Piezoelectric Element Shape Patents (Class 310/367)
  • Publication number: 20110068660
    Abstract: An AT cut quartz crystal resonator element includes a quartz crystal element piece having an exciting part formed from an AT cut quartz crystal plate in a rectangular shape having an X-axis direction of a quartz crystal set to a long side, and an exciting electrode formed on each of front and back main surfaces of the exciting part, in which each side surface in the longitudinal direction of the exciting part is composed of two faces, an m-face of a quartz crystal and a crystal face other than the m-face.
    Type: Application
    Filed: November 24, 2010
    Publication date: March 24, 2011
    Applicant: EPSON TOYOCOM CORPORATION
    Inventors: Matsutaro NAITO, Yoshiyuki AOSHIMA, Kenji KOMINE
  • Patent number: 7911113
    Abstract: A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer electrode film are laminated in this order on a thin portion of a substrate. In the piezoelectric/electrostrictive element, a driving signal is applied between an outer layer electrode film and the inner layer electrode film, whereby the thin portion and a laminate can be subjected to bending vibration. The piezoelectric/electrostrictive film has film thickness distribution in which a film thickness becomes larger in a continuous manner from a center portion of a bending vibration region which is an antinode of a bending first mode toward an edge portion of the bending vibration region which is a node of the bending first mode, along a short side direction of the bending vibration region.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: March 22, 2011
    Assignee: NGK Insulators, Ltd.
    Inventors: Hideki Shimizu, Shinji Shiranita, Takashi Ebigase
  • Patent number: 7902722
    Abstract: A dual spiral transducer and method of manufacture of same is disclosed. In one aspect, the transducer comprises a central rod, a first spiral piezoelectric electrode wrapped around a circumference of the rod, the electrode being advanced around the rod at a determined angle determined based on a length of a single complete turn around the rod and a diameter of the rod and a second spiral piezoelectric electrode wrapped around the circumference of the rod, the second spiral electrode being electrically isolated, and offset, from the first spiral electrode by a known distance. A second set of spiral electrodes can be integrated into the structure so that both transmission and reception of signals is feasible.
    Type: Grant
    Filed: April 3, 2009
    Date of Patent: March 8, 2011
    Assignee: DVX, LLC
    Inventor: David Vilkomerson
  • Publication number: 20110050049
    Abstract: A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer electrode film are laminated in this order on a thin portion of a substrate. In the piezoelectric/electrostrictive element, a driving signal is applied between an outer layer electrode film and the inner layer electrode film, whereby the thin portion and a laminate can be subjected to bending vibration. The piezoelectric/electrostrictive film has film thickness distribution in which a film thickness becomes larger in a continuous manner from a center portion of a bending vibration region which is an antinode of a bending first mode toward an edge portion of the bending vibration region which is a node of the bending first mode, along a short side direction of the bending vibration region.
    Type: Application
    Filed: September 2, 2009
    Publication date: March 3, 2011
    Applicant: NGK Insulators, Ltd.
    Inventors: Hideki Shimizu, Shinji Shiranita, Takashi Ebigase
  • Publication number: 20110043081
    Abstract: An actuator apparatus and method may comprise a monolithic construction of piezoelectric effect and electrostrictive effect materials. The actuator may comprise at least one piezoelectric material layer and at least one electrostrictive material layer. The at least one piezoelectric material layer may comprise a plurality of piezoelectric layers or the at least one electrostrictive layer may comprise a plurality of electrostrictive layers. The actuator may comprise the monolithic construction of piezoelectric and electrostrictive materials having a perimeter; a rigid plate; an adhesion mechanism holding the perimeter to the rigid plate preventing movement of the perimeter with respect to the rigid plate. The monolithic construction may be formed by co-sintering and co-pressing the piezoelectric effect material with the electrostrictive effect material. The actuator could comprise PMN/PT-65/35 piezoelectric and PMN/PT-90/10 electrostrictive.
    Type: Application
    Filed: August 23, 2010
    Publication date: February 24, 2011
    Inventors: Ahmad Safari, Piyalak Ngernchuklin
  • Patent number: 7893602
    Abstract: A transducer for use with a boundary-stiffened panel has an inter-digitated electrode (IDE) and a piezoelectric wafer portion positioned therebetween. The IDE and/or the wafer portion are triangular, with one edge or side aligned with a boundary edge of the panel. The transducer generates and transmits an output force to the panel in response to an input voltage signal from a sensor, which can be another transducer as described above or an accelerometer. A controller can generate an output force signal in response to the input voltage signal to help cancel the input voltage signal. A method of using the transducer minimizes vibration in the panel by connecting multiple transducers around a perimeter thereof. Motion is measured at different portions of the panel, and a voltage signal determined from the motion is transmitted to the transducers to generate an output force at least partially cancelling or damping the motion.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: February 22, 2011
    Assignee: The United States of America as reprensented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Noah H. Schiller, Randolph H. Cabell
  • Publication number: 20110037812
    Abstract: The columnar structure film is formed on a surface of a substrate by vapor phase epitaxy, and is constituted of a plurality of columnar bodies extending in directions non-parallel to the surface of the substrate. In the columnar structure film, a relationship GSmax>2.0 GSmin is satisfied, where GSmax and GSmin are respectively a maximum value and a minimum value of average diameters of the columnar bodies taken in planes perpendicular to a thickness direction of the columnar structure film.
