Abstract: The piezoelectric motor (6) comprises a stator (1) and a runner (4) which form a gap (7) as well as comprising a piezoelectric transducer (3) which is connected to the stator (1) or the runner (4) and which with the stator (1) or the runner (4) forms a resonator (1,3;4,3), wherein the resonator (1,3; 4,3) may be excited in a main oscillation direction (H), characterised in that the stator (1) comprises an engagement surface (1a) facing the runner (4), or the runner (4) an engagement surface which faces the stator (1), and that the stator (1) or the runner (4) comprises an elastic advance element (5) which bridges the gap (7) between the stator (1) and the runner (4) in a manner such that the advance element (5) at least temporarily lies on the engagement surface (1a). The advance element (5) comprises a first part-section (5c) as well as a second part-section (5d), wherein the part-sections (5c, 5d) have a different resonant frequency.

Abstract: A transducer comprised of a resonator and a piezoelectric crystal for cleaning single items such as semiconductor wafers and flat panel displays. The resonator is an elongated piece of material having a cross section that is trapezoidal in shape. The parallel sides of the trapezoid form the top and bottom ends of the resonator and the nonparallel sides of the trapezoid focus the acoustic energy on the bottom end of the resonator.

Abstract: This invention relates to a device which is either permanently attached or removable to the edge of a material such as a vehicular glass window. This device may be comprised of a converter sub-unit (vibrator) and an amplifying coupler. These elements are arranged so as to propagate mechanical motion generated by the converter sub-unit through the amplifying coupler and into the edge of the attached material. The resulting vibration motion in the material, which could take the form of a longitudinal compression/rarefaction wave, transverse wave, or a combination of the two waveforms, is of a sufficient magnitude so as to cause the adhesive bond between the material's surface and other solid debris, such as ice, to be quickly broken. This allows the debris to fall away while not damaging the material. The vibration motion in the material is also of sufficient magnitude to remove a liquid such as water from the material surface.

Abstract: An electromechanical actuator 10 is disclosed, having drive elements (14a–d) movable in two dimensions and connected to an actuator backing (12). The actuator backing (12) is made of a material being ferromechanically inactive. Furthermore, the joint between the drive element (14a–d) and the actuator backing (12) is stiff and highly stable. This is achieved by use of an irreversible joint made e.g. by thermoset plastic glues, diffusion bonding or co-sintering. Co-sintering is to prefer. The actuator backing (12) material is selected to be stiff, preferably having a stiffness above 70 GPa and more preferably above 100 GPa, and having a high heat conductivity, preferably above 5 W/mK and more preferably above 10 W/mK, Electrodes (22) are preferably integrated in the actuator backing to increase stiffness as well as improving the heat conductivity. The drive elements (14a–d) are preferably covered (28, 26), at least at the driving surface, by heat-conducting material.

Abstract: A drive assembly for a wing of a micromechanical flying insect. The drive assembly comprises a honey comb structure. A method for flying a micromechanical flying insect comprising moving a wing with a drive assembly having a stiffness to weight ratio greater than about 16×1010 N/mKg.

Abstract: In a piezoelectric drive comprising clamping piezo packets which are adjacently arranged, under compressive pre-stress, between a reference part and an output part, the reference part is connected to the clamping piezo packets by means of a “semi-rigid” bridging plate, which adapts in a flexible manner to differences in stack height of the piezo packets, in a static state but remains essentially rigid in a dynamic state, that is, at the operating frequency of the drive.

Abstract: A vibration type drive unit comprises a vibrator made of an elastic body to which an electromechanical energy conversion element is fixed and a moving element which is in contact with a surface of the vibrator so that by applying an alternating signal to the electromechanical energy conversion element. A progressive wave is generated on a surface of the vibrator to move the moving element, wherein the vibrator has a plate-like elastic body and a column-like elastic body, the electromechanical energy conversion element is fixed to a side surface of the plate-like elastic body. The column-like elastic body is formed on a central portion of a surface of the plate-like elastic body which is different from the surface to which the electromechanical energy conversion element is fixed.

