Abstract: An ultrasonic motor, which drives a driven member using an elliptical vibration produced by synthesizing a longitudinal vibrational mode and a flexural vibrational mode as a drive force, is configured as follows. Namely, the ultrasonic motor includes a piezoelectric device, and a feed member feeding the piezoelectric device. An extensional axis of the feed member is set to an axis different from main vibrational axes of the longitudinal vibrational mode and the flexural vibrational mode.

Abstract: A screw thread driving polyhedral ultrasonic motor includes a stator, a rotor and multiple piezoelectric plates being bonded to the stator or the rotor. The stator and the rotor have screw threads matched with each other. The stator and the rotor are connected via the screw threads.

Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.

Abstract: It is an subject of the present invention to provide a vibration actuator in which a plurality of rotors can be driven by a single vibration unit. When a composite vibrator (2) is driven to generate a composite vibration combining a plurality of vibrations, a first stator (3) and a second stator (4) vibrate, thereby causing elliptical movements in corner portions (8) and (9) of the first stator (3) and the second stator (4), respectively. As a result, a first rotor (A) abutting onto and pressurized against the corner portion (8) of the first stator (3) and a second rotor (B) abutting onto and pressurized against the corner portion (9) of the second stator (4) are rotated at the same time. Further, in this case, by selecting vibration modes of the plurality of vibrations constituting the composite vibration, the two rotors (A) and (B) can be rotated in the same direction or in opposite directions with respect to each other.

Abstract: The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means (30) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3a, 3b, 3c) mounted on the base, each nano-actuator showing a tip (4a, 4b, 4c), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.

Abstract: The invention relates to a linear ultrasound piezoelectric motor comprising a mobile element that is in frictional contact with a plate-like rectangular resonance plate, wherein the frictional surface is embodied by means of at least one of the longitudinal narrow sides of the resonance plate, and electrodes for producing acoustic vibrations which are arranged on the longitudinal wide sides of the resonance plate. According to the invention, the generator for producing acoustic vibrations is asymmetrically arranged in relation to a plane which symmetrically cross-cuts the resonance plate, and comprises two opposing electrodes generating a stationary asymmetrical space wave when excited.

Abstract: An ultrasonic linear motor includes a substrate; a vibrator disposed on the substrate having an oblique or curved face at two sides thereof forming concave receiving portions with the surfaces of the substrate; and a slider having clamping portions at two sides thereof for correspondingly clamping to the receiving portions, wherein the vibrator is for generating a driving force to the slider while connecting with a power supply, such that the clamping portions of the slider move within the receiving portions, thereby generating a linear translation. The present invention adopts a simple structure having few elements that enables easy manufacturing and integration with other elements, thus reducing manufacturing cost.

Abstract: To provide a screw fastening device that, when performing a screw tightening operation, can substantially reduce the running torque directly applied by external force 5 to a screw driving device.

Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.

Abstract: The invention relates to a miniaturizable motor (1) comprising a rotor (12) that is driven by a hollow cylindrical piezo oscillator (2). Said rotor is effectively connected to a frictional face (13) of the piezo oscillator while a main electrode or counter electrode (3) and excitation electrodes (4, 5, 6) are disposed on the surface of the hollow cylinder. The hollow cylindrical piezo oscillator is made of a monocrystalline material with a trigonal crystal system which is provided with three main electrical axes that are placed at a 120° angle relative to each other as well as an optical axis. Said optical axis encloses a 90° angle along with the point of intersection of the electrical axes while coinciding with the longitudinal axis of the hollow cylindrical piezo oscillator. Furthermore, the axial axis of symmetry of the respective excitation electrode intersects one of the main electrical axes while said axial axis of symmetry extends parallel to the optical axis.

