Abstract: A driving apparatus (100) is provided with: a base part (110); a stage part (130) on which a driven object (150) is mounted and which can be displaced; an elastic part (120) which has elasticity for displacing the stage part along one direction (Y axis); and an applying part (110) for applying to the base part microvibration for displacing the stage part (130) such that the stage part (130) resonates along the one direction (Y axis) at a resonance frequency determined by the elastic part (120) and the stage part (130), the microvibration is non-directional microvibration as non-directional vibrational energy.

Abstract: In an embodiment, a stage system calibration method includes moving the stage relative to an encoder grid in response to a setpoint signal and measuring a position of the stage by a sensor head cooperating with the encoder grid. The position of the stage is controlled by a stage controller. A signal representative of a difference between the setpoint signal and the position of the stage as measured by the sensor head is registered. The stage system is calibrated from the registered signal representative of the difference.

Abstract: A linear motor for vacuum environment includes a core and a housing. The core includes a plurality of cooling plates and a plurality of electrical coils sandwiched between the plurality of cooling plates. The core further includes a plurality of thermally conductive epoxy layers positioned between the plurality of electrical coils and the plurality of cooling plates, and a plurality of shims located between the plurality of electrical coils and the plurality of cooling plates to determine a distance between the plurality of electrical coils and the plurality of cooling plates. The core is assembled and tested independently and before being assembled in the housing. The housing encloses the core and includes a body, a plurality of feed throughs, and a lid.

Abstract: A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower surface of the stage. A Y encoder that measures Y positional information of the stage is configured including the moving gratings and the fixed gratings. Similarly, an X encoder that measures X positional information of the stage is configured including the moving gratings and the fixed grating.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

Abstract: A linear stage system is provided. The linear stage system includes a base, a carriage plate, a first shaft, a first air bushing coupled to the base, a first motor coupled to the base and the carriage plate, and a first position encoder. The first air bushing is configured to support the carriage plate via the first shaft, wherein the first air bushing utilizes the first shaft as a guide surface and is configured to support positioning of the carriage plate along an axis. The first motor is configured to create a linear motion parallel to the axis in a first motor element coupled to the carriage plate to position the carriage plate along the axis in response to a first control signal. The first position encoder is configured to determine a position of the carriage plate relative to the base.

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates in a processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate substrate processing. The system may include multiple processing nests laterally positionable by use of a planar motor via multiple planar movers controlled by a system controller. A substrate supported by each processing nest may be angularly positionable by a rotary actuator. The system may be used in screen printing, ink jet printing, thermal processing, device testing, and material removal processes, among others.

Abstract: Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.

Abstract: An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

Abstract: A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.

Abstract: A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment fields is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and ?z directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, ?x and ?y directions. Direct driving by electromagnetic force is used in the invention. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current.

Abstract: A method of preparing components for use in a vacuum chamber of a lithographic apparatus is disclosed. The method includes coating the component with a non-metallic material. The method may further include treating the coating so as to harden the coating. Preferably, the coating material is a hydrogen silsesquioxane (HSQ), which may be applied via spraying, brushing, or spinning and can be treated by heating or by irradiation with an electron beam. The resulting components strongly reduce outgassing of water and hydrocarbons when subjected to a vacuum environment.

Abstract: A rotational driving device has a rotation body and a plurality of magnetic rotation drivers so as to rotate the rotation body by generating a magnetic force in a rotation direction. Provided in an area formed between the magnetic rotation drivers are a first magnetic sensor that detects a position of the rotation body in a radial direction; a second magnetic sensor that detects a position of the rotation body in an axial direction; a first electromagnet that controls the position of the rotation body in the radial direction by generating a radial-direction magnetic force; and a second electromagnet that controls the position of the rotation body in the axial direction by generating an axial-direction magnetic force. The rotational driving device is capable of providing a long-term dependability, inhibiting vibration, as well as using space effectively.

