Electrode Arrangement Patents (Class 310/365)
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Patent number: 12655548Abstract: The acoustic fiber transducer has a piezoelectric domain with Young's modulus, Epiezo, and including a non-centrosymmetric crystalline-phase piezoelectric material and inorganic piezoelectric particles. At least one charge collector domain is in electrical connection with the piezoelectric domain and includes an electrically conductive material operative to collect electrical charge generated in the piezoelectric domain. At least one electrical conductor is in electrical contact with the at least one charge collector domain and includes an electrically conductive material operative to transport electrical charge from a charge collector domain to an end of the acoustic fiber transducer as an electrical signal indicative of input acoustic sound pressure on a matrix of textile fibers that includes the acoustic fiber transducer. Outer acoustic energy transmission material has a Young's modulus Etrans, of 0.3 Pa-500 MPa, for matching vibrational modes of the textile fiber matrix.Type: GrantFiled: July 9, 2021Date of Patent: June 16, 2026Assignee: Massachusetts Institute of TechnologyInventors: Yoel Fink, Wei Yan
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Patent number: 12628565Abstract: A piezoelectric device that exhibits good piezoelectric characteristics, while reducing generation of leakage current paths, and a method of manufacturing the same, are provided. The piezoelectric device has a multilayer stack in which a first electrode, a piezoelectric layer, and a second electrode are stacked in this order on a substrate, wherein at least the first electrode is formed of an amorphous oxide conductor.Type: GrantFiled: September 26, 2019Date of Patent: May 12, 2026Assignee: NITTO DENKO CORPORATIONInventors: Naoki Nagaoka, Daisuke Nakamura, Manami Kurose
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Patent number: 12576004Abstract: A mask according to an embodiment comprises: a body having a shape corresponding to a user's face; a first recess disposed on one surface of the body, opposite to the user's face; and a piezoelectric part disposed in the first recess, wherein the first recess has a shape recessed outward from the one surface of the body and is disposed in a region corresponding to at least one of the user's brow region and eye rim regions, and the piezoelectric unit protrudes beyond the one surface toward the user.Type: GrantFiled: September 1, 2020Date of Patent: March 17, 2026Assignee: LG INNOTEK CO., LTD.Inventors: Beom Sun Hong, Hae Rok Son, Gyu Lin Lee, Min Seok Oh, Mi Sun Lee
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Patent number: 12533711Abstract: Provided herein are micromachined ultrasonic transducers as well as imaging devices and assemblies comprising micromachined ultrasonic transducers (MUTs). The MUTs described herein have a plurality of membranes so as to improve acoustic power at higher frequencies.Type: GrantFiled: September 2, 2022Date of Patent: January 27, 2026Assignee: Exo Imaging, Inc.Inventors: Haesung Kwon, Brian Bircumshaw, Sandeep Akkaraju
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Patent number: 12525954Abstract: A crystal resonator includes a crystal plate and an electrode set. The crystal plate includes a first vibration section and a second vibration section arranged along an oscillating direction, and exhibits a thickness shear mode. The electrode set includes a first electrode pair disposed on the first vibration section, and a second electrode pair disposed on the second vibration section. The first electrode pair and the second electrode pair are configured to apply the applied voltages with opposite electrical polarities to the first vibration section and the second vibration section, respectively, which causes the first vibration section and the second vibration section to dynamically deform in the thickness shear mode along the oscillating direction, and do out of phase motion with respect to each other.Type: GrantFiled: August 29, 2024Date of Patent: January 13, 2026Assignee: TAITIEN ELECTRONICS CO., LTD.Inventors: Chien-Cheng Yang, Shing-Tai Song, Sheng-Shian Li, Po-Cheng Hsieh, Chin-Yu Chang
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Patent number: 12525941Abstract: Disclosed are methods of preparing a Surface Acoustic Wave (SAW) device, comprising: sequentially depositing a Cu electrode, a silicon oxide film, modifying the surface of the silicon oxide film, and then depositing a piezoelectric film, and an Al electrode on a substrate having an interdigital (IDT) electrode pattern to obtain the SAW device. In some embodiments, the Cu and Al electrodes both have IDT electrode patterns corresponding to the IDT pattern of the substrate. Because the Sezawa wave mode that is adopted is formed by coupling film thickness vibration and transverse vibration, the present invention is characterized in that a longitudinal electric field and a transverse electric field are excited through the double-layer electrodes whereby the electromechanical coupling coefficient of the SAW device can be improved by changing the coupling pattern between the electric fields and the piezoelectric film.Type: GrantFiled: July 14, 2020Date of Patent: January 13, 2026Assignee: TSINGHUA UNIVERSITYInventors: Feng Pan, Rongxuan Su, Fei Zeng, Junyao Shen, Sulei Fu
