Cooling Patents (Class 310/12.29)
  • Patent number: 9630278
    Abstract: A method for machining a metallic member to provide a finished appearance uses a lathe and a scraping process. A metallic member comprising a top portion and a peripheral sidewall is provided, the metallic member is positioned on the worktable. The worktable is rotated with the metallic member, the lathe tool moved backwards and forwards to machine the top portion of the rotary metallic member circumferentially. The lathe tool is moved by the moving device along a predetermined path relative to the worktable to machine curved surfaces of the top portion of the metallic member. The scraping cutter is moved to contact the peripheral sidewall of the metallic member. The scraping cutter is moved along a predetermined path, and the scraping cutter is fed the metallic member to achieve the required shape and finish.
    Type: Grant
    Filed: November 4, 2013
    Date of Patent: April 25, 2017
    Assignees: FU DING ELECTRONICAL TECHNOLOGY (JIASHAN) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Ming-Lu Yang, Tian-En Zhang, Wei-Chuan Zhang, Jian-Shi Jia, Yang-Mao Peng, Jian Qu, Feng-Hua Chen, Zhen-Guang Xu, Jing-Shuang Sui, Da-Qing Zhuang, Jie Li, Yi Liu, Jian-Min Yu
  • Patent number: 9280066
    Abstract: The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: March 8, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Hiroshi Kii, Nobushige Korenaga
  • Patent number: 9178406
    Abstract: A linear motor includes a field magnet and an armature. The field magnet includes a pair of opposing field magnet yokes. A yoke base is disposed on a first end of each field magnet yoke in a Y axis direction. Between the field magnet yokes, a first magnet row is disposed including, along an X axis direction, a plurality of opposing pairs of first magnets having different polarities. Between the field magnet yokes, a second magnet row is disposed to a first side or a second side of the first magnet row in the Y axis direction. The second magnet row includes a pair of opposing second magnets having different polarities and forming a single row in the Y axis direction on the field magnet yokes. The armature includes a first armature coil opposite the first magnet row and a second armature coil opposite the second magnet row.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: November 3, 2015
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Toshiyuki Hoshi, Kenji Watanabe
  • Patent number: 9088201
    Abstract: A drive guide device capable of effectively releasing heat produced by a mover. The drive guide device has a movement unit 100 moved by a linear motor while being guided by a rail 230. The movement unit 100 has the mover 140 to which electricity is conducted to produce a magnetic field, a table 110 placed on the mover 140 on the opposite side of a base 210 to which the rail 230 is fixed, a heat sink 130 having heat radiation fins for releasing heat produced by the mover 140 and placed between the mover 140 and the table 110, and a heat transmission route for transmitting heat, which cannot be released by the heat sink 130, to the table 110. The table 110 is made from a material having a low thermal expansion coefficient.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: July 21, 2015
    Assignee: THK CO., LTD.
    Inventors: Toshiyuki Aso, Akihiro Unno
  • Patent number: 9048707
    Abstract: A linear motor air-cooling structure includes two cooling sections. Each cooling section has an elongated board-shaped main body. The main body is attached to a lateral side of the stator of the linear motor. An air flow way is formed in the main body. The external air can be uniformly guided through the air flow way and distributed to every part of the linear motor. Accordingly, in operation, a better air-cooling effect is provided for the linear motor.
    Type: Grant
    Filed: November 8, 2012
    Date of Patent: June 2, 2015
    Assignee: Hiwin Mikrosystem Corp.
    Inventors: Yu-Jung Chang, Bo-Sheng Huang, Chih-Kai Fan
  • Publication number: 20150091393
    Abstract: An apparatus includes a lamination stack for a motor stator. The lamination stack comprises a plurality of conductive laminates. The laminates are coupled to each other in a stacking direction along a stacking axis. Each laminate comprises a base, a plurality of fins extending from a first side of the base, a plurality of spacings between the fins, a row of teeth extending from a second side of the base opposite the first side, each tooth constructed and arranged to communicate with windings of a conductive coil, and a plurality of spacings between the teeth. The lamination stack also comprises a plurality of first channels formed from the spacings between the fins and a plurality of second channels formed from the spacings between the teeth. The first and second channels extend along the stacking axis.
