Abstract: The actuator includes a control unit configured to allow a first control capable of driving a drive part with a first driving force and a second control capable of driving the drive part with a second driving force which is stronger than the first driving force, a moving part configured to move in a predetermined direction, an elastic member configured to receive at least one of the first driving force and the second driving force from the drive part and to supply a force for the moving part to move to the moving part, and a detection unit configured to supply a detection signal for detecting a stop of the drive part to the control unit, in which the control unit performs the second control when a stop of the drive part is detected after performing the first control.

Abstract: A first opening and closing mechanism, which includes a first cam groove and a first cam roller and which causes a valve assembly to reciprocate between an intermediate position and a first closed position, and a second opening and closing mechanism, which includes a second cam groove and a second cam roller and which causes the valve assembly to reciprocate between the intermediate position and a second closed position, are provided so as to be operable separately, the first and second opening and closing mechanisms being disposed adjacent to each other in a thickness direction D of a gate valve.

Abstract: A dual gate valve includes two valve plates that open and close two openings of a valve box, a support bar that supports the two valve plates, a valve rod connected to the support bar, and an operation unit that performs an open and close operation of the two valve plates via the valve rod. The support bar and the valve plate linearly and elongatedly extend in a lateral direction perpendicular to a central axis of the valve rod. The valve rod is connected to a central portion in the long direction of the support bar, and one and the other of the two valve plates are tiltably attached to one end and the other end in the long direction of the support bar via elastic members, respectively.

Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

Abstract: A valve actuator assembly having an actuator housing coupled to a bonnet and a housing lid. A hydraulic cylinder is positioned within the actuator housing and directly coupled to the bonnet. A piston is positioned within the hydraulic cylinder and coupled to a spring lifter assembly and a spring is positioned within the actuator housing and having a first end and a second end, the first end being coupled to a lower surface of the housing lid, and the second end being coupled to the spring lifter assembly. An operating stem is coupled to the piston and positioned in a channel extending through the bonnet to a valve body assembly.

Abstract: A gate valve 1 includes: a plate 2 having an opening portion 9; a plate 3 located opposite to the plate 2; a guide space 5 formed between the plates 2, 3; and a plate 6 provided in the space 5. The plate 6 is slidable along a direction in which an opening portion 11 is offset from the opening portion 9 in the space 5 in a state in which the plate 6 is pressed by the pressing portion 13 and separated from the plate 2, and a position of the plate 6 is fixed with respect to the plate 2 in the space 5 in a state in which the plate 6 is pressed by the pressing portion 16 and is in contact with the plate 2. The pressing portions 13, 16 each have a bellows structure formed by diffusion-bonding metal plates 18 and 19 to each other.

Abstract: A valve actuator assembly having an actuator housing coupled to a bonnet and a housing lid. A hydraulic cylinder is positioned within the actuator housing and directly coupled to the bonnet. A piston is positioned within the hydraulic cylinder and coupled to a spring lifter assembly and a spring is positioned within the actuator housing and having a first end and a second end, the first end being coupled to a lower surface of the housing lid, and the second end being coupled to the spring lifter assembly. An operating stem is coupled to the piston and positioned in a channel extending through the bonnet to a valve body assembly.

Abstract: The present invention relates to a vacuum valve, and more particularly, to a vacuum valve including a valve housing with a blade, a main shaft, a vertical moving part, a horizontal moving part, a horizontal moving unit, and a main body bracket. Opening and closing guide holes are obliquely formed in both side surfaces such that cam rollers, having passed through the vertical moving guide grooves, are inserted into the grooves so as to guide the fore and aft movement of the blade according to the vertical movement of the horizontal moving unit.

Abstract: A reflow soldering apparatus, system, and method. The reflow soldering system may include a housing that is alterable between an open state and a closed state, the open state being used for loading and unloading of substrates and the closed state being used during operation. The system may also include a heating assembly located within the chamber and a cooling assembly that is spaced apart from the heating assembly. A support member may be included to support a substrate within the chamber. A first actuator unit may be operably coupled to either the heating and cooling assemblies jointly, or to the support member. Additionally, the system may include a control unit coupled to the first actuator unit to cause relative movement between the substrate and the heating and cooling assemblies. Thus, the substrate can move between the heating and cooling assemblies during the various stages of the reflow soldering process.

Abstract: A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing.

