Plural, Separately Connected, Gates Control Same Channel Region Patents (Class 257/270)
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Patent number: 8734583Abstract: One aspect of the present subject matter relates to a method for forming a transistor. According to an embodiment, a fin of amorphous semiconductor material is formed on a crystalline substrate, and a solid phase epitaxy (SPE) process is performed to crystallize the amorphous semiconductor material using the crystalline substrate to seed the crystalline growth. The fin has a cross-sectional thickness in at least one direction less than a minimum feature size. The transistor body is formed in the crystallized semiconductor pillar between a first source/drain region and a second source/drain region. A surrounding gate insulator is formed around the semiconductor pillar, and a surrounding gate is formed around and separated from the semiconductor pillar by the surrounding gate insulator. Other aspects are provided herein.Type: GrantFiled: April 4, 2006Date of Patent: May 27, 2014Assignee: Micron Technology, Inc.Inventor: Leonard Forbes
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Patent number: 8680588Abstract: A field effect transistor includes a buried gate pattern that is electrically isolated by being surrounded by a tunneling insulating film. The field effect transistor also includes a channel region that is floated by source and drain regions, a gate insulating film, and the tunneling insulating film. The buried gate pattern and the tunneling insulating film extend into the source and drain regions. Thus, the field effect transistor efficiently stores charge carriers in the buried gate pattern and the floating channel region.Type: GrantFiled: February 26, 2008Date of Patent: March 25, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Ming Li, Dong-Uk Choi, Chang-Woo Oh, Dong-Won Kim, Min-Sang Kim, Sung-Hwan Kim, Kyoung-Hwan Yeo
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Publication number: 20140070281Abstract: A high voltage junction field effect transistor and a manufacturing method thereof are provided. The high voltage junction field effect transistor includes a base, a drain, a source and a P type top layer. The drain and the source are disposed above the base. A channel is formed between the source and the drain. The P type top layer is disposed above the channel.Type: ApplicationFiled: September 10, 2012Publication date: March 13, 2014Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Li-Fan Chen, Wing-Chor Chan, Jeng Gong
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Patent number: 8669147Abstract: Disclosed herein are various methods of forming high mobility fin channels on three dimensional semiconductor devices, such as, for example, FinFET semiconductor devices. In one example, the method includes forming a plurality of spaced-apart trenches in a semiconducting substrate, wherein the trenches define an original fin structure for the device, and wherein a portion of a mask layer is positioned above the original fin structure, forming a compressively-stressed material in the trenches and adjacent the portion of mask layer, after forming the compressively-stressed material, removing the portion of the mask layer to thereby expose an upper surface of the original fin structure, and forming a final fin structure above the exposed surface of the original fin structure.Type: GrantFiled: June 11, 2012Date of Patent: March 11, 2014Assignee: GLOBALFOUNDRIES Inc.Inventors: Daniel T. Pham, Robert J. Miller, Kingsuk Maitra
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Patent number: 8643097Abstract: A trench-gate metal oxide semiconductor device includes a substrate, a first gate dielectric layer, a first gate electrode and a first source/drain structure. The substrate has a first doping region, a second doping region and at least one trench. A P/N junction is formed between the first doping region and the second doping region. The trench extends from a surface of the substrate to the first doping region through the second doping region and the P/N junction. The first gate dielectric layer is formed on a sidewall of the second trench. The first gate electrode is disposed within the trench. A height difference between the top surface of the first gate electrode and the surface of the substrate is substantially smaller than 1500 ?. The first source/drain structure is formed in the substrate and adjacent to the first gate dielectric layer.Type: GrantFiled: August 9, 2011Date of Patent: February 4, 2014Assignee: United Microelectronics CorporationInventors: Kuan-Ling Liu, Shih-Yuan Ueng
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Publication number: 20140001518Abstract: A method includes forming a deep well region of a first conductivity type in a substrate, implanting a portion of the deep well region to form a first gate, and implanting the deep well region to form a well region. The well region and the first gate are of a second conductivity type opposite the first conductivity type. An implantation is performed to form a channel region of the first conductivity type over the first gate. A portion of the deep well region overlying the channel region is implanted to form a second gate of the second conductivity type. A source/drain implantation is performed to form a source region and a drain region of the first conductivity type on opposite sides of the second gate. The source and drain regions are connected to the channel region, and overlap the channel region and the first gate.Type: ApplicationFiled: June 29, 2012Publication date: January 2, 2014Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Mingo Liu
