With Peripheral Feature Due To Separation Of Smaller Semiconductor Chip From Larger Wafer (e.g., Scribe Region, Or Means To Prevent Edge Effects Such As Leakage Current At Peripheral Chip Separation Area) Patents (Class 257/620)
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Patent number: 11854956Abstract: A semiconductor die package is provided. The semiconductor die package includes a semiconductor die and a package substrate disposed below the semiconductor die. The semiconductor die has a corner. The package substrate includes several conductive lines, and one of the conductive lines under the corner of the semiconductor die includes a first line segment and a second line segment. The first and second line segments are connected together, and the second line segment has a smaller line width than the first line segment. The first line segment is linear and extends in a first direction. The second line segment is non-linear and has a varying extension direction.Type: GrantFiled: July 16, 2021Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ya-Huei Lee, Shu-Shen Yeh, Kuo-Ching Hsu, Shyue-Ter Leu, Po-Yao Lin, Shin-Puu Jeng
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Patent number: 11854927Abstract: A package and a method forming the same are provided. The package includes an integrated circuit die. A sidewall of the integrated circuit die has a first facet and a second facet. The first facet and the second facet have different slopes. The package includes an encapsulant surrounding the integrated circuit die and in physical contact with the first facet and the second facet and an insulating layer over the integrated circuit die and the encapsulant. An upper surface of the integrated circuit die is lower than an upper surface of the encapsulant. A sidewall of the insulating layer is substantially coplanar with the first facet.Type: GrantFiled: May 28, 2021Date of Patent: December 26, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ting-Chen Tseng, Sih-Hao Liao, Yu-Hsiang Hu, Hung-Jui Kuo
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Patent number: 11810808Abstract: An apparatus and method for facilitating the removal of layers from a die for an integrated circuit while maintaining the planarity of the surface of the die by avoiding rounding the corners and other edges of the die. A pocket is created in a sacrificial material, such that when the die is inserted into the pocket the edges of the die are contiguous with the walls of the pocket and a top surface of the die is coplanar with a top surface of the pocket. The sacrificial material may be the same material as the die. An adhesive substance is placed in the pocket, and the die is inserted into the pocket and against the adhesive substance which aids in retaining the die in the pocket. The layers may then be removed from the die and the sacrificial material around the die without rounding the edges of the die.Type: GrantFiled: October 31, 2019Date of Patent: November 7, 2023Assignee: HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLCInventors: Joshua Joseph Trujillo, Robert Allen Williams
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Patent number: 11721638Abstract: A semiconductor wafer has a semiconductor body, an insulation layer on the semiconductor body, a scribeline region designated to be subjected to a wafer separation processing stage, and an optically detectable reference feature laterally spaced inward from the scribeline region and configured to serve as a reference position during the wafer separation processing stage. A corresponding method of processing the semiconductor wafer, a power semiconductor die and a semiconductor wafer separation apparatus are also described.Type: GrantFiled: December 18, 2020Date of Patent: August 8, 2023Assignee: Infineon Technologies Austria AGInventor: Oliver Blank
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Patent number: 11706923Abstract: A semiconductor memory device including: a common source line; a substrate on the common source line; a plurality of gate electrodes arranged on the substrate and spaced apart from each other in a first direction perpendicular to a top surface of the common source line; a plurality of insulation films arranged among the plurality of gate electrodes; a plurality of channel structures penetrating through the plurality of gate electrodes and the plurality of insulation films in the first direction; and a plurality of residual sacrificial films arranged on the substrate and spaced apart from each other in the first direction, wherein the plurality of gate electrodes are disposed on opposite sides of the plurality of residual sacrificial films.Type: GrantFiled: September 30, 2021Date of Patent: July 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Geun-won Lim
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Patent number: 11699653Abstract: A semiconductor apparatus comprising a first substrate, a second substrate coupled with the first substrate via an insulating member, a third substrate coupled to the first substrate and disposed on the opposite side to the second substrate and a conductive layer including an electrode disposed between the first and second substrate is provided. A through via is disposed so as to pass through the second substrate and a part of the insulating member to reach the electrode. An opening is arranged overlapping the electrode in the first substrate and a part of the insulating member. First and second resin layers are disposed between the electrode and the third substrate, and the first resin layer is disposed within the opening, is disposed between the electrode and the second resin layer and has a different Young's modulus from the second resin layer.Type: GrantFiled: July 30, 2020Date of Patent: July 11, 2023Assignee: CANON KABUSHIKI KAISHAInventor: Yuichi Kazue