Abstract: A micromotion mechanism having an ultrasonic motor includes: a fixing base; a moving element supported to be movable in the moving axis direction with respect to the fixing base; an oscillation element having a rectangular geometry including a first plane parallel to the moving axis direction and provided with a plurality of projections and a second plane parallel to the first plane for exciting a plurality of oscillation modes by applying a high frequency voltage signal, and a holding mechanism for holding the oscillation element with respect to the fixing base. The holding mechanism is fixed to a part of the second plane of the oscillation element, and is incorporated with a high rigidity material not including high nonlinearity elements including at least one of a friction sliding unit and a rubber member.

Abstract: A driving system in accordance with embodiments of the present invention includes a structure and a vibration system. The structure has at least one point to frictional couple to and drive a movable element in one of at least two directions. The structure also has at least two bending modes which each have a different resonant frequency. The vibration system applies two or more vibration signals which are at a vibration frequency to each of the bending modes of the structure. The vibration frequency is substantially the same as one of the resonant frequencies. At the vibration frequency one of the bending modes of the structure is vibrating substantially at resonance and the other of the bending modes of the structure is vibrating at partial resonance. The vibration system adjusts a phase shift between the two or more applied vibration signals to control which one of the at least two directions the moveable element is moved.

Abstract: An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Abstract: A motor device includes a rotor, a transmission member wound around at least a portion of an outer periphery of the rotor, a moving part connected to the transmission member to move the transmission member, and a control unit which makes the moving part perform the driving operation of moving the transmission member by a predetermined distance in a state where a torque transmission state is brought between the rotor and the transmission member, and the returning operation of returning the transmission member to a predetermined position in a state where the torque transmission state is released.

Abstract: A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.

Abstract: A driver (100f) comprises a base section (110), a movable stage section (130) for mounting a driven article (12), a resilient section (12) for connecting the base section and the stage section and exhibiting resiliency for moving the stage section along one direction (Y axis), and a section (161, 162, 22) which applies a shaking force to the resilient section in order to move the stage section to oscillate alone the one direction at a resonance frequency determined by the stage section and the resilient section.

Abstract: The invention relates to an ultrasound linear piezoelectric motor comprising an ultrasound oscillator (1) embodied in the form of a piezoelectric plate (4) or a cylinder shell part (3), acoustic oscillation generators (5) and a friction element (6) which frictionally interacts with a driven element (8) and is disposed in a holder. The inventive holder is embodied in the form of an elastic clamp (13) which embraces a driven element, is fixed to the ultrasound oscillator and made of a sound-conducting material.

Abstract: A ultrasonic motor includes a piezoelectric device, and friction contact members moves a driven body by a elliptical vibration. And the ultrasonic motor includes a holder member which is disposed corresponding to a node of a longitudinal vibration or in the vicinity thereof on the face of the piezoelectric device and a node of a flexural vibration or in the vicinity thereof, the holder member having an engagement convex portion and being provided with a pair of sliding contact projection portions, a position limiting member which has accommodation holes each constituted of a sliding contact concave portion for accommodating the sliding contact projection portion such that it makes a sliding contact therewith freely and an engagement concave portion for accommodating the engagement convex portion, and a pressure member which presses the holder member so as to bring the friction contact members into pressure contact with the driven body.

Abstract: A driving device includes an electro-mechanical transducer having first and second end portions opposite to each other in an expansion/contraction direction, a stationary member coupled to the first end portion of the electro-mechanical transducer, a vibration friction portion mounted to the second end portion of the electro-mechanical transducer, and a rod-shaped moving portion frictionally coupled to the vibration friction portion, whereby moving the moving portion in the expansion/contraction direction of the electro-mechanical transducer. A frictionally coupled portion has a height (a length of the vibration friction portion in a sliding direction in contact with the moving portion) which is not more than 1.15 mm.

