Abstract: A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open both the openings to allow an object to pass therethrough. A lever member is secured to the single shaft. A roller supported by the lever member is kept in engagement with a cam groove of a cam member. A cam support member for supporting the cam member is connected to the piston rod of the three-position air cylinder. A spring is interposed between the lever member and the cam support member. When the piston rod is in the first (lower extremity) position, both the transfer chamber-side valve element and the process chamber-side valve element fully open the transfer chamber opening and the process chamber opening, respectively.

Abstract: In a gate valve having a rectangular gate, generation of flection at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular gate is mounted to a tip end of a shaft operated by driving of a cylinder device and the gate is pressed against a valve seat provided around a rectangular valve opening by tilting the shaft after the gate is moved to a position facing the valve opening by movement of the shaft by driving of the cylinder device, the gate is formed to have an uneven wall thickness including a large thickness in a vicinity of a fulcrum portion connected to the shaft and a small thickness on each of opposite end portion sides.

Abstract: The invention relates to a device and a method for moving a measuring sensor (2) into and out of a pressurized or flow-through conduit (1) or a pressurized or flow-through vessel. The device according to the invention comprises, in this case, a holding element (3) for holding the measuring sensor (2), a guiding element (4) for guiding the holding element (3) and a volume element (5). The holding element (3) can be moved in such a way that the measuring sensor (2) held by the holding element comes to rest in a position completely in the volume element (5). In this position, the measuring sensor (2) can be removed from the holding element (3). With the aid of the device according to the invention and the method according to the invention, it is possible, in particular, to measure the cleanliness of a conduit system blown out with a fluid, without the blow-out operation being interrupted.

Abstract: A valve, such as a gate valve, includes a housing having a fluid conduit and defining a valve seat and a support surface, a seal plate, a counter plate, an actuator for moving the seal plate and the counter plate between an open position and a closed position, and a coupling mechanism operatively coupled between the seal plate, the counter plate, and the actuator. The seal plate is in sealed engagement with the valve seat, and the counter plate is in engagement with the support surface in the closed position. The coupling mechanism retracts the counter plate from the support surface subsequent to retraction of the seal plate from the valve seat as the valve is opened.

Abstract: A gate valve (20) for a semiconductor processing system includes a base frame (28) configured movable along a guide (26) to move toward and away from a valve seat (22), which surrounds an opening portion (14). A first stopper (56) is disposed at the upper end of the guide (26), for defining the movement limit of the base frame (28) on the valve seat (22) side. A swing frame (34) is rotatably attached to the base frame (28), and has an upper end connected to a valve plug (24). The swing frame (34) is connected to the base frame (28) by a link mechanism (36), which can bend and stretch while flexing an intermediate portion, and by a spring and damper member (46). The intermediate portion of the link mechanism (36) has a mediation member (38) connected to a reciprocation rod (54) of an air actuator (52).

Abstract: A suspension of a valve plate of a vacuum valve at a valve rod has a bearing block of rubber-elastic material with first and second side surfaces, one of which side surfaces is fastened to the valve rod or to a plate which is rigidly connected with the latter, and the other side surface is fastened to the valve plate or to a plate which is rigidly, connected with the latter, wherein an inelastic force transmission part is embedded in the rubber-elastic material of the bearing block and extends at oppositely located points or along oppositely located lines up to the side surfaces of the bearing block.

Abstract: A gate valve in which the structure is simplified and inexpensive, movement of a valve body is smooth and high in speed, a force of inclination moving the valve body is strong, and a sealing property of an opening portion can be improved. The gate valve has a valve body capable of sealing the opening portion; a valve rod to which the valve body is fixed; a roller rotatably provided on the other end portion of the valve rod; a roller receiving member having a first holding portion for holding the roller when the valve rod moves the roller straight, an inclined surface for inclining the valve rod, and a second holding portion for holding the roller when the valve rod is inclined up to a predetermined angle; a driving means for moving the roller receiving member straight; and stoppers limiting the straight movement of the valve rod at predetermined positions at which the valve body closes the opening portion. This gate valve is preferably driven by the cylinder apparatus.

