Abstract: The present invention is an electronic circuit used to increase voltage levels of electrical signals from sources having low voltage levels for any required application in an electrical system. While the focus is to increase voltage levels, current levels can also be optimized per application requirements. It is built by electronically cascading a clamper circuit or a part of clamper circuit to an oscillator circuit. The oscillator circuit generates an AC signal. The basic functionality of a clamper circuit is to raise DC level of an AC signal. With an oscillator circuit feeding an AC signal to the clamper circuit, multiple applications can be achieved economically. Said invention can be used for driving LEDs at low voltage levels, charge a capacitors to higher voltage levels than a voltage applied to it, low frequency signal amplifiers, low frequency signal generators, AM/FM modulators, etc.

Abstract: An apparatus comprising, a monolithic crystal comprising a substrate portion and at least one oscillator; a first electrode provided at a first location of the oscillator; a second electrode provided at a second location of the oscillator; a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator; and one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion.

Abstract: A method of manufacturing an oscillator including housing a first resonator and a first integrated circuit device configured to oscillate the first resonator in a first container to manufacture the first oscillator, and housing a second resonator and a second integrated circuit device configured to oscillate the second resonator in a second container to manufacture the second oscillator, wherein the first integrated circuit device includes a first oscillation circuit configured to oscillate the first resonator to output a first oscillation signal, and no PLL circuit, the second integrated circuit device includes a second oscillation circuit configured to oscillate the second resonator to output a second oscillation signal, and a PLL circuit to which the second oscillation signal is input, and which is configured to output a third oscillation signal, and the first container and the second container are containers same in type.

Abstract: The present disclosure provide a device, method and storage medium for frequency calibration for voltage-controlled oscillators. The device includes: A frequency divider connected with a VCO, a time-digital converter connected with the frequency divider, a logic controller connected with the time-digital converter, a digital-to-analog converter connected with the voltage-controlled oscillator; The frequency divider is used to divide the signal generated by the voltage-controlled oscillator into N times to get the frequency divider signal; Time-digital converter is used to measure the actual time period of frequency division signal; And the logic controller is used to generate the control voltage according to the difference between the actual time period of the frequency division signal and the calibration period of the frequency division signal, and adjust the frequency of the VCO according to the control voltage.

Abstract: A crystal oscillator and an oscillating device are provided. The crystal oscillator includes a resonator, a low-thermal conductivity glue, an integrated circuit chip, and a heating element. In the resonator, a crystal blank is hermetically encapsulated. The low-thermal conductivity glue wraps the resonator to suppress temperature variation in the resonator. The integrated circuit chip is disposed below the resonator, and the heating element is configured to supply heat to the resonator.

Abstract: An electronic device comprises a first feedback circuit operatively connected to an amplitude detector and a first control input of an oscillator. The first feedback circuit is configured to control an amplitude of an output of the oscillator by continuously applying a first control signal to the first control input in response to an amplitude detected by the amplitude detector. The electronic device further comprises a second feedback circuit operatively connected to the amplitude detector and a second control input of the oscillator. The second feedback circuit is configured to modify one or more amplitude regulating parameters of the oscillator by providing a second control signal in response to the amplitude being beyond an upper or lower amplitude threshold, and refrain from modifying the one or more amplitude regulating parameters when the amplitude is within the upper and lower amplitude thresholds.

Abstract: An oscillator includes a resonator, an oscillation circuit, and first and temperature compensation circuits. The first temperature compensation circuit performs a first-order first temperature compensation processing in a first mode and performs the first-order first temperature compensation processing and a high-order first temperature compensation processing in a second mode for a frequency of a first clock signal generated by oscillation of the resonator by the oscillation circuit. The second temperature compensation circuit receives the first clock signal and outputs a second clock signal subjected to a high-order second temperature compensation processing based on the first clock signal.

Abstract: A low power crystal oscillator circuit having a high power part and a low power part. Oscillation is initialized using the high power part. Once the crystal is under stable oscillation, the circuit switches to the low power part and continue operation for a long duration.

Abstract: A vibrator device includes a vibrator element, a container in which the vibrator element is housed, a circuit which is disposed in the container, and which overlaps the vibrator element in a plan view, and an inductor which is disposed in the container, which fails to overlap the vibrator element in the plan view, and which is electrically coupled to the circuit. The container includes at least a first member and a second member, and a bonding area configured to bond the first member and the second member to each other, and the inductor is disposed in the bonding area.

Abstract: An inertia measurement device, which is used in combination with a satellite positioning receiver that outputs a positioning result at every T seconds in a positioning system equipped on a vehicle, when a Z-axis angular velocity sensor, a position error P[m] based on the detection signal of the Z-axis angular velocity sensor while the vehicle moves at a moving speed V[m/sec] for T seconds satisfies Pp?P=(V/Bz)×(1?cos(Bz×T)) (where, a bias error of the Z-axis angular velocity sensor is Bz[deg/sec] and a predetermined allowable maximum position error during movement for T seconds is Pp[m]), and a bias error Bx and By of the Y-axis angular velocity sensor satisfies Bz<Bx and Bz<By.

