Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.

Abstract: An article detection method applied to an article detection device is provided. The method includes controlling at least one lighting device to emit a light beam towards a carrier. Once at least one camera is controlled to capture at least one image of the carrier; and a placement situation of articles in the carrier is detected based on the captured image using an article detection model.

Abstract: A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in the substrate carrier for loading through the wafer load opening, a movable arm movably mounted to the frame so as to move relative to the wafer load opening and having at least one end effector movably mounted to the movable arm to load wafers from the substrate carrier through the wafer load opening, an image acquisition system including an array of cameras arranged on a common support and each camera fixed with respect to the common support that is static with respect to each camera of the array of cameras, wherein each respective camera is positioned with a field of view disposed to view through the wafer load opening with the common support positioned by the movable arm.

Abstract: A method of generating corrected fluorescence data of concentrations of a targeted fluorophore in tissue of a subject includes administering first and second fluorescent contrast agents to the subject, the first contrast agent targeted to tissue of interest, the second agent untargeted. The tissue is illuminated with light of a first stimulus wavelength and first data is acquired at an appropriate emissions wavelength; the tissue is illuminated at a second stimulus wavelength and second data is acquired at a second emissions wavelength associated with the second agent, the first and second emissions wavelength differ. Difference data is generated by subtracting the second data from the first data. A system provides for stimulus and capture at multiple wavelengths, with image storage memory and subtraction code, to perform the method. Corrected data may form an fluorescence image, or is used to generate fluorescence tomographic images.

Abstract: According to one aspect, a relatively low-cost sensor for use on an autonomous vehicle is capable of detecting moving objects in a range or a zone that is between approximately 80 meters and approximately 300 meters away from the autonomous vehicle. A substantially single fan-shaped light beam is scanned for a full 360 degrees in azimuth. Using frequency-modulated-continuous-wave (FMCW) or phase coded modulation on the beam, with back end digital signal processing (DSP), moving objects may effectively be distinguished from a substantially stationary background.

Abstract: A method of manufacturing a stacked substrate by bonding a first substrate and a second substrate, including a step of determining, based on information about curving of each of the first substrate and the second substrate, whether or not the first substrate and the second substrate satisfy a predetermined condition, and, a step of bonding the first substrate and the second substrate if the predetermined condition is satisfied. The stacked substrate manufacturing method described above includes a step of estimating, based on the information, an amount of misalignment which occurs after the first substrate is bonded to the second substrate and the predetermined condition may include that the amount of misalignment is equal to or less than a threshold.

Abstract: The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.

Abstract: A system and method of measuring misregistration in the manufacture of semiconductor device wafers is disclosed. A first layer and the second layer are imaged in a first orientation with a misregistration metrology tool employing light having at least one first wavelength that causes images of both the first periodic structure and the second periodic structure to appear in at least two planes that are mutually separated by a perpendicular distance greater than 0.2 ?m. The first layer and the second layer are imaged in a second orientation with the misregistration metrology tool employing light having the at least one first wavelength that causes images of both the first periodic structure and the second periodic structure to appear in the at least two planes. At least one parameter of the misregistration metrology tool is adjusted based on the resulting analysis.

Abstract: A method of generating corrected fluorescence data of concentrations of a targeted fluorophore in tissue of a subject includes administering first and second fluorescent contrast agents to the subject, the first contrast agent targeted to tissue of interest, the second agent untargeted. The tissue is illuminated with light of a first stimulus wavelength and first data is acquired at an appropriate emissions wavelength; the tissue is illuminated at a second stimulus wavelength and second data is acquired at a second emissions wavelength associated with the second agent, the first and second emissions wavelength differ. Difference data is generated by subtracting the second data from the first data. A system provides for stimulus and capture at multiple wavelengths, with image storage memory and subtraction code, to perform the method. Corrected data may form an fluorescence image, or is used to generate fluorescence tomographic images.

Abstract: Disclosed herein is a system for controlling a mining machine within an underground mine. A rotatable laser source sends laser light and return light sensor receives reflected laser light and provides an indication of distance and return light intensity at multiple different rotation angles. A co-ordinate reference point comprises a pattern of varying reflectivity and provides at least a 2D co-ordinate position. A processor determines an absolute co-ordinate position in space of the mining machine as the mining machine moves through the underground mine. The processor collects intensity values of reflected laser light for multiple respective rotation angles and detects the pattern of the reference point in the multiple intensity values of reflected laser light, and determines the absolute co-ordinate position in space of the mining machine based on spatial information of the detected pattern.

