Abstract: A mechanical system is provided for maintaining a desired gap between a stator electrode array and a rotor electrode array by employing repelling magnets on the inner surface of the rotor and on movable carts that support azimuthally segmented stator arrays.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.

Abstract: A microrobot is disclosed. The microrobot includes a magnet configured to provide a motive force when magnetic force of one or more electrical coils act upon the magnet, a support member coupled to the magnet, a thermo-responsive polymer member coupled to each end of the support member at a proximal end, the thermo-responsive polymer member configured to articulate when heated, wherein the thermo-responsive polymer members configured to receive light from a microrobot structured light system and convert the received light into heat.

Abstract: A resonant transformer connected between a ground terminal and elevated terminal draws current from the earth's electric field through a primary winding of the transformer. An impulse generator applies a high voltage impulse to the primary winding of the resonant transformer to cause current to flow from the ground terminal through the primary winding. The flow of current through the primary winding of the resonant transformer induces a current in the secondary winding, which may be converted and filtered to a usable form, e.g. 60 Hz AC or DC.

Abstract: A component of a winding device, in particular an automatic winding device, of a timepiece movement, wherein it is made of austenitic stainless steel and wherein it comprises at least one friction surface hardened by carbon or nitrogen type atoms introduced into the austenitic stainless steel over a predetermined depth.

Abstract: A micromechanical resonator includes a support beam having a fixed end, and a free end configured to vibrate. The micromechanical resonator includes a lumped mass disposed on the free end. A height of the lumped mass is greater than a width of the lumped mass.

Abstract: A sounding device, a manufacturing method thereof and a display device are provided. The sounding device includes at least two sounding units. Each of the sounding units includes: a transparent structural layer, including a recess and a supporting member located around the recess; and a piezoelectric vibrating film covering the recess, a cavity is formed by the piezoelectric vibrating film and the supporting member. The piezoelectric vibrating film includes a base film covering the recess; and at least one piezoelectric structure located on a side of the cavity away from the transparent structural layer. Each of the at least one piezoelectric structure includes: a first electrode; a piezoelectric material layer located on a side of the first electrode away from the cavity; and a second electrode located on a side of the piezoelectric material layer away from the first electrode.

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

Abstract: An electrostatic machine includes a drive electrode and a stator electrode. The drive electrode and the stator electrode are separated by a gap and form a capacitor. The drive electrode is configured to move with respect to the stator electrode. The electrostatic machine further includes a housing configured to enclose the drive electrode and the stator electrode. The stator electrode is fixed to the housing. The electrostatic machine also includes a dielectric fluid that fills a void defined by the housing, the drive electrode, and the stator electrode. The dielectric fluid includes an ester.

Abstract: A flexible and soft smart driving device comprises a flexible frame, a driving mechanism and a creeping structure. The driving mechanism uses an intrinsic strain of an intelligent soft material to generate a driving force. A creeping structure is used to implement autonomous activities of the flexible and soft smart driving device. The driving mechanism and the creeping structure are attached to the flexible frame. The driving mechanism generates the driving force by contraction and relaxation of a driving membrane. The flexible and soft smart driving device is made from flexible materials and has advantages of good creeping speed, flexible control, small noise and high human body compatibility.

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

Abstract: This disclosure describes a multiaxis gyroscope comprising a first proof mass quartet centered around a first quartet center point and a second proof mass quartet centered around a second quartet center point. In the primary oscillation mode all masses in each proof mass quartet move simultaneously either radially toward and away from the corresponding quartet center point, or in the same tangential direction in relation to the corresponding quartet center point.

Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

Abstract: A lever is used to rotate a microelectromechanical systems (MEMS) mirror. The lever can be used to provide more torque from a vertical comb drive. The MEMS mirror can be part of an array of micro mirrors used for beam steering a laser in a Light Detection and Ranging (LiDAR) system for an autonomous vehicle.

Abstract: Robust electro-static (ES) device embodiments, with application to energy storage flywheels as an example, are described that provide reliable, high-efficiency operation in the presence of thermal and mechanical perturbations, as well as seismic events. Electro-static generators and motors, when augmented with magnetic bearings, passive three-dimensional stabilization techniques and dynamic touch-down bearings, enable robust performance in the face of these environmental concerns, as well as efficient operation during typical operational sequences, including spin-up and steady-state modalities.

