Arrangements For Heating (epo) Patents (Class 257/E23.081)
  • Patent number: 11879933
    Abstract: A method of testing an integrated circuit on a test circuit board includes performing, by a processor, a simulation of a first heat distribution throughout an integrated circuit design, manufacturing the integrated circuit according to the integrated circuit design, and simultaneously performing a burn-in test of the integrated circuit and an automated test of the integrated circuit. The burn-in test has a minimum burn-in temperature of the integrated circuit and a burn-in heat distribution across the integrated circuit. The integrated circuit design corresponds to the integrated circuit. The integrated circuit is coupled to the test circuit board. The integrated circuit includes a set of circuit blocks and a first set of heaters.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: January 23, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Ankita Patidar, Sandeep Kumar Goel, Yun-Han Lee
  • Patent number: 9466547
    Abstract: A topographical structure is formed within an integrated circuit (IC) chip passivation layer. The topographical structure includes a trench extending below the top surface of the passivation layer and above the top surface of an uppermost inter-metallic dielectric layer underlying the passivation layer associated with the uppermost wiring line of the IC chip. The topographical structure may also include a ridge above the top surface of the passivation layer along the perimeter of the trench. The topographical structure may be positioned between a series of IC chip contact pads and/or may be positioned around a particular IC chip contact pad. The topographical structures increase the surface area of the passivation layer resulting in increased underfill bonding to the passivation layer. The topographical structures also influence capillary movement of capillary underfill and may be positioned to speed up, slow down, or divert the movement of the capillary underfill.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: October 11, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Charles L. Arvin, Brian M. Erwin, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter
  • Patent number: 9035337
    Abstract: An object is to provide a light-emitting module in which a light-emitting element suffering a short-circuit failure does not cause wasteful electric power consumption. Another object is to provide a light-emitting panel in which a light-emitting element suffering a short-circuit failure does not allow the reliability of an adjacent light-emitting element to lower. Focusing on heat generated by a light-emitting element suffering a short-circuit failure, provided is a structure in which electric power is supplied to a light-emitting element through a positive temperature coefficient thermistor (PTC thermistor) thermally coupled with the light-emitting element.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: May 19, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Masaaki Hiroki, Satoshi Seo, Yasuo Nakamura
  • Patent number: 8901753
    Abstract: A microelectronic package is provided. The microelectronic package includes a substrate having a plurality of solder bumps disposed on a top side of the substrate and a die disposed adjacent to the top side of the substrate. The die includes a plurality of glassy metal bumps disposed on a bottom side of the die wherein the plurality of glassy metal bumps are to melt the plurality of solder bumps to form a liquid solder layer. The liquid solder layer is to attach the die with the substrate.
    Type: Grant
    Filed: January 18, 2013
    Date of Patent: December 2, 2014
    Assignee: Intel Corporation
    Inventor: Daewoong Suh
  • Patent number: 8724393
    Abstract: A memory includes an array of memory cells including rows and columns. The memory includes circuitry coupled to the word lines applying a first bias voltage to a first set of spaced-apart locations on a word line or word lines in the array, while applying a second bias voltage different than the first bias voltage, to a second set of spaced-apart locations on the word line or word lines, locations in the first set of spaced-apart locations being interleaved among locations in the second set of spaced-apart locations, whereby current flow is induced between locations in the first and second sets of locations that cause heating of the word line or word lines.
    Type: Grant
    Filed: April 27, 2012
    Date of Patent: May 13, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Hang-Ting Lue, Chun-Hsiung Hung
  • Publication number: 20130342263
    Abstract: Representative implementations of devices and techniques provide heating for a semiconductor device. A heating element is arranged to be located proximate to the semiconductor device and to increase a temperature of at least a portion of the semiconductor device during operation of the semiconductor device.
