Adding Or Subtracting Mass Patents (Class 310/312)
  • Patent number: 10608611
    Abstract: A Bulk Acoustic Wave (BAW) resonator with an electrically isolated Border (BO) ring is provided. One BAW resonator includes a bottom electrode and a piezoelectric layer over the bottom electrode and having a top surface with a first portion and second portion about the first portion. The BAW resonator also includes a top electrode over the first portion of the piezoelectric layer and a BO ring including a non-conductive portion that is over the second portion of the piezoelectric layer and adjacent to the piezoelectric layer. The BAW resonator may be a Solidly Mounted BAW (SMR-BAW) resonator or a Film BAW Resonator (FBAR). A radio frequency filter including a ladder configuration with the above BAW resonator as a series BAW resonator and methods for fabricating the above BAW resonator are also provided.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: March 31, 2020
    Assignee: Qorvo US, Inc.
    Inventors: Alireza Tajic, Paul Stokes
  • Patent number: 10602254
    Abstract: The specification and drawings present packaging for integrating a microphone into an outdoor luminaire that provides high sensitivity and dynamic range together with being waterproof, resistant to impact and wind noise, environmentally resistant and unobtrusive to passers-by. Various embodiments describe packaging of outdoor luminaire mounted microphones to achieve waterproof and minimized unwanted noise performance, and other desirable features.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: March 24, 2020
    Assignee: CURRENT LIGHTING SOLUTIONS, LLC
    Inventors: Koushik Babi Saha, Thomas Clynne, Jonathan Robert Meyer, Rick Dean Dureiko
  • Patent number: 10523173
    Abstract: A method for manufacturing a quartz crystal resonator that includes a quartz crystal blank having a vibrating portion including a center of a principal surface of the quartz crystal blank when viewed in plan from a direction normal to the principal surface and a peripheral portion adjacent to the vibrating portion, a pair of excitation electrodes disposed opposite to each other with the vibrating portion interposed therebetween, a pair of electrode pads disposed on the peripheral portion, and a pair of extended electrodes each extending from the vibrating portion to the peripheral portion to electrically connect one excitation electrode to a corresponding electrode pad, where the method includes conducting a first trimming of the vibrating portion and the peripheral portion; and conducting a second trimming of part of one of the excitation electrodes on the vibrating portion.
    Type: Grant
    Filed: August 10, 2017
    Date of Patent: December 31, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Koki Sai
  • Patent number: 10511280
    Abstract: The present disclosure provides a resonator which resonates in a bulk acoustic wave mode. The resonator includes a resonator body, at least one transducer arm and a substrate. The resonator body is deformed at least along a first direction. The transducer arm is connected to the resonator body along the first direction and includes a base, a piezoelectric layer and an electrode layer. The base includes a first end connected to the resonator body. The piezoelectric layer is disposed above the base but not extended to the resonator body, and the electrode layer is disposed above the piezoelectric layer but not extended to the resonator body. The substrate is for securing the transducer arm such that the resonator body is suspended.
    Type: Grant
    Filed: May 24, 2018
    Date of Patent: December 17, 2019
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Sheng-Shian Li, Gayathri Pillai
  • Patent number: 10502606
    Abstract: A robust low-cost wireless sensor with an internal battery, which permits operation for extended periods without the necessity of maintenance, for monitoring the flow of particulate solid material such as chemical fertilizers, small seeds, granulated foodstuffs, and others.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: December 10, 2019
    Assignee: José Roberto do Amaral Assy
    Inventor: José Roberto do Amaral Assy
  • Patent number: 10491191
    Abstract: A method of fabricating an acoustic wave device includes: forming a piezoelectric thin film resonator and a second lower electrode on a substrate, the piezoelectric thin film resonator having a resonance region in which a first lower electrode and a first upper electrode face each other across a piezoelectric film, the piezoelectric film and the first upper electrode are not formed on the second lower electrode outside the resonance region; forming a first dielectric film in the resonance region and a second dielectric film on the second lower electrode outside the resonance region at a same time, the first dielectric film and the second dielectric film being made of a material different from a material of the piezoelectric film; and forming a second upper electrode on the second dielectric film, the second upper electrode facing the second lower electrode.
