Abstract: A rotating piezoelectric motor including a piezoelectric actuator including a resonator having a pair of arms connected at one of their ends in a connection area, the other two ends being referred to as ‘free’, a passive element able to be driven in rotation by the friction of the free ends on the passive element, the passive element including a disc and a rim extending from the periphery of the disc, the rim passing between the free ends of the arms.

Abstract: In a vibration type motor, a vibrator unit including a vibrator configured to vibrate, and a friction member unit including a friction member which the vibrator contacts relatively moving in a first direction. The vibrator unit is displaceable relative to the friction member unit in a second direction orthogonal to the first direction, and presses the vibrator against the friction member in the second direction. The friction member unit includes a stopper that contacts the vibrator unit so as to restrict the vibration unit from displacing, by an amount exceeding a predetermined amount, in the second direction. The stopper extends in the first direction, a distance greater than a length, in the first direction, of an area of the friction member which the vibrator contacts, and the stopper projects from the friction member toward the vibrator in the second direction when viewed from the first direction.

Abstract: A piezoelectric drive device has a first piezoelectric vibrator and a second piezoelectric vibrator each include a vibrating portion and a distal end portion in which the distal end portion make elliptic motion by stretching vibration and flexural vibration of the vibrating portion, a driven member driven by the elliptic motion of the distal end portion, a drive signal generation circuit that outputs stretching vibration drive signals to the first piezoelectric vibrator and the second piezoelectric vibrator, a first boosting circuit provided between the first piezoelectric vibrator and the drive signal generation circuit, a second boosting circuit provided between the second piezoelectric vibrator and the drive signal generation circuit, and a control circuit that controls boosting amounts of the stretching vibration drive signals.

Abstract: An ultrasonic electromechanical stator includes two vibration bodies, a link member connecting the two vibration bodies along a connection direction and a stator support. Each of the vibration bodies includes a respective electromechanical element and is configured to perform bending vibrations in a bending direction when an alternating voltage is applied to the electromechanical elements. The link member has a contact portion intended for contacting a surface of a body to be moved. The link member has a respective mechanical link connecting portion to the vibrating bodies. Each of the vibration bodies is mechanically attached to the stator support by at least two attachment tabs on at least one side, in a direction transverse to both the connection direction and the bending direction, of the respective vibration bodies. Also an ultrasonic electromechanical motor having such an ultrasonic electromechanical stator is disclosed.

Abstract: Provided is a vibration wave motor, including: a vibration body; a friction member; a press member configured to pressurize the vibration body against the friction member; a base member configured to fix the friction member; and a damping member configured to damp vibration, wherein the vibration body and the friction member are configured to move relative to each other, wherein the friction member includes: a first surface having a first region held in abutment against the vibration body; and a second surface, which is a back surface of the first surface, and has a second region held in abutment against the base member, wherein at least one of the first surface and the second surface has a third region held in contact with the damping member, and wherein positions of the first region and the third region in a pressurizing direction of the press member are different from each other.

Abstract: Provided is a vibration wave motor including: a vibrator; a friction member that comes into frictional contact with the vibrator; a press member that pressurizes the vibrator and the friction member into frictional contact with each other; a first guide member and a second guide member that guide the vibrator and the friction member so as to allow relative movement of the vibrator and the friction member; a hold member that holds the friction member and the first guide member; and a fixing member. The friction member and the first guide member are fixed to the hold member with the fixing member.

Abstract: A method of operating a multi-axis fiber scanner having a base including a base plane includes providing a source of electromagnetic radiation, directing the electromagnetic radiation through a fiber link that passes through the base plane of the base along a longitudinal axis orthogonal to the base plane, and supporting a retention collar positioned a distance from the base plane. The method also includes actuating a first piezoelectric actuator among a plurality of piezoelectric actuators to decrease the distance between a first side of the base and the retention collar, actuating a second piezoelectric actuator among the plurality of piezoelectric actuators to increase the distance between a second side of the base and the retention collar, and scanning the fiber link in a scanning plane.