    Type: Application
    Filed: August 12, 2010
    Publication date: February 17, 2011
    Inventors: Takayuki Naono, Takamichi Fujii, Takami Arakawa
  • Patent number: 7889027
    Abstract: An object is to provide a film bulk acoustic resonator capable of improving resonant characteristics by reducing the generation of a standing wave to be caused by a transverse-mode acoustic wave to a minimum. In a film bulk acoustic resonator including a resonant portion A having a piezoelectric material layer 3 sandwiched between a first electrode 2 and a second electrode 4, the resonant portion A is configured to have a planar shape that is an ellipse having a part thereof cut off along a straight line L. The straight line L intersects at least one of a minor axis and a major axis of the ellipse, and preferably intersects both the minor axis and the major axis, and passes through the center of the ellipse.
    Type: Grant
    Filed: July 5, 2006
    Date of Patent: February 15, 2011
    Assignee: Sony Corporation
    Inventors: Shuichi Oka, Terukazu Ohno
  • Patent number: 7880366
    Abstract: A three-dimensional stack-type piezo element has at least one surface that is shaped perpendicular to layer planes of the stack, so that, at least in sections, it is not parallel to a stacking direction of the piezo element.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: February 1, 2011
    Assignee: EADS Deutschland GmbH
    Inventors: Boris Grohmann, Peter Konstanzer, Stefan Storm
  • Patent number: 7877854
    Abstract: A focused ultrasound transducer includes a first ultrasonic emitter and at least one metallic ultrasonic lens acoustically coupled thereto. The emitter generates ultrasonic energy that propagates along a beam path projecting therefrom. The at least one metallic ultrasonic lens is positioned at least partially in the beam path so that it can direct (e.g., focus, defocus, and/or collimate) in at least one direction (or along at least one plane) at least some of the ultrasonic energy propagating from the emitter. The metallic lens may be formed by extrusion, by molding (e.g., diecast molding or thermoforming), or by sintering (e.g., powder metallurgy). The metallic lens also advantageously functions as a heat sink, improving thermal performance of the ultrasound transducer.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: February 1, 2011
    Assignee: St. Jude Medical, Atrial Fibrillation Division, Inc.
    Inventors: John W. Sliwa, John P. Goetz, Zhenyi Ma
  • Patent number: 7880371
    Abstract: A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. The composite facilitates increased compliance of the transducer in one direction, an improved reaction time as compared to similar prior art composites for transducers, and provides an increased lifetime of the transducer in which it is applied.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: February 1, 2011
    Assignee: Danfoss A/S
    Inventors: Mohamed Yahia Benslimane, Peter Gravesen
  • Publication number: 20110018399
    Abstract: A piezoelectric device has a piezoelectric vibration element mounted in a package wherein the piezoelectric vibration element comprises two stick-like vibration legs; a central leg provided between the two vibration legs; a coupling portion that couples one end of each of the two vibration legs and one end of the central leg; and a protrusion portion that is coupled to another end of the central leg, has a predetermined angle, neither 0 nor 180 degrees, to the length direction of the central leg, and extends into a direction not interfering with the driving legs. In making the piezoelectric device smaller and thinner, this configuration avoids interference between a support point on the central leg, provided for supporting the vibration element, and conductive electrodes, improves insulation between the conductive electrodes, and reduces the generation of short-circuits between the conductive electrodes.
    Type: Application
    Filed: March 17, 2009
    Publication date: January 27, 2011
    Applicant: CITIZEN HOLDINGS CO., LTD.
    Inventors: Kazuo Murata, Kazuhiro Toriumi, Toshiya Kubo, Takashi Maruyama, Tomoyuki Nakazawa, Taichi Tsuchiya, Izumi Yamamoto, Akiko Katoh, Sadao Horiuchi, Hiroshi Miyauchi, Isao Arai, Akihiro Shioji, Tomoo Ikeda, Maki Takizawa, Keisuke Kigawa
  • Publication number: 20110021918
    Abstract: Disclosed is an organic piezoelectric material film which has little contaminants and has excellent piezoelectric properties. The organic piezoelectric material film is produced by casting a solution of an organic piezoelectric material in an organic solvent and subsequently drying the resulting product. The organic piezoelectric material film has a moisture content of 0.1 mass % or less.