    Type: Grant
    Filed: July 13, 2017
    Date of Patent: November 26, 2019
    Assignee: TAIYO YUDEN CO., LTD.
    Inventors: Hideyuki Sekine, Osamu Kawachi
  • Patent number: 10480613
    Abstract: An isolator device comprises a first mount coupleable to an input structure subject to shock and/or vibration energy, a second mount coupleable to an object to be isolated (e.g., an electronics device). A flexure structure is coupled between the first and second mounts, and comprises a plurality of parallel flexures, a series of flexures, and a plurality of transition portions, all defining an isolation path between the first and second mounts. The parallel flexures are tuned to resonant frequency to attenuate shock and/or vibration in an axial direction relative to a normal axis. The series of radial flexures are tuned to resonant frequencies to attenuate shock and/or vibration energy in both radial directions relative to the normal axis. The isolator device can be a single piece of metallic material. An elastomeric damping material can be disposed within openings defined by the flexure structure to dampen response at the isolator's resonant frequency. Associated systems and methods are provided.
    Type: Grant
    Filed: April 11, 2018
    Date of Patent: November 19, 2019
    Assignee: Raytheon Company
    Inventors: Peter H. Vo, Colleen Williams, Brandon Craig Barclay
  • Patent number: 10336608
    Abstract: Electronic devices and methods for fabricating electronic devices are provided. In one example, an electronic device includes an electronic device body structure having a substantially hermetically sealed cavity formed therein. A getter film is in fluid communication with the substantially hermetically sealed cavity. Conductive features are accessible from outside the substantially hermetically sealed cavity and are operatively coupled to the getter film for electrical communication with the getter film.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: July 2, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Szu Huat Goh, Edy Susanto, Jeffrey Lam
  • Patent number: 10330475
    Abstract: An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: June 25, 2019
    Assignee: NXP USA, Inc.
    Inventors: Thierry Cassagnes, Gerhard Trauth, Margaret Leslie Kniffin, Aaron A. Geisberger
  • Patent number: 10327736
    Abstract: An ultrasound transducer array for coupling sonic energy into a liquid includes a plurality of transducer pairs, where each transducer pair includes an inverted ultrasound transducer and a non-inverted ultrasound transducer electrically coupled in series. A method for coupling sonic energy into a liquid includes (a) driving a first transducer pair with a first electrical signal, where the first transducer pair includes a first inverted ultrasound transducer and a first non-inverted ultrasound transducer electrically coupled in series and (b) driving a second transducer pair with the first electrical signal, where the second transducer pair is electrically coupled in parallel with the first transducer pair, and where the second transducer pair includes a second inverted ultrasound transducer and a second non-inverted ultrasound transducer electrically coupled in series.
    Type: Grant
    Filed: April 17, 2018
    Date of Patent: June 25, 2019
    Inventor: William L. Puskas
  • Patent number: 10298202
    Abstract: The invention relates to a BAW resonator with reduced heat build-up. The heat build-up is reduced by a thermal bridge, which dissipates heat from the electro-acoustically active region to a support substrate, without impairing the acoustics of the resonator.
    Type: Grant
    Filed: November 10, 2015
    Date of Patent: May 21, 2019
    Assignee: SnapTrack, Inc.
