Abstract: A measuring machine includes a probe mounting portion, a probe mounted on the probe mounting portion, for contacting a measuring surface of a workpiece, and a detector for detecting an amount of displacement of the probe as the probe moves in contact with the measuring surface of the workpiece. A cleaning device is provided at the probe mounting portion, with a nozzle for ejecting gas upon the measuring surface of the workpiece when the probe is positioned close to the measuring surface. A rotative driving device is provided for rotatively driving the cleaning device about the probe.

Abstract: An electrical base 32 having a stationary detection element 31 is fixed to a body case 11 movably supporting a spindle 13, and a synthetic resin made scale holder 34 is provided to synchronize with the spindle 13 and move through a guide 33. In addition, a scale 36 having a movable detection element 35 is adherently fixed to the scale holder 34 at a plurality of points. More specifically, a projection 51 is fixed through an adhesive layer 52 to the back face of the scale 36, and held in a accommodating hole 46 formed in the scale holder 34, and then adhered through an adhesive layer 53 in the circumferential direction. As a result, the reduction in weight can be achieved and a disadvantage with the reduction in weight (which is that a gap between a stationary detection element and a movable detection element is changed) can be resolved.

Abstract: The present inventions relates to a coordinate measuring apparatus for measuring an object to be measured by bringing it into contact with the object to be measured, comprising an arm movable in X, Y and Z axial directions orthogonally crossing each other and a ball probe attached to the extremity of the arm to output a touch signal when it comes into contact with the object to be measured, wherein the ball probe comprises a shaft supported with the arm and a ball attached to the extremity of this shaft to be brought into contact with the object to be measured, wherein a mark is defined on the surface of the ball for identifying a crossing line between a plane passing the center of the ball and orthogonally crossing the central axis of the shaft and the surface of the ball.

Abstract: A coordinate measuring machine carries a modular touch trigger probe 100, via an adaptor 200, on its movable arm 10. The probe 100 consists of a retaining module 102 which is mounted to the adaptor 200, and a stylus module 104 which is magnetically connected to the retaining module 102 in a manner which enables the exchange of one stylus module 104 for another. The adaptor consists of a pair of coupling members 202,204 which are urged into mutual engagement by magnets 212. Automatic exchange of stylus modules occurs by using movement of the arm 10 to disengage a stylus module 104 from the retaining module 102. Similarly, the exchange of one probe for another is carried out by using movement of the arm 10 to disengage the lower coupling member 204 from the upper coupling member 202.

Abstract: A measurement probe has a plurality of movement directions, and is constructed with one or more pneumatically actuated locking mechanisms, each of which can be selectively actuated to prevent movement along one of the movement directions. The pneumatic actuator has a flexible diaphragm which is expanded by application of air pressure to move a spring member, thus engaging a locking element connected to the spring member with a receiving element to prevent movement of the probe in the direction associated with that locking mechanism. A pneumatic control system is provided to control the locking mechanism(s) in accordance with operator desires, a predetermined program, or operating requirements of an electronically controlled machine associated with the probe.

Abstract: A swing amount magnifying mechanism is disclosed, which converts a swing angle S of a first arm 41 pivotally mounted on a first shaft 5 is converted by an adjacent second arm 26 into a swing angle .theta.. A movable surface 141A which transmits swinging of the first arm 41 to a transmitting pin 28A of the second arm 26 is inclined with respect to a neutral line M. Magnification factor K (.theta./S) thus can be stabilized over a side range of the angle .theta. without being affected by displacement of the transmitting pin 28A in the direction of a neutral line M. Highly accurate swing amount conversion is thus obtainable with a fixed magnification factor without substantial component alteration.

Abstract: A CMM control system which presents a three-dimensional graphic representation to the operator showing the active probe tip recognized by the CMM software. The controller software determines whether a motorized probe head is present and the exact location the probe tip. By using three-dimensional vector graphic routines, the controller software presents a graphic display of the probe relative to the machine's coordinate system. This technique minimizes the occurrence of measurement errors which could be introduced by the unwary operator who inadvertently used CMM data taken with an unrecognized probe tip.

