Planar Doping (e.g., Atomic-plane Doping, Delta-doping) (epo) Patents (Class 257/E29.11)
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Patent number: 8907378Abstract: A device includes a source and a drain for transmitting and receiving an electronic charge. The device also includes a first stack and a second stack for providing at least part of a conduction path between the source and the drain, wherein the first stack includes a first gallium nitride (GaN) layer of a first polarity, and the second stack includes a second gallium nitride (GaN) layer of the second polarity, and wherein the first polarity is different from the second polarity. At least one gate operatively connected to at least the first stack for controlling a conduction of the electronic charge, such that, during an operation of the device, the conduction path includes a first two-dimensional electron gas (2DEG) channel formed in the first GaN layer and a second 2DEG channel formed in the second GaN layer.Type: GrantFiled: March 15, 2013Date of Patent: December 9, 2014Assignee: Mitsubishi Electric Research Laboratories, Inc.Inventors: Koon Hoo Teo, Peijie Feng, Rui Ma
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Patent number: 8809872Abstract: A method for forming a fin transistor in a bulk substrate includes forming a super steep retrograde well (SSRW) on a bulk substrate. The well includes a doped portion of a first conductivity type dopant formed below an undoped layer. A fin material is grown over the undoped layer. A fin structure is formed from the fin material, and the fin material is undoped or doped. Source and drain regions are provided adjacent to the fin structure to form a fin field effect transistor.Type: GrantFiled: August 16, 2013Date of Patent: August 19, 2014Assignee: International Business Machines CorporationInventors: Jin Cai, Kevin K. Chan, Robert H. Dannard, Bruce B. Doris, Barry P. Linder, Ramachandran Muralidhar
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Patent number: 8772910Abstract: A method and an apparatus for doping a graphene or nanotube thin-film field-effect transistor device to improve electronic mobility. The method includes selectively applying a dopant to a channel region of a graphene or nanotube thin-film field-effect transistor device to improve electronic mobility of the field-effect transistor device.Type: GrantFiled: November 29, 2011Date of Patent: July 8, 2014Assignee: International Business Machines CorporationInventors: Ali Afzali-Ardakani, Bhupesh Chandra, George Stojan Tulevski
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Patent number: 8598653Abstract: Systems and methods are disclosed for manufacturing grounded gate cross-hair cells and standard cross-hair cells of fin field-effect transistors (finFETs). In one embodiment, a process may include forming gate trenches and gates on and parallel to row trenches in a substrate, wherein the gate trenches and gates are pitch-doubled such that four gate trenches are formed for every two row trenches. In another embodiment, a process may include forming gate trenches, gates, and grounded gates in a substrate, wherein the gate trenches and gates are formed such that three gate trenches are formed for every two row trenches.Type: GrantFiled: September 12, 2012Date of Patent: December 3, 2013Assignee: Micron Technology, Inc.Inventor: Werner Juengling
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Patent number: 8558234Abstract: Highly efficient, low energy, low light level imagers and photodetectors are provided. In particular, a novel class of Della-Doped Electron Bombarded Array (DDEBA) photodetectors that will reduce the size, mass, power, complexity, and cost of conventional imaging systems while improving performance by using a thinned imager that is capable of detecting low-energy electrons, has high gain, and is of low noise.Type: GrantFiled: February 11, 2011Date of Patent: October 15, 2013Assignee: California Institute of TechnologyInventors: Shouleh Nikzad, Chris Martin, Michael E. Hoenk
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Patent number: 8519437Abstract: A light emitting device comprising a three-dimensional polarization-graded (3DPG) structure that improves lateral current spreading within the device without introducing additional dopant impurities in the epitaxial structures. The 3DPG structure can include a repeatable stack unit that may be repeated several times within the 3DPG. The stack unit includes a compositionally graded layer and a silicon (Si) delta-doped layer. The graded layer is compositionally graded over a distance from a first material to a second material, introducing a polarization-induced bulk charge into the structure. The Si delta-doped layer compensates for back-depletion of the electron gas at the interface of the graded layers and adjacent layers. The 3DPG facilitates lateral current spreading so that current is injected into the entire active region, increasing the number of radiative recombination events in the active region and improving the external quantum efficiency and the wall-plug efficiency of the device.Type: GrantFiled: September 14, 2007Date of Patent: August 27, 2013Assignee: Cree, Inc.Inventor: Arpan Chakraborty