    Inventors: Andreas Tag, Bernhard Bader, Maximilian Pitschi
  • Patent number: 10284173
    Abstract: An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity defines a main membrane region. The acoustic resonator device further includes at least one metal frame disposed on a bottom surface of the bottom electrode having a thickness that ranges from about 10% to about 75% of a thickness of the bottom electrode in a central region of the bottom electrode. The thickness of the metal frame improves heat dissipation out of the acoustic resonator device while also improving structural stability of the acoustic resonator device without detrimentally affecting its performance.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: May 7, 2019
    Assignee: Avago Technologies International Sales Pte. Limited
    Inventors: Dariusz Burak, Phil Nikkel, David Martin, John Choy
  • Patent number: 10233076
    Abstract: Systems and techniques are provided for transducer array subdicing. A laminate material may include two laminate material flexures which each have a flexure boundary defined by a gap in the piece of laminate material. A trench may be located between the two flexures. The trench may be defined by a removal of a portion of laminate material from the piece of laminate material. A second trench may be on an opposite surface of the piece of laminate material from the trench. The second trench may be partially aligned with the trench. The trench and the second trench may result from the removal of laminate material from the piece of laminate material to a depth of 20% to 60% of the thickness of the piece of laminate material.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: March 19, 2019
    Assignee: uBeam Inc.
    Inventor: Andrew Joyce
  • Patent number: 10199556
    Abstract: A quartz crystal resonator unit has an overall length less than 2.1 mm and a base portion having a length less than 0.5 mm and a width less than 0.55 mm, vibrational arms, and mounting arms connected to the base portion through connecting portions. Each vibrational arm has a first vibrational portion including a first width and a first length within a range of 0.32 mm to 0.72 mm and a second vibrational portion including a second width greater than the first width and a second length less than the first length. A groove is formed in at least one main surface of the first vibrational portions of the vibrational arms, a width of the groove being less than 0.07 mm and a distance in the width direction of the groove being less than 0.015 mm. A width of the mounting arms is less than 0.45 mm and a width of the connecting portion is less than 0.41 mm.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: February 5, 2019
    Assignee: PIEDEK TECHNICAL LABORATORY
    Inventor: Hirofumi Kawashima
  • Patent number: 10193523
    Abstract: The present invention relates to a filter chip (1), comprising an interconnection of at least one first and one second resonator (2, 3) operating with bulk acoustic waves, wherein the first resonator (2) operating with bulk acoustic waves comprises a first piezoelectric layer (4) that is structured in such a way that the first resonator (2) has a lower resonant frequency than the second resonator (3).
    Type: Grant
    Filed: August 17, 2015
    Date of Patent: January 29, 2019
    Assignee: SnapTrack, Inc.
    Inventors: Philipp Michael Jäger, Werner Ruile
  • Patent number: 10158340
    Abstract: A piezoelectrically transduced resonator device includes a wafer having a substrate, a buried oxide layer formed on the substrate, and a device layer formed on the buried oxide layer, and a resonator suspended within an air gap of the wafer above the substrate, the resonator including a portion of the device layer, a piezoelectric layer, and top and bottom electrodes contacting top and bottom sides of the piezoelectric layer, wherein the portion of the device layer is not directly connected to the wafer and wherein the resonator is configured to move relative to the substrate under electrostatic force to tune the frequency of the resonator device when a direct current voltage is applied between the substrate and the portion of the device layer of the resonator.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: December 18, 2018
    Assignee: University of South Florida
    Inventors: I-Tsang Wu, Julio Mario Dewdney, Jing Wang
  • Patent number: 10122345
    Abstract: An electrical circuit assembly can include a semiconductor integrated circuit, such as fabricated including CMOS devices. A first lateral-mode resonator can be fabricated upon a surface of the semiconductor integrated circuit, such as including a deposited acoustic energy storage layer including a semiconductor material, a deposited piezoelectric layer acoustically coupled to the deposited acoustic energy storage layer, and a first conductive region electrically coupled to the deposited piezoelectric layer and electrically coupled to the semiconductor integrated circuit. The semiconductor integrated circuit can include one or more transistor structures, such as fabricated prior to fabrication of the lateral-mode resonator. Fabrication of the lateral-mode resonator can include low-temperature processing specified to avoid disrupting operational characteristics of the transistor structures.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: November 6, 2018
    Assignee: The Trustees of Columbia University in the City of New York
    Inventors: Hassan Edrees, Ioannis Kymissis, Peter Kinget
  • Patent number: 10097152
    Abstract: A MEMS component includes a lower electrode. The MEMS component also includes an upper electrode. The upper electrode overlies the lower electrode. The MEMS component also includes a first piezoelectric layer between the lower electrode and the upper electrode. The first piezoelectric layer has a first piezoelectric material comprising AlN and Sc.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: October 9, 2018
    Assignee: SnapTrack, Inc.
