With Textured Surface Patents (Class 257/739)
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Patent number: 11605933Abstract: A laser structure may include a substrate, an active region arranged on the substrate, and a waveguide arranged on the active region. The waveguide may include a first surface and a second surface that join to form a first angle relative to the active region. A material may be deposited on the first surface and the second surface of the waveguide.Type: GrantFiled: November 8, 2019Date of Patent: March 14, 2023Assignee: MACOM Technology Solutions Holdings, Inc.Inventors: Ali Badar Alamin Dow, Jason Daniel Bowker, Malcolm R. Green
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Patent number: 11309529Abstract: A method of making an OLED device includes providing a first undercut lift-off structure over the device substrate having a first array of bottom electrodes. Next, one or more first organic EL medium layers including at least a first light-emitting layer are deposited over the first undercut lift-off structure and over the first array of bottom electrodes. The first undercut lift-off structure and overlying first organic EL medium layer(s) are removed by treatment with a first lift-off agent comprising a fluorinated solvent to form a first intermediate structure. The process is repeated using a second undercut lift-off structure to deposit one or more second organic EL medium layers over a second array of bottom electrodes. After removal of the second undercut lift-off structure, a common top electrode is provided in electrical contact with the first and second organic EL medium layers.Type: GrantFiled: October 28, 2020Date of Patent: April 19, 2022Assignee: Orthogonal, Inc.Inventors: John Andrew DeFranco, Terrence Robert O'Toole, Frank Xavier Byrne, Diane Carol Freeman
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Patent number: 11233035Abstract: A package structure includes a first die, a die stack structure, a support structure and an insulation structure. The die stack structure is bonded to the first die. The support structure is disposed on the die stack structure. A width of the support structure is larger than a width of the die stack structure and less than a width of the first die. The insulation structure at least laterally wraps around the die stack structure and the support structure.Type: GrantFiled: May 28, 2020Date of Patent: January 25, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Sung-Feng Yeh, Tzuan-Horng Liu, Chao-Wen Shih
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Patent number: 11111132Abstract: An micro electro mechanical sensor comprising: a substrate; and a sensor element movably mounted to a first side of said substrate; wherein a second side of said substrate has a pattern formed in relief thereon. The pattern formed in relief on the second side of the substrate provides a reduced surface area for contact with the die bond layer. The reduced surface area reduces the amount of stress that is transmitted from the die bond layer to the substrate (and hence reduces the amount of transmitted stress reaching the MEMS sensor element). Because the substrate relief pattern provides a certain amount of stress decoupling, the die bond layer does not need to decouple the stress to the same extent as in previous designs. Therefore a thinner die bond layer can be used, which in turn allows the whole package to be slightly thinner.Type: GrantFiled: October 13, 2017Date of Patent: September 7, 2021Assignee: ATLANTIC INERTIAL SYSTEMS LIMITEDInventors: Michael Durston, Kevin Townsend
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Patent number: 11076513Abstract: A circuit module 2 comprises: a wiring structure 4; at least one electronic component 6a, 6b arranged on the upper surface of the wiring structure 4; an insulating resin layer 8 which is provided on the upper surface of the wiring structure 4 and in which at least one electronic component 6a, 6b is embedded; and a metal layer 10 provided on the upper surface of the insulating resin layer 8. The surface roughness of the portion S1 directly above each electronic component on the upper surface of the insulating resin layer 8 is expressed as R1. The surface roughness of the portion S2 other than the portion directly above all the electronic components on the upper surface of the insulating resin layer 8 is expressed as R2. At least one R1 satisfies the condition: R1>R2.Type: GrantFiled: February 25, 2019Date of Patent: July 27, 2021Assignee: TDK CORPORATIONInventors: Shuichi Takizawa, Hironori Sato, Atsushi Yoshino, Hideki Kachi
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Patent number: 10991668Abstract: A semiconductor device comprises a semiconductor substrate, a connection pad, and a bump. The connection pad is connected to the bump and disposed between the semiconductor substrate and the bump. The connection pad has one or more slits.Type: GrantFiled: December 19, 2019Date of Patent: April 27, 2021Assignee: Synaptics IncorporatedInventors: Tsuyoshi Koga, Shinya Suzuki, Naoki Hasegawa, Naoyuki Narita, Kiyotaka Miwa, Kazuhiko Sato, Yuichi Nakagomi
