Abstract: A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a substrate, a semiconductor element, a package body and a conductive part. The substrate has an electrical contact. The semiconductor element is disposed on the substrate. The package body covers the semiconductor element and defines a through hole from which the electrical contact is exposed. Wherein, the package body includes a resin body and a plurality of fiber layers. The fiber layers are disposed in the resin body and define a plurality of fiber apertures which is arranged as an array. The conductive part is electrically connected to the substrate through the through hole.

Abstract: A semiconductor device supplying a charging current to a charging-target element includes: a semiconductor layer of a first conductivity type; a first semiconductor region of a second conductivity type formed on a main surface of the semiconductor layer and having a first node coupled to a first electrode of the charging-target element and a second node coupled to a power supply potential node supplied with a power supply voltage; a second semiconductor region of the first conductivity type formed in a surface of the first semiconductor region at a distance from the semiconductor layer and having a third node coupled to the power supply potential node; and a charge carrier drift restriction portion restricting drift of charge carrier from the third node to the semiconductor layer.

Abstract: A method of forming integrated circuits includes laminating a patterned film including an opening onto a wafer, wherein a bottom die in the wafer is exposed through the opening. A top die is placed into the opening. The top die fits into the opening with substantially no gap between the patterned film and the top die. The top die is then bonded onto the bottom die, followed by curing the patterned film.

Abstract: A trimmable resistor for use in an integrated circuit is trimmed using a heater. The heater is selectively coupled to a voltage source. The application of voltage to the heater causes the heater temperature to increase and produce heat. The heat permeates through a thermal separator to the trimmable resistor. The resistance of the trimmable resistor is permanently increased or decreased when the temperature of the resistor is increased to a value within a particular range of temperatures.

Abstract: A trimmable resistor for use in an integrated circuit is trimmed using a heater. The heater is selectively coupled to a voltage source. The application of voltage to the heater causes the heater temperature to increase and produce heat. The heat permeates through a thermal separator to the trimmable resistor. The resistance of the trimmable resistor is permanently increased or decreased when the temperature of the resistor is increased to a value within a particular range of temperatures.

Abstract: The Examiner objected to the abstract of the disclosure because it contains the phrase “comprising.” The Abstract does not include the phrase “comprising,” however, please amend the abstract as follows: An integrated circuit having a semiconductor component arrangement and production method is disclosed. The integrated circuit as described includes an oxide layer region is provided as a protection against oxidation in the edge region on the surface region of an underlying semiconductor material region.

Abstract: A semiconductor device has a substrate, an insulating interlayer, an interconnect as one example of an electro-conductive pattern, a through-electrode, and a bump as one example of a connection terminal, wherein the insulating interlayer is positioned up above the surface of the substrate, the interconnect is positioned on the surface of the insulating interlayer, the through-electrode extends through the substrate and the insulating interlayer, from the back surface of the former to the surface of the latter, one end of which is connected to the interconnect, and the bump is provided on the back surface side of the substrate, and connected to the other end of the through-electrode.

Abstract: The present invention pertains to a high-voltage MOS device. The high-voltage MOS device includes a substrate, a first well, a first field oxide layer enclosing a drain region, a second field oxide enclosing a source region, and a third field oxide layer encompassing the first and second field layers with a device isolation region in between. A channel region is situated between the first and second field oxide layers. A gate oxide layer is provided on the channel region. A gate is stacked on the gate oxide layer. A device isolation diffusion layer is provided in the device isolation region.

Abstract: A semiconductor device has a channel termination region for using a trench 30 filled with field oxide 32 and a channel stopper ring 18 which extends from the first major surface 8 through p-well 6 along the outer edge 36 of the trench 30, under the trench and extends passed the inner edge 34 of the trench. This asymmetric channel stopper ring provides an effective termination to the channel 10 which can extend as far as the trench 30.

Abstract: An interconnect structure of the single or dual damascene type and a method of forming the same, which substantially reduces the electromigration problem that is exhibited by prior art interconnect structures, are provided. In accordance with the present invention, a grain growth promotion layer, which promotes the formation of a conductive region within the interconnect structure that has a bamboo microstructure and an average grain size of larger than 0.05 microns is utilized. The inventive structure has improved performance and reliability.