Abstract: A three-dimensional sliding system has an X-table and a Z-table, which are actuated to travel independently of each other. The sliding system is simple in construction and adapted to actuate a movable table with less takt time. A bed has a first flat zone extending in a horizontal direction to carry the X-table thereon, a second flat zone extending in a vertical direction to carry the Z-table thereon, and a third flat zone where the first flat zone merges with the second flat zone. The movable table is laid over the third flat zone and linked with the X-table and the Z-table through linear motion guide units, respectively. Actuations of an X-linear motor in an X-direction and actuation of a Z-linear motor in a Z-direction cause the movable table to move into a targeted position with high precision in the X-direction and in the Z-direction.

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.

Abstract: When using a moving magnet type linear motor pair for a moving stage, the magnetic field in a space defined by the linear motor pair varies greatly in association with the movement of movable bodies. For this reason, 4N sets (N is a natural number) of magnet pairs 12 are disposed in mirror symmetry with reference to the center plane of a movable body 3 for a linear motor. The magnet pairs 12 are arranged in such a manner that the polarities of the adjoining pair at the center line 19 of the movable body are set same and the polarities thereof are set to alternate as in an N pole and a S pole according to when the pairs move away from the center. When a linear motor pair is formed by disposing two sets of such linear motors in parallel, and with this linear motor pair a stage is driven, the magnetic field variation in the space defined by the linear motor pair caused in association with the movement of movable bodies is suppressed.

Abstract: The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.

Abstract: A planar pulse motor includes a movable element and a stator, wherein the movable element contains a magnetic material, and has a plurality of convex portions on a surface thereof facing the stator. The stator includes a plurality of magnetic field generators to drive the movable element, and each magnetic field generator includes a yoke having a plurality of teeth and a coil which excites the yoke. The planar pulse motor includes a controller which controls rotation of the movable element by energizing magnetic field generators selected from magnetic field generators, whose regions do not include a center line of the movable element along a driving direction of the movable element and do not include portions outside a region facing the movable element, of the plurality of magnetic field generators.

Abstract: A stage unit includes the following elements. A stator includes a first coil array in which first coils extending in the x direction are arranged in the y direction, a second coil array in which second coils extending in the x direction are arranged in the y direction and which is located next to the first coil array in the x direction, and a third coil array in which third coils extending in the y direction are arranged in the x direction and which covers the first and second coil arrays. A movable member moves above the stator. A controller controls driving of the movable member by allowing current amplifiers to supply current to the coils included in the first, second, and third coil arrays. A switch is capable of connecting the first coil to the second coil.

Abstract: A stage apparatus includes: a moving stage, which moves along a movement plane; a first moving table, which holds a specimen while being able to move with respect to the moving stage; and a second moving table, which is provided on the moving stage and, when the first moving table has moved from a first position to a second position, is positioned at the first position.

Abstract: Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of ?45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.

Abstract: Primary coils of a linear motor are arranged along a travel route. A movable body has a secondary side of the linear motor. The travel route is divided into a plurality of zones, and a zone controller is provided for each zone or controlling the coils of the linear motor in the zone. A coordinate of the movable body outputted from a linear scale of the coil is converted into a coordinate based on the travel route.

Abstract: A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.

Abstract: A linear guide with an integrated linear motor, the linear guide having a stationary support extending in a guide direction, a table movable in the guide direction and a linear motor. The linear motor includes 1) a movable element connected with the table, 2) a stationary element connected with the stationary support and contactless bearings between the stationary support and the table and 3) an electromagnetic positioner based on electromagnetic interaction for positioning the table transversely in relation to the guide direction. The linear guide includes an integrated position-measuring system having a scale and scanning heads which detect a position of the table in the guide direction and a deviation direction, which lies transversely in relation to the guide direction and parallel in relation to a plane of an air gap of the linear motor. The electromagnetic positioner acts in such a way so that the table is positioned in the deviation direction.

