With Peripheral Feature Due To Separation Of Smaller Semiconductor Chip From Larger Wafer (e.g., Scribe Region, Or Means To Prevent Edge Effects Such As Leakage Current At Peripheral Chip Separation Area) Patents (Class 257/620)
  • Patent number: 9589903
    Abstract: A package includes a device die, a molding material encircling the device die, wherein a top surface of the molding material is substantially level with a top surface of the device die, and a bottom dielectric layer over the device die and the molding material. A plurality of redistribution lines (RDLs) extends into the bottom dielectric layer and electrically coupling to the device die. A top polymer layer is over the bottom dielectric layer, with a trench ring penetrating through the top polymer layer. The trench ring is adjacent to edges of the package. The package further includes Under-Bump Metallurgies (UBMs) extending into the top polymer layer.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: March 7, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jie Chen, Hsien-Wei Chen
  • Patent number: 9572248
    Abstract: A display device, including a display panel displaying an image; a chip on film (COF) connected to the display panel and on which a driving integrated circuit is mounted; and a printed circuit board (PCB) connected to the COF and including a driving circuit for driving the display panel, in the COF, on a film, a first pad portion being connected to the driving integrated circuit by a first wiring line, a second pad portion being connected to the driving integrated circuit by a second wiring line, and a solder resist being applied to the first and second wiring lines, the second pad portion being spaced from and offset from the first pad portion, and the PCB including stepped portions at sides of first and second corresponding pad portions connected with the first and second pad portions, respectively, to receive a portion of the solder resist.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: February 14, 2017
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventor: Hee-Kwon Lee
  • Patent number: 9570123
    Abstract: A memory system having a serial data interface and a serial data path core for receiving data from and for providing data to at least one memory bank as a serial bitstream. The memory bank is divided into two halves, where each half is divided into upper and lower sectors. Each sector provides data in parallel to a shared two-dimensional page buffer with an integrated self column decoding circuit. A serial to parallel data converter within the memory bank couples the parallel data from either half to the serial data path core. The shared two-dimensional page buffer with the integrated self column decoding circuit minimizes circuit and chip area overhead for each bank, and the serial data path core reduces chip area typically used for routing wide data buses. Therefore a multiple memory bank system is implemented without a significant corresponding chip area increase when compared to a single memory bank system having the same density.
    Type: Grant
    Filed: November 3, 2014
    Date of Patent: February 14, 2017
    Assignee: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
    Inventor: Jin-Ki Kim
  • Patent number: 9559067
    Abstract: A method of forming a semiconductor device includes forming a passivation layer on top of a guard ring and an active area of a circuit device, forming a passivation contact within the passivation layer, the passivation contact being over and electrically connected to the guard ring, forming a post-passivation interconnect (PPI) guard ring over the passivation layer and electrically connected to the passivation contact, and forming a first polymer layer over the PPI guard ring, the first polymer layer extending along a sidewall of the PPI guard ring.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: January 31, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Yuan Yu, Hsien-Wei Chen
  • Patent number: 9514925
    Abstract: Various approaches discussed herein enable techniques for protecting die units made of silicon substrate. A substrate, or wafer, is provided that has multiple die units built onto it, as well as saw streets between the die units. The substrate is cut into along the saw streets at a first width, after which a coating is applied to a side of the wafer so that the side of the wafer is covered with the coating as well as the channels created by the cutting being substantially filled with the coating. After curing the coating, a second cut is made along the saw streets and through the cured coating, so that the individual die units, once separated, have a protective layer of the coating attached to one side and the periphery of the die unit.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: December 6, 2016
    Assignee: Amazon Technologies, Inc.
    Inventors: Samuel Waising Tam, Tak Shing Pang
  • Patent number: 9508654
    Abstract: A method of manufacturing a semiconductor device is provided. The method includes forming a passivation film on a substrate including a plurality of element regions and a scribe region, forming a trench in the passivation film in a region of the scribe region along an outer edge of each of the element regions, and forming a film on the passivation film in which the trench has been formed by coating. A depth of a first section in a first position of the trench is shallower than a depth of a second section in a second position of the trench. A width of the first section is wider than a width of the second section.