Abstract: A vibrating transducer is coupled to one end of an elongated vibrating plate and a receiving transducer is coupled to the other end of the vibrating plate. Langevin transducers are used for the vibrating and receiving transducers. Each transducer includes a pair of annular piezoelectric elements. The vibrating transducer is connected to an oscillator. A controller controls the oscillator. Detection signals of a voltage sensor, which detects the vibrating state of the receiving side of the vibrating plate, are fed back to the controller. The controller controls the oscillator such that the phase difference between the vibration of the vibrating side and the receiving side is within a predetermined range and that the receiving side is vibrated by amplitude greater than or equal to a predetermined amplitude.

Abstract: A steering actuator of an independent type steer-by-wire system comprises a housing fixed to a vehicle body and an ultrasonic motor. The ultrasonic motor has a stator internally fixed to the housing and a rotator rotating relative to the stator when an electric current is applied. A steering rod having a first end and a second end penetrates through a center portion of the ultrasonic motor. The first end of the steering rod extends out of the housing for connection to a tie rod. In one embodiment, a ring gear, planetary gears, sun gear and/or racks formed at the steering rod are operably associated with converting rotating movement of the ultrasonic motor into linear movement of the steering rod. In another embodiment, a rotator ring, a plurality of pinions, worm gears and a plurality of racks formed at the steering rod are operably associated with converting rotating movement of the ultrasonic motor into linear movement of the steering rod.

Abstract: A piezoelectric drive, especially a piezoelectric motor for producing continuous or stepwise movements, a friction element for such a piezoelectric drive as well as for transmission of forces between stator and rotor, and a circuit arrangement for operating a piezoelectric drive, especially a piezoelectric motor. An elastic double frame enclosing the transducer and having inner and outer frames is disposed at each outer node of the bending oscillation mode to hold the piezoelectric transducer and produce the pressing force of the friction element. The inner frame is joined to each of the longitudinal narrow sides of the transducer and the outer frame to the outer fastening. Further, the outer frame and inner frame are spaced apart and maintained in contact by stays or bridges.

Abstract: An acoustic driver assembly for use with a spherical cavitation chamber is provided. The acoustic driver assembly includes at least one transducer, a head mass and a tail mass, coupled together with a centrally located threaded means (e.g., all thread, bolt, etc.). The driver assembly is either attached to the exterior surface of the spherical cavitation chamber with the same threaded means, a different threaded means, or a more permanent coupling means such as brazing, diffusion bonding or epoxy. In at least one embodiment, the transducer is comprised of a pair of piezo-electric transducers, preferably with the adjacent surfaces of the piezo-electric transducers having the same polarity. The surface of the head mass that is adjacent to the external surface of the chamber has a spherical curvature less than the spherical curvature of the external surface of the chamber, thus providing a ring of contact between the acoustic driver and the cavitation chamber.

Abstract: An acoustic driver assembly for use with a spherical cavitation chamber is provided. The acoustic driver assembly includes at least one transducer, a head mass and a tail mass, coupled together with a centrally located threaded means (e.g., all thread, bolt, etc.). The driver assembly is either attached to the exterior surface of the spherical cavitation chamber with the same threaded means, a different threaded means, or a more permanent coupling means such as brazing, diffusion bonding or epoxy. In at least one embodiment, the transducer is comprised of a pair of piezo-electric transducers, preferably with the adjacent surfaces of the piezo-electric transducers having the same polarity. The surface of the head mass that is in contact with the external surface of the chamber has a spherical curvature equivalent to the spherical curvature of the external surface of the chamber, thus providing maximum surface contact between the driver assembly and the chamber.

Abstract: An electro-mechanical transducer is disclosed, which provides a wideband response by activating successive multiple resonant frequencies in a way which provides additive output between the resonant frequencies. A three mode wideband high output transducer is also disclosed along with an electro-mechanical feedback system which provides a smoothed response as well as array control under multiple element usage.

