Abstract: A Chemical Mechanical Polish (CMP) process and slurry therefore slurry that is capable of removing NiFe, SiO2, Photoresist, Ta, alumina and Cu at substantially the same rate. The slurry is useful for obtaining a substantially planar surface of several materials while avoiding corrosion of Cu coil and NiFe structure.

Abstract: A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.

Abstract: A method for protecting a write head coil during write pole notching using ion mill resistant mask formed by reactive ion etching is disclosed. Ion mill shaping of the write pole is performed after depositing an ion mill-resistant material to protect the coil.

Abstract: A pattern forming method includes forming a resist pattern for lift off of a first film disposed on a surface side of a base, patterning the first film by dry etching using the resist pattern as a mask, depositing a second film after patterning, removing the resist pattern to remove a portion of the second film on the resist pattern, and etching the surface side of the base after removing the resist pattern. The etching includes dry-etching the surface side of the base using etching particles with a main incident angle of the etching particles to the surface side of the base being set in a range of 60° to 90° relative to a normal direction of the one surface of the base. The dry etching is performed while rotating the base about an axis substantially parallel with the normal direction.

Abstract: A method for fabricating a coil and pedestal for a write head using a common seed layer is described. A nonmetallic gap layer is deposited on a planarized pole piece surface. Openings for the pole piece pedestal and the back gap pole piece are etched through the nonmetallic gap layer. A seed layer comprising a magnetic material is deposited on the etched gap layer. Preferably the coil is fabricated first on the planar surface of the seed layer. The coil structure, the pedestal pole piece, back-gap pole piece, side and center tap connections are fabricated on the same seed layer. The remaining seed layer is removed, the coil is encapsulated, the wafer is refilled with alumina and the wafer is planarized. The prior art process can be resumed at this point. Optionally a second seed layer such as copper (Cu) can be used.

Abstract: A method of assembly of a disk drive including providing a disk drive base. The method further includes providing a first VCM plate with an attached first magnet. The method further includes applying a holding force against the first VCM plate for holding the first VCM plate against the disk drive base. The method further includes providing a second VCM plate with an attached second magnet. The first and second VCM plates being cooperatively formed to engage each other with the first and second magnets facing towards each other with a magnetic attractive force. The method further includes engaging the second VCM plate with the first VCM plate while maintaining the holding force against the first VCM plate greater than the magnetic attractive force between the first and second magnets.

Abstract: A main pole layer of a magnetic head includes a first portion disposed at a distance from a medium facing surface, and a second portion that is smaller in thickness than the first portion and disposed between the first portion and the medium facing surface. The step of forming the main pole layer includes the steps of forming a plating layer such that one of ends of the plating layer closer to the medium facing surface is located at a position that coincides with the position of one of ends of the first portion closer to the medium facing surface; forming a first nonmagnetic layer to cover the plating layer; polishing the first nonmagnetic layer and the plating layer; forming a space by removing the plating layer; forming a magnetic layer, which will be the main pole layer, in the space and on the top surface of the first nonmagnetic layer; forming a second nonmagnetic layer to cover the magnetic layer; and polishing the second nonmagnetic layer and the magnetic layer.

Abstract: In a high-frequency coil device having small dispersion in coil inductance and suitable for use in GHz band and a method of manufacturing the high-frequency coil device, a spirally-shaped fine-pitch coil is embedded in the surface of a polyimide layer as a dielectric substrate so that the bottom surface and side surface of the coil is covered by the polyimide layer. The spirally-shaped coil has an Ni—Cu laminate structure in which an Ni plating layer and a Cu plating layer are laminated, and also the side surface thereof is made substantially vertical while the width thereof is uniform with high precision. The surface of the spirally-shaped coil, that is, the surface of the Ni plating layer serving as the upper layer is coated with an Au plating layer.

