Floating Pn Junction Guard Region Patents (Class 257/495)
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Patent number: 8110853Abstract: A semiconductor structure. The semiconductor structure includes a semiconductor substrate, a first transistor on the semiconductor substrate, and a guard ring on the semiconductor substrate. The semiconductor substrate includes a top substrate surface which defines a reference direction perpendicular to the top substrate surface. The guard ring includes a semiconductor material doped with a doping polarity. A first doping profile of a first doped transistor region of the first transistor in the reference direction and a second doping profile of a first doped guard-ring region of the guard ring in the reference direction are essentially a same doping profile. The guard ring forms a closed loop around the first transistor.Type: GrantFiled: June 1, 2009Date of Patent: February 7, 2012Assignee: International Business Machines CorporationInventor: Steven Howard Voldman
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Patent number: 8097919Abstract: An electronic device includes a drift layer having a first conductivity type, a buffer layer having a second conductivity type, opposite the first conductivity type, on the drift layer and forming a P?N junction with the drift layer, and a junction termination extension region having the second conductivity type in the drift layer adjacent the P?N junction. The buffer layer includes a step portion that extends over a buried portion of the junction termination extension. Related methods are also disclosed.Type: GrantFiled: August 11, 2008Date of Patent: January 17, 2012Assignee: Cree, Inc.Inventors: Qingchun Zhang, Anant K. Agarwal
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Patent number: 8093623Abstract: Disclosed herein is a semiconductor integrated circuit including a protected circuit; and a protection element formed on the same semiconductor substrate as the protected circuit and adapted to protect the protected circuit, wherein the protection element includes two diodes having their anodes connected together to form a floating node and two cathodes connected to the protected circuit, the two diodes are formed in a well-in-well structure on the semiconductor substrate, and the well-in-well structure includes a P-type well forming the floating gate, an N-type well which surrounds the surfaces of the P-type well other than that on the front side of the substrate with the deep portion side of the substrate so as to form the cathode of one of the diodes, and a first N-type region formed in the P-type well so as to form the cathode of the other diode.Type: GrantFiled: November 2, 2009Date of Patent: January 10, 2012Assignee: Sony CorporationInventors: Kouzou Mawatari, Motoyasu Yano
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Patent number: 8080858Abstract: A Semiconductor component having a space saving edge structure is disclosed. One embodiment provides a first side, a second side, an inner region, an edge region adjoining the inner region in a lateral direction of the semiconductor body, and a first semiconductor layer extending across the inner region and the edge region and having a basic doping of a first conductivity type. At least one active component zone of a second conductivity type, which is complementary to the first conductivity type, is disposed in the inner region in the first semiconductor layer. An edge structure is disposed in the edge region and includes at least one trench extending from the first side into the semiconductor body. An edge electrode is disposed in the trench, a dielectric layer is disposed in the trench between the edge electrode and the semiconductor body, a first edge zone of the second conductivity type adjoin the trench and are at least partially disposed below the trench.Type: GrantFiled: August 3, 2007Date of Patent: December 20, 2011Assignee: Infineon Technologies Austria AGInventors: Franz Hirler, Ralf Siemieniec, Christian Geissler
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Publication number: 20110233715Abstract: A semiconductor device according to the present invention includes: a cell active region including a p-base layer being an active layer of a second conductivity type that is diffused above a high concentration n-type substrate being a semiconductor substrate of a first conductivity type; and a p-well layer being a first well region of the second conductivity type having a ring shape, which is adjacent to the p-base layer, is diffused above the high concentration n-type substrate so as to surround the cell active region, and serves as a main junction part of a guard ring structure, wherein in a region on a surface of the p-well layer other than both ends, a trench region that is a ring-shaped recess having a tapered side surface is formed along the ring shape of the p-well layer 4, the side surface widening upward.Type: ApplicationFiled: October 19, 2010Publication date: September 29, 2011Applicant: MITSUBISHI ELECTRIC CORPORATIONInventor: Atsushi NARAZAKI
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Patent number: 7999333Abstract: In a conventional semiconductor device, there has been a problem that, in a region where a wiring layer to which a high electric potential is applied traverses a top surface of an isolation region, the withstand voltage is deteriorated. In a semiconductor device of the present invention, an epitaxial layer is deposited on a substrate, and an LDMOSFET is formed in one region divided by an isolation region. In a region where a wiring layer connected to a drain electrode traverses a top surface of the isolation region, a conductive plate having a ground electric potential and another conductive plate in a floating state are formed under the wiring layer. With this structure, electric field is reduced in the vicinity of the isolation region under the wiring layer, whereby a withstand voltage of the LDMOSFET is increased.Type: GrantFiled: March 27, 2006Date of Patent: August 16, 2011Assignee: Sanyo Electric Co., Ltd.Inventors: Shuichi Kikuch, Shigeaki Okawa, Kiyofumi Nakaya, Toshiyuki Takahashi