Abstract: A micromechanical vibrasolator isolates vibration of a micromechanical resonator and includes: phononic bandgap mirrors, monophones connected serially; phonophore arms in an alternating sequence of phonophore arm-monophone-phonophore arm; abutments in acoustic communication with the phononic bandgap mirrors; wherein the micromechanical resonator is interposed between the phononic bandgap mirrors with phononic bandgap mirror arranged in parallel on opposing sides of the micromechanical resonator arranged perpendicular to a direction of vibration of an in-plane vibrational mode of the micromechanical resonator.

Abstract: An ultrasonic motor, is disclosed having an ultrasonic actuator in the form of a rectangular piezo-electric plate, which has two generators for acoustic standing waves and on which at least two friction elements are arranged, an element to be driven, and an electric excitation device. The piezoelectric plate of the actuator is divided into two pairs of diagonally oppositely disposed sections by two virtual planes which extend perpendicularly to each other and which extend through the center line of the main surfaces of the actuator, wherein each of the generators includes two parts which can be operated in an antiphase manner and each of which is arranged in a diagonal section of the piezoelectric plate, and the friction elements are arranged on one or two end faces of the piezoelectric plate.

Abstract: A vibration-wave motor includes a vibrator, a first holding member configured to hold the vibrator, a second holding member configured to hold the first holding member, a plurality of pressing members arranged around the vibrator and configured to press the vibrator against a contacting member that contacts the vibrator, a movable plate disposed opposite to the vibrator with respect to the contacting member, and a coupling part configured to couple the second holding member and the movable plate with each other. The vibrator and the contacting member move relatively to each other due to a vibration generated by the vibrator. One of the second holding member and the movable plate includes a transmitting part configured to transmit a driving force of the vibration-wave motor to a driven member.

Abstract: A magnetic levitation control device comprises: a control signal generation section configured to generate a first excitation current control signal based on current deviation information on the excitation current detection signal with respect to the current setting signal and a second excitation current control signal based on the current setting signal; and a selection section including a first switching section configured to select either one of the first excitation current control signal or the second excitation current control signal or a second switching section configured to select either one of a third excitation current control signal obtained by summation of the first excitation current control signal and the second excitation current control signal or the second excitation current control signal. The excitation amplifier is PWM-controlled based on the excitation current control signal selected by the selection section.

Abstract: The invention relates to an ultrasonic motor comprising a plate-shaped piezoelectric ultrasonic actuator (2) and a of friction element (5) arranged on a side surface thereof, wherein the connection line (V) through the friction point and the focal point (S) of the ultrasonic actuator defines an operating direction, and a perpendicular plane intersecting the ultrasonic actuator defines an operating plane (W). A holder (6) has two force inlet sections (7) in order to move the holder and thereby the ultrasonic actuator in a direction parallel to the operating direction, and to press same against an element to be driven. The force inlet sections, preferably based on permanent magnets (8, 9) are each arranged in the operating plane and laterally next to and at a distance from the the ultrasonic actuator, and the intersection point (SP) of the connection line (V) with the operating plane (W) either coincides with the focal point (S) or lies between the focal point and the side surface having the friction element.

Abstract: A small-sized vibration motor. The vibration motor includes a vibrator having a piezoelectric element, a contact member brought into friction contact with the vibrator, and a fixing member to which the contact member is fixed. The vibrator and the contact member are moved relative to each other in a driving direction by high-frequency vibration of the piezoelectric element. The contact member includes a sliding portion brought into friction contact with the vibrator when the vibrator and the contact member are moved relative to each other in the driving direction, and fixed portions via which the contact member is fixed to the fixing member. The fixed portions are formed at respective locations alongside the sliding portion in a second predetermined direction orthogonal to the first predetermined direction, and also inward of opposite ends of the contact member in the first predetermined direction.

