Movable Contact Probe, Per Se Patents (Class 33/559)
  • Patent number: 11409258
    Abstract: An information processing device is connected to a measurement device provided in the vicinity of a machine tool for machining a workpiece using a tool and a numerical control device configured to control the machine tool. The information processing device includes: a display unit configured to display information; a first acquisition unit configured to acquire, from the measurement device, measurement information measured by the measurement device; a second acquisition unit configured to acquire, from the numerical control device, state information indicating a state of the machine tool; and a display control unit configured to cause the display unit to display the measurement information and the state information.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: August 9, 2022
    Assignee: FANUC CORPORATION
    Inventor: Sichen Liu
  • Patent number: 11300396
    Abstract: A non-Cartesian coordinate positioning machine that includes an extendable leg assembly for positioning a component such as a measurement probe within a working volume of the machine. The extendable leg assembly includes a first member and a second member which move relative to one another when the extendable leg assembly changes length. The first member including an axial arrangement of magnets forming part of a linear motor for extending and retracting the extendable leg assembly, and at least one resilient member for absorbing at least some of any axial thermal expansion or contraction of the magnets in use.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: April 12, 2022
    Assignee: RENISHAW PLC
    Inventor: Stephen Mark Angood
  • Patent number: 11204229
    Abstract: An articulating probe head for a measuring system comprising cooling elements. The cooling elements are modulated in response to the temperature of or the power dissipated in the probe head such that its temperature remains stable during operation.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: December 21, 2021
    Assignee: TESA SA
    Inventors: Dikran Antreasyan, Laurent Demierre
  • Patent number: 11118889
    Abstract: In a method for measuring a gauge (20), the invention provides a standard (30). The standard has a calibrated standard distance (33) between a standard reference plane (31) and a standard detection line (35), being mutually parallel. When the standard is placed with its standard reference plane onto a gauge reference plane (21), the standard is traced with a tracing point (12) of a measuring apparatus (10). Thereby it is possible to reliably measure the distance (43) between the standard detection line (35) and the apparatus reference plane (11), and hence the distance between the gauge reference plane (21) and the apparatus reference plane (11). The invention allows to reliably measure gauges in an affordable, non-complex measuring apparatus, in cases where, in order to reliably measure gauges in the apparatus, such gauges cannot be placed with their gauge reference planes onto the apparatus reference plane.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: September 14, 2021
    Inventor: Reginald Galestien
  • Patent number: 11105605
    Abstract: A metrology device with automated compensation and/or alert for orientation errors. The device may include a processor, a probe portion and at least one orientation sensor. The probe provides an output representative of a raw measurement of a characteristic of a device under test and the orientation sensor provides a sensor output representative of an orientation of the metrology device to the device under test. The processor applies a correction factor to the raw measurement in response to the sensor output to establish a compensated measurement to compensate for misalignment of the metrology device to the device under test. In addition, or alternatively, the processor provides an alert indicating the existence and/or extent of the misalignment.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: August 31, 2021
    Assignee: THE L.S. STARRETT COMPANY
    Inventor: Jeffrey M. Wilkinson
  • Patent number: 10969298
    Abstract: A multi-dimensional vibration control method based on piezoelectric ceramic actuator applied to wind tunnel test of aircraft model. The pitch and yaw acceleration sensors arranged on the center of mass of the aircraft model are used to measure the two components of the main vibration acceleration of the aircraft model, and the main vibration vector of the aircraft model is obtained and the real-time vibration plane of the strut is determined. Inertia is introduced to solve the dynamic bending moment on the active section of the multi-dimensional vibration damper, and then the stress distribution on the active section is obtained. The multi-dimensional active vibration control system is adopted to improve the stability and reliability of the active vibration control system of wind tunnel model, extend the service life of piezoelectric ceramic actuator, and ensure the quality of wind tunnel test data and the safety of wind tunnel test.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: April 6, 2021
    Assignee: DALIAN UNIVERSITY OF TECHNOLOGY
    Inventors: Wei Liu, Mengde Zhou, Bing Liang, Linlin Tang, Zhuang Yao, Zhengquan Wen, Yang Zhang, Likun Si, Zhenyuan Jia
  • Patent number: 10724841
    Abstract: There are provided a detector, a surface property measuring machine and a roundness measuring machine for automatically measuring a plurality of surfaces to shorten the time necessary for measurement. This problem is solved by a detector provided with a stylus for supporting a contact coming in contact with a surface of an object to be measured, a holder configured to hold the stylus, a measuring part configured to hold the holder to be capable of swinging by a rotating shaft and detect a displacement of the holder, and a body configured to accommodate the measuring part, wherein the holder holds the stylus such that a stylus axis as an axis of the stylus and a body axis as an axis of the body are in parallel, and the stylus axis and the body axis are offset in a first direction perpendicular to the body axis and the rotating shaft.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: July 28, 2020
    Assignee: Tokyo Seimitsu Co., Ltd.