Abstract: A linear drive ultrasonic motor includes at least an ultrasonic vibrator having a piezoelectric element, a driven member which is driven by a frictional force between the driven member and the ultrasonic vibrator, a pressing member which presses the ultrasonic vibrator such that a frictional force is generated between the ultrasonic vibrator and the driven member, a case member which accommodates the ultrasonic vibrator, the pressing member, and the driven member, and a coupling member which is coupled with the driven member at an interior of the case member. The case member includes an opening portion for allowing a part of the coupling member to pass through.

Abstract: A piezoelectric motor has a stator module (1), comprising two pairs of piezoelectric actuators (1a, 1b) and (2a, 2b) inside this stator module. The stator module is fixed by a central fixing point (A). The piezoelectric actuators (1a, 1b, 2a, 2b) are connected to the stator module via flexible or biasing elements (3), such as for instance hinges, for instance elastic hinges. The stator module (1) comprises a tuning mechanism (4), comprising at least one mass (4a, 4b) and at least one flexible or biasing element (5a, 5b, 5c, 5d), for instance leaf springs. The stator module (1) is contacted to a driven part (6), for instance a slider, at the contact point (A). The piezoelectric motor is designed such that contact point (B) is able to produce a closed trajectory, thereby inducing a relative motion of the driven part (6). The contact point (B) is moved by applying an electric field to actuators (1a and 1b) and/or by applying an electric field to actuators (2a and 2b).

Abstract: A driving apparatus comprises: an electromechanical conversion element that expands and contracts in an extending direction of a given fiducial line; a driving shaft that is fixed to one end of the electromechanical conversion element in the extending direction; a driven body that is frictionally engaged with the driving shaft; a holder that holds, through an adhesive, the electromechanical conversion element from lateral sides with respect to the extending direction; and a flange member that is provided on the driving shaft between (i) a moving region of the driven body on the driving shaft and (ii) the electromechanical conversion element.

Abstract: An ultrasonic actuator (3) includes an actuator body (4) performing a plurality of vibrations including a bending vibration, and a driver element (5) which is attached to a long side surface (40b) of the actuator body (4), and outputs a driving force by making an orbit motion in response to the vibrations of the actuator body (4). The driver element (5) is provided with an attachment surface (51), and is attached to the long side surface (40b) with the attachment surface (51) in surface contact with the long side surface (40b). A width of the attachment surface (51) in the longitudinal direction of the long side surface (40b) is smaller than a maximum width of the driver element (5) in the longitudinal direction of the long side surface (40b).

Abstract: Piezoelectric vibrators provided with an electrode that includes a drive electrode and adjustment electrodes formed in advance on part of the electrode; the drive electrode and adjustment electrodes that are initially electrically connected to each other are electrically cutoff and insulated from each other by cutting conductive parts between the drive electrode and adjustment electrodes, or the mutually insulated drive electrode and adjustment electrodes are electrically connected using solder, a wire, or another electrically conductive member, whereby the characteristic frequencies are adjusted.

Abstract: A drive unit (1) includes a stage (3), a first ultrasonic actuator (4A) for driving the stage (3) in the X direction, and a second ultrasonic actuator (4B) for driving the stage (3) in the Y direction. In driving the stage (3) in only one of the X and Y directions, one of the first and second ultrasonic actuators (4A, 4B) corresponding to the one of the directions generates a composite vibration of a longitudinal vibration parallel to a contact surface of the stage (3) and a bending vibration orthogonal to the contact surface, while the other ultrasonic actuator generates only a longitudinal vibration parallel to the contact surface of the stage (3).

Abstract: An actuator which drives a lens frame in an optical axis direction is constructed by piezoelectric elements, driving members, and a pressing spring. The piezoelectric elements are placed at opposite sides with a driven plate therebetween, and the driving members are fixed to the respective piezoelectric elements. The driving members are pressed against the driven plate from both sides by the pressing spring.

Abstract: A driving device includes an electro-mechanical transducer having first and second end portions opposite to each other in an expansion/contraction direction, a static member coupled to the first end portion of the electro-mechanical transducer, a vibration friction portion coupled to the second end portion of the electro-mechanical transducer, and a rod-shaped moving portion frictionally coupled to the vibration friction portion, whereby moving the moving portion in the expansion/contraction direction of the electro-mechanical transducer. The driving device is covered with a cabinet. An elastic member lies between the cabinet and the static member.