    Type: Grant
    Filed: June 8, 2015
    Date of Patent: November 29, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Nobutaka Ukigaya, Masao Ishioka
  • Patent number: 9508660
    Abstract: A microelectronic die may be formed with chamfer corners for reducing stresses which can lead to delamination and/or cracking failures when such a microelectronic die is incorporated into a microelectronic package. In one embodiment, a microelectronic die may include at least one substantially planar chamfering side extending between at least two adjacent sides of a microelectronic die. In another embodiment, a microelectronic die may include at least one substantially curved or arcuate chamfering side extending between at least two adjacent sides of a microelectronic die.
    Type: Grant
    Filed: February 10, 2015
    Date of Patent: November 29, 2016
    Assignee: Intel Corporation
    Inventors: Manish Dubey, Emre Armagan, Rajendra C. Dias, Lars D. Skoglund
  • Patent number: 9502343
    Abstract: A structure includes a metal pad, a passivation layer having a portion covering edge portions of the metal pad, and a dummy metal plate over the passivation layer. The dummy metal plate has a plurality of through-openings therein. The dummy metal plate has a zigzagged edge. A dielectric layer has a first portion overlying the dummy metal plate, second portions filling the first plurality of through-openings, and a third portion contacting the first zigzagged edge.
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: November 22, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hsien Hsieh, Hsien-Wei Chen, Chi-Hsi Wu, Chen-Hua Yu, Der-Chyang Yeh, Li-Han Hsu, Wei-Cheng Wu
  • Patent number: 9496163
    Abstract: Provided are a carrier and a method of fabricating a semiconductor device using the same. The carrier may include a recess region provided adjacent to an edge thereof. The recess region may be configured to confine an adhesive layer within a desired region including the recess region. The recess region makes it possible to reduce a process failure in a process of fabricating a semiconductor device.
    Type: Grant
    Filed: October 3, 2014
    Date of Patent: November 15, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: HyungJun Jeon, Byung Lyul Park, Jisoon Park
  • Patent number: 9490170
    Abstract: A method for manufacturing a semiconductor device includes preparing a structure including a semiconductor substrate having a plurality of semiconductor elements thereon, a cover layer covering the semiconductor elements, a supporting substrate, and an adhesive layer between the first adhesive layer and the supporting substrate, removing side edge portions of the semiconductor substrate and the adhesive layer, such that a side surface of the cover layer is exposed, forming, in the supporting substrate, fragile portions, the fragile portions extending in a first direction, attaching an adhesive sheet on a surface of the supporting substrate that is opposite to a surface that is in contact with the adhesive layer, and pulling on the adhesive sheet in a second direction different from the first direction, to peel off the supporting substrate and the adhesive layer from the semiconductor substrate having the semiconductor elements.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: November 8, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Akira Tomono
  • Patent number: 9484303
    Abstract: An integrated circuit structure includes a substrate, a plurality of low-k dielectric layers over the substrate, a first dielectric layer over the plurality of low-k dielectric layers, and a metal line in the first dielectric layer. A stress tuning dielectric layer is over the first dielectric layer, wherein the stress tuning dielectric layer includes a first opening and a second opening. The metal line extends into the first opening. The second opening has a bottom substantially level with a top surface of the first dielectric layer. A second dielectric layer is over the first dielectric layer.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: November 1, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yung-Yao Wang, Ying-Han Chiou, Ling-Sung Wang
  • Patent number: 9478472
    Abstract: Substrate components for packaging IC chips and electronic device packages are disclosed. A substrate component for packaging IC chips comprises: a glass core base with at least one conductive through via connecting a combination of metallization and dielectric structures on both an upper surface and a lower surface of the glass core base; and, tapered edges created at a peripheral region of the glass core base; wherein dielectric layers are disposed over the tapered edges at the peripheral region of the glass core base. In accordance with an embodiment of the invention, the dielectric layers have a substantial planar upper surface, a lower surface conformably interfaced with the tapered edges at peripheral region of the glass core base, and a steep cutting face with the tapered edges of the glass core base.
