Abstract: The invention is directed to a touch probing device for inspecting an object which includes a fixed part, movable part coupled to and movable with respect to the fixed part for measuring the motion between the fixed and the movable parts, and a contact means coupled to the movable part for contacting a surface of the object. The contact means is preferably coupled to the movable part via a shock absorber. Alternatively, or in addition weight compensating means are provided for compensating the weight of the movable part. The weight compensating means preferably uses a magnetic field for compensating the weight of the movable part.

Abstract: Centroid moments of components of an arm (220) are calculated based on three-dimensional model data and mass of the components, the centroid moments being combined to calculate a centroid position (G) of the entirety of the arm (220). The arm (220) is adjusted and swingably supported so that a stylus (222D) provided on an end of the arm (220) being swingably supported by a support (210) that moves relative to a workpiece (1) touches the workpiece (1) with a predetermined measuring force and the centroid position (G) is located on a horizontal plane including the fulcrum when the support (210) is inclined by an angle in the middle of an angle range within which the support (210) is rotated by a moving section (130). The measuring force is hardly fluctuated when the support (210) is inclined.

Abstract: Touch-triggered probe comprising a fixed part, designed to be fastened onto a measuring machine or a machine tool, and a mobile contact feeler that can be oriented on two independent axes along a multiplicity of spatial directions. The two axes of the probe comprise each an actuator for unlocking and adjusting the axes.

Abstract: A stylus structure (40) integrally incorporating a stylus (2), a vibrator (4), a detector (6), a first secondary magnetic circuit (12) and a second primary magnetic circuit (21), and a stylus support (30) integrally incorporating a first primary magnetic circuit (11) and a second secondary magnetic circuit (22) are mutually fittable, thereby achieving signal transmission by the respective magnetic circuits using no electrical contact.

Abstract: The present invention has an object to provide a measuring apparatus which can surely prevent the collision of a moving member.

Abstract: Method enabling a command to switch the measure mode to be entered in a single vertical axis dimension-measuring column. The mode witch command is entered by pressing the probe tip against the piece to be measured during a time interval greater than a predetermined value. The measuring and displaying system then engages in a search mode of the turn-back point of said piece to be measured. Application: measurement of inner or outer diameters by means of a single-axis measuring column. The method allows the hole's minimal and maximal points to be determined with a minimum of handling operations.

Abstract: A touch probe 9 for a coordinate measuring apparatus is proposed which includes a touch probe chassis 29 adapted to be attached to the coordinate measuring apparatus, a support for the sensing stylus 39 which is mounted on the touch probe chassis 29 so as to be deflectable from a rest position and on which a sensing stylus 47 is mountable for contacting a workpiece 17, a deflection measuring system 55, 57 for detecting a deflection of the support for the sensing stylus 39 with respect to the touch probe chassis 29 and an inspection optics 61 for inspecting a tip 49 of the sensing stylus 47. The touch probe 1 is characterized in that at least one of the components support for the sensing stylus 39 and touch probe chassis 29 comprises a transverse support 39 which extends transversely to a direction of extension of the sensing stylus 47 and which is transparent to light in at least a portion thereof and which is disposed in a beam path 69 of the inspection optics 61.

Abstract: A length measuring probe that includes a base body, a guide element and a probe pin having a touch scanning element for touch scanning a measuring object, the probe pin is seated, displaceable in relation to the base body in a measuring direction opposite a spring force F via the guide element. A detection device detects a position of the probe pin with respect to the base body and a first spring element and a second spring element arranged behind the first spring element in the measuring direction so as to prestress the probe pin. The guide element is arranged between the first and second spring elements, on which facing end areas of the first and second spring elements are fixed in place, and wherein the at least one guide element is seated, displaceable in the measuring direction, on the probe pin and on the base body.

Abstract: An apparatus for measuring a surface profile of an object to be measured includes a measuring probe positioned to contact the surface of the object to be measured, a guide mechanism for supporting and guiding the measuring probe in an axial direction of the measuring probe, a tilt angle adjustment mechanism for tilting the guide mechanism at a predetermined tilt angle with respect to a horizontal direction so that the measuring probe contacts the surface of the object to be measured with a predetermined contact force, and a drive mechanism for relatively driving at least one of the measuring probe and the object to scan the surface of the object to be measured with the measuring probe. The contact force is derived from a tilt direction component of the gravity of the measuring probe generated when the measuring probe is tilted.

