Abstract: In a semiconductor device, an active region is formed in a semiconductor substrate separated by a plurality of isolation regions. A plurality of surface insulating films of different thickness are formed separately on the active region. A plurality of conductive films are formed on the respective insulating films. Then, one of the surface insulating film having smaller thickness is caused to break down to work as an electric fuse.

Abstract: The present invention provides a method for forming interconnect lines and conductors and passive devices in the fabrication of an integrated circuit. A gap is created in the patterning of a first layer. The gap is filled by a dielectric material so that an encapsulated conduit is formed in the gap. The encapsulated conduit is filled with a conductor by chemical vapor deposition processes or other deposition processes, the filling facilitated by forming via holes to intersect the conduit, and then filling the via holes. The conductor filled conduit can be used as a resistor, fuse, inductor, or capacitor.

Abstract: A ferroelectric memory has a plurality of memory cells each having a transistor and a ferroelectric capacitor arranged in a matrix. Plate lines run in the word line direction above the ferroelectric capacitors of memory cells adjacent to each other in the word line direction among the plurality of memory cells. Bit line contacts each for connecting a bit line and an active region of the transistor are placed in regions between the plate lines adjacent to each other in the bit line direction and between the ferroelectric capacitors adjacent to each other in the word line direction. Cuts are formed at positions of the plate lines near the bit line contacts. The active regions of the transistors of the plurality of memory cells extend in directions intersecting with the word line direction and the bit line direction.

Abstract: A repair fuse element and method of construction are disclosed that eliminate or substantially reduce the disadvantages and problems associated with prior fuse elements. In one embodiment, the fuse element is constructed with a rectangular-shaped contact. The contact is made long enough so that it makes contact at each end with a metal layer, but design rule spacing is still maintained between the connections with the metal layer. The overlapping areas between the rectangular contact and the metal layers are asymmetrical. Alternatively, these overlapping areas are smaller than the design rule overlap requirements. In a second embodiment, a fuse element is constructed with a plurality of rectangular-shaped contacts. As a result, a current value that is significantly lower than conventional fuse current values, can be used to melt such a contact or blow the fuse.

Abstract: An integrated circuit structure for MOS-type devices including a silicon substrate of a first conductivity type; a first gate insulating regions selectively placed over the silicon substrate of the first conductivity type; a first polycrystalline silicon layer selectively placed over the silicon substrate of the first conductivity type; a second gate insulating regions selectively placed over the first gate insulating regions and the first polycrystalline silicon layer; a second polycrystalline silicon layer selectively placed over the second gate insulating regions; first buried silicon regions of a second conductivity type, buried within the silicon substrate of the first conductivity type, placed under the first polycrystalline silicon layer and in contact therewith; and second buried silicon regions of the second conductivity type, buried within the silicon substrate of the first conductivity type, placed under the second gate insulating regions, under the second polycrystalline silicon layer and insulate

Abstract: A method for configuring nanoscale neural network circuits using molecular-junction-nanowire crossbars, and nanoscale neural networks produced by this method. Summing of weighted inputs within a neural-network node is implemented using variable-resistance resistors selectively configured at molecular-junction-nanowire-crossbar junctions. Thresholding functions for neural network nodes are implemented using pFET and nFET components selectively configured at molecular-junction-nanowire-crossbar junctions to provide an inverter. The output of one level of neural network nodes is directed, through selectively configured connections, to the resistor elements of a second level of neural network nodes via circuits created in the molecular-junction-nanowire crossbar. An arbitrary number of inputs, outputs, neural network node levels, nodes, weighting functions, and thresholding functions for any desired neural network are readily obtained by the methods of the present invention.

Abstract: A severable horizontal portion of a fuse link is formed relative to a vertically configured structure in an IC to promote separation of the severable portion upon applying energy from a laser beam. The vertically configured structure may be a reduced vertical thickness of the severable portion, an elevated lower surface of the severable portion above adjoining portions of the fuse link, a protrusion which supports the severable portion at a height greater than a height of the adjoining portions of the fuse link, flowing the melted severable portion down sloped surfaces away from a break point, and a propellent material beneath the severable portion which explodes to ablate the severable portion.