Abstract: A horizontal combined head is provided which has both a thin film write and an MR read element located at an air bearing surface (ABS). The read element can be formed with a track width that is independent of the track width of the write element. The MR sensor or the read element is separated from one of the first and second pole pieces of the write element by an insulation layer. Accordingly, the shields for the read element remain more stable after a write operation. In one embodiment of the present invention a single stripe MR sensor is employed while in a second embodiment a dual stripe MR sensor is employed. A method of the invention includes forming the dual MR stripe in a single process step so that the dual MR stripes of the dual MR sensor are near identical for implementing near absolute common mode rejection of noise.

Abstract: Methods suitable for use in making a write coil of a magnetic head includes the steps of forming a seed layer made of ruthenium (Ru) over a substrate; forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein; electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers; removing the patterned resist; and performing a reactive ion etch (RIE) in ozone gas (O3) for removing exposed seed layer materials in between the plurality of write coil layers. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Other structures may be fabricated in a similar manner.

Abstract: A thin-film magnetic head comprises first and second magnetic pole groups, magnetically connected to each other, having respective magnetic pole parts opposing each other on a side of a medium-opposing surface; a recording gap layer formed between the magnetic pole parts; and a thin-film coil insulated from the first and second magnetic pole groups and helically wound about at least one of them; which are laminated on a substrate. The thin-film coil comprises a first conductor group having a plurality of inner conductor parts disposed between the first and second magnetic pole groups, a second conductor group having a plurality of outer conductor parts disposed outside the second magnetic pole group, and a connecting part group having a plurality of connecting parts for connecting the inner conductor parts to the outer conductor parts.

Abstract: A method of manufacturing a slider comprises the steps of: forming a slider material including a substrate, a thin-film magnetic head element and an insulating portion; forming a first surface in the slider material by etching a surface of the substrate facing toward a recording medium; forming a medium facing layer in the slider material so as to be adjacent to the first surface; and forming a medium facing surface in the slider material by lapping a surface of the medium facing layer facing toward the recording medium and a surface of the insulating portion facing toward the recording medium. The substrate has a hardness greater than that of the insulating portion. As the substrate and the medium facing layer are compared in hardness, the medium facing layer has a hardness closer to that of the insulating portion.

Abstract: A method of manufacturing a thin-film magnetic head comprises the steps of forming a first pole layer, forming a gap layer on a pole portion of the first pole layer, and forming a second pole layer on the gap layer. The second pole layer incorporates a first layer adjacent to the gap layer, and a second layer including a track width defining portion. The step of forming the second pole layer includes the steps of: forming a magnetic layer for forming the first layer on the gap layer; forming the second layer on the magnetic layer; and etching the magnetic layer to align with a width of the track width defining portion, so that the magnetic layer is formed into the first layer and the width of each of the first layer and the second layer taken in a medium facing surface is made equal to the track width.

Abstract: A voice coil and actuator yoke assembly is fabricated by deforming the coil to exactly fit the inner perimeter and thickness of the yoke. The comb is placed in a tool that registers the comb with the yoke against the same flat surfaces that will squash the coil. The tooling is closed and placed in an appropriate loading device and the coils are squashed to the precise thickness of the yoke. This eliminates the in-plane tolerances of the current process for bonding a coil into the yoke. The coil perimeter expands as the coil is squashed to form an intimate press fit with the yoke. A low viscosity, high Tg adhesive is then applied to the coil. The low viscosity of the adhesive allows capillary action to fill the voids between the wires and bond the coil to the yoke.

Abstract: A first insulating layer is formed on a main magnetic pole used as a magnetic pole layer to have a protruding portion and a flat portion formed around the protruding portion. A second insulating layer is formed on the flat portion, and then the protruding portion of the first insulating layer is cut to expose the upper surface of the main magnetic pole and to form the same planarized surface including the upper surfaces of the main magnetic pole and the second insulating layer. Polishing is stopped using the second insulating layer as a marker, thereby permitting precise control of the amount of polishing.

Abstract: A method for manufacturing a magnetic recording medium, including the steps of applying a magnetic coating containing ferromagnetic powder and a binder onto a nonmagnetic band-shaped flexible base material to be transferred to form a magnetic layer, and grinding the magnetic layer continuously with a grinding wheel on the downstream side of transfer, wherein a cleaning device which cleans a grindstone of the grinding wheel is additionally provided in close proximity of the grinding wheel to clean the grindstone during the grinding operation.