Abstract: A vacuum valve comprises a valve opening which is provided in a valve housing and can be closed by a valve plate arranged at least one valve rod, at least a first piston-cylinder unit by which the valve plate is displaceable from its open position releasing the valve opening into a position which is located opposite the valve opening but is lifted from the valve seat, and at least a second piston-cylinder unit by which the valve plate can be moved toward the valve seat and pressed against it from its position which is located opposite the valve opening but is lifted from the valve seat.

Abstract: A vacuum arrangement with a vacuum disc valve. A support plate is movably guided along a wall with an opening that is closed or opened by a valve. A seal plate is provided on the support plate which is controlled and actuated through a cylinder chamber. When the support plate is moved, the seal plate is displaced in the direction of the opening and is tightly placed on the borders of said opening by actuation in the cylinder chamber. The resulting sealing forces are absorbed by the movement guides of the support plate.

Abstract: A gate valve including a valve disc for opening and closing an opening formed in a partition wall for separating a processing chamber from an other chamber, a valve seat formed on the wall around the opening, and a block provided on a side surface of the valve disc facing the processing chamber for filling up the opening. The valve disc is moved selectively brought into contact with the valve seat. When the opening is closed by the valve disc the block is positioned in the opening to close the opening, and when the opening is not closed by the valve disc the block is not positioned in the opening. A gate valve includes a valve disc for opening and closing one side of an opening formed in a partition wall for separating a processing chamber from an other chamber, a valve seat formed on one side surface of the wall around the opening, a closing member for opening and closing the other side of the opening, and a groove formed in the wall for receiving therein the closing member.

Abstract: A vacuum valve comprises a wall (2) with a valve opening (1) and a valve seat (4), a valve plate (3) which is pressed against the valve seat (4) in the closed state, an elastic sealing ring (19, 19′) which is arranged at the valve plate (3) or at the valve seat (4) and, in the closed state of the valve, is pressed by a pressing force against a sealing surface arranged at the valve seat or at the valve plate and seals the valve opening (1), and a supporting ring (20, 20′, 20″) which is made of plastic and which is arranged at the valve plate (3) or at the valve seat (4) and, at least in the closed state of the vacuum valve, lies closer to the valve opening (1) than the sealing ring, viewed from the sealing ring, and limits the pressing force acting on the sealing ring in the closed state of the vacuum valve.

Abstract: A gate valve according to the present invention comprises a first valve plate having a valve openings, a second valve plate connected to the first valve plate via first bellows, and an actuator provided between the first valve plate and the second valve plate, wherein the first valve plate is moved by the operation of the actuator, thereby enabling the valve plate, a valve rod, and the like to be made small and lightweight.

Abstract: A gate valve according to the present invention comprises a first valve plate having a valve opening and a second valve plate connected to the first valve plate via a first bellows, in which the rigidity and the like of the valve plates, a valve rod, and the like can be reduced as compared to that in a conventional art by canceling the differential pressure.

Abstract: A gate valve is disclosed comprising an elevatable lever member connected to a piston rod, a displacement member for making up and down movements integrally with the lever member and being tiltably disposed about supporting rollers acting as a pivot point or fulcrum at an end position of displacement, spring members interveningly disposed between the lever member and the displacement member, pin members fixed into side surfaces of the lever member, and engaging grooves formed in side surfaces of the displacement member and engaging with the pin members.

Abstract: A gate valve in which the structure is simplified and inexpensive, movement of a valve body is smooth and high in speed, a force of inclination moving the valve body is strong, and a sealing property of an opening portion can be improved. The gate valve has a valve body capable of sealing the opening portion; a valve rod to which the valve body is fixed; a roller rotatably provided on the other end portion of the valve rod; a roller receiving member having a first holding portion for holding the roller when the valve rod moves the roller straight, an inclined surface for inclining the valve rod, and a second holding portion for holding the roller when the valve rod is inclined up to a predetermined angle; a driving means for moving the roller receiving member straight; and stoppers limiting the straight movement of the valve rod at predetermined positions at which the valve body closes the opening portion. This gate valve is preferably driven by the cylinder apparatus.

