Abstract: A geometric design of E-S generator motor electrodes mounted on the inner surface of a fiber-composite rotor is provided. The electrode configuration is able to sustain very high g levels. The rotor may be funned of carbon-fiber wound on top of an inner E car S-glass fiber composite core. The electrode design provides the needed area to satisfy the power requirements of the storage system and utilizes a stacked wedge-like electrode array that both solves the high-g problem and results in a doubling or tripling of the electrode area, relative to that of electrodes that conform to the inner cylindrical surface of the rotor.

Abstract: A nano-generator includes a counterpart layer, and an electricity producing unit producing frictional electricity according to frictional contact with the counterpart layer, wherein the electricity producing unit includes a contact layer provided on one surface of the electricity producing unit and coming into contact with the counterpart layer, a support layer provided on the other surface of the electricity producing unit, and a plurality of first electrode layers stacked between the contact layer and the support layer and disposed to be spaced apart from each other. Since the contact electrification nano-generator harvests energy (current), regardless of direction (mode) of a mechanical movement, an energy output of the contact electrification nano-generator may be increased.

Abstract: The present disclosure provides a semiconductor device including a fixed electrode, a movable electrode and an elastic support. The movable electrode faces the fixed electrode and is movable relative to the fixed electrode. The elastic support supports the movable electrode to be movable in an elastic direction of the elastic support. Either one of the fixed electrode or the movable electrode is an electret electrode.

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a cut inside a replacement metal gate trench to mitigate n-p proximity effects and methods of manufacture. The structure described herein includes: a first device; a second device, adjacent to the first device; a dielectric material, of the first device and the second device, including a cut within a trench between the first device and the second device; and a common gate electrode shared with the first device and the second device, the common gate electrode provided over the dielectric material and contacting underlying material within the cut.

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit linear anti-phase motion. Some of the described couplers are flexural and provide two degrees of freedom of motion of the coupled masses. Some such couplers are positioned between the coupled masses. Using multiple couplers which are arranged to move in linearly opposite directions during linear anti-phase motion of the coupled masses provides momentum-balanced operation.

Abstract: A triboelectric generator and method are provided. The triboelectric generator includes a first electrode having an inner surface and an outer surface and a second electrode having an inner surface and an outer surface. A dielectric layer has a first surface and a second surface in engagement with the inner surface of the second electrode. The dielectric layer impregnated with biorenewable fillers. Periodic engagement of the first surface of the dielectric layer with the inner surface of the first electrode generates an electrical output across the first and second electrodes.

Abstract: A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.

Abstract: A nanofluid contact potential difference cell comprises a cathode with a lower work function and an anode with a higher work function separated by a nanometer-scale spaced inter-electrode gap containing a nanofluid with intermediate work function nanoparticle clusters. The cathode comprises a refractory layer and a thin film of electrosprayed dipole nanoparticle clusters partially covering a surface of the refractory layer. A thermal power source, placed in good thermal contact with the cathode, drives an electrical current through an electrical circuit connecting the cathode and anode with an external electrical load in between. A switch is configured to intermittently connect the anode and the cathode to maintain non-equilibrium between a first current from the cathode to the anode and a second current from the anode to the cathode.

Abstract: A microphone system includes first diaphragm element, second diaphragm element spaced apart from the first diaphragm element and connected to the first diaphragm element via a spacer. Disposed between the diaphragm elements is a plate capacitor element.

Abstract: A MEMS sensor including a housing defining an interior and an inlet in fluid communication with an environment for sensing, a sensing die coupled to the housing for generating a signal based on the environment, an encapsulant is applied to the sensing die to protect the sensing die without interfering with the operation of the sensing die, characterized in that the encapsulant is a composition of a non-crosslinked substance having an organic backbone, and a silica thickener.

Abstract: A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

Abstract: An articulating device element and methods of operation thereof, including a compensating force enhancement for compensating for any unwanted friction and/or other such resistance forces experienced by the device when being manipulated.

Abstract: Production of a triboelectric generator element based on a given dielectric polymer material, provided with a rough surface comprising conical micro-tip shaped structures obtained by means of a heat treatment of the polymer material (FIG. 1C).