    Type: Application
    Filed: September 30, 2013
    Publication date: April 2, 2015
    Inventors: Mark A. Hayner, Thomas Andrikowich, Christopher A. Pare
  • Patent number: 8988657
    Abstract: A lithographic apparatus having a component that moves in a first direction, the component including a passive gas flow system. The passive gas flow system has a gas inlet to drive gas into the passive gas flow system when the component moves in the first direction and a gas outlet, connected to the gas inlet by a gas conduit, to direct the gas that is driven into the passive gas flow system in a certain direction.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: March 24, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Frank Johannes Jacobus Van Boxtel, Jeroen Gerard Gosen, Anthonie Kuijper, Arjan Hubrecht Josef Anna Martens, Jean-Philippe Xavier Van Damme, Peter Schoenmakers, Franciscus Joannes Anthonius Evers, Jaap Wilhelmus Petrus Van Empel, Léon Hubert Joseph Coumans, Justin Johannes Hermanus Gerritzen
  • Patent number: 8987950
    Abstract: An actuator in accordance with an embodiment includes at least one linear motor, a partition member and a fan. The linear motor is configured to linearly move a shaft serving as a movable member. The partition member is provided close to the shaft and configured to partition a space defined between the shaft and a control board for controlling the linear motor. Further, the fan is arranged on the side of the shaft with respect to the partition member and configured to flow an air existing in a partitioned space on the side of the shaft.
    Type: Grant
    Filed: October 18, 2012
    Date of Patent: March 24, 2015
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Shogo Makino, Takeo Suzuki, Yukio Tsutsui, Motomichi Ohto
  • Patent number: 8922068
    Abstract: A primary for a linear drive motor has first and second stacks, each with inner and outer teeth and a bearing mount. A magnet is disposed between the first and second stacks, and a coil wrapped is between the first and second stacks. A bearing is operatively mounted to at least one of the bearing mounts of the first and second stacks. The outer teeth of the first and second stacks may have a projection comprising the bearing mount. The bearing mount may be embedded within the stacks. The stacks may be assembled in a housing and the housing may have a first bearing outboard of the first stack, a second bearing outboard of the second stack, and a third bearing in staggered relationship with the first and second bearings across the housing in an arrangement bilaterally symmetric about an axis transverse to the direction of travel.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: December 30, 2014
    Assignee: Baldor Electric Company
    Inventor: Glenn S. Trammell
  • Publication number: 20140375148
    Abstract: A linear motor with enhanced cooling performance, including: a stator including multiple magnetic force generating members provided in a row; a moving element including multiple coils provided in a row in an axis line direction of the stator and wound around an outside of the stator; and a heat transfer member dissipating heat generated by the coil which is between adjacent coils and along a side of the coils.
    Type: Application
    Filed: January 10, 2012
    Publication date: December 25, 2014
    Applicant: FUJI MACHINE MFG. CO., LTD.
    Inventors: Jun-ichi Narita, Ryo Nagata, Masaki Kurono
  • Patent number: 8885148
    Abstract: A linear motor for vacuum environment includes a core and a housing. The core includes a plurality of cooling plates and a plurality of electrical coils sandwiched between the plurality of cooling plates. The core further includes a plurality of thermally conductive epoxy layers positioned between the plurality of electrical coils and the plurality of cooling plates, and a plurality of shims located between the plurality of electrical coils and the plurality of cooling plates to determine a distance between the plurality of electrical coils and the plurality of cooling plates. The core is assembled and tested independently and before being assembled in the housing. The housing encloses the core and includes a body, a plurality of feed throughs, and a lid.
    Type: Grant
    Filed: December 8, 2011
    Date of Patent: November 11, 2014
    Assignee: ASML Holding N.V.
    Inventor: Enrico Zordan
  • Publication number: 20140312718
    Abstract: A motor cooling and eddy current suppression structure (100), which is attached to the surface of the motor winding (201), includes a first cooling plate (101), a second cooling plate (103,104), and a cooling water circuit located between the first cooling plate and the second cooling plate. The cooling water circuit is configured to allow the cooling fluid to pass through. The first and the second cooling plates are both non-magnetic metallic materials. The first cooling plate is divided into a plurality of individual first regions (301,303) which are corresponding to each pole of the motor by one or more first slits (305) provided on the first cooling plate in the position where the motor poles are combined. Each of the first regions is further divided into an even number of first sub-areas by at least one fist sub-slit (306) where induced electromotive force is generated.