    Type: Grant
    Filed: May 19, 2014
    Date of Patent: October 25, 2016
    Inventor: Dyi-Chung Hu
  • Patent number: 9478480
    Abstract: In accordance with an embodiment, a structure comprises a substrate having a first area and a second area; a through substrate via (TSV) in the substrate penetrating the first area of the substrate; an isolation layer over the second area of the substrate, the isolation layer having a recess; and a conductive material in the recess of the isolation layer, the isolation layer being disposed between the conductive material and the substrate in the recess.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: October 25, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Shih-Hui Wang, Chien-Ming Chiu, Chia-Ho Chen, Fang Wen Tsai, Weng-Jin Wu, Jing-Cheng Lin, Wen-Chih Chiou, Shin-Puu Jeng, Chen-Hua Yu
  • Patent number: 9478427
    Abstract: A semiconductor structure with low resistance conduction paths and methods of manufacture are disclosed. The method includes forming at least one low resistance conduction path on a wafer, and forming an electroplated seed layer in direct contact with the low resistance conduction path.
    Type: Grant
    Filed: August 21, 2015
    Date of Patent: October 25, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper, Eric J. White
  • Patent number: 9478578
    Abstract: An embodiment semiconductor device includes a substrate such as a silicon or silicon-containing film, a pixel array supported by the substrate, and a metal stress release feature arranged around a periphery of the pixel array. The metal stress release feature may be formed from metal strips or discrete metal elements. The metal stress release feature may be arranged in a stress release pattern that uses a single line or a plurality of lines. The metal stress release pattern may also use metal corner elements at ends of the lines.
    Type: Grant
    Filed: October 26, 2015
    Date of Patent: October 25, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Cherng Jeng, Chun-Hao Chou, Tsung-Han Tsai, Kuo-Cheng Lee, Volume Chien, Yen-Hsung Ho, Allen Tseng
  • Patent number: 9472508
    Abstract: A semiconductor device structure and a method of fabricating the same are provided. The semiconductor structure includes a substrate and an interconnection structure formed over the substrate. The interconnection structure includes a first dielectric layer and a first stress-reducing structure formed in the first dielectric layer. The interconnection structure further includes a first conductive feature formed in the first dielectric layer, and the first conductive feature is surrounded by the first stress-reducing structure.
    Type: Grant
    Filed: January 4, 2016
    Date of Patent: October 18, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Ruei Lin, Yen-Ming Peng, Han-Wei Yang, Chen-Chung Lai
  • Patent number: 9466575
    Abstract: The present disclosure provides a technique for improving the reliability of a semiconductor device where spreading of cracking that occurs at the time of dicing to a seal ring can be restricted even in a semiconductor device with a low-k film used as an interlayer insulating film. Dummy vias are formed in each layer on a dicing region side. The dummy vias are formed at the same intervals in a matrix as viewed in a top view. Even in the case where cracking occurs at the time of dicing, the cracking can be prevented from spreading to a seal ring by the dummy vias. As a result, resistance to moisture absorbed in a circuit formation region can be improved, and deterioration in reliability can be prevented.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: October 11, 2016
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Kazuo Tomita
  • Patent number: 9461019
    Abstract: Disclosed herein is a semiconductor device including: a first substrate provided with a first surface layer including a first electrode; an expanded second substrate provided with a second surface layer including a second electrode and directly bonded to the first substrate so that the second surface layer contacts with the first surface layer; and a through electrode running through the first or second substrate. The second surface layer is provided over an expanded second principal surface defined by a second substrate and a resin portion. The second substrate has a smaller planar size than the first substrate. The first and second electrodes are connected together and in contact with each other.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: October 4, 2016
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventor: Hiroki Miyajima
  • Patent number: 9443830
    Abstract: Electrical components such as semiconductor die may be mounted in semiconductor packages and embedded within printed circuits. A printed circuit may have a substrate with an opening and may have metal layers. During lamination operations, substrate material such as prepreg may flow and form embedding dielectric material that embeds the semiconductor die within the opening. Double-sided semiconductor dies may be formed by attaching multiple semiconductor dies together using a layer of material such as die attach film. The double-sided semiconductor dies may be embedded within a printed circuit and mounted in semiconductor packages. Wire bond wires may be used to couple one of the semiconductor dies in a double-sided semiconductor die to contacts on a substrate. Wire bond wires may also be used to couple a shield layer to the substrate.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: September 13, 2016
    Assignee: Apple Inc.