Abstract: A driving mechanism comprises: (i) an actuator comprising: an electro-mechanical conversion element; a driving member which is connected to one end of the electro-mechanical conversion element and moves according to elongation or contraction of the electro-mechanical conversion element; and a weight member provided on the other end of the electro-mechanical conversion element; (ii) a driven member frictionally engaged with the driving member; and (iii) a driving circuit that drives the actuator, wherein the actuator allows the driven member to move along the driving member, and the driving circuit drives the electro-mechanical conversion element at a driving frequency f which gives f?21/2·f0 when resonance frequency of a 1-freedom system is f0 in which the electro-mechanical conversion element and the driving member are designated as a mass and the weight member is designated as a spring, and driving frequency of the electro-mechanical conversion element is f.

Abstract: Contact pressures between a driven member and an ultrasonic vibrator are balanced, making the driving characteristics in the forward and reverse directions uniform, and the driven member is driven with high driving efficiency. The invention provides a pressing mechanism of an ultrasonic vibrator for pressing sliding members against a driven member, the sliding members being provided at two or more positions corresponding to antinodes of a standing wave vibration of the ultrasonic vibrator. The pressing mechanism includes a pressing member configured to make contact with the ultrasonic vibrator at two or more positions corresponding to nodes of the standing wave vibration of the ultrasonic vibrator; and pressing-force adjusting units configured to adjustably apply pressing forces, which press the sliding members against the driven member, to the pressing member at two or more separate positions in the direction of a gap between the two or more nodes of the standing wave.

Abstract: A lens driving device including: a lens barrel having at least one lens therein; an actuator having a tip friction member provided at a leading end of a body thereof to be in contact with a friction member of the lens barrel, the actuator being flexed and bent upon application of power to provide a driving force necessary for driving the lens barrel in an optical axis direction; a preload member compressing the actuator against the lens barrel to keep the friction member and the tip friction member in contact with each other; and a guiding part guiding the lens barrel to move in the optical axis direction, wherein the friction member and the tip friction member are formed of a super-hard alloy.

Abstract: An optical member driving device having a movable member formed integrally with a frame member holding an optical member, without requiring a reinforcement of any abutting regions on the driving friction member is comprising a driving friction member capable of a reciprocation in an axial direction thereof, a movable member formed integrally with a frame member holding an optical member which engages frictionally with the driving friction member, wherein the movable member is made from fiber reinforced polyphenylene sulfide formed with an injection molding process, and an engaging surface of the movable member abutting on the driving friction member is processed so as to remove some material after the injection molding process.

Abstract: A positioning device has a first unit and a second unit arranged so as to be displaceable relative to the first unit. A slip-stick drive acts between the first unit and the second unit to produce a translatory movement (P) of the two units. The positioning device has a solid-body joint which is coupled to the first unit and the slip-stick drive and which mechanically protects a translation shaft of the slip-stick drive against rotation and/or lateral displacement.

Abstract: The invention provides an ultrasonic motor including internal electrodes provided in an ultrasonic vibrator and disposed in regions where electrical charges of the same sign are generated in one vibration mode and where electrical charges of opposite sign and substantially the same amount are generated in another vibration mode; and a control unit configured to detect a phase difference between a vibration detection signal detected on the basis of electrical signals from the internal electrodes and any one of driving AC voltages, and to set a driving frequency such that the phase difference becomes a reference phase difference. Each driving AC voltage with the driving frequency set by the control unit is applied to the ultrasonic vibrator.