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Patent number: 8614487Abstract: A semiconductor device with at least two gate regions. The device includes a substrate region including a surface, a source region in the substrate region, and a drain region in the substrate region. The drain region and the source region are separate from each other. Additionally, the device includes a first gate region on the surface, a second gate region on the surface, and an insulation region on the surface and between the first gate region and the second gate region. The first gate region and the second gate region are separated by the insulation region. The first gate region is capable of forming a first channel in the substrate region. The first channel is from the source region to the drain region. The second gate region is capable of forming a second channel in the substrate region. The second channel is from the source region to the drain region.Type: GrantFiled: March 15, 2006Date of Patent: December 24, 2013Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Deyuan Xiao, Gary Chen, Tan Leong Seng, Roger Lee
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Power devices, structures, components, and methods using lateral drift, fixed net charge, and shield
Patent number: 8564057Abstract: Lateral power devices where immobile electrostatic charge is emplaced in dielectric material adjoining the drift region. A shield gate is interposed between the gate electrode and the drain, to reduce the Miller charge. In some embodiments the gate electrode is a trench gate, and in such cases the shield electrode too is preferably vertically extended.Type: GrantFiled: July 13, 2010Date of Patent: October 22, 2013Assignee: MaxPower Semiconductor, Inc.Inventors: Mohamed N. Darwish, Jun Zeng -
Patent number: 8541302Abstract: An electronic device can include a transistor structure including a semiconductor layer overlying a substrate and a trench extending into the semiconductor layer having a tapered shape. In an embodiment, the tapered shape includes a facet. The transistor structure can include a source region and a drain region wherein different portions of the drain regions are disposed adjacent to the primary surface and within the trench. In another embodiment, different facets may be spaced apart from each other. Processes of forming the tapered etch can be tailored based on the needs or desires of a fabricator.Type: GrantFiled: December 15, 2011Date of Patent: September 24, 2013Assignee: Semiconductor Components Industries, LLCInventors: Gary H. Loechelt, Gordon M. Grivna
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Patent number: 8466501Abstract: An asymmetric silicon-on-insulator (SOI) junction field effect transistor (JFET) and a method. The JFET includes a bottom gate on an insulator layer, a channel region on the bottom gate and, on the channel region, source/drain regions and a top gate between the source/drain regions. STIs isolate the source/drain regions from the top gate and a DTI laterally surrounds the JFET to isolate it from other devices. Non-annular well(s) are positioned adjacent to the channel region and bottom gate (e.g., a well having the same conductivity type as the top and bottom gates can be connected to the top gate and can extend down to the insulator layer, forming a gate contact on only a portion of the channel region, and/or another well having the same conductivity type as the channel and source/drain regions can extend from the source region to the insulator layer, forming a source-to-channel strap).Type: GrantFiled: May 21, 2010Date of Patent: June 18, 2013Assignee: International Business Machines CorporationInventors: Douglas B. Hershberger, Richard A. Phelps, Robert M. Rassel, Stephen A. St. Onge, Michael J. Zierak
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Patent number: 8455932Abstract: A common cut mask is employed to define a gate pattern and a local interconnect pattern so that local interconnect structures and gate structures are formed with zero overlay variation relative to one another. A local interconnect structure may be laterally spaced from a gate structure in a first horizontal direction, and contact another gate structure in a second horizontal direction that is different from the first horizontal direction. Further, a gate structure may be formed to be collinear with a local interconnect structure that adjoins the gate structure. The local interconnect structures and the gate structures are formed by a common damascene processing step so that the top surfaces of the gate structures and the local interconnect structures are coplanar with each other.Type: GrantFiled: May 6, 2011Date of Patent: June 4, 2013Assignee: International Business Machines CorporationInventors: Ali Khakifirooz, Kangguo Cheng, Bruce B. Doris, Wilfried E. Haensch, Balasubramanian S. Haran, Pranita Kulkarni
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Patent number: 8441048Abstract: The present invention provides a horizontally depleted Metal Semiconductor Field Effect Transistor (MESFET). A drain region, a source region, and a channel region are formed in the device layer such that the drain region and the source region are spaced apart from one another and the channel region extends between the drain region and the source region. First and second gate contacts are formed in the device layer on either side of the channel region, and as such, the first and second gate contacts will also reside between opposing portions of the source and drain regions. With this configuration, voltages applied to the first and second gate contacts effectively control vertical depletion regions, which form on either side of the channel region.Type: GrantFiled: September 12, 2008Date of Patent: May 14, 2013Assignee: Arizona Board of Regents for and on behalf of Arizona State UniversityInventors: Joseph E. Ervin, Trevor John Thornton