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Patent number: 7999343Abstract: An arrangement for use in a semiconductor component includes a semiconductor body and an edge structure. The semiconductor body having a first face, a second face, a first semiconductor zone of a first conductance type, at least one second semiconductor zone of a second conductance type, and a semiconductor junction formed therebetween running substantially parallel to the first face. The edge structure is laterally adjacent to the second semiconductor zone and includes at least a first trench. The first trench extends in a vertical direction into the semiconductor body and is filled with a dielectric material. The edge structure further includes a third semiconductor zone of the second conductance type, which, at least partially, is adjacent to a face of the at least one trench which faces away from the first face. The edge structure further includes a fourth semiconductor zone of the first conductance type, which is more heavily doped than the first semiconductor zone, and is proximate to the first face.Type: GrantFiled: September 1, 2006Date of Patent: August 16, 2011Assignee: Infineon Technologies AGInventors: Jenoe Tihanyi, Nada Tihanyi, legal representative
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Patent number: 7989223Abstract: A spin injection device capable of spin injection magnetization reversal at low current density, a magnetic apparatus using the same, and magnetic thin film using the same, whereby the spin injection device (14) including a spin injection part (1) comprising a spin polarization part (9) including a ferromagnetic fixed layer (26) and an injection junction part (7) of nonmagnetic layer, and a ferromagnetic free layer (27) provided in contact with the spin injection part (1) is such that in which the nonmagnetic layer (7) is made of either an insulator (12) or a conductor (25), a nonmagnetic layer (28) is provided on the surface of the ferromagnetic free layer (27), electric current is flown in the direction perpendicular to the film surface of the spin injection device (14), and the magnetization of the ferromagnetic free layer (27) is reversed. This is applicable to such various magnetic apparatuses and magnetic memory devices as super gigabit large capacity, high speed, non-volatile MRAM and the like.Type: GrantFiled: February 2, 2009Date of Patent: August 2, 2011Assignee: Japan Science and Technology AgencyInventors: Kouichiro Inomata, Nobuki Tezuka
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Patent number: 7977762Abstract: An integrated circuit (IC) is disclosed to include a central area of the IC that is partitioned into a first section containing at least one digital circuit and a second section containing at least one analog circuit; and a guard strip (or shield) that is within the central area and that is positioned within between the digital circuit and the analog circuit. The shield or guard strip comprises of n-well and p-tap regions that separate digital and analog circuits.Type: GrantFiled: December 9, 2008Date of Patent: July 12, 2011Assignee: Alvand Technologies, Inc.Inventors: Mansour Keramat, Mehrdad Heshami, Syed S. Islam
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Patent number: 7911020Abstract: A semiconductor device has an active portion having at least one well region in a semiconductor layer, and a breakdown voltage maintaining structure surrounding the active portion. The maintaining structure includes a conductor layer over each of a plurality of guard rings with an insulating film interposed in between and connected to the respective guard ring. An inner side end portion of each conductor layer projects over the immediate adjacent inner side guard ring. The impurity concentration of the guard rings is set between the impurity concentrations of the semiconductor layer and the well regions. A field plate can extend over the innermost conductor layer with the insulating film interposed in between. The field plate is in contact with the outermost well region and is in contact with the first conductor layer. The outer side end of the field plate extends outwardly beyond an outer side end of the innermost conductor layer.Type: GrantFiled: July 10, 2008Date of Patent: March 22, 2011Assignee: Fuji Electric Systems Co., Ltd.Inventors: Yasushi Niimura, Takashi Kobayashi, Masanori Inoue, Yasuhiko Onishi
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Patent number: 7863110Abstract: A semiconductor device includes a device isolation layer on a semiconductor substrate defining an active region in the semiconductor substrate, a low voltage well of a first conductivity type in the active region of the semiconductor substrate, a high voltage impurity region of a second conductivity type in the active region of the semiconductor substrate, the high voltage impurity region positioned in an upper portion of the low voltage well, a high concentration impurity region of the second conductivity type within the high voltage impurity region and spaced apart from the device isolation layer, and a floating impurity region of the first conductivity type between the device isolation layer and the high concentration impurity region, the floating impurity region being a portion of an upper surface of the active region.Type: GrantFiled: October 19, 2007Date of Patent: January 4, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Tea-Kwang Yu, Kong-Sam Jang, Kwang-Tae Kim, Ji-Hoon Park, Eun-Mi Hong