Abstract: The magnetic head includes a P2 pole tip in which the P2 pole tip material is electroplated upon a sidewall of the P2 pole tip photolithographic trench. To accomplish this, a block of material is deposited upon a write gap layer, such that a generally straight, vertical sidewall of the block of material is disposed at the P2 pole tip location. Thereafter, an electroplating seed layer is deposited upon the sidewall. A P2 pole tip trench is photolithographically fabricated such that the sidewall (with its deposited seed layer) is exposed within the P2 pole tip trench. Thereafter, the P2 pole tip is formed by electroplating pole tip material upon the seed layer and outward from the sidewall within the trench. The width of the P2 pole tip is thus determined by the quantity of pole tip material that is deposited upon the sidewall.

Abstract: A method of manufacturing a thin film magnetic head. The method includes forming, near a pole portion: a first magnetic layer supported by a base substrate; a first insulating layer on the first magnetic layer with an end edge which forms a reference position for an air bearing surface; a gap layer on the pole portion of the first magnetic layer and the first insulation layer; a second magnetic layer that extends to a region beyond the pole portion; a thin film coil isolated by a second insulation layer located above the first insulation layer; a third magnetic layer on the second insulation layer. The air bearing surface is formed by grinding in part an end face of the pole portion of the first magnetic layer and an end face of the pole portion of the second magnetic layer and the gap layer placed therebetween.

Abstract: A method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure. The method uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The method would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.

Abstract: A method for manufacturing a magnetic recording head includes the steps of forming a first lifting layer and a second lifting layer on a bottom core layer, forming an inorganic insulating layer in a gap between the first lifting layer and the second lifting layer, forming a groove in the inorganic insulating layer to form a coil layer, and forming the coil layer in the groove and over the groove by plating.

Abstract: A method of manufacturing a thin film magnetic head comprising an insulating layer provided between a core and a coil is provided. Also provided is a method for forming an inorganic insulation underlying layer and an organic insulation underlying layer on a lower core layer behind a recording region. The withstand voltage between the lower core layer and the coil layer can be improved because a coil is formed on the organic insulation underlying layer with an inorganic insulation layer disposed on the organic insulation layer.

Abstract: A method of making a magnetic head includes imbedding a coil layer in an insulation stack. The coil layer is formed with a filament that extends about a central axis. The central axis is perpendicular to a planar head surface and a coil plane. First and second pole pieces are formed with the insulation stack sandwiched between the first and second pole pieces. A first shield layer having first and second major planar thin film surfaces is joined by a third edge with the first major planar thin film surface of the first shield layer forming a portion of the planar head surface. A magnetoresistive (MR) sensor and first and second gap layers are formed with the MR sensor sandwiched between the first and second gap layers and the first and second gap layers located between the third edge and the first horizontal component and with the MR sensor and the first and second gap layers forming portions of the planar head surface.

Abstract: A method for forming at least two layers of electrical coils and their supportive resistive layers for a magnetic write head having an ultra-short yoke so that the second and any additional coil layers are formed on flat resistive surfaces to eliminate problems associated with inter- and intra-layer shorting and with shorting between coil and yoke. The resistive layers are formed with flat surfaces and desired apex angles by using a novel two-step photoresist scheme in which a layer of photoresist is first photoexposed and developed, then photoexposed a second time to cure a surface region that will remain flat during a final low temperature curing process.

Abstract: In a method of manufacturing a thin-film magnetic head, a bottom pole layer is formed and a thin-film coil is formed on the bottom pole layer. A recording gap layer is then formed on the pole portion of the bottom pole layer. Next, the recording gap layer and a portion of the bottom pole layer are selectively etched through the use of a mask so as to form an end portion of the recording gap layer for defining the throat height. Next, a nonmagnetic layer is formed to fill the etched portions of the recording gap layer and the bottom pole layer while the mask is left unremoved. Next, the mask is removed, and the top surfaces of the recording gap layer and the nonmagnetic layer are flattened by polishing. A top pole layer is formed on the flattened top surfaces of the recording gap layer and the nonmagnetic layer.