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Patent number: 8415216Abstract: Disclosed are embodiments of a semiconductor structure that includes one or more multi-gate field effect transistors (MUGFETs), each MUGFET having one or more semiconductor fins. In the embodiments, dopant implant region is incorporated into the upper portion of the channel region of a semiconductor fin in order to selectively modify (i.e., decrease or increase) the threshold voltage within that upper portion relative to the threshold voltage in the lower portion and, thereby to selectively modify (i.e., decrease or increase) device drive current. In the case of a multiple semiconductor fins, the use of implant regions, the dopant conductivity type in the implant regions and/or the sizes of the implant regions can be varied from fin to fin within a multi-fin MUGFET or between different single and/or multi-fin MUGFETs so that individual device drive current can be optimized. Also disclosed herein are embodiments of a method of forming the semiconductor structure.Type: GrantFiled: February 28, 2012Date of Patent: April 9, 2013Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Patent number: 8395185Abstract: A switching element comprising: an insulative substrate; a first electrode and a second electrode provided on one surface of the insulative substrate; and an interelectrode gap which is provided between the first electrode and the second electrode, and which has a gap on the order of nanometers in which switching phenomenon of resistance occurs by applying predetermined voltage between the first electrode and the second electrode, wherein the one surface of the insulative substrate contains nitrogen.Type: GrantFiled: June 17, 2008Date of Patent: March 12, 2013Assignees: Funai Electric Advanced Applied Technology Research Institute Inc., National Institute of Advanced Industrial Science and Technology, Funai Electric Co., Ltd.Inventors: Shigeo Furuta, Yuichiro Masuda, Tsuyoshi Takahashi, Masatoshi Ono, Yasuhisa Naitoh, Masayo Horikawa, Tetsuo Shimizu
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Patent number: 8378392Abstract: A trench Metal Oxide Semiconductor Field Effect Transistor with improved body region structures is disclosed. By forming the inventive body region structures with concave-arc shape with respect to epitaxial layer, a wider interfaced area between the body region and the epitaxial layer is achieved, thus increasing capacitance between drain and source Cds. Moreover, the invention further comprises a Cds enhancement doped region interfaced with said body region having higher doping concentration than the epitaxial layer to further enhancing Cds without significantly impact breakdown voltage.Type: GrantFiled: April 7, 2010Date of Patent: February 19, 2013Assignee: Force Mos Technology Co., Ltd.Inventor: Fu-Yuan Hsieh
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Patent number: 8373209Abstract: A semiconductor device includes: a substrate; and depletion and enhancement mode JFETs. The depletion mode JFET includes: a concavity on the substrate; a channel layer in the concavity; a first gate region on the channel layer; first source and drain regions on respective sides of the first gate region in the channel layer; first gate, source and drain electrodes. The enhancement mode JFET includes: a convexity on the substrate; the channel layer on the convexity; a second gate region on the channel layer; second source and drain regions on respective sides of the second gate region in the channel layer; second gate, source and drain electrodes. A thickness of the channel layer in the concavity is larger than a thickness of the channel layer on the convexity.Type: GrantFiled: December 21, 2010Date of Patent: February 12, 2013Assignee: DENSO CORPORATIONInventors: Rajesh Kumar Malhan, Naohiro Sugiyama
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Publication number: 20120319176Abstract: In at least one embodiment, a method of manufacturing a varactor includes forming a well over a substrate. The well has a first type doping. A first source region and a second source region are formed in the well, and the first source region and the second source region have a second type doping. A drain region is formed in the well, and the drain region has the first type doping. A first gate region is formed over the well between the drain region and the first source region. Moreover, a second gate region is formed over the well between the drain region and the second source region.Type: ApplicationFiled: August 27, 2012Publication date: December 20, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Chung CHEN, Chewn-PU JOU, Chin Wei KUO, Sally LIU
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Patent number: 8264017Abstract: A junction field effect transistor includes a channel region, a gate region coupled to the channel region, a well tap region coupled to the gate region and the channel region, and a well region coupled to the well tap region and the channel region. A double gate operation is achieved by this structure as a voltage applied to the gate region is also applied to the well region through the well tap region in order to open the channel from both the gate region and the well region.Type: GrantFiled: August 26, 2011Date of Patent: September 11, 2012Assignee: SuVolta, Inc.Inventor: Srinivasa R. Banna
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Publication number: 20120190313Abstract: A switch element includes a switch device having a drain, a source and a plurality of gates, and at least one additional interconnect located between the plurality of gates, the additional interconnect operative to establish a constant potential between the at least two gates.Type: ApplicationFiled: April 2, 2012Publication date: July 26, 2012Applicant: Skyworks Solutions, Inc.Inventors: Dima Prikhodko, Jerod F. Mason, Steven P. Matte, John Pessia, Jason Chiesa, Sergey Nabokin, Gene A. Tkachenko, Richard A. Carter, Steven C. Sprinkle, Mikhail Shirokov
