre-determined and patient-specific position before starting an irradiation of the eye with the particle beam.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: February 5, 2019
    Assignee: Ion Beam Applications S.A.
    Inventor: Carolina Fuentes
  • Patent number: 10188875
    Abstract: Disclosed is a tumor surface dose enhancing radiotherapy apparatus using a magnetic field, including a radiation beam generating unit that irradiates a radiation beam towards a tumor of a patient, a magnetic field generating unit that forms a magnetic field that is parallel to the radiation beam between the radiation beam generating unit and the tumor of the patient, and a control unit that controls a surface dose of the tumor by adjusting an intensity and an effective area of the magnetic field of the magnetic field generating unit.
    Type: Grant
    Filed: October 14, 2016
    Date of Patent: January 29, 2019
    Assignee: THE ASAN FOUNDATION
    Inventors: Jung Won Kwak, Nurihyun Jung, Byung Chul Cho, Seung Do Ahn, Sang Wook Lee, Jae Beom Bae
  • Patent number: 10190953
    Abstract: Sample pillars for x-ray tomography or other tomography scanning are created using an innovative milling strategy on a Plasma-FIB. The strategies are provided in methods, systems, and program products executable to perform the strategies herein. The milling strategy creates an asymmetrical crater around a sample pillar, and provides a single cut cut-free process. Various embodiments may include tuning the ion dose as a function of pixel coordinates along with optimization of the beam scan and crater geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency. A novel cut-free milling pattern is provided with a crescent shape and optimized dwell-time values.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: January 29, 2019
    Inventors: Guillaume Delpy, Guillaume Audoit, Laurens Franz Taemsz Kwakman, Chad Rue, Jorge Filevich
  • Patent number: 10188483
    Abstract: A gastro-intestinal (GI) scope disinfection and sterilization device including a gastro-intestinal (GI) scope having an insertion tube and a universal cord and an ultraviolet (UV) light assembly, wherein the UV light assembly includes a power source, a UV light box operatively connected to the power source, and first and second UV light sources operatively connected to the UV light box, wherein the first UV light source is located within an interior of the insertion tube and the second UV light source is located within an interior of the universal cord in order to disinfect and sterilize an interior of the gastro-intestinal (GI) scope lumen. Also, an external UV light source assembly is used to substantially surround a UV insertion tube assembly and the exterior of the insertion tube in order to disinfect and sterilize a portion of an exterior portion of the gastro-intestinal (GI) scope.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: January 29, 2019
    Inventor: Phong Duy Bui
  • Patent number: 10186399
    Abstract: A scanning electron microscope capable of properly determining a step of a step pattern formed on a sample regardless of combination of material of a groove of the step pattern and material of a projection of the step pattern, the scanning electron microscope includes a beam source, a detection unit having a first detection unit that detects a secondary electron emitted from the sample at an angle between an optical axis direction of the primary electron beam which is equal to or less than a predetermined value, and a second detection unit that detects a secondary electron emitted from the sample at an angle between the optical axis direction of the primary electron beam which is greater than the predetermined value, and a processing unit to obtain information on the step pattern using the information on a ratio between signals outputted from the first and the second detection unit.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: January 22, 2019
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Mayuka Osaki, Chie Shishido, Maki Tanaka, Hitoshi Namai, Fumihiro Sasajima, Makoto Suzuki, Yoshinori Momonoi
  • Patent number: 10179251
    Abstract: A therapeutic device is provided, including a cylindrical gantry; a pedestal, a particle beam irradiation device, a first rail, and a second rail all disposed in the gantry; the first rail including an arc-shaped portion and a straight portion, the second rail having a same shape as the first rail, a rail motor on the second rail to rotate the second rail in a opposite direction than that of the gantry, first and second moving floors on the rails and respectively including first floor panels rotatably connected to each other and second floor panels rotatably connected to each other, a first end panel of the first floor and a fourth end panel of the second floor being detachably connected to the irradiation device, and a second end panel of the first floor being detachably connected to a third end panel of the second floor.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: January 15, 2019
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hideo Kobayashi, Kiyohiko Kitagawa
  • Patent number: 10168539
    Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: January 1, 2019
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss AG
    Inventors: Thomas Frank, Dirk Doering, Holger Seitz, Mario Laengle, Ulrich Matejka