    Inventors: Corey N. Axelowitz, Eric C. Lee, Shawn Xavier Arnold
  • Patent number: 9443776
    Abstract: A test structure used to determine reliability performance includes a patterned metallization structure having multiple interfaces, which provide stress risers. A dielectric material surrounds the metallization structure, where a mismatch in coefficients of thermal expansion (CTE) between the metallization structure and the surrounding dielectric material exist such that a thermal strain value is provided to cause failures under given stress conditions as a result of CTE mismatch to provide a yield indicative of reliability for a manufacturing design.
    Type: Grant
    Filed: June 3, 2015
    Date of Patent: September 13, 2016
    Assignee: GlobalFoundries, Inc.
    Inventors: Ronald G. Filippi, Jason P. Gill, Vincent J. McGahay, Paul S. McLaughlin, Conal E. Murray, Hazara S. Rathore, Thomas M. Shaw, Ping-Chuan Wang
  • Patent number: 9437739
    Abstract: A semiconductor device includes a first front-end-of-line (FEOL) seal ring on a substrate, the seal ring comprising ring-shaped fin-like structures, integrated circuitry formed on the substrate, the integrated circuitry being circumscribed by the first seal ring, an isolation zone between the seal ring and the integrated circuitry, the isolation zone comprising a set of fin structures, each fin structure facing a same direction.
    Type: Grant
    Filed: March 6, 2014
    Date of Patent: September 6, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Yuan Yu, Hsien-Wei Chen
  • Patent number: 9429867
    Abstract: A semiconductor apparatus includes a rectangular plate-like body including a major surface. A plurality of light emitting portions formed in the major surface, and aligned in a straight line. A first terraced portion and a second terraced portion are formed in the major surface except areas in which the plurality of light emitting portions are formed.
    Type: Grant
    Filed: March 26, 2015
    Date of Patent: August 30, 2016
    Assignee: Oki Data Corporation
    Inventors: Takahito Suzuki, Taishi Kaneto
  • Patent number: 9431355
    Abstract: Various embodiments provide semiconductor structures and methods for forming the same. In an exemplary structure, a substrate has a device region, a seal ring region surrounding the device region, and a dielectric layer disposed thereon. A first seal ring structure is located within the dielectric layer on the seal ring region, and includes a plurality of first connection layers overlappingly disposed and separated by the dielectric layer. At least one first connection layer is formed by a plurality of discrete sub-connection layers. The first seal ring structure further includes a plurality of first conductive plugs between vertically adjacent first connection layers. A top of each first conductive plug is connected to an upper first connection layer. A bottom of each first conductive plug between at least two vertically adjacent first connection layers extends into the dielectric layer between horizontally adjacent sub-connection layers of a lower first connection layer.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: August 30, 2016
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventor: Xianjie Ning
  • Patent number: 9406625
    Abstract: A semiconductor wafer has a multi-stage structure that damps and contains nascent cracks generated during dicing and inhibits moisture penetration into the active region of a die. The wafer includes an array of die regions separated by scribe lanes. The die regions include an active region and a first ring that surrounds the active region. A portion of the first ring includes a low-k dielectric material. A second ring includes a stack of alternating layers of metal and interlayer dielectric (ILD) material. A dummy metal region around the rings includes a stacked dummy metal features and surrounds the active region. A regular or irregular staggered arrangement of saw grid process control (SGPC) features reduces mechanical stress during dicing.
    Type: Grant
    Filed: November 26, 2014
    Date of Patent: August 2, 2016
    Assignee: FREESCALE SEMICONDCUTOR, INC.
    Inventors: Zhijie Wang, Zhigang Bai, Jiyong Niu, Dehong Ye, Huchang Zhang
  • Patent number: 9396973
    Abstract: A semiconductor device includes a substrate, a bond pad above the substrate, a guard ring above the substrate, and an alignment mark above the substrate, between the bond pad and the guard ring. The device may include a passivation layer on the substrate, a polymer layer, a post-passivation interconnect (PPI) layer in contact with the bond pad, and a connector on the PPI layer, wherein the connector is between the bond pad and the guard ring, and the alignment mark is between the connector and the guard ring. The alignment mark may be at the PPI layer. There may be multiple alignment marks at different layers. There may be multiple alignment marks for the device around the corners or at the edges of an area surrounded by the guard ring.