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Patent number: 8216934Abstract: A semiconductor device is provided that forms a three-dimensional semiconductor device having semiconductor devices stacked on one another. In this semiconductor device, a hole is formed in a silicon semiconductor substrate that has an integrated circuit unit and an electrode pad formed on a principal surface on the outer side. The hole is formed by etching, with the electrode pad serving as an etching stopper layer. An embedded electrode is formed in the hole. This embedded electrode serves to electrically lead the electrode pad to the principal surface on the bottom side of the silicon semiconductor substrate.Type: GrantFiled: December 22, 2010Date of Patent: July 10, 2012Assignee: Fujitsu Semiconductor LimitedInventors: Eiji Yoshida, Takao Ohno, Yoshito Akutagawa, Koji Sawahata, Masataka Mizukoshi, Takao Nishimura, Akira Takashima, Mitsuhisa Watanabe
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Patent number: 8169007Abstract: A junction field effect transistor (JFET) in a semiconductor substrate includes a source region, a drain region, a channel region, an upper gate region, and a lower gate region. The lower gate region is electrically connected to the upper gate region. The upper and lower gate regions control the current flow through the channel region. By performing an ion implantation step that extends the thickness of the source region to a depth greater than the thickness of the drain region, an asymmetric JFET is formed. The extension of depth of the source region relative to the depth of the drain region reduces the length for minority charge carriers to travel through the channel region, reduces the on-resistance of the JFET, and increases the on-current of the JFET, thereby enhancing the overall performance of the JFET without decreasing the allowable Vds or dramatically increasing Voff/Vpinch.Type: GrantFiled: March 1, 2011Date of Patent: May 1, 2012Assignee: International Business Machines CorporationInventors: Frederick G. Anderson, David S. Collins, Richard A. Phelps, Robert M. Rassel, Michael J. Zierak
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Patent number: 8149619Abstract: A memory array is provided that includes a transistor having two active gates sharing a source, a drain, and a channel of the transistor. One of the active gates may be coupled to a volatile memory portion of a memory cell, such as a DRAM cell, and the other active gate may be coupled to a non-volatile memory portion, for example, a charge storage node such as a SONOS cell. Methods of operating the memory array are provided that include transferring data from the volatile memory portions to the non-volatile memory portions, transferring data from the non-volatile memory portions to the volatile memory portions, and erasing the non-volatile memory portions of a row of memory cells.Type: GrantFiled: February 11, 2011Date of Patent: April 3, 2012Assignee: Micron Technology, Inc.Inventors: Howard C. Kirsch, Charles Ingalls, Werner Juengling
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Patent number: 8138526Abstract: Fin-FET (fin field effect transistor) devices and methods of fabrication are disclosed. The Fin-FET devices include dual fin structures that may form a channel region between a source region and a drain region. In some embodiments, the dual fin structures are formed by thinning shallow trench isolation structures, using a pair of shallow trench isolation (STI) structures as a mask to define a recess in a portion of the substrate between the pair of STI structures, and recessing the pair of STI structures so that the resulting dual fin structure protrudes from an active surface of the substrate. The dual fin structure may be used to form single-gate, double-gate or triple-gate fin-FET devices. Electronic systems including such fin-FET devices are also disclosed.Type: GrantFiled: November 11, 2010Date of Patent: March 20, 2012Assignee: Micron Technology, Inc.Inventors: Aaron R. Wilson, Larson Lindholm, David Hwang
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Patent number: 8125007Abstract: An integrated circuit (IC) includes a fin field effect transistor (FinFET) radio frequency (RF) switch; and a planar complementary metal-oxide semiconductor field effect transistor (MOSFET). The planar MOSFET has a channel on a <100> wafer plane and the FinFET RF switch has a channel on a <100> fin plane. The FinFET RF switch and the planar MOSFET can be oriented at approximately 45° with respect to one another.Type: GrantFiled: November 20, 2009Date of Patent: February 28, 2012Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Alvin J. Joseph, Edward J. Nowak
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Publication number: 20110284930Abstract: An asymmetric silicon-on-insulator (SOI) junction field effect transistor (JFET) and a method. The JFET includes a bottom gate on an insulator layer, a channel region on the bottom gate and, on the channel region, source/drain regions and a top gate between the source/drain regions. STIs isolate the source/drain regions from the top gate and a DTI laterally surrounds the JFET to isolate it from other devices. Non-annular well(s) are positioned adjacent to the channel region and bottom gate (e.g., a well having the same conductivity type as the top and bottom gates can be connected to the top gate and can extend down to the insulator layer, forming a gate contact on only a portion of the channel region, and/or another well having the same conductivity type as the channel and source/drain regions can extend from the source region to the insulator layer, forming a source-to-channel strap).Type: ApplicationFiled: May 21, 2010Publication date: November 24, 2011Applicant: International Business Machines CorporationInventors: Douglas B. Hershberger, Richard A. Phelps, Robert M. Rassel, Stephen A. St. Onge, Michael J. Zierak