Abstract: After preparatory measurement of a calibration reference with a scanning probe is performed, apart program for measuring the calibration reference is generated and executed so as to perform calibration measurement. After a calibration value of a coordinate transformation function and reference coordinates of the calibration reference are obtained, a new part program for measuring the calibration reference again is generated by use of the calibration value and the reference transformation coordinates and the part program is executed to perform calibration measurement. Accordingly, the calibration value of the coordinate transformation function and the reference coordinates of the calibration reference can be obtained with higher accuracy.

Abstract: A calibration reference work sphere is measured to obtain measured values by using a probe vector given before updating is made by exchanging the probe for a new one or by changing the posture of the probe. Then, the measured values are error-corrected by using the probe vector given before updating to thereby obtain the coordinates of the center of the reference sphere. The difference between the obtained coordinates and the coordinates of the center of the reference sphere before updating of the probe is obtained to thereby calculate a predicted probe vector. A calibration measurement part program for measuring the calibration reference sphere by using the predicted probe vector is generated and executed for performing calibration measurement. A calibration value of the probe vector is calculated on the basis of the result of the calibration measurement.

Abstract: An automated system includes improved height sensing. In one aspect, a on-head camera performs the dual functions of fiducial imaging and height sensing using an auxiliary off-axis light source and triangulation. In another aspect, an on-head height sensor is positioned to measure height at a location that is not beneath any nozzles. The sensor provides height information at a plurality of locations over the board, and a height map of the board is created. In yet another aspect of the invention, the above features are combined to provide an on-head camera that images fiducials and measures height at a plurality of locations such that a height map is created.

Abstract: Disclosed is a highly accurate articulated coordinate measuring machine, comprising a revolute joint, comprising a circular encoder wheel, having an axis of rotation; a plurality of marks disposed around at least a portion of the circumference of the encoder wheel; bearing means for supporting the encoder wheel, while permitting free rotation of the encoder wheel about the wheel's axis of rotation; and a sensor, rigidly attached to the bearing means, for detecting the motion of at least some of the marks as the encoder wheel rotates; a probe arm, having a proximal end rigidly attached to the encoder wheel, and having a distal end with a probe tip attached thereto; and coordinate processing means, operatively connected to the sensor, for converting the output of the sensor into a set of cylindrical coordinates representing the position of the probe tip relative to a reference cylindrical coordinate system.

Abstract: A method for measuring structures of an object using a feeler element associated with a coordinate measuring instrument and extending from an elastic bendable feeler extension is disclosed, and wherein the feeler element is brought into contact with an object having structures to be measured and the position of the feeler is then determined by comparing the position of the feeler as determined by the coordinate measuring instrument with the position determined by the optical sensor.

Abstract: The invention relates to a method and an arrangement for measuring the structure of an object. The structure is scanned by touch, by means of a scanning element whose position is optically detected. The force produced after the contact between the scanning element and the object is determined and optionally adjusted to constant values.

Abstract: The present invention provides an improved probe tip (ball) made of silicon nitride that has a drilled cavity sized and dimensioned to receive a probe stem.

Abstract: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Abstract: A measurement probe is carried by a carriage movable in a first direction to cause the measurement probe to traverse a measurement path across a surface of an object received by a support surface to provide measurement data representing variations in a second direction different from the first direction of surface features along the measurement path. The support surface is movable in a third direction different from the first and second directions. Measurement of a surface area is effected by controlling the carriage to cause the measurement probe to traverse a plurality of measurement paths across an area of the surface of an object mounted on the support surface and by controlling the support surface to move in the third direction after each measurement path traverse. Measurement data thus obtained for a reference sphere of previously known radius is used to determine the relative orientation of the first and third directions.

Abstract: The present invention provides an improved probe tip (ball) made of silicon nitride that has a drilled cavity sized and dimensioned to receive a probe stem.

Abstract: The invention is directed to an articulating device for a probe head (4) of a coordinate measuring apparatus with the articulating device having at least two rotation joints (14, 15) for angularly aligning the probe head (4). In this articulating device, corrective values are assigned to the device with which the errors caused by the elastic deformation of the articulating device are corrected when making measurements. To improve the measuring results, a mathematical model is used for correcting the deformation and this mathematical model includes at least one mathematical finite element (17, 18).