Abstract: An integrated fuse has regions of different doping located within a fuse neck. The integrated fuse includes a polysilicon layer and a silicide layer. The polysilicon layer includes first and second regions having different types of dopants. In one example, the first region has an N-type dopant and the second region has a P-type dopant. The polysilicon layer can also include a third region in between the first and second regions, which also has a different dopant. During a fusing event, a distribution of temperature peaks around the regions of different dopants. By locating regions of different dopants within the fuse neck, agglomeration of the silicide layer starts reliably within the fuse neck (for example, at or near the center of the fuse neck) and proceeds toward the contact regions. An improved post fuse resistance distribution and an increased minimum resistance value in the post fuse resistance distribution is realized compared to conventional polysilicon fuses.

Abstract: A novel fuse structure. An optimal position of laser spot is defined above a substrate. A first conductive layer is formed on part of the substrate. A dielectric layer is formed on the substrate and the first conductive layer. A second conductive layer comprising the position of laser spot is formed on part of the dielectric layer. A third conductive layer is formed on the part of the dielectric layer placed above the first conductive layer, wherein the third conductive layer is insulated from the first and second conductive layers. At least one conductive plug penetrates the dielectric layer, to electrically connect the first conductive layer and the second conductive layer. Thus, the third conductive layer serves as a floating layer to prevent the first conductive layer from being damaged in the laser blow process.

Abstract: A fabricated multiple layer integrated circuit in which adequate planarization is accomplished using irregularly shaped and properly spaced conductive filler features that are spaced in such a way that capacitive coupling of the conductive filler features with the active conductive regions is reduced. The overall layout area of the conductive filler features is reduced to thereby reduce capacitive coupling with active conductive above and below. In addition, a relatively small edge of the feature is closest to the active conductive in the same conductive layer thereby further reducing capacitive coupling.

Abstract: A semiconductor device includes on the same chip at least an I/O region where an input/output pad is formed and active regions where a circuit can be mounted, where a plurality of logic circuits having the same functions or different functions are mounted in the active regions on the same chip.

Abstract: The present invention includes a nonvolatile memory structure comprising: nonvolatile memory cell area including write/erase pins, address pins and data input/output pins; conductive contact pads arranged at the periphery area of the nonvolatile memory cell area for power input to operate the nonvolatile memory cell, wherein the conductive contact pads are connected to a power selecting from a positive power, a negative power or the combination thereof. The conductive contact pads include a positive power pin or a negative power pin for providing the operating power.

Abstract: An integrated circuit is formed by a method having the steps of providing a circuit substrate with a first metallized region, providing a first insulation layer covered by a silicon layer, patterning the first insulation layer and silicon layer to form a first insulation region and first silicon region, then forming a second metallized layer on the silicon region, heating the material so that the second metal layer diffuses into the silicon layer to form a metal silicide region, which is subsequently covered by a second insulating layer having a contact with an interconnect to enable contacting an antifuse formed by the metal silicide region.

Abstract: A semiconductor configuration is described which includes a semiconductor body having a main surface and an insulator layer disposed on the main surface of the semiconductor body. The insulator layer has a cavity formed therein extending to the main surface of the semiconductor body. A fuse having a fusible part extends from the main surface of the semiconductor body toward an upper surface of the insulator layer at right angles to the main surface of the semiconductor body, and the fuse is embedded in the cavity. A method for producing the semiconductor configuration having the fuse is also described.

Abstract: A method of forming a metal fuse comprising the following steps. A structure is provided having exposed adjacent metal structures. A patterned dielectric layer is formed over the structure. The patterned dielectric layer having via openings 2exposing at least a portion of the exposed adjacent metal structures. A metal fuse portion is formed between at least two of the adjacent metal structures without additional photolithography, etch or deposition processes. The metal fuse portion including a portion having a nominal mass and a sub-portion of the portion having a mass less than the nominal mass so that the metal fuse portion is more easily disconnected at the less massive sub-portion during programming of the metal fuse portion.

Abstract: Briefly, in accordance with an embodiment of the invention, a phase change memory and a method to manufacture a phase change memory is provided. The phase change memory may include a memory material and a first tapered contact adjacent to the memory material. The phase change memory may further include a second tapered contact separated from the first tapered contact and adjacent to the memory material, wherein the first and second tapered contacts are adapted to provide a signal to the memory material.