Abstract: A closure is movably mounted on the tank top of a pneumatic tank truck. The closure is movable between open and closed positions relative to an opening in the tank top by a pneumatically operated piston. An inflatable seal seals the closure to the tank top when the closure is in open position. Air jets are employed to clean dirt and debris from a guide supporting the closure. All operations can be performed without the driver climbing to the tank top.

Abstract: An apparatus for operating a water gate has a door of the water gate provided in a water channel, and has a mechanism for vertically operating the door. A pressure receiving plate is fixed to the door via an operating rod, and upper and lower air bags are provided on the upper and lower sides of the pressure receiving plate. An air compressor sends air into each of the upper and lower air bags, and a change-over valve and a flow rate regulating valve between the upper and lower air bags and the air compressor are adapted to switch and regulate the air sent into the upper and lower air bags. With this arrangement, compressed air is sent into the air bags to move the pressure receiving plate, vertically move the door and open and close the door. This apparatus is, moreover, adapted to drive the operating rod using the pressure of the air sent into the air bags, so that it has become possible to simplify the structure greatly.

Abstract: A gate valve comprises a valve rod for making displacement in accordance with a driving action of a cylinder mechanism; a guide shaft for guiding the valve rod; a valve disk for opening/closing a passage in accordance with a displacement action of the valve rod; a rack connected to the valve rod, for making displacement integrally with the valve rod; a pinion rotatably supported by a casing, for meshing with the rack; and a pillow member connected to the valve disk and formed with a male thread for making engagement with a female thread formed on an inner circumferential surface of the pinion.

Abstract: A fixable-seal sluice gate has a valve vise (18, 19, 25, 26, 31, 32) that forces a sluice-gate valve uniformly and tightly in sealing-surface contact with a domed seal ring (4) that is fixable conveniently and removably intermediate a sluice-gate plate (3) and a sluice-gate wall (1) of a sluice-gate flange that encompasses a valve side of a sluice-gate aperture (2). A plate locator on the valve vice sets the sluice-gate plate in predetermined sealing-contact position for select structure of the fixable-seal sluice gate. The domed seal ring is a plastic material such as Hypalon® having predetermined toughness to resist particle embedment in combination with having predetermined softness for select uses and objectives. A dome flange (5, 6) on one or both sides of a base of the domed seal ring is bracketed removably to optionally the sluice-gate wall or the sluice-gate plate for rigid, reliable, long-enduring and yet quick and convenient attachment and detachment of the domed seal ring.

Abstract: The present invention provides an improved gate valve system for cutting off a fluid flowing through a pipe. The gate valve system includes a gate valve and at least one member. The gate valve includes a seal member exhibiting an elastically deformable property for sealingly contacting the inner surface of the pipe, and a support member for receiving said seal member and movable in the perpendicular direction to the flowing direction of the fluid between the outside and inside of the pipe for timely bringing said seal member into a sealing contact with the inner surface of the pipe. The at least one expansion member is deformable, but is not substantially subjected to the volume variation even under pressure. The at least one expansion member is embedded in the seal member in such a manner as to expand the seal member laterally outwardly to the inner surface of the pipe upon receiving pressure effected by the sealing contact between the seal member and the inner surface of the pipe.

Abstract: A gate valve in which the structure is simplified and inexpensive, movement of a valve body is smooth and high in speed, a force of inclination moving the valve body is strong, and a sealing property of an opening portion can be improved. The gate valve has a valve body capable of sealing the opening portion; a valve rod to which the valve body is fixed; a roller rotatably provided on the other end portion of the valve rod; a roller receiving member having a first holding portion for holding the roller when the valve rod moves the roller straight, an inclined surface for inclining the valve rod, and a second holding portion for holding the roller when the valve rod is inclined up to a predetermined angle; a driving means for moving the roller receiving member straight; and stoppers limiting the straight movement of the valve rod at predetermined positions at which the valve body closes the opening portion. This gate valve is preferably driven by the cylinder apparatus.