    Type: Application
    Filed: January 31, 2013
    Publication date: October 23, 2014
    Inventors: Liyi Li, Donghua Pan
  • Patent number: 8860260
    Abstract: A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: October 14, 2014
    Assignee: Massachusetts Institute of Technology
    Inventors: David L. Trumper, Ian MacKenzie
  • Patent number: 8823220
    Abstract: A positioning system for positioning a positioning unit along a longitudinal axis includes: a linear guide arrangement for enabling a linearly guided motion parallel to the axis; a motor includes a moving motor member operatively connected to the linear guide arrangement and an elongated stationary motor member extending parallel to the axis; and a force transmission arrangement operatively connecting the moving motor member to the positioning unit, wherein the force transmission arrangement is arranged to provide a semi-rigid engagement between the positioning unit and the moving motor member, wherein the positioning unit and the moving motor member, respectively, are operatively connected to the linear guide arrangement by at least two guide engaging carriages, and wherein the positioning unit is attached to the guide engaging carriages by rigid or resilient positioning unit holders.
    Type: Grant
    Filed: January 22, 2013
    Date of Patent: September 2, 2014
    Assignee: Mydata Automation AB
    Inventors: Niclas Yman, Robert Axelsson
  • Publication number: 20140232210
    Abstract: A core for a primary of a liner induction motor. The core includes a number of laminate sheets positioned between two walls of a frame. Each laminate sheet of the plurality of laminate sheets includes a number of heat dissipating projections positioned in a spaced apart manner along a longitudinal edge of the laminate sheet. The heat dissipating projections of each pair of adjacent laminate sheets are staggered from one another such that the core upper surface includes interleaving heat dissipating projections.
    Type: Application
    Filed: November 2, 2011
    Publication date: August 21, 2014
    Applicant: BOMBARDIER TRANSPORTATION GMBH
    Inventor: Alireza Safaee
  • Patent number: 8791608
    Abstract: A primary for a linear drive motor has a stage with stacks made from solid steel. Each stack has inner and outer teeth made that form a generally u-shaped cross-section for the stack. A magnet is disposed between the first and second stacks and a a coil wrapped between the first and second stacks. The stacks may be placed in a housing or may be formed as a housingless stage. The stacks and/or housing may be modified to selectively skew motor alignment to reduce motor cogging. The stacks may be contoured to follow various secondary forms. The stack inner and outer teeth lengths may be adjusted to help balance or optimize the magnetic circuit, to increase tooth surface area for increasing force, to allow more motor windings in the coil of the stack assembly, and to help locate the magnet and coil near the tooth surface.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: July 29, 2014
    Assignee: Baldor Electric Company
    Inventor: Glenn S. Trammell
  • Publication number: 20140132088
    Abstract: A primary part of an ironless linear motor includes a cooling plate on which flat coils are disposed, each having a central opening. The coils are pressed onto the cooling plate by holding pieces which taper toward the cooling plate and engage in the openings in the coils. In this manner, an especially good contact is produced between the flat coils of the primary part and the cooling plate prior to encapsulating the primary part with a synthetic resin, the cooling effect of the preferably actively cooled cooling plate thereby being increased markedly.
    Type: Application
    Filed: November 14, 2013
    Publication date: May 15, 2014
    Applicant: ETEL S.A.
    Inventor: Jean-Pierre Morel
  • Patent number: 8723468
    Abstract: A motor having a first portion configured to turn in a forward direction, a second portion coaxially mirrors the first portion; and a central fan between the first and second portions, and forcing air through the portions. A thermoelectric cooler element, thermally coupled to the portion is configured to cool the motor. A motor controller is electrically coupled to the first and second portions, and operates a portion in response to a condition sensed by the motor controller. The condition sensed by the motor controller is a motor torque, a motor speed, a motor casing temperature, or a zoned motor casing temperature. A method includes detecting a motor operational command; selecting a motor operational state using motor portion responsive to the motor command; sensing a heating state of a motor portion; and providing a cooling state to the motor portion responsive to the heating state.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: May 13, 2014
    Assignee: Aurora Office Equipment Co., Ltd.
    Inventor: John O'Rourke
  • Publication number: 20140103748
    Abstract: A linear motor air-cooling structure includes two cooling sections. Each cooling section has an elongated board-shaped main body. The main body is attached to a lateral side of the stator of the linear motor. An air flow way is formed in the main body. The external air can be uniformly guided through the air flow way and distributed to every part of the linear motor. Accordingly, in operation, a better air-cooling effect is provided for the linear motor.
    Type: Application
    Filed: November 8, 2012
    Publication date: April 17, 2014
    Applicant: HIWIN MIKROSYSTEM CORP.
    Inventors: Yu-Jung CHANG, Bo-Sheng HUANG, Chih-Kai FAN
  • Publication number: 20140103749
    Abstract: A linear motor cooling mechanism includes two cooling sections. Each cooling section is composed of multiple bypass heads, which are serially connected with each other. The cooling sections are additionally fixedly disposed on the linear motor. Each cooling section has a main flow way and multiple bypass flow ways in communication with the main flow way. External air is guided through the main flow way and distributed to the bypass flow ways so as to controllably flow toward the position of the mover of the linear motor for achieving an air-cooling heat dissipation effect.