    Inventors: Gilles Moulard, Paul Muralt, Ramin Matloub
  • Patent number: 10076035
    Abstract: A component includes a carrier and a functional structure on the carrier. A thin-film cover covers the functional structure and is used as a mounting base for a circuit part, which is arranged over the thin-film cover. The circuit part is connected to the functional structure by means of a lead.
    Type: Grant
    Filed: January 29, 2014
    Date of Patent: September 11, 2018
    Assignee: SnapTrack, Inc.
    Inventors: Gudrun Henn, Marcel Giesen
  • Patent number: 10069478
    Abstract: An acoustic wave filter includes: one or more series resonators connected in series between an input terminal and an output terminal; and parallel resonators connected in parallel between the input terminal and the output terminal and formed of piezoelectric thin film resonators, wherein each of at least two resonators of the parallel resonators includes an additional film having island-shaped patterns or aperture patterns formed at equal pitch intervals in a resonance region in which a lower electrode and an upper electrode face each other across a piezoelectric film, and a pitch interval of the island-shaped patterns or the aperture patterns in the additional film included in one of the at least two resonators differs from a pitch interval of the island-shaped patterns or the aperture patterns in the additional film included in another one of the at least two resonators.
    Type: Grant
    Filed: August 12, 2016
    Date of Patent: September 4, 2018
    Assignee: TAIYO YUDEN CO., LTD.
    Inventors: Hikaru Shimomura, Toshio Nishizawa
  • Patent number: 10038422
    Abstract: A single-die multi-FBAR (film bulk acoustic resonator) device includes multiple FBARs having different resonant frequencies formed over a single substrate. The FBARs include piezoelectric layers having different thicknesses but with upper electrodes formed at a same height over the substrate, lower electrodes at different heights over the substrate, and different sized air gaps separating the lower electrodes from the substrate.
    Type: Grant
    Filed: August 25, 2016
    Date of Patent: July 31, 2018
    Assignee: QUALCOMM Incorporated
    Inventors: Changhan Hobie Yun, Je-Hsiung Lan, Chengjie Zuo, David Berdy, Jonghae Kim, Mario Velez, Niranjan Sunil Mudakatte, Shiqun Gu
  • Patent number: 10008083
    Abstract: A ribbon comprises a substrate, and a plurality of seals on the substrate. Different seals detune in response to differing tensile loads. At least one of the seals comprises a surface acoustic wave (SAW) radio frequency identification (RFID) seal.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: June 26, 2018
    Assignee: SOLYBYUNG COVELEY
    Inventors: Michael Coveley, Srdjan Milutinovic, Yuping Huang
  • Patent number: 10009009
    Abstract: In an elastic wave device, an interdigital transducer (IDT) electrode is disposed on a piezoelectric substrate. In at least one of first and second electrode fingers of the IDT electrode, elongated sections with a widthwise dimension larger than that of a center of the first and second electrode fingers in a longitudinal direction are provided in at least one of a portion closer to a base end of the first or second electrode finger and a portion closer to a leading end of the first or second electrode finger than a central region of the first or second electrode finger. At least one of first and second busbars includes a plurality of openings provided separately from each other along the longitudinal direction of the first and second busbars.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: June 26, 2018
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Masakazu Mimura, Daisuke Tamazaki, Katsuya Daimon, Masato Araki
  • Patent number: 9998094
    Abstract: A bulk acoustic wave resonator may include: a piezoelectric layer including a piezoelectric material; a first electrode disposed on one surface of the piezoelectric layer; a second electrode disposed on the another surface of the piezoelectric layer; and a frame disposed on the one surface of the piezoelectric layer and surrounding the first electrode, wherein the frame is spaced apart from the first electrode by a predetermined gap.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: June 12, 2018
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Jea Shik Shin, Yeong Gyu Lee, Ho Soo Park
  • Patent number: 9976713
    Abstract: An apparatus includes a moving mass transducer. The moving mass transducer generates sound by displacement of a surface defined by a piezoelectric element. The piezoelectric element is displaced in response to an interaction of a first signal with a magnetic field. The piezoelectric element is configured to be separately driving by a second signal.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: May 22, 2018
    Assignee: QUALCOMM Incorporated
    Inventors: Andre Gustavo Pucci Schevciw, Ricardo De Jesus Bernal Castillo
  • Patent number: 9929714
    Abstract: The dominant frequency of a solidly mounted resonator (100/280/300/400) is substantially increased by reducing the thickness of each layer of each Bragg acoustic reflector (112/160/224/274) to have a thickness than is substantially equal to one-quarter of the wavelength of a frequency that is a higher harmonic resonant frequency of the fundamental resonant frequency of the solidly mounted resonator (100/280/300/400).