Abstract: A coordinate measuring machine includes a stationary baseplate, a workpiece receptacle, a tracing head movable relative to the baseplate, and a supply, control and evaluation device. The baseplate has legs which are mounted pivotably on at least three fixed locations on the baseplate and on a body which carries the tracing head. The length or the inclinations of the legs can be adjusted in an accurately measurable manner.

Abstract: The invention is directed to a method for controlling a coordinate measuring apparatus wherein the probe head (2) and the probe pin (19) of the apparatus are control driven in accordance with desired data Pi. The probe pin (19) is movably attached to the probe head (2). In the method, the probe pin for measuring the workpiece (15) can touch down on the surface of the workpiece to be measured or can be lifted off of this surface. The speed of measurement is increased by selecting the angle (.alpha.down, .alpha.up) between the direction of movement vres of the probe head (2) when touching down or when lifting off and the projection of the direction of movement toward the plane tangential to the workpiece surface in the touchdown/liftoff point (Pdown, Pup) to be less than 30.degree..

Abstract: A touch probe includes a base structure and a stylus supporting member. The base structure and stylus supporting member are connected by six extensible legs that permit the stylus supporting member to move with six degrees of freedom relative to the base structure. A plurality of sensors are arranged to measure movement of the stylus supporting member relative to the base structure along all six axes.

Abstract: A sensing system has a sensor arranged in the immediate neighborhood of a contacting shaped body. The sensor is connected to a circuit which is likewise arranged in the neighborhood of the contacting shaped body and emits electromagnetic radiation when the sensor responds to contact by the contacting shaped body with a surface to be measured.

Abstract: A sensor in the probe head of a coordinate measuring device supplies probe signals. The first, and if necessary, higher time derivatives of the probe signals are formed and evaluated for the exact determination of the moment of contact of the probe head with a workpiece to be measured. During the evaluation, the time course of the differentiated signals is examined by means of automatically generated trigger thresholds.

Abstract: A manual three dimensional coordinate measuring machine has a probe manually movable along three orthogonal coordinate axes, X, Y and Z, and a Z axis member supporting the probe. The size and shape of a workpiece is determined by displacements along the three axes from a predetermined origin when the probe contacts the workpiece. The manual coordinate measuring machine further includes a slide ring positioned at the bottom side of the Z axis member and at least one elastic member. The slide ring is movable in an arbitrary direction relative to the Z axis and along the Z axis. The slide ring is held at a predetermined position in the plane and along the Z axis by the at least one elastic member. The at least one elastic member allows the slide ring to move in the plane or along the Z axis by elastic deformation of the at least one elastic member in response to a force which is larger than a predetermined value.

Abstract: The invention is directed to a probe head of a coordinate measuring apparatus for conducting measurements on a workpiece. The probe head has a first longitudinal axis and has a probe pin mounted on the probe head. The probe pin has a second longitudinal axis defining an angle with the first longitudinal axis. A joint-free, rigidly-configured adjusting device adjusts this angle when the probe pin is not in contact with the workpiece.

Abstract: A coordinate measuring machine (CMM), including three spherical base joints, a device for maintaining the base joints in a fixed spaced relation, and six actuator assemblies each having a variable length. Each of the base joints has a first end of two of the six actuator assemblies connected therewith, respectively. A center pole is provided having a first spherical joint connected to a first end thereof and a second spherical joint connected to a second end thereof. A second end of a first one of each of the two actuator assemblies connected to each of the base joints is connected to the first spherical joint of the center pole, and a second end of a second one of each of the two actuator assemblies connected to each of the base joints is connected to the second spherical joint of the center pole, in a manner which forms a hexahedron.

