In Array Patents (Class 257/5)
  • Patent number: 10180820
    Abstract: In some examples, a method may be performed by a multiply-accumulate circuit. As part of the method a row driver of the multiply-accumulate circuit may drive a row value line based on an input vector bit of an input vector received by the row driver. The row driver may also drive a row line that controls a corresponding memristor according to the input vector bit. The corresponding memristor may store a weight value bit of a weight value to apply to the input vector for a multiply-accumulate operation. The method may further include a sense amplifier generating an output voltage based on a current output from the corresponding memristor and counter circuitry adjusting a counter value that represents a running total of the multiply-accumulate operation based on the row value line, the output voltage generated by the sense amplifier, or a combination of both.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: January 15, 2019
    Assignee: HEWLETT PACKARD ENTERPRlSE DEVELOPMENT LP
    Inventors: Brent Buchanan, Le Zheng, John Paul Strachan
  • Patent number: 10176869
    Abstract: A method is provided for operating a memory device that includes an array of memory cells coupled to a plurality of bitlines. A memory cell is selected from among the array of memory cells. The selected memory cell is coupled to a selected bitline. During a program operation, a program current pulse is injected into the selected memory cell via a first switch coupled to the bitline. At an end of the program current pulse, the selected bitline is discharged via a second switch coupled to the bitline.
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: January 8, 2019
    Assignees: STMicroelectronics International N.V., STMicroelectronics S.r.l.
    Inventors: Marco Pasotti, Marcella Carissimi, Vikas Rana
  • Patent number: 10153433
    Abstract: Some embodiments include methods of forming memory cells. Heater structures are formed over an array of electrical nodes, and phase change material is formed across the heater structures. The phase change material is patterned into a plurality of confined structures, with the confined structures being in one-to-one correspondence with the heater structures and being spaced from one another by one or more insulative materials that entirely laterally surround each of the confined structures. Some embodiments include memory arrays having heater structures over an array of electrical nodes. Confined phase change material structures are over the heater structures and in one-to-one correspondence with the heater structures. The confined phase change material structures are spaced from one another by one or more insulative materials that entirely laterally surround each of the confined phase change material structures.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: December 11, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Andrea Redaelli, Giorgio Servalli, Carmela Cupeta, Fabio Pellizzer
  • Patent number: 10147764
    Abstract: Some embodiments include a construction having a first memory array deck and a second memory array deck over the first memory array deck. The second memory array deck differs from the first memory array deck in one or more operating characteristics, in pitch, and/or in one or more structural parameters; with the structural parameters including different materials and/or different thicknesses of materials. Some embodiments include a construction having a first series and a third series of access/sense lines extending along a first direction, and a second series of access/sense lines between the first and third series and extending along a second direction which crosses the first direction. First memory cells are between the first and second series of access/sense lines and arranged in a first memory array deck. Second memory cells are between the second and third series of access/sense lines and arranged in a second memory array deck.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: December 4, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Andrea Redaelli
  • Patent number: 10128313
    Abstract: In the present disclosure, a non-volatile memory cell comprises a data storage unit, a selection unit and a switching unit. The data storage unit is configured to store an information bit and has a first end and a second end. The first end is coupled to a bit line. The selection unit is configured to access the data storage unit, and the selection unit has a first end coupled to a select line, a second end coupled to the second end of the data storage unit, and a third end coupled to a source line. The switching unit is configured to perform a formation operation and has a first end coupled to a forming line and a second end coupled to the second end of the data storage unit.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: November 13, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chi-Tsai Chen, Wenhsien Kuo, Meng-Chun Shih, Ching-Huang Wang, Chia-Fu Lee, Yu-Der Chih
  • Patent number: 10115897
    Abstract: A resistive memory device includes an alternating stack of insulating layers and electrically conductive layers. Sidewalls of the electrically conductive layers are laterally recessed relative to sidewalls of the insulating layers to define laterally recessed regions. Discrete clam-shaped barrier material portions are located within the laterally recessed regions. Middle electrodes include a protrusion portion embedded within a respective one of the discrete clam shaped barrier material portions and a vertically-extending portion located outside the laterally recessed regions and having a greater vertical extent than the embedded portion. A resistive memory material layer contacts the vertically-extending portion of each of the middle electrodes. A vertical conductive line contacts the resistive memory material layer.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: October 30, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventor: Yoshihiro Sato
  • Patent number: 10109681
    Abstract: Disclosed herein is a method and apparatus for fabricating a memory device. The memory device has a vertical stack of alternating layers of conductive and insulating layers wherein a top layer and a bottom layer are insulating layers. A plurality of vias is formed through the vertical stack from the top layer to the bottom layer. A memory layer disposed adjacent the conductive layers in the vias. A selector device disposed adjacent the memory layer wherein the selector device comprises multiple layers of dissimilar metal oxides. A lateral electrical contact to the memory layer through the conductive layer. And a top contact electrically connected to the conductive layer through a portion of the memory layer and the portion of the memory layer wherein the portion of the memory layer is configured to store data therein.