Abstract: Actuator for exerting a force and a torque on an object, wherein the actuator includes a first part that is movable with respect to a second part of the actuator in at least a first degree of freedom, wherein the object is mounted to the first part, wherein one of the parts is provided with a first electrical coil that is arranged to cooperate with a magnetizable portion of the other part and wherein a controller of the actuator is arranged to generate a first electrical current through the first electrical coil for generating a force between the parts, wherein the one of the parts is provided with a second electrical coil which is arranged to cooperated with a magnetizable portion of the other part, wherein the controller is further arranged to generate a second current through the second coil and the first current through the first electrical coil for exerting the force and torque between the parts so that the actuator is arranged to exert the force and the torque on the object with respect to the second pa

Abstract: At least one exemplary embodiment is directed to a stage apparatus which comprises a first stage that is movable with respect to a horizontal plane that is defined by a first axis and a second axis that intersect each other at right angles, and a second stage that is movable on the first stage at least in the axial direction and in a rotational direction around a third axis, where a regulating member for restricting a movable range of the second stage is provided at a location in which a movable unit of the second stage faces the first stage through a gap.

Abstract: A planar motor includes a movable body and a stator configured to drive the movable body in a plane. The stator includes a first stator unit and a second stator unit. The movable body is moved in a first direction by a force acting between the movable body and the first stator unit, and is moved in a second direction by a force acting between the movable body and the second stator unit. The first stator unit and the second stator unit are arranged to face each other in such a manner that the movable body is provided therebetween.

Abstract: An X-Y table actuator is constituted by stacking a stationary plate, an intermediate plate, and a movable plate. Between the stationary plate and the intermediate plate, arranged is an X-direction drive means for driving the intermediate plate in an X-direction with respect to the stationary plate. Between the intermediate plate and the movable plate, on the other hand, there is provided a Y-direction drive means for moving the movable plate forward and backward in a Y-direction with respect to the intermediate plate. By stacking the stationary plate and the movable plate, which are formed into a substantially channel-shape, and the intermediate plate, which is formed into a substantially flat-shape on each other, a housing chamber for the X-direction drive means is formed between the stationary plate and the intermediate plate, and a housing chamber for the Y-direction drive means is formed between the intermediate plate and the movable plate.

Abstract: A supporting apparatus supports a movable element by a bearing. The apparatus has a moment reducing unit that exerts a force on a portion of the movable element, which is different from a portion supported by the bearing. The moment reducing unit reduces a moment that acts on the movable element when the portion of the movable element, which is supported by the bearing, changes as the movable element moves. This stabilizes the attitude of the movable element.

Abstract: The present invention is a parallel kinematic linkage based micro-positioning system that can provide precise movement at the micron and sub-micron level of a payload that is compatible with an existing automation system. The system has a motor controller, a digital signal processor, a base frame, a first motor, a first cranking arm with a first connecting link and an intermediate stage that mounts a second motor that is attached to a second cranking arm with a second connecting link. There is also an output stage (also called a table) that is precisely moved by the second cranking arm and a first and second optical linear encoder used in combination with the first and second motor and the first and second cranking arm forming a first motor assembly that converts operational data into a plurality of highly precise X-axes and Y-axes payload linear movements.

Abstract: Methods and apparatus for providing an efficient oval coil planar motor are disclosed. According to one aspect of the present invention, an electromagnetic actuator includes at least a first coil group, at least a second coil group, and a magnet array. The first coil group includes at least a first coil that is of an elongated toroidal shape. The first coil has a first coil length and a first coil width that is approximately equal to a multiple of three times the first coil width. The second coil group includes at least a second coil that is of an elongated toroidal shape. The second coil has a second coil width and a second coil length that is approximately equal to a multiple of three times the second coil width. The second coil group is approximately adjacent to the first coil group. The magnet array is configured to cooperate with the first and second coil groups, and includes a plurality of magnets.

