Abstract: The present invention is directed to a compliant device comprising a support body, a floating body, and a plurality of flexure arms. Each of the plurality of flexure arms is connected between the support body and the floating body to transfer a load therebetween in parallel. To that end, the flexure arms have first and second sets of flexure joints. The first set of flexure joints facilitate rotational movement of said flexure arm about a first axis extending along a first direction. The second set of flexure joints are arranged to facilitate rotational movement of the flexure arm about a second axis, extending along a second direction that is transverse to the first direction. The flexure joints are resolute joints.

Abstract: An actuator comprises: an electro-mechanical conversion element; a driving frictional member mounted onto one side in an extension/contraction direction of the electro-mechanical conversion element, the driving frictional member being frictionally engaged with a driven member; and a weight member mounted onto the other side in the extension/contraction direction of the electro-mechanical conversion element, wherein at least a part of the weight member is disposed at the one side from an end face of the other side of the electro-mechanical conversion element.

Abstract: An electromechanical motor (1), using at least two bimorph, monomorph or multimorph electromechanical actuating elements (6) interconnected by a common actuator backbone (5) is disclosed. The actuating elements (6) are controllable in both a longitudinal direction (L), i.e. in the main extension direction of the actuating element (6), and a flexural direction, i.e. bending of the actuating element (6), separately. The different actuating elements (6) can be controlled individually as well. The actuator (3) dimensions are preferably selected to resonance frequencies in vicinity of a certain frequency. The actuating elements (6) are provided with interaction portions (7) at which any contact between the actuator and a body (2) to be moved is made. In order to operate well both in fine-positioning and resonant motion, the interaction portions (7) are arranged to partially suppress the transfer of acoustic waves between the actuating elements (6) and the body (2) to be moved.

Abstract: An electromechanical motor includes a rail to be moved, a dry, non-lubricated, sliding bearing for the rail, and driving members imposing a mechanical driving force on the rail. The bearing has two rail contacting portions. A first portion contacts the rail for obstructing displacements of the rail in a first direction transverse to a main extension of the rail. The first portion also obstructs rotation of the rail around an axis parallel to the main extension. The second portion is arranged for obstructing displacements of the rail in the first direction transverse to the main extension, while allowing at least a minor movement of at least one of rotation of the rail. The motor allows for mechanical flexibility at certain selected positions and ensures immobility at other selected positions, in order to reduce the impact of externally induced displacements, torques and rotations at critical places in the motor.

Abstract: The present invention relates to a drive system comprising at least one motor with at least one vibration generator each as well as at least one resonator each and a device driven by said motor, wherein the resonator comprises a contact area that cooperates with the surface of the device in order to drive said device.

Abstract: A piezoelectric element expands and contracts when a pulse voltage is applied. A fixing body is fixed to one end of the piezoelectric element in an expansion-contraction direction. A driving shaft is fixed to the other end of the piezoelectric element in the expansion-contraction direction. A movable body is supported to the driving shaft slidably. When a pulse voltage is applied to the piezoelectric element, the piezoelectric element contracts and expands. Accordingly, the driving shaft oscillates, and the movable body slides along the driving shaft. A material of the driving shaft is fiber reinforced resin complex. A synthetic resin material composing the fiber reinforced resin complex is liquid crystal polymer or polyphenylene sulfide.

Abstract: The present invention relates to a ceramic tube type ultrasonic motor having a stator including a tube-type elastic body that is formed of a ceramic material; and a plurality of piezoelectric diaphragms that are attached on the outer peripheral surface of the elastic body in a longitudinal direction thereof and to which voltages having a phase difference are respectively applied and a rotor that is rotated by the friction with the elastic body flexurally vibrating due to the voltages applied to the plurality of piezoelectric diaphragms.

Abstract: The invention relates to an inserting and extracting device for rotatable data carrier plates which mechanically moves the data carrier plate (1) from an inserting position into a playing position before playing and back into the inserting position again after playing, with parallel guide rails (2) which extend over the full range of movement for insertion and extraction and which guide the data carrier plate (1) in grooves (5) at diagonally mutually opposed edge regions, wherein at least one of the guide rails (2) transmits to the data carrier plate (1) motion pulses in one of its directions of movement, by means of which pulses the data carrier plate (1) is moved in the insertion or extraction direction.