Abstract: A valve actuator assembly having an actuator housing coupled to a bonnet and a housing lid. A hydraulic cylinder is positioned within the actuator housing and directly coupled to the bonnet. A piston is positioned within the hydraulic cylinder and coupled to a spring lifter assembly and a spring is positioned within the actuator housing and having a first end and a second end, the first end being coupled to a lower surface of the housing lid, and the second end being coupled to the spring lifter assembly. An operating stem is coupled to the piston and positioned in a channel extending through the bonnet to a valve body assembly.

Abstract: A valve actuator assembly having an actuator housing coupled to a bonnet and a housing lid. A hydraulic cylinder is positioned within the actuator housing and directly coupled to the bonnet. A piston is positioned within the hydraulic cylinder and coupled to a spring lifter assembly and a spring is positioned within the actuator housing and having a first end and a second end, the first end being coupled to a lower surface of the housing lid, and the second end being coupled to the spring lifter assembly. An operating stem is coupled to the piston and positioned in a channel extending through the bonnet to a valve body assembly.

Abstract: {Technical Problem} To provide a gate valve that can control the amount of squeeze of sealing material according to each of situations, that is, under the in-manufacturing or during vacuum-maintaining state; thereby, the invented gate valve is capable of suppressing deterioration of its sealing material and lengthening the service life of the sealing material used therein. {Solution to Problem} The gate valve 100 of the embodiment has the control device 11, which is comprised of the equipment control unit 12 that transmits an instruction either an in-manufacturing CLOSE instruction or a FULL CLOSE instruction and the storage means 13 that stores position date that corresponds to each of such instructions. The control device 11 receives either of such instructions and generates the position signal referring to the corresponding position data.

Abstract: A vacuum valve includes a valve housing (1) with at least one valve opening (2, 3), at least one valve plate (10, 11) and a carrying unit (9), which carries the at least one valve plate (10, 11). The at least one valve plate (10, 11) is connected to the carrying unit (9) via at least two connecting devices, each having a connecting part (45), with a neck portion (47) and an enlarged head portion (48), which projects in relation to the neck portion (47), and having a receiving part (46, 56?), with a respective receiving slot (49) into which the neck portion (47) of the connecting part (45). In order to prevent the connecting parts (45) from moving out of the receiving slots (49), at least one of the receiving parts (46?) of the connecting devices can be rotated about an axis of rotation (80) from an introduction position, in which the associated connecting part (45) can be introduced into the receiving slot (49), by way of its neck portion (47), as far as the end position, into a blocking position.

Abstract: A valve, in particular a vacuum valve, in which, in order to close a passage opening, in particular of the valve, at least one closure member can be moved by a valve drive, starting from a maximum open position, in which the closure member opens the passage opening at least partially, first on a first partial path into an intermediate position, and the closure member can be moved, starting from the intermediate position, on at least one second partial path which is angled away from the first partial path into a closed position, in which the closure member closes the passage opening, the valve drive having at least two cylinder spaces which are loadable in each case with a pressure medium, at least one piston being mounted displaceably in each of the cylinder spaces, and the pistons being supported on one another by way of at least one prestressing element.

Abstract: Embodiments of gate valves and methods of using same are provided herein. In some embodiments, a gate valve for use in a process chamber may include a body having an opening disposed therethrough from a first surface to an opposing second surface of the body; a pocket extending into the body from a sidewall of the opening; a gate movably disposed within the pocket between a closed position that seals the opening and an open position that reveals the opening and disposes the gate completely within the pocket; and a shutter configured to selectively seal the pocket when the gate is disposed in the open position. In some embodiments, one or more heaters may be coupled to at least one of the body or the shutter.

Abstract: This supersonic pulse flow device is intended to provide a technical solution in a number of fields where the injection of a flow must be pulsed as required by the process or in order to limit the power consumption and size of the pumping means. In the case of flows achieved by means of a Laval nozzle, it is possible to generate a uniform supersonic jet at very low temperature (currently up to 20 K), which is stable over hydrodynamic periods of time between 150 and 1000 microseconds. This device is aimed as solving problems relating to the use of aerodynamic tools in research and development and in industrial processes.

Abstract: A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9?, 9?) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9?, 9?) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25?, 26, 26?), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20).

Abstract: An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an “L”-shaped motion.

Abstract: To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is turnably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.

