Abstract: A piezoelectric MEMS microphone comprising a multi-layer sensor that includes at least one piezoelectric layer between two electrode layers, with the sensor being dimensioned such that it provides a near maximized ratio of output energy to sensor area, as determined by an optimization parameter that accounts for input pressure, bandwidth, and characteristics of the piezoelectric and electrode materials. The sensor can be formed from single or stacked cantilevered beams separated from each other by a small gap, or can be a stress-relieved diaphragm that is formed by deposition onto a silicon substrate, with the diaphragm then being stress relieved by substantial detachment of the diaphragm from the substrate, and then followed by reattachment of the now stress relieved diaphragm.

Abstract: A method for manufacturing microelectromechanical flexural resonators with a deforming element that has an elongate body extending along a spring axis. A deforming element is positioned on the semiconductor wafer with a defined nominal n-type doping concentration such that a crystal orientation angle is formed between the spring axis of the deforming element and a crystal axis of the silicon semiconductor wafer. The combination of the crystal orientation angle and the nominal n-type doping concentration is adjusted to a specific range, based on total frequency error of the deforming element in a broad temperature range. The combination is optimized to a range where also sensitivity to variations in the material properties is minimized.

Abstract: A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy ?=Lt/L and a taper width occupancy ?=2 Wt/W.

Abstract: A piezoelectric device includes: a substrate; a first electrode formed over the substrate; a first piezoelectric element formed over the first electrode; a low density region which is formed at a side of the first piezoelectric element and has density lower than that of the first piezoelectric element; a second piezoelectric element which is formed to cover the first piezoelectric element and the low density region; and a second electrode formed over the second piezoelectric element.

Abstract: A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.

Abstract: A flexural vibration element according to a first aspect of the invention includes: a vibration element body composed of a plurality of vibrating arms provided in parallel, a connecting part connecting the vibrating arms, and one central supporting arms extending between the vibrating arms from the connecting pert in parallel with the vibrating arms at equal distance from the arms and a frame body disposed outside the vibration element body.

Abstract: A flexural vibration element according to a first aspect of the invention includes: a vibration element body composed of a plurality of vibrating arms provided in parallel, a connecting part connecting the vibrating arms, and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms; and a frame body disposed outside the vibration element body.

Abstract: Method and apparatus for a piezoelectric apparatus are provided. In some embodiments, a method for fabricating a piezoelectric device may include etching a series of vertical trenches in a top substrate portion, depositing a first continuous conductive layer over the trenches and substrate, depositing a continuous piezoelectric layer over the first continuous conductive layer such that the piezoelectric material has trenches and sidewalls, depositing a second continuous conductive layer over the continuous piezoelectric layer, etching through the vertical trenches of the first continuous conductive layer, continuous piezoelectric layer, second continuous conductive layer, and top substrate portion into a bottom substrate portion, etching a series of horizontal trenches in the bottom substrate portion such that the horizontal trenches and vertical trenches occupy a continuous free space and allow movement of a piezoelectric MEMS device created by the above method in three dimensions.

Abstract: A vibrating member includes a base portion, a plurality of vibrating arms which extend from one end portion of the base portion, are provided in parallel in a first direction, and extend in a second direction perpendicular to the first direction, a linking portion which is provided between the base end portions of two adjacent vibrating arms and extends from the other end portion of the base portion, and a support portion which is connected to the base portion through the linking portion.

Abstract: Disclosed is an electromechanical transducer and the method for manufacturing the same, which can detect or control deformation and vibration of a structure and flow of fluids by applying controlling forces. The electromechanical transducer of the present invention comprises a base substrate to which initial stress is applied; an electro-active material layer attached on the base substrate; and electrodes installed on the top and bottom side of the electro-active material layer for actuating the electro-active material layer, the base substrate and the electro-active material layer which is deformed when initial stress is removed from the base substrate so that the base substrate and the electro-active material layer have curvatures.

Abstract: A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy ?=Lt/L and a taper width occupancy ?=2 Wt/W.