    Inventor: Hideki Morii
  • Patent number: 10605581
    Abstract: An articulating probe head for a measuring system comprising cooling elements. The cooling elements are modulated in response to the temperature of or the power dissipated in the probe head such that its temperature remains stable during operation.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: March 31, 2020
    Assignee: TESA SA
    Inventors: Dikran Antreasyan, Laurent Demierre
  • Patent number: 10591271
    Abstract: A method for calibrating a rotating device attached to a movable part of a coordinate measuring device having a first part secured to the movable part and a second part rotatable relative to the first part about an axis of rotation of the turning device, on which second part a measuring sensor for measuring workpieces can be attached. The rotating device or a body connected to the second part is moved to a local area of a position determining device by a drive system of the coordinate measuring device, which position measuring device is connected to the coordinate measuring device, by means of at least one sensor of the position determining device. A position of the rotating device or of the body connected to the second part is determined relative to the position determining device, and the rotating device is calibrated in accordance with the determined position.
    Type: Grant
    Filed: September 12, 2017
    Date of Patent: March 17, 2020
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Tobias Held, Rainer Sagemueller, Dominik Seitz
  • Patent number: 10514257
    Abstract: There is provided a detecting device which detects a contact with an object, which includes, a fixed portion provided in the detecting device, a shaft portion, and a base portion which is connected to the shaft portion and configured to move relative to the fixed portion, a sensor which measures a displacement resulting from an inclination of the base portion relative to the fixed portion caused by a contact between an object and the shaft portion, and a control portion which determines if a contact between an object and the shaft portion occurs or not based on the measured displacement.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: December 24, 2019
    Assignee: DMG MORI Company Limited
    Inventors: Ken Onoe, Akira Kimura, Ryosuke Kamiko
  • Patent number: 10011491
    Abstract: A polycrystalline CVD diamond material comprising a surface having a surface roughness Rq of less than 5 nm, wherein said surface is damage free to the extent that if an anisotropic thermal revealing etch is applied thereto, a number density of defects revealed by the anisotropic thermal revealing etch is less than 100 per mm2.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: July 3, 2018
    Assignee: Element Six Technologies Limited
    Inventors: Chee-Leong Lee, Erdan Gu, Geoffrey Alan Scarsbrook, Ian Friel, Martin David Dawson
  • Patent number: 9983107
    Abstract: The field of the invention generally relates to probes, related devices and methods for measuring material properties. In an embodiment, the present invention provides a test probe for use in a reference point indentation device. The test probe has an end proximal to a tip and an end distal to the tip. The distal end of the test probe has a self-centering mate comprising a countersink of about 90 degrees to about 100 degrees to a depth of between 0.010 in. and 0.035 in.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: May 29, 2018
    Assignee: The Regents of the University of California
    Inventors: Paul K. Hansma, Connor Randall, Daniel Bridges
  • Patent number: 9874439
    Abstract: Multidirectional roughness measurement insert for determining a measured variable that is characteristic of the roughness of a surface, having a carrier body on which a stylus holder is arranged for holding a stylus, an analog sensor, which converts the movements of the carrier body into measurement signals that are characteristic of the roughness of a surface of workpiece, a stylus to be coupled to the carrier body, comprising a rod-shaped shaft and a scanning head mounted on the shaft, wherein the scanning head is at least one section of a test body, which is essentially rotationally symmetrical to at least one section of the rod-shaped shaft, or wherein the scanning head is at least one section of an essentially rotationally symmetrical test body, which is arranged on a distal end of at least one section of the rod-shaped shaft.