Abstract: An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.

Abstract: This invention relates to a microelectromechanical device for mechanical characterization of a specimen. In one embodiment the device may incorporate a substrate, at least one first flexure bearing and at least one second flexure bearing, both being supported on the substrate. First and second movable shuttles may be used which are supported above the substrate by the flexure bearings so that each is free to move linearly relative to the substrate. Ends of the movable shuttles are separated by a gap. A thermal actuator may be connected to one end of the first movable shuttle, and operates to cause the first movable shuttle to move in a direction parallel to the surface of the substrate in response to a signal applied to the thermal actuator. A first capacitive sensor may be formed between the first movable shuttle and the substrate, and a second capacitive sensor formed between the second movable shuttle and the substrate.

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a cut inside a replacement metal gate trench to mitigate n-p proximity effects and methods of manufacture. The structure described herein includes: a first device; a second device, adjacent to the first device; a dielectric material, of the first device and the second device, including a cut within a trench between the first device and the second device; and a common gate electrode shared with the first device and the second device, the common gate electrode provided over the dielectric material and contacting underlying material within the cut.

Abstract: The present disclosure relates to an apparatus having a substrate arrangement with a first circuit arrangement that heats up during operation and a second circuit arrangement that is integrated into a substrate material of the substrate arrangement. Further, the apparatus has a cavity structure that is arranged between the first and the second circuit arrangement, said cavity structure being formed in the substrate material and having a pressure that is lower than an ambient atmospheric pressure. The present disclosure further relates to a method for producing such an apparatus (10).

Abstract: A triboelectric generator includes a first triboelectric member, which includes a first conductive layer and an insulating triboelectric material layer disposed on the first conductive layer. The triboelectric material layer includes a first material having a first position on a triboelectric series. An elastic member, disposed against the triboelectric material layer of the triboelectric member and includes a second conductive material, has an elasticity that results in the elastic member being deformed when compressed and returning to an original non-deformed shape after being compressed. The second conductive material has a second position on the triboelectric series. A first load is coupled to the first conductive layer and with the second conductive material so that when a force compresses the elastic member charges will flow between the first conductive layer and the second conductive layer through the load.

Abstract: To realize a resonator element capable of obtaining sufficient electric field efficiency and securing a satisfactory element characteristic, a resonator element of the invention includes a base section and a pair of resonating arms extending from the base section. The resonator element includes recesses having a curved surface shape respectively on two side surfaces (surfaces crossing a direction in which the resonating arms resonate) of the resonating arm.

Abstract: The present invention relates to a phacoemulsification handpiece, comprising a needle and a microelectromechanical system (MEMS) device, wherein the needle is coupled with the MEMS device. The phacoemulsification handpiece may further comprise a horn, wherein the horn is coupled with the needle and the MEMS device. The MEMS device is capable of generating movement of the needle in at least one direction, wherein at least one direction is selected from the group consisting of transversal, torsional, and longitudinal. The present invention also relates to a method of generating movement, comprising providing a phacoemulsification handpiece, wherein the handpiece comprises a needle and one or more MEMS devices; applying a voltage or current to the one or more MEMS devices, wherein the MEMS devices are coupled with the needle; and moving the needle in at least one direction. The present invention also relates to a vitrectomy cutter comprising one or more MEMS devices.

Abstract: A mechanical system is provided for maintaining a desired gap between a stator electrode array and a rotor electrode array by employing repelling magnets on the inner surface of the rotor and on movable carts that support azimuthally segmented stator arrays.

Abstract: An electrostatic capacitance type transducer includes one or more elements 2. The one or more elements each include a plurality of cell groups 14 each including a cell 1 including a first electrode 4 and a second electrode 5 arranged with a gap therebetween, the second electrode being electrically connected to a shared signal extraction electrode 15. In the cell group, each of the cells has an equal wiring length from the shared signal extraction electrode 15. The electrostatic capacitance of the plurality of cell groups, the wiring resistance between two adjacent cell groups, the number of cell groups in the element, and the central frequency of the element satisfy a predetermined relationship to increase transmission efficiency or reception sensitivity.