Abstract: A valve having a valve body with a first end, a second end, a longitudinal axis extending between the first end and the second end, and an inclined sliding surface having a longitudinal slot therein. The valve also includes a tubular member with walls defining a passageway extending through the valve body from the first end to the second end; and a slidable member mounted on the valve body and moveable between a first position and a second position. The slidable member is adapted to urge walls of the tubular member towards mutual contact when moved from the first position to the second position.

Abstract: Embodiments of a gate valve equalization system comprise: a gate valve; a gate; a preloading valve arrangement; a floating coupler assembly; a relief valve arrangement; and a means for control. The preloading valve arrangement permits fluid to enter the valve body from the upstream side of the gate. The means for control serves as a control interface allowing engagement of the floating coupler assembly and opening/closing of the gate valve. Engagement of the floating coupler, engages the assembly relief valve arrangement and allows redistribution of fluid pressure and circulation of fluid from one side of the gate to opposing side of the gate within the gate valve.

Abstract: A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.

Abstract: The invention relates to a locking device for a lock opening which is arranged in a wall between a first and a second recipient, said lock opening comprising a blocking element, which is arranged in the inner chamber of the first recipient, and a counter-plate which is associated with the blocking element. A first magnet device is provided in an area of the counter-plate and a second magnet device, which is associated with the first magnet device, is provided in the region of the blocking element. In order to close and/or open the locking device by means of the first and second magnet device, a positive and/or negative contact pressure can be produced between the blocking element and the counter-plate.

Abstract: A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15?, 16, 16?) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5).

Abstract: A gate valve comprises a valve body having an internal working fluid passage and an internal gate chamber extending transverse to the working fluid passage. In addition, the gate valve comprises a gate disposed in the internal gate chamber and movable within the gate chamber between a closed position obstructing fluid flow through the working fluid passage and an open position allowing fluid flow through the working fluid passage. Further, the gate valve comprises an internal sealing arrangement coaxially disposed in the working fluid passage and extending between the valve body and the gate to form a barrier between the internal working fluid passage and the gate chamber. The internal sealing arrangement includes a frustoconical metal sealing surface adapted to sealingly engage an opposed mating frustoconical metal sealing surface on the valve body to form a first tapered metal-to-metal seal between the sealing arrangement and the valve body.

Abstract: An actuator for a gate valve having a gate has a stem coupled to a gate. A spring is coupled to the stem and has an extended length position while the gate is in a closed position and a contracted length position while the gate is in an open position. The spring has a degressive characteristic such that a graph of a force required to move the gate from the closed position to the open position versus a deflection of the spring is a nonlinear curve with a positive slope that decreases when moving from the closed to the open position. The spring may be an array of wavy springs arranged in nested and in valley-to-crest combinations.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: A gate valve includes a floating gate valve seat that effects a seal between a gate of a gate valve and a gate valve body using a metal seal. The gate valve includes a floating gate valve seat interposed between a gate and a gate valve body. The gate valve seat has a spring member with a cylindrical portion secured to the gave valve seat. The spring member has a leg that exerts a spring force against the gate valve body to maintain a seal between the floating gate valve seat and the gate. A metal-to-metal seal seals between the cylindrical portion of the spring member and a cylindrical portion of the gate valve seat.

Abstract: In a gate valve including a valve plate connected to a valve plate mounting portion of at a tip end of a valve rod with a connecting plate and configured to open and close a communicating hole of a valve box with the valve plate, the valve plate includes a mounting hole, a joint flat surfaces coming into press-contact with each other, the valve rod includes a depressed-shaped joint shoulder portion, the joint shoulder portion is formed with an inclined surface configured to guide the valve plate in the direction in which the joint flat surfaces are brought into press-contact with each other, and the coupling plate couples the valve plate and the valve rod with each other.

Abstract: A gate valve is disclosed that may be installed in a pressurized pipe or conduit. The gate valve includes a cylindrical gate housing that has a slot through which a rectangular gate slides between an open and closed position. The gate and gate housing provide seals between the gate valve and the housing section that houses the gate housing when the gate valve is in either an open or a closed position. The bottom seal that engages the pressurized pipe may be equipped with stiffening shields for a higher pressure rating. The operating torque to raise and lower the seal assembly has been substantially reduced by the design of the sliding gate within the gate housing.

Abstract: A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.