    Type: Grant
    Filed: September 3, 2014
    Date of Patent: January 23, 2018
    Assignee: Blum-Novotest GmbH
    Inventors: Heribert Bucher, Wolfgang Reiser, Norbert Moersch
  • Patent number: 9869537
    Abstract: A contact probe includes a stylus, a spring, a magnetic body, and a permanent magnet. The stylus is displaceable in an X direction and a tip of the stylus makes contact with a measured object. A first end of the spring is fixated and a second end provides spring force along the X direction. A position of the magnetic body is fixated with respect to the stylus. The permanent magnet is arranged separated from the magnetic body so as to generate a magnetic force along the X direction between the magnetic body and the permanent magnet.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: January 16, 2018
    Assignee: MITUTOYO CORPORATION
    Inventors: Kazuhiko Hidaka, Takeshi Yamamoto
  • Patent number: 9835433
    Abstract: A touch probe for a coordinate measuring machine with a processor which is programmed to generate a trigger signal signalling a contact between a stylus of the probe and a workpiece, whenever one of a plurality displacement signals exceeds a corresponding threshold. In addition, or in alternative, a delayed trigger is generated based on a processing a plurality of samples of displacement signals that are stored in a buffer. The processor is programmed to minimize anisotropy of the probe response. Furthermore, the thresholds can be modified during operations based on commands received from the CMM controller.
    Type: Grant
    Filed: May 9, 2017
    Date of Patent: December 5, 2017
    Assignee: TESA SA
    Inventors: Dikran Antreasyan, Christophe Jaquet, Serge Mariller
  • Patent number: 9599446
    Abstract: A small sealing gauge may include a body that is attached to a site to be measured, a lever that linearly moves by contact with a moving part while moving in a state of being inserted into a hole of the body, and a dial gauge that is inserted to a back side of the hole in the body to measure an amount of movement of the lever through contact with the lever.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: March 21, 2017
    Assignee: Hyundai Motor Company
    Inventors: Tae Il Min, Si Yoon Lee
  • Patent number: 9551559
    Abstract: The 3D contact measuring device senses work pieces in machine tools for adjusting the zero point of a numerically controlled machine tool or for positioning tasks. The device comprises a preferably elongated housing, a sensing arm projecting from the housing and bearing a sensing tip. The sensing arm being movable in the direction of a measuring axis and pivotable in all directions about the measuring axis. A sensing lever is connected to the sensing arm and forms the first universal joint, and a measuring device for detecting a parameter, which characterizes the displacement and/or the pivoting of the sensing arm. A further control surface forms a second universal joint. An elongated toothed rack of a gear transmission is aligned along the measuring axis and is movably supported and is coupled to the sensing lever via the second universal joint.
    Type: Grant
    Filed: December 12, 2012
    Date of Patent: January 24, 2017
    Assignee: Tschorn GmbH
    Inventor: Ralf Tschorn
  • Patent number: 9303968
    Abstract: A lever-type measuring machine swinging around a supporting point includes a stylus measuring a shape of a measured object, an arm having a first end connected to the stylus and a second end connected to the supporting point, and a balancer having a first end connected to the supporting point. The balancer is formed of a material having high specific flexural rigidity. The lever-type measuring machine enables more accurate measurement.
    Type: Grant
    Filed: September 11, 2014
    Date of Patent: April 5, 2016
    Assignee: MITUTOYO CORPORATION
    Inventors: Yasunori Mori, Takeshi Yamamoto, Atsushi Shimaoka, Tomoyuki Miyazaki, Kazuhiko Hidaka
  • Patent number: 9038282
    Abstract: A method of operating a coordinate positioning apparatus comprising an articulated head having at least one rotational axis. The method comprises, in any suitable order, loading at least one interchangeable task module onto the articulated head; and loading at least one interchangeable task module counterweight on the articulated head. The at least one interchangeable task module counterweight at least partially counterbalances the weight of the at least one task module on the articulated head about the at least one axis.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: May 26, 2015
    Assignee: RENISHAW PLC
    Inventors: David R. McMurtry, Nicholas J. Weston, Richard G. Dewar, Matthew H. Freeman
  • Patent number: 9009985
    Abstract: A probe deployment mechanism of a coordinate measuring machine provides for extending and retracting a probe. The probe is displaceable with respect to the actuator body connected to the measuring machine. A locator coupling secures the probe to the actuator body at the extended position for taking measurements. A drive coupled to the probe displaces the probe between the extended and retracted positions but at the extended position, the drive is releasable from the probe for kinetically isolating the locator coupling.
    Type: Grant
    Filed: April 30, 2013
    Date of Patent: April 21, 2015
    Assignee: Quality Vision International, Inc.