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Patent number: 8487344Abstract: Disclosed is an optical device including an optical member and a contact layer stacked on at least one of top and bottom surfaces of the optical member. The contact layer has at least one transparent conducting oxynitride (TCON) layer. The TCON consists of at least one of indium (In), tin (Sn), zinc (Zn), cadmium (Cd), gallium (Ga), aluminum (Al), magnesium (Mg), titanium (Ti), molybdenum (Mo), nickel (Ni), copper (Cu), silver (Ag), gold (Au), platinum (Pt), rhodium (Rh), iridium (Ir), ruthenium (Ru), and palladium (Pd).Type: GrantFiled: December 15, 2006Date of Patent: July 16, 2013Assignee: Samsung Display Co., Ltd.Inventor: Tae-Yeon Seong
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Patent number: 8384130Abstract: Provided is a nitride semiconductor device including: a nitride semiconductor layer over a substrate wherein the nitride semiconductor has a two-dimensional electron gas (2DEG) channel inside; a drain electrode in ohmic contact with the nitride semiconductor layer; a source electrode spaced apart from the drain electrode, in Schottky contact with the nitride semiconductor layer, and having an ohmic pattern in ohmic contact with the nitride semiconductor layer inside; a dielectric layer formed on the nitride semiconductor layer between the drain electrode and the source electrode and on at least a portion of the source electrode; and a gate electrode disposed on the dielectric layer to be spaced apart from the drain electrode, wherein a portion of the gate electrode is formed over a drain-side edge portion of the source electrode with the dielectric layer interposed therebetween, and a manufacturing method thereof.Type: GrantFiled: August 3, 2011Date of Patent: February 26, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Woo Chul Jeon, Ki Yeol Park, Young Hwan Park
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Patent number: 8283650Abstract: A phase change memory cell having a flat lower bottom electrode and a method for fabricating the same. The method includes forming a dielectric layer over a substrate including an array of conductive contacts, patterning, a via having a low aspect ratio such that a depth of the via is less than a width thereof, to a contact surface of the substrate corresponding to each of the array of conductive contacts to be connected to access circuitry, etching the dielectric layer and depositing electrode material over the etched dielectric layer and within each via, and planarizing the electrode material to form a plurality of lower bottom electrodes on each of the conductive contacts.Type: GrantFiled: August 28, 2009Date of Patent: October 9, 2012Assignees: International Business Machines Corporation, Macronix International Co., Ltd.Inventors: Matthew J. Breitwisch, Eric A. Joseph, Chung H. Lam, Hsiang-Lan Lung, Alejandro G. Schrott
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Patent number: 8264004Abstract: A method of fabricating a quantum well device includes forming a diffusion barrier on sides of a delta layer of a quantum well to confine dopants to the quantum well.Type: GrantFiled: March 1, 2010Date of Patent: September 11, 2012Assignee: Intel CorporationInventors: Been-Yih Jin, Jack T. Kavalieros, Suman Datta, Amlan Majumdar, Robert S. Chau
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Patent number: 8253220Abstract: A nitride semiconductor device includes a first nitride semiconductor layer formed on a substrate, a defect induced layer formed on the first nitride semiconductor layer, and a second nitride semiconductor layer formed on the defect induced layer, contacting the defect induced layer, and having an opening through which the defect induced layer is exposed. The defect induced layer has a higher crystal defect density than those of the first and second nitride semiconductor layers.Type: GrantFiled: July 11, 2011Date of Patent: August 28, 2012Assignee: Panasonic CorporationInventors: Ryo Kajitani, Satoshi Tamura, Hideki Kasugai