Abstract: The present invention provides a shear motion driven motion actuator. The motion actuator provides a plurality of driving modes to drive a main body, including the inertial drive mode, the friction drive mode and the scanning mode. The motion actuator comprises a base having a V-shape concave groove and a main body having a V-shape convex. A plurality of piezoelectric elements is provided on the base to drive the main body using the shearing deformation force of the piezoelectric elements. The present invention also provides motion control using a variety of driving modes to achieve stable, high resolution and linear driving of the main body along the base.

Abstract: A vibration wave linear motor is a vibration wave linear motor that can drive a plurality of driving targets with a simple and small configuration. In the linear motor, two guide members sandwich two vibrators, which are individually and electrically connected to a driving circuit by a flexible board and an electrode connecting part, and individually driven with an independent operation. Two lens frames are individually driven by the two vibrators via a pin member, a board spring, and an engagement protruding part. For example, in a lens apparatus, one of the two lens frames holds a lens unit in the third group, which is involved in focus achievement, whereas the other lens frame holds a lens unit in the second group, which is involved in zooming.

Abstract: In a vibration wave linear motor, a vibrator stably operates with a simple and small configuration. Both ends of a movable guide member are held by shaft bearing long holes to freely oscillate, and an angle of an inclination ? occurs according to the move of the vibrator. An inner wall of an erecting part of a supporting part also serves as a stopper, and regulates the move of the vibrator in a position where the inclination of the movable guide member becomes ?>? at the maximum. As a result, the inclination of the movable guide member is always kept to be within the range of ?>?. A problem that the inclining movable guide member contacts a portion other than a driving contacting part is prevented.

Abstract: A system having a harmonic frequency actuator system is provided including providing an actuator body, the actuator body having more than one set of fingers for generating a motion for a semi-rigid element, and attaching a high frequency actuator to the actuator body forming a harmonic frequency actuator to provide motion at predetermined frequency pairs.

Abstract: A micro position-control system capable of more precisely controlling three degree-of-freedom motions, namely, a Z-direction motion and X-axis and Y-axis rotations. The micro position-control system includes a base including a plurality of base units disposed at equal angles from the center of a motion stage, holding piezo actuators parallel to a direction of the disposition of the base units, a plurality of bridge units disposed to face the base units, converting a displacement in a length direction of the piezo actuators into a displacement that is vertical with respect to a bottom surface of the base, the motion stage making at least one of a translation motion in the vertical direction, a rotation about a first axis perpendicular to the vertical direction, and a rotation about a second axis perpendicular to both the vertical direction and the first axis, and a control unit controlling the piezo actuators.

Abstract: An actuator of the present invention comprises a piezoelectric element, one end face of the piezoelectric element in a displacement direction being supported by a fixing member, a block shaped driving member attached to the other end face of the piezoelectric element in the displacement direction, and a driven member frictionally engaged with at least one end face of the driving member in a direction orthogonal to the displacement direction, the driven member being extended along the displacement direction.

Abstract: An apparatus including a base configured to slidably engage a driven element, a piezoelectric element interposing the base and the driven element and attached to the base proximate a first piezoelectric element end, and a friction element attached proximate a second piezoelectric element end and configured to selectively engage the driven element.

Abstract: Provided is a closed-loop feedback control positioning stage comprising at least one block formed therein, a plurality of hinge mechanisms for attaching the block in the stage, at least one actuator formed in the block, the actuator adapted to bend for moving the block in at least one direction, and a plurality of strain gauges each attached in a corresponding hinge mechanism for measuring its strain. The invention can repeatedly position the block at the moved location for carrying out a highly precise positioning of the stage.