    Inventors: William E. Stevens, Jason Patti, David E. Lawson
  • Patent number: 8991246
    Abstract: A gear measuring method allows multi-point continuous measurement using a touch probe and is capable of reducing measuring time compared with known methods. For example, a base action for moving a sensing element of a touch probe along an ideal tooth form line of a workpiece (gear; W) or a tooth form line determined by calculation by controlling the movement of the sensing element and the rotation of the workpiece (W) and, in addition, an oscillation action for receiving first signals (ON signals or OFF signals) from the touch probe by bringing the sensing element into contact with the tooth surface of the workpiece during the base action and subsequently for receiving second signals (OFF signals or ON signals) from the touch probe by moving the touch probe in a direction along which the sensing element is separated from the tooth surface of the workpiece are continuously performed.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: March 31, 2015
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Yoko Hirono, Takahide Tokawa, Naohiro Otsuki, Yoshihiro Nose
  • Patent number: 8832953
    Abstract: An improved coordinate measuring apparatus is provided. The coordinate measuring apparatus has a device that holds a CMM adapter plate in a way that simulates the locating points on the electromagnetic device in the CMM. Once in place, the threaded cube on the adapter plate is aligned to the CMM machine axes by holding a sliding V-block on the device against any corner of the cube. The screws that hold the threaded cube in the adapter plate are then tightened, and the adapter plate is released from the device. The threaded cube is now square to the CMM X-Y-Z axes.
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: September 16, 2014
    Assignee: Q-Mark Manufacturing, Inc.
    Inventors: Mark Osterstock, Clinton S. Clark
  • Patent number: 8782915
    Abstract: A measuring device (10) and method for measuring a surface profile of a workpiece. A measuring carriage (15) is moved in a straight line at a distance from the workpiece surface in a moving direction (x), without accelerating a carried probe tip (25). The free probe end (40) of the probe tip (25) rests on the workpiece surface (11) with a measuring force (Fm) and is deflected during the measurement in a measuring direction (z), transverse to moving direction (x), the surface profile causes a track-dependent deflection (zT) of the probe end (49). A measured value receiver (45) detects the deflecting value (s) describing the deflection of the probe end (40) in measuring direction (z). In an analyzing unit (21), a measuring force change value describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is formed for detecting measuring errors/inaccuracies.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: July 22, 2014
    Assignee: Carl Mahr Holding GmbH
    Inventors: Matthias Reitemeyer, Heinz-Joachim Kedziora
  • Publication number: 20140173924
    Abstract: A soft collision grating scale and measuring method thereof comprises a fixed scale, a sliding auxiliary scale slidably disposed relative to the fixed scale, and a moving pin sliding relative to the sliding auxiliary scale. The moving pin and the sliding auxiliary scale move synchronically. A buffering mechanism is disposed on the moving pin. When the moving pin sliding relative to the sliding auxiliary scale cooperates with a buffering force of the buffering mechanism, a collision between the moving pin and stopping faces of an inspected target is automatically offset to attain a soft collision effect, which prevents the moving pin from breaking to keep an normal measurement operation and increases the precision of measurement by the fact that the sliding auxiliary scale does not rebound and an offset distance caused by reversely moving the moving pin relative to the sliding auxiliary scale can be computed.
    Type: Application
    Filed: September 8, 2011
    Publication date: June 26, 2014
    Applicant: GUANGDONG RATIONAL PRECISION INSTRUMENT CO., LTD.
    Inventor: Mengliang Wu
  • Patent number: 8726409
    Abstract: A method for operating a scanning probe microscope at elevated scan frequencies has a characterization stage of sweeping a plurality of excitation frequencies of the vertical displacement of the scanning element; measuring the value attained by the reading parameter at the excitation frequencies; and identifying plateau regions of the response spectrum of the reading parameter. The reading parameter variation is limited within a predetermined range over a predefined frequency interval, thereby defining corresponding fast scanning frequency windows in which the microscope assembly is sufficiently stable to yield a lateral resolution comparable to the one obtained during slow measurements. The measurement stage includes driving the scanning element along at least a scanning trajectory over the surface of the specimen at a frequency selected among the frequencies included in a fast scanning frequency window.