Abstract: A piezoelectric device, including the following on a substrate in the order listed below: a lower electrode, a piezoelectric film which contains a Pb containing perovskite oxide represented by a general expression (P) below, and an upper electrode, in which the piezoelectric film has a layer of pyrochlore oxide on the surface facing the lower electrode, and the average layer thickness of the pyrochlore oxide layer is not greater than 20 nm. AaBbO3??(P) where, A: at least one type of A-site element containing Pb as a major component, B: at least one type of B-site element selected from the group consisting of Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Sc, Co, Cu, In, Sn, Ga, Zn, Cd, Fe, and Ni, and O: an oxygen element.

Abstract: A device for detecting a selvage of a material web or the selvage position in one measuring direction. The device comprises at least one ultrasonic sensor, with the ultrasonic sensor comprising a transmitter element and a receiver element. The external contour of at least one of the transmitter elements and/or of the receiver elements comprises at least one arc segment side and at least one flattened side.

Abstract: The piezoelectric device (100) stores a piezoelectric vibrating piece (10) which vibrates whenever an electrical voltage is applied. The piezoelectric device comprises: a package lid (11) having a first peripheral surface (M1) which surrounds a plane surface in a predetermined width; and a package base (12) comprising a second peripheral surface (M2) bonded to the first peripheral surface of the package lid and a recess portion recessed from the second peripheral surface. The first peripheral surface of the package lid and the second peripheral surface of the package base are rough surfaces, respective metal films (AC1, AC2) are formed on each rough surface, and the package lid and the package base are bonded using a sealing material (LG) formed between the metal films.

Abstract: A piezoelectric device includes a nanoimprinted film which is made from a ferroelectric polymer having a first conformation state and coated on a substrate. The ferroelectric polymer is heated at a temperature between a Curie point (Tc) and a melting point (Tm) of the ferroelectric polymer to cause a change in conformation of the ferroelectric polymer from the first conformation state to a second conformation state, and is then subjected to a nanoimprinting process at an imprinting temperature lower than Tc to cause a change in conformation of the ferroelectric polymer from the second conformation state to a third conformation state that is different from the first conformation state, thereby obtaining the nanoimprinted film.

Abstract: A diamond-shaped actuator for a flexible panel has an inter-digitated electrode (IDE) and a piezoelectric wafer portion positioned therebetween. The IDE and/or the wafer portion are diamond-shaped. Point sensors are positioned with respect to the actuator and measure vibration. The actuator generates and transmits a cancelling force to the panel in response to an output signal from a controller, which is calculated using a signal describing the vibration. A method for controlling vibration in a flexible panel includes connecting a diamond-shaped actuator to the flexible panel, and then connecting a point sensor to each actuator. Vibration is measured via the point sensor. The controller calculates a proportional output voltage signal from the measured vibration, and transmits the output signal to the actuator to substantially cancel the vibration in proximity to each actuator.

Abstract: A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.

Abstract: An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.

Abstract: Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.

Abstract: An acoustic focusing capillary includes a capillary coupled to at least one vibration source possessing a groove. A method of manufacturing such an acoustic focusing capillary includes providing a capillary and a vibration source, machining a groove into the vibration source, and coupling the vibration source to the capillary at the groove. Another method relates to focusing a particle stream and includes flowing a sheath fluid into an outer confine of a capillary, flowing a particle stream into a central core of the capillary, and acoustically focusing the particle stream by applying acoustic radiation pressure to the particle stream at a first location along the capillary. The particle stream may be further focused by hydrodynamically focusing it at a second location along the capillary downstream of the first location.

Abstract: A lead-free piezoelectric element that stably operates in a wide operating temperature range contains a lead-free piezoelectric material. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric material that includes a perovskite-type metal oxide represented by (Ba1-xCax)a(Ti1-yZry)O3 (1.00?a?1.01, 0.02?x?0.30, 0.020?y?0.095, and y?x) as a main component and manganese incorporated in the perovskite-type metal oxide. The manganese content relative to 100 parts by weight of the perovskite-type metal oxide is 0.02 parts by weight or more and 0.40 parts by weight or less on a metal basis.

Abstract: The present invention relates to ultrasound transducers for ultrasonic imaging systems and, in particular, to improved grip assemblies for ultrasound transducers. One grip assembly includes a locking plate defining first and second apertures and a coupling post extending from the locking plate. An interface plate has a first elongate extension being extendable at least partially through the first aperture and a second elongate extension being extendable at least partially through the second aperture. A handle is coupled to the locking plate and includes a grip, a coupling interface, and a neck extending between the grip and the coupling interface. The coupling interface defines a coupling aperture for receiving the coupling post.