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Patent number: 12519454Abstract: An acoustic wave device includes a first resonator, a first functional electrode provided on one of first and second main surfaces and a first dielectric film on the one of the first and second main surfaces, a second resonator sharing the piezoelectric layer with the first resonator and including a second functional electrode on one of the first and second main surfaces, a second dielectric film on the first main surface and a third dielectric film on the second main surface. The piezoelectric layer includes first and second resonator portions in which the first and second resonator are respectively provided. When thicknesses of the first resonator portion, the second resonator portion, the first dielectric film, the second dielectric film, and the third dielectric film are represented by tp1, tp2, ts1, ts2, and ts3, respectively, ts1/tp1<(ts2+ts3)/tp2 is satisfied.Type: GrantFiled: October 13, 2023Date of Patent: January 6, 2026Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Sho Nagatomo
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Patent number: 12512512Abstract: Provided are a composite that can be suitably used as an electrolyte in polymer-based solid-state batteries, and various electrochemical devices using the composite. The composite includes a fluorine-containing elastomer and an alkali metal salt as essential components, wherein the fluorine-containing elastomer is an amorphous fluorine-containing elastomer having a glass transition temperature of 25° C. or less, and the composite has a volatile content of 0.1 mass % or less with respect to the entire composite.Type: GrantFiled: April 28, 2021Date of Patent: December 30, 2025Assignee: DAIKIN INDUSTRIES, LTD.Inventors: Akinori Tani, Junpei Terada, Takaya Yamada, Kae Fujiwara
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Patent number: 12481151Abstract: Embodiments of the disclosure provide a scanner for steering optical beams. In certain configurations, the scanner may include a micro-electromechanical system (MEMS) scanning mirror independently rotatable around a first axis and a second axis orthogonal to the first axis. The scanner may further include a piezoelectric actuator coupled to the MEMS scanning mirror, where the piezoelectric actuator has a first pair of piezoelectric electrodes configured to drive the MEMS scanning mirror to rotate around the first axis, and a second pair of piezoelectric electrodes configured to drive the MEMS scanning mirror to simultaneously rotate around the second axis.Type: GrantFiled: December 27, 2021Date of Patent: November 25, 2025Assignee: BEIJING VOYAGER TECHNOLOGY CO., LTD.Inventors: Youmin Wang, Yufeng Wang, Kong Yin Ho, Gary Li
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Patent number: 12465948Abstract: Disclosed herein is an array of ultrasound devices. Each ultrasound device includes a first piezoelectric stack carried by a membrane and forming, together with the membrane, a first piezoelectric micromachined ultrasonic transducer (PMUT), and a plurality of second piezoelectric stacks carried by the membrane and positioned about a periphery thereof, each second piezoelectric stack forming, together with the membrane, a second PMUT. During operation, the first piezoelectric stack is configured to vibrate the membrane in response to application of an alternating voltage to the first piezoelectric stack to thereby generate at least one outgoing ultrasonic pulse toward a target, and during operation, the plurality of second piezoelectric stacks are configured to generate sense voltages in response to bending thereof induced by vibration of the membrane by incoming ultrasonic reflections off the target.Type: GrantFiled: February 9, 2023Date of Patent: November 11, 2025Assignee: STMicroelectronics International N.V.Inventors: Domenico Giusti, Marco Ferrera, Fabio Quaglia
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Patent number: 12426506Abstract: A substrate having a surface coated with a piezoelectric coating I, the coating including A-xMexN, wherein A is at least one of B, Al, Ga, In, Tl, and Me is at least one metallic element Me from the transition metal groups 3b, 4b, 5b 6b the lanthanides, and Mg the coating I having a thickness d, and further including a transition layer wherein the ratio of atomic percentage of Me to atomic percentage of Al steadily rises along a thickness extent ?3 of said coating for which there is valid: ?3?d.Type: GrantFiled: July 15, 2020Date of Patent: September 23, 2025Assignee: EVATEC AGInventors: Andrea Mazzalai, Volker Röbisch, Bernd Heinz