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Patent number: 11670549Abstract: A semiconductor package which is free of metal debris from backside metallization (BSM) is disclosed. The semiconductor package is singulated by performing a saw street open process from the frontside of the wafer and then includes a singulation process using a plasma etch from the backside of the wafer with BSM. The singulation process results in metal debris free packages.Type: GrantFiled: December 17, 2020Date of Patent: June 6, 2023Assignee: UTAC Headquarters Pte LtdInventors: Dzafir Bin Mohd Shariff, Enrique Jr Sarile, Seung Geun Park
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Patent number: 11658133Abstract: An integrated circuit device is disclosed, the device comprising a protective layer and a protected circuit on a substrate, the protective layer being configured to protect the protected circuit by absorbing laser radiation targeted at the protected circuit through the substrate. The device may be configured such that removal of the protective layer causes physical damage that disables the protected circuit. The device may comprise intermediate circuitry protruding into the substrate between the protective layer and the protected circuit, wherein the physical damage that disables the protected circuit is physical damage to the intermediate circuitry. The device may comprise detection circuitry configured to detect a change in an electrical property of the device indicative of removal of the protective layer, and, in response to detecting the change in the electrical property, cause the protected circuit to be disabled.Type: GrantFiled: April 27, 2017Date of Patent: May 23, 2023Assignee: Nagravision SAInventors: Stephane Jullian, Pascal Aubry
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Patent number: 11600798Abstract: An organic light-emitting display apparatus including a first substrate including a display area and a peripheral area; a second substrate opposing the first substrate; an insulating layer disposed on the first substrate and including one or more openings; and a sealing member interconnecting the first substrate and the second substrate to each other and interposed between the first and second substrates. The one or more openings are disposed between a first conductive layer disposed on the display area and a second conductive layer disposed on the peripheral area. The one or more openings are at least partially or entirely filled with the sealing member.Type: GrantFiled: May 3, 2021Date of Patent: March 7, 2023Assignee: Samsung Display Co., Ltd.Inventors: Sangmin Hong, Jungi Youn, Goeun Lee
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Patent number: 11581223Abstract: Implementations of methods of singulating a plurality of die included in a substrate may include forming a plurality of die on a first side of a substrate, forming a backside metal layer on a second side of a substrate, applying a photoresist layer over the backside metal layer, patterning the photoresist layer along a die street of the substrate, and etching through the backside metal layer located in the die street of the substrate. The substrate may be exposed through the etch. The method may also include singulating the plurality of die included in the substrate through removing a substrate material in the die street.Type: GrantFiled: March 29, 2021Date of Patent: February 14, 2023Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventor: Michael J. Seddon
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Patent number: 11502008Abstract: An integrated circuit assembly including a substrate having a surface including at least one area including contact points operable for connection with an integrated circuit die; and at least one ring surrounding the at least one area, the at least one ring including an electrically conductive material. A method of forming an integrated circuit assembly including forming a plurality of electrically conductive rings around a periphery of a die area of a substrate selected for attachment of at least one integrated circuit die, wherein the plurality of rings are formed one inside the other; and forming a plurality of contact points in the die area.Type: GrantFiled: June 30, 2017Date of Patent: November 15, 2022Assignee: Intel CorporationInventors: Nicholas S. Haehn, Edvin Cetegen, Shankar Devasenathipathy
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Patent number: 11501970Abstract: The present application discloses a semiconductor device structure. The semiconductor device structure includes a dielectric layer over a substrate, a first ring structure over the dielectric layer, and a second ring structure over the dielectric layer and surrounding the first ring structure, wherein the first and the second ring structures have a first common center.Type: GrantFiled: December 14, 2020Date of Patent: November 15, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Yu-Han Hsueh