Abstract: A hinge assembly and methods for mounting a hatch relative to a port defined in a cover of a vacuum chamber to close and open the port. A torsion rod mounted between the port and the hatch is in torsion when the hatch is in a closed position relative to the port, assisting port-opening motion. A sleeve surrounds the rod and is movable with the hatch. Friction hinge structures between the cover and the sleeve, and between the hatch and a second sleeve are in a friction-engaging relationship with the corresponding sleeve. Each friction hinge structure provides high resistance to relative motion between a friction spring and the corresponding sleeve. During the port-opening motion of the hatch the friction springs provide low resistance to such relative motion. The hinge structures provide tolerance resistance and vacuum compliance by allowing relative movement between a hinge mounting plate and the hatch.

Abstract: A radio frequency sputtering apparatus and a film forming method using the same are disclosed. The method includes the steps of floating a shield adjacent to the substrate, applying an RF power to the substrate as well as the target to induce a self-bias voltage to the target and the substrate, and restricting a plasma discharge region in accordance with the ionization of a process gas to an adjacency to the target, thereby decreasing the bombarding of the film on the wafer by positive ions of the plasma and negative ions from the target.

Abstract: A gate valve wherein a valve disc is moved to a position where the valve disc is brought into contact with a valve seat and a position where the valve disc is separated from the valve seat by a driving device provided outside of a valve housing through a valve rod projected from the inside to the outside of the valve housing. The valve disc is brought into contact under pressure with the valve seat in the valve housing when the valve rod is inclined at the end of the movement of the valve rod. A cylindrical bellows is provided at the outside of the valve housing, one end of the cylindrical bellows being sealingly secured to the valve housing and the other end of the cylindrical bellows being sealingly secured to the valve rod. The valve rod is inclined centering arround a center of the axial direction of said cylindrical bellows in the compressed state thereof.

Abstract: A valve comprises a valve housing (2) with a valve inlet (11), a valve outlet (12) and a passage (66) extending through the valve housing (2) from the valve inlet (11) to the valve outlet (12). A valve seat (5) is provided in the passage which comprises a valve sealing surface (50). Further, the valve comprises a blocking element (3) adapted to be moved at least partly into the valve seat (5) for blocking the passage by abutment on the valve sealing surface (50), the blocking element being moved along a direction (102) extending under an acute angle to the plane (90) in which the valve seat (5) is arranged. The valve sealing surface (50) of the valve seat (5) is spherical in shape.

Abstract: A dual sided slot valve is in a vacuum body between adjacent process and transport modules. Separate valves are provided for each of two valve body slots, one body slot being separately closed or opened independently of the other. The separate valves allow a vacuum in the transport module while an adjacent process module is open to the atmosphere for servicing. The valve allows access to an open valve for servicing the open valve in that one actuator motor stops the valve in an open, but not vertically-spaced, position relative to the respective slot. The open valve is more easily reached by a gloved hand of a service worker. A separate actuator motor moves the valve vertically down from the open position and away from the slot to expose the sealing surface around the slot for cleaning. The vertical distance of the vertically-moved valve from an access opening makes it difficult for the worker's glove to reach the valve for service.

Abstract: Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.

Abstract: A gate valve assembly having a primary and secondary seating surface for preventing process fluids from contacting the seals of the valve is provided. Additionally, a purge gas inlet can be disposed in the valve body to prevent process gases from contacting the seals during operation. Still further, a primary and secondary barrier seal may be provided to prevent process gases from contacting the primary seal. Additionally, a purge gas inlet can be disposed between the primary and secondary seals to further prevent process gases from contacting the primary seal.

Abstract: A device for closing an opening of a tank or a tubular conduit and including a plate for closing the opening and movable substantially perpendicular to a plane of the opening toward the opening to be pressed against a wall in which the opening is formed and away from the opening, and displaceable, in its position in which it is spaced from the opening, substantially parallel to the plane of the opening, first and second piston-cylinder units for displacing the closing plate parallel to the plane of the opening and perpendicular to the plane of the opening respectively, with each piston-cylinder unit having a housing with a cylinder bore and at least one piston displaceable in the cylinder bore relative to the housing, and conduits for communicating pressure medium to the cylinder bores of both piston-cylinder units for displacing respective pistons in respective bores.