    Type: Application
    Filed: November 9, 2012
    Publication date: April 17, 2014
    Applicant: HIWIN MIKROSYSTEM CORP.
    Inventors: Yu-Jung CHANG, Bo-Sheng HUANG, Chih-Kai FAN
  • Patent number: 8692426
    Abstract: A direct current motor comprises a magnet assembly having a pair of magnets for generating a magnetic field and a coil assembly located between the pair of magnets, the coil assembly and the magnet assembly being movable relative to each other. The coil assembly further comprises a first coil section and a second coil section which are electrically connected to each other. A current generator is electrically connected to the coil assembly and is operative to provide first, second and third currents. The first current is electrically connected directly to the first coil section and the second current is electrically connected directly to the second coil section whereas the third current is electrically connected to the first and second coil sections at a position connecting the first and second coil sections.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: April 8, 2014
    Assignee: ASM Assembly Automation Ltd
    Inventors: Wai Chuen Gan, Gary Peter Widdowson
  • Patent number: 8674562
    Abstract: A linear motor armature according to an embodiment includes an armature coil and a cooling jacket. The cooling jacket is provided to surround the armature coil and has an internal space into which a refrigerant is supplied. The cooling jacket is formed in a thin plate shape having a structure in which a channel for supplying the refrigerant is provided in a multiple manner in its thickness direction.
    Type: Grant
    Filed: August 26, 2011
    Date of Patent: March 18, 2014
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Shusaku Yoshida, Yuji Nitta, Katsuhiko Shiraishi, Kazuyuki Shiono
  • Publication number: 20140054979
    Abstract: An armature of a linear motor includes a plurality of cooling pipe storage holes formed along a longitudinal direction of a core, and a plurality of cooling pipes stored vertically in the cooling pipe storage holes and having a meander shape. The cooling pipes vertically adjacent to each other are arranged such that inlets and outlets of the cooling pipes are alternately connected in parallel to a refrigerant inlet and a refrigerant outlet in order to allow a refrigerant to flow in the reverse direction.
    Type: Application
    Filed: August 15, 2013
    Publication date: February 27, 2014
    Applicant: SANYO DENKI CO., LTD.
    Inventors: Satoshi Sugita, Yasushi Misawa, Shigenori Miyairi
  • Publication number: 20130257182
    Abstract: A linear motor cooling structure includes an inflow section for inflow of cooling water, an outflow section for outflow of the cooling water, and a flat plate cooling section which includes an inflow opening for inflow of the cooling water from the inflow section, an outflow opening for outflow of the cooling water to the outflow section, and a flow path which makes the cooling water which has flowed in from the inflow opening flow through an inside thereof and flow out from the outflow opening, wherein the inflow section, the flat plate cooling section, and the outflow section are connected, and the inflow section and the inflow opening communicate with each other and also the outflow opening and the outflow section communicate with each other.
    Type: Application
    Filed: March 26, 2013
    Publication date: October 3, 2013
    Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.
    Inventors: Daisuke SHINOHIRA, Doutaro USUI, Takashi IKEDA
  • Publication number: 20130257181
    Abstract: A linear motor cooling structure for cooling a coil constituting a driving section of a linear motor includes a flat plate cooling section which forms a flow path for cooling water for cooling the coil in an inside between a plurality of flat plate members by overlapping the plurality of flat plate members, wherein the flat plate cooling section includes an inflow opening for inflow of the cooling water and an outflow opening for outflow of the cooling water, which are respectively provided at both ends thereof, and the flat plate cooling section comes into close contact with the coil.
    Type: Application
    Filed: March 26, 2013
    Publication date: October 3, 2013
    Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.
    Inventors: Daisuke SHINOHIRA, Doutaro USUI, Takashi IKEDA
  • Publication number: 20130181548
    Abstract: A linear actuator is provided with an outer tube and an inner tube inserted in the outer tube so as to be free to slide. The linear actuator is also provided with a rod erected at a central axis part of the inner tube and forming an annular space between the rod and the inner tube, a rod guide which slides along an inner surface of the outer tube and guides the rod along an axial direction, a plurality of permanent magnets arranged along the axial direction in the rod, and a plurality of coils retained by the outer tube so as to face the permanent magnets. A cooling fluid is filled in an internal space formed between the outer tube and the inner tube.