Abstract: A top plate is configured to surround a space with a first plate member and a second plate member which oppose each other and a side wall member. The top plate includes a rib arranged in the space. The rib includes a plurality of connecting portions. Each connecting portion respectively connects to either the side wall member or a member in the space. The rib has a thickness at a portion between adjacent connecting portions which is larger than the thickness at each connecting portion.

Abstract: A motor apparatus includes a plurality of coils arranged along a first direction in a plane perpendicular to central axes thereof, a plurality of magnets each generating a force in cooperation with the coils, and a support member supporting the plurality of coils. Movement of the coils in the first direction due to thermal deformation of the coils is constrained by the coils contacting with a surface of the support member, and movement of the coils in a second direction, which is in the plane and perpendicular to the first direction, due to thermal deformation of the coils, is allowed by the coils sliding in the second direction along the surface.

Abstract: A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment filed is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and ?z directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, ?x and ?y directions. Direct driving by electromagnetic force is used in the invention, resulting in advantages over stacked structures of having a simple structure, a compact profile, a low driven weight center, low stator inertia, etc. Thus, there is no mechanical friction and damping, and high displacement resolution can be provided. The positioning error of a wafer table of a lithographic machine can be compensated, and the leveling and focusing of the lithographic machine can be achieved.

Abstract: A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.

Abstract: A magnetically levitated monolithic stage positioning system includes linear three phase motors and coil windings connected to the monolithic stage that interact with a ferromagnetic base. The linear three phase motors may be excited to provide motion in an X-axis direction, motion in a Y-axis direction, and rotation about a Z-axis. The monolithic stage is levitated on an air bearing. The plurality of coil windings connected to the monolithic stage may serve to magnetically preload the air bearing. The plurality of coil windings may be excited to provide motion in a Z-axis direction and rotation of the monolithic stage about the X-axis and about the Y-axis.

Abstract: According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.

Abstract: A displacement device is provided with a linear motor which comprises a first part comprising magnetic strips and a second part comprising a coil block. The parts are connected via a linear guide. The second part is movable with respect to the first part in a conveying direction extending parallel to the guide. The displacement device further comprises an connected to said second part, which is located on a side of the first part remote from the second part. The displacement device can be used is a component placement device.

Abstract: A driver (100f) comprises a base section (110), a movable stage section (130) for mounting a driven article (12), a resilient section (12) for connecting the base section and the stage section and exhibiting resiliency for moving the stage section along one direction (Y axis), and a section (161, 162, 22) which applies a shaking force to the resilient section in order to move the stage section to oscillate alone the one direction at a resonance frequency determined by the stage section and the resilient section.

Abstract: A stage apparatus includes a base, a stage that can move on a surface of the base, a first imparting unit arranged inside the base, which has a mass body and an actuator that is fixed to the base and moves the mass body in a direction vertical to the surface, the first imparting unit being configured to apply a force to the base by moving the mass body, and a controlling unit that controls the movement of the mass body in the vertical direction in the first imparting unit in accordance with movement of the stage, so that a force, which is generated in the base by the movement of the stage in a rotational direction around an axis parallel to the surface, is reduced.

Abstract: At least one exemplary embodiment is directed to an alignment apparatus which includes a moving member, a structural object arranged on the moving member, and an electromagnetic actuator which moves the structural object relative to the moving member. The electromagnetic actuator includes a plurality of linear motor units, which apply forces in the horizontal direction and the vertical direction to the structural object. The plurality of linear motor units apply, to the structural object, forces in the rotation direction about each of two axes orthogonal to each other in the horizontal plane and the rotation direction about the axis in the vertical direction.

Abstract: A driving apparatus (100j) is provided with: a base portion (110); a stage portion (130) on which a driven object (12) is mounted and which can be displaced; an elastic portion (120) which connects the base portion and the stage portion and which has elasticity to displace the stage portion in one direction (Y axis); a first applying device (161, 162, 22) for applying an excitation force for displacing the stage portion such that the stage portion is resonated in the one direction at a resonance frequency determined by the stage portion and the elastic portion; and a frequency adjusting device (170) for dynamically adjusting the resonance frequency.