Abstract: Affords a holder for use in semiconductor or liquid-crystal manufacturing devices—as well as semiconductor or liquid-crystal manufacturing devices in which the holder is installed—in which temperature uniformity in the processed-object retaining face is heightened. Configuring the holder with, furnished atop a ceramic susceptor, a composite of a ceramic and a metal improves the temperature uniformity in the holder's processed-object retaining face and makes for curtailing the generation of particulates and other contaminants. In addition, putting a coating on at least the retaining face improves the durability of the holder. Installing a holder of this sort in a semiconductor manufacturing device or a liquid-crystal manufacturing device contributes to making available semiconductor or liquid-crystal manufacturing devices whose productivity and throughput are excellent.

Abstract: A charge coupled device for detecting electromagnetic and particle radiation is described. The device includes a high-resistivity semiconductor substrate, buried channel regions, gate electrode circuitry, and amplifier circuitry. For good spatial resolution and high performance, especially when operated at high voltages with full or nearly full depletion of the substrate, the device can also include a guard ring positioned near channel regions, a biased channel stop, and a biased polysilicon electrode over the channel stop.

Abstract: A packaged IC includes an IC die with signal and signal complement traces positioned relative to each other to maximize broadside coupling for a matching impedance. The signal and signal complement traces are electrically connected to transmission or receive channels of the IC die. Use of a broadside coupled trace configuration alleviates routing congestion in an IC package and permits an IC to accommodate a greater number of channels within a given surface area than is possible under the prior art.

Abstract: A semiconductor substrate having a silicon layer is provided. In one embodiment, the substrate is a silicon-on-insulator (SOI) substrate having an oxide layer underlying the silicon layer. An amorphous or polycrystalline silicon germanium layer is formed overlying the silicon layer. Alternatively, germanium is implanted into a top portion of the silicon layer to form an amorphous silicon germanium layer. The silicon germanium layer is then oxidized to convert the silicon germanium layer into a silicon dioxide layer and to convert at least a portion of the silicon layer into germanium-rich silicon. The silicon dioxide layer is then removed prior to forming transistors using the germanium-rich silicon. In one embodiment, the germanium-rich silicon is selectively formed using a patterned masking layer over the silicon layer and under the silicon germanium layer. Alternatively, isolation regions may be used to define local regions of the substrate in which the germanium-rich silicon is formed.

Abstract: A semiconductor device includes a circuit board formed of an insulator substrate and having conductor patterns on both surfaces thereof, a semiconductor chip bonded to the circuit board with one of the conductor patterns therebetween, and a radiator base bonded to the circuit board with a solder layer through the other of the conductor patterns therebetween for conducting heat generated in the semiconductor chip to an outside device. The radiator base is formed of a material having anisotropic thermal conductivity so that the radiator base has thermal conductivity in a direction perpendicular to a bonding plane between the radiator base and the circuit board higher than that along the bonding plane. The radiator base has thermal expansion coefficient along a bonding plane with the circuit board different from that along the bonding plate of the insulator substrate by a predetermined value.

Abstract: A dynamic random access memory (DRAM) structure and a fabricating process thereof are provided. In the fabricating process, a channel region is formed with a doped region having identical conductivity as the substrate in a section adjacent to an isolation structure. The doped region is formed in a self-aligned process by conducting a tilt implantation implanting ions into the substrate through the upper portion of the capacitor trench adjacent to the channel region after forming the trench but before the definition of the active region.

Abstract: An isolation trench in a semiconductor includes a first isolation trench portion having a first depth and having a first sidewall intersecting a surface of the semiconductor at a first angle. A second isolation trench portion extends within and below the first isolation trench portion. The second isolation trench portion has a second depth and includes a second sidewall. The second sidewall intersects the first sidewall at an angle with respect to the surface that is greater than the first angle. A dielectric material fills the first and second isolation trench portions.

Abstract: A high-voltage diode and a method for producing the high-voltage diode involve only three masking steps. Only three masking steps are required due to the use of adjustment structures and of a chipping stopper with an edge passivation containing a-C:H or a-Si. In this manner, the high-voltage diode is inexpensive to manufacture. The diode has a rating for reverse voltages of, in particular, above about 400 V and preferably above about 500 V, and can be fabricated with the least possible process complexity and thus a small number of photo technologies and, in the edge region, can readily be equipped with a channel stopper for avoiding leakage currents and a chipping stopper for limiting the extent of saving defects.