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Patent number: 8242495Abstract: A digital X-ray detecting panel includes a wavelength transforming layer and a photoelectric detecting plate. The wavelength transforming layer is configured for transforming X-ray into visible light. The photoelectric detecting plate is disposed under the wavelength transforming layer. The photoelectric detecting plate includes a substrate and a number of photoelectric detecting units disposed on the substrate and arranged in an array. Each of the photoelectric detecting units includes a thin film transistor and a photodiode electrically connected to the thin film transistor. The thin film transistor has an oxide semiconductor layer. The digital X-ray detecting panel can avoid a photocurrent in the thin film transistor, and thereby improving detecting accuracy of the digital X-ray detecting panel. A method for manufacturing the digital X-ray detecting panel is also provided.Type: GrantFiled: February 2, 2010Date of Patent: August 14, 2012Assignee: E Ink Holdings Inc.Inventors: Fang-An Shu, Lee-Tyng Chen, Henry Wang, Wei-Chou Lan
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Patent number: 7847315Abstract: A high-efficiency power semiconductor rectifier device (10) comprising a ?P++ layer (12), a P-body (14), an N-drift region (16), an N+ substrate (18), an anode (20), and a cathode (22). The method of fabricating the device (10) comprises the steps of depositing the N-drift region (16) on the N+ substrate (18), implanting boron into the N-drift region (16) to create a P-body region (14), forming a layer of titanium silicide (56) on the P-body region (14), and concentrating a portion of the implanted boron at the interface region between the layer of titanium silicide (56) and the P-body region (14) to create the ?P++ layer (12) of supersaturated P-doped silicon.Type: GrantFiled: March 9, 2007Date of Patent: December 7, 2010Assignee: Diodes Fabtech Inc.Inventors: Roman J. Hamerski, Zerui Chen, James Man-Fai Hong, Johnny Duc Van Chiem, Christopher D. Hruska, Timothy Eastman
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Patent number: 7649243Abstract: A semiconductor structure includes a semiconductor mesa located upon an isolating substrate. The semiconductor mesa includes a first end that includes a first doped region separated from a second end that includes a second doped region by an isolating region interposed therebetween. The first doped region and the second doped region are of different polarity. The semiconductor structure also includes a channel stop dielectric layer located upon a horizontal surface of the semiconductor mesa over the second doped region. The semiconductor structure also includes a first device located using a sidewall and a top surface of the first end as a channel region, and a second device located using the sidewall and not the top surface of the second end as a channel. A related method derives from the foregoing semiconductor structure. Also included is a semiconductor circuit that includes the semiconductor structure.Type: GrantFiled: November 6, 2006Date of Patent: January 19, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak, Jed H. Rankin
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Patent number: 7429747Abstract: A group III-V material CMOS device may have NMOS and PMOS portions that are substantially the same through several of their layers. This may make the CMOS device easy to make and prevent coefficient of thermal expansion mismatches between the NMOS and PMOS portions.Type: GrantFiled: November 16, 2006Date of Patent: September 30, 2008Assignee: Intel CorporationInventors: Mantu K. Hudait, Suman Datta, Jack T. Kavalieros, Mark L. Doczy, Robert S. Chau
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Patent number: 7388289Abstract: An interconnect comprises a trench and a number of metal layers above the trench. The trench has a depth and a width. The depth is greater than a critical depth, and the number of metal layers is a function of the width. In an alternate embodiment, a metallization structure having a trench including a metal layer and a second trench including a plurality of metal layers coupled to the metal layer is disclosed. The metal layer is highly conductive, and at least one of the plurality of metal layers is a metal layer that is capable of being reliably wire-bonded to a gold wire. The trench is narrower than the second trench, and at least one of the plurality of metal layers is copper or a copper alloy.Type: GrantFiled: September 2, 1999Date of Patent: June 17, 2008Assignee: Micron Technology, Inc.Inventor: Howard E. Rhodes