Abstract: A vibration wave linear motor comprises a vibrator unit having two driving contacting parts which are respectively formed on top and bottom surfaces of the vibrator unit, two guide members guiding the running of the vibrator unit by sandwiching the vibrator unit in parallel with the running direction. The upper guide member is fixed to the supporting member. The lower guide member is held in shaft bearing long holes, pressed upward by coil springs within hollow convex parts. The vibrator unit self-runs and moves forward and backward between the two guide members with an ultrasonic vibration. A linking pin fixed on the side surface of the vibrator unit engages with the member to be driven, so that moving force is transmitted.

Abstract: The present invention combines bending mode mechanical (frm) and electrical (fre) resonances, whereby a relatively good efficiency can be achieved within a relatively broad frequency range (?f3). An electrical resonance (frc) or mechanical resonance is designed to be situated in the same order of magnitude as another mechanical resonance (frm), but separated therefrom. Preferably, the separation (?f2) is smaller than 2f1/Q1, where f1 is the resonance frequency for the resonance having lowest quality value, and Q1 is the corresponding quality value of the mechanical resonance. An electromechanical motor comprising a driving element and electrical resonance circuit according to the above ideas may comprise a double bimorph driving element having one single actuating point influencing a body to be moved. The double bimorph driving element is excited in bending vibrations perpendicular to a main displacement direction, whereby both tangential and perpendicular motions are created by bending mode vibrations.

Abstract: A piezoelectric motor that allows movement of an arbitrary object in an arbitrary direction is described. The piezoelectric motor includes at least two piezoelectric drives positioned to direct energy at an angle to each other. A contact element translates the energy from the piezoelectric drives to an object, thereby moving the object in the desired direction.

Abstract: A micromanipulator for positioning/localization of an operating instrument coupled therewith. The micromanipulator controls movement of the operating instrument in a single- or multi-axial system of coordinates with one or more electrical actuators. The electrical actuators are especially for providing a substantially elongated structure for the micromanipulator. The one or more actuators including a piezoelectric bender enable the positioning/localization of the operating instrument for providing at least one desired direction of motion.

Abstract: The present invention comprises a first vibrator comprising a piezoelectric unit and at least one driving contacting part which vibrates by applying a predetermined voltage thereto, a second vibrator which comprises a piezoelectric unit and a plurality of driving contacting parts which vibrate by applying a predetermined voltage thereto, a pressing component which relatively presses the opposing parts of both the first vibrator and the second vibrator, and a driven component which is sandwiched between the first and second vibrators, in contact with the driving contacting part of the first and second vibrators which are pressed by the pressing component, and supported to enable movement with respect to the first and second vibrators in the long-side direction perpendicular to the direction relative to the opposing part.

Abstract: A manipulator includes a spherical shell movable member, a manipulating member integrally mounted on the spherical shell movable member, and a vibration member in contact with the spherical shell movable member and vibrating so that the spherical shell movable member rotates about a plurality of axes. The manipulating member has a manipulation distal end portion placed near a center of the spherical shell movable member, and all of the axes intersect at one point near the center of the spherical shell movable member.

Abstract: A piezoelectric motor comprising: a piezoelectric vibrator (50) having a surface comprising a localized non-planar shaped first surface region thereon which first surface region has a shape different from the shape of the surface on which it is located; and a friction nub (52) formed with a second surface region that is substantially a negative relief of the first surface region, which first and second regions are bonded together. Preferably the friction nub (52) is detachably mounted to the vibrator (50) via a boss (54) waving a protuberance (56) of conical shape. Alternatively the friction nub (52) has a protuberance (76) which is form-fitted to a recess (72) in the vibrator (50) or boss (70), respectively. First and second surface regions can also be threading surfaces.

Abstract: A piezoelectric actuator A has an oscillator 10 that has a flat base layer 32 and piezoelectric elements 30, 31 layered on the base layer 32 and oscillates as a result of a drive signal applied to the piezoelectric elements 30, 31, and a rotor 100 driven by vibrations from the oscillator 10. The piezoelectric actuator A includes a fastening part 11 for securing the oscillator 10, and lead substrates 14A, 14B that are secured to the fastening part 11 for applying a drive signal to the piezoelectric elements from a drive circuit 500 for driving the piezoelectric elements 30, 31. The lead substrates 14A, 14B have connecting parts 17A–17C extending to the power supply electrodes 33A, 33C and a detection electrode 34.