Abstract: Provided is an X-Y table actuator, which is capable of moving and positioning a movable table (5) freely in an X-Y plane with a sufficient thrust, and can be simply manufactured at a low cost. The X-Y table actuator is constituted by stacking a stationary plate (2), an intermediate plate (4), and a movable plate (5). Between the stationary plate (2) and the intermediate plate (4), arranged is an X-direction drive means for driving the intermediate plate (4) in an X-direction with respect to the stationary plate (2). Between the intermediate plate (4) and the movable plate (5), on the other hand, there is provided a Y-direction drive means (7) for moving the movable plate (5) forward and backward in a Y-direction with respect to the intermediate plate (4).

Abstract: A driving apparatus (100u) is provided with: a first base portion (110-1); a first stage portion (130-1); a first elastic portion (120-1) which has elasticity to displace the first stage portion in one direction (X axis); a second stage portion (130-2) which is disposed on the first stage portion and on which a driven object (12) is mounted; a second elastic portion (120-2) which has elasticity to displace the second stage portion in other direction (Y axis); a first applying device (141, 142, 143, 22) for applying a first excitation force for displacing the first stage portion such that the first stage portion is resonated in the one direction at a resonance frequency determined by the first stage portion and the first elastic portion; and a second applying device (161, 162, 22) for applying a second excitation force for displacing the second stage portion at a phase shifted by approximately 90 degrees from a phase of the displacement of the first stage portion such that the second stage portion is resonated

Abstract: A driving apparatus (100t) is provided with: stage portion (130) which can be displaced; a first elastic portion (120-1) whose one end is connected to the stage portion and which has elasticity to displace the stage portion in one direction; a driving source device (180), to which other end of the first elastic portion is connected, comprising: a first applying device (181) for applying an excitation force for displacing the stage portion such that the stage portion is resonated in the one direction at a resonance frequency determined by the stage portion and the first elastic portion; and a second applying device (182) for applying a driving force for displacing, in a stepwise manner or in a continuous manner, the stage portion in other direction; a second elastic portion (120-2) whose one end is connected to the driving source device and which has elasticity to displace the stage portion in the one direction; a third elastic portion (120-3) whose one end is connected to other end of the second elastic porti

Abstract: A driving apparatus is provided with: a first base portion; a first stage portion; a first elastic portion which has elasticity to displace the first stage portion in one direction (X axis); a second stage portion which is disposed on the first stage portion and on which a driven object is mounted; a second elastic portion which has elasticity to displace the second stage portion in other direction (Y axis); a first applying device for applying an excitation force for displacing the second stage portion such that the second stage portion is resonated in the other direction at a resonance frequency determined by the second stage portion and the second elastic portion; and a second applying device for applying a driving force for displacing, in a stepwise manner or in a continuous manner, the first stage portion in the one direction.

Abstract: The invention claimed is a novel magnetic mirror air bearing for a Michelson interferometer with lateral motion. A precise kinematic mount is used in combination with magnetic fields wherein current can be applied on a centerline to move a piston and mirror laterally without pitch and yaw so as to effect accurate light beam reflection regardless of distance of lateral movement within a defined space. The assembly is able to operate across extended temperature ranges by utilizing materials which expand and contract at similar rates, and contains a thermalizing cavity which will thermalize the gas to avoid temperature induced artifacts.

Abstract: A linear stage system is provided. The linear stage system includes a base, a carriage plate, a first shaft, a first air bushing coupled to the base, a first motor coupled to the base and the carriage plate, and a first position encoder. The first air bushing is configured to support the carriage plate via the first shaft, wherein the first air bushing utilizes the first shaft as a guide surface and is configured to support positioning of the carriage plate along an axis. The first motor is configured to create a linear motion parallel to the axis in a first motor element coupled to the carriage plate to position the carriage plate along the axis in response to a first control signal. The first position encoder is configured to determine a position of the carriage plate relative to the base.