Abstract: A reflector matching algorithm based on triangle perimeter matching includes recording the position information of known reflectors in a map one by one, generating a scene coordinate point layout, taking points of the recorded reflectors and freely combining basic triangles with all side lengths not exceeding twice of the maximum detection distance of a laser sensor; recording all the combined basic triangles, then recording the corresponding side lengths, the position of each vertex, and the perimeter of each basic triangle, and saving the records in an AGV; reading the angle and distance information of the reflectors and freely combining detection triangles for the detected reflectors; and respectively calculating the side lengths and perimeters of the detection triangles, and searching and pairing in the basic triangle combination to determine the real-time position of the laser sensor.

Abstract: An apparatus having a first aligner rigidly connected to a first sensor component. The apparatus having a second aligner rigidly connected to a second sensor component. The apparatus having a gap positioned to receive media, wherein the first aligner is configured to attract the second aligner across the gap to align the first sensor component with the second sensor component.

Abstract: A numerical control device includes a drive-shaft movement-amount estimation unit to estimate a first movement amount of a first object that is a target to be moved by a first drive shaft by using a first drive signal, an undriven-object movement-amount estimation unit to estimate a second movement amount of a second object in a three dimensional space, which is generated due to a drive force of the first drive shaft, by using the first drive signal, a correction-amount calculation unit to calculate a correction amount for the first drive signal on the basis of the first movement amount and the second movement amount, and a first correction-signal output unit to output a first corrected drive signal obtained by correcting the first drive signal by the correction amount to a drive unit to drive the first drive shaft.

Abstract: A deposition mask has a central axis extending in a first direction, arranged at a central position in a second direction orthogonal to the first direction. Spaced apart point P1 and Q1 are provided on one side of the central axis, and spaced apart points Q1 and Q2 are provided on another side of the central axis. When a dimension from point P1 to point Q1 is X1, a dimension from point P2 to a point Q2 is X2, and a design value is ?x, the deposition mask satisfies the following.

Abstract: Provided are a substrate transfer apparatus and a control method thereof. The substrate transfer apparatus includes a body having a gate through which a substrate passes; a substrate transfer robot provided inside the body and including an end effector that includes a first seating portion and a second seating portion horizontally spaced apart from each other; a sensing portion including a light emitting portion and a light receiving portion spaced apart from each other in a diagonal direction with respect to a longitudinal direction of the first and second seating portions with reference to the end effector, and detecting the position of at least one of the first seating portion and the second seating portion when the end effector moves; and a control unit for determining whether the end effector is misaligned or sagged by using a measured value measured by the sensing portion and a predetermined reference value.

Abstract: A method for producing a frame-equipped vapor deposition mask sequentially includes preparing a vapor deposition mask including a metal mask having a slit and a resin mask having an opening corresponding to a pattern to be produced by vapor deposition at a position overlapping the slit, the metal mask and the resin mask being stacked, retaining a part of the vapor deposition mask by a retainer and stretching the vapor deposition mask retained by the retainer outward, and fixing the vapor deposition mask in a state of being stretched to a frame having a through hole. During stretching, any one or both adjustments of a rotating adjustment and a moving adjustment of the vapor deposition mask are performed with respect to the vapor deposition mask in the state of being stretched or with the vapor deposition mask being stretched.

Abstract: A method of and an apparatus for use in determining one or more alignment properties of an illumination beam of radiation emitted by a radiation source are provided. The illumination beam is for irradiating a target area on a substrate in a metrology apparatus. The method comprises: (a) obtaining a first set of intensity data; (b) obtaining a second set of intensity data; (c) processing said first and second sets of intensity data to determine said one or more alignment properties of said illumination beam of radiation; wherein said processing involves comparing said first and second sets of intensity data to calculate a value which is indicative of a translation of said illumination beam of radiation.

Abstract: Methods, devices and systems for quantifying fluorescence and optical properties in a turbid medium such as tissue are disclosed. One of the methods comprises: providing fluorescence emission and reflectance wavelengths detected from a target surface where each of the detected wavelengths is associated with a respective known distance between a respective excitation source giving rise to the respective detected wavelength and a detector detecting the respective detected wavelength; and calculating the optical properties based on the detected wavelengths and the respective known distances. The known distances may be predetermined to enable calculation of a desired range of values for the optical properties. The calculation of the optical properties may be based on a model of light interaction with the turbid medium where the model limits a range of calculated values for the optical properties.