Abstract: A method of manufacturing a thin-film magnetic head may include forming a first magnetic layer, a thin-film coil, an insulating layer, a gap layer, and a second magnetic layer. The first magnetic layer may be formed to include a first pole portion and a first yoke portion. The second magnetic layer may be formed to include a second pole portion and a second yoke portion. At least part of the thin-film coil may be located on a side of the first pole portion and between the gap layer and the first yoke portion, and may be covered with the gap layer. A surface of the first pole portion that faces toward the gap layer and a surface of the insulating layer that faces toward the gap layer may together form one flat surface. An interface region between the second pole portion and the second yoke portion may be formed to face toward the one flat surface.

Abstract: A dual GMR or dual spin valve sensor has a self-pinned layer which has its magnetic moment pinned perpendicular to an air bearing surface by sense current fields from conductive layers in the dual spin valve sensor when a sense current is conducted therethrough. This scheme eliminates one of the antiferromagnetic pinning layers which is typically employed in a dual GMR or dual spin valve sensor. The self-pinned layer is thin so that its demagnetization field will not be greater than the sense current fields acting thereon. Because of the thinning of the self-pinned layer the spin valve effect of the spin valve sensor is degraded by scattering of conduction electrons at the boundary of the self-pinned layer.

Abstract: A bottom track pole is formed on a surface of a bottom pole, a thin film coil is formed on the bottom pole to form a flat coplanar surface with the bottom track pole, a write gap film is formed on the flat coplanar surface, first and second magnetic material films constituting a top pole are formed on a flat surface of the thin film coil, and the second magnetic material film, first magnetic material film, write gap film and bottom track pole are partially removed by RIE to form a top track pole and trim structure in a self-aligned manner. The thin film coil is formed by a first thin film coil half and a second thin film coil half having coil windings which are formed in a self-aligned manner between successive coil windings of the first thin film coil half and have a two-layer structure of a first conductive film at least a part of which is formed by CVD and a second conductive film formed by electrolytic plating.

Abstract: A horizontal combined head is provided which has both a thin film write and an MR read element located at an air bearing surface (ABS). The read element can be formed with a track width that is independent of the track width of the write element. The MR sensor or the read element is separated from one of the first and second pole pieces of the write element by an insulation layer. Accordingly, the shields for the read element remain more stable after a write operation. In one embodiment of the present invention a single stripe MR sensor is employed while in a second embodiment a dual stripe MR sensor is employed. A method of the invention includes forming the dual MR stripe in a single process step so that the dual MR stripes of the dual MR sensor are near identical for implementing near absolute common mode rejection of noise.

Abstract: The invention relates to a method of manufacturing a band coil by means of a material-removing process performed on the coils so as to obtain a band coil which has a profile in the direction of the coil axis. Such a process may be a discharge process, an etching process or a mechanical grinding process. The obtained band coils may have such a shape that certain coil sides are effective whereas other coil sides are interfering as little as possible. Such band coils can be very successful in planar motors.

Abstract: An electromagnetic actuator includes a stationary member, a movable member magnetically coupled with the stationary member with a gap therebetween, and a support member for displaceably supporting the movable member relative to the stationary member. Both the stationary member and the movable member have a core section carrying a coil wound around its periphery. As the coil of the stationary member and that of the movable member are energized with electric current, the movable member is either attracted toward or repulsed from the stationary member. The electromagnetic actuator can be used for an optical scanner by providing a mirror and a lens on the movable member.

Abstract: A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.

Abstract: A coil assembly includes a coil arranged around a vertical axis, and a supporting member for carrying the coil. The supporting member is formed with a through hole corresponding to the vertical axis. The coil includes a plurality of coil elements which are connected in parallel.