Abstract: A drive unit being characterized in that a movable object can be prevented from being tilted when the movable object is stopped using a restricting member. The drive unit comprises a piezoelectric element, a rod provided at an end of the piezoelectric element, a movable object frictionally engaged with the rod, and drive pulse generating means that apply drive signals to the piezoelectric element. The drive pulse generating means apply to the piezoelectric element a rectangular wave drive signal that has a duty ratio other than 0.5 and vibrates the rod so that a difference occurs between the expansion and contraction of the rod when the movable object is moved, and apply to the piezoelectric element a rectangular wave drive signal that has a duty ratio of 0.5 and vibrates the rod so that the movable object is not moved substantially when it is detected that the movable object is in contact with a restricting member.

Abstract: A driving device includes an electromechanical transducer that is extended and contracted by application of voltage, and a support member that slidably supports a movable body and that is displaced together with the electromechanical transducer to which the support member is connected, the movable body being driven along the support member with the extension and contraction of the electromechanical transducer. The movable body has a main element, a pinch member that is assembled on the main element so as to pinch and hold the support member, and a biasing member that biases the pinch member toward the support member. A part of the pinch member abuts on the support member and other part thereof is held on the main element in a cross section perpendicular to a movement direction of the movable body when the pinch member is biased by the biasing member.

Abstract: An actuator adapted to incrementally translate and/or rotate an object, the actuator comprising a body comprising a first portion, a second portion, and an opening coaxially extending from the first portion and the second portion, wherein the opening is dimensioned to accommodate a diameter or cross section of an object; a first element disposed in the first portion, and a second element disposed in the second portion, wherein the first and second elements are adapted to selectively clamp the object; a spring in operative communication with the first and second portions; and a third element fixedly attached to the first and second portions, wherein at least one of the first, second, or third elements or spring is formed of an active material.

Abstract: A driving device, comprises: an electro-mechanical conversion element enabled to expand and contract in response to input of an electrical signal; and a frictional member that is frictionally-engaged with the electro-mechanical conversion element and that is mounted on the electro-mechanical conversion element movably along a longitudinal direction of the electro-mechanical conversion element.

Abstract: A driving apparatus comprises: an electromechanical conversion element that expands and contracts in an extending direction of a given fiducial line; a driving shaft mounted on one end of the electromechanical conversion element in the extending direction; a driven member frictionally engaged with the driving shaft; a holder that supports the electromechanical conversion element and comprises a bearing portion for the driving shaft; and an inclination adjusting mechanism, disposed in the bearing portion, that adjusts inclination of the driving shaft with respect to the fiducial line.

Abstract: A driving apparatus comprises: an electromechanical conversion element that expands and contracts in an extending direction of a given fiducial line; a driving shaft that is fixed to one end of the electromechanical conversion element in the extending direction; a driven body that is frictionally engaged with the driving shaft; a holder that holds, through an adhesive, the electromechanical conversion element from lateral sides with respect to the extending direction; and a flange member that is provided on the driving shaft between (i) a moving region of the driven body on the driving shaft and (ii) the electromechanical conversion element.

Abstract: The present invention provides a piezoelectrically driven optical lens module. The piezoelectrically driven optical lens module includes at least a lens body, a guiding rod for providing an axial movement track, a piezoelectric element for providing driving force, and an elastic element for providing the piezoelectric element with pre-load, so as to allow the piezoelectric element to be in contact with the guiding rod. The lens body includes at least an enclosed hollow structure, a lens barrel axially moveable and fixed to the enclosed hollow structure, and a lens element fixed to the lens barrel. The piezoelectric element is in contact with the guiding rod via the elastic elements, and the piezoelectric element is used for driving the lens barrel to move linearly along the guiding rod. The present invention provides a piezoelectrically driven optical lens module with a simple structure, to overcome the drawbacks of the prior art.