Abstract: In an adjusting device for displacing individual elements (2) of optical systems or of measuring systems in which the element to be displaced is movable on a base (1) along a predetermined direction (x) by means of a piezoelectric actuator arrangement (21, 22) which is supported by the element (2) and which is constructed and controllable in such a way that it exerts shock pulses on the element (2) in order to carry out a stepwise movement of the element (2) on the base (1), the element (2) is arranged in a body (1; 27) which has an open or closed hollow cross section and is supported in a frictional engagement on this body, at least at one location, with the intermediary of a pretensioned spring device (8, 8?).

Abstract: A rotation/displacement converting actuator has an actuator unit constituted by a displacing body and an actuator in which the displacing body can be linearly displaced. The actuator has a pair of plate-shaped bases, a rotor, a vibrating element that rotates the rotor, and a cam mechanism for converting rotary motion of the rotor to linear motion of the displacing body. The rotor is fixed to a shaft to which the rotor (cam rotor) is fixed. An outer circumferential surface of the rotor constitutes a cam surface of the cam mechanism. A roller is provided at a tip portion of the displacing body. The roller abuts on the outer circumferential surface (cam surface) of the rotor.

Abstract: A rectangular vibrating plate 10 in which a piezoelectric element and a reinforcing plate are stacked is supported on a main plate by a support member 11, and is urged toward the rotor 100 by an elastic force of the support member 11. This brings a projection 36 provided on the vibrating plate 10 into abutment with an outer peripheral surface of the rotor 100. In this construction, when the vibrating plate 10 vibrates in the horizontal direction in the figure by an applied voltage from a driving circuit (not shown), the rotor 100 is rotated in a clockwise direction in accordance with the displacement of the projection 36 due to the vibration.

Abstract: An integrated circuit (42) provides drive signals to a piezo element (48) of a milli-actuator device (20) in a mass data storage device (10). The integrated circuit (42) includes a circuit (61) for selectively operating the integrated circuit (42) in either a voltage or a charge mode of operation. A first amplifier circuit (44) can be compensated for a variable number of piezo elements in the charge mode of operation by adjustable output impedance adjusting elements (124, 126, 138-141) that are switchably connectable into the amplifier circuit (44).

Abstract: An ultrasonic transducer in which internal electrodes and piezoelectric elements are alternately layered includes outer electrodes, each being connected to the corresponding internal electrodes. The ultrasonic transducer has a first layered part, a second layered part, a first outer-electrode group, and a second outer-electrode group. The first layered part includes at least the internal electrodes, each being divided in half in a second direction orthogonal to a layering direction, which is a first direction. The second layered part includes at least the internal electrodes, each being divided in half in a third direction orthogonal to the first direction and the second direction. The first outer-electrode group is provided so as to be connected to predetermined internal electrodes in the first layered part. The second outer-electrode group is provided so as to be connected to predetermined internal electrodes in the second layered part.

Abstract: An actuator is disclosed which has a driving section driven by means of electro-mechanical displacing members such as a piezoelectric members. The electro-mechanical displacing members are connected to a driving piece at one ends thereof and the driving piece is driven by the composition of displacements of the electro-mechanical displacing members. The movement of the driving piece is transmitted to a driven section. The electro-mechanical displacing members are also connected to a base member at the other ends thereof. A restraining member restrains unnecessary movement of the actuator which is composed of the electro-mechanical displacing members, the driving piece and the base member, thereby insuring stable operation of the actuator.

Abstract: A device for transmitting the deflection of an actuator (2), comprising at least one transmission element (4) that has a first, a second and a third support zone, said first support zone (6) being associated with a counter-support, said second support zone (8) being associated with the actuator, and said third support zone being associated with a control element (20). The at least one transmission element rests on the counter-support with the first support zone under the action of the actuator and displaces the control element with the third support zone by way of a rotational movement about a center of rotation. The at least one transmission element is substantially configured as a plate (5) that is disposed substantially perpendicular to the movement of adjustment and the first, the second and the third support zone are configured as substantially plane surfaces on the plate, further relates to a method for producing the inventive transmission element.