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Patent number: 11488877Abstract: A semiconductor device including a test structure includes a semiconductor substrate and a plurality of test structures on the semiconductor substrate. The test structures include respective lower active regions extending from the semiconductor substrate in a vertical direction and having different widths, and upper active regions extending from respective lower active regions in the vertical direction. Each of the lower active regions includes first regions and second regions. The first regions overlap the upper active regions and are between the second regions, and the second regions include outer regions and inner regions between the outer regions. The outer regions, located in the lower active regions having different widths, have different widths.Type: GrantFiled: November 15, 2018Date of Patent: November 1, 2022Inventors: Hyun Chul Sagong, June Kyun Park, Hyun Jin Kim, Ki Hyun Choi, Sang Woo Pae
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Patent number: 11482497Abstract: A package structure and method of forming the same are provided. The package structure includes a first die and a second die disposed side by side, a first encapsulant laterally encapsulating the first and second dies, a bridge die disposed over and connected to the first and second dies, a second encapsulant and a first RDL structure. The bridge die includes a semiconductor substrate, a conductive via and an encapsulant layer. The semiconductor substrate has a through substrate via embedded therein. The conductive via is disposed over a back side of the semiconductor substrate and electrically connected to the through substrate via. The encapsulant layer is disposed over the back side of the semiconductor substrate and laterally encapsulates the conductive via. The second encapsulant is disposed over the first encapsulant and laterally encapsulates the bridge die. The first RDL structure is disposed on the bridge die and the second encapsulant.Type: GrantFiled: January 14, 2021Date of Patent: October 25, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Hung Lin, Chih-Wei Wu, Chia-Nan Yuan, Ying-Ching Shih, An-Jhih Su, Szu-Wei Lu, Ming-Shih Yeh, Der-Chyang Yeh
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Patent number: 11476374Abstract: A sensor device provided in the disclosure includes a sensor substrate, a first transparent layer, a collimator layer, and a lens. The first transparent layer is disposed on the sensor substrate, wherein the first transparent layer defines an alignment structure. The collimator layer is disposed on the first transparent layer. The lens is disposed on the collimator layer.Type: GrantFiled: May 21, 2020Date of Patent: October 18, 2022Assignee: HIMAX TECHNOLOGIES LIMITEDInventors: Yu-Jui Hsieh, Po-Nan Chen, Ya-Jing Yang
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Patent number: 11450748Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a semiconductor layer and a gate structure located on the semiconductor layer. The semiconductor device has source and drain terminals disposed on the semiconductor layer, and a binary oxide layer located between the semiconductor layer and the source and drain terminals.Type: GrantFiled: November 4, 2020Date of Patent: September 20, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
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Patent number: 11404384Abstract: An interconnect structure includes a first and second insulating layer, a first and second conductive line, and a first, second, and third conductive via. The second insulating layer is disposed on the first insulating layer. The first conductive line including a first and second portion, and the first, second, and the third conductive vias are embedded in the first insulating layer. The second conductive line including a third portion and fourth portion is embedded in the second insulating layer. The first conductive via connects the first and third portions. The second conductive via connects the second and third portions. The third conductive via connects the second and fourth portions. A first cross-sectional area surrounded by the first, second, third portions, the first, second conductive vias is substantially equal to a second cross-sectional area surrounded by the second, third, fourth portions, the second, third conductive vias.Type: GrantFiled: November 25, 2020Date of Patent: August 2, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Ting-Cih Kang, Hsih-Yang Chiu
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Patent number: 11373970Abstract: A semiconductor device includes a first passivation layer over a substrate. The semiconductor device further includes at least two post passivation interconnect (PPI) lines over the first passivation layer, wherein a top portion of each of the at least two PPI lines has a rounded shape. The semiconductor device further includes a second passivation layer configured to stress the at least two PPI lines. The semiconductor device further includes a polymer material over the second passivation layer and filling a trench between adjacent PPI lines of the at least two PPI lines.Type: GrantFiled: January 17, 2020Date of Patent: June 28, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Anhao Cheng, Chun-Chang Liu, Sheng-Wei Yeh
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Patent number: 11367720Abstract: An integrated circuit includes a circuit module storing sensitive data. An electrically conductive body at a floating potential is located in the integrated circuit and holds an initial amount of electric charge. In response to an attack attempting to access the sensitive data, electric charge is collected on the electrically conductive body. A protection circuit is configured to ground an output of the circuit module, and thus preclude access to the sensitive data, in response to collected amount of electric charge on the electrically conductive body differing from the initial amount and exceeding a threshold.Type: GrantFiled: July 22, 2019Date of Patent: June 21, 2022Assignee: STMicroelectronics (Rousset) SASInventors: Pascal Fornara, Fabrice Marinet