    Type: Application
    Filed: March 3, 2009
    Publication date: January 27, 2011
    Applicant: Konica Minolta Medical & Graphic Inc.
    Inventor: Kiyokazu Morita
  • Publication number: 20110017177
    Abstract: A piezoactuator of monolithic multilayer design with an overall stack has at least one piezoelectrically active partial stack with piezoceramic layers arranged one above another and electrode layers arranged between these layers, at least one piezoelectrically inactive terminating region arranged above the partial stack, and at least one transition region arranged between the partial stack and the terminating region.
    Type: Application
    Filed: October 23, 2007
    Publication date: January 27, 2011
    Inventors: Masahiro Inagaki, Harald Johannes Kastl, Takami Sakamoto, Carsten Schuh
  • Publication number: 20110007114
    Abstract: A piezoelectric element includes: a substrate; a lower electrode that is formed on and/or over the substrate; a piezoelectric substance layer that covers the lower electrode; and an upper electrode that is formed on and/or over the piezoelectric substance layer, wherein a side surface of the piezoelectric substance layer includes a first portion that extends from an upper surface of the piezoelectric substance layer and a second portion that extends from the first portion, the first portion is inclined at a first angle with respect to an upper surface of the substrate, the second portion is inclined at a second angle with respect to the upper surface of the substrate, the second angle is smaller than the first angle, and the upper electrode covers at least the first portion and the second portion.
    Type: Application
    Filed: July 6, 2010
    Publication date: January 13, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Masao Nakayama
  • Publication number: 20110006641
    Abstract: An example flexoelectric-piezoelectric apparatus provides an electrical response to an applied force, and/or an actuation in response to an applied electric field, that originates from the flexoelectric properties of a component. For example, shaped forms within the apparatus may be configured to yield a stress gradient on application of the force, and the stress gradient induces the flexoelectric signal. A flexoelectric-piezoelectric apparatus can be substituted for a conventional piezoelectric apparatus, but does not require the use of a piezoelectric material. Instead, the response of the apparatus is due to the generation of stress gradients and/or field gradients.
    Type: Application
    Filed: September 3, 2010
    Publication date: January 13, 2011
    Applicant: The Penn State Research Foundation
    Inventors: L. Eric Cross, Wenyi Zhu, Nan Li, John Y. Fu, Baojin Chu
  • Patent number: 7863802
    Abstract: A crystal element has a crystal blank which is cut from a crystal of quartz and has a principal plane orthogonal to a Y?-axis, where the Y- and Z-axes are rotated by an angle of ? around the X-axis in the crystal to be designated as the Y?- and Z?-axes, and the X- and Y?-axes are rotated by an angle of ? around the Z?-axis to be designated as the X?- and Y?-axes. The crystal blank has mutually orthogonal two null stress-sensitivity axes. In the crystal blank, the thickness of the center part at which two null stress-sensitivity axes intersect is increased, and a ridge line portion defining a quadrangular pyramid like shape from the center part toward the outer peripheral part is formed. The sectional thickness of the crystal blank along the base thereof is larger in the central region and becomes gradually smaller toward both ends.
    Type: Grant
    Filed: October 20, 2008
    Date of Patent: January 4, 2011
    Assignee: Nihon Dempa Kogyo Co., Ltd.
    Inventors: Akio Chiba, Shigeru Obara
  • Publication number: 20100326192
    Abstract: Methods and devices for a miniature, ultra-low power impact recorder for detecting, quantifying and recording the energy of an explosive blast or ballistic projectile impact. In one embodiment, the impact recorder can included a sensor comprised of an array of electromechanical resonators that is sensitive to the vibrations produced in selected, discrete frequency ranges that approximate the spectral signature characteristics of the shockwave resulting from the ballistic impact event, even after traveling through impacted material or body tissues.
    Type: Application
    Filed: November 6, 2008
    Publication date: December 30, 2010
    Inventors: TOMASZ J. PETELENZ, STEPHEN C. JACOBSEN
  • Patent number: 7847469
    Abstract: A micro-cantilever of a simple structure and capable of obtaining a larger displacement at a low voltage including a plate-like piezoelectric substrate having electrode films as an upper electrode and a lower electrode formed on both surfaces thereof, a plate-like resilient member in close contact with the piezoelectric substrate on the side of the lower electrode and a support for supporting a driving member in a cantilever manner, in which a thin-walled portion is formed to the vicinity of a base portion of the driving member supported by the support.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: December 7, 2010
    Assignee: Taiyo Yuden Co., Ltd.