Abstract: A touch probe with a base unit comprising a casing, a movable arm-set assembly housed in the casing and provided with an arm protruding from the casing and a feeler fixed to the arm end external to the casing, and an adjustment and locking device for locking the base unit to a support. In order to adjust the position of the feeler, the adjustment and locking device comprises a first and a second reference element with substantially spherical couplings between the base unit and the support and two locking elements, coupled to the base unit and to the support, and adjustable along a longitudinal direction. At least the first of the reference elements is adjustable along the longitudinal direction.

Abstract: The solid-state oscillator, preferably a watch crystal (1/2), is mounted with its direction (S) of vibration at an angle to all three measuring directions (x, y, z) of the coordinate measuring apparatus. The oscillator circuit of the solid-state oscillator is connected to an electronic circuit which generates two different contact signals. Both measures make it possible to reduce the dependency of the contact uncertainty of the measuring direction.

Abstract: In a touch sensor for detecting the deflection of a feeler pin or the like, which is mounted for movement against a pressure element in a housing (1, 27), the pressure element is to consist of two magnets (23, 24) of opposite polarity, one of them being associated with the feeler pin or the like.

Abstract: A back-plunger type displacement detecting apparatus is provided having a thinner case. The back-plunger type displacement detecting apparatus has a spindle secured to the case to extend perpendicular to the display surface of a digital display unit. A movable member is secured to the case and extends perpendicular to the direction of movement of the spindle. A converting mechanism converts the displacement of the spindle into displacement of the movable member. An electrical unit detects the displacement of the movable member and displays the detected value on the digital display unit.

Abstract: A touch probe has a sensing module 10 and a stylus module 12 magnetically retained and kinematically located thereon. A stylus holder 102 is biased into a kinematic rest location within the stylus module 12. The sensing module 12 has a fixed structure provided by connector 14, cylindrical housing 16, and circuit supporting structure 18. An intermediate load member 30 is connected to structure 18 at one end by means of a relatively resilient diaphragm 40 and at the other by three supporting struts 50, extending at an angle of 45.degree. to the axis A. The load member 30 carries a circular retaining plate 22 upon which the stylus module 12 is located. During a measurement operation, a force applied to stylus tip 112 will cause bending of struts 50, and deformation of diaphragm 40 prior to movement of the stylus holder 102 out of its kinematic rest position. Strain gauges provided on the struts 50 detect this bending and generate an output signal accordingly.

Abstract: A three-axis continuous, sensor device, such as a probe, includes a base structure and a stylus supporting member. The base structure and stylus supporting member are connected by three control arms that limit movement of the stylus supporting member relative to the base structure to movement along the three linear axes. Each control arm includes a pair of four-bar parallel linkages connected in series. Three sensor legs also are connected between the base structure and the stylus supporting member to sense movement of one with respect to the other.

Abstract: The scanning head according to the invention has the horizontal main axis (1) and is provided for numerically controlled gear measuring devices. Its feeler (2) is guided by a linear slide (4) and the latter is guided by a leaf spring parallelogram (11, 12, 13, 14) in the two coordinate directions (6) and (16). Mechanical devices (8) and (18) hold the feeler in a definite central position from which it can be deflected with the same measuring force in both the positive and negative coordinate directions. A centrally located two-dimensional ruled grating scale (10) detects all deflections of the feeler in the plane spanned by the two coordinates. To adjust the third coordinate direction, a pivot mechanism (3) is used, with a roller bearing (2) being provided for weight balance for the leaf spring parallelogram, the outer ring of the bearing being suspended by at least two springs (21, 22) on a fixed part (23) above the scanning head.

Abstract: A contact type sensor for sensing an object includes a body; and a contacting member which contacts the body and a shaft. One end of the shaft is connected to the body of the sensor and another end of the shaft supports the contacting member. The shaft is rotatable within a predetermined plane, and the shaft is more flexible in a direction perpendicular to the predetermined plane than in a direction parallel to the predetermined plane.