Abstract: A board arrangement structure includes a housing, a first board fastened to the housing, a second board arranged in parallel enabling, relative movement with respect to the first board, an electrically charged film, a counter electrode, and an output part outputting electric power generated between the electrically charged film and the counter electrode, at least one of the electrically charged film and the counter electrode being arranged at a first facing surface of the first board and the other being arranged at a second facing surface of the second board facing the first facing surface, and the first facing surface of the first board being, fastened to a reference mounting surface provided at the housing.

Abstract: The invention relates to a modulation device created on a substrate (1), comprising at least one nanodiode in the form of a T fitted into a U, the channel (31) of said nanodiode being the leg of the T that is inserted into the U. The device is characterized in that it comprises at least one electrically conductive line (37) that passes over at least part of said channel (31).

Abstract: A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.

Abstract: Electrostatic generator electrodes mounted on the outer surface of a fiber-composite rotor. The conducting strips are mounted with a slight tilt in angle such that the electrodes will experience no tension or compression effects as the rotor spins up or slows down. The compression would come about from effects associated with the Poisson Ratio. This change can eliminate any metal fatigue or loss of bonding that might have arisen if the electrodes were to be aligned with the axis.

Abstract: A geometric design of E-S generator/motor electrodes mounted on the inner surface of a fiber-composite rotor is provided. The electrode configuration is able to sustain very high g levels. The rotor may be formed of carbon-fiber wound on top of an inner E or S-glass fiber composite core. The electrode design provides the needed area to satisfy the power requirements of the storage system and utilizes a stacked wedge-like electrode array that both solves the high-g problem and results in a doubling or tripling of the electrode area, relative to that of electrodes that conform to the inner cylindrical surface of the rotor.

Abstract: [Object] To provide an electrostatic device capable of improving device characteristics. [Solving Means] An electrostatic device according to an embodiment of the present technology includes an electrically conductive base material, a first conductor layer, a second conductor layer, and a bonding layer. The first conductor layer includes a first electrode portion and a first base portion and is connected to a signal line. The first base portion supports the first electrode portion and is disposed on the base material. The second conductor layer includes a second electrode portion and a second base portion and is connected to a reference potential. The second electrode portion is opposed to the first electrode portion in a first axis direction and configured to be movable relative to the first electrode portion in the first axis direction. The second base portion supports the second electrode portion and is disposed on the base material.

Abstract: Embodiments of the present invention disclose a triboelectrification device and a display device. The triboelectrification device includes at least one layered electricity generating assembly that is stacked, the at least one layered electricity generating assembly each comprising an electrode layer, an insulating layer, a metal layer and an elastomer; the electrode layer, the insulating layer, and the metal layer are arranged in sequence from above downwards, the elastomer is disposed between the electrode layer and the metal layer and is located at at least one side of the insulating layer.

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

Abstract: An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode.

Abstract: An electrostatic rotating electrical machine employs axially extending electrically conductive pegs (for example, on a stator) interacting with the least one of a comparable set of overlapping axially extending pegs on a rotor or a dielectric sleeve which experiences an induced electrostatic charge electrostatically attracted to the stator pegs. A dielectric sleeve may also encase either one or both of the rotor pegs and stator pegs to provide improved electrostatic field shaping and reduced dielectric fluid usage and mechanical susceptibility.

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

Abstract: A user interface device having a user input component, a mechanical metamaterial region, one or more actuators, and a control unit is presented. The mechanical metamaterial region is located over the user input component. The one or more actuators are coupled to the mechanical metamaterial region, which has an internal structure that is mechanically alterable with the one or more actuators, and has a mechanical property that changes in response to the alteration of the internal structure by the one or more actuators. The control unit is in communication with the one or more actuators, and is configured to determine whether the user input component is to be hidden from tactile perception, and to activate the one or more actuators to mechanically alter the internal structure of the mechanical metamaterial region.