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Patent number: 8022467Abstract: A nonvolatile semiconductor memory device includes a first insulating layer, charge storage layers, element isolation insulating films, and a second insulating layer formed on the charge storage layers and the element isolation insulating films and including a stacked structure of a first silicon nitride film, first silicon oxide film, intermediate insulating film and second silicon oxide film. The first silicon nitride film has a nitrogen concentration of not less than 21×1015 atoms/cm2. Each element isolation insulating film includes a high-temperature oxide film formed along lower side surfaces of the charge storage layers between the charge storage layers and a coating type insulating film. The first silicon nitride film is formed on an upper surface of the high-temperature oxide film in upper surfaces of the element isolation insulating films and not on the upper surface of the coating type insulating film.Type: GrantFiled: May 18, 2009Date of Patent: September 20, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Hirofumi Iikawa, Masayuki Tanaka
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Patent number: 8017476Abstract: A junction field effect transistor includes a channel region, a gate region coupled to the channel region, a well tap region coupled to the gate region and the channel region, and a well region coupled to the well tap region and the channel region. A double gate operation is achieved by this structure as a voltage applied to the gate region is also applied to the well region through the well tap region in order to open the channel from both the gate region and the well region.Type: GrantFiled: December 2, 2008Date of Patent: September 13, 2011Assignee: SuVolta, Inc.Inventor: Srinivasa R. Banna
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Publication number: 20110204969Abstract: Various embodiments of the invention provide a varactor structure that, depends on configurations, can provide a C-V characteristic based on one or a combination of a reverse bias junction capacitor, a channel capacitor, and an oxide capacitor. The junction capacitor is formed by reverse biasing the P+ source region and the N-well. The channel capacitance is formed between the P+ source region and the N+ drain region, and the oxide capacitor is formed in the gate oxide area. Depending on biasing one or a combination of the gate voltage VG, the source voltage VS, and the drain voltage VD, embodiments can utilize one or a combination of the above capacitors. Other embodiments using the varactors in a Voltage-Controlled Oscillator (VCO) are also disclosed.Type: ApplicationFiled: February 19, 2010Publication date: August 25, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Chung CHEN, Chewn-Pu Jou, Chin Wei Kuo, Sally Liu
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Patent number: 7989867Abstract: A semiconductor memory device includes a semiconductor substrate, a semiconductor layer, a source/drain layer, first and second insulating films, and first and second gate electrodes. The semiconductor layer of one conductivity type is formed on a principal surface of the semiconductor substrate. The source/drain layer is formed on the principal surface with being in contact with one end of the semiconductor layer, and has a conductivity type opposite to the one conductivity type. The first insulating film is formed on one side surface of the semiconductor layer. The second insulating film is formed on another side surface of the semiconductor layer. The first gate electrode is formed on the one side surface via the first insulating film. The second gate electrode is formed on the other side surface of the semiconductor layer via the second insulating film, and is opposed to the first gate electrode.Type: GrantFiled: October 1, 2008Date of Patent: August 2, 2011Assignee: Kabushiki Kaisha ToshibaInventor: Mizuki Ono
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Patent number: 7977714Abstract: A wrapped gate junction field effect transistor (JFET) with at least one semiconductor channel having a first conductivity type doping is provided. Both sidewalls of each of the at least one semiconductor channel laterally abuts a side gate region having a second conductivity type doping, which is the opposite of the first conductivity doping. Further, the at least one semiconductor channel vertically abuts a top gate region and at least one bottom gate region, both having the second conductivity type doping. The gate electrode, which comprises side gate region, the top gate region, and at least one bottom gate regions, wraps around each of the at least one semiconductor channel to provide tight control of the current, i.e., a low off-current, through the at least one semiconductor channel. By employing multiple channels, the JFET may provide a high on-current.Type: GrantFiled: October 19, 2007Date of Patent: July 12, 2011Assignee: International Business Machines CorporationInventors: John Ellis-Monaghan, Richard A. Phelps, Robert M. Rassel, Steven H. Voldman, Michael J. Zierak
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Patent number: 7977749Abstract: A semiconductor device includes an active region defining at least four surfaces, the four surfaces including first, second, third, and fourth surfaces, a gate insulation layer formed around the four surfaces of the active region, and a gate electrode formed around the gate insulation layer and the four surfaces of the active region.Type: GrantFiled: December 28, 2009Date of Patent: July 12, 2011Assignee: Hynix Semiconductor Inc.Inventor: Jun-Hee Cho
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Patent number: 7977196Abstract: A semiconductor device includes an active region defining at least four surfaces, the four surfaces including first, second, third, and fourth surfaces, a gate insulation layer formed around the four surfaces of the active region, and a gate electrode formed around the gate insulation layer and the four surfaces of the active region.Type: GrantFiled: December 28, 2009Date of Patent: July 12, 2011Assignee: Hynix Semiconductor Inc.Inventor: Jun-Hee Cho