Abstract: The invention relates to a method for joining a ceramic friction element (11) to a piezoelectric element (1), comprising, among other things, the following steps: pressing (14) a joining surface (10) of the friction element and a contact surface (9) of the piezoelectric element against each other with a low-melting glass mass (12) arranged therebetween and maintaining the pressing force for all subsequent steps; heating (17) the piezoelectric element and the friction element to a defined temperature above the Curie point of the piezoceramic material of the piezoelectric element and above the melting point of the low-melting glass mass; thereafter, while maintaining the temperature, applying an electric polarization voltage Up to electrodes of the piezoelectric element; removing the polarization voltage after the Curie point has been fallen below; and cooling the piezoelectric element and the friction element to room temperature without an electric voltage being applied to the electrodes.

Abstract: A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.

Abstract: A lead screw actuator device includes a base configured to support a plurality of actuators. A first bridge is supported by one of the plurality of actuators and a second bridge is supported by another one of the plurality of actuators. A nut is supported by the first bridge and the second bridge and is rotatably coupled to a screw with a sliding contact friction between the screw and the nut. The plurality of actuators generate small movements of the first bridge, the second bridge, and the nut that produce relative rotation between the nut and the screw. A method of making a lead screw actuator device is also disclosed.

Abstract: A motor includes a first vibrator, a plurality of biasing parts that are disposed around the first vibrator and that presses the first vibrator onto a contacting member in contact with the first vibrator, a first pressing member that is biased by the plurality of biasing parts and that includes a pressing part pressing the first vibrator by biasing force of the plurality of biasing parts, and a second pressing member that is biased by the plurality of biasing parts. The first vibrator and the contacting member move relatively by vibrations that occur in the first vibrator. The first and second pressing members integrally moves while the first vibrator moves. The first pressing member and the first vibrator are tiltable around a first direction orthogonal to both of a moving direction of the first vibrator and a biasing direction of the plurality of biasing parts.

Abstract: Micromachined microelectromechanical systems (MEMS) based resonators offer integration with other MEMS devices and electronics. Whilst piezoelectric film bulk acoustic resonators (FBAR) generally exhibit high electromechanical transduction efficiencies and low signal transmission losses they also suffer from low quality factors and limited resonance frequencies. In contrast electrostatic FBARs can yield high quality factors and resonance frequencies but suffer from increased fabrication complexity. lower electromechanical transduction efficiency and significant signal transmission loss. Accordingly, it would be beneficial to overcome these limitations by reducing fabrication complexity via a single metal electrode layer topping the resonator structure and supporting relatively low complexity/low resolution commercial MEMS fabrication processes by removing the fabrication requirement for narrow transduction gaps.

Abstract: A spacecraft including a frame including a joint coupling a first frame portion to a second frame portion, and an acoustic communication system configured to transfer acoustic data signals across the joint between the first frame portion and the second frame portion.

Abstract: A piezoelectric actuator includes a vibrating plate having a piezoelectric material, and a contact part provided in an end portion of the vibrating plate in contact with a driven part, wherein the contact part has a first portion in contact with the driven part and a second portion provided between the first portion and the vibrating plate and having lower rigidity than the first portion. Further, a width of the second portion in a direction crossing an arrangement direction of the first portion and the second portion is smaller than a width of the first portion in the crossing direction.

Abstract: A piezoelectric element that includes a plurality of laminated piezoelectric films and adhesive layers. The piezoelectric films stretch and contract in a predetermined direction parallel to principal surfaces thereof when a voltage is applied thereto. The adhesive layers are formed partially between the piezoelectric films when seen from a plan view, are aligned at intervals in the predetermined direction of the stretching and contracting of the piezoelectric films and bond the piezoelectric films to each other. The adhesive layers are formed at both ends of the piezoelectric films in the predetermined direction.

Abstract: A vibration type actuator includes a first member that has a vibrator; a second member that extends in a predetermined direction and has a friction sliding surface where the vibrator is press-contacted; a third member that rotatably holds the second member with respect to an axis parallel to the predetermined direction; and a pressing unit that generates a first force for rotating the second member with respect to the axis relative to the third member. The first member is sandwiched between the second member and the third member by the first force. The first member is driven in a driving direction parallel to the predetermined direction relative to the second member by the vibration of the vibrator.