    Type: Application
    Filed: September 1, 2011
    Publication date: July 18, 2013
    Applicant: KAYABA INDUSTRY CO., LTD.
    Inventors: Takashi Kakiuchi, Kousuke Satou
  • Publication number: 20130133187
    Abstract: A positioning system for positioning a positioning unit along a longitudinal axis includes: a linear guide arrangement for enabling a linearly guided motion parallel to the axis; a motor includes a moving motor member operatively connected to the linear guide arrangement and an elongated stationary motor member extending parallel to the axis; and a force transmission arrangement operatively connecting the moving motor member to the positioning unit, wherein the force transmission arrangement is arranged to provide a semi-rigid engagement between the positioning unit and the moving motor member, wherein the positioning unit and the moving motor member, respectively, are operatively connected to the linear guide arrangement by at least two guide engaging carriages, and wherein the positioning unit is attached to the guide engaging carriages by rigid or resilient positioning unit holders.
    Type: Application
    Filed: January 22, 2013
    Publication date: May 30, 2013
    Applicant: MYDATA AUTOMATION AB
    Inventor: MYDATA AUTOMATION AB
  • Patent number: 8450885
    Abstract: In a coolant-cooled linear motor includes an armature including armature windings and a cooling jacket arranged to surround the armature windings, the cooling jacket unit includes four cooling jackets defining four side faces parallel to the extension direction of the armature and two end blocks defining two opposite end faces in the extension direction of the armature, the cooling jackets and the end blocks being connected to one another in a box shape. Each of the cooling jackets has an internal space to be supplied with a coolant; and a field magnet unit includes a yoke made of a ferromagnetic material and permanent magnets arranged in the yoke, one of the armature and the field magnet unit making relative movement with respect to the other.
    Type: Grant
    Filed: January 4, 2011
    Date of Patent: May 28, 2013
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Shusaku Yoshida, Toshiyuki Yamagishi, Kazuya Watanabe, Masahiko Tanabe
  • Patent number: 8421281
    Abstract: The invention relates to a linear drive for a machine tool having a housing, having a carriage, which is mounted so it is axially movable in the housing via two bearings, and has a central axis and a length, and having at least one first motor, having a first motor element and a second motor element, wherein said first motor element is disposed on said carriage and said second motor element is disposed on said housing, wherein said first motor element is implemented on said carriage as a primary part and said second motor element is implemented on said housing as a secondary part. Furthermore, the invention relates to a method for moving a carriage for a lathe tool of a highly-dynamic machine tool employing a crossed roller bearing for mounting the carriage, wherein all roller bodies of said crossed roller bearing are always operationally linked to a carriage-side bearing surface, and said carriage is driven at an oscillation frequency of at least 50 Hz, in particular between 60 Hz and 200 Hz.
    Type: Grant
    Filed: March 19, 2009
    Date of Patent: April 16, 2013
    Assignee: Schneider GmbH & Co. KG
    Inventors: Gunter Schneider, Helwig Buchenauer, Ulf Borner, Klaus Kramer
  • Patent number: 8384253
    Abstract: This invention relates to a positioning system for positioning a positioning unit along a longitudinal axis. The positioning system comprises a linear guide arrangement for enabling a linearly guided motion parallel to said axis, wherein the positioning unit is operatively connected to said guide arrangement. Furthermore, the positioning system comprises a motor, wherein the motor comprises a moving motor member operatively connected to said linear guide arrangement and an elongated stationary motor member extending parallel to said axis. The moving motor member is adapted to move along the stationary motor member for providing motion parallel to said axis. Moreover, the positioning system further comprises a force transmission arrangement which operatively connects said moving motor member to the positioning unit. The force transmission arrangement is arranged to provide an engagement between said positioning unit and said moving motor.
    Type: Grant
    Filed: March 25, 2009
    Date of Patent: February 26, 2013
    Assignee: Mydata Automation AB
    Inventors: Niclas Yman, Robert Axelsson
  • Patent number: 8368258
    Abstract: A linear motor armature in which pressure loss of a coolant flowing in a cooling conduit and possible significant non-uniformity in temperature distribution are reduced over the entire armature. A manifold 5, 6h and a pair of cooling conduits 7, 9 are configured such that a coolant is supplied from one connecting conduit 27 of the cooling conduit 7, and one connecting conduit 33 of the cooling conduit 9, and discharged from the other connecting conduit 29 of the cooling conduit 7 and the other connecting conduit 35 of the cooling conduit 9.