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Patent number: 7973344Abstract: Double gate JFET with reduced area consumption and fabrication method therefore. Double-gate semiconductor device including a substrate having a shallow trench isolator region comprising a first STI and a second STI, a channel region having a first and second channel edges, the channel region formed in the substrate and disposed between and in contact with the first STI and the second STI at the first and second channel edge. The first STI has a first cavity at the first channel edge, and the second STI has a second cavity at the second channel edge. The device further includes a gate electrode region comprising conductive material filling at least one of the first and second cavities. At least one of the first and second cavities is physically configured to provide electrical coupling of the gate electrode region to a back-gate P-N junction.Type: GrantFiled: April 30, 2008Date of Patent: July 5, 2011Assignee: SuVolta, Inc.Inventor: Srinivasan R. Banna
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Publication number: 20110147807Abstract: Memory cells are constructed from double-gated four terminal transistors having independent gate control. DRAM cells using one transistor to implement a Ferroelectric FeRAM are described. Top gates provide conventional access while independent bottom gates provide control to optimize memory retention for given speed and power parameters as well as to accommodate hardening against radiation. In a single transistor cell without a capacitor, use of the bottom gate allows packing to a density approaching 2 F2. Using a ferroelectric material as the gate insulator produces a single-transistor FeRAM cell that overcomes the industry-wide Write Disturb problem. The memory cells are compatible with SOI logic circuitry for use as embedded RAM in SOC applications.Type: ApplicationFiled: February 28, 2011Publication date: June 23, 2011Applicant: AMERICAN SEMICONDUCTOR, INC.Inventors: Dale G. Wilson, Douglas R. Hackler, SR.
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Patent number: 7964917Abstract: A semiconductor device includes a plurality of first MIS transistors and a plurality of second MIS transistors formed on a semiconductor substrate and a liner insulating film applying stress along the gate length direction. Each of the first MIS transistors includes first L-shaped sidewalls each having an L-shaped cross-sectional shape, and each of the second MIS transistors includes second L-shaped sidewalls each having an L-shaped cross-sectional shape and outer sidewalls. The minimum thickness of a part of the liner insulating film located on each of second source/drain regions of the second MIS transistor is larger than the minimum thickness of a part thereof located on each of first source/drain regions of the first MIS transistor.Type: GrantFiled: October 18, 2007Date of Patent: June 21, 2011Assignee: Panasonic CorporationInventor: Susumu Akamatsu
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Patent number: 7928445Abstract: A disclosed semiconductor device includes a MOS transistor that causes no problems concerning the formation of a thick gate insulating film and that is applicable to high withstand voltage devices. A drain region has a double diffusion structure including an N-drain region 3d and an N+ drain region 11d. A gate electrode includes a first gate electrode 9 formed on an insulating film 7 and a second gate electrode 13 formed on the first gate electrode 9 via a gate electrode insulating film 11. Between the gate insulating film 7 and the N+ source region 11s, a field insulating film 15 is disposed, over which an edge of the first gate electrode 9 is disposed. A gate voltage applied to the second gate electrode 13 via a gate wiring 13g is divided between the gate insulating film 7 and the gate electrode insulating film 11.Type: GrantFiled: March 11, 2008Date of Patent: April 19, 2011Assignee: Ricoh Company, Ltd.Inventor: Naohiro Ueda
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Publication number: 20110084318Abstract: A junction field effect transistor semiconductor device and method can include a top gate interposed between a source region and a drain region, and which can extend across an entire surface of the channel region from the source region to the drain region. Top gate doping can be configured such that the top gate can remain depleted throughout operation of the device. An embodiment of a device so configured can be used in precision, high-voltage applications.Type: ApplicationFiled: March 18, 2010Publication date: April 14, 2011Inventor: Aaron Gibby
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Patent number: 7915107Abstract: This invention describes a method of building complementary logic circuits using junction field effect transistors in silicon. This invention is ideally suited for deep submicron dimensions, preferably below 65 nm. The basis of this invention is a complementary Junction Field Effect Transistor which is operated in the enhancement mode. The speed-power performance of the JFETs becomes comparable with the CMOS devices at sub-70 nanometer dimensions. However, the maximum power supply voltage for the JFETs is still limited to below the built-in potential (a diode drop). To satisfy certain applications which require interface to an external circuit driven to higher voltage levels, this invention includes the structures and methods to build CMOS devices on the same substrate as the JFET devices.Type: GrantFiled: June 26, 2009Date of Patent: March 29, 2011Assignee: SuVolta, Inc.Inventor: Ashok K. Kapoor
