Abstract: A linear motor armature according to an embodiment includes an armature coil and a cooling jacket. The cooling jacket is provided to surround the armature coil and has an internal space into which a refrigerant is supplied. The cooling jacket is formed in a thin plate shape having a structure in which a channel for supplying the refrigerant is provided in a multiple manner in its thickness direction.

Abstract: A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.

Abstract: A linear motor armature in which pressure loss of a coolant flowing in a cooling conduit and possible significant non-uniformity in temperature distribution are reduced over the entire armature. A manifold 5, 6h and a pair of cooling conduits 7, 9 are configured such that a coolant is supplied from one connecting conduit 27 of the cooling conduit 7, and one connecting conduit 33 of the cooling conduit 9, and discharged from the other connecting conduit 29 of the cooling conduit 7 and the other connecting conduit 35 of the cooling conduit 9.

Abstract: A linear motor coil assembly includes a base plate (1), a line of iron cores affixed longitudinally on the upper surface of the base plate, multiple coils respectively provided for the iron cores, and a first cooling tube being in contact with contacts the multiple coils and through which a first refrigerant passes. The lower surface of the base plate can be attached to a precision table of a machine tool or a semiconductor manufacturing apparatus. A groove (8) that extends longitudinally in linear fashion is formed on the lower surface of the base plate. A second cooling tube (92, 94), through which a second refrigerant passes, provided within the groove is additionally provided in the linear motor coil assembly.

Abstract: The innovation relates to systems and methodologies for facilitating and/or enhancing heat transfer in a stage machine employed in an industrial or manufacturing environment. A thermal block and thermal rail combination and/or a thermal block and bearing rail combination draw accumulated heat away from a source of heat generated within the stage machine, and such combinations conduct the heat to a base of the stage machine. Each type of combination is conductively coupled such that the conductive coupling facilitates the translation or movement of the stage while maintaining contact to facilitate the conduction through the thermal block and thermal rail of the stage machine. The removal of the heat from the source of the heat or the accumulation of the heat within the stage machine system prevents distortion of the machine or products being manufactured or measured by the machine from the heat.

Abstract: In a coolant-cooled linear motor includes an armature including armature windings and a cooling jacket arranged to surround the armature windings, the cooling jacket unit includes four cooling jackets defining four side faces parallel to the extension direction of the armature and two end blocks defining two opposite end faces in the extension direction of the armature, the cooling jackets and the end blocks being connected to one another in a box shape. Each of the cooling jackets has an internal space to be supplied with a coolant; and a field magnet unit includes a yoke made of a ferromagnetic material and permanent magnets arranged in the yoke, one of the armature and the field magnet unit making relative movement with respect to the other.

Abstract: A cooling device of a linear motor to cool a primary side of the linear motor including an iron core and a coil accommodated in slots of the iron core, including an elongate cover covering coil end portions exposed from both side faces of the iron core in a longitudinal direction, an air channel serving as blower for forcing a current of cooling air inside the cover, and a partition plate dividing the inside of the cover into upper and lower spaces. It is configured in such a manner that the upper space divided by the partition plate is used as a ventilation portion through which a current of cooling air is forced and the lower space is used as a cooling portion in which the coil end portions are accommodated and cooled. A slit is formed almost along a full length of the partition plate on a side closer to the iron core for bringing the ventilation portion and the cooling portion into communication with each other, and a vent is provided in a lower portion of the cooling portion.

Abstract: A cooling apparatus is described that has a first cooling structure, in thermal contact with a heat source having a temperature greater than a cool structure, including a channel through which a cooling fluid is passed, an isolator between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and including a material of low thermal conductivity, and a second cooling structure between the isolator and the cool structure, the second cooling structure including a channel through which cooling fluid is passed.