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Patent number: 11296035Abstract: According to one embodiment, a semiconductor wafer includes a plurality of chip regions, a plurality of chip regions, a device layer, a first structure, and a second structure. The device layer includes an integrated circuit formed in each of the chip regions. The first structure is formed in the kerf region by filling a first cavity with a first filling material. The first cavity extends vertically with respect to a surface of a semiconductor substrate. The second structure is formed in the device layer by filling a second cavity with a second filling material. The second cavity extends vertically with respect to the surface of the semiconductor substrate.Type: GrantFiled: February 20, 2020Date of Patent: April 5, 2022Assignee: Kioxia CorporationInventor: Mika Fujii
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Patent number: 11241865Abstract: Electrochromic device laminates and their method of manufacture are disclosed.Type: GrantFiled: March 9, 2016Date of Patent: February 8, 2022Assignee: SAGE ELECTROCHROMICS, INC.Inventors: Neil L. Sbar, John E. Van Dine, Michael A. McCoy
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Patent number: 11244876Abstract: A packaged electronic die having a micro-cavity and a method for forming a packaged electronic die. The packaged electronic die includes a photoresist frame secured to the electronic die and extending completely around the device. The photoresist frame is further secured to a first major surface of a substrate so as to form an enclosure around the device. Encapsulant material extends over the electronic die and around the sides of the electronic die. The encapsulant material is in contact with the first major surface of the substrate around the entire periphery of the electronic die so as to form a seal around the electronic die.Type: GrantFiled: March 11, 2020Date of Patent: February 8, 2022Assignee: Microchip Technology Inc.Inventors: Matthias Klein, Andreas Zakrzewski, Richard Gruenwald
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Patent number: 11239152Abstract: The invention relates to an integrated circuit with an active transistor area and a plurality of wiring layers arranged above the active transistor area. At least one optical device is integrated in the active transistor area. The optical device is electrically connected with at least one of the wiring layers. At least one optical tunnel extends from the at least one optical device through the plurality of wiring layers to a surface of an uppermost wiring layer of the plurality of wiring layers facing away from the active transistor area.Type: GrantFiled: September 4, 2019Date of Patent: February 1, 2022Assignee: International Business Machines CorporationInventors: Otto Andreas Torreiter, Thomas Gentner, Martin Eckert
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Patent number: 11216139Abstract: Provided is a touch display device including a folding area in an active area. The same pattern of touch electrodes can be maintained in both a reference area and a folding area and cracks on touch electrodes in the folding area, by applying a pattern structure of a touch insulation film disposed in the folding area. Therefore, the degradation of touch sensing performance, caused by cracks on the touch electrodes in the folding area, can be prevented and touch sensing sensitivity can be uniform in the reference area and the folding area, thereby improving touch sensing performance of the touch display device including the folding area.Type: GrantFiled: July 27, 2020Date of Patent: January 4, 2022Assignee: LG DISPLAY CO., LTD.Inventors: Yangsik Lee, HwiDeuk Lee, TaeWoo Kim, YongChan Park
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Patent number: 11201124Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor substrate and a first deep trench isolation (DTI) structure filled with a dielectric material formed on the semiconductor substrate. The first DTI structure is disposed in the first seal ring region and is extended into the semiconductor substrate. The semiconductor substrate has a pixel array region and a first seal ring region. The first seal ring region is proximate to an edge of the semiconductor substrate and surrounds the pixel array region. The first DTI structure is formed in the first seal ring region and surrounds the pixel array region.Type: GrantFiled: July 29, 2019Date of Patent: December 14, 2021Assignee: OMNIVISION TECHNOLOGIES, INC.Inventors: Chia-Ying Liu, Wu-Zang Yang, Chia-Jung Liu, Chi-Chih Huang
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Patent number: 11177355Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a circuit region, a seal ring region and an assembly isolation region. The circuit region includes a first conductive layer. The seal ring region includes a second conductive layer. The assembly isolation region is between the circuit region and the seal ring region. The first conductive layer and the second conductive layer respectively include a portion extending into the assembly isolation region thereby forming an electric component in the assembly isolation region.Type: GrantFiled: April 9, 2019Date of Patent: November 16, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chen-Hua Yu, Mirng-Ji Lii, Hung-Yi Kuo, Hao-Yi Tsai, Tsung-Yuan Yu, Min-Chien Hsiao, Chao-Wen Shih