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Publication number: 20110068376Abstract: A double-gate semiconductor device includes a MOS gate and a junction gate, in which the bias of the junction gate is a function of the gate voltage of the MOS gate. The breakdown voltage of the double-gate semiconductor device is the sum of the breakdown voltages of the MOS gate and the junction gate. The double-gate semiconductor device provides improved RF capability in addition to operability at higher power levels as compared to conventional transistor devices. The double-gate semiconductor device may also be fabricated in a higher spatial density configuration such that a common implantation between the MOS gate and the junction gate is eliminated.Type: ApplicationFiled: November 22, 2010Publication date: March 24, 2011Inventors: Denis A. Masliah, Alexandre G. Bracale, Francis C. Huin, Patrice J. Barroul
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Patent number: 7884459Abstract: A semiconductor device is provided that forms a three-dimensional semiconductor device having semiconductor devices stacked on one another. In this semiconductor device, a hole is formed in a silicon semiconductor substrate that has an integrated circuit unit and an electrode pad formed on a principal surface on the outer side. The hole is formed by etching, with the electrode pad serving as an etching stopper layer. An embedded electrode is formed in the hole. This embedded electrode serves to electrically lead the electrode pad to the principal surface on the bottom side of the silicon semiconductor substrate.Type: GrantFiled: September 15, 2008Date of Patent: February 8, 2011Assignee: Fujitsu Semiconductor LimitedInventors: Eiji Yoshida, Takao Ohno, Yoshito Akutagawa, Koji Sawahata, Masataka Mizukoshi, Takao Nishimura, Akira Takashima, Mitsuhisa Watanabe
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Patent number: 7859053Abstract: A method for fabricating double-gate and tri-gate transistors in the same process flow is described. In one embodiment, a sacrificial layer is formed over stacks that include semiconductor bodies and insulative members. The sacrificial layer is planarized prior to forming gate-defining members. After forming the gate-defining members, remaining insulative member portions are removed from above the semiconductor body of the tri-gate device but not the I-gate device. This facilitates the formation of metallization on three sides of the tri-gate device, and the formation of independent gates for the I-gate device.Type: GrantFiled: January 18, 2006Date of Patent: December 28, 2010Assignee: Intel CorporationInventors: Peter L. D. Chang, Brian S. Doyle
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Patent number: 7851830Abstract: A multigate Schottky diode comprising an electrically conducting active semiconductor region; first and second electrically connected metallic contact arms on the active semiconductor region forming ohmic contacts therewith; the ohmic contacts being spaced apart on the active semiconductor region to define a gate receiving channel therebetween. a plurality of electrically connected metallic gate fingers, the metallic gate fingers being in contact with the active semiconductor region to form Schottky junctions, the Schottky junctions being spaced apart on the active semiconductor region and extending at least partially along the gate receiving channel.Type: GrantFiled: November 21, 2007Date of Patent: December 14, 2010Assignee: RFMD (UK) LimitedInventors: Ronald Arnold, Dennis Michael Brookbanks
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Patent number: 7785973Abstract: An electronic device can include a gate electrode having different portions with different conductivity types. In an embodiment, a process of forming the electronic device can include forming a semiconductor layer over a substrate, wherein the semiconductor layer has a particular conductivity type. The process can also include selectively doping a region of the semiconductor layer to form a first doped region having an opposite conductivity type. The process can further include patterning the semiconductor layer to form a gate electrode that includes a first portion and a second portion, wherein the first portion includes a portion of the first doped region, and the second region includes a portion of the semiconductor layer outside of the first doped region. In a particular embodiment, the electronic device can have a gate electrode having edge portions of one conductivity type and a central portion having an opposite conductivity type.Type: GrantFiled: January 25, 2008Date of Patent: August 31, 2010Assignee: Spansion LLCInventor: Burchell B. Baptiste
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Publication number: 20100207173Abstract: A junction field effect transistor (JFET) in a semiconductor substrate includes a source region, a drain region, a channel region, an upper gate region, and a lower gate region. The lower gate region is electrically connected to the upper gate region. The upper and lower gate regions control the current flow through the channel region. By performing an ion implantation step that extends the thickness of the source region to a depth greater than the thickness of the drain region, an asymmetric JFET is formed. The extension of depth of the source region relative to the depth of the drain region reduces the length for minority charge carriers to travel through the channel region, reduces the on-resistance of the JFET, and increases the on-current of the JFET, thereby enhancing the overall performance of the JFET without decreasing the allowable Vds or dramatically increasing Voff/Vpinch.Type: ApplicationFiled: February 19, 2009Publication date: August 19, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Frederick G. Anderson, David S. Collins, Richard A. Phelps, Robert M. Rassel, Michael J. Zierak