Abstract: A system for transporting substrates and precisely alignment the substrates to shadow masks. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of pedestals are loosely positioned, each of the pedestals includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. Two sidebars are configured to freely slide on the base. Each of the sidebars includes a set of horizontal alignment wheels that precisely align the substrate in the horizontal direction. Substrate support claws are attached to the sidebars in precise alignment to the vertical alignment wheels and the horizontal alignment wheels.

Abstract: The image inspection device includes a reference height setting part configured to set a reference height as a reference of vibration component estimation, a vibration estimation part configured to estimate a vibration component in an inspection environment, based on the two-dimensional profile generated by the two-dimensional profile generation part and the reference height set by the reference height setting part, a profile correction part configured to remove, from the two-dimensional profile, the vibration component estimated by the vibration estimation part, a three-dimensional data generation part configured to generate three-dimensional data of the inspection object from a plurality of the two-dimensional profiles from which the vibration component is removed by the profile correction part, and an inspection part configured to conduct outer appearance inspection of the inspection object, based on the three-dimensional data generated by the three-dimensional data generation part.

Abstract: A device including a light source, illumination system, objective lens, and detector. The light source produces measurement light beams, the illumination system directs measurement light beams into the objective lens, and the objective lens directs measurement light beams onto an overlay marker, collects main maximums of diffracted light beam diffracted from the overlay marker, and focuses main maximums of diffracted light beam onto a pupil plane of the objective lens. The detector is positioned on the pupil plane of the objective lens and used for detecting the position of each main maximums of diffracted light beam on the detector, to obtain the overlay error of said overlay marker. Diffracted-light position information is used to measure overlay error, and measurement signals are not affected by illumination uniformity, transmissivity uniformity, etc.

Abstract: A wafer cutting apparatus comprises a wafer positioning device for holding a wafer that is substantially covered with an opaque material such as molding compound and that has an exposed peripheral area, and for displacing the wafer relative to a wafer inspection system comprising a camera having a field of view. To perform visual data acquisition of said dicing street portions, the wafer is displaced such that a center of the camera's field of view follows a path along the exposed peripheral area of the wafer. A processing unit analyzes the visual data acquired for detecting or calculating locations and directions of the dicing streets. A wafer cutting tool cuts the wafer along straight lines between the dicing street portions which have been detected or calculated by the processing unit.

Abstract: A substrate process system which includes a plurality of arranged process machines, and in which a circuit substrate is transported from an upstream process machine to a downstream process machine is provided. One process machine inspects small electronic components, and another process machine 90 inspects large electronic components. The small mounted components are inspected in detail. When the large mounted components are inspected, it is not necessary to inspect the large electronic components in detail to the degree that the small electronic components are inspected. It is possible to reliably inspect the small mounted components even though the inspection process requires a certain length of time, and it is possible to inspect the large components in less detail than the inspection process for the small components. Accordingly, it is possible to reliably perform an inspection process, and to decrease an inspection time at the same time.

Abstract: Systems and methods are provided for evaluating a fresh tissue sample, prepared as to fluoresce under illumination, during a medical procedure. A structured light source is configured to project a spatially patterned light beam onto the fresh tissue sample. An imaging system is configured to produce an image from fluorescence emitted from the illuminated fresh tissue sample. A system control is configured to provide a human-comprehensible clinically useful output associated with the medical procedure.

Abstract: The invention relates to a device and method for the orientation of electrically driven transport vehicles, especially so-called AGVs (automatic guided vehicles), automatically guided in factory buildings, the invention having the following features: a) a camera for identifying the reference points of a planned route using markers, in particular on the basis of the data matrix code, wherein a position marker is made up of an arrangement of nine data matrix codes arranged in a square, and wherein the diagonals of 3 individual codes are located on a straight line; b) a front ultrasound sensor and a rear ultrasound sensor; c) a laser scanner; and d) a light-field sensor.

Abstract: A nuclear fusor apparatus includes magnetically conductive spherical shell, solid iron ball, annular ferromagnetic guide rails, orbiting members, ignition, and gas outlet for transmitting mixed gas of deuterium and tritium, wherein the annular ferromagnetic guide rails are symmetrically fixed on an outer wall of the spherical shell; the orbiting members are located above the annular ferromagnetic guide rails; the orbiting members cooperate with the annular ferromagnetic guide rails to generate magnetic levitation force and propelling force; a water pipe is positioned inside the spherical shell, an end of the water pipe is connected to a water pump, another end of the water pipe is connected to an air extraction unit; the ignition and the gas outlet are both fixed on the outer wall of the spherical shell, an ignition end of the ignition extends into the spherical shell, and an end of the gas outlet extends into the spherical shell.