Abstract: A dial indicator comprising a body having an dial face with marked graduations; a longitudinally reciprocating rod extending from the body, the rod having a standard rack internal to the body and an end of the rod external to the body having a contact surface; an interacting series of gear assemblies inside the body, one of the gear assemblies having a crowned pinion, the crowned pinion being driven by the rack; and a dial hand attached to the axle of another of the gears; whereby longitudinal pressure on the contact surface causes the rod to retract longitudinally into the body, the distance of retraction being indicated by the dial hand on the dial face.

Abstract: A probe head for a coordinate measuring machine is provided with a heat control management system which regulates the amount of heat generated within the probe head in order to provide thermal stability thereof. The heat control system includes a processor which determines the amount of current passed to one or more motors within the probe head over a predetermined time interval. The processor then determines whether auxiliary heat sources should be activated in order to provide thermal stability. In one embodiment the auxiliary heat sources are provided by passing a high frequency current through the motors of the probe head.

Abstract: An interface circuit for processing signals from a touch trigger probe is adapted to prevent the generation of false trigger signals during an inspection cycle. The probe incorporates a plurality of strain gauges, the voltage across which rises above a predetermined threshold when a stylus supported by the probe contacts a surface. When the probe is moved away from the surface and the stylus loses contact, the outputs across the gauges drop below the trigger threshold. The interface prevents false triggers When, while the stylus is in contact with a surface, a machine vibration occurs which causes an oscillation in the voltage across the gauges; the voltage dropping below the threshold level (causing the interface to reset), and then immediately passing back up through the threshold, causing the interface to emit a trigger signal.

Abstract: A touch trigger probe for a coordinate measuring machine or machine tool has a stylus, which is biased into a rest position. The stylus has two independent supports, provided within a housing. A first support comprises a skirt of a stylus holder which is axially constrained on a surface of the housing. The second support comprises a kinematic arrangement of cylinders and balls, together with a planar spring, which together provide lateral constraint. The first support is biased by a much lighter force than the second support, so that its friction is very low. This reduces the lobing and hystersis of the stylus movement, and thereby increases the accuracy of the probe. The stylus movement first takes up a clearance between the first support and an abutment surface of the housing and then disengages the kinematic arrangement of the second support upon further stylus movement.

Abstract: A probe for a position determining apparatus includes a sensing space and a movable stylus supported for three-dimensional position determining movement which extends into the space. A device emits sensing radiation into the space and a collector collects the sensing radiation from the space. A deflector is supported on the stylus within the space to deflect emitted sensing radiation and is movable with position determining movement of the stylus. The deflector concentrates the sensing radiation and the collector is sensitive to variations in the intensity distribution of collected deflected radiation which occur due to the three-dimensional movement of the stylus.

Abstract: An arm 12 for holding a tool-setting probe 14 in a machine tool is rotatable between an operative position and an inoperative position. The operative position is defined by elements 48,52 which form a stop against further rotary motion beyond the operative position. These elements 48,52 are arranged as a kinematic support, so that the operative position is defined in a precisely repeatable manner. Springs 40 urge the elements 48,52 together. When the arm is in the operative position, these springs are stretched by a repeatable amount, so that they provide a repeatable force, in order to increase the precision of the operative position.

Abstract: A measuring probe has a stylus carrier supported on a fixed member in a rest position when no force acts on the stylus, the stylus carrier being deflected from its rest position to produce a signal when an external force is applied to the stylus. The support for the stylus carrier comprises two concentric rings of ball bearings of different pitch circle diameters and arranged that each ball on one of the members contacts two adjacent balls on the other member. An additional annular surface is provided on one of the members and is contacted by each of the balls on the other member. The arrangement provides that the force required to deflect the stylus is substantially equal in all directions of the force, and that the movable member is properly guided during its deflection to the point where a signal is produced.

