N: Light-controlled Ovshinsky Devices (epo) Patents (Class 257/E45.004)
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Patent number: 8829484Abstract: Some embodiments include methods of forming memory structures. An electrically insulative line is formed over a base. Electrode material is deposited over the line and patterned to form a pair of bottom electrodes along the sidewalls of the line. Programmable material is formed over the bottom electrodes, and a top electrode is formed over the programmable material. The bottom electrodes may each contain at least one segment which extends at angle of from greater than 0° to less than or equal to about 90° relative to a planar topography of the base. Some embodiments include memory structures having a bottom electrode extending upwardly from a conductive contact to a programmable material, with the bottom electrode having a thickness of less than or equal to about 10 nanometers. Some embodiments include memory arrays and methods of forming memory arrays.Type: GrantFiled: August 26, 2013Date of Patent: September 9, 2014Assignee: Micron Technology, Inc.Inventor: Scott E. Sills
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Patent number: 8785213Abstract: A sacrificial pattern is formed to partially cover the pipe-shaped electrode. A sacrificial spacer is formed on a lateral surface of the sacrificial pattern. The sacrificial spacer extends across the pipe-shaped electrode. The sacrificial spacer has a first side and a second side opposite the first side. The sacrificial pattern is removed to expose the pipe-shaped electrode proximal to the first and second sides of the sacrificial spacer. The pipe-shaped electrode exposed on both sides of the sacrificial spacer may be primarily trimmed. The pipe-shaped electrode is retained under the sacrificial spacer to form a first portion, and a second portion facing the first portion. The second portion of the pipe-shaped electrode is secondarily trimmed. The sacrificial spacer is removed to expose the first portion of the pipe-shaped electrode. A data storage plug is formed on the first portion of the pipe-shaped electrode.Type: GrantFiled: June 12, 2012Date of Patent: July 22, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Gyu-Hwan Oh, Doo-Hwan Park
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Patent number: 8536562Abstract: Some embodiments include methods of forming memory structures. An electrically insulative line is formed over a base. Electrode material is deposited over the line and patterned to form a pair of bottom electrodes along the sidewalls of the line. Programmable material is formed over the bottom electrodes, and a top electrode is formed over the programmable material. The bottom electrodes may each contain at least one segment which extends at angle of from greater than 0° to less than or equal to about 90° relative to a planar topography of the base. Some embodiments include memory structures having a bottom electrode extending upwardly from a conductive contact to a programmable material, with the bottom electrode having a thickness of less than or equal to about 10 nanometers. Some embodiments include memory arrays and methods of forming memory arrays.Type: GrantFiled: February 22, 2012Date of Patent: September 17, 2013Assignee: Micron Technology, Inc.Inventor: Scott E. Sills
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Patent number: 8536015Abstract: In accordance with aspects of the invention, a method of forming a metal-insulator-metal stack is provided. The method includes forming a first conducting layer, forming a resistivity-switching carbon-based material above the first conducting layer, and forming a second conducting layer above the carbon-based material, wherein the carbon-based material has a thickness of not more than ten atomic layers. Other aspects are also described.Type: GrantFiled: January 17, 2012Date of Patent: September 17, 2013Assignee: SanDisk 3D LLCInventors: Roy E. Scheuerlein, Alper Ilkbahar, April D. Schricker
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Patent number: 8390124Abstract: Provided is a semiconductor device including a substrate, and a first wiring layer, a second wiring layer, and a switch via formed on the substrate. The first wiring layer has first wiring formed therein and the second wiring layer has second wiring formed therein. The switch via connects the first wiring and the second wiring. The switch via includes at least at its bottom a switch element including a resistance change layer. A resistance value of the resistance change layer changes according to a history of an electric field applied thereto.Type: GrantFiled: February 16, 2010Date of Patent: March 5, 2013Assignee: Renesas Electronics CorporationInventors: Naoya Inoue, Yoshihiro Hayashi, Kishou Kaneko
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Patent number: 8110476Abstract: In accordance with aspects of the invention, a method of forming a memory cell is provided, the method including forming a steering element above a substrate, and forming a memory element coupled to the steering element, wherein the memory element comprises a carbon-based material having a thickness of not more than ten atomic layers. The memory element may be formed by repeatedly performing the following steps: forming a layer of a carbon-based material, the layer having a thickness of about one monolayer, and subjecting the layer of carbon-based material to a thermal anneal. Other aspects are also described.Type: GrantFiled: April 6, 2009Date of Patent: February 7, 2012Assignee: SanDisk 3D LLCInventors: Roy E. Scheuerlein, Alper Ilkbahar, April D. Shricker
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Patent number: 7910913Abstract: A phase change memory device includes a switching device and a storage node connected to the switching device. The storage node includes a bottom stack, a phase change layer disposed on the bottom stack and a top stack disposed on the phase change layer. The phase change layer includes a unit for increasing a path of current flowing through the phase change layer and reducing a volume of a phase change memory region. The area of a surface of the unit disposed opposite to the bottom stack is greater than or equal to the area of a surface of the bottom stack in contact with the phase change layer.Type: GrantFiled: December 14, 2007Date of Patent: March 22, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Hyuk-soon Choi, Ji-hyun Hur, Yoon-ho Kang, Hyo-sug Lee, Jai-kwang Shin, Jae-joon Oh
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Patent number: 7319235Abstract: A nonvolatile, resistively switching memory cell has a layer of a porous dielectric between a first electrode. The dielectric is not a chalcogenide.Type: GrantFiled: June 23, 2005Date of Patent: January 15, 2008Assignee: Infineon Technologies AGInventor: Thomas Happ