Abstract: The present technology provides methods, systems, and apparatuses to achieve high throughput and high speed acquisition of partial wave spectroscopic (PWS) microscopic images. In particular, provided herein are high-throughput, automated partial wave spectroscopy (HT/A-PWS) instruments and systems capable of rapid acquisition of PWS Microscopic images and clinical, diagnostic, and research applications thereof.

Abstract: The disclosed technology relates to a method and system for localizing and confining an autonomous mobile work system or systems for performing work in a user defined space is disclosed. The system can include two or more variable reflective base stations at first and second locations that can modify their optical or electromagnetic reflectivity based upon either an external command via wired or wireless communications interface, or automatically on a regular or asynchronous time schedule under programmed or user settable control. The system also can include one or more autonomous mobile work systems capable of sensing the state of the variable reflectance base stations via sensors such as electromagnetic or optical sensors capable of measuring distance to the reflective base stations.

Abstract: A deposition apparatus includes a sheet, an edge portion of which is integrally combined with a sheet frame, an electrostatic chuck attached to a bottom surface of the sheet, the electrostatic chuck adhering a substrate by a force of static electricity, a metal mask located below the electrostatic chuck, an edge portion of the metal mask being combined with a mask frame, the metal mask having a predetermined patterned opening, and the substrate being mounted to the upper surface of the metal mask, a transfer member coupled to a side surface of the sheet frame, the transfer member flattening the sheet by pulling the sheet to side directions, and a magnetic plate located above the sheet, the magnetic plate closely attaching the substrate to the electrostatic chuck by pulling the metal mask using a magnetic force.

Abstract: The present disclosure provides a sealant curing device and a mask plate thereof. The mask plate includes a light transmission region and a light shielding region. The light transmission region includes at least one through hole defined in the light transmission region. After the completion of exposing and curing sealant, at the beginning of the downward movement of the liquid crystal panel away from the mask plate, the presence of the through holes increases an area of air inlet, thereby increasing air inflow and reducing flow speed of intake air, so as to reduce a pressure difference of an air pressure between the mask plate and the liquid crystal panel and an air pressure of ambient air. Under conditions of same action area, a pressure force generated by the pressure difference and applied to the mask plate may be reduced, thereby reducing load for adsorbing the mask plate via vacuum.

Abstract: A partial section of an aerial image measuring unit is arranged at a wafer stage and part of the remaining section is arranged at a measurement stage, and the aerial image measuring unit measures an aerial image of a mark formed by a projection optical system. Therefore, for example, when the aerial image measuring unit measures a best focus position of the projection optical system, the measurement can be performed using the position of the wafer stage, at which a partial section of the aerial image measuring unit is arranged, in a direction parallel to an optical axis of the projection optical system as a datum for the best focus position. Accordingly, when exposing an object with illumination light, the position of the wafer stage in the direction parallel to the optical axis is adjusted with high accuracy based on the measurement result of the best focus position.

Abstract: A mask assembly includes a frame for forming an opening, and a mask fixed to the frame while a tensile force is applied thereto and forming a plurality of pattern openings. The frame includes a frame main body for forming an opening, and a plurality of moving members installed to be movable in at least one direction on the frame main body. The mask is fixed to the moving members while a tensile force is applied thereto.

Abstract: A method of aligning a mask assembly includes: providing a mask assembly including a mask and a mask frame; and adjusting the mask frame by independently moving at least a position of a lower portion of the mask frame and an upper portion of the mask frame.

Abstract: For inspection of a pattern such as a semiconductor device, it is useful to selectively detect a defect on the specific pattern in order to estimate the cause of the occurrence of the defect. An object of the invention is to provide a charged particle beam apparatus capable of setting, on the basis of the shape of the pattern on a sample, a region to be inspected. The invention is characterized in that the contour of the pattern on the sample is extracted using a template image obtained on the basis of an image of the sample, the region to be inspected is set on the basis of the contour of the pattern, a defect candidate is detected by comparing the image to be inspected with a comparative image, and the sample is inspected using a positional relationship between the region to be inspected and the defect candidate included in the region to be inspected.