Abstract: A gate electrode including a polycrystalline silicon film and a sidewall insulating film are formed on a semiconductor substrate with a gate insulating film therebetween. The semiconductor substrate provided with the gate electrode is brought into contact with a predetermined plating solution to deposit a cobalt film on the semiconductor substrate by electroless plating. Then, a heat treatment is effect to cause a reaction between the silicon in the gate electrode and the cobalt as well as a reaction between the silicon in the semiconductor substrate and the cobalt to form a cobalt silicide film. Thereafter, the unreacted cobalt film is removed. Thereby, damage to the semiconductor substrate can be suppressed, and salicide process can be simplified.

Abstract: The present invention provides a semiconductor device capable of preventing deterioration in carrier mobility of a semiconductor layer, which is a quality of the interface between the semiconductor layer and an insulating layer, and a method of manufacturing the semiconductor device. In the semiconductor device, an interface layer is provided between a semiconductor layer made of active polycrystalline silicon and an insulating layer made of silicon oxide. The nitrogen element in silicon nitride diffuses into the semiconductor layer made of active polycrystalline silicon to compensate for lattice strain of the active polycrystalline silicon film, to satisfy the desired quality of the interface between the semiconductor layer and the insulating layer.

Abstract: An improved liquid crystal display apparatus for low power consumption has a thin film transistor as a switching device. The thin film transistor has a gate insulating layer of laminated film of silicon nitride and silicon oxide, a semiconductor layer, a drain electrode and a source electrode, and supplementary insulating layer, laminated in order on the gate electrode. The supplementary insulating layer includes a portion of silicon oxide formed by oxidizing a surface of the semiconductor layer.

Abstract: A major object of the present invention is to provide an improved semiconductor device so as to be able to reduce gate electric field concentration at a channel edge, suppress decrease in the threshold during MOSFET operation and reduce the leakage current. A gate insulation film is formed on a semiconductor substrate. A gate electrode is formed on the semiconductor substrate with the gate insulation film therebetween. The dielectric constant of the gate insulation film is not uniform in the surface.

Abstract: To provide a semiconductor apparatus that secures high ESD protection capability and yet reduces leak current. Cut sections 64-1 and 64-2 are provided in end sections of a second edge 62 of a drain region 22. When a distance between a first edge 60 of a source region 20 and the second edge 62 in an intermediate area is defined as L1, a distance between the first edge 60 and end edges 52-1 and 52-2 of a channel stopper non-implanted region 50 is defined as L1, a relation of L2? L1 is established. By providing the channel stopper non-implanted region 50, the ESD protection capability is improved. Also, by providing the cut sections 64-1 and 64-2 in a manner to satisfy the relation that is L2 is not less than L1, leak current is reduced. The source region 20 may also be provided with a cut section.

Abstract: A solid state image sensing device comprises a cell area, located at a semiconductor substrate, including photoelectric conversion portions and charge transfer portions and a peripheral circuit area formed around the cell area located at the semiconductor substrate. The peripheral circuit area includes a first p+-type semiconductor region and an insulating film with a relatively large thickness formed on the first p+-type semiconductor region. The cell area further includes a second p+-type semiconductor region and an insulating film with a relatively small thickness formed on the second p+-type semiconductor region. The majority of the insulating film with the relatively large thickness is formed by means of a CVD process.

Abstract: A silicon chip built-in inductor structure. The structure at least includes a substrate, a plurality of active devices on the substrate, a dielectric layer with a planarized upper surface and an inductor device. The substrate can be divided into an active device region and a region containing grid-like field oxide devices. The grid-like field oxide region has a plurality of field oxide layers, a plurality of first-type-ion-doped regions underneath the field oxide layers and a plurality of second-type-ion-doped region in the substrate between the various field oxide layers. A plurality of junction regions are formed between the first-type-ion-doped regions and the second-type-ion-doped regions. The junction regions impede the flow of an eddy current along a prescribed direction. A dielectric layer is formed over the substrate covering the active devices and the field oxide devices. The inductor device is formed on the dielectric layer above the field oxide devices.

Abstract: A semiconductor device, includes a semiconductor substrate having a first surface and a second surface opposite the first surface, and having a piercing hole piercing there-through from the first surface to the second surface, an insulating film formed on the first surface of the semiconductor substrate having the piercing hole extended there-through and a piercing electrode formed in the piercing hole and extending from the insulating surface to the second surface, wherein the piercing hole has a first diameter in the insulating film and a second diameter in the semiconductor substrate which is wider than the first diameter, the piercing electrode has a substantially same diameter as the first diameter along a whole length thereof, and an insulating film sleeve lies between the piercing electrode and an inside wall of the piercing hole in the semiconductor substrate.