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Patent number: 7767532Abstract: A method for manufacturing an EEPROM cell including a dual-gate MOS transistor. The method includes the steps of providing a semiconductor substrate covered with a stack of first and second layers, forming at least one first opening in the second layer, forming, in the first layer, a second opening continuing the first opening, enlarging the first opening by isotropic etching, forming a first doped region in the substrate by implantation through the first enlarged opening, the first doped region taking part in the forming of the transistor drain or source, forming, in the third opening, a thinned-down insulating portion thinner than the first layer, and forming the gates of the MOS transistor at least partially extending over the thinned-down insulating portion.Type: GrantFiled: January 16, 2009Date of Patent: August 3, 2010Assignee: STMicroelectronics (Rousset) SASInventor: Stephan Niel
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Patent number: 7759721Abstract: A non-volatile memory device comprises a substrate with the dielectric layer formed thereon. A control gate and a floating gate are then formed on top of the dielectric layer. Accordingly, a non-volatile memory device can be constructed using a single poly process that is compatible with conventional CMOS processes. In addition, an assist gate, or assist gates are formed on the dielectric layer next to and between the control gate and floating gate respectively. The assist gates are used to form inversion diffusion regions in the substrate. By using the assist gates to form inversion diffusion regions, the overall size of the device can be reduced, which can improve device density.Type: GrantFiled: May 17, 2006Date of Patent: July 20, 2010Assignee: Macronix International Co., Ltd.Inventors: Ming-Chang Kuo, Chao-I Wu
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Publication number: 20100133593Abstract: A junction field effect transistor includes a channel region, a gate region coupled to the channel region, a well tap region coupled to the gate region and the channel region, and a well region coupled to the well tap region and the channel region. A double gate operation is achieved by this structure as a voltage applied to the gate region is also applied to the well region through the well tap region in order to open the channel from both the gate region and the well region.Type: ApplicationFiled: December 2, 2008Publication date: June 3, 2010Applicant: DSM Solutions, Inc.Inventor: Srinivasa R. Banna
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Patent number: 7705358Abstract: It is an object to improve operation characteristics and reliability of a semiconductor device. A semiconductor device which includes an island-shaped semiconductor film having a channel-formation region, a first low-concentration impurity region, a second low-concentration impurity region, and a high-concentration impurity region including a silicide layer; a gate insulating film; a first gate electrode overlapping with the channel-formation region and the first low-concentration impurity region with the gate insulating film interposed therebetween; a second gate electrode overlapping with the channel-formation region with the gate insulating film and the first gate electrode interposed therebetween; and a sidewall formed on side surfaces of the first gate electrode and the second gate electrode. In the semiconductor device, a thickness of the gate insulating film is smaller in a region over the second low-concentration impurity region than in a region over the first low-concentration impurity region.Type: GrantFiled: December 14, 2007Date of Patent: April 27, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Satoru Okamoto, Keiichi Sekiguchi
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Patent number: 7700446Abstract: A field effect transistor (FET) and method of forming the FET comprises a substrate; a silicon germanium (SiGe) layer over the substrate; a semiconductor layer over and adjacent to the SiGe layer; an insulating layer adjacent to the substrate, the SiGe layer, and the semiconductor layer; a pair of first gate structures adjacent to the insulating layer; and a second gate structure over the insulating layer. Preferably, the insulating layer is adjacent to a side surface of the SiGe layer and an upper surface of the semiconductor layer, a lower surface of the semiconductor layer, and a side surface of the semiconductor layer. Preferably, the SiGe layer comprises carbon. Preferably, the pair of first gate structures are substantially transverse to the second gate structure. Additionally, the pair of first gate structures are preferably encapsulated by the insulating layer.Type: GrantFiled: July 31, 2007Date of Patent: April 20, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Matthew J. Breitwisch, Edward J. Nowak, BethAnn Rainey
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Patent number: 7693720Abstract: Mobile systems and methods that overcomes the deficiencies of prior art speech-based interfaces for telematics applications through the use of a complete speech-based information query, retrieval, presentation and local or remote command environment. This environment makes significant use of context, prior information, domain knowledge, and user specific profile data to achieve a natural environment for one or more users making queries or commands in multiple domains. Through this integrated approach, a complete speech-based natural language query and response environment can be created. The invention creates, stores and uses extensive personal profile information for each user, thereby improving the reliability of determining the context and presenting the expected results for a particular question or command. The invention may organize domain specific behavior and information into agents, that are distributable or updateable over a wide area network.Type: GrantFiled: July 15, 2003Date of Patent: April 6, 2010Assignee: VoiceBox Technologies, Inc.Inventors: Robert A. Kennewick, David Locke, Michael R. Kennewick, Sr., Michael R. Kennewick, Jr., Richard Kennewick, Tom Freeman, Stephen F. Elston