Abstract: A probe head 10 and a laser interferometric displacement meter 20 are provided. The probe head supports a probe 2 that is capable of contacting a workpiece 1, that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head 10 is also provided with a probe shaft 12 with steps 11a, 11b at intermediate portions thereof and air bearings 14a, 14b that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range.

Abstract: A target lens shape measuring device for measuring a target lens shape of an eyeglass lens has a measuring section including: a template feeler contactable with a periphery of a template; a first supporting base to which the template feeler is attached; a first motor and a link mechanism that move the template feeler and the first supporting base between a measuring position and a retracted position, wherein the link mechanism located between the measuring position and the retracted position is engaged with the first supporting base, and the link mechanism located at the measuring position is disengaged with the first supporting base; a second motor that moves the template feeler and the first supporting base in a radius vector direction of the template; and a first encoder that detect an amount of movement of the template feeler and the first supporting base in the radius vector direction of the template.

Abstract: A reseat system capable of restraining reseat shift in returning from escape movement and thus capable of obtaining reseat return accuracy without adding separate mechanism is provided. A locus drawn by a tip of a stylus when the stylus moves parallel to an axis thereof at a rest position while a hard ball on a fixed component is in contact with a cylindrical body on a movable-component having the stylus is inclined in a direction of a biasing force. When a pressing force is applied to the movable component, since a reaction force against the pressing force is generated at a contact point of the cylindrical body and the hard ball, reseat shift of the movable component can be restrained.

Abstract: A probe arm comprises a base member 10 securable to a surface of a machine tool, and a rotatable hub 12, carrying an arm member 16 with a tool-setting probe (18 FIG. 1). The hub has a portion 22 with three radial projections (26 FIG. 2) which rotates within an aperture 24 of the base which also has three inward radial projections 30. Together these projections form stops at the operative and non-operative positions of the probe. The aperture also has three axial raised areas 42 on an annular ledge 40 which support an annular should 44 on the hub. Thus there are six points of contact between the hub and base member in the operative and non-operative positions. A biasing arrangement comprises a detent plate 46 secured to the aperture and a planar spring 48 secured to the hub by its central region. Ball bearings 56 are loosely retained in two opposite lugs (54 FIG. 6) on the spring and run around the detent plate between two pairs of detent holes (58 FIG. 5).

Abstract: A stylus 20 is mounted directly on detector 32 and the detector 32 is mounted directly on a holder 10. Thus, an vibration-type contact detection sensor 1 is formed in a state in which the holder 10 and the stylus 20 are placed out of contact with each other and the stylus 20 and the detector 32 are placed in contact with each other. Therefore, attenuation of vibration and status change of the stylus 20 by the holder 10 can be circumvented and vibration and status change of the stylus 20 can be propagated directly to the detector 32, so that the detector 32 can detect vibration and status change of the stylus 20 with high sensitivity, and contact with a workpiece can be detected with high sensitivity.

Abstract: A stylus has a detection element support part 1E for supporting and fixing piezoelectric elements 21 to 24 and a rod 1D placed on the detection element support part 1E. The detection element support part 1E has a plurality of flange parts 1F each being regular polygonal in cross section orthogonal to the axis of the rod 1D. The displacement detection elements are attached to the sides of the flange parts 1F in a state in which they are inclined at a predetermined angle &agr; relative to the axis of the rod 1D. If a measured force in a torsion direction Q or in a bend direction P occurs on the rod 1D through a contact ball 1A, the measured force is transmitted along substantially the length direction of the piezoelectric elements 21 to 24.

Abstract: A comparator measures and compares linear or angular dimensions. The comparator includes a metallic casing (2), and two bearings (23,24) such that a sensing probe (3), going through said casing (2) and worked directly into the casing (2), can be accommodated. Two sockets (8,9) of the comparator are firmly attached to the casing (2). A measuring system of the comparator includes a mobile portion (33) driven by the sensing probe and a fixed portion (27) firmly attached to the casing (2). A housing (10) of the comparator completely covers the outer sides (25) of the casing (2) and is held by the two sockets (8,9).

