Abstract: A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.

Abstract: Approaches for a magnetic write head having an adjacent coil architecture, wherein a coil turn is fabricated immediately adjacent to the writer main pole. The adjacent portion essentially lies on the main pole, except for a very thin layer of insulation atomically layered in between. The adjacent coil portion is also substantially closer o the wrap-around shield in comparison with conventional coil configurations. Further, the other upper coil portions may be fabricated to essentially lie on the stitch pole, again except for a very thin atomic layer deposited layer of insulation layered between. This adjacent coil configuration provides a writer coil configuration that concentrates the coil structure significantly closer to the main pole surface, as well as concentrates more of the coil structure closer to the main pole tip, providing for a more efficient and faster write head.

Abstract: A method in one approach includes forming a first layer of a nonmagnetic material over two sides of a structure, the first layer being substantially absent from above a top of the structure; depositing an overlayer of an etchable, nonmagnetic material over the first layer and the top of the structure; and etching the overlayer for substantially removing the overlayer from above the top of the structure, wherein a substantial portion of the overlayer remains along the two sides of the structure after the etching. Additional systems and methods are also presented.

Abstract: A thin-film magnetic head is constructed such that a main magnetic pole layer, a write shield layer, a gap layer, and a thin-film coil are laminated on a substrate. The thin-film magnetic head has a shield magnetic layer. The shield magnetic layer has a leading shield part. The leading shield part is disposed on a substrate side of the main magnetic pole layer. The leading shield part has a variable distance structure in which a rearmost part most distanced from the medium-opposing surface is distanced more from the main magnetic pole layer than is a foremost part on the main magnetic pole layer side.

Abstract: A manufacturing method for a thin-film magnetic head including first and second magnetic layers, a gap layer, a thin-film coil, and a coil insulating layer for insulating neighboring ones of turns of the thin-film coil. The manufacturing method includes the steps of: forming the first magnetic layer; forming the gap layer on the first magnetic layer; forming the second magnetic layer on the gap layer; forming the thin-film coil; and forming the coil insulating layer. The coil insulating layer is formed by stacking a plurality of insulating films formed by chemical vapor deposition.

Abstract: In one embodiment and method of the present invention, a coil of a write head is created by forming a P1 pedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.

Abstract: A multi-turn coil device comprising a flexible circuit board and a plurality of serially electrically coupled coils coupled to both sides of the flexible circuit board. The coils are formed such that when the circuit board is folded in an accordion manner, the coils are substantially aligned and have the same direction of current flow. The coils are serially coupled sequentially from front to back and back to front wherein the coupling of the coils is through a plated through hole in the flexible circuit board.

Abstract: A plurality of shaped wires, which are obtained by shaping electric wires, are assembled to form a wire assembly 47. The wire assembly 47 is then rolled around a core member 6 with aligning members 7 being inserted into spaces 472 formed between adjacent ones of straight superposed parts 471 of the wire assembly 47.

Abstract: Methods for manufacturing a magnetic head for a disk drive. The methods include the steps of depositing a first non-magnetic spacer layer, depositing a plating seed layer on the first non-magnetic spacer layer and plating at least one side shield and a pole tip layer on the plating seed layer, each of the at least one side shield and the pole tip layer separated by a trench. Then the method includes depositing a first non-magnetic material in the trench using ion-beam assisted deposition and planarizing using a chemical-mechanical polishing step.

Abstract: An apparatus and method are disclosed that may include a contact pin; and a plurality of loops of conductive wire, coated with insulation material, disposed in proximity to the contact pin, wherein along at least one portion of the conductive wire, at least one edge of the contact pin extends through the insulation material and thereby forms conductive electrical contact with the conductive wire.

Abstract: A process (and the structure resulting therefrom) is described for manufacturing a magnetic write head in which there is no physical interface between the first and second trailing shields. This is achieved by laying down a sacrificial layer which is patterned to extend inwards towards the top yoke whereby the dimensions and shapes of the shields are defined.

Abstract: A method is provided for producing windings for a dry-type transformer with in each case one winding for the low voltage (LV winding) and one for the high voltage (HV winding). The LV and HV windings are each electrically insulated from one another and have layers which are electrically insulated from one another by virtue of, initially, the winding for the low voltage being produced from electrically conductive wire or tape material and an insulating layer including resin-impregnated fibre material. Prior to the application of the HV winding, the maximum insulating thickness for the layer insulation and the number of fiber rovings corresponding to this insulating thickness can be determined, and each winding layer and the associated insulating layer can be produced simultaneously with a physical offset with respect to one another.