Abstract: A holographic apparatus including an actuated mirror includes a fixed body having a first piezo-actuator protrudingly installed thereat; a movable body rectilinearly movable and having a second piezo-actuator protrudingly installed thereat; a rotatable body mounting thereon a mirror and rotatably installed at the movable body; and springs for connecting the fixed body and the movable body and connecting the movable body and the rotatable body to enable a rotational movement of the rotatable body and a rectilinear movement of the movable body. A first prominence is installed at the movable body and in contact with a first piezo-actuator and a second prominence is installed at the rotatable body and in contact with a second piezo-actuator. Moreover, the first and the second piezo-actuators are controllable to be expanded or contracted.

Abstract: A first drive shaft is disposed with a first piezoelectric element at one end and a second piezoelectric element at the other end. A second drive shaft is disposed with the second piezoelectric element at one end and a third piezoelectric element at the other end. First and second lens holding frames are frictionally engaged with the first and second drive shafts respectively in a slidable manner. The first, second and third piezoelectric elements are expanded and contracted according to a drive signal and move the first and second lens holding frames in an axial direction respectively. When the moving velocity of the first and second lens holding frames are reduced, the phase difference between the drive signals, which are output to the respective piezoelectric elements, is adjusted so that the moving velocity becomes higher.

Abstract: A vibrator of a vibration wave linear motor comprises two and one driving contacting parts respectively on top and bottom surfaces. A first guide member contacts the two driving contacting parts on the top surface, and both ends of a second guide member are pressed upward by spiral springs, and pressing forces are applied respectively between the driving contacting parts and the first and the second guide members. The three driving contacting parts convert elliptical vibrations, which are generated by applying a voltage to a vibrator unit, into driving force, whereby the vibrator self-runs in a direction indicated by a bidirectional arrow d with reference to the first and the second guide members. The self-running of the vibrator is conveyed, via a pin member and an engaging protruding part, to the lens frame, which then slides.

Abstract: A manipulator includes a manipulating target object manipulating member which is driven and controlled by a plurality of free rotation axes. All of the free rotation axes cross at one point, and a manipulation distal end portion of the manipulating member is placed near the intersection.

Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

Abstract: A positioning device provides the capability of moving an object in both a linear and a rotational direction. The positioning device includes a first piezo stack with plural piezo plates that are capable of movement in orthogonal directions with respect to each other. The positioning device further includes a second piezo stack with plural piezo plates that are capable of movement in orthogonal directions with respect to each other. The positioning device also includes a first bearing that is disposed against the first piezo stack. The positioning device further includes a second bearing that is disposed against the second piezo stack. The positioning device also includes a spring element and a fifth bearing that is disposed against the spring element. The first through fifth bearings are disposed around and against the object to be positioned, to provide for positioning of the object in at least one of a linear direction and a rotational direction.

Abstract: A compact electronic selection card applicable for use in Jacquard equipment, having a high-density array of selecting hooks which are individually positioned by piezoelectric actuator elements. Each piezoelectric element directly controls a selecting hook for engaging a corresponding hooked rod connected to a warp yarn. The engaged rods are then lifted to form the shed. Because each element directly positions the hook rather than indirectly controlling a positioning mechanism, the selection card is mechanically simple and compact.

Abstract: Electromechanical translation apparatus provides power-off clamping because each clamp assembly comprises pressure means and clamp actuator means acting in opposition. The pressure means is arranged, when the actuator is de-energized, to apply clamping force to releasably clamp the associated movable member to the clamp assembly. The clamp actuator means is arranged, when energized, to act against the pressure means to release the movable member.

Abstract: A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates.

Abstract: The invention relates to a device for displacing a moving part along a longitudinal axis relative to a housing, said device being symmetrical about a plane extending longitudinally relative to the moving part, the device comprising two structures that are secured to said moving part and elements of active material comprising at least two blocks extending between inside walls of each structure, with the elongation directions of the blocks being antisymmetrical about an axis substantially perpendicular to the displacement axis of the moving part, wherein the structures are flexible and suitable for displacing the moving part by deforming as a function of the elongation of the blocks.