Abstract: A measuring probe includes a suspension module 112 in which a stylus holder 140 is suspended from a housing on a pair of diaphragms 142,144. At least one of the diaphragms is formed with spiral cut-outs whereby the stylus, which is connected at the center of the diaphragms, is able to move transversely of the axis of the housing as the stylus holder pivots when transverse forces are applied to the stylus tip. A transducer module 110 is releasably supported on the suspension module by a kinematic mounting 116,118 and is retained in position by magnets 120. The transducer module contains optical transducers 200,210,220 for measuring the deflection of the stylus.

Abstract: A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.

Abstract: A coordinate measuring machine including a support platform for supporting an object. Scanning means is supported by the support platform. The scanning means includes a probe assembly and a non-contact scanner. Drive means is connected to at least one of the probe assembly and the non-contact scanner for moving the probe assembly and non-contact scanner relative to each other. The probe assembly includes a probe movably disposed in a guide tube. The probe includes a shaft and a tip integrally formed from either a fiber-optic or non-fiber-optic material. The tip extends from the guide tube so as to be detectable by the non-contact scanner. The tip may include one or more stylus. During operation the tip contacts the object and the non-contact scanner detects the tip to determine the corresponding coordinates of the object. A light source illuminates the tip for improved detection of the tip. When the probe is formed of a fiber-optic material, light is emitted through the probe.

Abstract: Head for checking linear dimensions of parts in machine tools or measuring machines, with a casing, a movable arm-set including an arm carrying a feeler for contacting the part to be checked, a biasing device arranged between the casing and the movable arm-set, a detecting device for providing a signal depending on the position of the movable arm-set, and two constraining systems—between the casing and the movable arm-set—both totally with force closure under the action of the biasing device, that eliminate, in a univocal way, the six degrees of freedom of the movable arm-set, one of the two constraining systems featuring a structure with rotational symmetry.

Abstract: A surface texture measuring instrument has a pre-load leaf spring (41, 42) for biasing a detector (10) having a skid (14) at a distal end thereof, a pre-load force controller (47) for controlling a pre-load force of the pre-load leaf spring (41, 42), and a stopper (50) for restricting movement of the detector (10) in a biasing direction when a predetermined pre-load force is applied to the detector (10) by the pre-load force controller (47). In conducting a skidless measurement, the detector (10) is locked by applying the predetermined pre-load force to the detector (10) by the pre-load force controller (47). In conducting a skid measurement, the pre-load force less than the predetermined value is applied to the detector (10) by the pre-load force controller (47).

Abstract: A linear measuring machine is provided, the linear measuring machine having a base (11), a column (12) disposed on the base, a slider (14) elevatable along the column and an elevation driving mechanism (44) including a motor for lifting and lowering the slider. The linear measuring machine further includes a touch-and-back mechanism for driving the elevation driving mechanism in a direction for a probe (13) to move away from a measurement surface of the workpiece after fetching a detection value of a displacement sensor (45) when the probe touches the measurement surface of the workpiece and for stopping the elevation driving mechanism.

Abstract: A constant pressure mechanism of a probe for urging the probe in a predetermined direction by virtue of elastic force of a spring is provided. The mechanism comprises a circular pulley rotatably supported around a central axis by an instrument stationary portion, a rotation force urging mechanism for urging the pulley in the predetermined direction, and a first wire adjoining the pulley to the probe. The rotation force urging mechanism comprises a spiral pulley coaxial with and capable of combined rotation with the circular pulley, and a second wire connecting the spiral pulley to the spring. The other end of the spring is connected to the instrument stationary portion. Strict contact pressure of the probe is maintained throughout its motion.

Abstract: A measuring probe includes a suspension module 112 in which a stylus holder 140 is suspended from a housing on a pair of diaphragms 142, 144. At least one of the diaphragms is formed with spiral cut-outs whereby the stylus, which is connected at the centre of the diaphragms, is able to move transversely of the axis of the housing as the stylus holder pivots when transverse forces are applied to the stylus tip. A transducer module 110 is releasably supported on the suspension module by a kinematic mounting 116, 118 and is retained in position by magnets 120. The transducer module contains optical transducers 200, 210, 220 for measuring the deflection of the stylus.

Abstract: A stylus including a stem, and a break-off region provided in the stem and consisting of a changed structure of a stem material, and a method of forming the stylus according to which the change of the structure of a stem material is effected by heat treatment of a region of the stem in which the break-off region is to be provided.