Abstract: There is provided a field emitter device formed on a substrate. The field emitter device includes a voltage supply line, and a plurality of sections of field emitters. Each section includes a conducting gate electrode layer, at least one field emitter tip, and a fuse. The fuse electrically connects the conducting gate electrode layer to the voltage source, and the fuse electrically disconnects the conducting gate electrode layer from the voltage supply line when the voltage and current of the conducting gate electrode layer exceeds a threshold value.

Abstract: The present invention provides a fuse structure. The fuse structure comprises a substrate, a plurality of conductive layers, a dielectric layer and a plurality of conductive plugs. The fuse structure includes a plurality of fuse units, with increased the pitch between the fuse units. This structure prevents the fuse structure from failing when both misalignment of the laser beam or thermal scattering of the laser beam damage the second layer of the fuse structure in the laser blow process, which raises reliability and yield.

Abstract: A memory cell includes a heating component that is connected to a voltage-breakdown component. The heating component is configured to accelerate the break-down of a voltage-breakdown component. Memory structures and methods for making them are also disclosed.

Abstract: A fuse structure and method for fabricating same are disclosed. The fuse structure is designed for opening by conventional laser energy application. The fuse structure is characterized by an absence of high stress areas in the surrounding substrate thereby resulting in higher fabrication yields due to lower occurrence of substrate fracturing or other damage occasioned by the opening of the fuse.

Abstract: For a selection of semiconductor chips stacked on top of one another, the invention includes leading through selection contact points of one chip on a rear side thereof and connecting them to corresponding selection contact points of the other semiconductor chip. Programmable input amplifiers are programmed to be transmissive or blocking through fuses/antifuses so that selection signals applied to the selection contact points either activate or block functional elements only of one or only of the other semiconductor chip. As a result, simple stacking of identically prefabricated semiconductor chips is made possible.

Abstract: The present invention describes a test structure with a first set of features which is a subset of product features; and a second set of features adjacent to the first set of features, the second set occupying a smaller area than the first set and the second set being similar to the first set yet being distinguishable from surrounding structures.

Abstract: A semiconductor device is disclosed, which comprises a semiconductor substrate with which a circuit element is provided, an insulating layer which is provided on the semiconductor substrate and has a concave portion, a first conductive line layer which is provided at the concave portion in the insulating layer and has a first thickness, and a second conductive line layer which is provided at the concave portion in the insulating layer so as to be formed apart in a horizontal direction from the first conductive line layer and has a second thickness which is smaller than the first thickness.

Abstract: A dual port memory cell is provided. The dual port memory cell includes a storage cell. A first bitline pair defining access to the storage cell by a first port and a second bitline pair defining access to the storage cell by a second port are defined. Each bitline of the first and second bitline pairs is defined from metallization line features, and the first bitline pair is defined on one side of the storage cell and the second bitline pair is defined on the other side of the storage cell. The bitlines of the first port are physically separate from the bitlines of the second port.

Abstract: Disclosed is a technique capable of enhancing the degree of freedom in the layout of a rerouting layer in a wafer level CSP in which defect repairing is performed by cutting a fuse. More specifically, after the defect repairing is performed by irradiating a laser beam to a fuse, an organic passivation layer (photo-sensitive polyimide layer) is filled in a fuse opening. Thereafter, a rerouting layer, a bump land, an uppermost wiring layer, and a solder bump are formed on the organic passivation layer. In the following steps of the defect repairing, the baking process to cure an elastomer layer and the uppermost protection layer is conducted at a temperature below 260° C. in order to prevent the variance of the refresh times of memory cells.

Abstract: An antifuse includes a grid having at least one n-well active stripe and at least one polysilicon stripe; a first oxide layer having a first oxide thickness, the first oxide layer adapted to electrically short the n-well active stripe with the polysilicon stripe; and a second oxide layer surrounding the first oxide and thicker than the first oxide layer.

Abstract: An electronic device having stacked modules and method for producing it are described. Each module has a chip. Each chip is mounted on a stack intermediate plane. The stack intermediate planes of a stack have identical layouts, while chip select circuits which can be set irreversibly via contact areas are disposed on the chips, which chip select circuits enable an irreversible assignment of the contact areas to the stack intermediate planes.