Abstract: A method is provided that utilizes silicon through via technology, to build a Toroid into the chip with the addition of a layer of magnetic material such as Nickel above and below the T-coil stacked multi-ring structure. This allows the connection between the inner via and an array of outer vias. This material is added on a BEOL metal layer or as an external coating on the finished silicon. Depending on the configuration and material used for the via, the inductance will increase approximately two orders of magnitude (e.g., by utilizing a nickel via core). Moreover, a ferrite material with proper thermal conduction properties is used in one embodiment.

Abstract: Embodiments of the present invention help to provide a perpendicular magnetic recording head capable of writing a signal in a track having a small width. According to one embodiment, a perpendicular magnetic recording head includes an auxiliary pole, a main pole, a yoke, a coil, a first soft magnetic film and a second soft magnetic film. The yoke is in contact with the main pole. The coil is wound around a magnetic circuit composed of the auxiliary and main poles and the yoke. The first soft magnetic film is provided on both sides of the main pole with a non-magnetic film provided between the first soft magnetic film and the main pole. The second soft magnetic film is provided on the trailing side of the main pole with the non-magnetic film provided between the second soft magnetic film and the main pole. The first and second soft magnetic films are two types of plated magnetic films. One type of the plated magnetic films have respective thicknesses of 0.

Abstract: An inductor embedded in a substrate, including a substrate, a coil electrode formed by filling a metal in a spiral hole formed on the substrate, an insulation layer formed on the substrate, and an external connection pad formed on the insulation layer to be connected to the coil electrode. The inductor-embedded substrate can be used as a cap for a micro device package by forming a cavity on its bottom surface.

Abstract: There is provided a method of manufacturing a coil component, where a first insulation layer is formed on a first magnetic substrate, an insulation film is formed on the first insulation layer, a coil conductor is formed on the insulation film, another insulation film is formed on the coil conductor, and an open region is formed on the inner circumference side and on the outer circumference side of the coil conductor. A magnetic later is embedded, at least partially, in the open region, and a second magnetic substrate is secured on the magnetic layer. Also, a plurality of electrode terminals are formed, where one of the electrode terminals is connected to a terminal portion of the coil conductor, and the electrode terminals are provided across sides of the first and second magnetic substrates. Therefore, the first insulation layer can suitably prevent shorting failures between the electrode terminals.

Abstract: An apparatus includes a first magnetic resonance (MR) coil element configured to output a first set of MR data at a first output frequency and a first mixer coupled to the first MR coil element. The first mixer is configured to receive the first set of MR data from the first MR coil element and frequency translate the first set of MR data to a first offset frequency different from the first output frequency by a first offset value. The apparatus also includes a digitizer coupled to the first mixer and configured to convert the frequency-translated first set of MR data into a set of digital data and a transmission line coupled to the first mixer and to the digitizer, the transmission line configured to transmit the frequency-translated first set of MR data from the MR coil element to the digitizer without a balun coupled to the transmission line.

Abstract: A substructure in which a plurality of pre-head portions are aligned in rows is to be cut later so that the pre-head portions are separated from one another. A surface formed by cutting the substructure is lapped to form medium facing surfaces. The substructure includes a plurality of sensors that respectively show individual sensor values corresponding to values of a plurality of different parameters each of which has an influence on characteristics relating to the pole layer and each of which depends on the position of the medium facing surface. The individual sensor values are resistance values each of which varies according to the position of the medium facing surface. The plurality of sensors are electrically connected to each other to form a composite sensor that shows a composite sensor value, which is a resistance value that depends on the resistance values of the plurality of sensors.

Abstract: A method of forming a reinforced slider body for use in a recording head having a transducer that is bi-directionally movable with respect to a surface of a magnetic medium. The method includes the steps of defining in a surface of a wafer a plurality of dice lanes having side walls to delineate a plurality of slider bodies on the wafer where the side walls having an angled configuration with respect to the wafer surface, polishing the dice lanes such that the interface between the wafer surface and the side walls is rounded, implanting a substance into the dice lanes; and applying a diamond-like carbon coating to the bottom surface and side walls of the dice lanes.