Abstract: A method of characterizing the shape of a probe element for a scanning probe microscope including using two test pattern surfaces of known configuration, the first surface having a pointed wedge-shaped tip and the second surface having an hour-glass type cross-section, wherein the surfaces are scanned to generate scan lines having curved transition zones that are geometrically matched in order to generate a probe characteristic representation curve, wherein the probe characteristic representation curve is a graphic representation of the shape of the tip of the probe.

Abstract: Vibrations of the stylus (4) of a measuring probe (1) mounted on a machine, and which are transmitted to the probe stylus via the machine quill and probe body, are reduced or eliminated by a vibration damping means positioned within a cavity of the stylus. FIG. 2 illustrates a first embodiment in which the vibration damping means is a unconstrained rubber cylinder (16), in a hollow cartridge (12) connected to the stylus at its tip. Alternatively a dynamic vibration absorber can be used.

Abstract: In a touch signal probe (10) having a stylus holder (11), a vibrator (12) supported by the stylus holder (11) and has a contact portion (12A) to contact to a workpiece at a distal end thereof, a vibrating means (13A) for vibrating the vibrator (12) in an axial direction resonantly, and a detecting means (13B) for detecting the contact by a change in the vibration of the vibrator (12) caused by the contact to the workpiece is provided. The vibrator (12) is supported by the stylus holder (11) at two support points (A) and (B) positioned with a node of vibration of the vibrator (12) therebetween. Since the vibrating means (13A) and the detecting means (13B) are disposed spanning over the two support points, the node of vibration can be formed between the support points A and B and the size of the touch signal probe (10) can be easily reduced.

Abstract: The invention is directed to an articulating device for a probe head (4) of a coordinate measuring apparatus with the articulating device having at least two rotation joints (14, 15) for angularly aligning the probe head (4). In this articulating device, corrective values are assigned to the device with which the errors caused by the elastic deformation of the articulating device are corrected when making measurements. To improve the measuring results, a mathematical model is used for correcting the deformation and this mathematical model includes at least one mathematical finite element (17, 18).

Abstract: A coordinate measuring machine including a support platform for supporting an object. Scanning means is supported by the support platform. The scanning means includes a probe assembly and a non-contact scanner. Drive means is connected to at least one of the probe assembly and the non-contact scanner for moving the probe assembly and non-contact scanner relative to each other. The probe assembly includes a probe movably disposed in a guide tube. The probe includes a shaft and a tip integrally formed from either a fiber-optic or non-fiber-optic material. The tip extends from the guide tube so as to be detectable by the non-contact scanner. The tip may include one or more stylus. During operation the tip contacts the object and the non-contact scanner detects the tip to determine the corresponding coordinates of the object. A light source illuminates the tip for improved detection of the tip. When the probe is formed of a fiber-optic material, light is emitted through the probe.

Abstract: A dial gauge (1A) has stem bush (20) having a fitting (21) fitted to an inner wall of a stem (5) and having a predetermined clearance between a spindle (3), a holder (22) for slidably holding the spindle (3) while securing a predetermined clearance against the inner wall of the stem (5), and an elastically deformable connector (23) for connecting the fitting (21) and the holder (22), whereby an influence of deformation of the stem (5) and the fitting (21) on the holder (22) during clamping can be minimized, so that the dial gauge (1A) can be fixed to a supporting stand without deteriorating slidability of the spindle (3).

Abstract: A mechanism capable of achieving an arbitrarily specified spatial compliant behavior is presented. The mechanism is a parallel connection of multiple individual elastic components that connect a support body to a single compliantly floated body. Each elastic component is, in itself, a low friction 6 degrees of freedom (DOF) mechanism that provides compliant constraint along and/or about a single axis. The elastic components are of three functional types: 1) a “line spring” which resists only translation along its axis, 2) a “torsional spring” which resists only rotation about its axis, and 3) a “screw spring” which resists a specified combination of translation along and rotation about its axis. Through proper selection of the connection geometry, spring constant, and functional type of each elastic component, a spatial compliant mechanism capable of passive force guidance is realized.