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Patent number: 10770416Abstract: A semiconductor package includes a connection member having first and second surfaces opposing each other and including at least one insulating layer and redistribution layer, the redistribution layer including a via penetrating through the insulating layer and a RDL pattern connected to the via while being located on an upper surface of the insulating layer; a semiconductor chip disposed on the first surface and including a connection pad connected to the redistribution layer; and an encapsulant disposed on the first surface and encapsulating the semiconductor chip. The redistribution layer includes a seed layer disposed on a surface of the insulating layer and a plating layer disposed on the seed layer. An interface between the insulating layer and a portion of the seed layer constituting the via includes a first uneven surface with a surface roughness of 30 nm or more.Type: GrantFiled: February 22, 2019Date of Patent: September 8, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Byung Ho Kim, Jae Hoon Choi, Joo Young Choi
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Patent number: 10755998Abstract: A metal member includes a metal substrate and a porous metal layer. A composite includes the metal member and a resin member. The metal substrate has one surface, is made of a metal material, and has a region formed as an uneven layer having an uneven shape with respect to the one surface. The porous metal layer has a mesh-like shape and is formed on the uneven layer. The uneven layer includes a plurality of protrusions protruding in a direction normal to the one surface.Type: GrantFiled: March 8, 2019Date of Patent: August 25, 2020Assignee: DENSO CORPORATIONInventors: Takumi Nomura, Wataru Kobayashi, Kazuki Koda
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Patent number: 10665562Abstract: A power electronics method and assembly produced by the method. The assembly has a substrate, having a power semiconductor element, and an adhesion layer disposed therebetween, wherein the substrate has a first surface that faces a power semiconductor element, a power semiconductor element has a third surface that faces the substrate, the adhesion layer has a second surface which, preferably across the full area, contacts the third surface and has a first consistent surface contour having a first roughness, and wherein a fourth surface of the power semiconductor element that is opposite the third surface has a second surface contour having a second roughness, said second surface contour following the first surface contour.Type: GrantFiled: June 27, 2018Date of Patent: May 26, 2020Assignee: SEMIKRON ELEKTRONIK GmbH & Co. KGInventor: Ulrich Sagebaum
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Patent number: 10378105Abstract: Embodiments of the invention provide methods for selective deposition on different materials using a surface treatment. According to one embodiment, the method includes providing a substrate containing a first material layer having a first surface and a second material layer having a second surface, and performing a chemical oxide removal process that terminates that second surface with hydroxyl groups. The method further includes modifying the second surface by exposure to a process gas containing a hydrophobic functional group, the modifying substituting the hydroxyl groups on the second surface with the hydrophobic functional group, and selectively depositing a metal-containing layer on the first surface but not on the modified second surface by exposing the substrate to a deposition gas.Type: GrantFiled: May 31, 2017Date of Patent: August 13, 2019Assignee: Tokyo Electron LimitedInventors: Kai-Hung Yu, Kandabara N. Tapily, Takahiro Hakamata, Subhadeep Kal, Gerrit J. Leusink
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Patent number: 10269739Abstract: Methods of forming connector pad structures, interconnect structures, and structures thereof are disclosed. In some embodiments, a method of forming a connector pad structure includes forming an underball metallization (UBM) pad, and increasing a surface roughness of the UBM pad by exposing the UBM pad to a plasma treatment. A polymer material is formed over a first portion of the UBM pad, leaving a second portion of the UBM pad exposed.Type: GrantFiled: March 27, 2018Date of Patent: April 23, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Lun Chang, Chung-Shi Liu, Hsiu-Jen Lin, Hsien-Wei Chen, Ming-Da Cheng, Wei-Yu Chen
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Patent number: 10163829Abstract: A compound semiconductor substrate has a first main surface parallel to a first direction and a second direction perpendicular to the first direction, a second main surface located on a side opposite to the first main surface, and a recess. The recess has an opening, a bottom surface facing the opening, and a plurality of side surfaces located between the opening and the bottom surface. The side surfaces include at least one first side surface forming an angle of about ? degrees with the bottom surface in the recess and at least one second side surface forming an angle of about ? degrees with the bottom surface in the recess. The total length of edge lines between the first main surface and the at least one first side surface is larger than that of edge lines between the first main surface and the at least one second side surface.Type: GrantFiled: December 6, 2017Date of Patent: December 25, 2018Assignee: Murata Manufacturing Co., Ltd.Inventors: Isao Obu, Yasunari Umemoto, Masahiro Shibata