Abstract: A resist pattern for lift-off is formed on a first film composed of one or more layers deposited on a substrate. The first film is patterned by dry-etching using the resist pattern as a mask. Subsequently, a second film is deposited with presence of the resist pattern on the first film. Then, the resist pattern for lift-off is removed for conducting lift-off. Subsequently, the resulting substrate is etched. In the etching, the substrate is dry-etched using etching particles which are oriented at an incident angle set in a range of 60 ° to 90 ° relative to the normal direction of the substrate.

Abstract: The present invention provides a thin film magnetic head capable of suppressing unintentional wiring to a neighboring track and preventing information recorded on a recording medium from being erased. A main magnetic pole layer is constructed so that height of a widened end surface in a lower main magnetic pole layer specifying a wide portion is smaller than height of an exposed surface in an upper main magnetic pole layer (front end portion) specifying a uniform width portion.

Abstract: A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.

Abstract: A method of manufacturing a 3-D spiral stacked inductor is provided having a substrate with a plurality of turns in a plurality of levels wherein the number of levels increases from an inner turn to the outer turn of the inductor. First and second connecting portions are respectively connected to an inner turn and an outermost turn, and a dielectric material contains the first and second connecting portions and the plurality of turns over the substrate.

Abstract: A main magnetic pole of a recording head is formed in an inverted trapezoidal shape by ion milling but, the long milling time poses a problem of variations in the inverted trapezoidal shape and the dimensional variations in track width. In one embodiment of the invention, a recording head is formed by first forming a lower magnetic pole, a gap layer, and conductor coils, forming an upper magnetic yoke over the gap layer at a position recessed from the air bearing surface, and forming an inorganic insulative layer in the recessed portion. A back magnetic pole connected with the upper magnetic yoke is formed on the back of the lower electrode. Successively, the upper surfaces of the inorganic insulative layer and the upper magnetic yoke are planarized, on which an underlayer film such as of Rh is formed. A magnetic layer is formed by stacking a plurality of thin magnetic films by sputtering over the underlayer film from the air bearing surface as far as the position overlapping the upper magnetic yoke.

Abstract: The lapping of a slider is controlled based on an amplitude of a readback signal which is produced from an externally applied magnetic field. A lapping plate is used to lap a slider which includes at least one magnetic head having a read sensor. During the lapping, a coil produces a magnetic field around the slider and processing circuitry monitors both a readback signal amplitude and a resistance of the read sensor. The lapping of the slider is terminated based on the monitoring both the readback signal amplitude and the resistance. Preferably, the lapping of the slider is terminated when the resistance is within a predetermined resistance range and the readback signal amplitude is above a predetermined minimum amplitude threshold or reaches its peak value. Asymmetry can also be measured in the described system, where the lapping process is terminated based on asymmetry as well as resistance and amplitude measurements.

Abstract: A method of making a perpendicular magnetic recording (PMR) head with single or double coil layers and with a small write shield stitched onto a main write shield. The stitched shield allows the main write pole to produce a vertical write field with sharp vertical gradients that is reduced on both sides of the write pole so that adjacent track erasures are eliminated. From a fabrication point of view, both the main pole and the stitched shield are defined and formed using a single photolithographic process, a trim mask and CMP lapping process so that the main shield can be stitched onto a self-aligned main pole and stitched shield.

Abstract: A method of manufacturing a thin-film magnetic head, the thin-film magnetic head including a recording head, includes the steps of: forming a first magnetic layer; forming a recording gap layer on the first magnetic layer; forming a second magnetic layer on the recording gap layer; and forming a thin-film coil. The recording gap layer is formed by stacking a plurality of insulating films formed by chemical vapor deposition.

Abstract: In a manufacturing process of a head slider according to one embodiment, a flare point height of a main pole is estimated according to the following procedure. Magnetic field intensity is measured by a sensor, and a maximum point of the magnetic field is assumed as a center of the main pole. The measurement is moved from the center point along a Z direction, such that a measurement value corresponds to a reference value. An attenuation rate (a gradient) of a measurement value of magnetic field intensity to displacement in the Z direction of the measurement point is calculated and normalized with the measurement value, and plotted with respect to the measurement value itself. The gradient is compared to a gradient in a database of samples being separately prepared, each sample having known flare point height, allowing an estimation of the flare point height of the said sample from the comparison.