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Patent number: 12425002Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.Type: GrantFiled: April 17, 2024Date of Patent: September 23, 2025Assignee: Qorvo US, Inc.Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
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Patent number: 12426513Abstract: An acoustic wave device includes an IDT electrode on a piezoelectric layer. The IDT electrode includes first and second electrode fingers made of an alloy film including Al and at least one of Cu, Mg, Ag, or Nd, and an overlap region in which the first and second electrode fingers overlap when viewed in the direction of propagation of acoustic waves. The overlap region includes a central region and first and second edge regions outside the central region on opposite sides in the direction in which the first and second electrode fingers extend. In at least one of the first and second electrode fingers, a concentration of the at least one of Cu, Mg, Ag, or Nd in at least a portion of the first and second edge regions is higher than that in the central region.Type: GrantFiled: July 13, 2022Date of Patent: September 23, 2025Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Katsuya Daimon, Yasumasa Taniguchi
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Patent number: 12413205Abstract: A resonator is provided that includes a vibration part, a frame, and a support arm. The vibration part includes an Si substrate that has a principal surface with a width W in an X-axis direction and a length L in a Y-axis direction. The vibration part is configured to vibrate mainly in a contour vibration mode. The support arm extends in the Y-axis direction and connects the frame to one of two ends in the Y-axis direction of the vibration part. When the principal surface of the Si substrate is viewed in a plan view, the width W is at its maximum Wmax at a point in the Y-axis direction and decreases with increasing proximity to the one of the two end portions in the Y-axis direction of the vibration part and with increasing proximity to the other end portion in the Y-axis direction of the vibration part.Type: GrantFiled: December 2, 2021Date of Patent: September 9, 2025Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Toshio Nishimura
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Patent number: 12414468Abstract: The present invention relates to a process for annealing a poled ceramic over a heating period during which the temperature is raised incrementally to “lock-in” desirable high temperature characteristics.Type: GrantFiled: June 12, 2019Date of Patent: September 9, 2025Assignee: IONIX ADVANCED TECHNOLOGIES LTDInventors: Andrew John Bell, Timothy Paul Alistair Comyn
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Patent number: 12370791Abstract: A liquid discharge device has a liquid discharge head that includes a pressure chamber substrate provided with a first pressure chamber in which a liquid is accommodated, a first piezoelectric body provided to correspond to the first pressure chamber, and a detection resistor for detecting a temperature in a vicinity of the first pressure chamber, and a decision section that decides a degree of deterioration of the first piezoelectric body based on a detection result of the detection resistor.Type: GrantFiled: March 15, 2023Date of Patent: July 29, 2025Assignee: Seiko Epson CorporationInventors: Motoki Takabe, Yu Shiozawa, Masaki Mori, Hitoshi Takaai, Eiju Hirai
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Patent number: 12375058Abstract: A vibrator device includes a first excitation electrode, a first pad electrode, and a first drawn wiring line that are disposed at a first surface of a vibrator element, a second excitation electrode, a second pad electrode, and a second drawn wiring line that are disposed at a second surface of the vibrator element, and a spiral first electrode pattern disposed at the first surface of the vibrator element. The first excitation electrode and the second excitation electrode are disposed so as to face each other with the vibrator element therebetween. A first central end section of the first electrode pattern is electrically coupled to the second drawn wiring line via a through electrode provided in the vibrator element. A first outer circumferential end section of the first electrode pattern is electrically coupled to the first drawn wiring line. The first drawn wiring line is electrically coupled to at least one of the first excitation electrode and the first pad electrode.Type: GrantFiled: February 21, 2022Date of Patent: July 29, 2025Assignee: SEIKO EPSON CORPORATIONInventors: Masataka Nomura, Norihito Matsukawa
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Patent number: 12356862Abstract: A piezoelectric device comprises at least one piezoelectric composite layer P inserted between two conductive composite layers E, each layer E forming an electrode, characterized in that: the layer P is a rubber composition containing more than 50 parts by weight per hundred parts by weight rubber, phr, of diene elastomer, a cross-linking system and at least 5 vol. %, in relation to the total volume of the rubber composition, of piezoelectric inorganic charges; and each layer E is a rubber composition containing at least 50 phr of diene elastomer, a cross-linking system, and conductive charges. A method for producing the device and a tire comprising the device are also disclosed.Type: GrantFiled: June 21, 2019Date of Patent: July 8, 2025Assignee: COMPAGNIE GENERALE DES ETABLISSEMENTS MICHELINInventors: Francois Lafort, Xavier Lebrun, Guillaume Pibre