Abstract: A vibration type drive unit comprises a vibrator made of an elastic body to which an electromechanical energy conversion element is fixed and a moving element which is in contact with a surface of the vibrator so that by applying an alternating signal to the electromechanical energy conversion element. A progressive wave is generated on a surface of the vibrator to move the moving element, wherein the vibrator has a plate-like elastic body and a column-like elastic body, the electromechanical energy conversion element is fixed to a side surface of the plate-like elastic body. The column-like elastic body is formed on a central portion of a surface of the plate-like elastic body which is different from the surface to which the electromechanical energy conversion element is fixed.

Abstract: The present invention discloses a control apparatus for a vibration type actuator that can perform the drive of a driven member in a short time. The control apparatus for a vibration type actuator that excites vibration in a vibration body by applying a frequency signal to an electro-mechanical energy converting element and relativity moves the vibration body and a contact body contacting to this vibration body includes a determination unit determining the drive direction of the vibration type actuator, and a frequency setting unit modifying a frequency of the frequency signal according to whether the drive direction of the vibration type actuator determined by the determination unit is the same as or reverse to the last drive direction at the startup of the vibration type actuator.

Abstract: A piezoelectric motor has a vibrating body for undergoing vibrational movement in accordance with a vibration wave, a contact member disposed in contact with and driven by the vibrating body during vibration thereof, and a support member for supporting the vibrating body in the vicinity of a vibration node of the vibration wave. A pressurization member applies pressure to the support member along a pressurization axis to maintain the vibrating body in pressure contact with the contact member so that during vibration of the vibrating body, the support member regulates movement of the vibrating body in a direction of rotation about the pressurization axis.

Abstract: A method and structure for an optical switch. A channel is housed within a solid material. Contacts coupled to the channel are further coupled to the solid material, while a plurality of piezoelectric elements are coupled to chamber and further coupled to a slug. Optical waveguides are coupled to the channel. The contacts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. One or more piezoelectric elements are actuated, causing the slug to be moved within the channel. The motion of the slug is operable to block or unblock one or more of the plurality of optical waveguides.

Abstract: A piezoelectric optical relay array having one or more array elements. Each array element contains a transparent mirror housing, located at the intersection of two optical paths. A liquid metal slug is moved within a channel passing through the transparent mirror housing by the action of piezoelectric elements. The liquid metal slug is moved in or out of the transparent mirror housing to select between the optical paths. When the liquid metal slug is within the transparent mirror housing, an incoming optical signal is reflected from a reflective surface of the slug. The liquid metal of the slug adheres to wettable metal surfaces within the channel to provide a latching mechanism.

Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

Abstract: A piezoelectric relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An electrical circuit passing between fixed contact pads in the switching channel is completed or broken by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by an electrically conductive liquid, such as a liquid metal, that wets between the solid slug and the contact pad in the switching channel. The surface tension of the, liquid provides a latching mechanism for the relay.

Abstract: A method and structure for an electrical switch. A gas-filled chamber is housed within a solid material. Contacts within the gas-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements within the gas-filled chamber are also coupled to the solid material. A slug within the gas-filled chamber is coupled to one or more of the plurality of contacts and further coupled to one or more of the plurality of piezoelectric elements. A liquid metal within the gas-filled chamber is coupled to the slug, and coupled to the plurality of contacts. One or more of the piezoelectric elements are actuated, with the actuation of the one or more piezoelectric elements causing the slug coupled to the one or more piezoelectric elements to move from a first number of contacts to a second number of contacts wherein the first number of contacts and the second number of contacts are wetted by the liquid metal.

Abstract: Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.

Abstract: A positioning device provides the capability of moving an object in both a linear and a rotational direction. The positioning device includes a first piezo stack with plural piezo plates that are capable of movement in orthogonal directions with respect to each other. The positioning device further includes a second piezo stack with plural piezo plates that are capable of movement in orthogonal directions with respect to each other. The positioning device also includes a first bearing that is disposed against the first piezo stack. The positioning device further includes a second bearing that is disposed against the second piezo stack. The positioning device also includes a spring element and a fifth bearing that is disposed against the spring element. The first through fifth bearings are disposed around and against the object to be positioned, to provide for positioning of the object in at least one of a linear direction and a rotational direction.