    Type: Grant
    Filed: September 12, 2011
    Date of Patent: May 13, 2014
    Assignee: Consiglio Nazionale Delle Ricerche
    Inventors: Friedrich Esch, Carlo Dri, Giovanni Comelli, Cristina Africh, Alessio Spessot
  • Publication number: 20140068958
    Abstract: There are provided a first (Y-axial direction) moving unit, a movement auxiliary unit for moving in substantially parallel with the first moving unit, and a second (X-axial direction) moving unit for moving substantially perpendicular to the first moving unit. Force generated for moving the second moving unit is received by the movement auxiliary unit to perform driving of the XY directions. Thus, when a measuring probe provided on the second moving unit is scanned in the XY directions, vibrations of the first moving unit can be suppressed without the first moving unit receiving a counteraction of force that acts in a direction substantially perpendicular to the moving direction of the first moving unit.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 13, 2014
    Applicant: Panasonic Corporation
    Inventor: Keishi KUBO
  • Patent number: 8578619
    Abstract: A contact type prove achieves a high-precision measurement of a shape of even a steeply-inclined surface in the vicinity of vertical by controlling a contact force stably. In a shape measuring method for measuring the shape of the surface of a measured object by moving a contact type probe along the surface of the measured object, a slope of the measured object surface is estimated depending on the magnitude of a component force of the contact force applied to the probe and when it is determined that the slope is in the vicinity of vertical, a probe supporting unit is moved in a direction perpendicular to the moving direction of the probe supporting unit.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: November 12, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventor: Ryusuke Nakajima
  • Patent number: 8533970
    Abstract: An apparatus for measuring objects, in particular to a coordinate measuring unit, is provided. The unit has a probe which is movable relative to an object to be measured by means of an actuator to sample the surface of the object in a contacting manner, wherein a sampling body, whose front end is designed as a measuring tip for a contact with the object is supported at the probe. The relative position of the measuring tip with respect to the probe is determined. The sampling body is supported at the probe with movement play along at least one direction. A change in the inclination of the sampling body relative to the probe, or vice versa, can be detected via a measurement of a test parameter.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: September 17, 2013
    Assignee: Stotz Feinmesstechnik GmbH
    Inventor: Milan Stamenkovic
  • Patent number: 8468707
    Abstract: A diamond element (10) having a convex surface is disclosed, the convex surface including a spherical segment for which the maximum peak to valley deviation from a perfect spherical surface is less than about 5 ?m. The diamond element (10) may be a solid polycrystalline diamond material and/or may comprise base material which is coated with diamond. Alternatively or in addition, the RMS deviation from a perfect spherical surface may be less than about 500 nm, or the RMS roughness less than about 30 nm. A diamond element (10) with a radius of curvature less than about 20 mm is also disclosed. In one aspect a diamond element (10) having a conical half-angle greater than about 10° is described. Diamond elements (10) of this type are intended for use as metrology tips.
    Type: Grant
    Filed: January 18, 2008
    Date of Patent: June 25, 2013
    Assignee: Element Six Limited
    Inventors: Geoffrey Alan Scarsbrook, Timothy Peter Mollart
  • Publication number: 20130108725
    Abstract: An injection unit includes a cylinder casing comprising an inner cylindrical surface extending along an axis, and a piston housed in the casing and translatable along the axis between an advanced and a retracted position. The piston includes a piston radial surface in facing relation to the inner cylindrical surface, and the piston radial surface has a measurement detection feature. A probe is fixed relative to the cylinder casing, the probe communicating with the measurement detection feature when the piston is in and moving between the advanced and retracted positions to measure the translation of the piston.
    Type: Application
    Filed: May 17, 2011
    Publication date: May 2, 2013
    Applicant: ATHENA AUTOMATION LTD.
    Inventors: Robert D. Schad, Carsten Link, Stephen Mracek
  • Patent number: 8402668
    Abstract: An improved coordinate measuring apparatus is provided. The coordinate measuring apparatus has a device that holds a CMM adapter plate in a way that simulates the locating points on the electromagnetic device in the CMM. Once in place, the threaded cube on the adapter plate is aligned to the CMM machine axes by holding a sliding V-block on the device against any corner of the cube. The screws that hold the threaded cube in the adapter plate are then tightened, and the adapter plate is released from the device. The threaded cube is now square to the CMM X-Y-Z axes.
    Type: Grant
    Filed: January 6, 2009
    Date of Patent: March 26, 2013
    Assignee: Q-Mark Manufacturing, Inc.
    Inventors: Mark David Osterstock, Clinton Scott Clark
  • Patent number: 8290695
    Abstract: Probe data is analyzed to derive Longitudinal Speed Profiles (LSPs) and an Optimal Longitudinal Speed Profile (18) for each road segment or link in a digital map network. The Longitudinal Speed Profiles (LSPs) profiles are calculated during defined time spans whereas the Optimal Longitudinal Speed Profile (18) is based on the LSP for the time span corresponding only to free flow traffic conditions. All of the LSPs can used to create a respective energy cost for each time span, or only the OLSP (18) can be used (or alternatively the RRDSL 16 or LRRDSL 17) to calculate an energy cost for the free flow conditions only. The energy cost can be used to predict the energy required by a vehicle to traverse the link. Navigation software can use the energy cost to plan the most energy efficient route between two locations in the digital map. Sensory signals can be activated if a driver strays from the Optimal Longitudinal Speed Profile (18) to achieve extremely high levels of energy efficiency.