Abstract: A high voltage integrated circuit is provided that includes a first region of first conductivity type; a second region of second conductivity type formed in a first major surface of the first region; a third region of first conductivity type formed in a selected area of a surface of the second region; first source region and first drain region of the first conductivity type formed in the second region, apart from the third region; a first gate electrode formed on a surface of the second region between the first source region and first drain region, through an insulating film; second source region and second drain region of second conductivity type formed in a surface of the third region; and a second gate electrode formed on a surface of the third region between the second source region and the second drain region, through an insulating film.

Abstract: Boron ions are implanted in the boundary of the field oxide film and P type well, and a first high energy boron implantation P layer is formed. Further boron ions are implanted near the center of the field oxide film in the thickness direction, and a second high energy boron implantation P layer is formed. The first and second high energy boron implantation P layers are spaced away from the N type diffusion layer.

Abstract: Boron ions are implanted in the boundary of the field oxide film and P type well, and a first high energy boron implantation P layer is formed. Further boron ions are implanted near the center of the field oxide film in the thickness direction, and a second high energy boron implantation P layer is formed. The first and second high energy boron implantation P layers are formed away from the N type diffusion layer.

Abstract: The horizontal surface area required to contact semiconductor devices, in integrated circuits fabricated with trench isolation, is minimized without degrading contact resistance by utilizing the vertical surface area of the trench sidewall. A trench isolation region (40) is formed within the semiconductor substrate (12). A doped region (74, 96) is then formed such that it abuts the trench sidewall (24). A portion (56, 110) of the trench sidewall (24), abutting the doped region (74, 96), is then exposed by forming a recess (55, 112) within the trench isolation region (40). A conductive member (66, 114, 118) is then formed such that it is electrically coupled to the doped region (74, 96) along the exposed trench sidewall, as well as along the major surface (13) of the semiconductor substrate (12), and results in the formation of a low resistance contact structure.

Abstract: A semiconductor photomask set for producing wafer alignment accuracy in a semiconductor fabrication process. The photomask set produces an alignment mark that is accurate for subsequent fabrication after undergoing a dual field oxide (FOX) fabrication process. Prior arts methods have traditionally covered the alignment marks with layers of oxide material.

Abstract: The provision of an isolation gate connecting unassociated active areas of adjacent transistors formed in a semiconductor substrate provides effective isolation of the adjacent transistors with no additional process steps required. The isolation gate is tied to a reference to ensure that a channel between the unassociated active areas is not formed, and effective isolation is provided. The adjacent transistors are cross coupled to form sense amplifiers for dynamic random access memory devices.

Abstract: A bow resistant semiconductor package includes a semiconductor die, a leadframe segment and a plastic body. The leadframe segment includes lead fingers attached and wire bonded to the die, and opposing volume equalizing members proximate to lateral edges of the die. The volume equalizing members are downset from a first plane proximate to a face of the die, to a second plane proximate to a center line of the package. In addition, the volume equalizing members are configured to rigidify the package, and to substantially equalize the volumes of molding compound on either side of the package center line and leadframe segment. The equal volumes of molding compound reduce thermo-mechanical stresses enerated during cooling of the molding compound, and reduce package bow. With reduced package bow, a planarity of the terminal leads on the package is maintained.

Abstract: In a method for manufacturing a semiconductor device, an anti-oxidation layer is formed on a semiconductor substrate of a first conductivity type. Then, a first photoresist pattern layer for defining an active area is formed on the anti-oxidation layer, and the anti-oxidation layer is etched by using the first photoresist pattern layer as a mask. Then, a second photoresist pattern layer is formed on a part of the first photoresist pattern layer. In this case, a width of the second photoresist pattern layer is larger than a width of the part of the first photoresist pattern layer. Then, ions of the first conductivity type are introduced into the semiconductor substrate by using the first and second photoresist pattern layers as a mask. Then, the semiconductor substrate is thermally oxidized by using the anti-oxidation layer as a mask to form a semiconductor oxide layer while activating the ions to form a channel stopper region below the semiconductor oxide layer.

Abstract: A high voltage integrated circuit is provided that includes a first region of first conductivity type; a second region of second conductivity type formed in a first major surface of the first region; a third region of first conductivity type formed in a selected area of a surface of the second region; first source region and first drain region of the first conductivity type formed in the second region, apart from the third region; a first gate electrode formed on a surface of the second region between the first source region and first drain region, through an insulating film; second source region and second drain region of second conductivity type formed in a surface of the third region; and a second gate electrode formed on a surface of the third region between the second source region and the second drain region, through an insulating film.