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Patent number: 11164819Abstract: A semiconductor package includes a first wafer, a second wafer, and an interconnect. The first wafer includes a first die, a first encapsulating material encapsulating the first die, and a first redistribution structure disposed over the first die and the first encapsulating material. The second wafer includes a second die, a second encapsulating material encapsulating the second die, and a second redistribution structure disposed over the second die and the second encapsulating material, wherein the second redistribution structure faces the first redistribution structure. The interconnect is disposed between the first wafer and the second wafer and electrically connecting the first redistribution structure and the second redistribution structure, wherein the interconnect includes a substrate and a plurality of through vias extending through the substrate for connecting the first redistribution structure and the second redistribution structure.Type: GrantFiled: May 30, 2019Date of Patent: November 2, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ying-Cheng Tseng, Hao-Yi Tsai, Tin-Hao Kuo, Chia-Hung Liu, Chi-Hui Lai
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Package structure having sensor die with touch sensing electrode, and method of fabricating the same
Patent number: 11158555Abstract: A package structure including a semiconductor die, an insulating encapsulant, and a redistribution layer is provided. The semiconductor die includes a semiconductor substrate, a plurality of metallization layers disposed on the semiconductor substrate, and a passivation layer disposed on the plurality of metallization layers. The passivation layer has a first opening that partially expose a topmost layer of the plurality of metallization layers. The insulating encapsulant is encapsulating the semiconductor die. The redistribution layer includes at least a first dielectric layer and a first conductive layer stacked on the first dielectric layer. The first dielectric layer has a second opening that overlaps with the first opening, and a width ratio of the second opening to the first opening is in a range of 2.3:1 to 12:1. The first conductive layer is electrically connected to the topmost layer of the plurality of metallization layers through the first and second openings.Type: GrantFiled: March 29, 2018Date of Patent: October 26, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ting-Ting Kuo, Chih-Hua Chen, Hao-Yi Tsai, Yu-Chih Huang, Chia-Hung Liu, Chih-Hsuan Tai, Ying-Cheng Tseng -
Patent number: 11152387Abstract: A semiconductor memory device including: a common source line; a substrate on the common source line; a plurality of gate electrodes arranged on the substrate and spaced apart from each other in a first direction perpendicular to a top surface of the common source line; a plurality of insulation films arranged among the plurality of gate electrodes; a plurality of channel structures penetrating through the plurality of gate electrodes and the plurality of insulation films in the first direction; and a plurality of residual sacrificial films arranged on the substrate and spaced apart from each other in the first direction, wherein the plurality of gate electrodes are disposed on opposite sides of the plurality of residual sacrificial films.Type: GrantFiled: July 16, 2019Date of Patent: October 19, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Geun-won Lim
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Patent number: 11145601Abstract: A semiconductor chip including an alignment pattern is provided. The semiconductor chip includes a substrate associated with a main chip region of a semiconductor wafer and including a scribe lane. A lower interlayer insulating layer is disposed on the substrate, a low-K layer including dummy metal patterns is disposed on the lower interlayer insulating layer, an alignment pattern is disposed on the low-K layer, and a passivation layer covers the alignment pattern.Type: GrantFiled: June 4, 2019Date of Patent: October 12, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Yoon Sung Kim, Yun Hee Kim, Byung Moon Bae, Hyun Su Sim, Jun Ho Yoon, Jung Ho Choi
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Patent number: 11139199Abstract: A semiconductor device including a semiconductor substrate including a chip region and an edge region around the chip region; a lower dielectric layer and an upper dielectric layer on the semiconductor substrate; a redistribution chip pad that penetrates the upper dielectric layer on the chip region and is connected a chip pad; a process monitoring structure on the edge region; and dummy elements in the edge region and having an upper surface lower than an upper surface of the upper dielectric layer.Type: GrantFiled: May 23, 2019Date of Patent: October 5, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jung-Hoon Han, Seokhwan Kim, Joodong Kim, Junyong Noh, Jaewon Seo
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Patent number: 11119137Abstract: A microelectronic device includes a deep trench test structure in semiconductor material of a substrate. The deep trench test structure has pad trench segments with a liner of electrically non-conductive material and a trench fill material on the liner, extending to tops of the pad trench segments. The pad trench segments extend across a probe pad region; at least 20 microns in every lateral direction. The trench fill material at the top of the pad trench segments occupies at least 25 percent of the probe pad region. The liner may electrically isolate the trench fill material from the semiconductor material, or the deep trench test structure may include a contact trench segment wherein the trench fill material contacts the semiconductor material. The deep trench test structure may be probed on the pad trench segments to measure an impedance between the trench fill material and the semiconductor material.Type: GrantFiled: January 8, 2020Date of Patent: September 14, 2021Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Thomas Edward Lillibridge, Neil L Gardner