Abstract: Cut spacer reference marks, targets having such cut spacer reference marks, and methods of making the same by forming spacer gratings around grating lines on a first layer, and fabricating a template mask that extends across and perpendicular to such spacer gratings. Cut spacer gratings are etched into a second layer using the template mask to superimpose at least a portion of the spacer gratings of the first layer into the second layer.

Abstract: Methods and structures for testing a microelectronic packaging structure/device are described. Those methods may include placing a device in a floating carrier, wherein the floating carrier is coupled to a socket housing by pin dowels disposed in four corners of the socket housing, and wherein at least two actuating motors are disposed within the socket housing, and micro adjusting the device by utilizing a capacitive coupled or a fiber optic alignment system wherein a maximum measured capacitance or maximum measured intensity between alignment structures disposed in the socket housing and alignment package balls disposed within the device indicate optimal alignment of the device. Methods further include methods for active co-planarity detection through the use of a capacitive-coupled techniques.

Abstract: To detect a straight line using the Hough transform taking into consideration not only the number of points but also other properties of the straight line, the Hough transform unit performs a Hough transform on contour-enhanced binary image data. The Hough table stores a count after the Hough transform. The adjustment unit adjusts the count. The straight line detection unit detects a straight line based on the adjusted count. Additionally, to detect a straight line, independent of its direction or location in the image, for each straight line in the binary image data, the straight line calculation unit determines the intersections where that straight line cuts up the binary image data to calculate the intersection distance. The normalization unit divides the count stored in the Hough table by the intersection distance to normalize the count. The straight line detection unit detects a straight line based on the normalized count.

Abstract: An apparatus for inspection of a surface of a device comprises a projection module operative to project a pattern along a projection axis of the projection module onto the device. An imaging module receives an image of the pattern reflected from the device along an imaging axis of the imaging module onto an image sensor. A lens comprised in the imaging module has a first magnification in a first direction orthogonal to the imaging axis and a second magnification different from the first magnification in a second direction orthogonal to both the first direction and the imaging axis, which produces different fields of view of the image sensor and resolutions of the image in the first and second directions.

Abstract: There is provided a tube connector for connecting between a fluid sampling tube and a fluid analyzer, the tube connector includes an end face adapted to identify the tube connector, said end face comprising a reflecting surface having one or more reflective regions adapted to reflect light at a predetermined range of wavelengths.

Abstract: A mark detecting device detects a positioning mark on a transfer medium based on light that is emitted to and then reflected from the transfer medium. The mark detecting device includes a light emitting unit that emits light to a target position on the transfer medium; a light receiving unit that receives light reflected from the target position; and an adjusting unit that rotatably supports a detecting unit including at least one of the light emitting unit and the light receiving unit about a center of rotation, which passes through the target position, on the transfer medium and adjusts the rotation angle of the detecting unit with respect to the center of rotation.

Abstract: A visible laser beam scanned by a galvano-scanner system is aligned at each of positioning points on the top surface of a master work by manual operation to record sensor position signals of position sensors on galvano-scanners. The sensor position signals on each positioning point are recorded to create a drive pattern in accordance with recorded sensor position signals. The drive pattern no longer has optics system error sources including focus error and attachment error as well as errors caused by scale, offset and the like, also eliminating the need for entering a distance as far as the top surface of the work. Therefore, the drive pattern with error components removed can be created with ease.

Abstract: A method for producing semiconductor device includes: performing first, second and third exposures of a photoresist film formed on a semiconductor wafer via a mask; wherein: first, second and third shot regions respectively defined by the first, second and third exposures are aligned in a first direction; the mask has a shot region including a peripheral scribe region having a first and second side crossing the first direction; the photoresist film is of positive type, a first pattern is formed as a light shielding pattern disposed on the first side, and a second pattern is formed as a light transmitting region disposed on the second side; the first and second exposures are performed in such a manner that the first and second patterns do not overlap each other; and the second and third exposures are performed in such a manner that the first and second patterns overlap each other.

Abstract: An off-axis telescope having a primary optical element configured to reflect an energy beam from an optical reference source that emits the energy beam along an optical path. The telescope includes angle sensors arranged on a periphery of the primary optical element to determine angular motion of the energy beam from the optical reference source. The angle sensors are operable to be biased to positional settings associated with a desired pointing direction of the energy beam. A secondary optical element is arranged in the optical path and translated along three orthogonal axes. A plurality of steering mirrors arranged between the optical reference source and the secondary optical element is configured to be tilted in response to a control signal. A controller auto-aligns the telescope by at least translating the secondary optical element and tilting the steering mirrors via the control signal using at least inputs from the plurality of angle sensors.