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Patent number: 12326612Abstract: A vibrator includes an electromechanical transducer which is a piezoelectric ceramic made of sodium-potassium niobate metal oxides and whose temperature characteristics of a relative permittivity is 500 [ppm/° C.] or less in absolute value in a temperature range from ?40° C. to 170° C., wherein excitation of the electromechanical transducer produces a vibration wave. Another vibrator includes an electromechanical transducer which is a piezoelectric ceramic made of sodium-potassium niobate metal oxides and whose temperature characteristics of a relative permittivity is 390 [ppm/° C.] or less in absolute value in a temperature range from 0° C. to 60° C., wherein excitation of the electromechanical transducer produces a vibration wave.Type: GrantFiled: March 22, 2021Date of Patent: June 10, 2025Assignee: NIKON CORPORATIONInventors: Takatoshi Ashizawa, Kazutaka Watanabe, Hirofumi Takahashi
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Patent number: 12316301Abstract: A crystal resonator plate according to one or more embodiments may include: a vibrating part; an external frame part surrounding the outer periphery of the vibrating part; and a support part connecting the vibrating part to the external frame part. A first excitation electrode is formed on a first main surface of the vibrating part. A second excitation electrode is formed on a second main surface of the vibrating part. The second excitation electrode includes a pair of parallel sides parallel to each other. The first excitation electrode includes protruding parts that protrude outward from a part between the parallel sides the second excitation electrode in plan view. The protruding parts each have an outer edge shape that is not along the parallel sides in plan view.Type: GrantFiled: May 28, 2020Date of Patent: May 27, 2025Assignee: DAISHINKU CORPORATIONInventor: Wataru Nagoya
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Patent number: 12283937Abstract: Aspects of this disclosure relate to a bulk acoustic wave device with a multi-gradient raised frame. The bulk acoustic wave device includes a first electrode, a second electrode, a piezoelectric layer positioned between the first electrode and the second electrode, and a multi-gradient raised frame structure configured to cause lateral energy leakage from a main acoustically active region of the bulk acoustic wave device to be reduced. The multi-gradient raised frame structure is tapered on opposing sides.Type: GrantFiled: September 10, 2021Date of Patent: April 22, 2025Assignee: Skyworks Global Pte. Ltd.Inventors: Benfeng Zhang, Jiansong Liu, Benjamin Paul Abbott, Kwang Jae Shin, Alexandre Augusto Shirakawa
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Patent number: 12273092Abstract: A resonator device includes: a base; a resonator element that includes a resonator substrate and an electrode; a conductive layer that is disposed on the base; a metal bump that is disposed between the conductive layer and the resonator element, and that electrically couples the conductive layer and the electrode while bonding the conductive layer and the resonator element; and at least one of a first low elastic modulus layer that is interposed between the base and the conductive layer, that overlaps the metal bump in a plan view of the base, and that has an elastic modulus smaller than that of the metal bump, and a second low elastic modulus layer that is interposed between the resonator substrate and the electrode, that overlaps the metal bump in the plan view of the base, and that has an elastic modulus smaller than that of the metal bump.Type: GrantFiled: May 1, 2024Date of Patent: April 8, 2025Assignee: SEIKO EPSON CORPORATIONInventors: Junichi Takeuchi, Tomoyuki Kamakura, Ryuta Nishizawa, Yukihiro Hashi
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Patent number: 12255623Abstract: Aspects of this disclosure relate to an acoustic wave filter that includes a series a bulk acoustic wave resonator having a plurality of anti-resonant frequencies that impact a passband of the acoustic wave filter. Related bulk acoustic wave resonators, radio frequency modules, wireless communication devices, and methods of filtering radio frequency signals are disclosed.Type: GrantFiled: November 18, 2021Date of Patent: March 18, 2025Assignee: Skyworks Solutions, Inc.Inventors: Yiliu Wang, Jiansong Liu, Tomoya Komatsu