Abstract: A spring biasing locking mechanism is provided for a step and repeat motor. The motor includes a base having a channel, an output member in the channel, at least one translator drive element and first and second clamping elements. The spring biasing locking mechanism includes a locking structure joined to the base by a hinge. The locking structure spans both clamping elements. A spring biases the locking structure toward the channel so that the spring force is transmitted to the two clamping elements. The spring biased locking mechanism accommodates wear of the device, accommodates thermal expansion of the motor components, provides a limit on clamping force and provides a zero power hold condition.

Abstract: A micro manipulator for electrode movement, a driving method thereof, and a brain signal measuring device using the same are provided.

Abstract: A linear electromechanical translation apparatus is provided of the type comprising first and second clamps fixed to a support, first and second elongate movable members each extending through one of the clamps, and an extension actuator connected between the movable members and adapted to move each one of the elongate movable members longitudinally relative to the other member as the extension actuator is extended or retracted. The apparatus is characterized in that the first elongate movable member has a rear end connected to a front end of the extension actuator, and the second movable member has a rear end connected to a rear end of the actuator and has a forwardly extending elongate portion which lies beside and parallel to the first elongate movable member. Both the clamp assemblies may be located forwardly of the front end of the actuator.

Abstract: A variable inductor element has a substrate, a first inductor element which is fixedly arranged on the substrate, a second inductor element which is supported by the substrate, is magnetically coupled with the first inductor element and variably control a mutual conductance with the first inductor element, and at least one piezoelectric actuator pair which torsionally drives the second inductor element.

Abstract: An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes.

Abstract: A driving device in a lens barrel unit of a lens unit drives advancing/retreating of a lens frame holding a lens, and manual focusing. The lens frame is supported freely movably back and forth by an internal driving ring turned and driven when automatic focusing. The internal driving ring is supported by a distance ring so as to be turned and driven via an external driving ring supported turnably by a fixing frame. An operating ring is fixed on the perimeter of the distance ring, and manual focusing driving is performed by turning the operating ring. A transducer of an ultrasonic actuator is pressed against the end face of the distance ring via a driver, frictional contact force between the distance ring and the driver is adjusted by applying flexion standing wave vibration to the transducer, and the amount of turning operating force of the operating ring can be increased/decreased over a wide range.

Abstract: A driving mechanism includes a driven member partially having a spherical surface, piezoelectric units that support the driven member between them and drive the driven member, and a base that holds the piezoelectric units. Each of the piezoelectric units includes a driving portion having a flat surface in contact with the spherical surface of the driven member, a first piezoelectric element that moves the driving portion along a first axis parallel to the flat surface, a second piezoelectric element that moves the driving portion along a second axis that is parallel to the flat surface and intersects the first axis, and a support member that supports the driving portion through the first and second piezoelectric elements.

Abstract: A mover assembly (16) that moves or positions an object (12) includes a mover output (222), an actuator (344), and a mover housing assembly (220). The mover output (222) is connected to the object (12), and the actuator (344) causes the mover output (222) to move. The mover housing assembly (220) seals many of the other components of mover assembly (16), including the actuator (344) within a clean, nonvolatile, housing chamber (420) that isolates all contaminants from the outside working environment.

Abstract: An electron microscope stage mechanism capable of performing high-accuracy positioning while limiting vibration and drift. An ultrasonic motor is used in a stage drive mechanism, and a fixing mechanism capable of increasing stop stiffness is combined integrally with the motor. That is, a structure in which a piezoelectric actuator of the fixing mechanism is mounted in a pre-load mechanism together with the ultrasonic motor is used. When the stage is fixed by the fixing mechanism after acceleration, deceleration and positioning of the stage performed by the drive mechanism, the piezoelectric actuators positioned on opposite sides of the stage are extended to press the stage.

Abstract: A linear actuator using a metal beam-type piezoelectric material, and an apparatus and a method for actuating the same. The piezoelectric actuator includes: a moving member having a predetermined length and moving in a forward or a backward direction; and a piezoelectric portion contacting the moving member and moving the moving member linearly using a vibration generated when a piezoelectric element contracts or expands in response to an electrical signal.