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Publication number: 20100314706Abstract: A silicon drift detector (SDD) comprising electrically isolated rings. The rings can be individually biased doped rings. One embodiment includes an SDD with a single doped ring. Some of the doped rings may not require a bias voltage. Some of the rings can be field plate rings. The field plate rings may all use the same biasing voltage as a single outer doped ring. The ring widths can vary such that the outermost ring is widest and the ring widths decrease with each subsequent ring towards the anode.Type: ApplicationFiled: November 12, 2009Publication date: December 16, 2010Inventors: Derek Hullinger, Hideharu Matsuura, Kazuo Taniguchi, Tadashi Utaka
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Patent number: 7804143Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.Type: GrantFiled: February 18, 2009Date of Patent: September 28, 2010Assignee: Intersil Americas, Inc.Inventors: Stephen Joseph Gaul, Michael D. Church, Brent R. Doyle
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Patent number: 7791176Abstract: A power semiconductor component and method for producing it. The component has a semiconductor base body with a first doping and a pn junction formed by a contact region having a second doping with a doping profile in the base body. The second contact region is arranged at a second surface of the base body and extends into the base body. The base body has a trench-type cutout with an edge area and a base area, wherein the base area is formed as a second partial area of the second surface, and wherein the second contact region extends from the base area via the edge area as far as a first partial area. Furthermore, the pn junction has a curvature adjacent to the edge area.Type: GrantFiled: December 22, 2008Date of Patent: September 7, 2010Assignee: SEMIKRON Elektronik GmbH & Co. KGInventor: Bernhard König
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Patent number: 7777292Abstract: A semiconductor device includes a semiconductor substrate of a first conductivity type having a top surface and a bottom surface, a semiconductor layer of a first conductivity type formed on the top surface of the semiconductor substrate, and having an active region and an edge termination region surrounding the active region, a first semiconductor region of a second conductivity type formed in the edge termination region adjacent to an edge of the active region, a second semiconductor region of a second conductivity type buried in the edge termination region in a sheet shape or a mesh shape substantially in parallel with a surface of the semiconductor layer, a first electrode formed on the active region of the semiconductor layer and a part of the first semiconductor region, and a second electrode formed on the bottom surface of the semiconductor substrate.Type: GrantFiled: June 25, 2007Date of Patent: August 17, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Chiharu Ota, Johji Nishio, Tetsuo Hatakeyama, Takashi Shinohe
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Patent number: 7772669Abstract: Second diffusion layers to be guard rings of a second conductivity type are formed on the major surface of a semiconductor substrate of a first conductivity type in a guard ring region. An insulating film is formed on these second diffusion layers. The semiconductor device has a structure wherein a conductive film is formed on the insulating film between adjacent electrodes among a first surface electrode, second surface electrodes, and a third surface electrode.Type: GrantFiled: October 2, 2006Date of Patent: August 10, 2010Assignee: Mitsubishi Electric CorporationInventors: Shigeo Tooi, Tetsujiro Tsunoda
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Patent number: 7768093Abstract: A semiconductor device has a heavily doped substrate and an upper layer with doped silicon of a first conductivity type disposed on the substrate, the upper layer having an upper surface and including an active region that comprises a well region of a second, opposite conductivity type. An edge termination zone has a junction termination extension (JTE) region of the second conductivity type, the region having portions extending away from the well region and a number of field limiting rings of the second conductivity type disposed at the upper surface in the junction termination extension region.Type: GrantFiled: March 13, 2009Date of Patent: August 3, 2010Assignee: Infineon Technologies Austria AGInventors: Hans-Joachim Schulze, Frank Hille, Thomas Raker
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Patent number: 7737465Abstract: The present invention provides a semiconductor apparatus for improving a switching speed and a withstand voltage, and a manufacturing method of the semiconductor apparatus.Type: GrantFiled: November 10, 2008Date of Patent: June 15, 2010Assignee: Panasonic CorporationInventor: Ryo Yoshii
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Patent number: 7696600Abstract: A semiconductor device in the form of an IGBT has a front side contact, a rear side contact, and a semiconductor volume disposed between the front side contact and the rear side contact. The semiconductor volume includes a field stop layer for spatially delimiting an electric field that can be formed in the semiconductor volume. The semiconductor volume further includes a plurality of semiconductor zones, the plurality of semiconductor zones spaced apart from each other and each inversely doped with respect to adjacent areas. The plurality of semiconductor zones are located within the field stop layer.Type: GrantFiled: March 2, 2007Date of Patent: April 13, 2010Assignee: Infineon Technologies AGInventors: Anton Mauder, Hans-Joachim Schulze, Frank Pfirsch, Elmar Falck, Josef Lutz