Abstract: The solid-state oscillator, preferably a watch crystal (1/2), is mounted with its direction (S) of vibration at an angle to all three measuring directions (x, y, z) of the coordinate measuring apparatus. The oscillator circuit of the solid-state oscillator is connected to an electronic circuit which generates two different contact signals. Both measures make it possible to reduce the dependency of the contact uncertainty of the measuring direction.

Abstract: The invention is directed to a probe head of the measuring type equipped with measuring force generators (15 to 17) for the generation of measuring forces of pregiven magnitude and direction. The probe head further includes a system for arresting or clamping the displaceable part 10 of the probe head in preselectable directions. The measuring force generators are arranged directly on the displaceable parts (4, 9, 10) of the guide units for the different deflection directions (x, y, z). The arresting or clamping system is implemented in the form of an electronic control circuit which applies a signal to the force generators (15 to 17) which is opposite to the deflection of the displaceable part 10. In addition, the probe head includes a system for damping the displaceable part. This damping system operates also on an electromagnetic basis with the aid of the measuring force generators configured as plunger coils.

Abstract: A coordinate measuring apparatus carries a video camera 6 and a mechanical probe head 7 having a probe element 8 for contact-measuring the workpiece surface. With the aid of the coordinate measuring apparatus, the locations on the workpiece 9 to be mechanically contacted are driven to under visual control with the aid of the monitor 10 connected to the video camera. For this purpose, the probe element 8 is located in the viewing field of the video camera 6.

Abstract: A multi-coordinate probe including a housing, at least one tracer pin for scanning an object and deflectable in a plurality of coordinate directions upon engagement with the object, and a support for supporting the tracer pin in the housing and formed of a plurality of multi-arm leaf springs having each at least one axially extending spring component.

Abstract: A device 22 for measuring the curvature of an object, such as a tapered shaft 24, includes a support plate 26 and a clamping mechanism 32 for supporting the shaft at one end 34 thereof a holding mechanism 60 retains an opposite end 78 of shaft 24 in a position such that the shaft is in a curved state. The curved state of shaft 24 can be attained by physically moving holding mechanism 60 or by placing a weight 80 on the mechanism. A first transducer 82 includes a slide 88 which is movable along a guide bar 86. A second transducer 98 includes slide 102 which is movable along a guide bar 100. Guide bar 100 is connected to slide 88 for movement therewith. A locator mechanism 114 is mounted on slide 102 for movement therewith and includes a pair of spaced pulleys 144 and 146 biasingly urged against opposite sides of shaft 24 and toward the axis thereof.

Abstract: A stylus probe with both a contact sensing and a capacitive proximity sensing capability provided by positioning a capacitive sensor means (10) on the tip-end of a grounded, thin conductive stainless steel tube (12) so that the capacitive sensor means (10) is electrically insulated from the grounded tube, and a conductive lead wire (16), conductively attached to the capacitive sensor means (10), extends through the tube (12) with an electrically insulative material (18) dispersed between the tube (12) and the lead wire (16) to electrically insulate and space the lead wire (16) from the tube (12). The connecting-end of the tube (12) has an elastomer material (20) and (22) placed in an annular fashion and in direct contact with a mounting means and the tube (12) so as to dampen vibrations of the tube (12) caused by probe deflection. The stylus probe further comprises a tubular member with a length:width ratio of from about 40:1 to about 300:1 to give up to a 45.degree.

Abstract: A touch trigger probe for a coordinate measuring machine or machine tool has a stylus (14), which is biased into a rest position. The stylus has two independent supports, provided within a housing (10). In the embodiment of FIG. 1, the first support comprises a skirt (18) of a stylus holder (12), which is axially constrained on a surface (20) of the housing (10). The second support comprises a kinematic arrangement of cylinders (34) and balls (36), together with a planar spring (30), which together provide lateral constraint. The first support is biased by a much lighter force than the second support, so that its friction is very low. This reduces the lobing and hysteresis of the stylus movement, and thereby increases the accuracy of the probe.