    Type: Application
    Filed: June 26, 2012
    Publication date: December 26, 2013
    Inventor: Thorsten MEYER
  • Patent number: 8507909
    Abstract: A measuring apparatus including a first chip, a first circuit layer, a first heater, a first stress sensor and a second circuit layer is provided. The first chip has a first through silicon via, a first surface and a second surface opposite to the first surface. The first circuit layer is disposed on the first surface. The first heater and the first stress sensor are disposed on the first surface and connected to the first circuit layer. The second circuit layer is disposed on the second surface. The first heater comprises a plurality of first switches connected in series to generate heat.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: August 13, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Ra-Min Tain, Ming-Ji Dai, Shyh-Shyuan Sheu, Chih-Sheng Lin, Shih-Hsien Wu
  • Patent number: 8502224
    Abstract: A measuring apparatus including a first chip, a first circuit layer, a first heater, a first stress sensor and a second circuit layer is provided. The first chip has a first through silicon via, a first surface and a second surface opposite to the first surface. The first circuit layer is disposed on the first surface. The first heater and the first stress sensor are disposed on the first surface and connected to the first circuit layer. The second circuit layer is disposed on the second surface.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: August 6, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Ra-Min Tain, John H. Lau, Ming-Che Hsieh, Wei Li, Ming-Ji Dai
  • Patent number: 8497544
    Abstract: A memory module includes multiple memory devices mounted to a substrate and one or more discrete heating elements disposed in thermal contact with the memory devices. Each of the memory devices includes charge-storing memory cells subject to operation-induced defects that degrade ability of the memory cells to store data. The discrete heating elements, or single discrete heating element, heats the memory devices to a temperature that anneals the defects.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: July 30, 2013
    Assignee: Rambus Inc.
    Inventors: Gary B. Bronner, Ming Li, Donald R. Mullen, Frederick Ware, Kevin S. Donnelly
  • Patent number: 8461589
    Abstract: An integrated circuit (IC) includes a heated portion. The heated portion/IC includes a substrate having a topside semiconductor surface having circuitry configured to provide a circuit function. A pre-metal dielectric (PMD) layer is on the topside semiconductor surface. A metal interconnect stack is on the PMD. A trim portion includes one or more temperature sensitive circuit components which affect a temperature behavior of the IC. The heated portion extends over and beyond an area of the trim portion having an integrated heating structure including at least a first heater formed from a metal interconnect level that includes a first plurality of winding segments which have a varying pitch. A heat spreader formed from a second metal interconnect layer is between trim portion and the first heater. Thermal plugs are lateral to the temperature sensitive circuit components and thermally couple the heat spreader to the topside semiconductor surface.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: June 11, 2013
    Assignee: Texas Instruments Incorporated
    Inventors: Philip L. Hower, Barry Jon Male, Wilburn M. Miller
  • Patent number: 8377683
    Abstract: A dynamic and noninvasive method of monitoring the adhesion and proliferation of biological cells through multimode operation (acoustic and optical) using a ZnO nanostructure-modified quartz crystal microbalance (ZnOnano-QCM) biosensor is disclosed.
    Type: Grant
    Filed: July 23, 2012
    Date of Patent: February 19, 2013
    Assignee: Rutgers, The State University of New Jersey
    Inventors: Yicheng Lu, Pavel Ivanoff Reyes, Nada N. Boustany
  • Patent number: 8378504
    Abstract: A microelectronic package is provided. The microelectronic package includes a substrate having a plurality of solder bumps disposed on a top side of the substrate and a die disposed adjacent to the top side of the substrate. The die includes a plurality of glassy metal bumps disposed on a bottom side of the die wherein the plurality of glassy metal bumps are to melt the plurality of solder bumps to form a liquid solder layer. The liquid solder layer is to attach the die with the substrate.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: February 19, 2013
    Assignee: Intel Corporation
    Inventor: Daewoong Suh
  • Publication number: 20130001765
    Abstract: A system and method for controlling temperature of a MEMS sensor are disclosed. In a first aspect, the system comprises a MEMS cap encapsulating the MEMS sensor and a CMOS die vertically arranged to the MEMS cap. The system includes a heater integrated into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor. In a second aspect, the method comprises encapsulating the MEMS sensor with a MEMS cap and coupling a CMOS die to the MEMS cap. The method includes integrating a heater into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor.