    Type: Grant
    Filed: August 3, 2017
    Date of Patent: October 23, 2018
    Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
    Inventors: Luiz M. Franca-Neto, Jeffrey Lille
  • Patent number: 10103324
    Abstract: A memory device includes a plurality of bit lines, including first and second bit lines, extending in a first direction away from a substrate, a plurality of word lines, including first and second word lines, extending in a second direction crossing the first direction and substantially parallel to a surface of the substrate, a first variable resistance film between the first word line and the first bit line and a second variable resistance film between the second word line and the second bit line, an insulating material electrically isolating the first and second word lines and the first and second bit lines, and a plurality of air gaps between the first and second bit lines.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: October 16, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Kunifumi Suzuki, Kazuhiko Yamamoto
  • Patent number: 10096655
    Abstract: The present disclosure includes three dimensional memory arrays, and methods of processing the same. A number of embodiments include a plurality of conductive lines separated from one other by an insulation material, a plurality of conductive extensions arranged to extend substantially perpendicular to the plurality of conductive lines, and a storage element material formed around each respective one of the plurality of conductive extensions and having two different contacts with each respective one of the plurality of conductive lines, wherein the two different contacts with each respective one of the plurality of conductive lines are at two different ends of that respective conductive line.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: October 9, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Fabio Pellizzer, Innocenzo Tortorelli, Agostino Pirovano, Andrea Redaelli
  • Patent number: 10074694
    Abstract: According to one embodiment, a memory device includes a first wiring extending in a first direction, a second wiring extending in a second direction crossing the first direction and a resistance change film provided between the first wiring and the second wiring. The second wiring includes a first conductive layer and a first intermediate layer including a first region provided between the first conductive layer and the resistance change film. The first intermediate layer includes a material having nonlinear resistance characteristics.
    Type: Grant
    Filed: February 8, 2016
    Date of Patent: September 11, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Takeshi Takagi, Takeshi Yamaguchi, Masaki Yamato, Hiroyuki Ode, Toshiharu Tanaka
  • Patent number: 10056546
    Abstract: Non-volatile memory cell having small programming power and a reduced resistance drift are provided. In one embodiment of the present application, a non-volatile memory cell is provided that includes a layer of dielectric material that has a via opening that exposes a surface of a bottom electrode. A metal nitride spacer is located along a bottom portion of each sidewall surface of the layer of dielectric material and in the via opening. A phase change material structure is present in the via opening and contacting a top portion of each sidewall surface of the layer of dielectric material and a topmost surface of each metal nitride spacer. A top electrode is located on a topmost surface of the phase change material structure.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: August 21, 2018
    Assignee: International Business Machines Corporation
    Inventors: Matthew Joseph BrightSky, SangBum Kim, Chung Hon Lam, Norma Edith Sosa
  • Patent number: 10049736
    Abstract: An integrated circuit includes an array of phase-change memory (PCM) cells, and bitlines coupled to the array of PCM cells. The integrated circuit also includes a first decoder circuit having a respective plurality of transistors having a first conductivity type being coupled together and to a given bitline from among the plurality thereof and configured to inject a program current pulse into a selected PCM cell. In addition, the integrated circuit includes a second decoder circuit having a plurality of transistors having a second conductivity type being coupled together and to the given bitline and configured to discharge the given bitline at an end of the program current pulse.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: August 14, 2018
    Assignees: STMicroelectronics International N.V., STMicroelectronics S.r.l.