    Inventors: Kentaro Nakamura, Ryuichi Kondou
  • Publication number: 20100301705
    Abstract: A piezoelectric actuator includes a supporting substrate, a main body having a first piezoelectric laminate, a second piezoelectric laminate, and a displacement portion, and a first elastic layer. The first elastic layer is fixed to the main body so as to connect a lower surface of the first piezoelectric laminate, a lower surface of the second piezoelectric laminate, a side surface of the first piezoelectric laminate, and a side surface of the second piezoelectric laminate. A first region to fourth region of the first elastic layer is fixed to the principal surface of the supporting substrate by a first to fourth bonding portions. A non-bonding surface is not fixed to the principal surface of the supporting substrate.
    Type: Application
    Filed: June 1, 2010
    Publication date: December 2, 2010
    Applicants: TDK CORPORATION, SAE MAGNETICS (H.K.) LTD.
    Inventor: Kenjiro HATA
  • Publication number: 20100289384
    Abstract: A method of manufacturing a ceramic includes forming a film which includes a complex oxide material having an oxygen octahedral structure and a paraelectric material having a catalytic effect for the complex oxide material in a mixed state, and performing a heat treatment to the film, wherein the paraelectric material is one of a layered catalytic substance which includes Si in the constituent elements and a layered catalytic substance which includes Si and Ge in the constituent elements. The heat treatment includes sintering and post-annealing. At least the post-annealing is performed in a pressurized atmosphere including at least one of oxygen and ozone. A ceramic is a complex oxide having an oxygen octahedral structure, and has Si and Ge in the oxygen octahedral structure.
    Type: Application
    Filed: April 26, 2010
    Publication date: November 18, 2010
    Applicant: Seiko Epson Corporation
    Inventors: Eiji Natori, Takeshi Kijima, Koichi Furuyama, Yuzo Tasaki
  • Patent number: 7834526
    Abstract: A contour resonator at least includes a first vibrating substrate and a second vibrating substrate having main surfaces that face each other and are bonded. The contour resonator includes a first excitation electrode provided on a front main surface of the first vibrating substrate, a second excitation electrode provided on a back main surface of the second vibrating substrate, and a common intermediate excitation electrode provided at an interface between the first vibrating substrate and the second vibrating substrate. The first excitation electrode and the second excitation electrode are electrically connected to constitute a first terminal. The intermediate excitation electrode constitutes a second terminal. The first vibrating substrate and the second vibrating substrate perform a contour vibration in accordance with an excitation signal applied between the first terminal and the second terminal.
    Type: Grant
    Filed: April 8, 2008
    Date of Patent: November 16, 2010
    Assignee: Seiko Epson Corporation
    Inventor: Akinori Yamada
  • Publication number: 20100277041
    Abstract: A flexural vibration piece includes: a base portion; and a vibration arm extending from the base portion, wherein the vibration arm has first and second main faces which are arranged to be opposite each other, the first and second main faces respectively have first and second grooves which are formed in the longitudinal direction of the vibration arm, the first groove has a plurality of first groove portions which are divided in the longitudinal direction of the vibration arm and arranged to be alternately shifted on both sides with respect to the longitudinal center line of the vibration arm in the longitudinal direction, the second groove has a plurality of second groove portions which are divided in the longitudinal direction of the vibration arm, and arranged to be alternately shifted on both sides with respect to the longitudinal center line of the vibration arm in the longitudinal direction and on an opposite side to the first groove portions with respect to the longitudinal center line, and a predeterm
    Type: Application
    Filed: April 27, 2010
    Publication date: November 4, 2010
    Applicants: Epson Toyocom Corporation, Seiko Epson Corporation
    Inventors: Takashi YAMAZAKI, Makoto FURUHATA
  • Patent number: 7825566
    Abstract: Provided are an ultrasonic actuator and a method for manufacturing an piezoelectric deformation portion in which wiring a drive circuit can be easily processed, and in which productivity can be increased. The ultrasonic actuator comprises: a triangular vibrating member which has a piezoelectric deformation portion which is deformed by driving signals; a moving member that is pressure-contacted to at least one of the vertices of the vibrating member and generates a movement relative to the vibrating member; and a plurality of external electrodes integrally provided on one side surface of the vibrating member; wherein the piezoelectric deformation portion is formed by alternately laminating piezoelectric layers made of piezoelectric material and internal electrode layers including internal electrodes, and the plurality of external electrodes interconnect the internal electrodes in a prescribed combination.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: November 2, 2010
    Assignee: Konica Minolta Opto, Inc.
    Inventor: Takashi Matsuo
  • Patent number: 7816841
    Abstract: A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.