Abstract: A movable magnet type linear motor with a mover heat-dissipating assembly includes a mover having a housing receiving therein a coil seat for holding a coil, openings being formed at two opposite ends of the housing, end covers being attached to the openings and having central holes so as to allow an inner stator to pass through the holes, wherein a plurality of heat dissipating channels are provided between the coil seat and the housing while the end covers have plural heat dissipating holes corresponding to the heat dissipating channels so that external cool air is allowed to enter the housing through the heat dissipating holes and the heat dissipating channels, thereby cooling the mover.

Abstract: A canned linear motor armature includes an armature winding, a picture-frame-shaped casing, a flat can, and a plurality of refrigerant flow channels. The armature winding includes a coil. The picture-frame-shaped casing has an opening and encloses the armature winding. The flat can has a plate surface to close and seal the opening of the picture-frame-shaped casing. The plurality of refrigerant flow channels are provided within the can to face the coil of the armature winding.

Abstract: A movable magnet type linear motor with a mover heat-dissipating assembly includes a mover having a housing receiving therein a coil seat for holding a coil, openings being formed at two opposite ends of the housing, end covers being attached to the openings and having central holes so as to allow an inner stator to pass through the holes, wherein a plurality of heat dissipating channels are provided between the coil seat and the housing while the end covers have plural heat dissipating holes corresponding to the heat dissipating channels so that external cool air is allowed to enter the housing through the heat dissipating holes and the heat dissipating channels, thereby cooling the mover.

Abstract: The moving parts of an electric motor are intended to be cooled more effectively and in a simple manner. For this purpose, the invention proposes an electric motor with a first motor part (1) and a second motor part, which interacts magnetically with the first motor part (1) and with respect to which the first motor part is capable of moving in two opposite movement directions (A, B). The electric motor is also equipped with a cooling system, which is fitted to the first motor part (1) and which has a cooling medium for cooling at least the first motor part. The cooling medium is moved, exclusively by means of acceleration of the first motor part (1), in one of the two opposite movement directions (A, B) in the cooling system. The movement can be triggered, for example, by the dead weight in an open cooling cycle system or else by means of a piston (23) in a closed cooling cycle system.

Abstract: A system (50) for cooling a target element (56) includes a structure (52) having an opening (62) extending through the layer (52), a pumping device (32) positioned behind the structure (52), and a target element (56) positioned in front of the structure (52). Transducers (58, 60) are positioned at opposing ends (74, 76) of the opening (62) between the structure (52) and the target element (56). The pumping device (32) drives a jet (70) of coolant through the opening (62) toward the target element (56). The transducers (58, 60) produce output signals (84, 86) that perturb the jet (70) to control oscillation of the jet (70) in order to stabilize the jet (70) for impingement with a predetermined location (96) on the target element (56). The jet (70) uniformly spreads from the location (96) to provide cooling over a surface (100) of the target element (56).

Abstract: A linear motor is provided with a first member including a magnet and a second member including a coil facing the magnet, which are moved relative to each other. The second member includes a thermal conduction member, a thermal insulation member, the coil, and a first cooling unit, which are disposed in this order from the magnet side, and a second cooling unit configured to cool the thermal conduction member being disposed outside an area in which the magnet and the coil face each other.

Abstract: A heat dissipater within a linear motor system comprising a core, the core having a base and a projecting portion projecting from the base; the heat dissipater in thermal contact with the core; and a coil wrapped around both the core and the heat dissipater.

Abstract: A driving apparatus includes a mover having a magnet, and a stator having a coil. The driving apparatus is adapted to control the electric current to be applied to the coil to cause relative movement between the mover and the stator. The stator includes a coil holding member configured to hold the coil, a supporting member configured to support the coil holding member movably in first and second directions, a restriction member configured to restrict movement of the coil holding member in the first direction and to allow movement of the coil holding member in the second direction, and a biasing unit configured to press the coil holding member against the restriction member.