Abstract: A vibration driven actuator includes a vibrator, a vibrator holder, a friction member, a pressing member that enables the vibrator to compressively contact the friction member in a first direction, and a pressure transmitting member disposed between the vibrator and the pressing member. The vibrator and the friction member relative move in a second direction orthogonal to the first direction due to the vibration. A first contact portion disposed to one of the vibrator holder and the pressure transmitting member contacts a second contact portion disposed to the other of the vibrator holder and the pressure transmitting member so as to restrict a relative displacement between the vibrator holder and the pressure transmitting member in the second direction, and to allow a relative rotation between the vibrator holder and the pressure transmitting member on a plane parallel to the first direction and the second direction.

Abstract: The lens drive device is provided with an autofocus drive unit and a shake correcting drive unit. A second support for supporting a shake correction moving part in a state separated from a shake correction fixed part has a power supply line for supplying power to an autofocus coil from the shake correction fixed part. An autofocus moving part has power supply line connection parts for electrically connecting the autofocus coil and the power supply line at two positions opposite each other in a first direction orthogonal to the optical axis. First supports for supporting the autofocus moving part in a state separated from an autofocus fixed part are disposed at two positions opposite each other in a second direction orthogonal to the optical axis of the autofocus moving part, and have a self-holding mechanism for holding the position of the autofocus moving part in the optical axis direction.

Abstract: A vibration actuator can be reduced in manufacturing cost and size thereof without using a magnet. An elastic body of a vibration element includes a base portion joined to an electromechanical energy conversion element, and a pair of contact portions extending from the base portion. The contact portions are brought into pressure contact with a driven element, by elastic deformation, in a third direction orthogonal to both of a first direction of relative motion of the vibration element and the driven element and a second direction as a thickness direction of the conversion element. When driving vibration is excited in the vibration element by applying a predetermined AC voltage to the conversion element, the contact portions apply frictional driving forces to the driven element, for moving the vibration element and the driven element relative to each other in the first direction.

Abstract: A vibration drive device giving an appropriate click feeling when an operation member driven by a vibration actuator is manually operated. A controller applies, to a piezoelectric element, a drive signal for exciting, in an elastic body joined to the piezoelectric element, only a first vibration perpendicular to a contact surface between the elastic body and a driven element, or the first vibration and a second vibration parallel to the contact surface. When the position of the operation member is outside a driving section, only the first vibration is excited, whereas when within the driving section, the first vibration and the second vibration are excited so as to make the position closer to a target position set within the driving section. Application of the drive signal is stopped when the position is in a section in the driving section for a predetermined time period.

Abstract: A method and device are disclosed for actuating a piezoelectric motor by two driving electrodes by applying periodic control voltages to the driving electrodes. A simplified closed-loop control of the piezoelectric motor is realized by reducing the static friction of a friction contact between a friction element of the piezo-electric motor and an output element to be driven by the friction element without a propulsion of the output element at the same time. In exemplary embodiments, the periodic control voltages are applied with a phase shift to the driving electrodes in a first step of the method, and in a second step of the method, the amplitude ratio of the periodic control voltages is changed with respect to the first step.

Abstract: An optical device includes: an optical element; a housing unit configured to accommodate the optical element; a support part configured to pivotally support the optical element to be tiltable with respect to the housing unit; a piezoelectric element configured to connect the optical element and the housing unit to each other; and an electrode arranged at the piezoelectric element.

Abstract: When an actuator using a conventional piezoelectric element is used as a general-purpose mechanical component, such as a linear actuator and an electric cylinder, the absence or weak constraint of a guide in the moving direction causes the problem that the moving direction of a moving member is changed or the moving member is rotated due to a change in the posture of the moving member by an external force. A restraint member presses a rectangular parallelepiped-shaped output shaft, which has high stiffness, thermal conductivity, and lubricity and to which a piezoelectric element is attached at one end, against a guide member so as to limit the degree of freedom to one degree, in order to realize a linear actuator, an electric cylinder, and a force generation device that can be used for general purposes and have a high straight movement property.