    Type: Grant
    Filed: March 6, 2015
    Date of Patent: July 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Yuan Yu, Hsien-Wei Chen, Wen-Hsiung Lu, Hung-Jen Lin
  • Patent number: 9390968
    Abstract: Vacuum processing, such as a backside metallization (BSM) deposition, is performed on a taped wafer after a gas escape path is formed between a base film of the tape and the wafer frontside surface following backgrind. Venting provided by the gas escape path reduces formation of bubbles under the tape. The gas escape path may be provided, for example, by a selective pre-curing of tape adhesive, to breach an edge seal and place the wafer frontside surface internal to the edge seal in fluid communication with an environment external to the edge seal. With the thinned wafer supported by the pre-cured tape, BSM is then deposited while the wafer and tape are cooled, for example, via a cooled electrostatic chuck.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: July 12, 2016
    Assignee: Intel Corporation
    Inventor: Eric J. Li
  • Patent number: 9379065
    Abstract: Some implementations provide a semiconductor device (e.g., die, wafer) that includes a substrate, metal layers and dielectric layers coupled to the substrate, a pad coupled to one of the several metal layers, a first metal redistribution layer coupled to the pad, an under bump metallization (UBM) layer coupled to the first metal redistribution layer. The semiconductor device includes several crack stopping structures configured to surround a bump area of the semiconductor device and a pad area of the semiconductor device. The bump area includes the UBM layer. The pad area includes the pad. In some implementations, at least one crack stopping structure includes a first metal layer and a first via. In some implementations, at least one crack stopping structure further includes a second metal layer, a second via, and a third metal layer. In some implementations, at least one crack stopping structure is an inverted pyramid crack stopping structure.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: June 28, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Lizabeth Ann Keser, Zhongping Bao, Reynante Tamunan Alvarado
  • Patent number: 9368458
    Abstract: A semiconductor package includes an interposer chip having a frontside, a backside, and a corner area on the backside defined by a first corner edge and a second corner edge of the interposer chip. A die is bonded to the frontside of the interposer chip. At least one dam structure is formed on the corner area of the backside of the interposer chip. The dam structure includes an edge aligned to at least one the first corner edge and the second corner edge of the interposer chip.
    Type: Grant
    Filed: July 10, 2013
    Date of Patent: June 14, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Wu, Szu Wei Lu, Jing-Cheng Lin
  • Patent number: 9327457
    Abstract: A method for manufacturing an electronic device includes forming a resin film over a wafer, the wafer including a plurality of elements formed therein, each of the elements including a functional unit, patterning the resin film to form a plurality of frame members, each of the frame members being provided on each of the elements and surrounding the functional unit, dividing the wafer into the elements, and providing an encapsulation.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: May 3, 2016
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Kenji Uchida, Koki Hirasawa
  • Patent number: 9324579
    Abstract: Embodiments of the present invention provide metal structures for transporting or gettering materials disposed on or within a semiconductor substrate. A structure for transporting a material disposed on or within a semiconductor substrate may include a metal structure disposed within the semiconductor substrate and at a spaced distance from the material. The metal structure is configured to transport the material through the semiconductor substrate and to concentrate the material at the metal structure. The material may include a contaminant disposed within the semiconductor substrate, e.g., that originates from electronic circuitry on the substrate.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: April 26, 2016
    Assignee: The Aerospace Corporation
    Inventors: Nathan Presser, David P. Taylor
  • Patent number: 9318444
    Abstract: Devices and methods for pattern alignment are disclosed. The device includes an assembly isolation region, a seal ring region around the assembly isolation region, and a scribe line region around the seal ring region, and a plurality of die alignment marks disposed within the seal ring region that are alternately disposed adjacent the scribe line region and the assembly isolation region.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: April 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Hsien-Wei Chen
  • Patent number: 9312140
    Abstract: A semiconductor structure with low resistance conduction paths and methods of manufacture are disclosed. The method includes forming at least one low resistance conduction path on a wafer, and forming an electroplated seed layer in direct contact with the low resistance conduction path.