    Inventors: Marco Pasotti, Marcella Carissimi, Vikas Rana
  • Patent number: 10038032
    Abstract: According to one embodiment, a semiconductor memory device includes a plurality of first wirings, second wirings, a plurality of memory cells, selection gate transistors, and a third wiring. The first wirings are disposed in a first direction along a surface of a substrate and in a second direction intersecting with the surface of the substrate. The selection gate transistors are connected to respective one ends of the second wirings. The third wiring is connected in common to one end of the selection gate transistors. The selection gate transistor includes first to third semiconductor layers laminated on the third wiring and a gate electrode. The gate electrode is opposed to the second semiconductor layer in the first direction. The second semiconductor layer has a length in the first direction smaller than lengths of the first semiconductor layer and the third semiconductor layer in the first direction.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: July 31, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Kiwamu Sakuma, Shosuke Fujii, Masumi Saitoh, Toshiyuki Sasaki
  • Patent number: 10032789
    Abstract: Provided is a three-dimensional semiconductor memory device including a peripheral logic structure on a semiconductor substrate to include peripheral logic circuits and a lower insulating gapfill layer, a horizontal semiconductor layer on the peripheral logic structure, stacks on the horizontal semiconductor layer, each of the stacks including a plurality of electrodes vertically stacked on the horizontal semiconductor layer, and a plurality of vertical structures passing through the stacks and connected to the horizontal semiconductor layer. The horizontal semiconductor layer may include a first semiconductor layer disposed on the lower insulating gapfill layer and co-doped with an anti-diffusion material and first conductivity type impurities of a first impurity concentration, and a second semiconductor layer disposed on the first semiconductor layer and doped with first conductivity type impurities of a second impurity concentration lower than the first impurity concentration or undoped.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: July 24, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dohyun Lee, Younghwan Son, Minyeong Song, Youngwoo Park, Jaeduk Lee
  • Patent number: 10002806
    Abstract: The subject application relates to metrology targets with filling elements that reduce inaccuracies and maintain contrast. The present invention provides a metrology target and a method to design the metrology target. The metrology target comprises specified filling elements introduced into identified continuous regions in a given target design, wherein parameters of the introduced filling elements are determined by a trade-off between a contrast requirement and an inaccuracy requirement which is associated via production with the identified continuous regions. The method includes the steps of identifying continuous regions in a target design, and introducing specified filling elements into the identified continuous regions, wherein parameters of the introduced filling elements are determined by a trade-off between a contrast requirement and an inaccuracy requirement which is associated via production with the identifying continuous regions.
    Type: Grant
    Filed: January 26, 2015
    Date of Patent: June 19, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Nuriel Amir, Raviv Yohanan
  • Patent number: 9997475
    Abstract: A method for making a photovoltaic device is provided that includes the steps of providing a silicon substrate having a complementary metal-oxide semiconductor (“CMOS”); bonding a first layer of silicon oxide to a second layer of silicon oxide wherein the bonded layers are deposited on the silicon substrate; and forming a III-V photovoltaic cell on a side of the bonded silicon oxide layers opposite the silicon substrate, wherein when the III-V photovoltaic cell is exposed to radiation, the III-V photovoltaic cell generates a current that powers a memory erasure device to cause an alteration of a memory state of a memory cell in an integrated circuit.
    Type: Grant
    Filed: January 13, 2016
    Date of Patent: June 12, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kenneth Rodbell, Davood Shahrjerdi
  • Patent number: 9941006
    Abstract: A memory device includes a first interconnect extending in a first direction, a second interconnect extending in a second direction crossing the first direction, a third interconnect extending in a third direction crossing a plane including the first direction and the second direction, a fourth interconnect extending in the third direction, a semiconductor member, a first resistance change film, and a second resistance change film. The semiconductor member is connected between a first end of the second interconnect and the first interconnect. The first resistance change film is connected between a side surface of the second interconnect and the third interconnect. The second resistance change film is connected between a second end of the second interconnect and the fourth interconnect.
    Type: Grant
    Filed: March 16, 2017
    Date of Patent: April 10, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Yusuke Arayashiki
  • Patent number: 9941471
    Abstract: A method for manufacturing a PCRAM memory includes forming in a first dielectric layer arranged on a substrate, which includes bottom electrodes, a first rectilinear trench opening onto the set of electrodes; depositing a first active layer in the first trench, such that the first active layer is in electrical contact with the electrodes; covering the first active layer with a second dielectric layer; etching, in the second and second dielectric layers and the first active layer, additional rectilinear trenches oriented perpendicularly to the first trench, to obtain a group of memory devices each including a portion of the first active layer in electrical contact with one of the electrodes; filling the additional trenches with a sacrificial dielectric material; performing an anisotropic etching of the sacrificial material to expose a side surface of each portion of the first active layer; and covering the side surface with a second active layer.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: April 10, 2018
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Gabriele Navarro
  • Patent number: 9934850
    Abstract: Methods and structures for accessing memory cells in parallel in a cross-point array include accessing in parallel a first memory cell disposed between a first selected column and a first selected row and a second memory cell disposed between a second selected column different from the first selected column and a second selected row different from the first selected row. Accessing in parallel includes simultaneously applying access biases between the first selected column and the first selected row and between the second selected column and the second selected row. The accessing in parallel is conducted while the cells are in a thresholded condition or while the cells are in a post-threshold recovery period.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: April 3, 2018
    Assignee: MICRON TECHNOLOGY, INC.