    Type: Grant
    Filed: April 13, 2014
    Date of Patent: March 27, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Stuart M. Jacobsen, Rick L. Wise, Maria Wang, Ricky Alan Jackson, Nicholas S. Dellas, Django Earl Trombley
  • Patent number: 9880132
    Abstract: An environmental measurement apparatus includes an operation unit which calculates a first change in a first oscillation frequency of a first QCM sensor and a second change in a second oscillation frequency of a second QCM sensor. The operation unit corrects the second change based on the first change in a first period and the second change in the first period.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: January 30, 2018
    Assignee: FUJITSU LIMITED
    Inventor: Mitsuo Ozaki
  • Patent number: 9813817
    Abstract: A vibrating diaphragm includes a diaphragm body and a suspension edge. The diaphragm body is made by acrylonitrile butadiene styrene materials. A surface of the diaphragm body is electroplated a layer of nanoscale materials. The suspension edge is made by room temperature vulcanized silicone rubber materials. The suspension edge is molded an outer periphery of the diaphragm body. The vibrating diaphragm can improve the high frequency effect of the speaker.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: November 7, 2017
    Assignee: Cheng Uei Precision Industry Co., Ltd.
    Inventors: James Lee, Yi Lin Yang
  • Patent number: 9793876
    Abstract: To improve durability against impact, a quartz crystal resonator element includes a recess in a plan view. The quartz crystal resonator element further includes a first principal surface and a second principal surface that are front and rear surfaces facing away from each other and a side surface disposed between the first principal surface and the second principal surface, and the side surface is formed of flat surfaces and curved surfaces formed by dry etching and alternately arranged. The quartz crystal resonator element preferably has a base and at least one resonating arm extending from the base.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: October 17, 2017
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Atsushi Matsuo
  • Patent number: 9713825
    Abstract: A multilayer backing absorber for use with an ultrasonic transducer comprises a plurality of absorber elements, each absorber element having at least one metal layer and at least one adhesive layer, wherein the backing absorber is adapted to be coupled to a vibrating layer of the ultrasonic transducer.
    Type: Grant
    Filed: October 25, 2013
    Date of Patent: July 25, 2017
    Assignee: Measurement Specialties, Inc.
    Inventors: Minoru Toda, Mitchell L. Thompson
  • Patent number: 9711708
    Abstract: Provide an electronic component that has a hollowed structure and is capable of suppressing the deformation of the hollowed structure due to the pressure during the module resin molding. The electronic component includes a device substrate 2, a driver portion 3 formed on one of the principle surfaces of the device substrate 2, a protection portion 4 configured to cover the driver portion 3 so as to form a hollowed space 8 around the driver portion 3, an adhesion layer 10 that is made of a resin and arranged above the protection portion 4, and a reinforcing plate 11 arranged on the adhesion layer 10, wherein the reinforcing plate 11 is a silicon substrate.