Abstract: A gate valve in which the structure is simplified and inexpensive, movement of a valve body is smooth and high in speed, a force of inclination moving the valve body is strong, and a sealing property of an opening portion can be improved. The gate valve has a valve body capable of sealing the opening portion; a valve rod to which the valve body is fixed; a roller rotatably provided on the other end portion of the valve rod; a roller receiving member having a first holding portion for holding the roller when the valve rod moves the roller straight, an inclined surface for inclining the valve rod, and a second holding portion for holding the roller when the valve rod is inclined up to a predetermined angle; a driving means for moving the roller receiving member straight; and stoppers limiting the straight movement of the valve rod at predetermined positions at which the valve body closes the opening portion. This gate valve is preferably driven by the cylinder apparatus.

Abstract: A method and apparatus for vacuum depositing a coating onto a substrate are provided. The method includes the steps of: introducing an evaporant into a magnetically defined deposition region of a vacuum process chamber, ionizing the evaporant to form a plasma; generating a "magnetic bottle" magnetic field configuration to define the deposition region and to confine the plasma to the deposition region, further increasing the percentage ionization of the plasma to form a highly ionized media; creating a static dc electric field that is generally perpendicular to the magnetic field in the deposition region and parallel to the plane of the substrate; and then moving the substrate through the highly ionized media with the plane of the substrate and its direction of motion generally parallel to the magnetic field lines. The method of the invention is particularly suited to deposition of any atomistic evaporant onto intermediate-sized substrates.

Abstract: A slot valve assembly (10) including a housing (11) having a central opening (19), a valve plate (32), a strongback (20) for carrying the valve plate, a pair of actuators (34, 36) for raising and lowering the strongback to position the valve plate over opening (19), and a second set of actuators (240) for moving valve plate (32) into seating engagement with housing (11). Second actuators (240) are in fluid communication with the working chambers (48, 50) of the first pair of actuators (34, 36). First actuators (34, 36) are located within housing (11) to give the housing a much shorter height.

Abstract: A gate valve in which the structure is simplified and inexpensive, movement of a valve body is smooth and high in speed, a force of inclination moving the valve body is strong, and a sealing property of an opening portion can be improved. The gate valve has a valve body capable of sealing the opening portion; a valve rod to which the valve body is fixed; a roller rotatably provided on the other end portion of the valve rod; a roller receiving member having a first holding portion for holding the roller when the valve rod moves the roller straight, an inclined surface for inclining the valve rod, and a second holding portion for holding the roller when the valve rod is inclined up to a predetermined angle; a driving means for moving the roller receiving member straight; and stoppers limiting the straight movement of the valve rod at predetermined positions at which the valve body closes the opening portion. This gate valve is preferably driven by the cylinder apparatus.

Abstract: A reduced pressure treatment unit comprising a plurality of treatment chambers conducting reduced pressure process treatment of a treatment object (wafer) and a normal pressure treatment unit conducting normal pressure process treatment of the treatment object, which are connected by a load lock chamber. The reduced pressure treatment unit comprises a plurality of reduced pressure process treatment chambers connected by means of a gate valve to a reduced pressure transport chamber equipped with a robot arm. The normal pressure treatment unit comprises a plurality of normal pressure process treatment chambers disposed in the vicinity of a robot arm. The load lock chamber is disposed at a position where the transport ranges of the two robot arms overlap.

Abstract: A valve mechanism for a vacuum sliding valve. The mechanism includes a valve housing defining a vacuum chamber having a throughgoing opening therein and being free from setting elements which move relative to one another; a drive region disposed adjacent to and outside of the vacuum chamber; and a sealing interface disposed between the vacuum chamber and the drive region for sealing the vacuum chamber and the drive region with respect to one another. The mechanism further includes a valve disk disposed in the vacuum chamber, and a drive connected to the valve disk and disposed in the drive region for moving the valve disk for sealingly closing the throughgoing opening with the valve disk. A rod of the mechanism has a first end disposed in the vacuum chamber and a second end disposed in the drive region, and is connected to the valve disk at the first end thereof and sealingly extends through the sealing interface and out of the vacuum chamber.