    Type: Grant
    Filed: January 13, 2010
    Date of Patent: October 16, 2012
    Inventors: Volker Hiestermann, Robert Joannes Van Essen, Edwin Bastiaensen, Stephen T'Siobbel
  • Patent number: 8261461
    Abstract: A linear guiding mechanism includes a fixed member, a moving member, a first double parallel leaf spring mechanism and a second double parallel leaf spring mechanism arranged between the fixed member and the moving member and configured to movably support the moving member. The first double parallel leaf spring mechanism and the second double parallel leaf spring mechanism are arranged at an angle other than 180° (for example, 90°) about an axis of movement of the moving member.
    Type: Grant
    Filed: January 14, 2010
    Date of Patent: September 11, 2012
    Assignee: Mitutoyo Corporation
    Inventors: Atsushi Shimaoka, Takeshi Yamamoto
  • Patent number: 8240057
    Abstract: A method of manufacturing a self-aligned stylus with high sphericity includes the steps of: forming a polymeric layer on a substrate; placing a sphere on the polymeric layer; softening the polymeric layer to make a portion of the sphere sink into the polymeric layer; forming a specific light absorbing layer on the polymeric layer; illuminating the sphere and the specific light absorbing layer with specific light such that the specific light is focused by the sphere to expose the polymeric layer to form an exposed portion and an unexposed portion; removing the specific light absorbing layer; and baking the polymeric layer and then removing the unexposed portion. A self-aligned stylus with high sphericity is also disclosed.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: August 14, 2012
    Assignee: National Taiwan University
    Inventors: Wen-Pin Shih, Yao-Chuan Tsai, Duo-Ru Chang, Li-Chi Tsao, Ming-Dao Wu, Po-Jen Shih
  • Patent number: 8225519
    Abstract: A contact type measurement device performs measurement with displacement of a probe, while a contact member attached to the probe is in contact with an object to be measured. Data on the relationship of a contact force of the probe to the object to be measured with an angle between the central axis of the probe and the direction of gravity, the amount of displacement of the probe, and a fluid pressure for applying a pushing-out or pulling-in force to the probe is stored in advance and, on the basis of this data, the fluid pressure or the amount of displacement of the probe is controlled to automatically and precisely adjust a fine contact force of the probe to the object to be measured.
    Type: Grant
    Filed: February 24, 2011
    Date of Patent: July 24, 2012
    Assignee: Fanuc Corporation
    Inventors: Yonpyo Hon, Kenzo Ebihara, Masayuki Hamura
  • Publication number: 20120096728
    Abstract: A measuring device (10) and method for measuring a surface profile of a workpiece. A measuring carriage (15) is moved in a straight line at a distance from the workpiece surface in a moving direction (x), without accelerating a carried probe tip (25). The free probe end (40) of the probe tip (25) rests on the workpiece surface (11) with a measuring force (Fm) and is deflected during the measurement in a measuring direction (z), transverse to moving direction (x), the surface profile causes a track-dependent deflection (zT) of the probe end (49). A measured value receiver (45) detects the deflecting value (s) describing the deflection of the probe end (40) in measuring direction (z). In an analyzing unit (21), a measuring force change value describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is formed for detecting measuring errors/inaccuracies.
    Type: Application
    Filed: November 4, 2011
    Publication date: April 26, 2012
    Inventors: Matthias Reitemeyer, Heinz-Joachim Kedziora
  • Patent number: 8144340
    Abstract: A surface sensing device for use in position determining apparatus has an elongate stylus with a tip for scanning the surface of a workpiece to be measured. Lateral displacements of the stylus tip are detected by a light beam which passes along the stylus from a light source to a retroreflector. This reflects the beam back via a beamsplitter to a position sensitive detector. The stylus is mounted for longitudinal displacement on a carriage. The longitudinal displacement is measured by another light beam projected by the beamsplitter onto a second position sensitive detector.