Abstract: A mesa-shaped piezoelectric resonator element including a resonator section having a thicker thickness than a peripheral section on the board surface of a piezoelectric substrate formed in a rectangular shape, wherein, when the length of the long side of the piezoelectric substrate is x and the board thickness of the resonator section is t, etching depth y of a level-difference section is set to fulfill a relationship in the following equation, based on the board thickness t. y = - 1.

Abstract: A compact, high power, dual mode, emitting and receiving ultrasound transducer and method for applying ultrasonic energy within a living subject and for monitoring the effects it induces in tissue comprises a set of piezoelectric polymeric transducer elements and a set of piezoelectric ceramic elements, bonded together. The polymeric transducer elements have electrodes enabling their use for low power diagnostic imaging interrogation of the tissue and the ceramic transducer elements have electrodes enabling their use for high power therapy applications.

Abstract: A liquid ejection head including a piezoelectric element having a piezoelectric layer and electrodes The piezoelectric layer is 3 ?m or less in thickness. The piezoelectric layer is made of a piezoelectric material including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane.

Abstract: A piezoelectric/electrostrictive film type element includes a lower electrode, a piezoelectric layer, and an upper electrode laminated in order on a support. An average particle diameter of each of particles of a piezoelectric material forming the piezoelectric layer falls within a range of 0.5 ?m to 10 ?m. The sectional shape of the piezoelectric layer is a “quadrilateral (substantially rectangular shape) having a height of from 0.5 ?m to 15 ?m and an angle (?) at an end point of a base of from 85° to 105°.” A surface roughness of a side surface of the piezoelectric layer is 0.05 d?m to 0.5 d?m at the maximum height roughness Rz (defined by JIS B 0601:2001). Both “generation of a leak current that flows through the piezoelectric layer” and “occurrence of particle shedding from a side surface of the piezoelectric layer” can be prevented.

Abstract: The composite substrate is a substrate used to manufacture an acoustic wave device, and includes a support substrate, a piezoelectric substrate, and a adhesive layer with which the support substrate and the piezoelectric substrate are bonded to each other. In the composite substrate, assuming that a surface of the piezoelectric substrate that is bonded to the support substrate is defined as a first surface and a surface at the side opposite to the first surface is defined as a second surface, the piezoelectric substrate is formed such that the first surface is inside the second surface when the first surface is projected onto the second surface in a direction perpendicular to the second surface. In other words, the composite substrate has an outer peripheral surface that is formed such that the circumference thereof increases toward the top surface of the piezoelectric substrate.

Abstract: A thin film piezoelectric device according to the present invention includes a potassium sodium niobate-based piezoelectric thin film having an average crystal grain diameter of 60 nm or more and 90 nm or less, and a pair of electrode films configured to hold the piezoelectric thin film therebetween.

Abstract: The present invention comprises systems, apparatuses, and methods for harvesting ambient mechanical energy at a lower frequency and transforming the harvested energy into electrical energy at a higher frequency. Transforming the energy from relatively lower input frequency energy to relatively higher output frequency energy can help realize greater efficiencies found at higher frequencies. Because the input plane of the ambient mechanical energy is not always predictable, some embodiments of the present invention comprise both in-plane and out-of-plane energy harvesters that produce an electrical output in multiple planes.

Abstract: The invention is directed to the provision of a method for manufacturing a crystal oscillator manufacturing method that can achieve a highly precise fine adjustment without applying unnecessary external force to a crystal oscillator, and that can adjust a plurality of crystal oscillators in a collective manner. More specifically, the invention provides a method for manufacturing a crystal oscillator includes a first etching step for forming a prescribed external shape, an electrode forming step for forming an electrode at least in a portion of a surface of the external shape, a leakage amount measuring step for measuring leakage amount associated with leakage vibration of the external shape, and a second etching step for etching the external shape by an amount that is determined based on a measurement result of the leakage amount measuring step so as to adjust balance.

Abstract: In a piezoelectric actuator including a lower electrode layer, a first PZT piezoelectric layer having a first relative permittivity is formed on the lower electrode layer, and a second PZT piezoelectric layer having a second relative permittivity smaller than said first relative permittivity is formed on the first PZT piezoelectric layer.