Abstract: An isolation gate and frame assembly has a frame having a frame sealing surface extending around the frame and a fluid impervious gate having a gate sealing surface complementary to the frame sealing surface extending around the gate. One of the first and second sealing surfaces carries an inflatable seal. A mechanism is provided to locate the gate within the frame with the first sealing surface sealed against the second sealing surface.

Abstract: A gate valve for a thin film forming apparatus. The gate valve includes two adjoining low-pressure chambers and a wall separating the two chambers. The wall includes an aperture and a thin plate for covering the aperture. The thin plate is movable in a direction substantially parallel to the plate surface. The gate valve further includes a voltage supply for applying a direct current between the thin plate and the wall.

Abstract: Slide valve to close large fluid conduits, in particular double-disk slide valve, with a slide gate (14) disposed within a valve housing (11) so that it can move transverse to the fluid conduit, and arranged like spectacles with a shut-off plate (15) on one side and a pipe bridge (16) on the other. The shut-off plate (15) can be moved into the fluid conduit when the slide valve is closed, and the pipe bridge (16) when it is opened. The slide gate (14) is supported in the valve housing (11) on roller bearings in such a way that the bearing rollers (21, 22) hold the slide gate (14) radially with respect to its direction of movement (23) on all sides. (FIG.

Abstract: Disclosed is a method for implementing a gate drive valve assembly used to isolate interfacing chambers. The method includes: (a) providing a drive assembly having at least one surface for attaching to a chamber, the drive assembly being mounted to the chamber such that a shaft contained within the drive assembly translates from the drive assembly through the at least one surface and along a bore in the chamber; and (b) attaching a gate plate to an end of the shaft when the shaft is at least partly within the chamber after translating along the bore.

Abstract: A slide valve including a housing having a flow channel, a slide plate for controlling flow through the channel, and a seal ring surrounding the flow channel and engaging the slide plate in its closed position and disengageable from the slide plate in its open position, with the seal ring having on its side remote for the slide plate, a plurality of circumferentially arranged recesses spaced from each other, extending in a circumferential direction, outwardly limited by key hole-shaped openings respectively, and aligned, respectively, with the bores formed in the adjacent to the seal ring, annular surface of the housing and in which a plurality of bolts are respectively displaceable, which bolts have shaped heads extending into the recesses and engageable from behind by key hold-shaped openings.

Abstract: A gate valve device which includes a partition wall having an opening, a valve member movable along the partition wall to open or close the opening, a driving system for moving the valve member, and a pressing mechanism for pressing the valve member toward the partition wall. The pressing mechanism has a pressing member projectable toward and retractable from the valve member, wherein the pressing mechanism presses the valve member against the partition wall when the valve member is in a position closing the opening.

Abstract: The closing system has a closure member, and a carriage for translational displacement of the closing member along rails. A jack is mounted on the carriage for non-resilient axial displacements of the closure member to and from a flow opening. A damper transmits the vibrations of the closure member to the carriage and ensure axial displacement of the closure member. The closure member closes the flow opening by first axially aligning the closure member with respect to the flow opening by displacing the carriage. The jack axially displaces the closure member to urge the closure member against the flow opening to close it without translational displacement. The closure member is retracted away a minimal distance from the opening for clearance and then the carriage is actuated to reduce or enlarge the flow opening, with precision and without friction to a seal disposed about the opening.

Abstract: An improved slide plate diverter valve having a manifold block and a backing plate with a linearly reciprocable slide plate sandwiched and clamped therebetween is provided with side rails between the manifold block and backing plate along opposite lengthwise sides of the slide plate secured by dowel pins to each thereof to rigidify the manifold block and backing plate against relative movement, eliminating any tendency of the backing plate to move relative to the manifold block in response to sliding actuation of the slide plate.