Abstract: Included are a vibrator including a protruding portion that performs high frequency vibration; a friction member, the vibrator being pressed to cause the protruding portion to abut to the friction member; a fixing member to which either the vibrator or the friction member; a movable member that moves integratedly with either the vibrator or the friction member; a plurality of rotating members enabling relative movement between the friction member and the movable member; and a falling off restriction portion that prevents the rotating members provided in either the fixing member or the movable member from falling off, wherein the falling off restriction portion abuts to an opposed portion opposed to the falling off restriction portion to restrict a movable range of the movable member in a pressing direction and to prevent the rotating members from falling off.

Abstract: The invention relates to an ultrasonic motor, comprising a piezoelectric ultrasonic actuator (1) having four friction elements (4) disposed thereon, a friction surface (6) which is in frictional contact with the friction elements, and an electrical excitation device (16), wherein the ultrasonic actuator is in the shape of a ring or hollow cylinder, having an inner circumferential surface (14), an outer circumferential surface (12) and two planar end surfaces (5) connecting the inner and the outer circumferential surfaces.

Abstract: Provided is a piezoelectric driving device for a motor including: a vibrating plate which includes a fixed portion and a vibrator portion in which a piezoelectric element is provided and which is supported by the fixed portion; and a contact portion which comes into contact with a driven body and transmits motion of the vibrating plate to the driven body, in which the fixed portion, the vibrator portion, and the contact portion are provided along an X direction in this order, when seen in a Y direction, when two directions parallel to a main surface of the vibrating plate and orthogonal to each other are set as the X direction and the Y direction and a direction orthogonal to the main surface of the vibrating plate is set as a Z direction.

Abstract: A single hybrid motor of the present invention has a rotor, a first stator, a first torsional vibrator, a first longitudinal vibrator, a first template, and a first connecting element. One end of the first connecting element is connected with the rotor, the first torsional vibrator, the first longitudinal vibrator, the first template, the first elastic block and the second elastic block. The first elastic block is disposed between the rotor and the first torsional vibrator. The second elastic block is disposed between the first template and the first longitudinal vibrator. Adjusting the length of the first elastic block or/and the second elastic block allows the first torsional vibrator and the first longitudinal vibrator of the single hybrid motor to obtain a plurality of sets of resonance frequencies within a degeneracy range.

Abstract: A vibration wave motor includes: a vibrator including a vibration plate and a piezoelectric element; a friction member frictionally contacting the vibrator; a pressing member generating a pressing force to bring the vibrator in frictional contact with the friction member; and a pressing force transmitting member between the vibrator and the pressing member to transmit the pressing force to the vibrator. The vibrator and the friction member move in a relative movement direction by an elliptical vibration, and the pressing force transmitting member includes: an engagement portion formed near a contact portion with the pressing member and engaged with the pressing member; a first restricting portion restricting movement in the relative movement direction; and a second restricting portion. restricting movement in a direction perpendicular to a pressing direction by the pressing member and the direction. The pressing force transmitting member is rotatably held with respect to the pressing member.

Abstract: A piezoelectric motor includes at least two piezoelectric actuators. Each actuator includes two piezoelectric elements on opposite sides of a coupling element, the sides being main sides of the piezoelectric actuators and having a larger area than other surfaces or sides of the piezoelectric actuators. The main surfaces of each of the piezoelectric actuators connect with at least four side surfaces of the piezoelectric actuator. The motor includes an elastic element coupled to and spacing the first and second piezoelectric actuators from each other and there is also a frictional element that couples the first and second piezoelectric actuators for frictional contact for driving an object. The first and the second piezoelectric actuators are adapted to deform in a direction that is substantially perpendicular to a plane defined by the side surface to which the elastic element is attached using a longitudinal piezoelectric effect of the piezoelectric elements.