    Type: Grant
    Filed: October 26, 2010
    Date of Patent: March 27, 2012
    Assignee: Renishaw PLC
    Inventors: Geoffrey McFarland, Kevyn Barry Jonas
  • Patent number: 8140178
    Abstract: In a simultaneous multi-axis measuring machine tool system including linear drive axes and rotation axes to measure a surface shape of an object to be measured by using an on-board measuring device having a probe mounted, at one end thereof, with a spherical contactor, a numerical controller controls driving of the linear drive axes and the rotation axes so that a central axis of the probe is always oriented in a direction perpendicular to the surface of the object to be measured and that the spherical contactor of the probe comes in contact with and follows a surface of the object to be measured.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: March 20, 2012
    Assignee: Fanuc Ltd
    Inventors: Yonpyo Hon, Kenzo Ebihara, Akira Yamamoto, Masayuki Hamura
  • Patent number: 8051576
    Abstract: An attitude arm mounted to a support arm is rotatable about a pivot. The attitude arm holds a stylus gauge, which generates a signal representing deflection of the stylus in a measurement direction as the stylus follows a surface of a workpiece rotated on a turntable. An attitude switching mechanism allows switching between a first stylus attitude generally aligned with the turntable spindle axis and a second stylus attitude generally aligned perpendicular to the turntable spindle axis. To enable alignment of the measurement direction with the spindle axis, first and second adjusters enable the stylus tip to be moved perpendicular to the spindle axis and the measurement direction when in the first and second stylus attitudes, respectively. An orientation mechanism is provided to rotate the measurement direction of the stylus. A stylus tilt mechanism is provided to tilt the stylus about a tilt axis parallel with the measurement direction.
    Type: Grant
    Filed: May 1, 2007
    Date of Patent: November 8, 2011
    Assignee: Taylor Hobson Limited
    Inventors: Ivor McDonnell, Jeremy Ayres
  • Publication number: 20110232118
    Abstract: A contact type measurement device performs measurement with displacement of a probe, while a contact member attached to the probe is in contact with an object to be measured. Data on the relationship of a contact force of the probe to the object to be measured with an angle between the central axis of the probe and the direction of gravity, the amount of displacement of the probe, and a fluid pressure for applying a pushing-out or pulling-in force to the probe is stored in advance and, on the basis of this data, the fluid pressure or the amount of displacement of the probe is controlled to automatically and precisely adjust a fine contact force of the probe to the object to be measured.
    Type: Application
    Filed: February 24, 2011
    Publication date: September 29, 2011
    Applicant: FANUC CORPORATION
    Inventors: Yonpyo HON, Kenzo EBIHARA, Masayuki HAMURA
  • Patent number: 8006402
    Abstract: A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle ? of the stylus displacement vector D that is caused by a frictional force between a stylus 32 and the measuring surface 5a during scanning of the measuring surface 5a by the stylus 32. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylus 32 relative to the probe 5. Movement of an XY-stage 7 is controlled so that the probe 6 moves in accordance with the moving vector M.
    Type: Grant
    Filed: June 2, 2009
    Date of Patent: August 30, 2011
    Assignee: Panasonic Corporation
    Inventors: Keiichi Yoshizumi, Masateru Doi, Takayuki Kurata
  • Patent number: 7954250
    Abstract: The present invention relates to an apparatus for a Robust CMM Arm with Exoskeleton is provided comprising an Internal CMM Arm and an Exoskeleton driving the Internal CMM Arm through a plurality of transmission means such that one or more internal volumes are sealed against ingress of solid objects and fluids. It also relates to a haptic control of an RCA.
    Type: Grant
    Filed: August 7, 2006
    Date of Patent: June 7, 2011
    Assignee: Nikon Metrology N.V.
    Inventor: Stephen James Crampton
  • Patent number: 7950164
    Abstract: A roundness measuring apparatus includes: a stylus having a contact part; a holding member that holds the stylus while allowing displacement of the contact part; an elastic member that presses the contact part against a measurement target object; a detector holder that supports the holding member rotatably; a motor; an elastic force adjustment member that is rotatable and concentric with the holding member; a joining section that joins the elastic force adjustment member with the holding member to maintain relative rotational positions; and a restricting section that restricts rotation of the elastic force adjustment member at a predetermined rotational position. The displacement direction of the contact part is adjusted in a first rotation range. The rotational position of the holding member relative to the rotational position of the elastic force adjustment member changes with the rotation of the elastic force adjustment member being restricted in a second rotation range.