Abstract: A semiconductor integrated circuit device, and method of manufacturing the same, having a conventional-type lead frame with the die paddle removed. In particular, the die paddle is replaced with a section of tape that is supported by the ends of the lead fingers. The semiconductor die is attached to the tape so that it may be wire bonded to the lead fingers. The tape contains at least one slot to allow for expansion and/or contraction of the tape due to various temperatures experienced during the manufacturing process so that the tape does not wrinkle or warp to alter the position of the die.

Abstract: A method is provided for forming an isolation structure at a semiconducting surface of a body, and the isolation structure formed thereby. A masking layer is formed over selected regions of the substrate surface; the masking layer preferably comprising a nitride layer overlying a pad oxide layer. The masking layer is patterned and etched to form openings exposing selected regions of the substrate surface. Recesses are formed into the substrate in the openings. Preferably a portion of the pad oxide layer is isotropically etched under the nitride layer forming an undercut region. An etch stop layer is formed over the substrate in the recesses filling in the undercut along the sidewalls. A second masking layer, preferably of nitride is formed over the etch stop layer and anisotropically etched to form nitride sidewalls in the openings. The etch stop layer may be etched away from the horizontal surfaces.

Abstract: A method is provided for a planar surface of a semiconductor integrated circuit, and an integrated circuit formed according to the same. A conductive layer is formed over a substrate. A silicon nitride layer is formed over the conductive layer. A photoresist layer is then formed and patterned over the silicon nitride layer. The silicon nitride layer and the conductive layer are etched to form an opening exposing a portion of the substrate. The photoresist layer is then removed. The exposed substrate and a portion of the conductive layer exposed along the sidewalls in the opening are oxidized. An planarizing insulating layer such as spin-on-glass is formed over the silicon nitride layer and in the opening. The insulating layer is etched back to expose the silicon nitride wherein an upper surface of the insulating layer is level with an upper surface of the conductive layer. The silicon nitride layer is then removed. A planar silicide layer is then formed over the conductive layer.

Abstract: Connections between implanted regions in a semiconductor substrate, such as the sources or drains of adjacent transistors, are made by buried conductive implants rather than upper level metalizations. The presence or absence of a connection between two implanted regions is camouflaged by implanting a conductive buried layer of the same doping conductivity as the implanted regions when a connection is desired, and a field implant of opposite conductivity to the implanted regions when no connection is desired, and forming steps into the substrate at the boundaries of the buried layer or field implant that mask the steps formed between different conductivity regions during a selective etch by a reverse engineer. The masking steps are preferably formed by field oxide layers that terminate at the boundaries of the buried layers and field implants.

Abstract: A method is provided for a planar surface of a semiconductor integrated circuit, and an integrated circuit formed according to the same. A conductive layer is formed over a substrate. A silicon nitride layer is formed over the conductive layer. A photoresist layer is then formed and patterned over the silicon nitride layer. The silicon nitride layer and the conductive layer are etched to form an opening exposing a portion of the substrate. The photoresist layer is then removed. The exposed substrate and a portion of the conductive layer exposed along the sidewalls in the opening are oxidized. An planarizing insulating layer such as spin-on-glass is formed over the silicon nitride layer and in the opening. The insulating layer is etched back to expose the silicon nitride wherein an upper surface of the insulating layer is level with an upper surface of the conductive layer. The silicon nitride layer is then removed. A planar silicide layer is then formed over the conductive layer.

Abstract: An integrated circuit comprises a plurality of interconnected semiconductor devices, at least one the interconnected devices being dielectrically isolated from the substrate, and at least one other of the interconnected devices being junction isolated from the substrate. In a preferred embodiment, at least one of the junction isolated devices comprises an ESD protection circuit. The ESD protection circuit, which preferably includes a zener diode and more preferably further includes a bipolar transistor, a diode, and a resistor, is formed in a trench-isolated island comprising a semiconductor layer of a conductivity type opposite to that of the substrate. A heavily doped buried semiconductor region of the same conductivity type as the substrate is formed in the island semiconductor layer adjacent to the substrate.

Abstract: The resin sealing layer enclosing the device is biased to a low voltage by means of an anchoring structure formed close to high-voltage contact pads. The anchoring structure is formed by a metal region deposited on the surface of the device and contacting the resin layer, and by a deep region extending from the surface of the device, beneath the metal region, to the substrate. The electrical field in the resin layer is confined between the high-voltage pads and the anchoring structure and prevented from generating polarity inversions in the semiconductor material at the low-voltage contact pads or any other points at which the resin layer contacts the body of semiconductor material.