Abstract: A method of providing motion using a loop-band device is disclosed. An outer, restraining loop constrains an inner, buckling loop to form a buckled mode having one or more buckles. An activation force generated in one of buckles provides a stress, resulting in a change of configuration of the buckling loop that produces movement of the restraining loop. Depending on the composition of the buckling loop, the stress is generated via heat, light, an electric current or voltage, a magnetic field, or a combination thereof. The restraining loop is a suitably thin, relatively inextensible but flexible material. The buckling loop is a suitably thin, relatively flexible, reactive material that develops stress when subject to suitable activation forces. Suitable reactive materials include electroactive polymers, electrostrictive materials, magnetostrictive materials and materials having a high coefficient of linear, thermal expansion. The motion is linear or rotary, depending on device configuration.

Abstract: A piezoelectric driving device includes a vibrating plate and a piezoelectric vibrator provided on the vibrating plate. The piezoelectric vibrator has a first electrode, a second electrode, and a piezoelectric body located between the first electrode and the second electrode, and a thickness of the piezoelectric body is within a range from 50 nm to 20 ?m.

Abstract: A motor having a rotor, the rotor including a first metal plate having a first size and a second metal plate having a second size arranged on a first surface associated with the rotor. The first metal plate and the second metal plate are arranged adjacent to each other at a predetermined distance from an axis of rotation of the rotor. The first surface rotates perpendicularly about the axis in response to the rotor being rotated about the axis. A stator includes a third metal plate arranged on a second surface associated with the stator. The third metal plate is arranged on the second surface at the predetermined distance from the axis. The second surface is parallel to the first surface and faces the first surface.

Abstract: A driving apparatus according to the present invention includes: a movable part including a vibrator including a piezoelectric element and a pressurization part for bringing the vibrator into pressure contact with a base part by applying impression force to the vibrator, the movable part being linearly driven; and a cover part for receiving reactive force of the impression force through intermediation of a rolling part, the cover part being fixed to the base part by a holding part extending in a direction crossing a movement direction of the movable part, in which the rolling part is sandwiched by a guide part of the movable part extending in the movement direction of the movable part and a cover guide part of the cover part extending in the movement direction of the movable part, and the movable part is positioned on an outer side beyond a side of the holding part facing the movable part.

Abstract: An ultrasonic motor includes a vibrator to which a piezoelectric element is fixed and a friction member having a frictional contact surface in contact with the vibrator. A pressurizing member pressurizes the vibrator toward the friction member using a resilient force of a coil spring. A pressurizing force setting unit transmits a driving force of a pressurizing force setting motor to a holding member and then sets the pressurizing force by altering an amount of deflection of the coil spring depending on the relative position of the holding member with respect to the pressurizing member. The friction member is driven relative to the vibrator by an elliptic vibration of the vibrator in a state where the projections provided on a vibration plate are brought into pressurized contact with the frictional contact surface of the friction member by the pressurizing force.

Abstract: The invention relates to a device including: a movable element (1) comprising teeth (11; 11i, i, 11i+1, 11i+2, 11i+3, 11i+4); a driving element (2) for engaging with the teeth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e.

Abstract: An ultrasonic motor includes a vibrator configured to generate a vibration, a relatively movable member configured to be movable by the vibrator, wherein the relatively movable member is movable relatively according to the vibration of the vibrator, a holding unit configured to hold the vibrator, wherein the holding unit includes a first holding member configured to hold the vibrator and a second holding member; and a damping member provided between the vibrator and the second holding member and configured to reduce a vibration transmitted to the second holding member, a pressure unit configured to press the vibrator against the relatively movable member, wherein the second holding member is configured to press the vibrator against the relatively movable member, and wherein the first holding member is made of a material having a higher damping capability against the vibrator than a material of the second holding member.

Abstract: A six-degree-of-freedom micro vibration suppression platform includes a basic platform, a load platform, six sets of single-degree-of-freedom active and passive composite vibration isolation devices that are exactly the same and a controller. Upper and lower ends of each set of single-degree-of-freedom active and passive composite vibration isolation devices are connected with the load platform and the basic platform, respectively. A control method includes: calculating a logical axis signal, calculating a logical axis control signal, calculating physical axis real-time control signals and a transfer step.