    Type: Grant
    Filed: June 4, 2008
    Date of Patent: October 19, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki
  • Publication number: 20100253184
    Abstract: An apparatus for generating electrical energy may include; a first electrode, a second electrode spaced apart from the first electrode, a nanowire which includes a piezoelectric material and is disposed on the first electrode, an active layer disposed on the first electrode, a conductive layer disposed on the active layer, and an insulating film disposed between the conductive layer and the nanowire, wherein the nanowire and the active layer are electrically connected to each other. A method for manufacturing an apparatus for generating electrical energy may include; disposing a nanowire including a piezoelectric material on a first electrode, disposing an active layer, which is electrically connected to the nanowire, on the first electrode, disposing an insulating film on the nanowire, disposing a conductive layer on the active layer, and disposing a second electrode in proximity to the nanowire and substantially opposite to the first electrode.
    Type: Application
    Filed: August 5, 2009
    Publication date: October 7, 2010
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dukhyun CHOI, Jaeyoung CHOI
  • Patent number: 7808163
    Abstract: A multilayer composite includes at least two composites, each composite having a film and an electronically conductive layer. Several composites are laminated to provide an increased conversion between mechanical and electrical energies not only due to the multiplication of the effect of each layer, but also due to the fact that the multilayer structure itself renders the multilayer composite more rigid. In addition, the multilayer structure facilitates application of an electrical field over thinner portions of the structure, thereby requiring much less potential difference between electrodes.
    Type: Grant
    Filed: June 2, 2009
    Date of Patent: October 5, 2010
    Assignee: Danfoss A/S
    Inventors: Mohamed Yahia Benslimane, Peter Gravesen
  • Publication number: 20100242615
    Abstract: A pressure transducer comprising a housing and a piezoelectric resonator in the housing, wherein the resonator is made of a piezoelectric crystal having Curie temperature greater than 1000° C. or having no Curie temperature up to its melting point greater than 1000° C., and the piezoelectric crystal has a piezoelectric constant more than two times greater than that of quartz.
    Type: Application
    Filed: March 31, 2009
    Publication date: September 30, 2010
    Applicant: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: SHIGERU SATO, JUEI IGARASHI
  • Publication number: 20100237750
    Abstract: A piezoelectric thin film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of the periphery of the upper electrode is reversely tapered.
    Type: Application
    Filed: November 30, 2009
    Publication date: September 23, 2010
    Applicant: FUJITSU LIMITED
    Inventors: Takeshi SAKASHITA, Motoaki Hara, Masafumi Iwaki, Tsuyoshi Yokoyama, Shinji Taniguchi, Tokihiro Nishihara, Masanori Ueda
  • Publication number: 20100231658
    Abstract: A liquid ejecting head includes a flow channel forming substrate in which pressure generating chambers in communication with nozzles are formed; a piezoelectric element made up of a first electrode formed over the flow channel forming substrate, a piezoelectric layer formed over the first electrode and a second electrode formed over the piezoelectric layer; and a coating film provided by coating the piezoelectric element, wherein a hollow section formed by removing the coating film and a part of the second electrode is provided at an area opposite to the piezoelectric element, and an inclination angle ?1 of an end face of the coating film defining the hollow section with respect to the flow channel forming substrate and an inclination angle ?2 of an end face of the second electrode defining the hollow section satisfy a relationship of ?2<?1.
    Type: Application
    Filed: March 10, 2010
    Publication date: September 16, 2010
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Masato SHIMADA
  • Publication number: 20100231657
    Abstract: A piezoelectric element 10 includes a supporting body 12, a lower electrode 16 that is formed over the supporting body, a piezoelectric layer 20 that is formed over the lower electrode, and an upper electrode 24 that is formed over the piezoelectric layer so as to oppose the lower electrode via the piezoelectric layer. A step portion 20A is formed at a peripheral portion of the piezoelectric layer at a side of the lower electrode such that a surface of the piezoelectric layer at the side of the lower electrode is larger than a surface of the piezoelectric layer at a side of the upper electrode.
    Type: Application
    Filed: March 4, 2010
    Publication date: September 16, 2010
    Inventor: Shuji Takahashi
  • Publication number: 20100225709
    Abstract: Provided are a piezoelectric element that can effectively utilize a piezoelectric constant d15 to increase a deflection displacement of a vibrating plate, and devices using the piezoelectric element. The piezoelectric element includes: a first electrode; a second electrode; a vibrating plate that is in contact with the first electrode; a piezoelectric film provided between the first electrode and the second electrode; at least one recess formed on the second electrode side of the piezoelectric film; and a third electrode formed on an inner side wall of the at least one recess, in which the third electrode is connected to the second electrode.