    Type: Grant
    Filed: March 5, 2009
    Date of Patent: February 5, 2013
    Assignee: Sanyo Denki Co., Ltd.
    Inventors: Satoshi Sugita, Yasushi Misawa
  • Patent number: 8362659
    Abstract: A linear motor mover with heat dissipation unit includes: a base seat; a mover having several coils sequentially upright arranged with first ends of the coils disposed in the base seat; a heat dissipation unit having a hollow and substantially slat-shaped cooling section, one face of the cooling section being immediately adjacent to second ends of the coils opposite to the base seat, whereby the heat generated by the coils during operation of the mover can be conducted from the coils to the cooling section, the cooling section containing a cooling fluid therein, the cooling fluid flowing within an interior of the cooling section to carry away the heat absorbed by the cooling section; and an insulation section disposed between the heat dissipation unit and the coils. With the heat dissipation unit, the linear motor has better heat dissipation efficiency and driving efficiency and is assembled at lower cost.
    Type: Grant
    Filed: January 28, 2011
    Date of Patent: January 29, 2013
    Assignee: Hiwin Mikrosystem Corp.
    Inventors: Wei-Lin Chang, Bo-Sheng Huang
  • Patent number: 8358039
    Abstract: A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.
    Type: Grant
    Filed: October 17, 2009
    Date of Patent: January 22, 2013
    Assignee: Massachusetts Institute of Technology
    Inventors: David L. Trumper, Ian MacKenzie
  • Patent number: 8330307
    Abstract: A linear motor including permanent magnets fixed on an elongate yoke such that polarities of the permanent magnets alternately change, and an armature having cores and coils wound on the respective cores, wherein each row of the permanent magnets and the armature are moved relative to each other along a straight line by application of an electric current to the coils, each core extending in a first direction perpendicular to the permanent magnet row, the cores being arranged in a second direction perpendicular to the first direction and disposed on the cores such that the coils on the cores adjacent to each other are arranged in a zigzag pattern and spaced apart from each other in the first direction, with a gap left therebetween, wherein the armature includes a heat pipe having opposite end portions one of which is inserted in the gap and the other of which extends outwardly of the gap, and fins fixed to the other end portion of the heat pipe.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: December 11, 2012
    Assignee: Fuji Machine Mfg. Co., Ltd.
    Inventor: Keiji Nagasaka
  • Patent number: 8325326
    Abstract: A power usage supply unit—that supplies power usage to a stage which moves on a movement surface has a first axis section, first support sections, a second axis section, and a second support section. The first axis section is movably supported by the first support section in a direction of the first axis and around the first axis, and the second axis section is movably supported by the second support section in a direction of the second axis and around the second axis. And, by employing a mechanism in which the power usage supply unit has at least four degrees of freedom, the power usage supply unit does not interfere with the movement of a stage even when the stage moves in the first and second axis directions and in the rotational direction of each axis, therefore, decrease in position controllability of the stage caused by dragging a tube can be completely avoided.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: December 4, 2012
    Assignee: Nikon Corporation
    Inventor: Yuichi Shibazaki
  • Patent number: 8283815
    Abstract: The invention relates to an electrical machine (1, 110), which is in particular a synchronous machine, which has a primary part (3, 130) and a secondary part (5, 120), wherein the primary part (3, 130) has a) a first means (9) for producing a first magnetic field and b) a further means (17, 27, 29) for producing a further magnetic field, which in particular is an exciter field, and wherein the first means (9) has at least one winding, and the further means (17, 27, 29) is arranged in the region of an active air gap (21) of the electrical machine between the primary part and the secondary part and has magnetic poles, each having at least one permanent magnet (17).
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: October 9, 2012
    Assignee: Siemens Aktiengesellschaft
    Inventor: Rolf Vollmer
  • Publication number: 20120194007
    Abstract: A linear motor mover with heat dissipation unit includes: a base seat; a mover having several coils sequentially upright arranged with first ends of the coils disposed in the base seat; a heat dissipation unit having a hollow and substantially slat-shaped cooling section, one face of the cooling section being immediately adjacent to second ends of the coils opposite to the base seat, whereby the heat generated by the coils during operation of the mover can be conducted from the coils to the cooling section, the cooling section containing a cooling fluid therein, the cooling fluid flowing within an interior of the cooling section to carry away the heat absorbed by the cooling section; and an insulation section disposed between the heat dissipation unit and the coils. With the heat dissipation unit, the linear motor has better heat dissipation efficiency and driving efficiency and is assembled at lower cost.