    Inventor: Hernan A. Castro
  • Patent number: 9893277
    Abstract: Some embodiments include methods of forming memory cells. A series of rails is formed to include bottom electrode contact material. Sacrificial material is patterned into a series of lines that cross the series of rails. A pattern of the series of lines is transferred into the bottom electrode contact material. At least a portion of the sacrificial material is subsequently replaced with top electrode material. Some embodiments include memory arrays that contain a second series of electrically conductive lines crossing a first series of electrically conductive lines. Memory cells are at locations where the electrically conductive lines of the second series overlap the electrically conductive lines of the first series. First and second memory cell materials are within the memory cell locations. The first memory cell material is configured as planar sheets and the second memory cell material is configured as upwardly-opening containers.
    Type: Grant
    Filed: January 21, 2016
    Date of Patent: February 13, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Scott E. Sills, John K. Zahurak
  • Patent number: 9871076
    Abstract: Devices and methods of forming a device are disclosed. The method includes providing a substrate with a cell region. Selector units and storage units are formed within the substrate. The selector unit includes first and second bipolar junction transistors (BJTs). The selector unit includes first and second bipolar junction transistors (BJTs). A BJT includes first, second and third BJT terminals. The second BJT terminals of the first and second BJTs are coupled to or serve as a common wordline terminal. The third BJT terminal of the first BJT serves as a first bitline terminal, and the third BJT terminal of the second BJT serves as a second bitline terminal. A storage unit is disposed over the selector unit.
    Type: Grant
    Filed: April 5, 2016
    Date of Patent: January 16, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Xuan Anh Tran, Kiok Boone Elgin Quek
  • Patent number: 9812376
    Abstract: An electrically conductive element includes an electrically conductive material and a plurality of inclusions of a phase change material. The phase change material has a phase transition temperature Tc between 150° C. and 400° C. The inclusions are separated from each other and are embedded in the electrically conductive material.
    Type: Grant
    Filed: June 29, 2015
    Date of Patent: November 7, 2017
    Assignee: Infineon Technologies AG
    Inventors: Stefan Woehlert, Michael Nelhiebel, Siegfried Roehl
  • Patent number: 9786512
    Abstract: Provided is an etching method for simultaneously etching first and second regions of a workpiece. The first region has a multilayered film configured by alternately laminating a silicon oxide film and a silicon nitride film and a second region has a silicon oxide film having a film thickness that is larger than that of the silicon oxide film in the first region. A mask is provided on the workpiece to at least partially expose each of the first and second regions. In the etching method, plasma of a first processing gas containing fluorocarbon gas, hydrofluorocarbon gas, and oxygen gas is generated within a processing container of a plasma processing apparatus. Subsequently, plasma of a second processing gas containing fluorocarbon gas, hydrofluorocarbon gas, oxygen gas, and a halogen-containing gas is generated within the processing container. Subsequently, plasma of a third processing gas containing oxygen gas is generated within the processing container.
    Type: Grant
    Filed: April 5, 2016
    Date of Patent: October 10, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yu Nagatomo, Ryuuu Ishita, Daisuke Tamura, Kousuke Koiwa
  • Patent number: 9779961
    Abstract: Disclosed is a method for etching a first region including a multi-layer film formed by providing silicon oxide films and silicon nitride films alternately, and a second region having a single silicon oxide film. The etching method includes: providing a processing target object including a mask provided on the first region and the second region within a processing container of a plasma processing apparatus; generating plasma of a first processing gas including a hydrofluorocarbon gas within the processing container that accommodates the processing target object; and generating plasma of a second processing gas including a fluorocarbon gas within the processing container that accommodates the processing target object. The step of generating the plasma of the first processing gas and the step of generating the plasma of the second processing gas are alternately repeated.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: October 3, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusuke Saitoh, Yu Nagatomo, Hayato Hishinuma, Wataru Takayama, Sho Tominaga, Yuki Kaneko
  • Patent number: 9773841
    Abstract: Various embodiments comprise apparatuses and methods, such as a memory stack having a continuous cell pillar. In various embodiments, the apparatus includes a source material, a buffer material, a select gate drain (SGD), and a memory stack arranged between the source material and the SGD. The memory stack comprises alternating levels of conductor materials and dielectric materials. A continuous channel-fill material forms a cell pillar that is continuous from the source material to at least a level corresponding to the SGD.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: September 26, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Patent number: 9767899
    Abstract: A memory is described having an array including two-terminal resistive memory elements (MEs) to retain stored data in an absence of electrical power and a disturb isolator circuit operatively coupled to the MEs to compensate for disturbances of a magnitude of a signal associated with a selected two-terminal resistive memory element in the array.