Abstract: A multilayer piezoelectric element includes a plurality of piezoelectric layers and a plurality of metal layers stacked alternately. The plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. The plurality of metal layers may include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction. Where the plurality of metal layers are composed mainly of an alloy, the plurality of metal layers may include a plurality of high-ratio metal layers having a higher ratio of a component constituting the alloy than oppositely disposed metal layers adjacent to each other in a stacking direction.

Abstract: The present invention relates to a polymer layer structure with ferroelectret properties, comprising a continuous first polymer layer (1) and a continuous second polymer layer (2), the first and second polymer layers (1, 2) being connected to one another to form voids (4) by connecting portions (3) arranged between the continuous polymer layers (1, 2). According to the invention, the polymer layer structure is in the form of an integral extruded structural element.

Abstract: Systems and methods for providing haptic feedback at multiple resonance frequencies are disclosed. For example, one disclosed apparatus includes a resonator with a base and a plurality of projections, a first projection of the plurality of projections having a first resonance frequency and a second projection of the plurality of projections having a second resonance frequency, and a piezoelectric actuator coupled to the resonator and operable to output a haptic feedback effect at the first resonance frequency and at the second resonance frequency.

Abstract: A vibrator element includes a base section, and a vibrating arm projecting from the base section, and having a plurality of groove sections, the vibrating arm is provided with the groove sections, and the groove sections are each formed to have a length in a width direction of the vibrating arm longer than a length in a longitudinal direction of the vibrating arm, and arranged side by side along the longitudinal direction of the vibrating arm.

Abstract: A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.

Abstract: An ultrasonic probe and an ultrasonic diagnosis device which can improve electrical safety for an operator are provided. The ultrasonic probe 2 has an insulating portion 62 between a mounting board 43 and a case 25. Since electrical leakage from the internal device of the ultrasonic probe 2 can be prevented, electrical safety of the ultrasonic probe 2 for the operator can be improved. A conductive film 61 is provided on the ultrasonic wave radiation side of a cMUT chip 20, and a conductive member 63 is provided along the insulating member 62. A conductive film 61 and a conductive member 63 are connected by a conductive member 64. A closed space having a ground potential is formed by the conductive film 61, the conductive member 63 and a coaxial cable 55 connected to ground. Main components or the body circuits of the ultrasonic probe 2 are contained in the closed space having the ground potential and shielded electrically from the outside.

Abstract: A navigable system for catheter based endovascular neurosurgery including: a micro-motor (3) including a piezoelectric actuator (5) mounted to a free end of a guidewire or micro-catheter (2), the piezoelectric actuator (5) including a piezoelectric element (7), and an elongate transducer (9) mounted on the piezoelectric element (7) and extending therefrom, the transducer (9) being formed from an asymmetric hollow member, and an end member (15) located at a free end of the transducer (9); wherein electrical excitation of the piezoelectric element (7) induces one or both orthogonal flexural and axial vibration modes within the transducer (9), the coupling of the induced vibration modes thereby resulting in rotation of the end member (15) with three degrees of freedom (DOF).

Abstract: When a size from a main surface of an outer edge to a step of a first stage of a vibration section is Md1, a size from the step of the first stage to a step of a second stage is Md2, a density of materials of the substrate is dA, a density of materials of the excitation electrode is dB, and a thickness of the excitation electrode on a main surface of a mesa of the second stage is tB, a relationship of ((Md2+(dB/dA)×tB))/Md1?1.4 is satisfied.

Abstract: A piezoelectric device includes a piezoelectric vibrating piece and a base portion in a square shape with four sides viewed from the first surface. The base portion has two sides that face one another. The two sides include two pairs of castellations depressed toward a center side of the base portion and two pairs of side surface electrodes on the two pairs of castellations. The two pairs of side surface electrodes connect the first surface and the second surface. One pair among the two pairs of side surface electrodes connects to the pair of connecting electrodes and one pair of mounting terminals among the two pairs of mounting terminals. The mounting terminals are formed up to four corners of the base portion.