Abstract: A sleeved ultrasonic transducer has a two-part head mass, including a threaded sleeve and an outer housing that are composed of different materials. The threaded sleeve is preferably a metal such as titanium that provides superior thread strength for mating with a compression bolt, while the outer housing is preferably aluminum or ceramic or other metal or non-metallic material that provides good thermal heat sink capacity and/or transmission of vibrational energy. The combination of the two components provides an improved ultrasonic transducer.

Abstract: An ultrasonic motor has a stator and a rotor which is press fit to the stator and rotates in accordance with the vibration of the stator. The stator includes a pair of metal blocks, a piezoelectric element located between the metal blocks, a tightening member and a positioning member. The tightening member is inserted through the metal blocks and the piezoelectric element to tighten the metal blocks and the piezoelectric element in the axial direction. The positioning member determines the radial position of the metal blocks. This reduces misalignment of metal blocks and the tightening member, and the stator for the ultrasonic motor.

Abstract: A vibration type actuator has an elastic member in which a shaft center portion is formed in hollow shape along an axial direction and in which driving vibration is generated in a driving portion, a fastening member which fastens the elastic member to an electro-mechanical energy conversion element, an output shaft which penetrates the shaft center portion of the elastic member, a moving member which is kept in press contact with the driving portion of the elastic member and which rotates together with the output shaft, and a bearing member which is located between an inner periphery portion of the elastic member and a distal end portion of the fastening member and which journals the output shaft.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo-electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: A single piezoelectric is excited at a first frequency to cause two vibration modes in a resonator producing a first elliptical motion in a first direction at a selected contacting portion of the resonator that is placed in frictional engagement with a driven element to move the driven element in a first direction. A second frequency excites the same piezoelectric to cause two vibration modes of the resonator producing a second elliptical motion in a second direction at the selected contacting portion to move the driven element in a second direction. The piezoelectric is preloaded in compression by the resonator. Walls of the resonator are stressed past their yield point to maintain the preload. Specially shaped ends on the piezoelectric help preloading. The piezoelectric can send or receive vibratory signals through the driven element to or from sensors to determine the position of the driven element relative to the piezoelectric element or resonator.

Abstract: A vibration type drive unit comprises a vibrator made of an elastic body to which an electromechanical energy conversion element is fixed and a moving element which is in contact with a surface of the vibrator so that by applying an alternating signal to the electromechanical energy conversion element. A progressive wave is generated on a surface of the vibrator to move the moving element, wherein the vibrator has a plate-like elastic body and a column-like elastic body, the electromechanical energy conversion element is fixed to a side surface of the plate-like elastic body. The column-like elastic body is formed on a central portion of a surface of the plate-like elastic body which is different from the surface to which the electromechanical energy conversion element is fixed.

Abstract: Portable ultrasound tubular transducer, that generates cavitation in liquids, of the type that comprises at least one electromechanical transducer assembly, characterized in that at least one electromechanical transducer assembly is embedded inside a metallic pipe, and comprises one or more piezoelectric crystals which are power-fed from the exterior, and which are coupled to a first mass embedded at one end of said metallic pipe and to a second mass disposed in the interior of such metallic pipe and linked with said first mass, said portable tubular transducer being provided with a subjection medium.

Abstract: Tool for chip removing machining includes a shank having a clamping end and a cutting insert at an opposite end, plus a number of piezo-elements for dampening vibrations therein. A pair of cooperating, flat-shaped piezo-elements with lengths that are shorter than that of the shank, are placed on opposing sides of the shaft in an area adjacent to the region where the shank is secured in the machine wherein the direction of polarization of the piezo-elements is parallel to the longitudinal axis of the shank. The piezo-elements constitute actuators that are actively steerable through the application of a voltage from a source of electricity via a control device in the form of a logic control circuit, to thereby dampen the bending vibrations of the shank.