Abstract: A method of manufacturing a thin film magnetic head having superior overwrite characteristics as well as an extremely small pole width is disclosed. The thin film magnetic head has a thin film coil provided in a recess region of a bottom pole. This makes it possible to appropriately ensure a thickness of the thin film coil, as well as to reduce a thickness of a second pole tip portion, and therefore it is possible to ensure superior overwrite characteristics, as well as to form the second pole tip portion having an extremely small uniform width. The method of manufacturing a thin film magnetic head forms a recess region in a second magnetic layer close to a first magnetic layer, and forms a first thin film coil for constituting a part of the thin film coil in the recess region.

Abstract: The present invention provides a method for producing a magnetic head whose reproduction waveform has small distortions, and forming a hard magnetism layer for applying a bias magnetic field to a magnetoresistive element, which is a multilayer film including a fixed magnetic layer having magnetization fixed to a first direction and a free magnetic layer having an easy axis of magnetization that is directed to a second direction, is formed in an area including at least one of a front area in the first direction and a rear area in the first direction.

Abstract: A method of manufacturing a thin film magnetic head. The method includes forming, near a pole portion: a first magnetic layer supported by a base substrate; a first insulating layer on the first magnetic layer with an end edge which forms a reference position for an air bearing surface; a gap layer on the pole portion of the first magnetic layer and the first insulation layer; a second magnetic layer that extends to a region beyond the pole portion; a thin film coil isolated by a second insulation layer located above the first insulation layer; a third magnetic layer on the second insulation layer. The air bearing surface is formed by grinding in part an end face of the pole portion of the first magnetic layer and an end face of the pole portion of the second magnetic layer and the gap layer placed therebetween.

Abstract: A method for producing a magnetic transducer with a inductive write head having a multilayer coil with a high aspect ratio and a short yoke is provided. A damascene process is used for two coil layers and a conventional process for the third coil layer. The process of the invention allows a seed layer for the coil to be deposited on the side walls of the trenches for the first and second coil layers. In one embodiment the seed layer for the coil is preceded by an adhesion layer.

Abstract: A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.

Abstract: A method of making a magnetic head, which has an air bearing surface (ABS) and a back gap (BG), comprising the steps of: forming a second pole tip of a second pole piece with a top surface and a bottom surface at an ABS site for said ABS; the top surface of the second pole tip having a write region located at the ABS site and a stitch region which is recessed in its entirety from the ABS site toward said back gap; depositing a protective sacrificial layer on the write region of the second pole tip; removing said sacrificial layer from only the stitch region of the second pole tip; and forming a second pole piece yoke of a second pole piece magnetically connected to the stitch region of the second pole tip.

Abstract: A thin film magnetic recording head utilizing a timing based servo pattern is fabricated using a focused ion beam (FIB). The recording head is fabricated by sputtering a magnetically permeable thin film onto a substrate. A gap pattern, preferably a timing based pattern, is defined on the thin film and the FIB cuts a gap through the thin film based on that pattern. Once completed, the recording head is used to write a servo track onto magnetic tape. The timing based servo track then allows for the precise alignment of data read heads based on the positional information obtained by a servo read head which scans the continuously variable servo track.

Abstract: A method for manufacturing a magnetic recording head includes the steps of forming a first lifting layer and a second lifting layer on a bottom core layer, forming an inorganic insulating layer in a gap between the first lifting layer and the second lifting layer, forming a groove in the inorganic insulating layer to form a coil layer, and forming the coil layer in the groove and over the groove by plating.

Abstract: A method of manufacturing a thin-film magnetic head comprises the steps of forming a bottom pole layer, forming a gap layer, forming a top pole layer, and forming a thin-film coil. The thin-film coil is wound around the top pole layer in a helical manner. In the step of forming the bottom pole layer, the bottom pole layer is formed to include a first layer facing a portion of the thin-film coil, and a second layer that forms a pole portion and is connected to a surface of the first layer facing the top pole layer. In the step of forming the thin-film coil, a portion of the coil is disposed on a side of the second layer and another portion of the coil is disposed over the top pole layer via an insulating film.