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Patent number: 7652307Abstract: In a semiconductor device of the present invention, a MOS transistor is disposed in an elliptical shape. Linear regions in the elliptical shape are respectively used as the active regions, and round regions in the elliptical shape is used respectively as the inactive regions. In each of the inactive regions, a P type diffusion layer is formed to coincide with a round shape. Another P type diffusion layer is formed in a part of one of the inactive regions. These P type diffusion layers are formed as floating diffusion layers, are capacitively coupled to a metal layer on an insulating layer, and assume a state where predetermined potentials are respectively applied thereto. This structure makes it possible to maintain current performance of the active regions, while improving the withstand voltage characteristics in the inactive regions.Type: GrantFiled: September 7, 2006Date of Patent: January 26, 2010Assignee: Sanyo Electric Co., Ltd.Inventors: Shuichi Kikuchi, Kiyofumi Nakaya, Shigeaki Okawa
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Patent number: 7649213Abstract: A semiconductor device includes an SiC substrate, a normal direction of the substrate surface being off from a <0001> or <000-1> direction in an off direction, an SiC layer formed on the SiC substrate, a junction forming region formed in a substantially central portion of the SiC layer, a junction termination region formed to surround the junction forming region, and including a semiconductor region of a conductivity type different from the SiC layer formed as a substantially quadrangular doughnut ring, having two edges facing each other, each crossing a projection direction, which is obtained when the off direction is projected on the upper surface of the SiC layer, at a right angle, wherein a width of one of the two edges on an upper stream side of the off direction is L1, that of the other edge on a down stream side is L2, and a relation L1>L2 is satisfied.Type: GrantFiled: September 26, 2005Date of Patent: January 19, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Tetsuo Hatakeyama, Takashi Shinohe
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Patent number: 7635909Abstract: A semiconductor diode has an anode, a cathode and a semiconductor volume provided between anode and cathode. A plurality of semiconductor zones are formed in the semiconductor volume, which semiconductor zones are inversely doped with respect to their immediate surroundings, spaced apart from one another and provided in the vicinity of the cathode. The semiconductor zones are spaced apart from the cathode.Type: GrantFiled: December 23, 2004Date of Patent: December 22, 2009Assignee: Infineon Technologies AGInventors: Anton Mauder, Hans-Joachim Schulze, Frank Pfirsch, Elmar Falck, Josef Lutz
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Patent number: 7595542Abstract: A charge balance semiconductor power device comprises an active area having strips of p pillars and strips of n pillars arranged in an alternating manner, the strips of p and n pillars extending along a length of the active area. A non-active perimeter region surrounds the active area, and includes at least one p ring surrounding the active area. One end of at last one of the strips of p pillars extending immediately adjacent an edge of the active area terminates at a substantially straight line at which one end of each of the remainder of the strips of p pillars also end. The straight line extends perpendicular to the length of the active area along which the strips of n and p pillars extend.Type: GrantFiled: March 13, 2006Date of Patent: September 29, 2009Assignee: Fairchild Semiconductor CorporationInventors: Chanho Park, Joseph A. Yedinak, Christopher Boguslaw Kocon, Jason Higgs, Jaegil Lee
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Patent number: 7589377Abstract: In accordance with an embodiment of the present invention, a gate structure for a U-shape Metal-Oxide-Semiconductor (UMOS) device includes a dielectric layer formed into a U-shape having side walls and a floor to form a trench surrounding a dielectric layer interior region, a doped poly-silicon layer deposited adjacent to the dielectric layer within the dielectric layer interior region where the doped poly-silicon layer has side walls and a floor surrounding a doped poly-silicon layer interior region, a first metal layer deposited on the doped poly-silicon layer on a side opposite from the dielectric layer where the first metal layer has side walls and a floor surrounding a first metal layer interior region, and an undoped poly-silicon layer deposited to fill the first metal layer interior region.Type: GrantFiled: October 6, 2006Date of Patent: September 15, 2009Assignee: The Boeing CompanyInventors: Mercedes P. Gomez, Emil M. Hanna, Wen-Ben Luo, Qingchun Zhang
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Patent number: 7582938Abstract: A technique to enhancing substrate bias of grounded-gate NMOS fingers (ggNMOSFET's) has been developed. By using this technique, lower triggering voltage of NMOS fingers can be achieved without degrading ESD protection in negative zapping. By introducing a simple gate-coupled effect and a PMOSFET triggering source with this technique, low-voltage triggered NMOS fingers have also been developed in power and I/O ESD protection, respectively. A semiconductor device which includes a P-well which is underneath NMOS fingers. The device includes an N-well ring which is configured so that the inner P-well underneath the NMOS fingers is separated from an outer P-well. The inner P-well and outer P-well are connected by a P-substrate resistance which is much higher than the resistance of the P-wells. A P+-diffusion ring surrounding the N-well ring is configured to connect to VSS, i.e., P-taps.Type: GrantFiled: October 25, 2005Date of Patent: September 1, 2009Assignee: LSI CorporationInventor: Jau-Wen Chen