Abstract: A highly reliable optical communications equipment is offered, which can control light more accurately than heretofore (i.e., less restrictions are imposed on the amount of attenuation and on the resolution) and which is equipped with a latching function. The optical communications equipment includes a piezoelectric actuator, a moving body moved by the piezoelectric actuator as a drive source, a multi-coating filter for controlling light that is a signal medium by movement of the moving body, a drive circuit for controlling the position of the multi-coating filter via the actuator, and a control circuit. The piezoelectric actuator uses bending vibrations produced in a piezoelectric vibrating body as a power source. If the moving body is not moved for a given time, the control circuit sends a function keeping signal to drive the actuator to such an extent that the moving body does not move. Thus, the function of the actuator is maintained.

Abstract: A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections made of metal and a fixation section for supporting the thin plate sections. One or more piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. An object is attached to forward end portions of the pair of thin plate sections. An areal size of a surface of the object interposed between the thin plate sections is larger than an areal size of an object attachment surface of the thin plate sections.

Abstract: An ultrasonic linear motor according to the present invention has a configuration wherein driving elements are glued at portions on faces of an ultrasonic transducer, facing one another, where rotational directions of elliptic vibrations generated on the faces are reverse one to another, a pair of guides are provided for being pressed into against the driving elements so as to hold the ultrasonic transducer therebetween, and leaf springs serving as pressing part are provided so as to narrow a spacing between the one pair of guides, whereby the ultrasonic transducer is configured as an self-moving ultrasonic linear motor which can drive by itself. Thus, driving properties of the ultrasonic transducer itself is improved, and also the size of the ultrasonic linear motor can be reduced.

Abstract: The present invention relates to a linear motor which draws its operating power from ultrasonic vibration above the frequency of 20 kHz which is generated by piezoelectric ceramic. More particularly, the invention relates to a linear piezoelectric ultrasonic motor which linearly operates a slider due to a frictional force generated by applying sinusoidal electric field with a 90 degree phase difference to a pair of piezoelectric ceramic. This causes an elliptical mechanical vibration on a shaking beam which is connected to the piezoelectric ceramic.

Abstract: Apparatus for providing linear motion to a generally flat flexible material, comprising: (a) at least one piezoelectric ceramic motor situated on a first side of the flat flexible material and having a contact surface which contacts the flat flexible material and which imparts said linear motion; and (b) a bearing surface situated on a second side of the flat flexible material opposite said contact surface.

Abstract: A piezoelectric actuator set includes a pair of elongated piezoelectric actuators. The elongated piezoelectric actuators establish the standard attitude of a head slider when no electric signal is supplied to the piezoelectric actuator set. When the electric signal is applied to the piezoelectric actuator set, the tip ends are pulled back toward the base ends in the elongated piezoelectric actuators. The piezoelectric actuator set generates a couple for driving the head slider for rotation around the rotational axis only in a predetermined direction from the standard attitude. The moment of inertia can be reduced in the head slider during rotation as compared with the case where the head slider is moved based on a swinging movement. The natural frequency can be raised in the vibration system comprising the head slider and the piezoelectric actuator set. The frequency of the electric signal or servo signal can be set over a wider frequency range.

Abstract: A driver (40) for supplying drive signals to a piezo element (48) of a milli-actuator device (21) in a mass data storage device (10) in a charge mode of operation has a first circuit (96, 98) for providing a charging current to a sense capacitor (58) in response to head position control signals. The first circuit is powered by a voltage supply (VM) that is referenced to a substrate potential, or a ground potential (AGND). A second circuit (104, 106) for mirroring a current in the first circuit at a predetermined mirror ratio (1x:Nx) to provide drive currents to the piezo element (48). The substrate potential may be, for example, an analog ground potential. If desired, the integrated circuit may also include a first switch (60) connected to selectively disable the first circuit (96, 98) a second switch (62) connected to selectively provide a feedback path from the second circuit (104, 106) to an input of the second circuit (104, 106).