    Type: Grant
    Filed: August 1, 2014
    Date of Patent: July 18, 2017
    Assignee: MURATA MANUFACTURING CO., LTD
    Inventor: Masaaki Kanae
  • Patent number: 9712139
    Abstract: An elastic wave filter device includes serial and parallel arms and a plurality of elastic wave resonators. Each elastic wave resonator includes an IDT electrode. In the case where a direction in which electrode fingers extend is taken as a width direction of the IDT electrode, the IDT electrode includes a central area at a center in the width direction, a low acoustic velocity area at an outer side portion of the central area, and a high velocity area at a farther outer side portion thereof. A width of the low acoustic velocity area of at least one elastic wave resonator differs from a width of the low acoustic velocity area of the other elastic wave resonators.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: July 18, 2017
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Yasumasa Taniguchi, Masato Araki, Katsuya Daimon, Masakazu Mimura
  • Patent number: 9645117
    Abstract: A piezoelectric unit 1 includes a piezoelectric element that causes thickness shear vibration, a first electrode provided on one surface of the piezoelectric element, a second electrode and a third electrode which are provided on an opposite surface to the one surface which is provided with the first electrode of the piezoelectric element and are electrically insulated from each other, and a switching portion that is connected to the first electrode, the second electrode, and the third electrode, in which the switching portion can switch measurement modes between a mass/viscoelasticity measurement mode for measuring mass of a substance which is in contact with the piezoelectric element or viscoelasticity by vibrating the piezoelectric element, and an electrical characteristic measurement mode for measuring electrical characteristics between the second electrode and the third electrode.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: May 9, 2017
    Assignee: SEIKO INSTRUMENTS INC.
    Inventors: Sachiko Tanabe, Masayuki Suda, Hiroshi Muramatsu
  • Patent number: 9590586
    Abstract: A method for producing an electronic component module prevents a space from collapsing. The method includes a step of preparing an electronic component including an element substrate, a drive device formed on a principal surface of the element substrate, and a protection device covering the drive device so as to form a space around the drive device; a step of fixing the electronic component on a common substrate such that a principal surface of the common substrate and another principal surface of the element substrate face each other; a step of fixing a reinforcing plate on the protection device of the electronic component; and a step of forming a resin layer on the principal surface of the common substrate such that the electronic component is contained therein.
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: March 7, 2017
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Masaaki Kanae
  • Patent number: 9577606
    Abstract: A duplexer includes an antenna terminal, a transmission amplifier terminal and a reception amplifier terminal. The transmission amplifier terminal is coupled to the antenna terminal via a transmission filter. The reception amplifier terminal is coupled to a reception filter and the reception filter is coupled to the antenna terminal via a band-stop filter.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: February 21, 2017
    Assignee: EPCOS AG
    Inventors: Andreas Link, Bernhard Bader
  • Patent number: 9571064
    Abstract: An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity defines a main membrane region. The acoustic resonator device further includes at least one air-ring defining a boundary of the main membrane region, and at least one first frame formed between the bottom electrode and the piezoelectric layer or formed between the substrate and the bottom electrode, and a second frame formed between the piezoelectric layer and the top electrode.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: February 14, 2017
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Dariusz Burak, Phil Nikkel, Alexandre Augusto Shirakawa
  • Patent number: 9561527
    Abstract: An ultrasonic transducer includes a substrate, a supporting film disposed on the substrate, and a piezoelectric element disposed on the supporting film. The substrate includes an opening. The piezoelectric element is disposed on an area that overlaps the opening in a plan view in a thickness direction of the substrate. A thickness of the supporting film at an area that overlaps the piezoelectric element in a plan view of the supporting film is smaller than a thickness of the supporting film at a different area different from the area that overlaps the piezoelectric element.