    Type: Grant
    Filed: December 1, 2016
    Date of Patent: September 19, 2017
    Assignee: Unity Semiconductor Corporation
    Inventors: Christophe Chevallier, Chang Hua Siau
  • Patent number: 9741768
    Abstract: A method is provided that includes forming a vertical bit line disposed in a first direction above a substrate, forming a multi-layer word line disposed in a second direction above the substrate, the second direction perpendicular to the first direction, and forming a memory cell including a nonvolatile memory material at an intersection of the vertical bit line and the multi-layer word line. The multi-layer word line includes a first conductive material layer and a second conductive material layer disposed above the first conductive material layer. The memory cell includes a working cell area encompassed by an intersection of the first conductive material layer and the nonvolatile memory material.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: August 22, 2017
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Ashot Melik-Martirosian, Juan Saenz
  • Patent number: 9735021
    Abstract: An etching method of etching a first region including a multilayered film, in which silicon oxide films and silicon nitride films are alternately stacked, and a second region including a single-layered silicon oxide film is provided. The etching method includes a first plasma process of generating plasma of a first processing gas containing a fluorocarbon gas and an oxygen gas within a processing vessel of a plasma processing apparatus; and a second plasma process of generating plasma of a second processing gas containing a hydrogen gas, nitrogen trifluoride gas, a hydrogen bromide gas and a carbon-containing gas within the processing vessel. A temperature of an electrostatic chuck is set to a first temperature in the first plasma process, and the temperature of the electrostatic chuck is set to a second temperature lower than the first temperature in the second plasma process.
    Type: Grant
    Filed: May 27, 2016
    Date of Patent: August 15, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Masayuki Sawataishi, Tomonori Miwa
  • Patent number: 9721961
    Abstract: In this semiconductor memory device, the first conducting layers are arrayed laminated in a first direction, and extend in a second direction intersecting with the first direction. The first conducting layers are arrayed in a third direction via interlayer insulating films. The third direction intersects with the first direction and the second direction. The interlayer insulating film is disposed between the first conducting layers arrayed in the third direction, and extends in the first direction. The second conducting layer is disposed between the first conducting layers arrayed in the third direction, and extends in the first direction. The second conducting layer has an approximately circular cross-sectional shape intersecting with the first direction. The variable resistance layer surrounds a peripheral area of the second conducting layer, and is disposed at a position between the second conducting layer and the first conducting layer.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: August 1, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Mutsumi Okajima, Atsushi Oga, Takeshi Yamaguchi, Hiroyuki Ode, Toshiharu Tanaka, Natsuki Fukuda
  • Patent number: 9704923
    Abstract: Embodiments of the present disclosure describe techniques and configurations for a memory device comprising a memory array having a plurality of wordlines disposed in a memory region of a die. Fill regions may be disposed between respective pairs of adjacent wordlines of the plurality of wordlines. The fill regions may include a first dielectric layer and a second dielectric layer disposed on the first dielectric layer. The first dielectric layer may comprise organic (e.g., carbon-based) spin-on dielectric material (CSOD). The second dielectric layer may comprise a different dielectric material than the first dielectric layer, such as, for example, inorganic dielectric material. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: December 23, 2015
    Date of Patent: July 11, 2017
    Assignee: Intel Corporation
    Inventors: Michael J. Bernhardt, Yudong Kim, Denzil S. Frost, Tuman Earl Allen, III, Kevin Lee Baker, Kolya Yastrebenetsky, Ronald Allen Weimer
  • Patent number: 9698049
    Abstract: A nonvolatile memory device may include a stair-shaped structure including a first interlayer dielectric layer and a memory cell repeatedly stacked. The nonvolatile memory device may include an etch stop layer and a second interlayer dielectric layer formed over the stair-shaped structure. The nonvolatile memory device may include an isolation layer passing through the stair-shaped structure, the etch stop layer, and the second interlayer dielectric layer. The nonvolatile memory device may include protective layer interposed between the isolation layer and the etch stop layer, and the protective layer interposed between the isolation layer and the second interlayer dielectric layer. The nonvolatile memory device may include contact plugs coupled to each memory cell, respectively, by passing through the second interlayer dielectric layer and the etch stop layer.
    Type: Grant
    Filed: December 27, 2016
    Date of Patent: July 4, 2017
    Assignee: SK hynix Inc.