    Type: Application
    Filed: June 19, 2012
    Publication date: January 3, 2013
    Applicant: INVENSENSE, INC.
    Inventors: Goksen G. YARALIOGLU, Martin LIM
  • Patent number: 8138105
    Abstract: A method that is performed for heat treating a semiconductor wafer in a process chamber, as an intermediate part of an overall multi-step technique for processing the wafer, includes applying an energy transfer layer to at least a portion of the wafer, and exposing the wafer to an energy source in the process chamber in a way which subjects the wafer to a thermal profile such that the energy transfer layer influences at least one part of the thermal profile. The thermal profile has at least a first elevated temperature event. The method further includes, in time relation to the thermal profile, removing the energy transfer layer in the process chamber at least sufficiently for subjecting the wafer to a subsequent step. An associated intermediate condition of the wafer is described.
    Type: Grant
    Filed: December 5, 2009
    Date of Patent: March 20, 2012
    Assignee: Mattson Technology, Inc.
    Inventor: Paul J. Timans
  • Patent number: 7884455
    Abstract: A power module includes: an encapsulation-target portion having at least one semiconductor element; and an encapsulation member that has first and second planes between which the encapsulation-target portion is interposed, and that encapsulates the encapsulation-target portion. The encapsulation member has, on the at least one semiconductor element, at least one opening that exposes part of a surface of the encapsulation-target portion the surface being on a side of the first plane. Thus, a semiconductor device of which size can be reduced can be provided.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: February 8, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventors: Taishi Sasaki, Mikio Ishihara
  • Patent number: 7875502
    Abstract: A chip fabrication method. A provided structure includes: a transistor on a semiconductor substrate, N interconnect layers on the semiconductor substrate and the transistor (N>0), and a first dielectric layer on the N interconnect layers. The transistor is electrically coupled to the N interconnect layers. P crack stop regions and Q crack stop regions are formed on the first dielectric layer (P, Q>0). The first dielectric layer is sandwiched between the N interconnect layers and a second dielectric layer that is formed on the first dielectric layer. Each P crack stop region is completely surrounded by the first and second dielectric layers. The second dielectric layer is sandwiched between the first dielectric layer and an underfill layer that is formed on the second dielectric layer. Each Q crack stop region is completely surrounded by the first dielectric layer and the underfill layer.
    Type: Grant
    Filed: May 27, 2010
    Date of Patent: January 25, 2011
    Assignee: International Business Machines Corporation
    Inventors: Peter J. Brofman, Jon Alfred Casey, Ian D. Melville, David L. Questad, Wolfgang Sauter, Thomas Anthony Wassick
  • Patent number: 7872338
    Abstract: A microelectromechanical device package with integral a heater and a method for packaging the microelectromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate and second substrate, between which a microelectromechanical device, such as a micromirror array device is located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer is deposited, and heated by the heater so as to bond the first and second package substrates together.
    Type: Grant
    Filed: November 7, 2008
    Date of Patent: January 18, 2011
    Assignee: Texas Instruments Incorporated
    Inventor: Terry Tarn
  • Patent number: 7799612
    Abstract: Methods and systems of applying a plurality of pieces of die attach film to a plurality of singulated dice are provided. The method can involve making intervals between rows and columns of a plurality of pieces of die attach film. The interval can be made by expanding an underlaid expandable film on which the plurality of pieces of die attach film are placed or by removing portions of the die attach film between rows and columns of the plurality of pieces of die attach film. The method can further involve placing a plurality of singulated dice back side down on the plurality of pieces of die attach film.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: September 21, 2010
    Assignee: Spansion LLC
    Inventors: Sally Foong, Tan Kiah Ling, Kee Cheng Sim, Wong Kwet Nam, Yue Ho Foong
  • Publication number: 20100230807
    Abstract: A method of repairing a nonvolatile semiconductor memory device to eliminate defects includes monitoring a memory endurance indicator for a nonvolatile semiconductor memory device contained in a semiconductor package. It is determined whether that the memory endurance indicator exceeds a predefined limit. Finally, in response to determining that the memory endurance indicator exceeds the predefined limit, the device is annealed.