Abstract: A manufacturing process is provided where aggressive (i.e. tight tolerance) stitching offers several advantages for magnetic write heads but at the cost of some losses during pole trimming. This problem has been overcome by replacing the alumina filler layer, that is used to protect the stitched pole during trimming, with a layer of electroplated material. Because of the superior step coverage associated with the plating method of deposition, pole trimming can then proceed without the introduction of stresses to the stitched pole while it is being trimmed.

Abstract: A method for fabricating a magnetic write head with a coil with a high aspect ratio using a Chemical Vapor Deposition process such as Atomic Layer Deposition (ALD), High Speed ALD, Plasma Enhanced ALD (PEALD), Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD) to form encapsulating films over the coils without voids is disclosed. Materials which can be used for encapsulation include Al2O3, SiO2, AlN, Ta2O5, HfO2, ZrO2, and YtO3. The use of an ultra-conformal deposition process allows the pitch of the coils to be smaller than it is possible in the prior art. The method also allows materials with a smaller coefficient of thermal expansion than hardbake photoresist to be used with resulting improvements in thermal protrusion characteristics.

Abstract: There are proposed a manufacturing method of a winding assembly of a rotating electrical machine using a rotation block and a fixed block and a manufacturing apparatus used for the same. The rotation block includes a rotation surface rotatable around a rotation axis, and the fixed block includes a first surface and a second surface opposite to each other and a shaping surface. The shaping surface is formed between end parts of the first and the second surfaces, is made to have an almost semicircular shape with the rotation axis as the center, and extends along the rotation axis. Plural wire rods are simultaneously fed from the first surface of the fixed block to the rotation surface of the rotation block, and the wire rods positioned on the rotation surface are bent by rotation of the rotation block.

Abstract: An actuator/coil assembly (136) is disclosed where two different bonding operations are used. First, a bobbin (164) is overmolded to a coil (172), and a first overmolded part (176) is overmolded to both the coil (172) and a fan tail (152) of the actuator (140). The overmolding operation defines one or more adhesive receptacles (168) in the bobbin (164) on a perimeter that interfaces with the coil (172), and further defines one or more adhesive receptacles (180) in the first overmolded part (176) on a perimeter that interfaces with the coil (172) and that interfaces with the fan tail (152) of the actuator (140). Adhesive (184) is disposed within these receptacles (168, 180) to increase the stiffness of the actuator/coil assembly (136).

Abstract: An electromagnetic component is formed from a pre-form comprising layers of soft magnetic metal ribbon. Adhesive is applied to permeate the pre-form and is then cured. The bonded pre-form is placed within a milling assembly that supports and constrains the ribbon layers during a milling operation used to process the pre-form into an electromagnetic component shape. Optionally, the shape is thermally processed. The resulting electromechanical component has attractive soft magnetic properties, including low core loss, that render it useful as a component in electric motors and generators and static inductive devices operable at high excitation frequencies.

Abstract: A method for manufacturing a magnetostrictive torque sensor having low nonuniformity of sensitivity characteristics. The residual austenite content in the rotating shaft of the torque sensor is measured first. A magnetic film is subsequently subjected to a heat treatment under heat treatment conditions that are different for each of the measured residual austenite contents, and magnetic anisotropy is imparted.

Abstract: The invention is directed to a method for manufacturing a thin film magnetic head comprising forming a first coil, a first pole piece and a first back gap piece on a first insulating film formed on a surface of a first magnetic film, so that the first coil, the first pole piece and the first back gap piece have a taper angle making a sectional shape wider in a lower part and narrower in an upper part; forming a second insulating film on surfaces of the first coil, the first pole piece and the first back gap piece; forming a first seed film on the second insulating film; growing a first plating film for a second coil on the first seed film in an area where the second coil is to be formed, so that the first plating film fills up spaces between the first pole piece and an outermost coil turn of the first coil, between coil turns of the first coil, and between an innermost coil turn of the first coil and the first back gap piece; and flattening the first plating film by polishing, so that to obtain a pattern of t

Abstract: A method of manufacturing a thin-film magnetic head including the step of forming a thin-film coil. The step of forming the thin-film coil forms: a flat first coil of a single turn; a flat second coil of two turns arranged to sandwich the first coil from inner and outer sides thereof; a flat third coil of a single turn located above the first and second coils; and a flat fourth coil of two turns arranged to sandwich the third coil from inner and outer sides thereof. The first and fourth coils are connected in series to constitute a first three-turn coil. The second and third coils are connected in series to constitute a second three-turn coil. The first three-turn coil and the second three-turn coil are connected in series.