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Patent number: 12249930Abstract: An electrostatic transducer (1) includes: an insulator sheet (11); a first electrode sheet (12); a lead (30); a first bonding part (61), electrically bonding the first electrode sheet (12) with a core wire (30a) of the lead (30) in a first area (Pa) where the first electrode sheet (12) and the core wire (30a) of the lead (30) are disposed overlapping each other; and a second bonding part (62), bonding the insulator sheet (11) with a coating (30b) of the lead (30) in a second area (Pb) where the insulator sheet (11) and the coating (30b) of the lead (30) are disposed overlapping each other.Type: GrantFiled: May 7, 2023Date of Patent: March 11, 2025Assignee: Sumitomo Riko Company LimitedInventors: Shinya Tahara, Masaki Nasu, Katsuhiko Nakano
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Patent number: 12245000Abstract: A transducer comprises two piezoelectric layers attached to a substrate, two protective layers, two masses, and two stiffeners arranged at the ends of the bimorph. The transducer is made using a composite bagging process and autoclave curing. The transducer is attached to a flat panel using a parallelogram-shaped double-sided tape to form a loudspeaker or a display panel with haptic feedback. The improved transducer enables a full-range flat panel speaker with uniform frequency response over its operating frequency.Type: GrantFiled: May 25, 2024Date of Patent: March 4, 2025Assignee: FLORA INNOVATIONS INC.Inventor: Tung Thanh Nguyen
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Patent number: 12244301Abstract: A guided acoustic wave device includes a substrate, a lithium tantalate layer on the substrate, and a transducer on the lithium tantalate film. The lithium tantalate has a crystalline orientation defined by (YXl)?°, where ? is between 10° and 37°. The inventors discovered that limiting the crystalline orientation of the lithium tantalate in this manner provides significant increases in the electromechanical coupling coefficient of the acoustic wave device, thereby increasing bandwidth and improving performance.Type: GrantFiled: December 15, 2020Date of Patent: March 4, 2025Assignee: Qorvo US, Inc.Inventors: Shogo Inoue, Marc Solal
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Patent number: 12219337Abstract: Disclosed are a conductive film for a sound producing apparatus, and a sound producing apparatus. The conductive film includes a conductive layer and substrate layers bonded to two surfaces of the conductive layer, the substrate layers comprising two first substrate layers directly bonded to the conductive layer, the first substrate layers being made of a thermoplastic elastomer, and the first substrate layers are connected with the conductive layer by means of hot pressing.Type: GrantFiled: December 26, 2019Date of Patent: February 4, 2025Assignee: Goertek Inc.Inventors: Guodong Zhao, Chaofeng He
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Patent number: 12200443Abstract: Sufficient sound pressure is obtained in the mid-low range, to provide a SoT module 100 which can be applied to a variety of applications. A SoT module 100 comprises a plate-shaped piezoelectric composite 105 for generating bending vibration by the impression of an AC voltage, a plurality of elastic bodies, one ends of which are bonded to the main surface of the piezoelectric composite 105, the elastic bodies 120a and 120b transmitting vibration of the piezoelectric composite 105 and a vibration plate 130 has a main surface which is bonded to the other ends of the elastic bodies 120a and 120b, wherein the piezoelectric composite 105 comprises piezoelectric elements 110a, 110b formed in a rectangular plate, and there is a position of the centroid of the piezoelectric composite 105 between the plurality of elastic bodies 120a and 120b.Type: GrantFiled: November 10, 2021Date of Patent: January 14, 2025Assignee: MICHIHIRO CO., LtdInventors: Kyungsu Kim, Jun Oyakawa, Michihiro Yagi, Shinobu Nakamura
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Patent number: 12191840Abstract: An acoustic wave device includes a piezoelectric layer and first and second electrodes. The first and second electrodes face each other in a direction crossing a thickness direction of the piezoelectric layer. The acoustic wave device utilizes a bulk wave of a thickness-shear primary mode. The material of the piezoelectric layer is lithium niobate or lithium tantalate. The first and second electrodes include aluminum layers, respectively, on the piezoelectric layer. An orientation direction of a crystal of each of the aluminum layers is a direction orthogonal or substantially orthogonal to a second principal surface on the piezoelectric layer side of each of the aluminum layers.Type: GrantFiled: March 23, 2022Date of Patent: January 7, 2025Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Tetsuya Kimura, Sho Nagatomo, Takashi Yamane