Abstract: A semiconductor integrated circuit device, and method of manufacturing the same, having a conventional-type lead frame with the die paddle removed. In particular, the die paddle is replaced with a section of tape that is supported by the ends of the lead fingers. The semiconductor die is attached to the tape so that it may be wire bonded to the lead fingers. The tape contains at least one slot to allow for expansion and/or contraction of the tape due to various temperatures experienced during the manufacturing process so that the tape does not wrinkle or warp to alter the position of the die.

Abstract: First and second flexible interconnect structures are provided and each includes a flexible interconnect layer and a chip with a surface having chip pads attached to the flexible interconnect layer. Molding material is inserted between the flexible interconnect layers for encapsulating the respective chips. Vias in the flexible interconnect layers are formed to extend to selected chip pads, and a pattern of electrical conductors is applied which extends over the flexible interconnect layers and into the vias to couple selected ones of the chip pads.

Abstract: A semiconductor integrated circuit device comprises an input terminal for inputting a voltage, an output terminal for outputting a voltage, a MOS driver disposed between the input terminal and the output terminal for adjusting the voltage of the input terminal and transmitting it to the output terminal, and a MOS control circuit for controlling the MOS driver and feeding back voltage information of the output terminal. Each of the MOS driver and the MOS control circuit has a MOS transistor formed on a semiconductor substrate, and each MOS transistor has a source region, a drain region, a channel region disposed between the source region and the drain region, a gate insulating film disposed over the channel region, and a gate electrode disposed over the gate insulating film. The gate insulating films of the MOS transistors have different film thicknesses.

Abstract: A process for fabricating MOSFET devices, in which a denuded zone in silicon has been created during the normal process sequence, has been developed. In order to avoid the formation of deleterious oxygen precipitates, prior to the creation of the denuded zone, low temperature processing had to be used. Low temperature insulator depositions were used for the alignment mark formation, as well as for the fill for the field oxide regions. Subsequently, high temperature well formation activation anneals, resulted in the creation of the denuded zone, and thus removed the low temperature restriction for the remaining processing steps.

Abstract: A semiconductor device includes a semiconductor substrate, element isolation films, channel stop diffusion layers, and elements formed on the semiconductor substrate in spaced-apart relation from each other by means of the element isolation films. The element has a floating gate. The element isolation film has such a film thickness of <t> that the conducting type of a portion of the semiconductor substrate under the element isolation film, which is disposed at a position where a control gate is formed on the upper surface of the element isolation film by way of the floating gate, is not inverted, and that the conducting type of a portion of the semiconductor substrate under the element isolation film, which is disposed at a position where the control gate is directly formed on the upper surface of the element isolation film, is inverted. With this arrangement, the elements are separated from each other by each element isolation film having a thinner thickness of <t>.

Abstract: Region forming steps or interconnect-forming steps through which low voltage CMOS devices are formed in a semiconductor wafer are also employed to simultaneously form one or more regions or layers at selected sites of a substrate where high voltage devices are to be formed. Such selective modification of an already existing mask set designed for low voltage CMOS typography allows additional doping of the substrate or provision of further overlay material to accommodate the effects of high voltage operation of selected areas of the wafer and thereby effectively performs precursor tailoring or modification of those portions of the wafer where a high voltage condition will be encountered.

Abstract: A photo sensor comprises a semiconductor substrate, a bipolar photo transistor having an emitter region, a base region and a collector region which is formed in the surface region of the semiconductor substrate, a silicon dioxide formed on the bipolar phototransistor, and a film having a smaller diffusion coefficient of hydrogen than the silicon dioxide formed all over the silicon dioxide.

Abstract: A P-type substrate is immersed in a solution of potassium hydroxide (KOH) which etches exposed portions of the substrate to form trenches with sidewalls at an angle of 54.7 degrees with respect to the top surface of the substrate. A vertical boron implant is then conducted which implants boron ions into the angled sidewalls of the trenches. A layer of oxide is then deposited over the substrate surface to fill the trenches approximately flush with the surface of the substrate. NMOS transistors may then be formed in the islands surrounded by the trenches so as to be isolated from other NMOS devices. The boron doping of the sidewalls prevents the inversion of the sidewalls due to any charged contaminants in the deposited oxide. This avoids parasitic leakage currents between the N-type source and drain regions of the NMOS transistors which abut the sidewalls of the trenches.