Abstract: A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between at least a part of the first subsidiary magnet system and at least a part of the second subsidiary magnet system is smaller than the minimum distance between the first main magnet system and the second main magnet system.

Abstract: Methods and apparatus for providing relatively long travel in a transverse direction for a magnetic levitation stage apparatus are disclosed. According to one aspect of the present invention, a linear actuator includes a first core, a second core, and at least one coil wrapped around the first core. The first core includes a body portion and a plurality of rails. The body portion has a first axis and a second axis, and the rails have longitudinal axes that are perpendicular to the first axis and parallel to the second axis. The dimensions of the rails along the longitudinal axes are substantially larger than a dimension of the body portion along the second axis. The second core has a third axis that is oriented perpendicularly to the longitudinal axes and to the second axis, and is levitated relative to the first core when a current is provided through the coil.

Abstract: The aim of the invention is the equipping of a synchronous linear motor with a non-permanently-magnetic secondary part with a simple positional measuring system. Said aim is achieved, whereby the tooth structure of the toothed rack-shaped non-permanently-magnetic secondary part (S) varies with position in the direction of movement (B). Furthermore, the synchronous linear motor can be provided with absolute and incremental positional measuring systems, such that the coarse resolution of the absolute measuring system can be supplemented by the fine resolution of the incremental system.

Abstract: The present invention has disclosed a dual stage positioning and switching system, which comprises at least a base, a first object stage positioning unit disposed on the base for a first workstation, and a second object stage positioning unit for a second workstation. Each of the object stage positioning units comprises at least a supporting structure, an X-direction guide bar, a Y-direction guide bar, and a motion positioning detector, wherein, the supporting structure comprises an object stage, and an object stage connector moving relative to the object stage. The object stage positioning unit further comprises a driver connecting to the object stage connector and driving the connector to move along the X-direction guide bar. The X-direction guide bars are positioned on and movable along the Y-direction guide bars.

Abstract: A magnetic levitation wafer stage is used to align a wafer in an exposure apparatus of photolithographic equipment. The wafer stage includes a base, a table supported on the base and whose entire top surface exhibits magnetism of a single polarity, and motors for moving the table in the X and Y directions relative to the base. Alternatively, the wafer stage includes a wafer table having a main body and a number of electromagnets disposed in an upper portion of the main body, and electronics that selectively supply current in either direction through coils of the electromagnets respectively and independently of one another. In the exposure process, the bottom surface of the substrate is provided with a magnetic substance such that the substrate exhibits magnetism of a given polarity. The substrate is delivered to and set on the table of the stage. There, the substrate is levitated by a magnetic force of repulsion between the substrate and the table.

Abstract: A pulse motor includes a first element in which a plurality of convex portions are arranged cyclically, and a second element disposed to face the first element. The plurality of convex portions include first and second convex portions. The first convex portion forms a part of a first magnetic circuit including a portion passing a magnetic flux along a first direction. The second convex portion forms a part of a second magnetic circuit including a portion passing a magnetic flux along a second direction. The second element includes first and second coils to apply a magnetic flux to the first and second magnetic circuit. A time duration in which the movable element moves includes a time duration in which a timing at which a current flowing through the first coil is maximum and a timing at which a current flowing through the second coil is maximum appear alternately.

Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.

Abstract: A planar motor includes a stator in which a plurality of convex portions each containing a magnetic material are arranged, and a movable element which faces the stator. The movable element has a plurality of coils, and moves in at least the x direction by controlling electric currents flowing through the plurality of coils. Each convex portion of the stator has different dimensions in the y direction at least at two positions on a straight line along the x direction.

Abstract: A mover (344) moving a stage (238) along a first axis, along a second axis and along a third axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes a plurality of magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354) in the magnetic field. Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A).

Abstract: A planar pulse motor includes a movable element and a stator, wherein the movable element contains a magnetic material, and has a plurality of convex portions on a surface thereof facing the stator, the stator includes a plurality of magnetic field generators to drive the movable element, and each magnetic field generator includes a yoke having a plurality of teeth and a coil which excites the yoke, and the planar pulse motor includes a controller which controls rotation of the movable element by energizing magnetic field generators selected from magnetic field generators, whose regions do not include a center line of the movable element along a driving direction of the movable element and do not include portions outside a region facing the movable element, of the plurality of magnetic field generators.

Abstract: A stage unit includes the following elements. A stator includes a first coil array in which first coils extending in the x direction are arranged in the y direction, a second coil array in which second coils extending in the x direction are arranged in the y direction and which is located next to the first coil array in the x direction, and a third coil array in which third coils extending in the y direction are arranged in the x direction and which covers the first and second coil arrays. A movable member moves above the stator. A controller controls driving of the movable member by allowing current amplifiers to supply current to the coils included in the first, second, and third coil arrays. A switch is capable of connecting the first coil to the second coil.