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Patent number: 11107773Abstract: A semiconductor device includes a semiconductor substrate having a scribe lane defined therein. A plurality of semiconductor chips is formed on an upper surface of the semiconductor substrate. At least one conductive structure is arranged on an upper surface of the semiconductor substrate, within the scribe lane thereof. A fillet is arranged on at least one side surface of the conductive structure. The fillet is configured to induce a cut line which spreads along the scribe lane, through a central portion of the conductive structure.Type: GrantFiled: June 13, 2019Date of Patent: August 31, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Su Sim, Yoon-Sung Kim, Yun-Hee Kim, Byung-Moon Bae, Jun-Ho Yoon
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Patent number: 11094671Abstract: A package includes a substrate, an Under-Bump Metallurgy (UBM) penetrating through the substrate, a solder region over and contacting the UBM, and an interconnect structure underlying the substrate. The interconnect structure is electrically coupled to the solder region through the UBM. A device die is underlying and bonded to the interconnect structure. The device die is electrically coupled to the solder region through the UBM and the interconnect structure. An encapsulating material encapsulates the device die therein.Type: GrantFiled: June 8, 2020Date of Patent: August 17, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Chung-Hao Tsai, Chuei-Tang Wang
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Patent number: 11088094Abstract: A method includes forming a reconstructed wafer including encapsulating a device die in an encapsulant, forming a dielectric layer over the device die and the encapsulant, forming a plurality of redistribution lines extending into the dielectric layer to electrically couple to the device die, and forming a metal ring in a common process for forming the plurality of redistribution lines. The metal ring encircles the plurality of redistribution lines, and the metal ring extends into scribe lines of the reconstructed wafer. A die-saw process is performed along scribe lines of the reconstructed wafer to separate a package from the reconstructed wafer. The package includes the device die and at least a portion of the metal ring.Type: GrantFiled: May 31, 2019Date of Patent: August 10, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wan-Yu Lee, Chiang Lin, Yueh-Ting Lin, Hua-Wei Tseng, Li-Hsien Huang, Yu-Hsiang Hu
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Patent number: 11069647Abstract: A semiconductor wafer, a bonding structure, and a wafer bonding method are provided. In the semiconductor wafer, a bonding pad which is electrically connected to the interconnection structure is formed in the top cover layer, and a bonding alignment mark formed by a point array is disposed in the top cover layer. In this way, the bonding alignment mark is disposed in the top cover layer, and the top cover layer is not covered by another material layer, thereby facilitating recognition of the alignment pattern by the bonding device and increasing the alignment window in bonding process. Moreover, the bonding alignment mark is formed by a point array, thereby facilitating integration of the process for forming the bonding alignment mark with the bonding hole process and avoiding defects such as the dishing phenomenon in the manufacturing process.Type: GrantFiled: October 10, 2019Date of Patent: July 20, 2021Assignee: Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.Inventors: Yunpeng Zhou, Wanli Guo, Xing Hu, Yuheng Huang
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Patent number: 11069639Abstract: In an embodiment, a module includes a first electronic device in a first device region and a second electronic device in a second device region. The first electronic device is operably coupled to the second electronic device to form a circuit. Side faces of the first electronic device and of the second electronic device are embedded in, and in direct contact with, a first epoxy layer.Type: GrantFiled: February 22, 2019Date of Patent: July 20, 2021Assignee: Infineon Technologies Austria AGInventors: Thomas Feil, Danny Clavette, Carsten von Koblinski
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Patent number: 11062981Abstract: A bidirectional switch includes: a first lateral transistor including a first semiconductor layer on the surface of a first conductive layer; a second lateral transistor including a second semiconductor layer on the surface of a second conductive layer; a connection member; a first conductor member; and a second conductor member. The connection member connects the first lateral transistor and the second lateral transistor together in anti-series. The first conductor member electrically connects the first source electrode of the first lateral transistor to the first conductive layer. The second conductor member electrically connects the second source electrode of the second lateral transistor to the second conductive layer.Type: GrantFiled: March 26, 2018Date of Patent: July 13, 2021Assignee: Panasonic CorporationInventors: Yusuke Kinoshita, Yasuhiro Yamada, Takashi Ichiryu, Hidekazu Umeda