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Publication number: 20090212301Abstract: Edge termination structures for semiconductor devices are provided including a plurality of spaced apart concentric floating guard rings in a semiconductor layer that at least partially surround a semiconductor junction. The spaced apart concentric floating guard rings have a highly doped portion and a lightly doped portion. Related methods of fabricating devices are also provided herein.Type: ApplicationFiled: February 26, 2008Publication date: August 27, 2009Inventors: Qingchun Zhang, Charlotte Jones, Anant K. Agarwal
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Publication number: 20090206440Abstract: A semiconductor device has a heavily doped substrate and an upper layer with doped silicon of a first conductivity type disposed on the substrate, the upper layer having an upper surface and including an active region that comprises a well region of a second, opposite conductivity type. An edge termination zone has a junction termination extension (JTE) region of the second conductivity type, the region having portions extending away from the well region and a number of field limiting rings of the second conductivity type disposed at the upper surface in the junction termination extension region.Type: ApplicationFiled: March 13, 2009Publication date: August 20, 2009Inventors: Hans-Joachim Schulze, Frank Hille, Thomas Raker
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Patent number: 7566925Abstract: Image sensors and methods of fabricating the same are provided. The image sensor includes a blocking pattern disposed on photodiodes. The blocking pattern is formed of insulation material having a metal diffusion coefficient which is lower than a silicon oxide diffusion coefficient. Therefore, dark defects of the image sensor are reduced. In addition, the image sensor includes a color-ratio control layer. The color ratio control layer controls color ratios between the sensitivities to blue, green and red. As a result, color distinction of the picture that is embodied by the image sensor can be improved.Type: GrantFiled: September 9, 2005Date of Patent: July 28, 2009Assignee: Samsung Electronics, Co., Ltd.Inventors: Jae-Ho Song, Young-Hoon Park, Sang-Hak Shin
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Patent number: 7560787Abstract: In accordance with an embodiment of the invention, a semiconductor power device includes an active region configured to conduct current when the semiconductor device is biased in a conducting state, and a termination region along a periphery of the active region. A first silicon region of a first conductivity type extends to a first depth within a second silicon region of a second conductivity type, the first and second silicon regions forming a PN junction therebetween. At least one termination trench is formed in the termination. The termination trench extends into the second silicon region, and is laterally spaced from the first silicon region. An insulating layer lines the sidewalls and bottom of the termination trench. A conductive electrode at least partially fills the termination trench.Type: GrantFiled: December 22, 2005Date of Patent: July 14, 2009Assignee: Fairchild Semiconductor CorporationInventor: Christopher Boguslaw Kocon
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Patent number: 7541660Abstract: A The semiconductor device has a heavily doped substrate and an upper layer with doped silicon of a first conductivity type disposed on the substrate, the upper layer having an upper surface and including an active region that comprises a well region of a second, opposite conductivity type. An edge termination zone has a junction termination extension (JTE) region of the second conductivity type, the region having portions extending away from the well region and a number of field limiting rings of the second conductivity type disposed at the upper surface in the junction termination extension region.Type: GrantFiled: April 20, 2006Date of Patent: June 2, 2009Assignee: Infineon Technologies Austria AGInventors: Hans-Joachim Schulze, Frank Hille, Thomas Raker
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Patent number: 7525178Abstract: A termination region of a semiconductor die is provided, which includes one or more field rings arranged in the termination region, one or more metal field plates, and an insulation layer disposed to prevent direct electrical contact between the field rings and the field plate such that the at least one field ring is capacitively coupled with the at least one field plate. Such a termination region may also include a polysilicon plate capacitively coupled with a diffusion region laterally spaced from the field rings, the polysilicon plate being located at an outer surface or directly under a passivation layer at an outer surface of the die. The termination region may also include floating field rings. The insulation layer may be a field oxide layer.Type: GrantFiled: October 25, 2006Date of Patent: April 28, 2009Assignee: International Rectifier CorporationInventor: Lawrence Kulinsky
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Publication number: 20090045481Abstract: A semiconductor device has an active portion having at least one well region in a semiconductor layer, and a breakdown voltage maintaining structure surrounding the active portion. The maintaining structure includes a conductor layer over each of a plurality of guard rings with an insulating film interposed in between and connected to the respective guard ring. An inner side end portion of each conductor layer projects over the immediate adjacent inner side guard ring. The impurity concentration of the guard rings is set between the impurity concentrations of the semiconductor layer and the well regions. A field plate can extend over the innermost conductor layer with the insulating film interposed in between. The field plate is in contact with the outermost well region and is in contact with the first conductor layer. The outer side end of the field plate extends outwardly beyond an outer side end of the innermost conductor layer.Type: ApplicationFiled: July 10, 2008Publication date: February 19, 2009Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.Inventors: Yasushi NIIMURA, Takashi KOBAYASHI, Masanori INOUE, Yasuhiko ONISHI