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Patent number: 10147616Abstract: A package frame includes a plurality of unit regions disposed on one surface of the package frame, a peripheral region surrounding the unit regions on the one surface, and a wrinkled structure disposed on the one surface in the peripheral region. A first surface of the wrinkled structure extends from the one surface and is disposed at a different level than the one surface. Each of the unit regions includes a plurality of conductive pads.Type: GrantFiled: October 26, 2015Date of Patent: December 4, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Soojae Park, Geunwoo Kim, Keunho Jang, Younjo Mun
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Patent number: 10103305Abstract: A high-efficiency light-emitting device of the present invention includes: a nitride-based semiconductor laminate layer comprising a first conductive-type semiconductor layer, an active layer, and a second conductive-type semiconductor layer; a substrate comprising a first electrode and a second electrode each connected to the first conductive-type semiconductor layer and the second conductive-type semiconductor layer, a first pad electrode and a second pad electrode each connected with the first electrode and the second electrode, and a first connection pad and a second connection pad each connected with the first pad electrode and the second pad electrode; and a solder positioned between the pad electrodes and the connection pads.Type: GrantFiled: October 16, 2015Date of Patent: October 16, 2018Assignee: Seoul Viosys Co., Ltd.Inventors: Yeo Jin Yoon, Chung Hoon Lee
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Patent number: 10083926Abstract: A wafer level chip scale package is described. At least one redistribution layer is connected to a wafer through an opening through a first polymer layer to a metal pad on a top surface of the wafer wherein the redistribution layer has a roughened top surface and wherein holes are formed through the at least one redistribution layer in an area where the redistribution layer has an area exceeding 0.2 mm2. At least one UBM layer contacts the at least one redistribution layer through an opening in a second polymer layer wherein the second polymer layer contacts the first polymer layer within the holes promoting cohesion between the first and second polymer layers and wherein the roughened top surface promotes adhesion between the at least one redistribution layer and the second polymer layer.Type: GrantFiled: December 13, 2017Date of Patent: September 25, 2018Assignee: Dialog Semiconductor (UK) LimitedInventors: Ian Kent, Rajesh Subraya Aiyandra, Jesus Mennen Belonio, Jr., Habeeb Mohiuddin Mohammed, Domingo Jr. Maggay, Robert Lamoon, Ernesto Gutierrez, III
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Patent number: 9922924Abstract: An interposer and a semiconductor package including the interposer are provided. The interposer includes a first dielectric layer, a conductive pillar, a conductive ring, a solder bump, and a redistribution layer. The first dielectric layer has an upper surface and a lower surface. The conductive pillar and the conductive ring are partially embedded in the first dielectric layer. A portion of the conductive pillar protrudes from the lower surface of the first dielectric layer. The conductive ring surrounds the conductive pillar, and a portion of the conductive ring protrudes from the lower surface of the first dielectric layer. The solder bump is disposed on the lower surface of the first dielectric layer, wherein the portion of the conductive pillar and the portion of the conductive ring are embedded in the solder bump. The redistribution layer is disposed on the upper surface of the first dielectric layer.Type: GrantFiled: December 5, 2016Date of Patent: March 20, 2018Assignee: Micron Technology, Inc.Inventor: Shing-Yih Shih
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Patent number: 9754894Abstract: Provided is a thermosetting sheet for sealing which is used to seal an electronic device. One surface of the sheet has a surface roughness (Ra) of 3 ?m or less before the sheet is cured.Type: GrantFiled: June 30, 2014Date of Patent: September 5, 2017Assignee: NITTO DENKO CORPORATIONInventors: Chie Iino, Takeshi Matsumura, Goji Shiga, Kosuke Morita
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Patent number: 9679841Abstract: Methods and apparatus for formation of a semiconductor substrate with photoactive dielectric material, embedded traces, a padless skip via extending through two dielectric layers, and a coreless package are provided. In one embodiment, a method for forming a core having a copper layer; laminating the copper layer a photoactive dielectric layer; forming a plurality of trace patterns in the photoactive dielectric layer; plating the plurality of trace patterns to form a plurality of traces; forming an insulating dielectric layer on the photoactive dielectric layer; forming a via through the insulating dielectric layer and the photoactive dielectric layer; forming additional routing patterns on the insulating dielectric layer; removing the core; and applying a solder mask.Type: GrantFiled: May 13, 2014Date of Patent: June 13, 2017Assignee: QUALCOMM IncorporatedInventors: Houssam Wafic Jomaa, Omar James Bchir, Kuiwon Kang, Chin-Kwan Kim