Abstract: A continuous air flow probe transducer gage assembly which is configured to permit a continuous selectively controlled flow of air therethrough so as to selectively actuate a spring-biased air piston probe slidably mounted therein from its retracted rest position into its extended soft contact measuring position against a part being measured. The continuous air flow probe transducer assembly is adapted to be a part of a computer controlled system whereby several variable air flow modes are delivered therethrough so that selective rest position air flow modes, high volume air flow calibration modes and operative soft contact air flow measuring modes are used to actuate the probe transducer in its operative use environment.

Abstract: An apparatus and method for measuring a width of a micro gap of a non-conductive material of a sample which is formed between two conductive materials thereof, includes a conductive probe having a sharpened front end, a cantilever having the probe, a sample confronting the probe, a driving device for relatively moving the sample with respect to the probe in three directions of XYZ, and bias power source for applying a voltage between the probe and the sample, an electric current detecting device for detecting a contact current running between the probe and the sample, a micro displacement detecting part which detects an amount of deflection of the cantilever when the sample and the probe are in touch with each other, a servo part which feeds back the amount of the deflection of the cantilever detected by the micro displacement detecting part to the driving device thereby to control to change a position of the sample in the Z-direction of the probe so as to make the amount of the deflection of the cantilever c

Abstract: An arm 12 for holding a tool-setting probe 14 in a machine tool is rotatable between an operative position and an inoperative position. The operative position is defined by elements 48,52 which form a stop against further rotary motion beyond the operative position. These elements 48,52 are arranged as a kinematic support, so that the operative position is defined in a precisely repeatable manner. Springs 40 urge the elements 48,52 together. When the arm is in the operative position, these springs are stretched by a repeatable amount, so that they provide a repeatable force, in order to increase the precision of the operative position.

Abstract: A touch trigger probe incorporates piezoelectric sensors 50, whose outputs are processed by an interface circuit. The interface circuit discriminates between signals generated from the piezoelectric sensors 50 as a result of machine vibration and those generated as a result of a genuine measurement event, by the use of a timing circuit 90. The timing circuit 90 compares the time intervals (t.sub.1 -t.sub.2);(t.sub.2 -t.sub.3) between attainment of first 1.sub.1 and second 1.sub.2, and second 1.sub.2 and third 1.sub.3 output signal levels from the sensor 50, and upon the basis of this comparison validates (or rejects) measurements made with the probe. Additionally, the interface determines whether measurements made with the probe are taken upon the basis of outputs generated by the sensors 50 due to a shock wave in the stylus 24 of the probe, or as a result of strain in the stylus 24; as an alternative, measurements may be made only on the basis of strain.

Abstract: A force control system (50) and method are provided for controlling a position contact sensor (10) so as to produce a constant controlled contact force therewith. The system (50) includes a contact position sensor (10) which has a contact probe (12) for contacting the surface of a target to be measured and an output signal (V.sub.o) for providing a position indication thereof. An actuator (30) is provided for controllably driving the contact position sensor (10) in response to an actuation control signal (I). A controller (52) receives the position indication signal (V.sub.o) and generates in response thereto the actuation control signal (I) so as to provide a substantially constant selective force (F) exerted by the contact probe (12). The actuation drive signal (I) is generated further in response to substantially linear approximation curves based on predetermined force and position data attained from the sensor (10) and the actuator (30).

Abstract: The measuring tool of the present invention includes an adaptor attachable to a measuring machine, a shaft extending from the adaptor and a stylus retainer for securing a stylus. The stylus which extends from the stylus retainer at an angle includes a contact head disposed along a longitudinal axis. The measuring tool which is attachable to a measuring machine is rotatable and positionable to contact virtually any point on a contoured workpiece.