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Publication number: 20080303114Abstract: A semiconductor device is provided, which includes a substrate; a P-N column layer disposed on the substrate; a second conductivity type epitaxial layer disposed on the P-N column layer. The P-N column layer includes first conductivity type columns and second conductivity type columns, which are alternately arranged. Each column has a tapered shape. A portion of the first conductivity type column located around the substrate has a smaller impurity concentration than another portion of the first conductivity type column located around the second conductivity type epitaxial layer. A portion of the second conductivity type column located around the substrate has a larger impurity concentration than another portion of the first conductivity type column located around the second conductivity type epitaxial layer.Type: ApplicationFiled: June 5, 2008Publication date: December 11, 2008Applicants: DENSO CORPORATION, SUMCO CORPORATIONInventors: Takumi Shibata, Shouichi Yamauchi, Syouji Nogami, Tomonori Yamaoka
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Publication number: 20080265359Abstract: A semiconductor device in the present invention is provided with a cathode layer of an N-type impurity region and an anode layer of a P-type impurity region formed on the cathode layer. A plurality of floating ring layers of the P-type impurity regions which is electrically floating is provided spaced apart from the anode layer on the main surface of the cathode layer. Then, well layers of the N-type impurity regions containing floating ring layers are provided. For example, each well layer can individually be provided to the floating ring layer. In this case, each floating ring layer may be spaced apart or overlapped one another. Accordingly, a semiconductor device serves to downsize a chip without changing a property of on-resistance or a breakdown voltage.Type: ApplicationFiled: April 16, 2008Publication date: October 30, 2008Inventors: Masaaki Noda, Tomonari Oota
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Patent number: 7385273Abstract: A power semiconductor device that includes a plurality of gate structure each having a gate insulation of a first thickness, and a termination region, the termination including a field insulation body surrounding the active region and having a recess that includes a bottom insulation thicker than the first thickness.Type: GrantFiled: June 9, 2006Date of Patent: June 10, 2008Assignee: International Rectifier CorporationInventors: Hugo R Burke, Simon Green
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Patent number: 7358563Abstract: A CMOS image sensor and a method for fabricating the same can ensure isolation characteristics using a shallow trench isolation (STI) process and a selective epitaxy method. The CMOS image sensor and method for fabricating the same can also reduce pixel size. The CMOS image sensor includes a semiconductor substrate, a first photodiode, a first epitaxial layer, a second epitaxial layer, a plurality of device isolation layers formed in isolation regions formed at the second epitaxial layer, a second photodiode formed between the device isolation layers, and a third epitaxial layer.Type: GrantFiled: December 29, 2005Date of Patent: April 15, 2008Assignee: Dongbu Electronics Co., LtdInventor: Sang Gi Lee
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Patent number: 7211861Abstract: An insulated gate semiconductor device, includes an isolating structure shaped in a circulating section along the periphery of a semiconductor substrate to isolate that part from an inside device region, a peripheral diffusion region of the semiconductor substrate located outside the isolating structure, a plurality of cell structures defined in the inside device region and divided in segments by insulated trench-shaped gates to have a base region covered with an emitter region in its upper surface, a collector region, and an emitter electrode electrically connected to the emitter region and the base region, a dummy base region contiguous to the cell structures and configured as a base region that has its upper surface left without the emitter region connected to the emitter electrode, an inner region defined in and insulated from the dummy base region, and a connection part to electrically connect the inner region to the emitter electrode.Type: GrantFiled: June 17, 2005Date of Patent: May 1, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Satoshi Teramae, Shigeru Hasegawa, Hideaki Ninomiya, Masahiro Tanaka
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Patent number: 7180158Abstract: A semiconductor component and method of manufacture, including an insulated gate bipolar transistor (IGBT) (100) including a semiconductor substrate (110) having a first conductivity type and buried semiconductor region (115) having a second conductivity type located above the semiconductor substrate. The IGBT further includes a plurality of first semiconductor regions (120) having the first conductivity type, a plurality of second semiconductor regions (130) having the first conductivity type, and a plurality of third semiconductor regions (140) having the second conductivity type. A sinker region (142) having the second conductivity type is disposed in a third semiconductor region and a first semiconductor region during manufacture to define the plurality of regions and tie the buried semiconductor region to the plurality of third semiconductor regions.Type: GrantFiled: June 2, 2005Date of Patent: February 20, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Vishnu K. Khemka, Amitava Bose, Ronghua Zhu