    Type: Application
    Filed: September 4, 2008
    Publication date: September 16, 2010
    Inventors: Gary B. Bronner, Ming Li, Donald R. Mullen, Frederick Ware, Kevin S. Donnelly
  • Patent number: 7732932
    Abstract: Structures and a method for forming the same. The structure includes a semiconductor substrate, a transistor on the semiconductor substrate, and N interconnect layers on top of the semiconductor substrate, N being a positive integer. The transistor is electrically coupled to the N interconnect layers. The structure further includes a first dielectric layer on top of the N interconnect layers and P crack stop regions on top of the first dielectric layer, P being a positive integer. The structure further includes a second dielectric layer on top of the first dielectric layer. Each crack stop region of the P crack stop regions is completely surrounded by the first dielectric layer and the second dielectric layer. The structure further includes an underfill layer on top of the second dielectric layer. The second dielectric layer is sandwiched between the first dielectric layer and the underfill layer.
    Type: Grant
    Filed: August 3, 2007
    Date of Patent: June 8, 2010
    Assignee: International Business Machines Corporation
    Inventors: Peter J. Brofman, Jon Alfred Casey, Ian D. Melville, David L. Questad, Wolfgang Sauter, Thomas Anthony Wassick
  • Publication number: 20100025811
    Abstract: An integrated circuit device (100) includes structures (104) that exhibit performance degradation as a function of use (e.g., accumulated defects within the tunneling oxide of a Flash memory cell, or trapped charge within a charge storage layer) and heating circuitry (101) disposed in proximity to the structures to heat the structures to a temperature that reverses the degradation. The word lines or the bit lines of the memory device are used as heating elements (107).
    Type: Application
    Filed: November 29, 2007
    Publication date: February 4, 2010
    Inventors: Gary Bronner, Brent S. Haukness, Fariborz Assaderaghi, Mark D. Kellam, Mark Horowitz
  • Publication number: 20090321962
    Abstract: A microelectronic package is provided. The microelectronic package includes a substrate having a plurality of solder bumps disposed on a top side of the substrate and a die disposed adjacent to the top side of the substrate. The die includes a plurality of glassy metal bumps disposed on a bottom side of the die wherein the plurality of glassy metal bumps are to melt the plurality of solder bumps to form a liquid solder layer. The liquid solder layer is to attach the die with the substrate.
    Type: Application
    Filed: June 30, 2008
    Publication date: December 31, 2009
    Inventor: Daewoong Suh
  • Patent number: 7608915
    Abstract: A heat dissipation semiconductor package includes a chip carrier, a semiconductor chip, a heat conductive adhesive, a heat dissipation member, and an encapsulant. The semiconductor chip is flip-chip mounted on the chip carrier and defined with a heat conductive adhesive mounting area. Periphery of the heat adhesive mounting area is spaced apart from edge of the semiconductor chip. The heat dissipation member is mounted on the heat conductive adhesive formed in the heat conductive adhesive mounting area. The encapsulant formed between the chip carrier and the heat dissipation member encapsulates the semiconductor chip and the heat conductive adhesive, and embeds edges of the active surface and non-active surface and side edge of the semiconductor chip, thereby increasing bonding area between the encapsulant and the semiconductor chip. The side edges of the heat conductive adhesive and the semiconductor chip are not flush with each other, thereby preventing propagation of delamination.