Abstract: A magazine has a plurality of storage ports 400 each of which retains a stylus module 314 for use in measuring workpiece dimensions on a coordinate measuring machine. Each storage port 400 is configured as a pair of jaws provided by docking inserts 414. A permanent magnet 418 is mounted on each docking insert 414. The lower casing of the stylus module 314 is urged against the inwardly facing edges 416 of the docking inserts 414 by the magnetic attraction force due the magnets 418. The stylus module 314 is engaged with a retaining module (on the quill of the machine) by moving the retaining module in a downward sense to engage the stylus module 314; further downward movement disengages the stylus module 314 from the storage port 400, thus enabling engagement of such a stylus module and removal of the module from the storage port in a single continuous movement.

Abstract: A centering device for a mechanical tracer, with a flexural bar and at least two centering systems. Each centering system includes a pair of pistons which act on the flexural bar in opposite directions. A stop for one piston of each pair is provided, such that the piston bearing against the stop exerts, at least near the state of rest, twice as high a return force as the second piston of the pair. At least two centering systems are provided in order to impart different force/path characteristics to the tracer.

Abstract: A multiple coordinate feeler apparatus, comprising a housing, a feeler arm axially projecting beyond the housing, the feeler arm having a feeler ball formed at the free end thereof and being axially displaceably supported in the housing and being supported at the housing universally rotatable up to a predetermined maximum angle by a spherical joint of a ring seat formed in a housing plate and of a spherical joint head formed at the feeler arm and rotatably supported on the ring seat, a slide being supported by the spherical joint head and being slidable in the housing against the force of a return spring, the slide being coupled with an indicating means indicating the sliding quantity of the slide, the joint head being liftable out of the ring seat by the axial displacement of the feeler arm.

Abstract: The apparatus of the present invention includes a multiple stylus probe attachment capable of attachment to a probing mechanism mounted to a turret tool station of a numerically controlled lathe for use in probing various surfaces of a workpiece. The probe attachment includes a base configured for attachment to the probing mechanism along a longitudinal axis of the probing mechanism. The probe attachment further includes a first stylus attached to the base with the distal end of the first stylus extending in a direction generally parallel to the longitudinal axis of the probing mechanism. A second stylus is attached to the base with its distal end extending in a direction generally perpendicular to the longitudinal axis of the probing mechanism. After the probe attachment is secured to the probing mechanism, the probe is calibrated by calibrating both styli. The probe may then be utilized to measure various surfaces of a workpiece while positioned in the workpiece holder of the lathe.

Abstract: An analogue probe 100 includes a fixed structure 110 and a stylus supporting member 112 suspended relative to the fixed structure 110 by three serially connected pairs of leaf springs 114,116,118. Displacement of the supporting member 112 relative to the fixed structure 110 is transduced by three opto-electronic scale and readhead transducers 136,144;138,146;140,148. The distorting effect of bending moments applied to the tip 130 of the stylus 128 upon leaf springs 114,118 is counteracted by an increased spacing between upper ends of leaf springs of a given pair, relative to the spacing between leaf springs at their lower ends; the resulting arrangement forming a trapezium as opposed to a rectangle. This enables longer styli to be employed before distortion of the leaf springs causes failure of the opto-electronic transducers due to unwanted tilting of the supporting member 112.

Abstract: A feeler device comprises a support structure in which a movable assembly is movably mounted along three axes, the movable assembly carrying at one end a feeler member. The movable assembly is suspended in the support structure by means of laminar elements which have respective slots of spiral, preferably logarithmic, form.

Abstract: The multi-coordinate sensing gauge of the invention comprises a sensing arm 7 displaceable relative to a housing 3 in the direction of a main coordinate axis 5 and guided on the housing 3 to be omnidirectionally pivotable about a first pivot point 19 located on the said main coordinate axis 5 by means of a first universal joint 13. A linkage arm 23 is coaxially connected to the sensing arm 7 and the end of said linkage arm which is away from the first universal joint 13 is omnidirectionally pivotable by a second universal joint 25 about a second pivot point 27 and is connected to a drive element 29. The drive element 29 in turn is guided on the housing 3 so as to be omnidirectionally pivotable about a third pivot point 33 by a third universal joint 31 displaceable along the main coordinate axis 5.