Abstract: In an optical scanning device including a vibration mirror part, elastically deformable resin portions are respectively provided at both end portions in a main scanning direction on a surface of the vibration mirror part, which is an opposite surface of a reflective surface, a collision member, which has a collision surface and can collide with each of the resin portion, is provided at a side opposite to a side of the reflective surface of the vibration mirror part, and a control unit allows the vibration mirror part to swing such that each of the resin portion collides with the collision surface at least once before light beam for image data writing is deflected and scanned by the vibration mirror part, and then allows the vibration mirror part to swing in a range in which each of the resin portion does not collide with the collision surface.

Abstract: An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.

Abstract: A buckling loop rotary motor is disclosed that has a stator, an activatable buckling loop and a rotor. The buckling loop is made of a springy, base band and an activatable active band. An applied force actuates a portion of loop, causing a localized change of curvature. When propagated along the buckling loop, the changed curvature causes rotation of the rotor. In a bi-metallic embodiment, the thermally actuated active band expands by at least 1% more than the base band, effect a localized change of curvature that drives the rotor. Thermal activation is by heating or cooling, or a combination thereof. In an electroactive polymer (EAP), the active acrylic or silicone EAP is actuated by an electrostatic charge. The change in thickness, and therefore, length, of the active EAP relative to the inactive, base material causes a local change of curvature of the loop that drives rotation of the rotor.

Abstract: A transfer robot includes a supporting part, a moving part, a magnet unit, and a coil. The moving part is supported by the supporting part and movable along a predetermined travel path. The moving part is provided with a hand for carrying a workpiece. The magnet unit is disposed at the supporting part and extends longitudinally along the travel path. The magnetic unit generates magnetic flux that is at least partially perpendicular to the travel path. The coil is disposed at the moving part and intersects the magnetic flux. The magnetic flux varies or is different at positions along the travel path.

Abstract: A method is provided for detecting a perturbation with respect to an initial state, of a device including at least one resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the said perturbation modifies the resonance frequency of the said resonant mechanical element. A device is provided for detecting a perturbation by hysteretic cycle having at least one electromechanical resonator with nonlinear behavior and means for actuation and detection of the reception signal via a transducer so as to analyze the response signal implementing the method. A mass sensor and a mass spectrometer using the device are also provided.

Abstract: A flexible and soft smart driving device comprises a flexible frame, a driving mechanism and a creeping structure. The driving mechanism uses an intrinsic strain of an intelligent soft material to generate a driving force. A creeping structure is used to implement autonomous activities of the flexible and soft smart driving device. The driving mechanism and the creeping structure are attached to the flexible frame. The driving mechanism generates the driving force by contraction and relaxation of a driving membrane. The flexible and soft smart driving device is made from flexible materials and has advantages of good creeping speed, flexible control, small noise and high human body compatibility.

Abstract: A new rotor start-up system is provided for application to rotating systems such as stationary or vehicular electromechanical battery systems. An embodiment of the system consists of a “locator” that includes a stationary permanent-magnet pole above which is a circular ferromagnetic (e.g., iron) strip embedded in the lower, inner edge of the flywheel rotor. The lower edge of this strip is wave-like so that the magnet can pull the rotor around to a position where the position relative to the minimum capacity between the rotor and stator electrodes is such as to launch the rotor in a chosen direction, i.e., either clock-wise or counter-clockwise. Startup from rest is then accomplished by applying a short high-voltage ac or dc pulse to the EMB capacitor.

Abstract: A capacitive micromachined ultrasonic transducer and a method of fabricating the same are provided. The capacitive micromachined ultrasonic transducer includes a device substrate including a first trench defining a plurality of first portions corresponding to an element and a second trench spaced apart from the first trench; a supporting unit provided on the device substrate, the supporting unit defining a plurality of cavities; a membrane provided on the supporting unit to cover the plurality of cavities; a top electrode electrically connected to a second portion in the second trench through a via hole penetrating through the membrane and the supporting unit; and a through silicon via (TSV) substrate provided on a bottom surface of the device substrate, the TSV substrate including a first via metal connected to the plurality of first portions corresponding to the element and a second via metal connected to the second portion.