    Type: Grant
    Filed: May 8, 2008
    Date of Patent: October 27, 2009
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Chun-Ming Liao, Chien-Ping Huang, Ho-Yi Tsai, Cheng-Hsu Hsiao
  • Patent number: 7564138
    Abstract: Targeted heating is employed to essentially only heat a material that is used as a spacer and to bond a first chip of a flip-chip to a second chip thereof and not the rest of the chips. In order to heat only the spacer-bonding material, one or more wires are located within, or adjacent to, the spacer-bonding material, and an electrical current is passed through the one or more wires causing them to heat. At the time of final bonding the heat generated by the one or more wires causes the spacer-bonding material to heat to its final curing temperature.
    Type: Grant
    Filed: December 23, 2004
    Date of Patent: July 21, 2009
    Assignee: Alcatel-Lucent USA Inc.
    Inventors: Flavio Pardo, Maria Elina Simon
  • Patent number: 7468554
    Abstract: A heat sink board having a first heat sink and a second heat sink with a smaller linear expansion coefficient than that of the first heat sink and being bonded to the first heat sink to form the heat sink board. The second heat sink is fitted to the first heat sink, and a material of the first heat sink in the vicinity of a boundary between the fitted heat sinks is plastically deformed for close adhesion to the second heat sink. A forming method makes bonding between the first and second heat sinks possible at room temperature, and the heat sink board made of a composite member having a high flat-surface accuracy can be easily and reliably obtained.
    Type: Grant
    Filed: March 11, 2005
    Date of Patent: December 23, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Kouji Harada, Hiroatsu Tokuda, Kazuo Ojima, Masayuki Kobayashi
  • Publication number: 20080231306
    Abstract: An integrated circuit burn-in test system includes an integrated circuit and a tester. The integrated circuit includes operating circuitry, a heater for heating the operating circuitry, and burn-in test circuitry for testing the operating circuitry while being heated. A package surrounds the operating circuitry, the heater and the burn-in test circuitry. The burn-in test circuitry causes the operating circuitry to operate and generate data related thereto. The tester receives data from the burn-in test circuitry. The heater may be configured within the package to heat at least one predetermined portion of the operating circuitry.
    Type: Application
    Filed: December 22, 2006
    Publication date: September 25, 2008
    Applicant: STMicroelectronics, Inc., State of Incorporation: Delaware
    Inventors: Riccardo Maggi, Massimo Scipioni
  • Publication number: 20080099910
    Abstract: An integrated circuit package includes an encapsulant retention structure located adjacent to a die on a substrate. The structure allows for the placement and retention of a larger quantity of encapsulant to seep under the die. The retention structure placed on the substrate may also serve as a substrate stiffener to maintain mechanical properties of the substrate, allowing use of a more desirable thinner substrate. In one embodiment, the use of openings and recesses in a stiffener allows passive electronic components to maintain mechanical properties when a thinner substrate is used. The use of either a retention wall or a stiffener allows for the manufacture of these integrated circuit package using strip, matrix, where a larger strip with a plurality of integrated circuit packages is produced industrially and then singulated.
    Type: Application
    Filed: August 30, 2007
    Publication date: May 1, 2008
    Applicant: ATI Technologies Inc.
    Inventors: Neil McLellan, Vincent Chan, Roden Topacio
  • Publication number: 20080012042
    Abstract: The temperature of a bipolar semiconductor element using a wide-gap semiconductor is raised using heating means, such as a heater, to obtain a power semiconductor device being large in controllable current and low in loss. The temperature is set at a temperature higher than the temperature at which the decrement of the steady loss of the wide-gap bipolar semiconductor element corresponding to the decrement of the built-in voltage lowering depending on the temperature rising of the wide-gap bipolar semiconductor element is larger than the increment of the steady loss corresponding to the increment of the ON resistance increasing depending on the temperature rising.
    Type: Application
    Filed: September 13, 2007
    Publication date: January 17, 2008
    Applicant: THE KANSAI ELECTRIC POWER CO., INC.