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Patent number: 12191837Abstract: Resonator and filter devices and methods of fabrication. A resonator chip includes a substrate, a piezoelectric plate, and an acoustic Bragg reflector between the substrate and a back surface of the piezoelectric plate. A conductor pattern on a front surface of the piezoelectric plate includes a first plurality of contact pads and an interdigital transducer (IDT). The IDT and the piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. The acoustic Bragg reflector is configured to reflect the shear primary acoustic mode. An interposer has a second plurality of contact pads on a back surface. A seal connects a perimeter of the piezoelectric plate to a perimeter of the interposer. Each contact pad of the first plurality of contact pads is directly connected to a respective contact pad of the second plurality of contact pads.Type: GrantFiled: November 7, 2021Date of Patent: January 7, 2025Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Ventsislav Yantchev, Bryant Garcia, Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Patrick Turner, Jesson John
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Patent number: 12191838Abstract: Methods of fabricating resonator and filter devices. A first conductor pattern formed on a front surface of a piezoelectric plate includes a first plurality of contact pads and an interdigital transducer (IDT). The IDT and the piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. An acoustic Bragg reflector is between a substrate and a back surface of the piezoelectric plate, the acoustic Bragg reflector configured to reflect the shear primary acoustic mode. A second conductor pattern including a second plurality of contact pads is formed on a back surface of the interposer. The first plurality of contact pads is directly connected to respective contact pads of the second plurality of contact pads. A perimeter of the acoustic resonator chip is sealed to a perimeter of the interposer.Type: GrantFiled: November 7, 2021Date of Patent: January 7, 2025Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Ventsislav Yantchev, Bryant Garcia, Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Patrick Turner, Jesson John
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Patent number: 12185635Abstract: A piezoelectric transducer is provided herein, comprising a three-dimensional structure made of a plurality of peptides, the peptides being self-assembling and the structure being piezoelectric, wherein at least a portion, or each, of said plurality of peptides comprises peptides of 2 to 10 amino acid residues, provided that the plurality of peptides is not consisted of a plurality of Phe-Phe dipeptides. Further described herein are peptides having an amino acid sequence Hyp-Phe-Phe, Boc-Dip-Dip, (L)Trp-(D)Trp or (D)Trp-(L)Trp, as well as three-dimensional structures comprising such peptides.Type: GrantFiled: March 25, 2020Date of Patent: December 31, 2024Assignees: Ramot at Tel-Aviv University Ltd., Xidian UniversityInventors: Ehud Gazit, Santu Bera, Yu Chen, Sharon Gilead, Kai Tao, Sigal Lazar, Rusen Yang, Sudipta Mondal, Vasantha Basavalingappa
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Patent number: 12184265Abstract: A resonator package and a method of manufacturing the same are provided. The method of manufacturing a resonator package involves etching a lower electrode with a hardmask, in which only a portion of a thickness of the lower electrode is etched to shape the lower electrode.Type: GrantFiled: March 5, 2019Date of Patent: December 31, 2024Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Tae Yoon Kim, Yeong Gyu Lee, Moon Chul Lee, Jae Chang Lee, Duck Hwan Kim
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Patent number: 12169030Abstract: A piezoelectric valve including an actuator that drives a valve body; a valve seat plate including a valve seat that is adapted to be positioned in contact with and away from the valve body, and a discharge passage; and a body case that houses the valve seat plate, in which the actuator includes a proximal portion fixed to the valve seat plate, a piezoelectric element having one end portion connected to an attachment face of the proximal portion and extending in a first longitudinal direction, a support portion integrally formed with the proximal portion, the support portion being arranged side-by-side with the piezoelectric element and extending in a second longitudinal direction crossing the first longitudinal direction, an operating portion connected to another end portion of the piezoelectric element and to a distal end portion of the support portion.Type: GrantFiled: September 10, 2021Date of Patent: December 17, 2024Assignees: SATAKE CORPORATION, MECHANO TRANSFORMER CORPORATIONInventors: Takafumi Ito, Sze Keat Chee
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Patent number: 12166169Abstract: A solid electrolyte according to the present disclosure is represented by the following compositional formula (1). Li7-2x-zLa3(Zr2-x-zWxMz)O12??(1) In the formula (1), x and z satisfy 0.10?x?0.60 and 0.00<z?0.25, and M is at least one type of element selected from the group consisting of Nb, Ta, and Sb.Type: GrantFiled: March 9, 2021Date of Patent: December 10, 2024Assignee: SEIKO EPSON CORPORATIONInventors: Hitoshi Yamamoto, Tsutomu Teraoka, Tomofumi Yokoyama