Abstract: A vibration wave driving apparatus for obtaining driving force in 3D directions comprises a vibration member having a shape that is line-symmetrical with respect to two orthogonal axes, electro-mechanical energy conversion elements which can selectively excite in the vibration member three different types of bending vibrations, which each displace in a direction perpendicular to the two axes, and a driven member which is brought into contact with driving portions of the vibration member and driven by vibration excited in the vibration member.

Abstract: There is provided a position control apparatus and method for a table member which is capable of controlling the positioning of the table through very small displacement thereof, to thereby prevent the position of the table from deviating even when a disturbance such as vibration is applied to the table. A table member is movable relative to the base member in a predetermined direction. A threaded shaft is rotatably mounted on a base member and elastically deformable when twisted. A motor is coupled to one end of the threaded shaft, for rotating the threaded shaft to displace the table member. A pressurizing and fixing member is arranged in the vicinity of a location where the motor is coupled to the threaded shaft, for pressurizing the threaded shaft to be fixed in position.

Abstract: A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of X-axis, Y-axis or Z-axis of rectangular coordinates. The 3-axis straight-line motion stage comprises a bottom plate 40 having predetermined area and thickness; a X-axis stage 10 fixed in a reference area RR of the bottom plate 40 for moving in the direction of X-axis a first X area RX1 positioned from the reference RR to the direction of X-axis; a Y-axis stage 20 positioned within the first X area RX1 and fixed in a second X area RX2 within the first X area RX1 for moving in the direction of Y-axis a second Y area RY1 positioned from the second X area to the direction of Y-axis; and a Z-axis stage 30 fixed in the second Y area RY2 within the first Y area RY1 and supporting a predetermined sample for moving the sample in the direction of Z-axis.

Abstract: The warning tone transmitter (10) according to the invention has a piezoelectric horn element (12) with two input connectors (29, 30) for the application of the supply voltage at a determined frequency and has a circuit arrangement (14) fed from the current supply, which generates the supply voltage. In order to be able to receive confirmation that the horn signal is actually generated by the warning tone transmitter (10) and in order to be able more easily to calibrate the warning tone transmitter (10) such that it is driven at its resonant frequency the piezoelectric horn element (12) has an additional output connector (34), which, when the horn element (12) is fed with the supply voltage, generates an answering signal taken to the circuit arrangement (14) if the piezoelement is actually oscillating. The magnitude of the answering signal is a value for the sound volume of the warning tone transmitter (10).

Abstract: In order to provide a multi-degree-of-freedom drive mechanism which is capable of preventing a malfunction with a simple structure, the multi-degree-of-freedom drive mechanism includes at least two first and second actuators which generate lengthwise resonance in drive shafts by means of electro-mechanical transducers in a state that driven members are frictionally engaged with the drive shafts to which the electro-mechanical transducers are fixed at its one end, respectively, so as to be capable of moving the driven members along the drive shafts. The other end of the drive shaft of the second actuator is fixed to the driven member of the first actuator 10 directly or via another actuator, and the first and second actuators are composed so that resonating frequencies of their drive shafts are different from each other.

Abstract: The invention relates to a piezoelectric drive which is used to create a relative movement between a first and a second body on a plane of movement. Said drive consists of a flat metal sheet (1) which forms the first body or is fixed thereto and which is arranged parallel to the plane of movement. The metal sheet (1) has a rest region (3) and at least one resonator area (4). An elastic spring area (5), which is parallel to the plane of the metal sheet is disposed between the rest region (3) and the resonator area (4). A flat, rectangular piezoelement (6) which can be excited in a 3,1 mode is coupled to a longitudinal axis (A) in such a way that the longitudinal axis of the piezoelement (6) lies essentially on a longitudinal axis of the resonator area (4), said resonator area (4) protruding above the piezoelement (6) in the direction of said longitudinal axes (A), and forms a tapered horn shape (7).