Abstract: The moving parts of an electric motor are intended to be cooled more effectively and in a simple manner. For this purpose, the invention proposes an electric motor with a first motor part (1) and a second motor part, which interacts magnetically with the first motor part (1) and with respect to which the first motor part is capable of moving in two opposite movement directions (A, B). The electric motor is also equipped with a cooling system, which is fitted to the first motor part (1) and which has a cooling medium for cooling at least the first motor part. The cooling medium is moved, exclusively by means of acceleration of the first motor part (1), in one of the two opposite movement directions (A, B) in the cooling system. The movement can be triggered, for example, by the dead weight in an open cooling cycle system or else by means of a piston (23) in a closed cooling cycle system.

Abstract: A linear motor including permanent magnets fixed on an elongate yoke such that polarities of the permanent magnets alternately change, and an armature having cores and coils wound on the respective cores, wherein each row of the permanent magnets and the armature are moved relative to each other along a straight line by application of an electric current to the coils, each core extending in a first direction perpendicular to the permanent magnet row, the cores being arranged in a second direction perpendicular to the first direction and disposed on the cores such that the coils on the cores adjacent to each other are arranged in a zigzag pattern and spaced apart from each other in the first direction, with a gap left therebetween, wherein the armature includes a heat pipe having opposite end portions one of which is inserted in the gap and the other of which extends outwardly of the gap, and fins fixed to the other end portion of the heat pipe.

Abstract: A gimbal system. The gimbal system may include space-saving features configured to accommodate one or more payload components, thus increasing the payload capacity of the gimbal ball without necessarily increasing the outer dimensions of the gimbal ball. Alternatively, or in addition, the gimbal system may include a motor configured to move at least one gimbal relative to another gimbal about a first axis, with the motor peripherally mounted distal the axis.

Abstract: According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.

Abstract: A moving-magnet type linear motor is provided with cooling blocks which are attached to each of stator bases alongside a coreless coil and which allow coolant to flow therethrough for cooling the coreless coil. Each of the cooling blocks has in a base end portion thereof a fluid passage for flowing coolant and at an extreme end portion thereof a plurality of sheet-like protrusions like fins which are arranged alongside a part of the circumferential surface of the coreless coil with a clearance between each protrusion and the next thereto. Each cooling block is thermally closely jointed with the coreless coil at the extreme ends of the sheet-like protrusions.

Abstract: A mover stabilizing and stator cooling arrangement includes an upper sleeve surrounding the mover of the linear motor, a lower sleeve, a thermoconducting sleeve surrounding the stator and axially connected between the upper sleeve and the lower sleeve. The arrangement further includes a thermal grease filled in the space defined between the upper sleeve and the mover, the space defined between the thermoconducting sleeve and the stator, and the space defined between the lower sleeve and the outer tube for quick dissipation of waste heat. A stabilizer ring is set between the upper sleeve and the mover to stabilize axial movement of the mover. A piston and multiple one-way valve sets are mounted in the space between the lower sleeve and the outer tube for allowing adjustment of the volume in the thermoconducting sleeve responsive to expansion/contraction of the thermal grease due to temperature changes.

Abstract: A linear motor not requiring a yoke structure is provided. A first unit forming a stator is constructed of two permanent magnet rods. The permanent magnet rods each have a magnetically permeable shaft and a permanent magnet row having a plurality of permanent magnets so arranged that opposite polarities of their magnetic poles alternately appear. The permanent magnet row of the permanent magnet rod is arranged with a positional difference of 180° in an electrical angle from the permanent magnet row of the permanent magnet rod. The second unit that constitutes a moving member includes unit cores and winding sets arranged alternately in an axial direction of the shaft. The winding set includes two excitation windings through each of which the permanent magnet rod loosely extends. One excitation winding of the winding set is excited with a phase difference of 180° in an electrical angle from the other excitation winding.