    Type: Application
    Filed: March 4, 2010
    Publication date: September 9, 2010
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Kaoru Miura, Tatsuo Furuta
  • Patent number: 7788978
    Abstract: The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It is provided a supporting member for supporting a vibrator with bonding wires. The supporting member has a supporting plate with an opening formed therein to be positioned direct under a vibrator, and a bonding wire comprising a bonding end to be bonded with the vibrator, a fixed portion fixed on the supporting plate and a bent portion direct under the opening. A distance “L1” between the bent portion and a position where the bonding wire starts to protrude from the supporting plate is 10 percent or more of a distance “L2” of the bent portion and the bonding end.
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: September 7, 2010
    Assignee: Seiko Epson Corporation
    Inventors: Seiji Ishikawa, Takayuki Kikuchi, Shigeki Hayashi
  • Patent number: 7791434
    Abstract: An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, and a second electrode. The substrate has a first surface and the first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material, and the second electrode lies in a first plane and has an edge. The layer of piezoelectric material has a recessed feature adjacent the edge of the second electrode.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: September 7, 2010
    Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
    Inventors: Ronald S. Fazzio, Hongjun Feng
  • Patent number: 7781946
    Abstract: A piezoelectric element includes: a base substrate; a lower electrode formed above the base substrate; a ferroelectric layer formed above the lower electrode; and an upper electrode formed above the ferroelectric layer, wherein an angle of a corner defined by a side surface of the ferroelectric layer and a top surface of the base substrate is between 45° and 75°.
    Type: Grant
    Filed: March 13, 2008
    Date of Patent: August 24, 2010
    Assignee: Seiko Epson Corporation
    Inventors: Hideto Izumi, Masao Nakayama
  • Publication number: 20100194248
    Abstract: A piezoelectric oscillator includes a substrate, a supporting section formed above the substrate, an oscillation section having one end affixed to the supporting section and another free end, and a driving section that is formed above the oscillation section and generates flexing vibration in the oscillation section. The driving section includes a first electrode, a piezoelectric layer formed above the first electrode, and a second electrode formed above the piezoelectric layer, and the oscillation section is composed of a material that is different from a material of the supporting section. The oscillation section is composed of single crystal silicon, and the supporting section is composed of polycrystal silicon or amorphous silicon.
    Type: Application
    Filed: April 13, 2010
    Publication date: August 5, 2010
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Takamitsu HIGUCHI, Juri KATO, Yasuhiro ONO
  • Publication number: 20100177370
    Abstract: In a piezoelectric transducer element, on a base body having a fixing part and a movable part which are connected with each other, a piezoelectric body which is sandwiched between a lower electrode and an upper electrode is formed in a state where the piezoelectric body extends between and over the fixing part and the movable part of the base body. The piezoelectric body converts a change in potential between the lower electrode and the upper electrode into mechanical displacement of the movable part relative to the fixing part or the mechanical displacement into the change in potential. The upper electrode includes a pad electrode for connection which is formed above the fixing part, and the lower electrode is not formed in a region above the fixing part and below the pad electrode.
    Type: Application
    Filed: March 19, 2010
    Publication date: July 15, 2010
    Applicant: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Masahiro Sakakibara
  • Publication number: 20100171390
    Abstract: To provide an elastic wave device that is small sized and in which a frequency fluctuation due to a change with time hardly occurs, and an electronic component using the above elastic wave device. A trapping energy mode portion 2 provided in an elastic wave waveguide 10 made of an elastic body material excites a second elastic wave being an elastic wave in an energy trapping mode by a specific frequency component included in a first elastic wave being an elastic wave in a first or higher-order propagation mode propagated from a first propagation mode portion 4, and a cutoff portion 3 provided in a peripheral region of the trapping energy mode portion 2 has a cutoff frequency being a frequency higher than that of the second elastic wave. A second propagation mode portion mode-converts the second elastic wave leaked through the cutoff portion to a third elastic wave being the elastic wave in the propagation mode to propagate the third elastic wave.
    Type: Application
    Filed: December 30, 2009
    Publication date: July 8, 2010
    Applicant: NIHON DEMPA KOGYO CO., LTD.
    Inventor: Morio Onoe
  • Publication number: 20100171396
    Abstract: A piezoelectric actuator includes a first electrode layer, a piezoelectric layer and a second electrode layer. The first electrode layer is formed on a vibration plate. The piezoelectric layer is formed on the first electrode layer, the piezoelectric layer comprising piezoelectric particles formed on the surface of a self-assembled monolayer. The second electrode layer is formed on the piezoelectric layer to face the first electrode layer. Thus, a self-assembled monolayer is formed, so that the piezoelectric characteristics of a piezoelectric layer and/or the stiffness of the piezoelectric layer may be increased. Thus, piezoelectric characteristics of the piezoelectric actuator may be enhanced, and the required voltage, which is required to realize a proper deformation amount of the piezoelectric actuator, may be decreased. Moreover, the stiffness of the piezoelectric actuator may be increased, so that the vibration remaining at the piezoelectric actuator may be minimized even though the driving is finished.