    Type: Grant
    Filed: July 7, 2010
    Date of Patent: May 31, 2011
    Assignee: Mitutoyo Corporation
    Inventors: Tatsuki Nakayama, Hideki Shindo
  • Patent number: 7934323
    Abstract: The invention relates to a method and a device for the positioning of a displaceable component in an examining system, particularly a measuring or an analytic system wherein, during the process, the displaceable component is displaced with the support of an actuating element coupled to the displaceable component from a home position into an end position, wherein the actuating element is moved by means of a drive force and the displaceable component is impacted with a fixation force fixating the displaceable component in the end position by way of a fixation component connected to the displaceable component, where the fixation component is submerged at least partially in a reservoir of a medium and is fixated in the medium by means of the transformation of the medium from a liquid state into a solidified state, wherein the medium is transformed from the liquid state into the solidified state by means of the impact-application with a manipulating variable.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: May 3, 2011
    Assignee: JPK Instruments AG
    Inventors: Detlef Knebel, Torsten Jähnke
  • Patent number: 7918036
    Abstract: In a surface shape measurement device that measures the surface shape of a sample (W1, W2) by moving a probe (16, 26) in a sliding fashion along the surface of the sample (W1, W2) and thereby detecting the amount of displacement of the probe (16, 26) caused by irregularities on the surface, an initial amount of displacement is detected which is the amount of displacement of the probe (16, 26) when the probe is first placed in contact with a measurement start point on the surface of the sample (W1, W2), and the amount of displacement of the probe (16, 26), detected as it is moved in a sliding fashion along the surface, is compared with the initial amount of displacement to determine whether the probe (16, 26) has reached a measurement end point.
    Type: Grant
    Filed: May 21, 2008
    Date of Patent: April 5, 2011
    Assignee: Tokyo Seimitsu Co., Ltd.
    Inventor: Yasunari Ishikawa
  • Patent number: 7913412
    Abstract: A contour measuring probe includes an air guide, a sliding member and a probe tip. The air guide defines a guide hole. The sliding member is slidably received in the guide hole. The probe tip is fixed on an end of the sliding member. A cross-section of the sliding member is non-circular, and the guide hole is a non-circular hole, such that the sliding member slides only along an axis of the air guide.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: March 29, 2011
    Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.
    Inventor: Fa-Ping Xia
  • Patent number: 7882644
    Abstract: An alignment mechanism includes: an adjusting plate having first and second adjustment ends parallel to an X axis direction; a probe fixing portion provided to the adjusting plate; a probe fixed to the probe fixing portion; a reinforcing plate having first and second base ends parallel to the X axis direction, displacement of the reinforcing portion in a Y axis direction being restricted; Y-direction adjusting screws for pressing the adjusting plate in the Y axis direction; and adjustment connectors for respectively connecting the first adjustment end with the first base end and the second adjustment end with the second base end. A stylus of the probe is disposed on a line of intersection of a first inclined surface including the first adjustment end and the first base end and a second inclined surface including the second adjustment end and the second base end.
    Type: Grant
    Filed: May 26, 2010
    Date of Patent: February 8, 2011
    Assignee: Mitutoyo Corporation
    Inventors: Takeshi Kawabata, Takeshi Yamamoto
  • Patent number: 7861431
    Abstract: The invention relates to a feeler (1) having a shaft (2) and a coupling body (3) fixing the latter for coupling to a coordinate measuring device. It is provided here that the shaft is fixed in the receiving body by means of injection molding.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: January 4, 2011
    Assignee: Carl Zeiss 3D Automation GmbH
    Inventors: Frank Richter, Thomas Frankenfeld
  • Patent number: RE43250
    Abstract: Disclosed is a method of moving an articulating mechanism (22,410) for a measuring device, comprising the steps of: releasing two bodies (14,16, 410a,410b) which form the articulating mechanism allowing relative movement thereof; moving one of the bodies with respect to the other until a desired position is reached; and re-constraining the two bodies so they are relatively fixed, perhaps as part of a locking process, characterised in that relative movement prior to re-constraining at the desired position occurs under particular conditions. The particular conditions including moving from the same direction; and stopping, slowing down or maintaining the condition at a position adjacent to the desired position. Also disclosed is a method of positioning an articulating mechanism (22,410) for a measuring device which is controlled by a potentiometer and a controller (11) for a measuring device.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: March 20, 2012
    Assignee: Renishaw plc
    Inventors: Peter G. Lloyd, David S. Wallace, David R. McMurtry, James L. Chase, David Jones
  • Patent number: RE45211
    Abstract: A surface sensing device for use in position determining apparatus has an elongate stylus (74) with a tip (82) for scanning the surface of a workpiece to be measured. Lateral displacements of the stylus tip are detected by a light beam which passes along the stylus from a light source (66) to a retroreflector (78). This reflects the beam back via a beamsplitter (70) to a position sensitive detector (76). The stylus is mounted for longitudinal displacement on a carriage (72). The longitudinal displacement is measured by another light beam projected by the beamsplitter (70) onto a second position sensitive detector (84).
    Type: Grant
    Filed: December 7, 2012
    Date of Patent: October 28, 2014
    Assignee: Renishaw PLC
    Inventors: Geoffrey McFarland, Kevyn Barry Jonas