    Type: Application
    Filed: January 28, 2011
    Publication date: August 2, 2012
    Inventors: Wei-Lin Chang, Bo-Sheng Huang
  • Publication number: 20120170016
    Abstract: A linear motor for vacuum environment includes a core and a housing. The core includes a plurality of cooling plates and a plurality of electrical coils sandwiched between the plurality of cooling plates. The core further includes a plurality of thermally conductive epoxy layers positioned between the plurality of electrical coils and the plurality of cooling plates, and a plurality of shims located between the plurality of electrical coils and the plurality of cooling plates to determine a distance between the plurality of electrical coils and the plurality of cooling plates. The core is assembled and tested independently and before being assembled in the housing. The housing encloses the core and includes a body, a plurality of feed throughs, and a lid.
    Type: Application
    Filed: December 8, 2011
    Publication date: July 5, 2012
    Applicant: ASML Netherlands B.V.
    Inventor: Enrico ZORDAN
  • Publication number: 20120139366
    Abstract: This invention relates to a positioning system for positioning a positioning unit along a longitudinal axis. The positioning system comprises a linear guide arrangement for enabling a linearly guided motion parallel to said axis, wherein the positioning unit is operatively connected to said guide arrangement. Furthermore, the positioning system comprises a motor, wherein the motor comprises a moving motor member operatively connected to said linear guide arrangement and an elongated stationary motor member extending parallel to said axis. The moving motor member is adapted to move along the stationary motor member for providing motion parallel to said axis. Moreover, the positioning system further comprises a force transmission arrangement which operatively connects said moving motor member to the positioning unit. The force transmission arrangement is arranged to provide an engagement between said positioning unit and said moving motor.
    Type: Application
    Filed: March 25, 2009
    Publication date: June 7, 2012
    Applicant: MYDATA Automation AB
    Inventors: Niclas Yman, Robert Axelsson
  • Patent number: 8154157
    Abstract: The invention relates to a primary part of a linear motor having a receptacle for a secondary part which can move along an axis in the receptacle, having a plurality of annular coils which are arranged coaxially with respect to the receptacle, and having a yoke, with teeth which are composed of a soft-magnetic material being arranged or formed between the end faces of adjacent coils. In order to provide a primary part or a linear motor which has a high power density in a compact form and allows good cooling with coolant, cooling gaps in which spacers are arranged are formed between the end faces of the coils and the teeth.
    Type: Grant
    Filed: November 14, 2006
    Date of Patent: April 10, 2012
    Assignee: Zenergy Power GmbH
    Inventors: Jan Wiezoreck, Carsten Bührer
  • Publication number: 20120062866
    Abstract: Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.
    Type: Application
    Filed: September 2, 2011
    Publication date: March 15, 2012
    Inventors: Michael B. Binnard, Scott Coakley, Alex Ka Tim Poon, Masahiro Totsu, Derek Coon, Leonard Wai Fung Kho, Gaurav Keswani, Alexander Cooper, Michel Pharand, Matt Bjork
  • Publication number: 20120049658
    Abstract: A linear motor armature according to an embodiment includes an armature coil and a cooling jacket. The cooling jacket is provided to surround the armature coil and has an internal space into which a refrigerant is supplied. The cooling jacket is formed in a thin plate shape having a structure in which a channel for supplying the refrigerant is provided in a multiple manner in its thickness direction.
    Type: Application
    Filed: August 26, 2011
    Publication date: March 1, 2012
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Shusaku Yoshida, Yuji Nitta, Katsuhiko Shiraishi, Kazuyuki Shiono
  • Patent number: 8102500
    Abstract: A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.
    Type: Grant
    Filed: May 21, 2007
    Date of Patent: January 24, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hitoshi Sato, Yasuhito Sasaki, Keiji Emoto
  • Publication number: 20110316358
    Abstract: A linear motor armature in which pressure loss of a coolant flowing in a cooling conduit and possible significant non-uniformity in temperature distribution are reduced over the entire armature. A manifold 5, 6h and a pair of cooling conduits 7, 9 are configured such that a coolant is supplied from one connecting conduit 27 of the cooling conduit 7, and one connecting conduit 33 of the cooling conduit 9, and discharged from the other connecting conduit 29 of the cooling conduit 7 and the other connecting conduit 35 of the cooling conduit 9.
    Type: Application
    Filed: March 5, 2009
    Publication date: December 29, 2011
    Applicant: SANYO DENKI CO., LTD.