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Patent number: 9548282Abstract: A semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate (300) provided with a plurality of pads (301), columnar electrodes on the pads (301) and a solder ball (321) provided on the columnar electrode. The columnar electrode comprises a main body (307) and a groove in the main body (307), and an opening of the groove is overlapped with the top surface of the columnar electrode. The solder ball (321) comprises a metal bump (320) arranged on the top of the columnar electrode and a filling part (319) filled in the groove. The solder ball and the columnar electrode form a structure similar to a bolt; thus the binding force between the solder ball and the columnar electrode is improved.Type: GrantFiled: October 30, 2013Date of Patent: January 17, 2017Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Yujuan Tao
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Patent number: 9379077Abstract: A semiconductor device package and packaging method, the semiconductor device packaging method comprising: providing a chip with a bonding pad formed on the chip surface; forming a passivation layer and a bump on the chip surface, wherein the passivation layer has an opening exposing part of the pad, the bump is located in the opening and the size of the bump is less than the size of the opening; forming a solder ball covering the top surface and the side wall of the bump, and the bottom surface of the opening. The formed semiconductor device package is not easy to form a short circuit. The bonding strength between the solder ball and the bump is high and the performance of the semiconductor device is stable.Type: GrantFiled: October 30, 2013Date of Patent: June 28, 2016Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Honghui Wang
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Patent number: 9000566Abstract: A compliant monopolar micro device transfer head array and method of forming a compliant monopolar micro device transfer array from an SOI substrate are described. In an embodiment, the micro device transfer head array including a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include a silicon interconnect and an array of silicon electrodes electrically connected with the silicon interconnect. Each silicon electrode includes a mesa structure protruding above the silicon interconnect, and each silicon electrode is deflectable into a cavity between the base substrate and the silicon electrode. A dielectric layer covers a top surface of each mesa structure.Type: GrantFiled: February 5, 2014Date of Patent: April 7, 2015Assignee: LuxVue Technology CorporationInventors: Dariusz Golda, Andreas Bibl
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Publication number: 20150048505Abstract: A wiring substrate includes: a substrate layer made of glass or silicon and including: a first surface formed with a first hole; and a second surface formed with a second hole and being opposite to the first surface, wherein the first hole is communicated with the second hole; a connection pad formed in the second hole; a first wiring layer formed in the first hole and electrically connected to the connection pad; a first insulation layer formed on the first surface of the substrate layer to cover the first wiring layer; and a second wiring layer formed on the first insulation layer and electrically connected to the first wiring layer. A diameter of the first hole is gradually decreased from the first surface toward the second surface, and a diameter of the second hole is gradually decreased from the second surface toward the first surface.Type: ApplicationFiled: October 29, 2014Publication date: February 19, 2015Inventors: Yuji KUNIMOTO, Naoyuki KOIZUMI
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Patent number: 8957450Abstract: According to one embodiment, a semiconductor light emitting device includes a semiconductor layer, a first electrode, a second electrode, an insulating layer, a first interconnect layer, a second interconnect layer, a first metal pillar, a second metal pillar, a film covering a side face of the first metal pillar and a side face of the second metal pillar, and a resin layer. The semiconductor layer includes a light emitting layer, a first major surface, and a second major surface formed on a side opposite to the first major surface. The film has a solder wettability poorer than a solder wettability of the first metal pillar and a solder wettability of the second metal pillar. The resin layer covers at least part of the film.Type: GrantFiled: June 24, 2013Date of Patent: February 17, 2015Assignee: Kabushiki Kaisha ToshibaInventor: Yoshiaki Sugizaki
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Patent number: 8946906Abstract: To provide a multilayer wiring substrate in which the connection reliability of via conductors is enhanced, via holes are formed in a resin interlayer insulation layer which isolates a lower conductor layer from an upper conductor layer, and via conductors are formed in the via holes for connecting the lower conductor layer and the upper conductor layer. The surface of the resin interlayer insulation layer is a rough surface, and the via holes open at the rough surface of the resin interlayer insulation layer. Stepped portions are formed in opening verge regions around the via holes such that the stepped portions are recessed from peripheral regions around the opening verge regions. The stepped portions are higher in surface roughness than the peripheral regions.Type: GrantFiled: December 13, 2011Date of Patent: February 3, 2015Assignee: NGK Spark Plug Co., Ltd.Inventor: Shinnosuke Maeda