    Type: Application
    Filed: September 2, 2009
    Publication date: July 8, 2010
    Inventors: Tae-Kyung LEE, Hwa-Sun LEE, Tae-Woon CHA, Seung-Mo LIM, Jae-Chang LEE
  • Publication number: 20100164325
    Abstract: To provide an elastic wave device that is small sized and in which a frequency fluctuation due to a change with time hardly occurs, and an electronic component using the above elastic wave device. A trapping energy mode portion 2 provided in an elastic wave waveguide 10 made of an elastic body material excites a second elastic wave being an elastic wave in an energy trapping mode by a specific frequency component included in a first elastic wave being an elastic wave in a zero-order propagation mode propagated from a first propagation mode portion 4, and a cutoff portion 3 provided in a peripheral region of the trapping energy mode portion 2 has a cutoff frequency being a frequency higher than that of the second elastic wave. A second propagation mode portion mode-converts the second elastic wave leaked through the cutoff portion to a third elastic wave being the elastic wave in the zero-order propagation mode to propagate the third elastic wave.
    Type: Application
    Filed: December 21, 2009
    Publication date: July 1, 2010
    Applicant: NIHON DEMPA KOGYO CO., LTD.
    Inventor: Morio Onoe
  • Publication number: 20100156249
    Abstract: An apparatus for generating electrical energy may include; a first electrode, a second electrode spaced apart from the first electrode, the second electrode having a substantially planar flat plate shape, a conductor which electrically connects the first and second electrodes, and a nanowire disposed on the first electrode, the nanowire including a deformable piezoelectric material, wherein a Schottky contact is formed between the nanowire and the second electrode as the nanowires is deformed.
    Type: Application
    Filed: June 10, 2009
    Publication date: June 24, 2010
    Applicants: Samsung Electronics Co., Ltd.
    Inventors: Dukhyun CHOI, Jaeyoung CHOI, Sang Woo KIM
  • Publication number: 20100148637
    Abstract: A piezoelectric layer has a multilayer structure including a tensile stress layer and a compression stress layer. The mechanical strength of the piezoelectric layer is increased to prevent the occurrence of cracks and to realize a high electromechanical coupling coefficient. An acoustic resonator 1 includes a first electrode 13 including at least one conductive layer, a piezoelectric layer 14 including a plurality of layers, the piezoelectric layer 14 being formed adjacent to the top face of the first electrode 13, and a second electrode 15 including at least one conductive layer, the second electrode 15 being formed adjacent to the top face of the piezoelectric layer 14. The piezoelectric layer 14 includes a tensile compression layer 23 in which tensile stress is present and compression stress layers 21 and 25 in which compression stress is present. The tensile stress in the tensile stress layer 23 and the compression stress in the compression stress layers 22 and 25 are adjusted to cancel each other.
    Type: Application
    Filed: November 28, 2006
    Publication date: June 17, 2010
    Applicant: SONY CORPORATION
    Inventor: Kei Satou
  • Publication number: 20100148638
    Abstract: A piezoelectric resonator that achieves stable quality and improved resonance characteristics includes an acoustic reflector portion disposed between a substrate and a vibration portion, which includes a piezoelectric thin film sandwiched between a pair of electrodes, and a plurality of low acoustic impedance layers made of a material having relatively low acoustic impedance and a plurality of high acoustic impedance layers formed made of a material having relatively high acoustic impedance, the acoustic impedance layers being disposed alternately, and adjustment layers, which are disposed between the high acoustic impedance layers and the low acoustic impedance layers on the substrate sides of the high acoustic impedance layers and which have an acoustic impedance value intermediate between that of the high acoustic impedance layers and that of the low acoustic impedance layers.
    Type: Application
    Filed: March 1, 2010
    Publication date: June 17, 2010
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventor: Keiichi UMEDA
  • Publication number: 20100140379
    Abstract: A stacked piezoelectric device 1 including a ceramic laminate formed by laminating piezoelectric ceramic layers and inner electrode layers alternately and a pair of side electrodes. The inner electrode layers 13 and 14 have inner electrode portions 131 and 141 and the recessed portions 132 and 142. The ceramic laminate 15 has the stress absorbing portions 11 and 12. A recessed distance of one of two of the recessed portions 132 and 142 which interleave the stress absorbing portions 11 and 12 therebetween which is located on the same side surface as the stress absorbing portion 11 or 12 is greater than the depth of the stress absorbing portion 11 and 12.