    Inventor: Kwang-Seok Oh
  • Patent number: 9659999
    Abstract: A 3-dimensional stack memory device includes a semiconductor substrate, a stacked active pattern configured so that a plurality of stripe shape active regions and insulation layers are stacked alternatively over the semiconductor substrate, a gate electrode formed in the stacked active pattern, a source and drain formed at both sides of the gate electrode in each of the plurality of active regions, a bit line formed on one side of the drain to be connected to the drain, a resistive device layer formed on one side of the source to be connected to the source, and a source line connected to the resistive device layer. The source is configured of an impurity region having a first conductivity type, and the drain is configured of an impurity region having a second conductivity type different from the first conductivity type.
    Type: Grant
    Filed: December 4, 2015
    Date of Patent: May 23, 2017
    Assignee: SK Hynix Inc.
    Inventor: Nam Kyun Park
  • Patent number: 9620564
    Abstract: A semiconductor device includes four or more first memory cells arranged on a row, the first memory cells each including a first pillar-shaped semiconductor layer, a first gate insulating film formed around the first pillar-shaped semiconductor layer, a first gate line formed around the first gate insulating film, and a first magnetic tunnel junction storage element formed on the first pillar-shaped semiconductor layer. The semiconductor device further includes a first source line that connects lower portions of the first pillar-shaped semiconductor layers to each other, a first bit line that extends in a direction perpendicular to a direction in which the first gate line extends and that is connected to an upper portion of the first magnetic tunnel junction storage element, and a second source line that extends in a direction perpendicular to a direction in which the first source line extends.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: April 11, 2017
    Assignee: Unisantis Electronics Singapore Pte. Ltd.
    Inventors: Fujio Masuoka, Hiroki Nakamura
  • Patent number: 9614008
    Abstract: An electronic device includes a semiconductor memory that includes: an inter-layer dielectric layer which is formed over a substrate; a contact plug which is coupled with the substrate by passing through the inter-layer dielectric layer and has a protruding portion over the inter-layer dielectric layer; a first variable resistance pattern which is formed over the contact plug; and a protective layer which covers the first variable resistance pattern and a portion of sidewalls of the contact plug in such a manner that the sidewalls of the contact plug are exposed.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: April 4, 2017
    Assignee: SK hynix Inc.
    Inventors: Kwan-Woo Do, Ki-Seon Park
  • Patent number: 9613696
    Abstract: An integrated circuit includes an array of phase-change memory (PCM) cells, and bitlines coupled to the array of PCM cells. The integrated circuit also includes a first decoder circuit having a respective plurality of transistors having a first conductivity type being coupled together and to a given bitline from among the plurality thereof and configured to inject a program current pulse into a selected PCM cell. In addition, the integrated circuit includes a second decoder circuit having a plurality of transistors having a second conductivity type being coupled together and to the given bitline and configured to discharge the given bitline at an end of the program current pulse.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: April 4, 2017
    Assignees: STMICROELECTRONICS INTERNATIONAL N.V., STMICROELECTRONICS S.R.L.
    Inventors: Marco Pasotti, Marcella Carissimi, Vikas Rana
  • Patent number: 9608001
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate; a first stacked body provided on the substrate, the first stacked body including a plurality of electrode layers and a plurality of insulating layers, each of the plurality of insulating layers being provided between the plurality of electrode layers; a semiconductor film provided in the first stacked body and extending in a stacking direction of the first stacked body; and a second stacked body provided on the substrate and separately from the first stacked body, the second stacked body including a same layer structure as the first stacked body. The second stacked body includes a first contact portion electrically connected to an external portion; and a second contact portion electrically connected to an external portion different from the first contact portion.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: March 28, 2017
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yoshiaki Fukuzumi
  • Patent number: 9595567
    Abstract: According to one embodiment, a semiconductor memory device includes a semiconductor substrate, a plurality of insulating layers, a plurality of first interconnection layers, a plurality of second interconnection layers, a plurality of memory cells, and a resistance change film. The insulating layers and first interconnection layers are arranged in parallel with the semiconductor substrate. The second interconnection layers are arranged so as to intersect the first interconnection layers. The second interconnection layers are arranged perpendicular to the semiconductor substrate. The memory cells are arranged at intersections of the first and second interconnection layers. Each of the memory cells includes the resistance change film arranged between the first and second interconnection layers. The side of the first interconnection layer in contact with the resistance change film is retreated more in a direction to separate from the second interconnection layer than the side of the insulating layer.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: March 14, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Kazuhiko Yamamoto
  • Patent number: 9569358
    Abstract: An electronic device including a semiconductor memory that includes: a selection element; a first plug and a second plug that are coupled with two different sides of the selection element, respectively; a variable resistance element formed over the first plug and configured to store data; and a dummy variable resistance element formed over the second plug and configured to include a conductive path coupled with the second plug.