    Type: Grant
    Filed: May 19, 2014
    Date of Patent: April 12, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper, Eric J. White
  • Patent number: 9305887
    Abstract: A method of forming a seal ring structure includes the following steps. A substrate is provided, and the substrate includes a seal ring region. A metal stack is formed in the seal ring region. A first dielectric layer covering the metal stack is formed. A part of the first dielectric layer is removed to form an opening to expose the metal stack, and at least a side of the opening is not perpendicular to a top surface of the first dielectric layer. A conductive layer is formed to fill the opening. A second dielectric layer is formed to continuously cover the first dielectric layer and the conductive layer, and the second dielectric layer has a v-shaped surface totally overlapping the conductive layer.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: April 5, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Fan-Qing Zeng, Ching Hwa Tey, Xiaoqing Xu
  • Patent number: 9281291
    Abstract: To provide a technique capable of positioning of a semiconductor chip and a mounting substrate with high precision by improving visibility of an alignment mark. In a semiconductor chip constituting an LCD driver, a mark is formed in an alignment mark formation region over a semiconductor substrate. The mark is formed in the same layer as that of an uppermost layer wiring (third layer wiring) in an integrated circuit formation region. Then, in the lower layer of the mark and a background region surrounding the mark, patterns are formed. At this time, the pattern P1a is formed in the same layer as that of a second layer wiring and the pattern P1b is formed in the same layer as that of a first layer wiring. Further, the pattern P2 is formed in the same layer as that of a gate electrode, and the pattern P3 is formed in the same layer as that of an element isolation region.
    Type: Grant
    Filed: January 5, 2015
    Date of Patent: March 8, 2016
    Assignee: Renesas Electronics Corporation
    Inventors: Masami Koketsu, Toshiaki Sawada
  • Patent number: 9276036
    Abstract: If separations between photoelectric conversion elements are different from each other, charge leaking into adjacent photoelectric conversion elements varies. A photoelectric conversion apparatus of the present invention includes a first semiconductor region that can be potential barriers against signal charge, between first and second photoelectric conversion elements. Further, the apparatus includes a second semiconductor region that has the same depth as the depth of the first semiconductor region and a width narrower than the width of the first semiconductor region and can be potential barriers against the signal charge, between the first and a third photoelectric conversion element. Moreover, the apparatus includes a third semiconductor region that can be potential barriers against the signal charge under the first semiconductor region and the second semiconductor region.
    Type: Grant
    Filed: September 3, 2013
    Date of Patent: March 1, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yu Arishima, Takashi Matsuda, Toru Koizumi
  • Patent number: 9275903
    Abstract: A method of manufacturing a semiconductor device include preparing an initial substrate including an edge region and a central region in which circuit patterns are formed, forming a reforming region in the edge region of the initial substrate, grinding the initial substrate to form a substrate, and cutting the substrate to form a semiconductor chip including each of the circuit patterns. A crystal structure of the reforming region is different from that of the initial substrate.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: March 1, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byoung-Soo Kwak, Youngsu Kim, Sangwook Park, Taeje Cho
  • Patent number: 9264832
    Abstract: A method to protect an acoustic port of a microelectromechanical system (MEMS) microphone is provided. The method includes: providing the MEMS microphone; and forming a protection film, on the acoustic port of the MEMS microphone. The protection film has a porous region over the acoustic port to receive an acoustic signal but resist at least an intruding material. The protection film can at least endure a processing temperature of solder flow.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: February 16, 2016
    Assignee: Solid State System Co., Ltd.
    Inventors: Cheng-Wei Tsai, Chien-Hsing Lee, Jhyy-Cheng Liou
  • Patent number: 9245801
    Abstract: A wafer is disclosed. The wafer comprises a plurality of chips and a plurality of kerfs. A kerf of the plurality of kerfs separates one chip from another chip. The kerf comprises a crack stop barrier.