Abstract: {Summary} {Technical Problem} To provide a gate valve that can control the amount of squeeze of sealing material according to each of situations, that is, under the in-manufacturing or during vacuum-maintaining state; thereby, the invented gate valve is capable of suppressing deterioration of its sealing material and lengthening the service life of the sealing material used therein. {Solution to Problem} The gate valve 100 of the embodiment has the control device 11, which is comprised of the equipment control unit 12 that transmits an instruction either an in-manufacturing CLOSE instruction or a FULL CLOSE instruction and the storage means 13 that stores position date that corresponds to each of such instructions. The control device 11 receives either of such instructions and generates the position signal referring to the corresponding position data.

Abstract: Embodiments disclosed herein generally relate to a slit valve door assembly for sealing an opening in a chamber. A slit valve door that is pressed against the chamber to seal the slit valve opening moves with the chamber as the slit valve opening shrinks so that an o-ring pressed between the slit valve door and the chamber may move with the slit valve door and the chamber. Thus, less rubbing of the o-ring against the chamber may occur. With less rubbing, fewer particles may be generated and the o-ring lifetime may be extended. With a longer lifetime for the o-ring, substrate throughput may be increased.

Abstract: A valve for the gastight interruption of a flow path is disclosed. A valve housing includes a first opening and a valve seat. A valve disk includes an inner disk portion, which is linearly movable relative to an outer disk portion so that, in a closed setting, a pressure differential acts substantially upon the movable inner disk portion, which is supported on the valve housing. The valve seat has a radially inward pointing first inner face and the outer disk portion has a radially outward pointing first outer face, wherein in the closed setting there exists a radial sealing contact with the first inner face. The outer disk portion has a radially inward pointing second inner face and the inner disk portion has a radially outward pointing second outer face, having a radially sealing contact with the second inner face.

Abstract: A closing unit for a vacuum valve includes a first valve plate (7) for closing a first valve opening (2) of the vacuum valve, a second valve plate (8) for closing a second valve opening (3) of the vacuum valve, and a carrier plate (19) that lies between the valve plates (7, 8) to which the valve plates (7, 8) are fastened detachably. For fastening a corresponding valve plate (7, 8) to the carrier plate (19), at least one clamping piece (20, 21) is used by which interacting clamping surfaces (22-26) are clamped with each other. Of the interacting clamping surfaces (22-26), at least one is constructed as an angular surface by which the corresponding valve plate (7, 8) is pressed against the carrier plate (19).

Abstract: A vacuum valve with a valve housing with a valve opening, a closing element, and at least one peripherally closed seal on the closing element with first and second seal main sections and first and second seal connecting sections allocated to corresponding seat main sections and connecting sections. The seal extends in a groove defined by two side walls and a base wall. The first seal main section is arranged on a front end face of the closing element and has a middle part where the seal extends in a straight line. The seal is clamped by a clamping bar at least across part of the middle part, with the clamping bar fixed on the closing element and forming one of the side walls. Through at least one second sub-region of the longitudinal extent of the seal, the two side walls and base wall are formed by the closing element.

Abstract: A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.

Abstract: Embodiments described herein relate to a retention pin for retaining a seat member in the body pocket of a gate valve. Two retention pins may be installed on the outer circumference of the seat member. The seat member is inserted into the body pocket and rotated so that the retention pins are positioned in grooves in the body pocket and the seat member is retained in the body pocket.

Abstract: The present invention provides more efficient, cost effective coke drum valve devices and system as well as more efficient, cost effective methods for isolating the flow of matter in a delayed coker unit operation. Specifically, embodiments of the invention relate to various seat systems used in valves for delayed coking operations.

Abstract: In one embodiment, a first vacuum chamber of an electron beam column has an opening which is positioned along an optical axis so as to pass a primary electron beam that travels down the column. A source that emits electrons is positioned within the first vacuum chamber. A beam-limiting aperture is configured to pass a limited angular range of the emitted electrons. A magnetic immersion lens is positioned outside of the first vacuum chamber and is configured to immerse the electron source in a magnetic field so as to focus the emitted electrons into the primary electron beam. An objective lens is configured to focus the primary electron beam onto a beam spot on a substrate surface so as to produce scattered electrons from the beam spot. Controllable deflectors are configured to scan the beam spot over an area of the substrate surface. Other features and embodiments are also disclosed.