    Type: Grant
    Filed: January 13, 2016
    Date of Patent: February 7, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Tomoaki Nakamura, Hironori Suzuki, Jiro Tsuruno
  • Patent number: 9490771
    Abstract: An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region, and a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: November 8, 2016
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Dariusz Burak, John Choy, Alexandre Shirakawa, Phil Nikkel
  • Patent number: 9450563
    Abstract: An acoustic wave bandpass filter comprises at least an input first acoustic wave resonator with an output surface, and an output second acoustic wave resonator with an input surface, said resonators being coupled to each other along a set direction, the input and output surfaces being substantially opposite, and at least one first phononic crystal structure between said input and output resonators and/or a second phonic crystal structure at the periphery of said resonators so as to guide the acoustic waves, generated by said input resonator, toward said output resonator along said set direction, the resonators ensuring an impedance conversion and/or a mode conversion.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: September 20, 2016
    Assignee: Commissariat a L'Energie Atomique et aux Energies Alternatives
    Inventors: Marie Gorisse, Alexandre Reinhardt
  • Patent number: 9431957
    Abstract: In a quartz crystal unit, the unit comprising a quartz crystal resonator having an overall length less than 2.1 mm, and a base portion, and first and second vibrational arms, at least one groove being formed in at least one of opposite main surfaces of each of the first and second vibrational arms so that a width of the at least one groove is greater than or equal to a distance in the width direction of the at least one groove measured from an outer edge of the at least one groove to an outer edge of the corresponding one of the first and second vibrational arms and less than 0.07 mm, at least one metal film for adjusting an oscillation frequency of the quartz crystal resonator being disposed on at least one of the opposite main surfaces of each of the first and second vibrational arms.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: August 30, 2016
    Assignee: PIEDEK TECHNICAL LABORATORY
    Inventor: Hirofumi Kawashima
  • Patent number: 9344056
    Abstract: A resonator includes: a package; a support section that is provided on a surface of the package; and a vibration element in which an attachment section, which is disposed between an outer edge of a vibration substrate, in which excitation electrodes are provided on main surfaces thereof, and an outer edge of the excitation electrode, is attached to the support section through a conductive adhesive. The attachment section is disposed in a region S obtained by rotating a virtual line which connects the center of the vibration element and one end of the vibration element, in a range of ?35° to +35° of a rotation angle ? about the center, and an attachment area becomes 0.7 mm2 or more.
    Type: Grant
    Filed: November 4, 2014
    Date of Patent: May 17, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Matsutaro Naito, Manabu Kondo, Kensaku Isohata
  • Patent number: 9308724
    Abstract: A liquid ejecting head includes a plurality of pressure generators each including a first electrode individually provided therefor, the first electrode being located on a face of the flow path plate so as to correspond to one of the pressure chambers, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer; a lead electrode electrically connected to the first electrode; and a conductive layer provided in a section where the first electrode is partially exposed, the section being located in a region where the second electrode is not provided and the piezoelectric layer is exposed, at least a part of the conductive layer being in contact with the first electrode. The lead electrode is connected to the first electrode via the conductive layer.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: April 12, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Yue Gao, Yoshinao Miyata, Yuma Fukuzawa
  • Patent number: 9159905
    Abstract: A vibrating element as an element on which a base part, a supporting part extending from the base part, and adjustment electrodes as mass adjustment parts are provided and a semiconductor substrate as a circuit element are provided, and the adjustment electrodes are placed in locations not overlapping with the semiconductor substrate in a plan view, the supporting part and the semiconductor substrate are connected, and thereby, the vibrating element is mounted on the semiconductor substrate.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: October 13, 2015
    Assignee: Seiko Epson Corporation
    Inventors: Shinya Aoki, Takayuki Kikuchi
  • Patent number: 9150030
    Abstract: A groove in which a curable resin is filled, is formed on the opposite side face of a face for reflecting light of an oscillating mirror unit. The groove extends so as to cross the swing axis of the oscillating mirror unit, seen from the opposite side of the reflection face of the oscillating mirror unit.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: October 6, 2015
    Assignee: KYOCERA DOCUMENT SOLUTIONS INC.