Abstract: A magnetic head assembly has an open yoke type write head constructed on top of a read head so that the write head can be constructed with a very narrow track width without restraint by the requirements of the read head. The write head has first and second pole piece portions wherein the second pole piece portion has separate front and back layer portions. A coil layer is wrapped around only the first pole piece portion and the back layer portion so that the front layer portion can be constructed separately to provide a narrow track width. Further, in a preferred embodiment the front layer portion has a reduced thickness and a higher magnetic moment than the thickness and magnetic moment of the first pole piece portion and the back layer portion. Still further, in a preferred embodiment the first pole piece portion and the back layer portion are planar due to polarization of underlying layers.

Abstract: A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.

Abstract: A horizontal combined head is provided which has both a thin film write and an MR read element located at an air bearing surface (ABS). The read element can be formed with a track width that is independent of the track width of the write element. The MR sensor or the read element is separated from one of the first and second pole pieces of the write element by an insulation layer. Accordingly, the shields for the read element remain more stable after a write operation. In one embodiment of the present invention a single stripe MR sensor is employed while in a second embodiment a dual stripe MR sensor is employed. A method of the invention includes forming the dual MR stripe in a single process step so that the dual MR stripes of the dual MR sensor are near identical for implementing near absolute common mode rejection of noise.

Abstract: A thin film magnetic head is capable of reducing inductance by shortening a magnetic path, and also preventing a cavity from being formed in a coil insulating layer. The coil insulating layer is deposited on a lower core layer and at the rear of a recording portion, and a coil forming groove is formed in the coil insulating layer. Then, a coil layer is embedded in the coil forming groove. With this arrangement, bulges of the layers from an upper surface of the recording portion can be decreased so as to shorten a magnetic path.

Abstract: A system and method are provided for manufacturing a magnetic head. Initially, a coil structure, a first pole layer, and a gap layer are formed. A second pole layer is then deposited to form a pair of flanking portions flanking a central portion of the second pole layer. Thereafter, the second pole layer is masked with a photoresist layer. During manufacture, the flanking portions of the second pole layer work in conjunction with the photoresist layer to substantially protect the coil structure from damage.

Abstract: The object of the invention is to provide a thin film magnetic head and a method of manufacturing the same, which allow the magnetic pole width to be precisely controlled and a sufficient overwrite performance to be attained even in a case where the magnetic pole width is microfabricated. The coupling position where the intermediate portion and the tip of the top pole are coupled each other is located closer to the air bearing surface than the throat height 0 position (TH0 position) which is the reference point for determining the throat height TH. The tip of the top pole defines the write track width on a recording medium. At least the portion of the intermediate portion from the TH0 position to the rear edge portion of the tip has a width wider than that of the tip. The intermediate portion suppresses saturation of the magnetic flux before flowing into the tip of the top pole.

Abstract: A thin film magnetic head wherein a partial insulating layer is formed on a bottom pole layer with a gap layer provided therebetween, the gap depth Gd being regulated by the distance from a surface facing a recording medium to the partial insulating layer. A magnetic flux partially leaks from a tip region of an upper core layer to the bottom pole layer through the partial insulating layer to effectively suppress magnetic saturation of the tip region, thereby improving the NLTS characteristic and PW50 characteristic, and suppressing the occurrence of side fringing.

Abstract: An inorganic insulation underlying layer and an organic insulation underlying layer are formed on a lower core layer behind a recording region. Also, a coil layer is formed on the organic insulation underlying layer. Therefore, the withstand voltage between the lower core layer and the coil layer can be improved.

Abstract: A fluxgate sensor is integrated in a printed circuit board. The fluxgate sensor has two bar-type(or rectangular-ring shaped) soft magnetic cores to form a closed magnetic path on a printed circuit board and an excitation coil in the form of a metal film is wound around the two bar-type soft magnetic cores either in a united structure that winds the two bar-type soft magnetic cores altogether, or in a separated structure that winds the two bar-type soft magnetic cores respectively, both in a pattern of number ‘8’. A pick-up coil is mounted on the excitation coil, either winding the two bars altogether, or respectively, in a solenoid pattern. The fluxgate sensor integrated in the printed circuit board can be mass-produced at a cheap manufacturing cost. The fluxgate sensor also can be made compact-sized, and at the same time, is capable of forming a closed-magnetic path.