Abstract: A memory structure has a plurality of row conductors intersecting a plurality of column conductors at a plurality of intersections. Each intersection includes an electrically linear resistive element in series with a voltage breakdown element.

Abstract: A programmable element includes a resistive element having a polysilicon film and a metal silicide film or metal film stacked on the polysilicon film. The electric resistance of the resistive element is changed by changing the composition of the metal silicide film or metal film or the chemical bond state using heat, thereby programming on the basis of the change in the electric resistance of the resistor.

Abstract: A non-ablative structure and method for forming a variable resistor includes providing a programmable resistive element including two or more different conductive materials, and changing a resistance of the programmable resistive element to a finite value by heating the programmable element by either providing a current flow through the programmable element, or directing a laser beam onto the programmable element. The conductive materials are interdiffused to form an alloy of the conductive materials. A resistance value of the variable resistor is determined, at least in part, by the degree to which the conductive materials are alloyed or interdiffused. The method and structure of the variable resistor prevents ablative damage to adjoining circuit structure, allowing tighter pitch, and has application to digital programmable elements, and to resistance trimming for impedance matching in RF integrated circuits.

Abstract: A programmable element that has a first diode having an electrode and a first insulator disposed between the substrate and said electrode of said first device, said first insulator having a first value of a given characteristic, and an FET having an electrode and a second insulator disposed between the substrate and said electrode of said second device, said second insulator having a second value of said given characteristic that is different from said first value. The electrodes of the diode and the FET are coupled to one another, and a source of programming energy is coupled to the diode to cause it to permanently decrease in resistivity when programmed. The programmed state of the diode is indicated by a current in the FET, which is read by a sense latch. Thus a small resistance change in the diode translates to a large signal gain/change in the latch. This allows the diode to be programmed at lower voltages.

Abstract: Fuses for integrated circuits and semiconductor devices, methods for making and using the same, and semiconductor devices containing the same. The semiconductor fuse contains two conductive layers-an overlying and underlying layer-on an insulating substrate. The underlying layer comprises titanium nitride and the overlying layer comprises tungsten silicide. The semiconductor fuse may be fabricated during manufacture of a local interconnect structure containing the same materials. The fuse, which may be used to program redundant circuitry, is blown by electrical current rather than laser beams, thus allowing the fuse width to be smaller than prior art fuses blown by laser beams. The fuse may also be blown by less electrical current than the current required to blow conventional polysilicon fuses having similar dimensions.

Abstract: In an integrated circuit structure, the improvement comprising a self-passivating Cu-laser fuse characterized by resistance to oxidation and corrosion and improved adhesion in the interface between Cu and metallization lines and Cu and a dielectric cap subsequent to blowing the fuse by an energizing laser, the fuse comprising: a metallization-line; a liner separating the metallization line and a combination Cu-alloy seed layer and a pure Cu layer; a dielectric surrounding the liner; and a dielectric cap disposed over the surrounding dielectric, the liner and the combination Cu-alloy seed layer and pure Cu layer; the laser fuse being characterized after Laser energizing by passivation areas: a) on the open Cu-fuse surface; and b) in the interfaces between: (i) the Cu-alloy seed layer and the liners and dielectric; and (ii) between the pure Cu layer and the dielectric cap.

Abstract: The present invention discloses a semiconductor memory device having a bit line and a metal contact stud, wherein the metal contact stud is formed on a different layer from a layer on which the bit lines are formed.

Abstract: An antifuse including a bottom plate having a plurality of longitudinal members arranged substantially parallel to a first axis, a dielectric layer formed on the bottom plate, and a top plate having a plurality of longitudinal members arranged substantially parallel to a second axis, the top plate formed over the dielectric layer. Multiple edges formed at the interfaces between the top and bottom plates result in regions of localized charge concentration when a programming voltage is applied across the antifuse. As a result, the formation of the antifuse dielectric over the corners of the bottom plates enhance the electric field during programming of the antifuse. Reduced programming voltages can be used in programming the antifuse and the resulting conductive path between the top and bottom plates will likely form along the multiple edges.

Abstract: The invention relates to a fuse layout structure in a laser fuse box of a semiconductor integrated circuit and a method for fabricating the same. In one example of the invention, the fuse layout structure in a laser fuse box of the semiconductor integrated circuit includes a plurality of fuses with the central regions thereof extending parallel to each other within the fuse box, and the central regions of the fuses being covered with an insulative protection layer. Thus, the fuse layout structure of the present invention occupies a minimum area in the chip while minimizing influences of the heat generated by fusing neighboring fuses.