Abstract: A piezoelectric actuator comprises a substantially rectangular parallelepiped piezoelectric element. One outer surface of the piezoelectric element includes a first region, and a second region located such as to project from the first region and to overlap a region corresponding to an active portion in the one outer surface. The second region has a flat surface configured to come into contact with a body to be driven and to generate a frictional force therewith. The flat surface is shorter in a longitudinal direction of the piezoelectric element than in a lateral direction thereof. The flat surface is longer in the longitudinal direction of the piezoelectric element at a lateral center region thereof than at a lateral end region thereof.

Abstract: There is provided a vibrator including: an elastic member of which both end portions are fixedly attached to a housing; a piezoelectric element installed on one surface of the elastic member; and a circuit board attached to the elastic member to be connected to the piezoelectric element, wherein an opening portion for a connection between the piezoelectric element and the circuit board is provided in the elastic member, and a step portion insertedly disposed in the opening portion is formed at the circuit board.

Abstract: The actuator includes a vibration plate including a fixing portion for fixing the vibration plate to a holding member, and a connection portion for connecting a center portion and the fixing portion, and is provided between a surface and a friction-sliding surface in a direction in which the vibration plate is pressed against the rotor by a pressurizing force produced by a pressure member. When finishing a surface on which a piezoelectric device is to be fixed to the vibration plate to a uniform surface by polishing, a decrease in the performance of the ultrasonic motor due to deformation of the vibration plate that is caused by warping of support portions that extend from both ends thereof or by burrs or the like can be prevented, and the time required to polish the vibration plate can be reduced.

Abstract: Apparatus and methods for control of the second order temperature dependence of the frequency of a mechanical resonating structure are described. The second order temperature dependence of frequency of the mechanical resonating structure may be non-linear. Control may be provided by doping of a semiconductor layer of the mechanical resonating structure.

Abstract: Provided is an injector in which adhesion between a stator and a rotor of an ultrasonic motor can be released efficiently. An injector (1) which injects a chemical liquid includes: an ultrasonic motor unit (3) including an ultrasonic motor (31); a drive mechanism (4) to be driven by the ultrasonic motor unit (3) so as to feed the chemical liquid when the ultrasonic motor (31) rotates forwardly; and a control device (5) which controls the ultrasonic motor (31) of the ultrasonic motor unit (3). The ultrasonic motor (31) includes a stator (32) and a rotor (33), and the control device (5) controls the ultrasonic motor (31) to alternately repeat forward rotation and reverse rotation so that adhesion between the stator (32) and the rotor (33) is released.

Abstract: Provided is an ultrasonic motor, comprising: a vibrator including a piezoelectric element and a contact surface to be brought into contact with a member to be driven, the vibrator driving the member to be driven by an ultrasonic vibration excited by the piezoelectric element; a holding part configured to hold the vibrator; a pressurization unit configured to apply a bias force for biasing the holding part toward the member to be driven so as to impress the contact surface against the member to be driven; and a fixing unit configured to support the pressurization unit, in which the holding part holds the vibrator on both sides of the contact surface in a driving direction of the member to be driven.

Abstract: A piezoelectric actuator with integrated features to provide linear displacement of a threaded rod is presented. One mechanism provides mechanically amplified piezo motion for high speed/short travel position scanning whereas the other provides a low speed/long travel piezo motorized position adjustment. Mechanical amplifier incorporates one or more piezo stacks in longitudinal axis with preload to translate an amplified motion in the order of a few times in the transverse axis, perpendicular to the piezo stack motion. The piezo amplified output travel is transmitted to the internally threaded features of the other mechanism where a screw with a ball at the end to push a desired surface for high speed scanning mode translation. The internally threaded feature of the other mechanism is also operated by a secondary piezo stack which produces slip-stick motion steps to rotate the screw in one direction or the other to produce a slow speed/long travel mode.