Abstract: A dielectric elastomer transducer includes a dielectric elastomer function element having a dielectric elastomer layer and a pair of electrode layers between which the dielectric elastomer function element is interposed, and further includes a supporting body that supports the dielectric elastomer function element. Each of the electrode layers has one or more application regions. The dielectric elastomer function element has one or more function portions on which the application regions of the electrode layers are overlapped. The function portion is spaced away from the supporting body. With such a configuration, it is possible to avoid damaging the electrode layer and acquire a sufficient amount of expansion.

Abstract: A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.

Abstract: Provided are a directional acoustic sensor that detects a direction of sound, a method of detecting a direction of sound, and an electronic device including the directional acoustic sensor. The directional acoustic sensor includes a sound inlet through which a sound is received, a sound outlet through which the sound received through the sound inlet is output, and a plurality of vibration bodies arranged between the sound inlet and the sound outlet, in which one or more of the plurality of vibration bodies selectively react to the sound received by the sound inlet according to a direction of the received sound.

Abstract: Examples are disclosed that relate to scanning display systems. One example provides a display device comprising a controller, a light source, and a scanning mirror system. The scanning mirror system comprises a scanning mirror configured to scan light from the light source in at least one direction at a resonant frequency of the scanning mirror, and an electromechanical actuator system coupled with the scanning mirror and being controllable by the controller to adjust the resonant frequency of the scanning mirror.

Abstract: In one embodiment, an apparatus includes a first stage and a second stage. The first stage may include a gated-light valve (GLV) that is operable to receive a light beam from a light source and direct the light beam along one dimension to discrete input locations of a second stage. The second stage may be operable to receive the light beam from the first stage at the discrete input locations along the one dimension and direct the light beam through two dimensions to discrete output locations of the second stage to scan a three-dimensional space.

Abstract: The disclosure provides a flexible, narrow medical device (such as a micro-catheter or a guidewire) that is controllably moved and steered through lumens of a body. The medical device may include an electrically-actuatable bendable portion at a distal end, which may be provided by a polymer electrolyte layer, electrodes distributed about the polymer electrolyte layer, and electrical conduits coupled to the electrodes, such that the polymer electrolyte layer deforms asymmetrically in response to an electrical signal through one or more conduits. The disclosure further includes a controller for moving the device into and out of bodily lumens and for applying the electrical signal for steering the device. The device further includes methods of preparing the polymer electrolyte layer in tubular shape.

Abstract: An energy conversion system comprises a generator which generates electrical power in response to movement, wherein the generator comprises first and second elements which generate energy in an energy generation mode. In some examples, these can be brought into and out of contact with each other by a drive mechanism so that the energy conversion system has an (e.g.) intermittent charging mode in which the first and second 5 elements are brought into contact by the drive mechanism and an energy generation mode in which the first and second elements are out of contact. The relative speed, the spacing between, or the relative orientations or positions of the first and second elements are controlled during the energy generation mode to decrease the variation in output power or voltage of the generator. This system controls the physical positions or the motion of the 10 elements of the generator during the energy generation mode in order to implement a more constant power or voltage generation.

Abstract: A repulsive-force electrostatic actuator includes a first actuator layer including a first substrate, a first electrode pattern, and a second electrode pattern. The actuator includes a second actuator layer spaced apart from the first actuator layer that includes a second substrate, a third electrode pattern, and a fourth electrode pattern. The actuator includes a voltage source connected to the first, second, third, and fourth electrode patterns such that the first electrode pattern is at an opposite voltage relative to the second, the third electrode pattern is at an opposite voltage relative to the fourth, and the first and second actuator layers are arranged to have a repulsive electrostatic force therebetween. The actuator further includes an actuator frame connected to the first and second actuator layers such that at least a portion of at least one of the first and second actuator layers is movable due to an applied voltage to effect motion to an object.

Abstract: A repulsive-attractive-force electrostatic actuator according to some embodiments of the invention includes a first actuator layer including a first substrate, a first electrode pattern, and a second electrode pattern. The actuator further includes a second actuator layer including a second substrate, a third electrode pattern, and a fourth electrode pattern. The actuator further includes a first voltage source connected to the first and second electrode patterns such that the first electrode pattern is at a relative voltage of V1 to the second electrode pattern, and a second voltage source connected to the third and fourth electrode patterns such that the third electrode pattern is at a relative voltage of V2 to the fourth electrode pattern. The applied relative voltages V1 and V2 are selectable to provide one of a selected repulsive force or a selected attractive force between the first and second actuator layers.