Abstract: A vibration actuator includes a vibration element, which simultaneously generates a radial symmetric expansion vibration mode in which it expands and contracts in the radial direction and a non-axisymmetric planar vibration mode in which it bends to and fro in a non-axisymmetric manner within a single plane, and thereby drives a relative movement member, and a base member to which the vibration element is fixed. The vibration element includes at least one superimposed layer structure comprising a pair of electrical energy to mechanical energy conversion elements and an elastic member sandwiched between the pair of electrical energy to mechanical energy conversion elements. The elastic member includes a ring shaped portion to both the sides of which the pair of electrical energy to mechanical energy conversion elements are stuck, and a cylindrical shaped support portion, formed integrally with the ring shaped portion, which fixes the vibration element to the base member.

Abstract: A vibration member for use in a vibration wave driving apparatus, and a vibration wave driving apparatus, the vibration member including an elastic member having a through hole, a fastening member having a threaded portion, an electro-mechanical energy transducer having a through hole, and a shaft inserted into the through holes of the elastic member and the electro-mechanical energy transducer, the shaft having a threaded screw portion that meshes with the threaded portion of the fastening member, and a step that restricts a position of the elastic member relative to the shaft in a thrust direction, wherein the elastic member is sandwiched between the step of the shaft and the fastening member and fixed therebetween by screwing and fastening the threaded screw portion of the shaft with the threaded portion of the fastening member, and the shaft is restricted from rotating relative to the elastic member.

Abstract: An ultrasound converter, especially of the axial oscillating type, with at least one piezoelectric element disposed between two tensioning segments and at least one tensioning member which prestresses the piezoelectric element via the tensioning segments. The tensioning element is a ring-shaped tensioning spring the walls of which have at least one peripheral recess.

Abstract: The invention relates to a piezoelectric actuator (1) for driving a movable part (2), for example a rotor, having an elongate piezoelectric resonator (3), which serves to perform longitudinal vibrations and which is acted upon by elastic means (10), for example a spring (10). The elastic means (10) acts upon the piezoelectric resonator (3) mainly in the longitudinal direction (11) and serves to exert a force on the resonator (3) in a direction towards the movable part (2), the resonant frequency of the elastic means (10) being substantially smaller than the resonant frequency of the piezoelectric resonator (3), and the piezoelectric resonator (3) is guided by at least one guide element (4, 5) in a direction perpendicular to its longitudinal direction (11). This enables the resonator (3) to vibrate as freely as possible, which leads to a higher efficiency.

Abstract: The present invention concerns a piezoelectric motor of the type including:

Abstract: A piezoelectric motor having a stator in which piezoelectric elements are contained in slots formed in the stator transverse to the desired wave motion. When an electric field is imposed on the elements, deformation of the elements imposes a force perpendicular to the sides of the slot, deforming the stator. Appropriate frequency and phase-shifting of the electric field will produce a wave in the stator and motion in a rotor. In a preferred aspect, the piezoelectric elements are configured so that deformation of the elements in the direction of an imposed electric field, generally referred to as the d33 direction, is utilized to produce wave motion in the stator. In a further aspect, the elements are compressed into the slots so as to minimize tensile stresses on the elements in use.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo-electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: An apparatus for controlling a piezoelectric vibratory parts feeder comprises a piezoelectric vibrating unit provided with a piezoelectric vibrating element that vibrates at a predetermined frequency, a bowl adapted to discharge parts accommodated therein by means of the piezoelectric vibrating unit, a driving circuit for driving the piezoelectric vibrating element, and a control unit for outputting a driving signal to the driving circuit to cause a predetermined driving. The control is performed by idling the driving of the piezoelectric vibrating element temporarily at every predetermined driving cycles thereof and controlling the vibration of the piezoelectric vibrating element based on a signal obtained therefrom by its piezoelectric effect during the idling period, for instance, based on a phase difference between a waveform of this signal and the driving signal of the driving circuit.