Abstract: The invention concerns a method for determining the position of a point, in which use is made of a holder (1) with a measuring point (6) and at least three reference points (2, 3, 4), where said measuring point (6) is placed against the point which it is wished to measure, the position of said reference points (2, 3, 4) is measured and the position of said point is calculated, in which use is made of a holder (1) on which the position of said measuring point (6) is determined by holding the latter at a fixed point, rotating the holder (1) in various relative positions, then measuring the positions of the reference points (2, 3, 4) for at least two different positions of the holder (1), and calculating the relative position of the measuring point (6) with respect to the reference points (2, 3, 4).

Abstract: The invention concerns a stylus intended for nanotechnology, including a monocrystalline silicon membrane (15), a beam (14) secured to the membrane by one end and a diamond tip (16), in the shape of a pyramid with three faces, arranged at the other end of the beam. The base of the pyramid forms an isosceles triangle having the axis of the beam as its axis of symmetry. Two of its faces are identical and arranged symmetrically with respect to said axis, the third face, which has the base of the isosceles triangle as its base, having said axis as its axis of symmetry.

Abstract: A gauging or measuring head for the linear dimension checking of mechanical pieces, including a casing (1), an arm (49) carrying a feeler (67) for contacting a piece to be checked, a fulcrum (74), coupled to the casing (1) and the arm (49), for enabling displacements of the arm (49) with respect to the casing (1), a return spring (95) for keeping the feeler (67) in contact with the piece during the checking, a device (98, 100) for retracting the arm (49) and a position transducer providing signals depending on the position of the arm (49) with respect to the casing (1). The fulcrum is made of a deformable element (74) including two coupling blocks (81, 83) and three laminae (75, 77, 79) permanently secured to the blocks (81, 83), and substantially arranged in two different planes of a sheaf of planes.

Abstract: A coordinate measuring machine including a support platform for supporting an object. Scanning means is supported by the support platform. The scanning means includes a probe assembly and a non-contact scanner. Drive means is connected to at least one of the probe assembly and the non-contact scanner for moving the probe assembly and non-contact scanner relative to each other. The probe assembly includes a probe movably disposed in a guide tube. The probe includes a shaft and a tip integrally formed from either a fiber-optic or non-fiber-optic material. The tip extends from the guide tube so as to be detectable by the non-contact scanner. The tip may include one or more stylus. During operation the tip contacts the object and the non-contact scanner detects the tip to determine the corresponding coordinates of the object. A light source illuminates the tip for improved detection of the tip. When the probe is formed of a fiber-optic material, light is emitted through the probe.

Abstract: A body 1 placed thereon with a table 35 put thereon with an object to be measured W, and a portal frame 41 supporting both ends of rail 43 to the body through pillars 42A and 42B, the rail being placed above the table 35 and extending along a moving direction of a pair of probes 91A and 91B, are provided. A pair of sliders 51A and 51B are movably supported by the rail 43. The pair of the probes is extended downward from the sliders 51A and 51B to be abutted to the object W put on the table 35. The flexural deformation of the probes 91A and 91B is decreased due to the shorter length of the probes 91A and 91B, so that the high accurate measurement is achieved and a relative measurement is omitted.

Abstract: A non-contact surface roughness-measuring machine is provided which can avoid damage caused by collision with a workpiece and set a non-contact surface roughness probe at an appropriate position relative to a measurement surface of the workpiece. A non-contact surface roughness probe and a touch-signal probe are attached at a tip end of an arm of a coordinate measuring machine. A stylus of the touch-signal probe is protruded relative to a detection surface of the non-contact surface roughness probe, in which the protrusion amount is within an optimum distance of the non-contact surface roughness probe relative to the measurement surface. When the probes are brought close to the workpiece and the touch-signal probe detects contact, the non-contact surface roughness probe is set within the optimum distance relative to the workpiece.

Abstract: A touch trigger probe incorporates piezoelectric sensors 50, whose outputs are processed by an interface circuit. The interface circuit discriminates between signals generated from the piezoelectric sensors 50 as a result of machine vibration and those generated as a result of a genuine measurement event, by the use of a timing circuit 90. The timing circuit 90 compares the time intervals (t1-t2);(t2-t3) between attainment of first 11 and second 12, and second 12 and third 13 output signal levels from the sensor 50, and upon the basis of this comparison validates (or rejects) measurements made with the probe. Additionally, the interface determines whether measurements made with the probe are taken upon the basis of outputs generated by the sensors 50 due to a shock wave in the stylus 24 of the probe, or as a result of strain in the stylus 24; as an alternative, measurements may be made only on the basis of strain.