Abstract: An electrostatic rotating electrical machine employs axially extending electrically conductive electrodes on a rotor interacting with a corresponding set of axially extending electrodes on a stator, where the electrodes are supported at an outer surface of a dielectric sleeve which continues beneath the electrodes to provide a robust support and to minimize electrode weight.

Abstract: Optical circuit switches have gained increased prominence in data centers in recent years given their ability to rapidly forward optical data signals without first converting those signals back into the electrical domain. Certain optical circuit switches are implemented using one or more arrays of single-axis or dual-axis gimballed micro-electro-mechanical system (MEMS) (MEMS) mirrors, whose orientations can be adjusted to direct light from an input port of the switch to a desired output port of the switch. Systems and methods according to the present disclosure relate to a microelectromechanical system (MEMS) mirror assembly with crack protection features such as a plurality of nibbles.

Abstract: A triboluminescence isotope battery can include a housing defining a chamber, and one or more energy conversion devices. Each energy conversion device can include a holder, a cantilever beam, a triboluminescence component, a first photoelectric conversion component, a radioactive source, a first charge collecting component, a second charge collecting, a first thermoelectric conversion component, and a heat dissipation component.

Abstract: There are provided a plurality of first electrode plates in each of which an adhesive is applied on one surface in a first pattern, and a plurality of second electrode plates in each of which the adhesive is applied on one surface in a second pattern which is different from the first pattern, in which the plurality of first electrode plates and the plurality of second electrode plates are alternately stacked without causing the surfaces on which the adhesive is applied to face each other.

Abstract: An apparatus for driving and position sensing in a comb-drive actuator includes a generator, a driver circuit, sensing circuitry, and signal processing circuitry. The generator is configured to apply a sensing-voltage to a first electrode of the comb-drive actuator. The driver circuit is configured to apply a drive-voltage to a second electrode of the comb-drive actuator, having an opposite polarity relative to the first electrode. The sensing circuitry is configured to measure at the second electrode a sensed-waveform resulting from the sensing-voltage applied to the first electrode. The signal processing circuitry is configured to estimate a position of the first electrode relative to the second electrode based on the sensed-waveform.

Abstract: A harvesting and scavenging circuit includes an inverse electrowetting harvesting and scavenging circuit including a moveable mass with a moveable electrode that is moveable in three-dimensions relative to a second electrode having a first insulating layer covering a surface of the second electrode. A conductive fluid positioned between the first insulating layer and the moveable electrode. A magnetic energy harvesting and scavenging circuit includes at least one permanent magnetic segment on the movable mass and at least one energy harvesting and scavenging coil positioned proximate the moveable mass. Energy harvesting and scavenging circuitry is electrically coupled to the moveable electrode and the second electrode and is coupled to the at least one energy harvesting and scavenging coil. The energy harvesting and scavenging circuitry provides electrical energy generated through reverse electrowetting and magnetic energy stored in the at least one energy harvesting and scavenging coil.

Abstract: An electrostatic induction type power generation element is capable of increasing the amount of generated power while suppressing a parasitic capacitance between electrodes between which induced electromotive force is generated. An electrostatic induction type power generation element in one embodiment includes: substrates which are opposed to each other and which move relative to each other in a direction parallel to the opposing surfaces of the substrates; a charge retaining unit and conductors which are respectively formed on the opposing surfaces of the substrates; and a substance which is interposed between the substrates opposed to each other and between the charge retaining unit and the conductors, and which has an anisotropic dielectric constant in which a relative dielectric constant in the direction parallel to the opposing surfaces is higher than a relative dielectric constant in a direction orthogonal to the opposing surfaces.

Abstract: An adaptive bending structure or insert for a lapping device is disclosed. In illustrated embodiments the bending structure provides a wider control width between bending nodes for imparting bending to a workpiece for lapping or longer beam length to increase stroke input at outer ends of the bending structure. In illustrated embodiments, outer bending fingers of the bending structure have a wider width than inner bending fingers to provide the wider control width of the adaptive bending structure. The wider bending fingers of the bending structure connect to actuator fingers of an actuator module to adapt the actuator module to provide an increased control width for controlling bow and curvature of the workpiece during the lapping process.