    Type: Grant
    Filed: January 2, 2015
    Date of Patent: February 14, 2017
    Assignee: SK hynix Inc.
    Inventor: Gil-Jae Park
  • Patent number: 9570516
    Abstract: A method for fabricating 3-D cross-point memory arrays, and more particularly to fabricating phase change memory (PCM) and resistive RAM (ReRAM or RRAM) 3-D memory arrays having a cell size footprint of 4F2. The method for forming a plurality of layers of memory cells using a limited number of photolithographic patterning steps is applicable to memory devices having single or multiple storage bits per cell, such as cells having anywhere from one to eight bits per cell or more. These bits are stacked three dimensionally and include memory cells based on phase change material, on resistive change material, on magnetic field alignment, on mechanical switching, and on other memory cells based on other information storage technologies.
    Type: Grant
    Filed: December 11, 2015
    Date of Patent: February 14, 2017
    Assignee: HGST, Inc.
    Inventor: Daniel Robert Shepard
  • Patent number: 9559049
    Abstract: Provided is a memory device including a plurality of first conductive line layers, a plurality of support structures, and a charge storage layer. Each of the first conductive line layers extends along a plane defined by a first direction and a second direction. Each of the first conductive line layers includes a plurality of first conductive lines extending along the first direction. The support structures are located between the adjacent first conductive line layers. The charge storage layer covers upper surfaces, lower surfaces, and two side surfaces of the first conductive lines and surfaces of the support structures.
    Type: Grant
    Filed: August 17, 2015
    Date of Patent: January 31, 2017
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yuan-Chieh Chiu, Shih-Ping Hong, Yao-An Chung
  • Patent number: 9553130
    Abstract: A semiconductor device includes four or more memory cells arranged on a row, the memory cells each including a first pillar-shaped semiconductor layer, a first gate insulating film around the semiconductor layer, a first gate line around the first gate insulating film, a third gate insulating film around an upper portion of the semiconductor layer, a first contact electrode around the third gate insulating film, a second contact electrode connecting upper portions of the semiconductor layer and the first contact electrode, and a magnetic tunnel junction storage element on the second contact electrode, a first source line connecting lower portions of the semiconductor layers to each other, a first bit line extending in a direction perpendicular to a direction of the first gate line and connected to an upper portion of the storage element, and a second source line extending in a direction perpendicular to the first source line.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: January 24, 2017
    Assignee: Unisantis Electronics Singapore Pte. Ltd.
    Inventors: Fujio Masuoka, Hiroki Nakamura
  • Patent number: 9543507
    Abstract: Techniques, materials, and circuitry are disclosed which enable low-voltage, embedded memory applications. In one example embodiment, an embedded memory is configured with a bitcell having a memory element and a selector element serially connected between an intersection of a wordline and bitline. The selector element can be implemented, for instance, with any number of crystalline materials that exhibit an S-shaped current-voltage (IV) curve, or that otherwise enables a snapback in the selector voltage after the threshold criteria is exceeded. The snapback of the selector is effectively exploited to accommodate the ON-state voltage of the selector under a given maximum supply voltage, wherein without the snapback, the ON-state voltage would exceed that maximum supply voltage. In some example embodiments, the maximum supply voltage is less than 1 volt (e.g., 0.9 volts or less).
    Type: Grant
    Filed: April 12, 2012
    Date of Patent: January 10, 2017
    Assignee: INTEL CORPORATION
    Inventors: Charles Kuo, Elijah V. Karpov, Brian S. Doyle, David L. Kencke, Robert S. Chau
  • Patent number: 9536611
    Abstract: A semiconductor device includes a plurality of active strips, where active strips in the plurality are coupled together at one end by a pad and terminated at another end by a conductive line. The device includes memory cells at cross-points between the plurality of active strips and a plurality of word lines. The device includes string select structures arranged in an interlaced configuration as side gates for active strips. The device includes control circuitry, configured to turn on a particular active strip by applying a turn-on voltage to two string select structures arranged as side gates for the particular active strip, and to turn off a second particular active strip by applying a turn-off bias to at least one string select structure arranged as a side gate for the second particular active strip. The turn-off bias includes one of a ground voltage, a non-negative voltage, and a floating condition.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: January 3, 2017
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Yi-Hsuan Hsiao
  • Patent number: 9508926
    Abstract: A magnetoresistive effect element includes a recording layer having magnetic anisotropy and a variable magnetization direction, a reference layer having magnetic anisotropy and an invariable magnetization direction, an intermediate layer between the recording layer and the reference layer, an underlayer containing scandium (Sc) and disposed on a surface side of the recording layer opposite to a surface side on which the recording layer is disposed, and a side wall layer containing an oxide of Sc and disposed on side surfaces of the recording layer and the intermediate layer.