Abstract: A knife gate valve is provided with peripheral seals which can be removed for cleaning and inspection without having to remove the valve from the duct or other conduit to which the valve is mounted. The longitudinal seals are pressure loaded and seat against the edge rather than the face of the gate. The seals are shielded from the abrasive effects of the material flowing through the valve by peripheral spaced apart beams which project into the valve opening. A series of cutouts in the beams allows the space between the beams to be cleaned of any accumulated material during reciprocation of the gate.

Abstract: An expanding gate valve assembly comprising a gate, a stem for actuating the gate and floating segments movably mounted on opposite sides of the gate for movement relative to valve seats on a valve body. The valve seats on the valve body are inclined to the axis of the stem, and the segments are provided with correspondingly matching inclined surfaces. Movement of the segments is arrested by stops on the valve body, thereby making the segments expand laterally during closure The gate has a lower gate part having a through conduit which is alignable with a fluid flow passageway in the valve body in the open position, such lower gate part having tapered surfaces parallel to the incline of the valve seats to seal therewith and establish fluid tight communication between the through conduit of the gate and the fluid flow passageway.

Abstract: A clean room is supplied with air at a controllable velocity from a blower with a variable damper mechanism. The ceiling of the clean room is comprised of a plurality of panels of particulate filter material Associated with at least some of the panels are air dampers comprised of first, second, and third adjacent perforated plates. The first plate is fixed and the second plate is mounted for translational movement relative to the first. The third plate is interposed between the first and second plates as a gasket to reduce air flow between the plates. By moving the second plate relative to the first, the perforations therein are selectably opened or occluded, permitting the air passing through each panel to be regulated. Air flow through the room as a whole is controlled by the variable air flow feature of the blower.

Abstract: Apparatus and methods for sealing a parallel expanding gate valve are provided using upper and lower wedges separate from and located between the gate segments. The gate segments are symmetrical with respect to each other and have inner upper and lower tapered surfaces. Inclined surfaces on the upper wedge press the inner upper tapered surfaces of the gate segments. The inner lower tapered surfaces of the gate segments also press against inclined wedging surfaces on the lower wedge. This wedging action forces the gate segments outward with respect to each other and with substantial force against sealing assemblies to close and seal the gate valve.

Abstract: A toggled gate device to be used for opening and closing a gate aperture leading to a magnetron plasma etching apparatus comprises a gate for being pressed against the wall defining the gate aperture to hermetically cover the gate aperture. The gate is supported by a support member such that the gate is movable in substantially the horizontal direction toward and away from the gate aperture. The support member is vertically driven by a cylinder. Stopper plates are arranged at an upper portion of the gate and provided with a surface inclined divergently from the edge remote from the gate aperture toward the edge close to the gate aperture. Rollers are arranged on the wall to abut the respective stopper plates. The stopper plates and the rollers are made of an iron or nickel-based double boride hard alloy. Part of the force applied to the rollers by the gate through the respective stopper plates is converted into a force moving and urging the gate toward the wall.

Abstract: Valve mechanism for high-vacuum clean environments, wherein a slot aperture is closed by a gage having a lever. Motion of the gate which covers and uncovers the slot is imparted to the gate by longitudinal movement of the lever. Motion of the gate which seals and unseals the slot is imparted by pivoting movement of the level about a fulcrum near the center of the lever. The pivoting movement is imparted at a time different from that at which the longitudinal movement is imparted, and the pivoting movement may be imparted by means separate from that which imparts the longitudinal movement.

Abstract: A slot valve assembly (10) including a housing (11) having a central opening (19), a valve plate (32), a strongback (20) for carrying the valve plate, a pair of actuators (34, 36) for raising and lowering the strongback to position the valve plate over opening (19), and a second set of actuators (240) for moving valve plate (32) into seating engagement with housing (11). Second actuators (240) are in fluid communication with the working chambers (48, 50) of the first pair of actuators (34, 36). First actuators (34, 36) are located within housing (11) to give the housing a much shorter height.