    Type: Application
    Filed: February 26, 2008
    Publication date: June 10, 2010
    Applicant: Denso Corporation
    Inventors: Satoshi Suzuki, Atsushi Murai, Hiroaki Asano, Kouji Noda, Toshiatu Nagaya, Akio Iwase, Akira Fujii, Shige Kadotani
  • Publication number: 20100139621
    Abstract: A stacked piezoelectric device 1 includes a ceramic laminate 15 formed by laminating a plurality of piezoelectric ceramic layers 11 and a plurality of inner electrode layers 13 and 14 alternately and a pair of side electrodes 17 and 18 formed on side surfaces thereof. The inner electrode layers 13 and 14 are connected electrically to either of the side electrodes. The ceramic laminate 15 has absorbing portions 12 formed in slit-like areas recessed inwardly from the side surfaces thereof. The stress absorbing portions are easier to deform than the piezoelectric ceramic layers 11. Adjacent two of the inner electrode layers 13 and 14 interleaving the stress absorbing portion 12 therebetween are both connected electrically to the positive side electrode 17.
    Type: Application
    Filed: February 26, 2008
    Publication date: June 10, 2010
    Applicant: DENSO CORPORATION
    Inventors: Atsushi Murai, Satoshi Suzuki, Toshiatu Nagaya, Akio Iwase, Akira Fujii, Shige Kadotani
  • Patent number: 7729768
    Abstract: Implantable cardiac motion powered piezoelectric energy sources are provided. An aspects of embodiments of the subject implantable energy sources is that they include a piezoelectric transducer that converts cardiac mechanical energy to electrical energy. The subject energy sources find use in a variety of applications, including providing power to a wide range of implantable devices.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: June 1, 2010
    Assignee: Proteus Biomedical, Inc.
    Inventors: Robert White, George Savage, Mark Zdeblick
  • Patent number: 7721397
    Abstract: A capacitive ultrasonic transducer includes a flexible layer, a first conductive layer on the flexible layer, a support frame on the first conductive layer, the support frame including a flexible material, a membrane over the support frame being spaced apart from the first conductive layer by the support frame, the membrane including the flexible material, a cavity defined by the first conductive layer, the support frame and the membrane, and a second conductive layer on the membrane.
    Type: Grant
    Filed: February 7, 2007
    Date of Patent: May 25, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Ming-Wei Chang, Tse-Min Deng, Te-I Chiu, Mu-Yue Chen, Da-Chen Pang, Ping-Ta Tai
  • Publication number: 20100109489
    Abstract: In a piezoelectric device that uses a vibration mode in a direction parallel to a polarization direction, a single crystal device that achieves an electromechanical coupling factor of 65% or more, which is more than the electromechanical coupling factor (about 60%) of the existing flat plane type piezoelectric single crystal device in that vibrational direction, is provided by performing certain treatment to its device plane. Specifically, a piezoelectric portion having a comb-shaped structure in which a plurality of slits are formed with a certain arrangement pitch on either of device planes whose polarization direction is their normal direction, the slits having a depth extending in a direction substantially perpendicular to the device plane and being filled with an insulating material, is formed to achieve 65% or more of an electromechanical coupling factor in a direction parallel to the polarization direction.
    Type: Application
    Filed: April 14, 2008
    Publication date: May 6, 2010
    Applicant: JFE MINERAL COMPANY, LTD.
    Inventor: Mitsuyoshi Matsushita
  • Publication number: 20100102680
    Abstract: A piezoelectric element that is high in piezoelectric performance and large in displacement and is reliable is provided. The piezoelectric element includes a piezoelectric material containing BaTi2O5 as the principal constituent material and an inner electrode that applies voltage to the piezoelectric material. In this piezoelectric element, an electrode material (a mixture of Ru and RuO2) excellent in lattice matching with the piezoelectric material BaTi2O5 is used as the principal constituent material of the inner electrode.
    Type: Application
    Filed: October 21, 2009
    Publication date: April 29, 2010
    Inventor: Tomio IWASAKI
  • Patent number: 7694406
    Abstract: A composite structure of a backing material with enhanced conductivity for use in a transducer is presented. The composite structure includes a plurality of layers of backing material alternatingly arranged with a plurality of thermal conductive elements, wherein the plurality of thermal conductive elements are configured to transfer heat from a center of the transducer to a plurality of points on the composite structure of backing material.
    Type: Grant
    Filed: July 28, 2006
    Date of Patent: April 13, 2010
    Assignee: General Electric Company
    Inventors: Douglas Glenn Wildes, Charles Edward Baumgartner, Petrus Joannes Joseph Moeleker, Bruno Hans Haider