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Patent number: 11056442Abstract: A substrate structure has an obtuse portion formed between a side surface and a bottom surface of a substrate body. The obtuse portion includes a plurality of turning surfaces to disperse the stress of the substrate body generated in the packaging process. Therefore, the substrate body is prevented from being cracked. A method for fabricating the substrate structure and an electronic package including the substrate structure are also provided.Type: GrantFiled: June 15, 2017Date of Patent: July 6, 2021Assignee: Siliconware Precision Industries Co., Ltd.Inventors: Po-Hao Wang, Chun-Tang Lin, Shou-Qi Chang, Yu-Hsiang Hsieh
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Patent number: 11037854Abstract: A die includes a semiconductor substrate, a through-via penetrating through the semiconductor substrate, a seal ring overlying and connected to the through-via, and an electrical connector underlying the semiconductor substrate and electrically coupled to the seal ring through the through-via.Type: GrantFiled: January 13, 2020Date of Patent: June 15, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jing-Cheng Lin, Shih-Yi Syu
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Patent number: 11037888Abstract: The present invention relates to a nitride-based electronic device and a method for manufacturing same, the nitride-based electronic device comprising a substrate, a metal electrode and a plurality of protection layers, wherein, among the protection layers, at least two protection layers covering one portion of the electrode so that one portion of the upper part of the electrode is exposed are configured so that the upper protection layer covers the end part of the lower protection layer so as to prevent the end part of the lower protection layer from being exposed.Type: GrantFiled: November 3, 2017Date of Patent: June 15, 2021Assignee: WAVICE INC.Inventors: Sang Min Lee, Hwang Sub Koo, Hyun Je Kim, Hee seok Jung
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Patent number: 11031357Abstract: There is provided a semiconductor device having a structure that can suppress occurrence of chipping in a device region and that can reduce manufacturing cost of the semiconductor device. A semiconductor device includes a substrate and a first amorphous insulating film. The substrate has a main surface and an end surface. The main surface includes a peripheral region and a device region. The first amorphous insulating film is disposed on the peripheral region, and is separated from the device region. The first amorphous insulating film extends along the end surface in the form of a stripe. The first amorphous insulating film is flush with the end surface.Type: GrantFiled: June 8, 2020Date of Patent: June 8, 2021Assignee: Mitsubishi Electric CorporationInventors: Tetsuo Takahashi, Masayoshi Tarutani, Kazuhiko Sakutani, Kenji Harada, Masao Takata, Kouichi In
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Patent number: 11018088Abstract: An embodiment device includes an integrated circuit die and a first metallization pattern over the integrated circuit die. The first metallization pattern includes a first dummy pattern having a first hole extending through a first conductive region. The device further includes a second metallization pattern over the first metallization pattern. The second metallization pattern includes a second dummy pattern having a second hole extending through a second conductive region. The second hole is arranged projectively overlapping a portion of the first hole and a portion of the first conductive region.Type: GrantFiled: June 10, 2019Date of Patent: May 25, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Hsien Hsieh, Li-Han Hsu, Wei-Cheng Wu, Hsien-Wei Chen, Der-Chyang Yeh, Chi-Hsi Wu, Chen-Hua Yu
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Patent number: 10957594Abstract: A manufacturing method of a semiconductor chip is provided. The method includes: forming a first metal pattern over a substrate and within a chip region and a scribe line region of the substrate, wherein the chip region is surrounded by the scribe line region; forming a metal material layer on the first metal pattern; patterning the metal material layer to remove substantially all portions of the metal material layer within the scribe line region and a portion of the metal material layer within the chip region, so as to form a second metal pattern within the chip region; forming a third metal pattern, wherein the second metal pattern within the chip region is covered by the third metal pattern, and the third metal pattern is located over the first metal pattern within the scribe line region; and performing singulation along the scribe line region, to form the semiconductor chip.Type: GrantFiled: October 5, 2018Date of Patent: March 23, 2021Assignee: Winbond Electronics Corp.Inventors: Cheng-Hong Wei, Hung-Sheng Chen
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Patent number: 10937751Abstract: Provided is a method of manufacturing a bump structure, the method including a first step for preparing a wafer including a plurality of chips each including a die pad, an under bump metal (UBM) layer on the die pad, and a bump pattern on the UBM layer, a second step for attaching a backgrinding film to an upper surface of the wafer, a third step for grinding a rear surface of the wafer by a certain thickness, a fourth step for forming a flexible material layer on a second rear surface of the wafer after being ground, and then attaching dicing tape including a ring frame, to the flexible material layer, a fifth step for removing the backgrinding film and then performing a curing process to harden the flexible material layer, and a sixth step for performing a dicing process to cut the plurality of chips into individual chips.Type: GrantFiled: December 28, 2017Date of Patent: March 2, 2021Assignee: LBSEMICON CO., LTD.Inventor: Jin Kuk Lee