    Inventor: Yuji Toyota
  • Patent number: 9065037
    Abstract: There is provided a piezoelectric vibrating piece including: a piezoelectric plate that includes a pair of vibrating arm portions, and a base portion which integrally fixes the base end portions of the pair of vibrating arm portions along a length direction; excitation electrodes which are formed on the vibrating arm portions and vibrate the vibrating arm portions; mounting electrodes which are formed on the base portion and mount the piezoelectric plate on external portions using a joining member; and leading-out electrodes which connect the excitation electrodes and the mounting electrodes, in which the leading-out electrodes are formed by folding back several times between the excitation electrodes and the mounting electrodes.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: June 23, 2015
    Assignee: SII CRYSTAL TECHNOLOGY INC.
    Inventor: Daishi Arimatsu
  • Patent number: 9024508
    Abstract: A double-side tuning fork-type bending vibration piece having a basal part, a pair of drive vibration arms, a pair of detection vibration arms, drive electrodes and detection electrodes includes adjustment films of a metallic material or the like formed in connecting areas between the vibration arms and the basal part. The adjustment films are formed in such a way as to cover an area of tapered portions formed in connecting parts between the drive vibration arms and the basal part, an area of the basal part near the tapered portions and an area of the drive vibration arms. While monitoring a detection current outputted from the detection electrodes when the drive vibration arms are excited in driving mode, the adjustment films are partly deleted by laser irradiation so that the detection current becomes 0.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: May 5, 2015
    Assignee: Seiko Epson Corporation
    Inventors: Masashi Shimura, Takayuki Kikuchi
  • Patent number: 9013250
    Abstract: An acoustic wave device including: a substrate; a piezoelectric film formed on the substrate; an lower electrode provided on a first surface of the piezoelectric film; an upper electrode provided on a second surface of the piezoelectric film opposite to the first surface; and a mass loading film having a first pattern and a second pattern in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the first pattern having portions and the second pattern having portions interlinking the portions of the first pattern.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: April 21, 2015
    Assignee: Taiyo Yuden Co., Ltd.
    Inventors: Shinji Taniguchi, Tokihiro Nishihara, Tsuyoshi Yokoyama, Takeshi Sakashita
  • Patent number: 8963403
    Abstract: In a piezoelectric device, a lower covering layer, a piezoelectric material layer, a lower electrode layer, and an upper electrode layer, which define common layers, and an upper covering layer, which defines a specific layer, are laminated on a substrate. The piezoelectric material layer is sandwiched between a pair of electrodes. First to third vibration regions are provided in which the electrodes are superimposed with the piezoelectric material layer therebetween when viewed in a transparent manner in the direction in which the layers are laminated. The upper covering layer includes only a portion having with a first thickness in the first vibration region, includes a portion having the first thickness and a portion having a second thickness that is smaller than the first thickness in the second vibration region, and includes only a portion having the second thickness in the third vibration region.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: February 24, 2015
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Takashi Yamane
  • Patent number: 8941450
    Abstract: An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. A frequency control film is provided on an upper side of a resonance area in which the upper electrode and the lower electrode face each other in at least one of the main resonator and the sub resonator. The frequency control film has multiple convex patterns, and the convex patterns are arranged with a common pitch for spurious adjustment and with different areas in the main resonator and the sub resonator.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: January 27, 2015
    Assignee: Taiyo Yuden Co., Ltd.
    Inventors: Tsuyoshi Yokoyama, Shinji Taniguchi, Tokihiro Nishihara, Masanori Ueda
  • Patent number: RE45829
    Abstract: In a method for manufacturing a quartz crystal unit, a quartz crystal tuning fork resonator is formed by etching a quartz crystal wafer to form a quartz crystal tuning fork base, quartz crystal tuning fork tines connected to the quartz crystal tuning fork base, and a groove having stepped portions in at least one of opposite main surfaces of each of the quartz crystal tuning fork tines. A first electrode is disposed on at least one of the stepped portions of each of the grooves and a second electrode is disposed on each of side surfaces of each of the quartz crystal tuning fork tines. A frequency of oscillation of the quartz crystal tuning fork resonator is adjusted at least twice and in different steps. The quartz crystal tuning fork resonator is then mounted in a case and an open end of the case is covered with a lid.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: December 29, 2015
    Assignee: PIEDEK TECHNICAL LABORATORY
    Inventor: Hirofumi Kawashima