Abstract: Prior known static random access memory (SRAM) cells are required that a diffusion layer be bent into a key-like shape in order to make electrical contact with a substrate with a P-type well region formed therein, which would result in a decrease in asymmetry leading to occurrence of a problem as to the difficulty in micropatterning. To avoid this problem, the P-type well region in which an inverter making up an SRAM cell is formed is subdivided into two portions, which are disposed on the opposite sides of an N-type well region NW1 and are formed so that a diffusion layer forming a transistor has no curvature while causing the layout direction to run in a direction parallel to well boundary lines and bit lines. At intermediate locations of an array, regions for use in supplying power to the substrate are formed in parallel to word lines in such a manner that one regions is provided per group of thirty two memory cell rows or sixty four cell rows.

Abstract: A compact SRAM cell that incorporates refractory metal-silicon-nitrogen resistive elements as its pull-up transistors is described which includes a semi-conducting substrate, a pair of NMOS transfer devices formed vertically on the sidewalls of an etched substrate by a metal conductor providing electrical communication between an n+ region in the substrate and a bitline on top, a pair of pull-down nMOS devices on the substrate connected to ground interconnects, and a pair of vertical high-resistive elements formed of a refractory metal-silicon-nitrogen and function as a load for connecting to Vdd. The invention further describes a method for fabricating such compact SRAM cell.

Abstract: A folded bit line DRAM device is provided. The folded bit line DRAM device includes an array of memory cells. Each memory cell in the array of memory cells includes a pillar extending outwardly from a semiconductor substrate. Each pillar includes a single crystalline first contact layer and a single crystalline second contact layer separated by an oxide layer. A single crystalline vertical transistor is formed along alternating sides of the pillar within a row of pillars. The single crystalline vertical transistor includes an ultra thin single crystalline vertical first source/drain region coupled to the first contact layer, an ultra thin single crystalline vertical second source/drain region coupled to the second contact layer, and an ultra thin single crystalline vertical body region which opposes the oxide layer and couples the first and the second source/drain regions.

Abstract: A memory structure that includes a first electrode, a second electrode, a thermal conduction limiting electrode having a thermal conductivity that is less than a thermal conductivity of the first electrode, a memory storage element disposed between the thermal conduction limiting electrode and the second electrode, and a control element disposed between the second electrode and the first electrode.

Abstract: A memory cell includes a heating component that is connected to a voltage-breakdown component. The heating component is configured to accelerate the break-down of a voltage-breakdown component. Memory structures and methods for making them are also disclosed.

Abstract: A wire width and a wiring space of each of signal wires 1 and ground/power wires 2 are determined to be a wire width W1 (the minimum wire width) and a wiring space S1, respectively. A wire width and a wiring space of the via-hole neighboring region 1a or 2a are determined to be a wire width W2 (>W1) and a wiring space S2 (<S1), respectively. The wire widths W1 and W2 and the wiring spaces S1 and S2 are respectively determined so as to maintain the minimum wiring pitch P. The wiring space S1 is determined also so as to satisfy {S1/P≧0.6}. Further, the signal wires 1 and the ground/power wires 2 have the same wire thickness of a wire thickness T1 which allows an aspect ratio (T1/W1) to be equal to, or higher than, 2.

Abstract: The present invention provides a method for forming an antifuse via structure. The antifuse via structures comprising a substrate that having a first conductive wire therein. Then, a first dielectric layer is formed on the substrate, and a photoresist layer is formed on the first dielectric layer. Next, an etching process is performed to etch the first dielectric layer to form a via open in the first dielectric layer. Then, a first conductive layer is deposited to fill the via open and performing a polishing process to form a conductive plug, wherein the conductive plug is on the first conductive wire. Next, a buffer layer deposited on the partial first dielectric layer and on the surface of conductive plug. Then another polishing process is performed to the buffer layer to expose the portion of the conductive plug. Thereafter, a first electrode of capacitor is deposited on the buffer layer.