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Patent number: 7166866Abstract: A silicon semiconductor die comprises a heavily doped silicon substrate and an upper layer comprising doped silicon of a first conduction type disposed on the substrate. The upper layer comprises a well region of a second, opposite conduction type adjacent an edge termination zone that comprises a layer of a material having a higher critical electric field than silicon. Both the well region and adjacent edge termination zone are disposed at an upper surface of the upper layer, and an oxide layer overlies the upper layer and the edge termination zone. A process for forming a silicon die having improved edge termination. The process comprises forming an upper layer comprising doped silicon of a first conduction type on a heavily doped silicon substrate, and forming an edge termination zone that comprises a layer of a material having a higher critical electric field than silicon at an upper surface of the upper layer.Type: GrantFiled: July 2, 2004Date of Patent: January 23, 2007Assignee: Intersil AmericaInventors: Jun Zeng, Gary Mark Dolry, Praveen MurAleedharan
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Patent number: 7049663Abstract: An electrostatic discharge protection device with high voltage and negative voltage tolerance is provided. The electrostatic discharge protection device comprises: a first type substrate; a first type well inside the first type substrate, the first type well being floating; a second type well inside the first type substrate, the second type well separating the first type well from the first type substrate, the second type well being coupled to a first voltage line; a second type first doped region inside the first type well and coupled to a second voltage line; a second type second doped region inside the first type well and coupled to the pad; and an isolation structure between the second type first doped region and the second type second doped region.Type: GrantFiled: September 23, 2004Date of Patent: May 23, 2006Assignee: Sunplus Technology Co,Ltd.Inventor: Tai-Ho Wang
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Patent number: 7049675Abstract: A high withstand voltage semiconductor device does not show any significant fall of its withstand voltage if the impurity concentration of the RESURF layer of a low impurity concentration semiconductor region thereof varies from the optimal level and/or influenced by the fixed electric charge.Type: GrantFiled: March 9, 2004Date of Patent: May 23, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Kozo Kinoshita, Tetsuo Hatakeyama, Takashi Shinohe
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Patent number: 7042046Abstract: Disclosed is a semiconductor device facilitating a peripheral portion thereof with a breakdown voltage higher than the breakdown voltage in the drain drift layer without employing a guard ring or field plate. A preferred embodiment includes a drain drift region with a first alternating conductivity type layer formed of n drift current path regions and p partition regions arranged alternately with each other, and a breakdown withstanding region with a second alternating conductivity type layer formed of n regions and p regions arranged alternately with each other, the breakdown withstanding region providing no current path in the ON-state of the device and being depleted in the OFF-state of the device. Since depletion layers expand in both directions from multiple pn-junctions into n regions and p regions in the OFF-state of the device, the adjacent areas of p-type base regions, the outer area of the semiconductor chip and the deep area of the semiconductor chip are depleted.Type: GrantFiled: August 25, 2004Date of Patent: May 9, 2006Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Yasuhiko Onishi, Tatsuhiko Fujihira, Katsunori Ueno, Susumu Iwamoto, Takahiro Sato, Tatsuji Nagaoka
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Patent number: 7002205Abstract: Disclosed is a semiconductor device facilitating a peripheral portion thereof with a breakdown voltage higher than the breakdown voltage in the drain drift layer without employing a guard ring or field plate. A preferred embodiment includes a drain drift region with a first alternating conductivity type layer formed of n drift current path regions and p partition regions arranged alternately with each other, and a breakdown withstanding region with a second alternating conductivity type layer formed of n regions and p regions arranged alternately with each other, the breakdown withstanding region providing no current path in the ON-state of the device and being depleted in the OFF-state of the device. Since depletion layers expand in both directions from multiple pn-junctions into n regions and p regions in the OFF-state of the device, the adjacent areas of p-type base regions, the outer area of the semiconductor chip and the deep area of the semiconductor chip are depleted.Type: GrantFiled: December 12, 2003Date of Patent: February 21, 2006Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Yasuhiko Onishi, Tatsuhiko Fujihira, Katsunori Ueno, Susumu Iwamoto, Takahiro Sato, Tatsuji Nagaoka
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Patent number: 6943410Abstract: A vertical MOS semiconductor device exhibits a high breakdown voltage and low on-resistance, reduces the tradeoff relation between the on-resistance and the breakdown voltage, and realizes high speed switching. The semiconductor device has a breakdown-voltage sustaining layer, such as an n?-type drift layer, and a well region, such as a p-type well region, in the breakdown-voltage sustaining layer. The resistivity ? (?cm) of the breakdown-voltage layer is within a range expressed in terms of the breakdown voltage Vbr (V). The semiconductor device also has stripe shaped surface drain regions that extend from the well region and are surrounded by the well region. The surface area ratio between surface drain regions and the well region, which includes the source region, is from 0.01 to 0.2.Type: GrantFiled: June 12, 2002Date of Patent: September 13, 2005Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Tatsuhiko Fujihira, Takashi Kobayashi, Hitoshi Abe, Yasushi Niimura, Masanori Inoue