Abstract: Embodiments of the invention include a microelectronic device having a sensing device and methods of forming the sensing device. In an embodiment, the sensing device includes a mass and a plurality of beams to suspend the mass. Each beam comprises first and second conductive layers and an insulating layer positioned between the first and second conductive layers to electrically isolate the first and second conductive layers. The first conductive layer is associated with drive signals and the second conductive layer is associated with sense signals of the sensing device.

Abstract: Provided is an electromechanical transducer including a lightweight and impact-resistant movable member. The electromechanical transducer using electrostatic interaction between charged portions and opposing electrodes to convert between electric power and motive power includes: a movable member having first electrodes and first grooves in a first surface thereof and having second grooves in a second surface opposite to the first surface; and a fixed substrate having second electrodes and facing the first surface of the movable member. One of the first electrodes and the second electrodes are charged portions carrying electrostatic charge while the other of the first electrodes and the second electrodes are opposing electrodes facing the charged portions. The first and second electrodes are each disposed at intervals in a moving direction of the movable member.

Abstract: An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.

Abstract: An article may include a first polymeric material layer having a surface. A first conductive trace may form at least a portion of the first layer surface. The article may further include a second polymeric material layer. The second layer may have a first surface, a portion of the second layer first surface being bonded to a portion of the first layer surface. The second layer may have a portion of a channel defined therein, the channel at least partially coinciding with a portion of the first conductive trace. The article may also include a first patch interposed between the first layer surface and the second layer first surface. The first patch may span the channel and cover a portion of the first conductive trace.

Abstract: A micromechanical resonator is provided that enables a smaller total package size with an acceptable quality factor for timing applications. The MEMS resonator includes a vibration portion with a base and three or more vibrating beams extending therefrom. Moreover, the MEMS resonator includes a frame that surrounds a periphery of the vibration portion and a pair of anchor between the vibrating beams for stabilizing the vibration portion within the frame. Furthermore, support beams couple the base of the vibration portion to the pair of anchors.

Abstract: A device structure comprises an acoustic wave transducer comprising a component. The component comprises a piezo-electric material. Component electrodes are disposed on the component and connection posts extend away from the component. Each of the connection posts is electrically connected to one of the component electrodes. The component has a center and a length greater than a width and, for at least one pair of the connection posts, a distance between the connection posts and the center is less than one quarter of the length.

Abstract: A structural component has a plurality of material layers, which are stacked and bonded together in a thickness direction, wherein at least one of the material layers is formed by a fibre composite material, and wherein an outermost material layer in relation to the thickness direction is formed at least in sections by a sensor device, having at least one sensor unit with an electroactive polymer arranged between electrically conductive electrodes. Moreover, a system and a method for the detection of damage and an aircraft are described.

Abstract: An electrostatic energy collector and an electrostatic energy collecting method. The electrostatic energy collector comprises: a vibrating table (101), the vibrating table being fixedly connected to a first end of a first cross beam (102) and a first end of a second cross beam (103), the first cross beam being parallel to the second cross beam, a vertical projection of the first cross beam being overlapped with that of the second cross beam, both of the first cross beam and the second cross beam being conductors, a first mass block (104) being fixedly arranged on the first cross beam, an electret layer (106) being coated at the side, close to the first cross beam, of the second cross beam, a second mass block (105) being fixed at the sided, facing away from the first cross beam, of the second cross beam, a first lead (107) being connected to the first cross beam and a first end of a load (109), and a second lead (108) being connected to the cross beam and a second end of the load.

Abstract: The present disclosure relates to an air-cavity module having a thinned semiconductor die and a mold compound. The thinned semiconductor die includes a back-end-of-line (BEOL) layer, an epitaxial layer over the BEOL layer, and a buried oxide (BOX) layer with discrete holes over the epitaxial layer. The epitaxial layer includes an air-cavity, a first device section, and a second device section. Herein, the air-cavity is in between the first device section and the second device section and directly in connection with each discrete hole in the BOX layer. The mold compound resides directly over at least a portion of the BOX layer, within which the discrete holes are located. The mold compound does not enter into the air-cavity through the discrete holes.