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Patent number: 10930602Abstract: A semiconductor device in which reliability and production yield are improved by reducing or preventing the spreading of cracks that may occur in the die sawing process, and a method for fabricating the same are provided. The semiconductor device includes a substrate which includes a first chip region and a scribe lane region surrounding the first chip region, a first low-k insulating film, which includes a first insulating material having a dielectric constant lower than silicon oxide, on the substrate in the first chip region, a wiring structure, which includes a second low-k insulating film including the first insulating material and a first wiring pattern in the second low-k insulating film, on the substrate in the scribe lane region, and a first protective insulating film, which includes a second insulating material different from the first insulating material, between the first low-k insulating film and the wiring structure.Type: GrantFiled: July 16, 2019Date of Patent: February 23, 2021Inventors: Yun Rae Cho, Ae Nee Jang, Seung Hun Han
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Patent number: 10916509Abstract: A method of dividing a substrate includes preparing a substrate including a crystalline semiconductor layer having a scribe lane region and device regions, a dielectric layer on the crystalline semiconductor layer, and a partition structure in physical contact with the dielectric layer and provided on the scribe lane region of the crystalline semiconductor layer, forming an amorphous region in the crystalline semiconductor layer, and performing a grinding process on the crystalline semiconductor layer after the forming of the amorphous region. The amorphous region is formed in the scribe lane region of the crystalline semiconductor layer.Type: GrantFiled: August 2, 2019Date of Patent: February 9, 2021Inventors: Yun-Rae Cho, Sundae Kim, Hyunggil Baek, Namgyu Baek, Seunghun Shin, Donghoon Won
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Patent number: 10916514Abstract: Metal-free frame designs for silicon bridges for semiconductor packages and the resulting silicon bridges and semiconductor packages are described. In an example, a semiconductor structure includes a substrate having an insulating layer disposed thereon, the substrate having a perimeter. A metallization structure is disposed on the insulating layer, the metallization structure including conductive routing disposed in a dielectric material stack. A first metal guard ring is disposed in the dielectric material stack and surrounds the conductive routing. A second metal guard ring is disposed in the dielectric material stack and surrounds the first metal guard ring. A metal-free region of the dielectric material stack surrounds the second metal guard ring. The metal-free region is disposed adjacent to the second metal guard ring and adjacent to the perimeter of the substrate.Type: GrantFiled: September 19, 2019Date of Patent: February 9, 2021Assignee: Intel CorporationInventors: Dae-Woo Kim, Sujit Sharan, Sairam Agraharam
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Patent number: RE49390Abstract: A method of testing a semiconductor device includes providing a first wafer that includes a first surface, a second surface that is allocated at an opposite side of the first surface, a first electrode penetrating the first wafer from the first surface to the second surface, and a pad formed on the first surface and coupled electrically with the first electrode, providing a second wafer that includes a second electrode penetrating the second wafer, stacking the first wafer onto the second wafer to connect the first electrode with the second electrode such that the second surface of the first wafer faces the second wafer, probing a needle to the pad, and supplying, in such a state that the first wafer is stacked on the second wafer, a test signal to the first electrode to input the test signal into the second wafer via the first electrode and the second electrode.Type: GrantFiled: February 3, 2020Date of Patent: January 24, 2023Assignee: LONGITUDE LICENSING LIMITEDInventor: Yoshiro Riho
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Patent number: RE49603Abstract: A GaN-on-Si device structure and a method of fabrication are disclosed for improved die yield and device reliability of high current/high voltage lateral GaN transistors. A plurality of conventional GaN device structures comprising GaN epi-layers are fabricated on a silicon substrate (GaN-on-Si die). After processing of on-chip interconnect layers, a trench structure is defined around each die, through the GaN epi-layers and into the silicon substrate. A trench cladding is provided on proximal sidewalls, comprising at least one of a passivation layer and a conductive metal layer. The trench cladding extends over exposed surfaces of the GaN epi-layers, over the interface region with the substrate, and also over the exposed surfaces of the interconnect layers. This structure reduces risk of propagation of dicing damage and defects or cracks in the GaN epi-layers into active device regions. A metal trench cladding acts as a barrier for electro-migration of mobile ions.Type: GrantFiled: May 7, 2020Date of Patent: August 8, 2023Assignee: GAN SYSTEMS INC.Inventors: Thomas Macelwee, Greg P. Klowak, Howard Tweddle