Abstract: To reduce invasion and adhesion of foreign matters into and onto the gating-member retreat room in the transition from the gate-open state to the gate-close state including retreat and on-shutting-movement of the gating-member. The shutter, being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the stationary seal by such movement of the shutter itself when the gating-member is accommodated in the gating-member retreat room, and, also being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the second gate seal by such movement of the shutter itself when the gating-member, being moved in the shuttering movement room, shuts the exhaust port by making the first gate seal contact with the stationary seal by such movement of the gating-member itself.

Abstract: A gate valve for a vacuum chamber comprises two carriers (5a) each connected to a frame structure providing an essentially plane front by two parallel links (6) and to an actuating rod (12a) by parallel levers (14). Upward motion of the actuating rods (12a) by a piston (17) causes, via the levers (14), upward motion of the carriers (5a) which is transformed into a circular motion by the links (6) where the carriers (5a) at the same time approach the front while remaining parallel to it, moving sealing plates (9) which are fixed to the carriers (5a) to an active position where they press against the front and seal openings (3) therein. Retraction of the piston (17) effects an inverse motion, whereby the sealing plates (9) are completely removed from the openings (3) and the latter made easily accessible.

Abstract: The invention relates to a shuttle valve for interrupting a flow path (F), comprising a valve housing (1) having a valve seat (4) surrounding an opening (3) for the flow path (F). A valve disc (5) is arranged on a rotatably mounted shaft (6). By means of a drive unit (7), the valve disc (5) can be swiveled along a defined displacement curve (K1; K2; K3) from an opened position and leaving the flow path (F) unobstructed over the cross-section of the first opening (3) by a rotational movement about the pivot axis (8) of the shaft (6) and can be moved by a linear movement parallel to the pivot axis (8) in the direction of the valve seat (4) into a closed position so that the flow path (F) is sealed gas-tight by a sealing contact between the valve disc (5) and the valve seat (4). According to the invention, the drive unit (7) has a first drive (9a) for carrying out the rotational movement about the pivot axis (8) and a second drive (10a) for carrying out the linear movement parallel to the pivot axis (8).

Abstract: Methods and apparatus for increasing flow uniformity are provided herein. In some embodiments, a slit valve having increased flow uniformity may be provided, the slit valve may include a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a gas inlet formed in the housing; an outer plenum disposed in the housing and coupled to the gas inlet; an inner plenum disposed in the housing and coupled to the outer plenum via a plurality of holes; and a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the inner plenum.

Abstract: Methods and apparatus for grounding a chamber isolation valve for a processing system are provided. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.

Abstract: A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9?, 9?) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9?, 9?) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25?, 26, 26?), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20).

Abstract: The invention relates to a slide valve, especially for controlling a flow of catalyst or like high-temperature media, having a pipe portion (10) and, arranged therein, a restrictor (11) which has an inlet opening and an outlet opening (12a, 12b) through which flow takes place during operation, and having a slide plate (13) which co-operates with the outlet opening (12b) to control the flow of catalyst and which is movable into an open position and a closed position I, II, the slide plate (13) being mounted so as to be displaceable by means of guide elements (14, 15) arranged on the pipe and on the plate, which guide elements are in engagement with one another. The invention is distinguished by the fact that the pipe-associated guide elements (14) are arranged before the outlet opening (12b) in the direction of flow.

Abstract: A vacuum valve including a valve body with a valve orifice, a closure member for closing the valve orifice, a first piston-cylinder unit, a second piston-cylinder unit, a first control element, and a second control element. When opening the vacuum valve, a pressure medium line, which applies pressure to the opening cylinder space of the second piston-cylinder unit, is blocked during the first part of the opening process, and is released at the end of the first part of the opening process by the first control element. When closing the vacuum valve, a pressure medium line, which applies pressure to the closing cylinder space of the first piston-cylinder unit, is blocked during the first part of the closing process, and is released by the second control element at the end of the first part of the closing process.

Abstract: An apparatus for a gate valve between chambers includes a valve housing defining a flow path. A male valve portion is rotatable on a fixed axis in the housing. The male valve portion including a first male mating surface positioned at a first angle less than perpendicular to the axis. A female valve portion is fixed in the valve housing for receiving the male portion. The female valve portion including a first female mating surface positioned at a second angle matching the first angle. An o-ring seals the male valve portion to the female valve portion when the male valve portion is rotated into the female valve portion. A polished surface contacts the o-ring when the male valve portion is rotated. When the male valve portion is rotated into the female valve portion the o-ring is compressed thereby sealing the gate valve and closing the flow path.