Abstract: A method of manufacturing a magnetic head is disclosed. The steps of manufacture include the formation of an underlying layer made of a material whose etching rate of ion beam etching is higher than that of a magnetic alloy used to make a pole layer, and the formation of a magnetic layer, which includes a portion of the magnetic layer to be etched that will be formed into a track width defining portion by making its side surfaces sloped through etching. The magnetic layer is formed such that the portion to be etched is disposed on the underlying layer. The side surfaces of the portion to be etched by the ion beam etching are etched so that the magnetic layer is formed into the pole layer and so that the end face of the track width defining portion located in the medium facing surface has a width that decreases with decreasing distance from the substrate.

Abstract: A method and apparatus for forming a high conductance, high aspect ratio structure in a single low temperature copper chemical vapor deposition step. A trench for a winding of a coil is formed by forming a first length of the trench in the insulation layer. The first length of the trench forms a first portion of the winding of the coil in a confined area proximate a yoke region. A second length of trench is formed in the insulation layer extending away from the first length of the trench and the yoke region. The second length of trench includes parallel trenches for forming a second portion of the winding in a nonconfined area. A metal is deposited into the first length of the trench and the second length of the trench to form the first and second portions of the winding of the coil.

Abstract: A method of fabrication of the write head of a perpendicular recording head allows for production of P3 pole tips of width less than 200 nm (200×10?9 meters). The method includes fabricating the P2 flux shaping layer, depositing the P3 layer, depositing a layer of ion-milling resistant material, depositing at least one sacrificial layer, shaping the P3 layer into P3 pole tip, removing the at least one sacrificial layer to leave the P3 pole tip, and encapsulating the P3 pole tip.

Abstract: A method of fabricating an inductor includes selecting a substrate, depositing a layer of magnetic material on the substrate, depositing an insulating layer on the magnetic material layer, forming a inductor pattern from gold on the insulating layer, depositing a second insulating layer on the inductor pattern, and depositing a second magnetic material layer on the second insulating layer.

Abstract: A pole-layer-encasing layer made of a nonmagnetic material is disposed on an underlying layer made of a nonmagnetic conductive material. The encasing layer has a groove that penetrates. A pole layer is disposed in the groove. The pole layer is formed by plating through feeding a current to the underlying layer. A polishing stopper layer made of a nonmagnetic conductive material is disposed on the top surface of the encasing layer. The polishing stopper layer indicates the level at which polishing for controlling the thickness of the pole layer is stopped. The polishing stopper layer has an opening that penetrates, and the edge of the opening is located directly above the edge of the groove located in the top surface of the encasing layer.

Abstract: A method of manufacturing a thin-film coil in which a first coil and a second coil each having a desired number of winding are electrically connected in series and the second coil is formed between winding portions of the first coil on substantially the same plane, comprising: forming the first coil having a predetermined number of windings via a first insulating film; forming a second insulating film on a surface of the first coil and between the winding portions of the first coil; forming an underlying conductive film on the second insulating film, and treating the underlying conductive film so as to leave only the bottom portions of the underlying conducting film between the winding portions of the first coil; and growing deposition originating from a remaing portion of the underlying conductive film on the bottom portions of the underlying conducting film between the winding portions of the first coil so as to form the second coil.

Abstract: The lapping of a slider is controlled based on an amplitude of a readback signal which is produced from an externally applied magnetic field. A lapping plate is used to lap a slider which includes at least one magnetic head having a read sensor. During the lapping, a coil produces a magnetic field around the slider and processing circuitry monitors both a readback signal amplitude and a resistance of the read sensor. The lapping of the slider is terminated based on the monitoring both the readback signal amplitude and the resistance. Preferably, the lapping of the slider is terminated when the resistance is within a predetermined resistance range and the readback signal amplitude is above a predetermined minimum amplitude threshold or reaches its peak value. Asymmetry can also be measured in the described system, where the lapping process is terminated based on asymmetry as well as resistance and amplitude measurements.