    Type: Grant
    Filed: March 3, 2015
    Date of Patent: November 29, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Eiji Kitagawa, Minoru Amano, Megumi Yakabe, Hiroaki Maekawa
  • Patent number: 9484093
    Abstract: Methods for reducing leakage currents through unselected memory cells of a memory array during a memory operation are described. In some cases, the leakage currents through the unselected memory cells of the memory array may be reduced by setting an adjustable resistance bit line structure connected to the unselected memory cells into a non-conducting state. The adjustable resistance bit line structure may comprise a bit line structure in which the resistance of an intrinsic (or near intrinsic) polysilicon portion of the bit line structure may be adjusted via an application of a voltage to a select gate portion of the bit line structure that is not directly connected to the intrinsic polysilicon portion. The intrinsic polysilicon portion may be set into a conducting state or a non-conducting state based on the voltage applied to the select gate portion.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: November 1, 2016
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Perumal Ratnam, Christopher Petti, Tianhong Yan
  • Patent number: 9484087
    Abstract: In one embodiment, the memory element may include a first electrode, a second electrode spaced apart from the first electrode, a memory layer between the first electrode and the second electrode, and an auxiliary layer between the memory layer and the second electrode. The auxiliary layer provides a multi-bit memory characteristic to the memory layer.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: November 1, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-bum Lee, Chang-jung Kim, Young-bae Kim, Myoung-jae Lee, Dong-soo Lee, Man Chang, Seung-ryul Lee, Kyung-min Kim
  • Patent number: 9466644
    Abstract: A reversible resistance-switching memory cell has multiple narrow, spaced apart bottom electrode structures. The raised structures can be formed by coating a bottom electrode layer with nano-particles and etching the bottom electrode layer. The raised structures can be independent or joined to one another at a bottom of the bottom electrode layer. A resistance-switching material is provided between and above the bottom electrode structure, followed by a top electrode layer. Or, insulation is provided between and above the bottom electrode structures, and the resistance-switching material and top electrode layer are above the insulation. Less than one-third of a cross-sectional area of each resistance-switching memory cell is consumed by the one or more raised structures. When the resistance state of the memory cell is switched, there is a smaller area in the bottom electrode for a current path, so the switching resistance is higher and the switching current is lower.
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: October 11, 2016
    Assignee: SanDisk Technologies LLC
    Inventors: George Matamis, James K Kai, Vinod R Purayath, Yuan Zhang, Henry Chien
  • Patent number: 9443910
    Abstract: A three-dimensional (3D) non-volatile memory array having a silicide bit line and method of fabricating is disclosed. The fabrication technique may comprise forming a metal silicide for at least a portion of the bit line. The device has reversible resistivity material between the word lines and the bit lines. The reversible resistivity material may be a metal oxide. The metal that is used to form the silicide may serve as an oxygen scavenger to draw oxygen away from the silicon, thus preventing formation of silicon oxide between the reversible resistivity material and the bit line. The metal silicide may also help prevent formation of a depletion layer in silicon in the bit line.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: September 13, 2016
    Assignee: SanDisk Technologies LLC
    Inventors: Kan Fujiwara, Takuya Futase, Toshihiro Iizuka, Shin Kikuchi, Yoichiro Tanaka, Akio Nishida, Christopher J Petti
  • Patent number: 9418733
    Abstract: A joint short-time and long-time storage device, including a first electrode layer, a functional material layer connected to the first electrode layer, and a second electrode layer connected to the functional material layer. The first electrode layer is made of inert conductive metal, the second electrode layer is made of active conductive metal, and the functional material layer is made of chalcogenide.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: August 16, 2016
    Assignee: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventors: Xiangshui Miao, Yi Li, Yingpeng Zhong, Lei Xu, Huajun Sun, Xiaohua Xu
  • Patent number: 9412752
    Abstract: A 3D NAND flash memory includes even and odd stacks of conductive strips. Some of the conductive strips in the stacks are configured as word lines. Data storage structures are disposed on the sidewalls of the even and odd stacks. Active pillars include even and odd semiconductor films on the data storage structures connected at the bottom ends so that the semiconductor films can be thin films having a U-shaped current path. An even pad connected to the even semiconductor film and an odd pad connected to the odd semiconductor film are disposed over the even and odd stacks respectively. A segment of a reference line is connected to the even pad, and an inter-level connector is connected to the odd pad. A segment of a bit line comprises an extension contacting the inter-level connector.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: August 9, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Teng-Hao Yeh, Chih-Wei Hu, Yu-Wei Jiang