Abstract: In an optical position detection device, when light source sections emit detection light, a light detecting section detects detection light reflected from a object to detect the coordinates of the object. When seen from the detection space, the light detecting section is located inward from a plurality of light source sections, and each of the plurality of light source sections includes first and second light emitting elements. Therefore, the position of the object can be detected on the basis of a comparison result of the received light intensity in the light detecting section when the first light emitting element is turned on and the received light intensity in the light detecting section when the second light emitting element is turned on in both the case where the object is located outside a region between the light source sections and the case where the object is located inside the region.

Abstract: Measurement of motion errors of a linear stage is performed to enable accurate measurement of motion errors in linear directions and a rotational direction in the linear stage using a diffraction grating. A first beam splitter splits a laser beam emitted from a light emitting unit. A first measurement unit measures a unidirectional linear motion error of the linear stage using one laser beam component split by the first beam splitter and a second measurement unit measures an angular motion error and another unidirectional linear motion of the linear stage error using a diffracted beam component obtained by diffracting another laser beam component split by the first beam splitter through the diffraction grating. A third measurement unit circularly polarizes the beam component diffracted through the diffraction grating to measure a third unidirectional linear motion error of the linear stage.

Abstract: Disclosed are a photoelectric sensor and a photoelectric sensor system capable of accurately detecting an object without being affected by disturbance even though the object is very thin. A photoelectric sensor according to an embodiment of the invention includes a light emitting unit and a light receiving unit. The photoelectric sensor detects whether there is an object between the light emitting unit and the light receiving unit based on a variation in the intensity of a light signal received by the light receiving unit. The light receiving unit receives a light signal that is emitted from the light emitting unit to the light receiving unit without intersecting the object and a light signal that is emitted from the light emitting unit to the light receiving unit through the object, and is operated in synchronization with a light emission timing signal of the light emitting unit.

Abstract: Inspection guided overlay metrology may include performing a pattern search in order to identify a predetermined pattern on a semiconductor wafer, generating a care area for all instances of the predetermined pattern on the semiconductor wafer, identifying defects within generated care areas by performing an inspection scan of each of the generated care areas, wherein the inspection scan includes a low-threshold or a high sensitivity inspection scan, identifying overlay sites of the predetermined pattern of the semiconductor wafer having a measured overlay error larger than a selected overlay specification utilizing a defect inspection technique, comparing location data of the identified defects of a generated care area to location data of the identified overlay sites within the generated care area in order to identify one or more locations wherein the defects are proximate to the identified overlay sites, and generating a metrology sampling plan based on the identified locations.

Abstract: A method and optical device measures the rotation of an object, including a light source emitting a collimated incident light beam, and a reflecting plane optical interface to be fastened to the object and forming a first reflected beam. The device includes a corner reflector fastened to the object, and having reflecting plane faces forming a second reflected beam, and a detection system capable of measuring the displacement ?1 of the first reflected beam, and the displacement ?2 of the second reflected beam. A processing system calculates, as a function of ?1 and of the distance D1 between the detection system and the reflecting plane optical interface, and of the measurement of ?2 and of the distance D2 between the detection system and the corner reflector, a measurement of the rotation ? of the object between an initial position and a measurement position.

Abstract: Imprint lithography benefits from precise alignment between a template and a substrate during imprinting. A moiré signal resulting from indicia on the template and the substrate are acquired by a system comprising a line-scan camera and a digital micromirror device (DMD) which provides a high bandwidth, low-latency signal. Once acquired, the moiré signal may be used directly to align the template and the substrate without need for discrete position/angle encoders.

Abstract: The present invention provides a surveying instrument, which comprises rotating units operated rotatably, supporting units to support the rotating units, a reflection mirror portion provided on one of the supporting unit or the rotating unit, tilt sensors arranged on the other of the supporting unit and the rotating unit and for projecting a detecting light and for detecting a relative tilting of the reflection surface of the reflection mirror portion with respect to the supporting unit by receiving the detecting light reflected by the reflection mirror portion, and a control unit for calculating an unsteadiness of rotation of the rotating unit based on a signal from the tilt sensor.