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Patent number: 6940138Abstract: A structure is provided which suppresses a parasitic bipolar effect without decreasing the breakdown voltage at the junctions between the excessive carrier extracting region and source/drain regions of a MOS transistor for a voltage of approximately 15 volts in a semiconductor device formed on a semiconductor layer on an insulating layer. In the MOS transistor having a source tied body structure, a semiconductor regions having a low impurity concentration is formed between a regions for extracting excessive carriers and source/drain regions. Thus, the breakdown voltage at the junctions between the extracting regions and the source/drain regions is increased and a parasitic bipolar effect is suppressed without breakdown between the extracting regions and the source/drain regions.Type: GrantFiled: December 4, 2002Date of Patent: September 6, 2005Assignee: Seiko Epson CorporationInventor: Yasushi Yamazaki
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Patent number: 6906355Abstract: A semiconductor device having guard grooves uniformly filled with a semiconductor filler is provided. The four corners of a rectangular ring-shaped guard groove meet at right angles, and outer and inner auxiliary diffusion regions both rounded are connected to the four corners. Since the guard grooves do not have to be rounded, the plane orientation of a silicon single crystal exposed inside the guard grooves can be all {100}. Therefore, epitaxial growth in the guard grooves is uniformly carried out, and the grooves are filled with guard regions without defects.Type: GrantFiled: October 3, 2003Date of Patent: June 14, 2005Assignee: Shindengen Electric Manufacturing Co., Ltd.Inventors: Toru Kurosaki, Hiroaki Shishido, Mizue Kitada, Shinji Kunori, Kosuke Ohshima
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Patent number: 6879023Abstract: The present invention is directed to a seal structure and a method for forming a seal structure for a semiconductor die. An elongate region which is electrically isolated from the remainder of the substrate, such as a well region of a conductivity type opposite that of the substrate, extends around the major portion of the periphery of the substrate. A gap is left between the two ends of the elongate region along the minor portion of the periphery of the substrate not covered by the elongate region. A conductive seal ring is formed around the periphery of the substrate at the elongate region and spans the gap between the ends of the elongate region. The substrate of the semiconductor die is only brought into electrical contact with the seal ring at the gap between the ends of the elongate region.Type: GrantFiled: August 29, 2000Date of Patent: April 12, 2005Assignee: Broadcom CorporationInventor: German Gutierrez
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Patent number: 6870201Abstract: The invention relates to a high voltage resistant edge structure in the edge region of a semiconductor component which has floating guard rings of the first conductivity type and inter-ring zones of the second conductivity type which are arranged between the floating guard rings, wherein the conductivities and/or the inter-ring zones are set such that their charge carriers are totally depleted when blocking voltage is applied. The inventive edge structure achieves a modulation of the electrical field both at the surface and in the volume of the semiconductor body. If the inventive edge structure is suitably dimensioned, the field intensity maximum can easily be situated in the depth; that is, in the region of the vertical p-n junction. Thus, a suitable edge construction which permits a “soft” leakage of the electrical field in the volume can always be provided over a wide range of concentrations of p and n doping.Type: GrantFiled: November 2, 1998Date of Patent: March 22, 2005Assignee: Infineon Technologies AGInventors: Gerald Deboy, Jenoe Tihanyi, Helmut Strack, Helmut Gassel, Jens-Peer Stengl, Hans Weber
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Patent number: 6847091Abstract: A vertical semiconductor component having a semiconductor body of a first conductivity type is described. In a surface region of the semiconductor body, at least one zone of a second conductivity type, opposite to the first conductivity type, is embedded. Regions of the second conductivity type are provided in the semiconductor body in a plane running substantially parallel to the surface of the surface region. The regions are in this case sufficiently highly doped that they cannot be depleted of charge carriers when a voltage is applied.Type: GrantFiled: January 8, 2001Date of Patent: January 25, 2005Assignee: Infineon Technologies AGInventors: Gerald Deboy, Heinz Mitlehner, Jenö Tihanyi
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Patent number: 6828645Abstract: A semiconductor device comprising: a semiconductor substrate, a dielectric film formed on the semiconductor substrate, a first electrode and a second electrode separated from each other on the dielectric film; a spiral thin film layer having both ends connected to the first electrode and the second electrode, respectively, the spiral thin film layer surrounding the first electrode, the thin film layer being formed on the dielectric layer, and a plurality of p-n diodes formed in series in the spiral thin film layer along a longitudinal direction of the spiral thin film layer.Type: GrantFiled: June 12, 2003Date of Patent: December 7, 2004Assignee: Fuji Electric Co., Ltd.Inventors: Shinichi Jimbo, Jun Saito, Tomoyuki Yamazaki