    Type: Grant
    Filed: February 19, 2014
    Date of Patent: January 26, 2016
    Assignee: Infineon Technologies AG
    Inventor: Sylvia Baumann Winter
  • Patent number: 9245804
    Abstract: Consistent with an example embodiment, there is a semiconductor device, with an active device having a front-side surface and a backside surface; the semiconductor device of an overall thickness, comprises an active device with circuitry defined on the front-side surface, the front-side surface having an area. The back-side of the active device has recesses f a partial depth of the active device thickness and a width of about the partial depth, the recesses surrounding the active device at vertical edges. There is a protective layer of a thickness on to the backside surface of the active device, the protective material having an area greater than the first area and having a stand-off distance. The vertical edges have the protective layer filling the recesses flush with the vertical edges. A stand-off distance of the protective material is a function of the semiconductor device thickness and the tangent of an angle (?) of tooling impact upon a vertical face the semiconductor device.
    Type: Grant
    Filed: August 14, 2013
    Date of Patent: January 26, 2016
    Assignee: NXP B.V.
    Inventors: Christian Zenz, Hartmut Buenning, Leonardus Antonius Elisabeth Van Gemert, Tonny Kamphuis, Sascha Moeller
  • Patent number: 9240386
    Abstract: A semiconductor device includes: a substrate in which a product region and scribe regions are defined; a 1st insulation film formed above the substrate; a metal film in the 1st insulation film, disposed within the scribe regions in such a manner as to surround the product region; a 2nd insulation film formed on the 1st insulation film and the metal film; a 1st groove disposed more inside than the metal film in such a manner as to surround the product region, and reaching from a top surface of the 2nd insulation film to a position deeper than a top surface of the metal film; and a 2nd groove disposed more outside than the metal film in such a manner as to surround the metal film, and reaching from the top surface of the 2nd insulation film to a position deeper than the top surface of the metal film.
    Type: Grant
    Filed: January 29, 2015
    Date of Patent: January 19, 2016
    Assignee: FUJITSU SEMICONDUCTOR LIMITED
    Inventor: Hajime Wada
  • Patent number: 9240441
    Abstract: Semiconductor devices are provided. Each of the semiconductor devices may include a plurality of electrodes. Moreover, each of the semiconductor devices may include a supporting pattern connected to sidewalls of the plurality of electrodes. Related methods of forming semiconductor devices are also provided. For example, the methods may include forming the supporting pattern before forming the plurality of electrodes.
    Type: Grant
    Filed: August 14, 2013
    Date of Patent: January 19, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Junho Yoon, Gyungjin Min, Jaehong Park, Yongmoon Jang, Je-Woo Han
  • Patent number: 9236351
    Abstract: A semiconductor device includes a carrier, several dies disposed on a surface of the carrier and several scribing lines defined on the surface of the carrier. The scribing lines include several continuous lines along a first direction and several discontinuous lines along a second direction. Further, a method of dies singulation includes providing a carrier, disposing several dies on a surface of the carrier according to several scribing lines including several continuous lines along a first direction and several discontinuous lines along a second direction, cutting the carrier according to the continuous lines along the first direction, and cutting the carrier according to the discontinuous lines along the second direction.
    Type: Grant
    Filed: October 9, 2013
    Date of Patent: January 12, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Bor-Ping Jang, Chien Ling Hwang, Hsin-Hung Liao, Yeong-Jyh Lin
  • Patent number: 9236357
    Abstract: External connection conductors are arranged on a back surface of a base material, and wiring conductors are arranged on a front surface. An insulating layer is provided on surfaces of the wiring conductors. Component mounting conductors are provided on a surface of the insulating layer. The component mounting conductor and the wiring conductor are electrically coupled to each other, and the component mounting conductor and the wiring conductor are electrically coupled to each other. The wiring conductor and the external connection conductor are electrically coupled by a conductor film on an inner wall surface of a hole provided between forming areas of the component mounting conductors. The wiring conductor and the external connection conductor are electrically coupled by a conductor film on an inner wall surface of a hole provided between the forming areas of the component mounting conductors.