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Publication number: 20140374903Abstract: The present invention provides a stabilized fine textured metal microstructure that constitutes a durable activated surface usable for bonding a 3D stacked chip. A fine-grain layer that resists self anneal enables metal to metal bonding at moderate time and temperature and wider process flexibility.Type: ApplicationFiled: September 13, 2014Publication date: December 25, 2014Inventors: Tien-Jen Cheng, Mukta G. Farooq, John A. Fitzsimmons
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Patent number: 8912653Abstract: A semiconductor wafer has integrated circuits formed thereon and a top passivation layer applied. The passivation layer is patterned and selectively etched to expose contact pads on each semiconductor die. The wafer is exposed to ionized gas causing the upper surface of passivation layer to roughen and to slightly roughen the upper surface of the contact pads. The wafer is cut to form a plurality of semiconductor dies each with a roughened passivation layer. The plurality of semiconductor dies are placed on an adhesive layer and a reconstituted wafer formed. Redistribution layers are formed to complete the semiconductor package having electrical contacts for establishing electrical connections external to the semiconductor package, after which the wafer is singulated to separate the dice.Type: GrantFiled: December 15, 2011Date of Patent: December 16, 2014Assignee: STMicroelectronics Pte Ltd.Inventors: Kah Wee Gan, Yonggang Jin, Anandan Ramasamy, Yun Liu
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Patent number: 8890317Abstract: An organic light emitting display device includes a first electrode on a substrate, an auxiliary electrode on the substrate, the auxiliary electrode being spaced apart from the first electrode, a protrusion on the auxiliary electrode, a pixel defining layer overlapping end portions of the first electrode and of the auxiliary electrode, the pixel defining layer separating the first electrode from the auxiliary electrode, an organic layer on the first electrode, and a second electrode on the organic layer, the protrusion electrically connecting the second electrode to the auxiliary electrode.Type: GrantFiled: September 26, 2013Date of Patent: November 18, 2014Assignee: Samsung Display Co., Ltd.Inventors: Young-Mo Koo, Ok-Keun Song, Min-Woo Lee, Jae-Goo Lee
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Patent number: 8866296Abstract: A semiconductor device includes: a semiconductor chip with a plurality of electrode pads disposed at a top surface thereof; a plurality of thin film terminals set apart from one another via respective separator portions, which are located below a bottom surface of the semiconductor chip; an insulating layer disposed between the semiconductor chip and the thin-film terminals; connecting members that connect the electrode pads at the semiconductor chip with the thin-film terminals respectively and a resin layer disposed so as to cover the semiconductor chip, the plurality of thin-film terminals exposed at the semiconductor chip, the separator portions and the connecting members.Type: GrantFiled: June 24, 2009Date of Patent: October 21, 2014Assignee: AOI Electronics Co., Ltd.Inventors: Takashi Yamaji, Takaaki Kato
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Patent number: 8860226Abstract: A semiconductor device includes a storage node contact plug, a bit line in communication with to the storage node contact plug, and an expansion unit formed on a sidewall of the bit line. Thermal expansion of the expansion unit serves to increase capacitance by ensuring a distance between the bit line and the storage node contact plug, thereby improving a sensing margin. A cell characteristic such as a record recovery time (tWR) may be enhanced.Type: GrantFiled: January 10, 2012Date of Patent: October 14, 2014Assignee: Hynix Semiconductor Inc.Inventor: Yong Won Seo
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Patent number: 8796563Abstract: In ultrasonic bonding of a metal terminal to a substrate pad, a thin buffer metal layer which is formed of a soft metal or a highly slidable metal is interposed between a terminal edge and a pad so as to prevent direct contact between an end of the terminal and the pad upon bonding. This makes it possible to prevent abrasion and a crack in the pad at the end of the terminal caused by pressure and an ultrasonic wave upon the ultrasonic bonding. This makes it possible to realize a compact bonded structure with high reliability.Type: GrantFiled: January 29, 2010Date of Patent: August 5, 2014Assignee: Hitachi Automotive Systems, Ltd.Inventors: Ukyo Ikeda, Masato Nakamura, Shiro Yamashita
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Publication number: 20140191398Abstract: A device including a first semiconductor layer and a contact to the first semiconductor layer is disclosed. An interface between the first semiconductor layer and the contact includes a first roughness profile having a characteristic height and a characteristic width. The characteristic height can correspond to an average vertical distance between crests and adjacent valleys in the first roughness profile. The characteristic width can correspond to an average lateral distance between the crests and adjacent valleys in the first roughness profile.Type: ApplicationFiled: January 9, 2014Publication date: July 10, 2014Applicant: SENSOR ELECTRONIC TECHNOLOGY, INC.Inventors: Remigijus Gaska, Maxim S. Shatalov, Alexander Lunev, Alexander Dobrinsky, Jinwei Yang, Michael Shur