Abstract: A cooling device of a linear motor to cool a primary side of the linear motor including an iron core and a coil accommodated in slots of the iron core, including an elongate cover covering coil end portions exposed from both side faces of the iron core in a longitudinal direction, an air channel serving as blower for forcing a current of cooling air inside the cover, and a partition plate dividing the inside of the cover into upper and lower spaces. It is configured in such a manner that the upper space divided by the partition plate is used as a ventilation portion through which a current of cooling air is forced and the lower space is used as a cooling portion in which the coil end portions are accommodated and cooled. A slit is formed almost along a full length of the partition plate on a side closer to the iron core for bringing the ventilation portion and the cooling portion into communication with each other, and a vent is provided in a lower portion of the cooling portion.

Abstract: A drive guide device capable of effectively releasing heat produced by a mover. The drive guide device has a movement unit 100 moved by a linear motor while being guided by a rail 230. The movement unit 100 has the mover 140 to which electricity is conducted to produce a magnetic field, a table 110 placed on the mover 140 on the opposite side of a base 210 to which the rail 230 is fixed, a heat sink 130 having heat radiation fins for releasing heat produced by the mover 140 and placed between the mover 140 and the table 110, and a heat transmission route for transmitting heat, which cannot be released by the heat sink 130, to the table 110. The table 110 is made from a material having a low thermal expansion coefficient.

Abstract: A linear motor comprising a coil assembly and a magnet assembly is provided with a cooling apparatus which comprises a segmented air knife assembly. The segmented air knife assembly has a plurality of slot openings distributed along its length which is coupled to the linear motor and it is operative to discharge cooling air into a gap between the coil assembly and magnet assembly in a discharge direction. An inclined surface extends from the plurality of slot openings and slopes at an obtuse angle away from the discharge direction of the cooling air. Each slot opening is individually configured to discharge the cooling air in the discharge direction at a sufficient velocity so as to entrain atmospheric air along the inclined surface to amplify the cooling air that is so discharged.

Abstract: In the canned linear motor armature, both the side surfaces of the armature winding (18) are fixed by two winding fixing frames (4) so as to sandwich the armature winding in between them in the longitudinal direction. A refrigerant passage (5) is provided in a space between the can (3) and the winding fixing frame (4). A seal material (24) is provided in a gap between a case (2) and the winding fixing frame (4) to prevent a refrigerant supplied to the refrigerant passage (5) from leaking to the armature winding (18) sandwiched in between the two winding fixing frames (4) to impregnate the armature winding (18) with the refrigerant. A waterproof film is adhered onto a surface of the winding fixing frame (4) where the refrigerant comes into contact.

Abstract: A canned linear motor armature includes an armature winding, a picture-frame-shaped casing, a flat can, and a plurality of refrigerant flow channels. The armature winding includes a coil. The picture-frame-shaped casing has an opening and encloses the armature winding. The flat can has a plate surface to close and seal the opening of the picture-frame-shaped casing. The plurality of refrigerant flow channels are provided within the can to face the coil of the armature winding.

Abstract: A linear motor comprising a coil assembly and a magnet assembly is provided with a cooling apparatus which comprises a segmented air knife assembly. The segmented air knife assembly has a plurality of slot openings distributed along its length which is coupled to the linear motor and it is operative to discharge cooling air into a gap between the coil assembly and magnet assembly in a discharge direction. An inclined surface extends from the plurality of slot openings and slopes at an obtuse angle away from the discharge direction of the cooling air. Each slot opening is individually configured to discharge the cooling air in the discharge direction at a sufficient velocity so as to entrain atmospheric air along the inclined surface to amplify the cooling air that is so discharged.

Abstract: A mover of a linear motor with an outer heat radiating housing comprises a body and an outer heat radiating housing. The body includes an iron core and coils. The outer heat radiating housing covers the body and is integrally jointed to the body. The outer heat radiating housing is defined with a plurality of passages. When the current is supplied to the coils of the body, the body will be driven, the heat energy produced by the body can be conducted to the outer heat radiating housing sufficiently. In addition, after the cooling liquid is conducted to the passages, the heat radiating effect of the mover can be improved.