    Inventors: Satoshi Sugita, Yasushi Misawa
  • Publication number: 20110198946
    Abstract: A linear motor coil assembly includes a base plate (1), a line of iron cores affixed longitudinally on the upper surface of the base plate, multiple coils respectively provided for the iron cores, and a first cooling tube being in contact with contacts the multiple coils and through which a first refrigerant passes. The lower surface of the base plate can be attached to a precision table of a machine tool or a semiconductor manufacturing apparatus. A groove (8) that extends longitudinally in linear fashion is formed on the lower surface of the base plate. A second cooling tube (92, 94), through which a second refrigerant passes, provided within the groove is additionally provided in the linear motor coil assembly.
    Type: Application
    Filed: October 23, 2009
    Publication date: August 18, 2011
    Applicant: SODICK CO., LTD.
    Inventors: Hiroshi Koshimoto, Satoru Tajima
  • Patent number: 7994662
    Abstract: The innovation relates to systems and methodologies for facilitating and/or enhancing heat transfer in a stage machine employed in an industrial or manufacturing environment. A thermal block and thermal rail combination and/or a thermal block and bearing rail combination draw accumulated heat away from a source of heat generated within the stage machine, and such combinations conduct the heat to a base of the stage machine. Each type of combination is conductively coupled such that the conductive coupling facilitates the translation or movement of the stage while maintaining contact to facilitate the conduction through the thermal block and thermal rail of the stage machine. The removal of the heat from the source of the heat or the accumulation of the heat within the stage machine system prevents distortion of the machine or products being manufactured or measured by the machine from the heat.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: August 9, 2011
    Assignee: Anorad Corporation
    Inventor: Devarajan Rajaraman
  • Publication number: 20110181130
    Abstract: In a coolant-cooled linear motor includes an armature including armature windings and a cooling jacket arranged to surround the armature windings, the cooling jacket unit includes four cooling jackets defining four side faces parallel to the extension direction of the armature and two end blocks defining two opposite end faces in the extension direction of the armature, the cooling jackets and the end blocks being connected to one another in a box shape. Each of the cooling jackets has an internal space to be supplied with a coolant; and a field magnet unit includes a yoke made of a ferromagnetic material and permanent magnets arranged in the yoke, one of the armature and the field magnet unit making relative movement with respect to the other.
    Type: Application
    Filed: January 4, 2011
    Publication date: July 28, 2011
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Shusaku YOSHIDA, Toshiyuki YAMAGISHI, Kazuya WATANABE, Masahiko TANABE
  • Patent number: 7960874
    Abstract: A cooling device of a linear motor to cool a primary side of the linear motor including an iron core and a coil accommodated in slots of the iron core, including an elongate cover covering coil end portions exposed from both side faces of the iron core in a longitudinal direction, an air channel serving as blower for forcing a current of cooling air inside the cover, and a partition plate dividing the inside of the cover into upper and lower spaces. It is configured in such a manner that the upper space divided by the partition plate is used as a ventilation portion through which a current of cooling air is forced and the lower space is used as a cooling portion in which the coil end portions are accommodated and cooled. A slit is formed almost along a full length of the partition plate on a side closer to the iron core for bringing the ventilation portion and the cooling portion into communication with each other, and a vent is provided in a lower portion of the cooling portion.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: June 14, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventors: Haruhiro Oda, Toshinori Nakagawa, Tetsuro Ogushi
  • Patent number: 7956982
    Abstract: A cooling apparatus is described that has a first cooling structure, in thermal contact with a heat source having a temperature greater than a cool structure, including a channel through which a cooling fluid is passed, an isolator between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and including a material of low thermal conductivity, and a second cooling structure between the isolator and the cool structure, the second cooling structure including a channel through which cooling fluid is passed.
    Type: Grant
    Filed: November 18, 2005
    Date of Patent: June 7, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Sven Antoin Johan Hol, Angelo Cesar Peter De Klerk, Erik Roelof Loopstra, Fransicus Mathijs Jacobs, Mark Scholten
  • Patent number: 7939974
    Abstract: A movable magnet type linear motor with a mover heat-dissipating assembly includes a mover having a housing receiving therein a coil seat for holding a coil, openings being formed at two opposite ends of the housing, end covers being attached to the openings and having central holes so as to allow an inner stator to pass through the holes, wherein a plurality of heat dissipating channels are provided between the coil seat and the housing while the end covers have plural heat dissipating holes corresponding to the heat dissipating channels so that external cool air is allowed to enter the housing through the heat dissipating holes and the heat dissipating channels, thereby cooling the mover.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: May 10, 2011
    Assignee: Hiwin Mikrosystem Corp.
    Inventors: Chih-Hsien Chao, Fu-Yuan Cheng