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Patent number: 8766441Abstract: Solder on slot connections in package on package structures. An apparatus includes a substrate having a front side surface and a back side surface; a first passivation layer disposed over at least one of the front side and back side surfaces; at least one via opening formed in the first passivation layer; a conductor layer disposed over the first passivation layer, coupled to the at least one via and forming a conductive trace on the surface of the first passivation layer; a second passivation layer formed over the conductor layer; and at least one slot opening formed in the second passivation layer and exposing a portion of the conductive trace for receiving a solder connector. In additional embodiments the substrate may be a semiconductor wafer. Methods for forming the structures are disclosed.Type: GrantFiled: March 14, 2012Date of Patent: July 1, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei Sen Chang, Ching-Wen Hsiao, Chen-Shien Chen
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Publication number: 20140151882Abstract: The three-dimensional integrated circuit has a first semiconductor chip and a second semiconductor chip stacked on the first semiconductor chip, wherein each of the first semiconductor chip and the second semiconductor chip is provided with a power supply wiring layer which has a wiring pattern structure for stably supplying a power supply voltage to an internal circuit of the semiconductor chip, and a ground wiring layer in succession, and one of the first semiconductor chip and the second semiconductor chip further includes a second ground wiring layer or a second power supply wiring layer on a surface facing to the other semiconductor chip.Type: ApplicationFiled: April 10, 2013Publication date: June 5, 2014Inventor: Takashi Morimoto
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Patent number: 8742554Abstract: A circuit member includes a frame substrate formed, by patterning a rolled copper plate or a rolled copper alloy plate, with a die pad portion for a semiconductor chip to be mounted thereon, and a lead portion for an electrical connection to the semiconductor chip, having rough surfaces formed as roughed surfaces on upsides and lateral wall sides of the die pad portion and the lead portion, and smooth surfaces formed on downsides of the die pad portion and the lead portion, and the die pad portion and the lead portion are buried in a sealing resin, having a downside of the lead portion exposed.Type: GrantFiled: April 26, 2006Date of Patent: June 3, 2014Assignee: Dai Nippon Printing Co., Ltd.Inventors: Yo Shimazaki, Hiroyuki Saito, Masachika Masuda, Kenji Matsumura, Masaru Fukuchi, Takao Ikezawa
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Patent number: 8723328Abstract: To provide a multilayer wiring substrate in which the connection reliability of via conductors is enhanced, via holes are formed in a resin interlayer insulation layer which isolates a lower conductor layer from an upper conductor layer, and via conductors are formed in the via holes for connecting the lower conductor layer and the upper conductor layer. The surface of the resin interlayer insulation layer is a rough surface, and the via holes open at the rough surface of the resin interlayer insulation layer. Stepped portions are formed in opening verge regions around the via holes such that the stepped portions are recessed from peripheral regions around the opening verge regions. The stepped portions are higher in surface roughness than the peripheral regions.Type: GrantFiled: December 13, 2011Date of Patent: May 13, 2014Assignee: NGK Spark Plug Co., Ltd.Inventor: Shinnosuke Maeda
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Patent number: 8709935Abstract: A semiconductor device has a substrate and first conductive pads formed over the substrate. An interconnect surface area of the first conductive pads is expanded by forming a plurality of recesses into the first conductive pads. The recesses can be an arrangement of concentric rings, arrangement of circular recesses, or arrangement of parallel linear trenches. Alternatively, the interconnect surface area of the first conductive pads is expanded by forming a second conductive pad over the first conductive pad. A semiconductor die has a plurality of interconnect structures formed over a surface of the semiconductor die. The semiconductor die is mounted to the substrate with the interconnect structures contacting the expanded interconnect surface area of the first conductive pads to increase bonding strength of the interconnect structure to the first conductive pads. A mold underfill material is deposited between the semiconductor die and substrate.Type: GrantFiled: February 15, 2013Date of Patent: April 29, 2014Assignee: STATS ChipPAC, Ltd.Inventors: DaeSik Choi, OhHan Kim, SungWon Cho