Abstract: An AC switch is created by switching devices to modify the output of an ultrasonic generator. The AC switch introduces a modification circuitry into and out of the output stage of the ultrasonic generator. The AC switch is placed in parallel with the modification circuitry when inserting the modification circuitry into a conduction line of the ultrasonic generator. It is placed in series when inserting the modification circuitry between two nodes of the ultrasonic generator. A control circuit is associated with the AC switch to turn on and off the ultrasonic generator, overcoming the inability of triacs to turn off power when conducting ultrasonic current. The introduction of the modification circuitry by the AC switch allows the modification of the frequency, amplitude, power, impedance and waveform of an ultrasonic generator.

Abstract: The present invention relates a manufacturing method of a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature and a multilayered piezoelectric/electrostrictive ceramic actuator manufactured by the method. The present invention as above makes effect feasible of high quality image and high speed printing as large displacement and high speed actuating is feasible because it can get great displacement and driving speed even with small variation in driving voltage because of piezoelectric/electrostrictive layer and upper electrode altenatingly heaped to multilayer.

Abstract: An electroacoustic converter is disclosed for converting electrical energy into mechanical vibrations at a predetermined frequency. The converter is supplied with alternating electrical power from a power supply. The converter has a metal front driver mass, a metal back driver mass, a front ceramic stack, a back ceramic stack, a spacer between said front and back ceramic stacks, and a fastener extending axially of the converter coupling the front and back drivers masses to clamp the ceramic stacks and the spacer between the front and back drivers. The front and back ceramic stacks are of a suitable piezoelectric ceramic material such that when energized with alternating electrical power from the power supply the piezoelectric material renders the converter resonant at the predetermined frequency. The spacer, back driver, and front driver masses are provided with fins to radiate heat from the converter. The converter exhibits substantially even temperatures and a vibrational node within the spacer.

Abstract: The present invention generally provides an apparatus and method for improving the process of purging a liquid delivery system used in integrated circuit manufacturing. The liquid delivery system comprises ultrasonic transducers mounted to various components of a liquid delivery system. The transducers may be mounted on housings, isolation valves, fuel injectors, pump assemblies, fluid lines, and/or liquid flow meters. The ultrasonic transducers launch ultrasonic energy that enhance the removal of processing liquids and particulate material from components of the system. The present invention provides for a purge process where a purge fluid, preferably a liquid solvent, is flowed into the liquid delivery system and ultrasonic energy is launched into the purge fluid to enhance dissolution of residual processing liquids and particulate matter in the liquid delivery system, including from cracks and crevices in valves and other complex mechanical devices before being pumped from the liquid delivery system.

Abstract: An ultrasonic motor with increased output power per unit volume is provided by simultaneously driving all of a plurality of polarized segments of a piezoelectric element having a circular disk shape and divided into a multiple of four polarized segments in a circumferential direction. Projections are provided at upper faces of the polarized segments of the piezoelectric element and spaced apart by an odd number of polarized segments. Polarities of adjacent polarized segments are the same and polarities of adjacent pairs are reverse to each other. A first polarized segment group comprises every other polarized segment and a second polarized segment group comprises the remaining polarized segments. By selecting whether phases of alternating voltages supplied to the first and second polarized segment groups are the same or are 180 degrees out of phase, the direction of the motor is determined.

Abstract: A sonic transducer includes a transducer body and a drive element coupled to the transducer body to produce a sonic output in response to an applied electrical input. A sense element is coupled to the sonic drive element and is configured to provide an electrical feedback output related to the sonic output. The electrical feedback output is adapted to be used to control the applied electrical input to the sonic drive element so as to control the energy delivered to the working area or tip of the transducer.

Abstract: A vibration motor including a vibration element having a driving force output member, which is excited to produce a combination of different vibrations and to generate an elliptical vibration in the driving force output member. A relative moving member in pressure contact with the driving force output member is driven by the elliptical vibration to move in relative motion with respect to the vibration element. A pressure support member is fixed between the vibration element and a first base member, to place the vibration element in pressure contact with the relative moving member. A second base member supports the relative moving member. A vibration absorbing member absorbs vibration produced by the elliptical vibration generated by the vibration element in at least one of the relative moving member and the pressure support member.