Abstract: A piezoelectric MEMS microphone comprising a multi-layer sensor that includes at least one piezoelectric layer between two electrode layers, with the sensor being dimensioned such that it provides a near maximized ratio of output energy to sensor area, as determined by an optimization parameter that accounts for input pressure, bandwidth, and characteristics of the piezoelectric and electrode materials. The sensor can be formed from single or stacked cantilevered beams separated from each other by a small gap, or can be a stress-relieved diaphragm that is formed by deposition onto a silicon substrate, with the diaphragm then being stress relieved by substantial detachment of the diaphragm from the substrate, and then followed by reattachment of the now stress relieved diaphragm.

Abstract: A continuous piezoelectric film can include a plurality of fibers, each fiber including a polypeptide, wherein molecules of the polypeptide have electric dipole moments that are aligned such that the piezoelectric fiber provides a piezoelectric effect. The continuous piezoelectric film has at least one piezoelectric constant d31 or d33 that is at least 1 pC/N. The continuous piezoelectric film can be prepared hot pressing a mat of aligned piezoelectric fibers.

Abstract: Microelectromechanical resonators include a resonator body having a first piezoelectric layer on a upper surface thereof, which is configured to support actuation and sensing through a transverse piezoelectric effect (e31), and a second piezoelectric layer on at least a portion of a first sidewall thereof, which is configured to support actuation and sensing through a longitudinal piezoelectric effect (e33), where e33 is greater than e31. These resonators may further include a first bottom electrode extending between the first piezoelectric layer and the upper surface of the resonator body and a second bottom electrode extending between the second piezoelectric layer and the first sidewall of the resonator body. These first and second bottom electrodes may be contiguous as a single bottom electrode and the first and second piezoelectric layers may be contiguous as a single piezoelectric layer.

Abstract: A piezoelectric power generator that includes a piezoelectric laminate in which a plurality of rectangular-shaped piezoelectric elements each having electrodes formed on a substrate are connected at both ends thereof to each other, and in which a portion other than connection portions is capable of vibrating. In the piezoelectric laminate, a portion of the element at the uppermost layer is a fixed portion, and a weight is mounted to the element (free end) at the lowermost layer. Each piezoelectric element is decreased in rigidity from the element at the uppermost layer toward the element at the lowermost layer.

Abstract: An apparatus with a micromechanical acoustic resonator formed on a substrate and enclosed in a cavity in the substrate. The resonator is partially suspended in the cavity. The resonator is shaped with a primary portion, and a first enlarged portion, where the primary portion is connected to the substrate, and the first enlarged portion is connected to one end of the primary portion. A capacitor connected in series to the resonator, and located external to the resonator cavity. The resonator is made of a compensating material and a piezoelectric material in between a first conductive film and a second conductive film.

Abstract: The purpose of the present invention is to provide an angular velocity sensor capable of measuring an exact angular velocity, an ink jet head capable of producing an exact amount of ink, and a piezoelectric generating element capable of generating electric power due to positive piezoelectric effect. In the present invention, a piezoelectric film comprising a first electrode, a piezoelectric layer, and a second electrode is used. The first electrode comprises an electrode layer having a (001) orientation. The piezoelectric layer comprises a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer (0.30?x?0.46 and 0.51?y?0.62) having a (001) orientation.

Abstract: A piezoelectric element and a manufacturing method to reduce extraneous radial vibration modes is disclosed, in an example embodiment, four slots, arranged at 90 degrees, are made in one surface such that the slots do not reach the opposite surface.

Abstract: A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.

Abstract: A first support portion, which is connected to a first beam extending from a vibrating body and supports the vibrating body, and a detection signal terminal and a detection ground terminal, which are provided in the first support portion and are arranged in parallel so as to be separated from each other along a direction crossing an extending direction of the first beam, are provided. The first beam and the first support portion are connected between the detection signal terminal and the detection ground terminal. A thin portion formed to have a small thickness in a top to bottom direction of the first support portion or a penetrating portion formed by removing the first support portion so as to be penetrated in the top to bottom direction is provided between the detection signal terminal and the detection ground terminal.

Abstract: A piezoelectric element comprising a first electrode, a piezoelectric layer which contains lead, zirconium, and titanium, and which is formed above the first electrode, and a second electrode formed above the piezoelectric layer. A groove which exists between grains in the second electrode side surface of the piezoelectric layer, satisfies 0?d/??0.900 (where d: depth of groove, w: width of groove, ?: radius of curvature (d2+w2/4)/2d).