    Inventor: Yoshitaka Sugawara
  • Patent number: 7301227
    Abstract: A package for an integrated circuit (IC) die comprises a substrate and a lid. The substrate has an upper surface facing an interior of the package and a lower surface facing an exterior of the package. The upper surface of the substrate carries an IC die and provides electrical connections from the IC die to the lower surface of the substrate. The lid includes an outer lid and an inner lid. The inner lid is positioned over the IC die and is in thermal communication with the IC die. The inner lid is formed of a material suitable for conducting heat away from the IC die. The outer lid is attached to the upper surface of the substrate. A gap extends between the outer lid and inner lid.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: November 27, 2007
    Assignee: Sun Microsystems, Inc.
    Inventors: Vadim Gektin, Deviprasad Malladi
  • Patent number: 7282393
    Abstract: A microelectromechanical device package with integral a heater and a method for packaging the microelectromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate and second substrate, between which a microelectromechanical device, such as a micromirror array device is located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer is deposited, and heated by the heater so as to bond the first and second package substrates together.
    Type: Grant
    Filed: January 25, 2005
    Date of Patent: October 16, 2007
    Assignee: Texas Instruments Incorporated
    Inventor: Terry Tarn
  • Publication number: 20070117270
    Abstract: Integrated heat spreader and die coupled with solder in a manner forming an intermetallic compound having a higher liquidus temperature than the liquidus temperature of the solder used to create the intermetallic compound are described herein.
    Type: Application
    Filed: January 22, 2007
    Publication date: May 24, 2007
    Inventors: Mukul Renavikar, Susheel Jadhav
  • Publication number: 20060231944
    Abstract: A thermally enhanced semiconductor package and a fabrication method thereof are provided. A semiconductor chip is mounted and electrically connected to a chip carrier. A receiving plate having an opening is provided on the chip carrier and the semiconductor chip is received in the opening. A heat sink formed with an interface layer on a surface thereof is attached via another surface thereof to the semiconductor chip. An encapsulant encapsulating the heat sink, the semiconductor chip and a portion of the receiving plate is formed. A cutting process is performed to cut along edges of the opening of the receiving plate to remove the receiving plate and a portion of the encapsulant formed on the receiving plate. A portion of the encapsulant formed on the interface layer is removed. This allows heat produced by the semiconductor chip to be effectively dissipated by the heat sink.
    Type: Application
    Filed: April 14, 2006
    Publication date: October 19, 2006
    Applicant: Siliconware Precision Industries Co., Ltd.
    Inventors: Chien Ping Huang, Chih Ming Huang
  • Publication number: 20060175630
    Abstract: An aim of an embodiment is to reduce the volume of power modules, especially for electronic motor control devices. An area is formed between cooling elements with the aid of an annular shaped rubber seal. A semi-conductor device is sealed with a sealing compound therein. Both sides of the semi-conductor device can be cooled with cooling bodies enabling the amount of space required for the power module to be reduced.
    Type: Application
    Filed: May 21, 2004
    Publication date: August 10, 2006
    Inventor: Markus Meier
  • Patent number: 6969907
    Abstract: A first electronic device, a second electronic device which generates less heat than the first electric device, and an electrode are connected by a heat leveling plate formed of an electrically conductive material having high thermal conductivity. A heat radiation plate is provided below an insulated substrate to which the first and second electronic devices are mounted. The second electronic device is cooled by a heat radiation path which extends through the insulated substrate and the heat radiation plate and a heat radiation path which extends through the second electronic device and the electrode to the heat radiation plate. The first and the second electronic device have substantially the same temperature due to heat radiation through the heat leveling plate. As a result, cooling effect of the electronic devices can be enhanced.
    Type: Grant
    Filed: October 3, 2002
    Date of Patent: November 29, 2005
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Makoto Imai, Naoki Ogawa, Yuji Yagi, Takashi Kojima, Yasushi Yamada
  • Patent number: RE41801
    Abstract: A termoelectric thermoelectric device and method for manufacturing the thermoelectric device.
    Type: Grant
    Filed: March 31, 1998
    Date of Patent: October 5, 2010
    Assignee: Nextreme Thermal Solutions, Inc.
    Inventor: Rama Venkatasubramanian