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Publication number: 20140110843Abstract: A semiconductor unit includes a submount and a chip coupled to the submount. The submount is configured with a base and a plurality of layers between the base and the chip. One of the layers, a heat-spreading electro-conducting sliver (“Ag”) layer, is deposited atop the base. The thickness of the Ag layer is selected so that a cumulative coefficient of thermal expansion of the submount substantially matches that one of the chip. Coupled to the active zone of the chip is a stress-dumping layer made from elastic malleable materials.Type: ApplicationFiled: December 30, 2013Publication date: April 24, 2014Applicant: IIPG Photonics CorporationInventors: Alexander Ovtchinnikov, Alexey Komissarov, Igor Berishev, Svetlan Todorov
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Patent number: 8686542Abstract: A compliant monopolar micro device transfer head array and method of forming a compliant monopolar micro device transfer array from an SOI substrate are described. In an embodiment, the micro device transfer head array including a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include a silicon interconnect and an array of silicon electrodes electrically connected with the silicon interconnect. Each silicon electrode includes a mesa structure protruding above the silicon interconnect, and each silicon electrode is deflectable into a cavity between the base substrate and the silicon electrode. A dielectric layer covers a top surface of each mesa structure.Type: GrantFiled: March 14, 2013Date of Patent: April 1, 2014Assignee: LuxVue Technology CorporationInventors: Dariusz Golda, Andreas Bibl
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Patent number: 8674367Abstract: Provided is an organic light-emitting display device. The organic light-emitting display device includes: a substrate; a buffer layer formed on the substrate; a gate insulating layer formed on the buffer layer; a conductive layer formed on the gate insulating layer; and a pixel defined layer exposing a portion of the conductive layer to form a pad portion connected to bumps of a drive integrated circuit (IC) chip, wherein protrusions and recesses are formed on a surface of the conductive layer.Type: GrantFiled: May 16, 2011Date of Patent: March 18, 2014Assignee: Samsung Display Co., Ltd.Inventors: Sun Park, Chun-gi You, Jong-Hyun Park, Yul-Kyu Lee
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Patent number: 8673773Abstract: A method for producing a nanoporous layer comprises applying a plating base with adhesion strengthening onto a substrate, depositing a layer made of gold and silver onto the substrate, the composition being in the range of 20% to 40% gold and 80% to 60% silver, and selectively removing the silver in order to produce a nanoporous gold layer.Type: GrantFiled: November 14, 2008Date of Patent: March 18, 2014Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.Inventors: Hermann Oppermann, Lothar Dietrich, Gunter Engelmann, Wolf Jürgen
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Patent number: 8669657Abstract: Stacked semiconductor devices and assemblies including attached lead frames are disclosed herein. One embodiment of a method of manufacturing a semiconductor assembly includes forming a plurality of first side trenches to a first intermediate depth in a molded portion of a molded wafer having a plurality of dies arranged in rows and columns. The method also includes forming a plurality of lateral contacts at sidewall portions of the trenches and electrically connecting first side bond-sites of the dies with corresponding lateral contacts of the trenches. The method further includes forming a plurality of second side channels to a second intermediate depth in the molded portion such that the channels intersect the trenches. The method also includes singulating and stacking the first and second dies with the channels associated with the first die aligned with channels associated with the second die.Type: GrantFiled: August 27, 2013Date of Patent: March 11, 2014Assignee: Micron Technology, Inc.Inventor: Swee Kwang Chua
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Patent number: 8648463Abstract: A multi-chip module (MCM) that includes at least two substrates, having facing surfaces, which are mechanically coupled by a set of coupling elements having a reflow characteristic, is described. One of the two substrates includes another set of coupling elements having another reflow characteristic, which is different than the reflow characteristic. These different reflow characteristics of the sets of coupling elements allow different temperature profiles to be used when bonding the two substrates to each other than when bonding the one of the two substrates to a carrier. For example, the temperature profiles may have different peak temperatures and/or different durations from one another. These reflow characteristics may facilitate low-cost, high-yield assembly and alignment of the substrates in the MCM, and may allow temperature-sensitive components to be included in the MCM.Type: GrantFiled: May 17, 2010Date of Patent: February 11, 2014Assignee: Oracle International CorporationInventors: Hiren D. Thacker, Jing Shi, John E. Cunningham, Ashok V. Krishnamoorthy
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Patent number: 8637986Abstract: A semiconductor device which includes a first semiconductor chip 10, a first electrode 12 formed on the first semiconductor chip 10, a second semiconductor chip 20 to which the first semiconductor chip 10 is mounted, a second electrode 22 with a protrusion 24, which is formed on the second semiconductor chip 20, and a solder bump 14 which bonds the first electrode 12 and the second electrode 22 to cover at least a part of a side surface of the protrusion 24, and a method for manufacturing thereof are provided.Type: GrantFiled: October 22, 2008Date of Patent: January 28, 2014Assignee: Spansion LLCInventors: Naomi Masuda, Masataka Hoshino, Ryota Fukuyama