Abstract: A semiconductor device has a fuse to be blown with an energy beam. The semiconductor device has copper wiring levels formed on a semiconductor substrate on which semiconductor elements are formed, an uppermost wiring level formed on said copper wiring levels and including a refractory metal film connected to a top one of the copper wiring levels, the fuse formed from a part of the uppermost wiring level, and a surface protective film formed on the uppermost wiring level.

Abstract: The present invention is provides an LSI package without employing steps for forming solder bumps on a bare chip and soldering to an interposer. In the present invention, a bare chip is mounted on the LSI package by forming wiring patterns which connect to bare chip I/O terminals in a build-up layer of a substrate. Furthermore, the wiring patterns are formed so as to connect outer I/O terminals on the substrate.

Abstract: A first repair chip, wherein BANK 2 functions properly although BANKs 0, 1 and 3 have become defective, and a second repair chip, wherein BANKs 1, 2 and 3 function properly although BANK 0 has become defective, are mounted on a rear surface of a module substrate in order to substitute for the functions of BANK 2 of the first bare chip and of BANKs 1 and 2 of the second bare chip that have become defective on the front surface of the module substrate. Thereby, a semiconductor memory module is obtained that can be repaired by mounting chips that carry out functions substituting for those of defective banks while effectively utilizing the functions of other banks that are not defective.

Abstract: Several embodiments of flash EEPROM split-channel cell arrays are described that position the channels of cell select transistors along sidewalls of trenches in the substrate, thereby reducing the cell area. Select transistor gates are formed as part of the word lines and extend downward into the trenches with capacitive coupling between the trench sidewall channel portion and the select gate. In one embodiment, trenches are formed between every other floating gate along a row, the two trench sidewalls providing the select transistor channels for adjacent cells, and a common source/drain diffusion being positioned at the bottom of the trench. A third gate provides either erase or steering capabilities. In another embodiment, trenches are formed between every floating gate along a row, a source/drain diffusion extending along the bottom of the trench and upwards along one side with the opposite side of the trench being the select transistor channel for a cell.

Abstract: A fuse structure (30) formed in a semiconductor device is provided. The fuse structure (30) includes a layer of fuse material (32), a first contact (40), and a second contact (42). The first contact (40) has a first edge (54). At least a portion of the first edge (54) abuts the fuse material layer (32). The second contact (42) has a second edge (55). At least a portion of the second edge (55) abuts the fuse material layer (32). The first edge (54) faces the second edge (55). The first edge (54) is separated from the second edge (55) by a spaced distance (58). A conductive portion of the fuse material layer (32) electrically connects between the first edge (54) and the second edge (55) within the spaced distance (58). The abutting portion of the first edge (54) has a first length. The abutting portion of the second edge (55) has a second length. The first length is greater than the second length.

Abstract: A storage apparatus 10 is disclosed, that comprises a wiring substrate 11 having a first surface and a second surface, a flat type external connection terminal 12a disposed on the first surface of the wiring substrate 11, a semiconductor device 14 disposed on the second surface of the wiring substrate 11 and having a connection terminal 14a connected to the flat type external connection terminal 12a, a molding resin 15 for coating the semiconductor device 14 on the second surface of the wiring substrate 11, a card type supporting frame 10a having a concave portion or a hole portion fitting the wiring substrate 11, the semiconductor device 14, and the molding resin 15 in such a manner that the flat type external connection terminal 12a is exposed to the first surface of the wiring substrate 11, and adhesive resin a adhering integrally the flat type external connection terminal 12a, the wiring substrate 11, the semiconductor device 14, the molding resin 15, and the card type supporting frame 10a.

Abstract: An integrated programmable conductor memory cell and diode device in an integrated circuit comprises a diode and a glass electrolyte element, the glass electrolyte element having metal ions mixed or dissolved therein and being able to selectively form a conductive pathway under the influence of an applied voltage. In one embodiment, both the diode and the memory cell comprise a chalcogenide glass, such as germanium selenide (e.g., Ge2Se8 or Ge25Se75). The first diode element comprises a chalcogenide glass layer having a first conductivity type, the second diode element comprises a chalcogenide glass layer doped with an element such as bismuth and having a second conductivity type opposite to the first conductivity type and the memory cell comprises a chalcogenide glass element with silver ions therein. In another embodiment, the diode comprises silicon and there is a diffusion barrier layer between the diode and the chalcogenide glass memory element.