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Patent number: 12161507Abstract: An ultrasonic transducer device comprises a piezoelectric micromachined ultrasonic transducer (PMUT), a transmitter with first and second differential outputs, and a controller. The PMUT includes a membrane layer. A bottom electrode layer, comprising a first bottom electrode and a second bottom electrode, is disposed above the membrane layer. The piezoelectric layer is disposed above the bottom electrode layer. The top electrode layer is disposed above the piezoelectric layer and comprises a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode. The controller, responsive to the PMUT being placed in a transmit mode, is configured to couple the first and second segments of the bottom electrode layer with ground, couple the first output of the transmitter with the segments of the segmented center electrode, and couple the second output with the segments of the segmented outer electrode.Type: GrantFiled: November 5, 2023Date of Patent: December 10, 2024Assignee: InvenSense, Inc.Inventors: Fabian T. Goericke, Richard J. Przybyla, Benjamin E. Eovino
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Patent number: 12155369Abstract: A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.Type: GrantFiled: September 17, 2021Date of Patent: November 26, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Toshio Nishimura, Ville Kaajakari
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Patent number: 12155372Abstract: Embodiments may relate to a die such as an acoustic wave resonator (AWR) die. The die may include a first filter and a second filter in the die body. The die may further include an electromagnetic interference (EMI) structure that surrounds at least one of the filters. Other embodiments may be described or claimed.Type: GrantFiled: March 7, 2022Date of Patent: November 26, 2024Assignee: Intel CorporationInventors: Georgios Dogiamis, Aleksandar Aleksov, Feras Eid, Telesphor Kamgaing, Johanna M. Swan
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Patent number: 12132467Abstract: A microelectromechanical resonator, including a support structure, a resonator element suspended to the support structure, the resonator element including a plurality of sub-elements, and an actuator for exciting the resonator element into a resonance mode. The sub-elements are dimensioned such that they are dividable in one direction into one or more fundamental elements having an aspect ratio different from 1 so that each of the fundamental elements supports a fundamental resonance mode, which together define a compound resonance mode of the sub-element. The sub-elements are further coupled to each other by connection elements and positioned with respect to each other such that the fundamental elements are in a rectangular array configuration, wherein each fundamental element occupies a single array position, and at least one array position of the array configuration is free from fundamental elements.Type: GrantFiled: February 6, 2019Date of Patent: October 29, 2024Assignee: KYOCERA Technologies OyInventors: Antti Jaakkola, Aarne Oja
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Patent number: 12119803Abstract: In one example, a method of forming a bulk acoustic wave (BAW) resonator comprises: forming an electrode on at least one of a semiconductor substrate, a sacrificial layer, or an acoustic reflector; and forming a piezoelectric layer on the electrode, the piezoelectric layer having a convex surface.Type: GrantFiled: August 14, 2023Date of Patent: October 15, 2024Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: Ting-Ta Yen
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Patent number: 12119806Abstract: Acoustic resonator devices, filers, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The interleaved IDT fingers are on the diaphragm, and the interleaved IDT fingers include at least a first pair of interleaved spiral IDT fingers.Type: GrantFiled: December 21, 2021Date of Patent: October 15, 2024Assignee: Murata Manufacturing Co., Ltd.Inventors: Sean McHugh, Neal Fenzi
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Patent number: 12088271Abstract: A fabrication method of a surface acoustic wave (SAW) filter includes obtaining a piezoelectric substrate, forming a back electrode on a first portion of the piezoelectric substrate, forming a first dielectric layer on the first portion of the piezoelectric substrate, forming a trench in the first dielectric layer, forming a second dielectric layer on the first dielectric layer formed with the trench, forming a third dielectric layer on the second dielectric layer, removing a second portion of the piezoelectric substrate to obtain a piezoelectric layer, forming an interdigital transducer (IDT) on the piezoelectric layer, and etching and releasing a portion of the first dielectric layer surrounded by the trench to form a cavity below the back electrode.Type: GrantFiled: September 16, 2022Date of Patent: September 10, 2024Assignee: Shenzhen Newsonic Technologies Co., Ltd.Inventors: Guojun Weng, Gongbin Tang