Abstract: A system and method are provided for manufacturing a coil structure for a magnetic head. Initially, an insulating layer is deposited with a photoresist layer deposited on the insulating layer. Moreover, a silicon dielectric layer is deposited on the photoresist layer as a hard mask. The silicon dielectric layer is then masked. A plurality of channels is subsequently formed in the silicon dielectric layer using reactive ion etching (i.e. CF4/CHF3). The silicon dielectric layer is then used as a hard mask to transfer the channel pattern in the photoresist layer using reactive ion etching with, for example, H2/N2/CH3F/C2H4 reducing chemistry. To obtain an optimal channel profile with the desired high aspect ratio, channel formation includes a first segment defining a first angle and a second segment defining a second angle. Thereafter, a conductive seed layer is deposited in the channels and the channels are filled with a conductive material to define a coil structure.

Abstract: A thin film magnetic head is described, the magnetic head having an insulating layer and a protrusion which has an upper portion and a base portion, and the upper portion has an extended portion. The insulating layer is present under the extending part. A method of manufacturing the magnetic head includes forming a first insulating layer around the lower core layer; simultaneously forming a coil layer by plating the lower core layer with a coil insulating underlayer interposed between the lower coil layer and a coil lead layer connected to the coil layer on the first insulating layer; forming a coil insulating layer of an inorganic material on the coil layer and the coil lead layer; and, simultaneously forming a first plating underlayer for forming an upper core layer by plating, a second plating underlayer on the first coil lead layer exposed through the plating-forming opening, and a current-carrying lead layer.

Abstract: There are proposed a manufacturing method of a winding assembly of a rotating electrical machine using a rotation block and a fixed block and a manufacturing apparatus used for the same. The rotation block includes a rotation surface rotatable around a rotation axis, and the fixed block includes a first surface and a second surface opposite to each other and a shaping surface. The shaping surface is formed between end parts of the first and the second surfaces, is made to have an almost semicircular shape with the rotation axis as the center, and extends along the rotation axis. Plural wire rods are simultaneously fed from the first surface of the fixed block to the rotation surface of the rotation block, and the wire rods positioned on the rotation surface are bent by rotation of the rotation block.

Abstract: A method for manufacturing a thin film magnetic head comprises forming a first magnetic core extending from a surface facing a recording medium in a height direction. The method further comprises forming first coil pieces from a first conductive material on the coil insulating underlayer at a side of the surface facing the recording medium with respect to the connecting region, and simultaneously forming a first metal layer from said first conductive material on the first magnetic core in the back region located from the connecting region in the height direction. The method also comprises forming a coil insulating layer for covering the first coil pieces, and forming the second magnetic core above the first magnetic core.

Abstract: The induction coil of the magnetic head of the present invention is fabricated in a patterned electrical insulation material, preferably utilizing reactive ion etch (RIE) techniques. The electrical insulation material is particularly patterned such that it is formed away from the ABS surface and in the location of the induction coil. A fill layer is deposited around the patterned electrical insulation material layer, such that the fill layer is disposed at the ABS surface. In a preferred embodiment, the patterned electrical insulation material is initially fabricated from hard baked photoresist and subsequent to the deposition of the fill layer the hard baked photoresist material is removed and replaced by SiO2. The SiO2 is thereby located away from the ABS surface and the induction coil is subsequently fabricated within the SiO2 material.

Abstract: A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.

Abstract: A invention provides a method of manufacturing a thin film magnetic head is provided, capable of forming a magnetic pole layer as easily as possible. By etching a lower insulating layer and the upper insulating layer by RIE using a fluorine-based gas (CF4 or CHF3) or chlorine-based gas (Cl2 or BCl3), a magnetic pole formation space R1 is formed so as to have a uniform width in an upper insulating layer by and a magnetic pole formation space R2 is formed in the lower insulating layer so as to have a width gradually narrowed from width W1 to width W4 with distance from the magnetic pole formation space R1. After that, a plating film is grown in the magnetic pole formation spaces R1 and R2, thereby forming a main magnetic pole layer.