Abstract: An MEMS double-layer suspension microstructure manufacturing method, comprising: providing a substrate; forming a first dielectric layer on the substrate; patterning the first dielectric layer to prepare a first film body and a cantilever beam connected to the first film body; forming a sacrificial layer on the first dielectric layer; patterning the sacrificial layer located on the first film body to make a recess portioned portion for forming a support structure, with the first film body being exposed at the bottom of the recess portioned portion; forming a second dielectric layer on the sacrificial layer; patterning the second dielectric layer to make the second film body and the support structure, with the support structure being connected to the first film body and the second film body; and removing part of the substrate under the first film body and removing the sacrificial layer to obtain the MEMS double-layer suspension microstructure.

Abstract: A DC power bus having reduced parasitic inductance and higher tolerable operating temperature is disclosed. In example embodiments, a bus structure overlies a printed circuit board, and an array of capacitors is arranged on a surface of the printed circuit board distal the bus structure. The bus structure comprises an upper metal plate, a lower metal plate, and a dielectric film interposed between the upper and lower metal plates. The capacitors are connected in parallel between conductive planes of the printed circuit board. The upper and lower metal plates of the bus structure are connected to respective conductive planes of the printed circuit board.

Abstract: A MEMS self-aligned high-and-low comb tooth and manufacturing method thereof, the comb tooth having a lifting structure, the lifting structure generating a displacement in the vertical direction to drive the movement of a movable comb tooth or a fixed comb tooth attached thereto. The manufacturing method thereof adopts a silicon wafer, the lifting structure and the comb tooth are sequentially formed on a mechanical structure layer, the fixed comb tooth and the movable comb tooth are formed with the same etching process, and the stress in the lifting structure displaces the fixed comb tooth and the movable comb tooth in the vertical direction, thus forming the self-aligned high-and-low comb tooth.

Abstract: A highly sensitive MEMS capacitive force sensor offering a wide force measurement range is disclosed. The force sensor utilizes a piston-tube electrode configuration that enables the use of a wide area of the electrodes. Therefore, a high sensitivity for force detection is achieved. The force sensor consists of a lower structure, an upper structure, and a force contact platform. The lower structure contains a plurality of fixed electrodes that are attached to the base and have a plurality of teeth (pistons). Those teeth form the fixed sensing electrodes of the force sensor. The upper structure comprises of a moving section that has a plurality of apertures. The moving section is attached to the substrate via restoring mechanical springs. A force contact platform is attached to the moving electrode and provides the foundation for the force to be applied. The force sensor is able to measure concentrated and distributed force (mechanical pressure).

Abstract: The present invention relates to a flexible energy conversion device using a liquid, and more specifically, to a method and a device for converting mechanical energy into electric energy by applying an opposite phenomenon of electrowetting, which can change a surface contacting the liquid between one pair of electrodes, and use the change of the surface contacting the liquid to generate electric energy, so as to prevent channel blocking or so that a lubricating layer or electrodes patterned onto a channel in a complicated manner are not required, thereby enabling simplification of the device, reduction of manufacturing cost, and the energy conversion device that is less faulty.

Abstract: A low Z linear vibrator is described well suited for use in small form factor portable devices such as a smartphone. The low Z vibrator can be configured to include a beam structure that can be attached to a vibratory mass and a low profile actuator. The low profile actuator can cause the vibratory mass to oscillate in a well-defined and predictable manner.

Abstract: Sensor packages and manners of formation are described. In an embodiment, a sensor package includes a supporting die characterized by a recess area and a support anchor protruding above the recess area. A sensor die is bonded to the support anchor such that an air gap exists between the sensor die and the recess area. The sensor die includes a sensor positioned directly above the air gap.

Abstract: This invention is related with electrical energy conversion device, which uses built-in potential of metal-to-metal junctions from repeating movements with random frequencies, speeds and amplitudes at the medium of the device. The device using the method does not rely on a resonant frequency, besides, it can convert the kinetic energy to electrical energy even at low frequencies. Furthermore, its application to the real life situations is economic and beneficial because of the efficient working principle and simple structure. Unique design of the device enables direct wiring of the outputs of identical or similar devices together for the purpose of power scaling without the need of using another device, which may cause energy losses and increase the total cost. This device also does not require a dummy voltage source or a precharge at the beginning of energy harvesting.