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Patent number: 12083558Abstract: An ultrasonic device includes a substrate having a plurality of opening parts and a wall, a vibrating plate closing the opening parts, and vibrators provided to the vibrating plate, wherein the plurality of opening parts includes a first opening part, a second opening part adjacent to the first opening part via a first wall, and a third opening part adjacent to the first opening part via a second wall, a first vibrating section closing the first opening part and the vibrator constitute a first ultrasonic transmitter, a second vibrating section closing the second opening part and the vibrator constitute an ultrasonic receiver, a third vibrating section closing the third opening part and the vibrator constitute a second ultrasonic transmitter, and the wall width of the first wall is larger than the wall width of the second wall.Type: GrantFiled: November 30, 2020Date of Patent: September 10, 2024Assignee: SEIKO EPSON CORPORATIONInventor: Chikara Kojima
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Patent number: 12078512Abstract: A dual channel detector. The first channel includes a first sensor and the second channel includes a second sensor, which are deposited on a substrate. The first and second sensors measure the same physical quantity, but output different measurement signals. The sensors are connected to evaluation units via contact points.Type: GrantFiled: November 18, 2020Date of Patent: September 3, 2024Assignee: TDK ELECTRONICS AGInventors: Sandro Kappert, Stefan Sax
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Patent number: 12081194Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.Type: GrantFiled: March 29, 2023Date of Patent: September 3, 2024Assignee: Qorvo US, Inc.Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
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Patent number: 12059297Abstract: Disclosed in an ultrasonic probe for obtaining an ultrasonic image.Type: GrantFiled: April 16, 2021Date of Patent: August 13, 2024Assignee: SAMSUNG MEDISON CO., LTD.Inventors: Haekee Min, Yoonsung Kyung, Jongsun Ko
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Patent number: 12057823Abstract: Acoustic resonator devices, filters, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes concentric interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The IDT fingers are on the diaphragm.Type: GrantFiled: December 15, 2021Date of Patent: August 6, 2024Assignee: Murata Manufacturing Co., Ltd.Inventors: Sean McHugh, Neal Fenzi, John Koulakis, Greg Dyer
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Patent number: 12057822Abstract: A bulk acoustic resonator includes a first electrode disposed on an upper side of a substrate, a piezoelectric layer disposed on an upper surface of the first electrode, and a second electrode disposed on an upper surface of the piezoelectric layer, wherein an upper surface of at least one of the first electrode and the second electrode has a recess region, wherein a depth of the recess region is D, a width of the recess region is W, and a resonance frequency is F, and ln is a natural logarithm, and wherein [{ln(D*W)}/(?0.59*F)] is [[ln{0.008 (?m)2}]/{?0.59*(3.5 GHz)}] or more and [[ln{0.022 (?m)2}]/{?0.59*(3.5 GHz)}] or less.Type: GrantFiled: May 4, 2021Date of Patent: August 6, 2024Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Sang Uk Son, Sung Wook Kim, Won Han, Jong Woon Kim, Jeong Hoon Ryou, Sang Heon Han
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Patent number: 12052926Abstract: A piezoelectric device comprises at least one piezoelectric composite layer P inserted between two conductive composite layers E, each layer E forming an electrode, characterized in that: the layer P is a rubber composition containing more than 50 parts by weight per hundred parts by weight rubber, phr, of diene elastomer, a cross-linking system and at least 5 vol. %, in relation to the total volume of the rubber composition, of piezoelectric inorganic charges; and each layer E is a rubber composition containing at least 50 phr of diene elastomer, a cross-linking system, and conductive charges. A method for producing the device and a tire comprising the device are also disclosed.Type: GrantFiled: June 21, 2019Date of Patent: July 30, 2024Assignee: COMPAGNIE GENERALE DES ETABLISSEMENTS MICHELINInventors: Francois Lafort, Xavier Lebrun, Guillaume Pibre
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Patent number: 12047052Abstract: An acoustic wave device in which a cavity defining an acoustic reflector is formed on a first main surface side of a substrate, an excitation portion is structured above the cavity in a manner that a first electrode, a piezoelectric thin film, and a second electrode are laminated, and a periodic pattern is provided in a normal direction of a side of the excitation portion on at least one of a first extraction electrode and a second extraction electrode.Type: GrantFiled: July 20, 2021Date of Patent: July 23, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Shou Nagatomo