Abstract: An ultrasound system (1) is disclosed that comprises a probe (10) including an array (110) of CMUT (capacitive micromachined ultrasound transducer) cells (100), each cell comprising a substrate (112) carrying a first electrode (122) of an electrode arrangement, the substrate being spatially separated from a flexible membrane (114) including a second electrode (120) of said electrode arrangement by a gap (118); a voltage supply (45) coupled to said probe and adapted to provide a first set of said CMUT cells with a sequence of drive voltages each including a bias voltage component and a stimulus component of different frequency for generating a series of temporally distinct pulses each having a different frequency, wherein each pulse is generated in a separate transmit mode and provide a second set of said CMUT cells with a sequence of temporally distinct bias voltages, wherein each temporally distinct bias voltage is provided in a receive mode following one of said transmit modes and is for setting the second

Abstract: Matching layers configured for use with ultrasound transducers are disclosed herein. In one embodiment, a transducer stack can include a capacitive micromachined ultrasound transducer (CMUT), an acoustic lens, and a matching layer therebetween. The matching layer can be made from a compliant material (e.g. an elastomer and/or an liquid) and configured for use with CMUTs. The matching layer can include a bottom surface overlying a top surface of the transducer and a top surface underlying a bottom surface of the lens.

Abstract: A magnetic nanocomposite device is described herein for a wide range of sensing applications. The device utilizes the permanent magnetic behavior of the nanowires to allow operation without the application of an additional magnetic field to magnetize the nanowires, which simplifies miniaturization and integration into microsystems. In addition, the nanocomposite benefits from the high elasticity and easy patterning of the polymer-based material, leading to a corrosion-resistant, flexible material that can be used to realize extreme sensitivity. In combination with magnetic sensor elements patterned underneath the nanocomposite, the nanocomposite device realizes highly sensitive and power efficient flexible artificial cilia sensors for flow measurement or tactile sensing.

Abstract: A tubular friction nanogenerator and a cloth and an energy shoe including the same are provided. The tubular friction nanogenerator includes: a tubular friction layer, the friction layer being made of elastic material; an outer electrode layer covering an outer side of the tubular friction layer; an inner electrode layer having an outer surface, a portion or whole of which is attached to an inner surface of the friction layer, wherein in response to the tubular friction nanogenerator being restored after deformation, at least a portion of the inner electrode layer contacts and then is separated from an inner surface of the friction layer, so that a charge flow is generated between the inner electrode layer and the outer electrode layer.

Abstract: A MEMS device includes a substrate, at least one anchor disposed on the substrate, a movable stage, a sensing chip disposed on the movable stage, and at least one elastic member connected with the movable stage and the anchor. The movable stage includes at least one electrode and at least one conductive connecting layer. The sensing chip includes at least one electrical interconnection connected with the conductive connecting layer. The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer disposed between the first electrical channel and the second electrical channel. The first electrical channel is electrically connected with the electrical interconnection, and the second electrical channel is electrically connected with the electrode.

Abstract: Electrostatic generator electrodes mounted on the outer surface of a fiber-composite rotor. The conducting strips are mounted with a slight tilt in angle such that the electrodes will experience no tension or compression effects as the rotor spins up or slows down. The compression would come about from effects associated with the Poisson Ratio. This change can eliminate any metal fatigue or loss of bonding that might have arisen if the electrodes were to be aligned with the axis.

Abstract: Aspects disclosed in the detailed description include a touch capacitance transduced energy harvesting system. The energy harvesting system includes a touch sensing electrode array and energy harvesting circuitry coupled to the touch sensing electrode array. When a movable conductive object (e.g., a human finger) moves toward or away from the touch sensing electrode array, capacitance of the touch sensing electrode array increases and decreases accordingly, thus transducing a direct current (DC) current in the touch sensing electrode array. As such, the energy harvesting circuitry can be configured to harvest electric energy from the DC current to generate and store a DC voltage. By harvesting the electric energy transduced from the kinetic energy of the movable conductive object, it is possible to power a low-power electronic device (e.g., a biosensor) with motions already used for interfacing with the low-power electronic device.

Abstract: An electrostatic induction device is provided which includes at least one first element including a first electrode, a second electrode electrically connected to the first electrode, and a third electrode electrically connected to the first electrode and the second electrode, at least one second element including a charged area having been charged with positive or negative charges and moves while adjacent to the first element so as to cause an electrostatic induction action with the first element, and a third element which is electrically connected to the first element, and receives, from the first element, a first electric current generated between the first and the second electrode, a second electric current generated between the first and the third electrode, and a third electric current generated between the second and the third electrode, by the movement of the second element, and rectifies the received first, second and third electric currents.