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Publication number: 20140021609Abstract: A wiring substrate includes: a substrate; an insulator formed in the substrate and having a through hole; an electrode formed in the substrate and provided within the through hole; and a conductor bonded to the electrode and provided within the through hole, wherein the through hole has a shape that is widened toward a direction away from the substrate, and the conductor is configured to cover the entire top surface of the electrode and has a shape that is widened toward the direction away from the substrate.Type: ApplicationFiled: June 18, 2013Publication date: January 23, 2014Inventors: Taiga Fukumori, Daisuke Mizutani, Mamoru Kurashina
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Patent number: 8624393Abstract: Methods for localized thinning of wafers used in semiconductor devices and the structures formed from such methods are described. The methods thin localized areas of the backside of the semiconductor wafer to form recesses with a bi-directional channel design that is repeated within the wafer (or die) so that no straight channel line crosses the wafer (or die). The bi-directional pattern design keeps the channels from being aligned with the crystal orientation of the wafer. The recesses are then filled by a solder ball drop process by dropping proper size solder balls into the recesses and then annealing the wafer to reflow the solder balls and flatten them out. The reflow process begins to fill in the recesses from the bottom up, thereby avoiding void formation and the resulting air traps in the reflowed solder material. Other embodiments are also described.Type: GrantFiled: February 24, 2012Date of Patent: January 7, 2014Assignee: Fairchild Semiconductor CorporationInventors: Suku Kim, James Murphy, Matthew Reynolds, Romel Manatad, Jan Mancelita, Michael Gruenhagen
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Patent number: 8610274Abstract: A die structure includes a die and a metallization layer disposed over the front side of the die. The metallization layer includes copper. At least a part of the metallization layer has a rough surface profile. The part with the rough surface profile includes a wire bonding region, to which a wire bonding structure is to be bonded.Type: GrantFiled: September 14, 2010Date of Patent: December 17, 2013Assignee: Infineon Technologies AGInventors: Khalil Hosseini, Frank Kahlmann, Josef Hoeglauer, Ralf Otremba, Georg Meyer-Berg
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Patent number: 8593817Abstract: A power semiconductor module is provided in which power semiconductor chips with an aluminum-based chip metallization and power semiconductor chips with a copper-based chip metallization are included in the same module, and operated at different barrier-layer temperatures during use.Type: GrantFiled: September 30, 2010Date of Patent: November 26, 2013Assignee: Infineon Technologies AGInventors: Reinhold Bayerer, Thilo Stolze
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Patent number: 8581398Abstract: An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-semiconductor-vias. The trap rich layer is formed above the circuit layer. The through-semiconductor-vias are also formed above the circuit layer. In some embodiments, the circuit layer is included in a wafer, and the trap rich layer and through-semiconductor-vias are included in another wafer. The two wafers are bonded together after formation of the trap rich layer and through-semiconductor-vias. Additionally, in some embodiments, yet another wafer may also be bonded to the wafer that includes the trap rich layer and through-semiconductor-vias. Furthermore, in some embodiments, another circuit layer may be formed in the wafer that includes the trap rich layer and through-semiconductor-vias.Type: GrantFiled: February 7, 2013Date of Patent: November 12, 2013Assignee: IO Semiconductor, Inc.Inventors: Anton Arriagada, Chris Brindle, Michael A. Stuber
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Patent number: 8574949Abstract: Embodiments of the current invention describe methods of forming different types of crystalline silicon based solar cells that can be combinatorially varied and evaluated. Examples of these different types of solar cells include front and back contact silicon based solar cells, all-back contact solar cells and selective emitter solar cells. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single crystalline silicon substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials.Type: GrantFiled: September 20, 2010Date of Patent: November 5, 2013Assignee: Intermolecular, Inc.Inventors: Jian Li, Minh Anh Nguyen, Nikhil Kalyankar, Nitin Kumar, Craig Hunter
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Patent number: 8513823Abstract: In a semiconductor package, a stamp is provided on at least one of at least a pair of opposed sides on an outer peripheral portion in contact with an edge of the package, which is a blank space up to now. With this configuration, the amount of stamp can be increased even in a narrow stamp area.Type: GrantFiled: June 29, 2011Date of Patent: August 20, 2013Assignee: Renesas Electronics CorporationInventor: Hiroyuki Shoji