    Type: Grant
    Filed: December 1, 2014
    Date of Patent: January 12, 2016
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Masakazu Fukumitsu, Yoshiharu Yoshii
  • Patent number: 9230921
    Abstract: A self-healing crack stop structure and methods of manufacture are disclosed herein. The structure comprises a crack stop structure formed in one or more dielectric layers and surrounding an active region of an integrated circuit chip. The crack stop comprises self healing material which, upon propagation of a crack, is structured to seal the crack and prevent further propagation of the crack.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: January 5, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Stephen P. Ayotte, Alissa R. Cote, Kendra A. Lyons, John C. Malinowski, Benjamin J. Pierce
  • Patent number: 9230913
    Abstract: Structures and methods to minimize parasitic capacitance in a circuit structure are provided. The structure may include a substrate supporting one or more circuits and one or more metallization layers above the substrate. The metallization layer includes a conductive pattern defined by an array of conductive fill elements, where the conductive fill elements of the array are discrete, electrically isolated elements sized to satisfy, at least in part, a pre-defined minimum area-occupation ratio for a chemical-mechanical polishing of the metallization layer, and to minimize parasitic capacitance within the metallization layer, as well as minimize parasitic capacitance between the metallization layer and the circuit, and if multiple metallization layers are present, between the layers.
    Type: Grant
    Filed: August 12, 2014
    Date of Patent: January 5, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Biswanath Senapati, Jagar Singh, Karthik Chandrasekaran
  • Patent number: 9209137
    Abstract: A semiconductor circuit design includes an outer seal-ring and an inner seal-ring for each sub-section of the design that may potentially be cut into separate die. The use of multiple seal-rings permits a single circuit design and fabrication run to be used to support flexibly packaging different product releases having different numbers of integrated circuit blocks per packaged unit.
    Type: Grant
    Filed: July 16, 2014
    Date of Patent: December 8, 2015
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Duc Anh Vu, Jayalakshmana Kumar Pragasam, Vijay Meduri, Seyed Attaran, Michael J. Grubisich, Syed Ahmed, Aniket Singh
  • Patent number: 9202801
    Abstract: Thin substrates and mold compound handling is described using an electrostatic-chucking carrier. In one example, a first part of a plurality of silicon chip packages is formed on a front side of a silicon substrate wafer at a first processing station. An a carrier wafer of an electrostatic chuck is attached over the front side of the silicon wafer. The substrate wafer is moved to a second processing station. A second part of the plurality of silicon chip packages are formed on a back side of the silicon wafer at a second processing station. The electrostatic chuck is then released.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: December 1, 2015
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Chin Hock Toh, Uday Mahajan, Aksel Kitowski
  • Patent number: 9196532
    Abstract: A method includes forming an electrical connector over a substrate of a wafer, and molding a polymer layer, with at least a portion of the electrical connector molded in the polymer layer. A first sawing step is performed to form a trench in the polymer layer. After the first sawing step, a second sawing step is performed to saw the wafer into a plurality of dies.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: November 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Wei Tu, Yian-Liang Kuo, Wen-Hsiung Lu, Hsien-Wei Chen, Tsung-Fu Tsai
  • Patent number: 9190359
    Abstract: A scribe line structure between die regions is disclosed. The scribe line structure includes a dielectric layer disposed on a substrate; and a plurality of metal structures arranged up-and-down in the dielectric layer on the substrate, the plurality of metal structures comprising metal layers and metal vias, wherein the metal vias are disposed on the dicing path and regions outside the dicing path and the metal vias on the dicing path have a lower metal density than the metal vias not on the dicing path.
    Type: Grant
    Filed: November 12, 2013
    Date of Patent: November 17, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ping-Chang Wu, Tsung-Shu Lin
  • Patent number: 9171759
    Abstract: A semiconductor wafer having a plurality of chip die areas arranged on a wafer in an array, each chip die area including a seal ring area with one or more first sets of polygonal structures. The wafer further comprises scribe line areas between the chip die areas, the scribe line areas including one or more second sets of polygonal structures. The presence of proximate polygonal structures between the scribe line and seal ring areas balance stresses between the chip die areas during wafer dicing operation.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: October 27, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Pin Cheng, Jung-Liang Chien, Chih-Kang Chao, Chi-Cherng Jeng, Hsin-Chi Chen, Ying-Lang Wang