Abstract: A circuit device includes an oscillation circuit configured to generate an oscillation signal using a resonator, a temperature sensor circuit configured to output temperature detection data, a temperature compensation circuit configured to perform, based on the temperature detection data, temperature compensation on an oscillation frequency of the oscillation signal, a memory configured to store correction data for correcting the temperature detection data to obtain a temperature, and an interface circuit configured to output the temperature detection data and the correction data.

Abstract: An oscillator includes a first resonator element, a circuit element configured to oscillate the first resonator element to generate an oscillation signal, a first package which includes a substrate, and has a housing space configured to house the first resonator element and the circuit element at one principal surface side of the substrate, a second resonator element which is disposed at another principal surface side of the substrate, and an oscillation frequency of which is controlled based on the oscillation signal, and a leg part which is disposed at the another principal surface side of the substrate, and which is arranged so as to surround the second resonator element in a plan view of the substrate.

Abstract: A direct digital synthesizer (DDS) circuit. The circuit includes a first input to receive a first fixed frequency clock signal having a first frequency, a second input to receive a second fixed frequency clock signal having a second frequency lower than the first frequency, and an output to provide an output frequency that is based at least in part on a frequency control word (FCW). The DDS circuit may include a frequency correction circuit having a first input to receive the first clock signal, a second input to receive the second clock signal, and a third input to receive the FCW, and an output to provide a frequency error of the first clock signal, the frequency error determined using the second clock signal and FCW. Alternatively, or in addition to, the DDS circuit may include an all-digital phase lock loop to correct for frequency wander of the first clock signal.

Abstract: The present disclosure relates to an electronic device comprising a first capacitor and a quartz crystal coupled in series between a first node and a second node; an inverter coupled between the first and second nodes; a first variable capacitor coupled between the first node and a third node; and a second variable capacitor coupled between the second node and the third node.

Abstract: An oscillator includes: a resonator element; a circuit element configured to output a clock signal; and a container accommodating the resonator element and the circuit element and including a substrate having a first surface. The substrate includes a first electrode provided on the first surface and electrically coupled to the resonator element, a second electrode electrically coupled to the resonator element, and an output electrode configured to output the clock signal. The first electrode and the second electrode are disposed side by side in a first direction. The output electrode is disposed adjacent to the first electrode in a second direction orthogonal to the first direction. When an end portion of the first electrode on a side close to the second electrode is defined as a first end portion, the output electrode includes a first region disposed closer to the second electrode side than the first end portion in the first direction.

Abstract: This disclosure provides a voltage controlled oscillator and a control method thereof, a P2P interface circuit, an electronic device, and relates to the field of voltage controlled oscillation technology. The voltage controlled oscillator includes N stages of delay units, and the delay unit of each stage includes: a first inverter, a second inverter, a third inverter, and a fourth inverter; both the second inverter and the third inverter are electrically connected to a frequency control terminal, and whether to activate the second inverter and the third inverter is controlled by the frequency control terminal.

Abstract: An oscillation circuit including an amplifier, a feedback resistor and a first switch circuit is provided. The amplifier inverts and amplifies an oscillation signal received from an input terminal thereof to provide an output oscillation signal at an output terminal thereof. The feedback resistor is coupled between the input terminal and the output terminal, and coupled with the first switch circuit in parallel. The first switch circuit conducts the input terminal to the output terminal in one of the following situations: (1) an input voltage of the oscillation signal is higher than an output voltage of the output oscillation signal by at least a first threshold value; and (2) the output voltage is higher than the input voltage by at least a second threshold value. The first switch circuit has a first on-state resistance smaller than a resistance of the feedback resistor.

Abstract: A semiconductor device including a first inverter circuit connected in parallel to a crystal vibrating element; a second inverter circuit connected to the first inverter circuit so as to share an input therewith, and outputting an oscillation signal; and a wave filter connected to the second inverter circuit and having a passband that is determined in advance and includes an oscillation frequency of the oscillation signal.

Abstract: A circuit apparatus includes an oscillation circuit that generates an oscillation signal, a first buffer circuit that outputs a first clock signal based on the oscillation signal, a second buffer circuit that outputs a second clock signal based on the first clock signal, a first terminal electrically couplable to a first node via which the first buffer circuit outputs the first clock signal, and a second terminal electrically coupled to a second node via which the second buffer circuit outputs the second clock signal, and the rise period of the first clock signal is shorter than the rise period of the second clock signal.

Abstract: In an example, a system includes a BAW resonator. The system also includes a first heater configured to heat the BAW resonator, where the first heater is controlled by a first control loop. The system includes a circuit coupled to the BAW resonator. The system also includes a second heater configured to heat the circuit, where the second heater is controlled by a second control loop.

Abstract: Provided is a semiconductor integrated circuit including an oscillation circuit configured to output an oscillation signal, a heater configured to heat the oscillation circuit, a temperature sensor configured to detect a temperature of the oscillation circuit, and a nonvolatile memory configured to store temperature correction data. The oscillation circuit controls a frequency of the oscillation signal based on an output signal of the temperature sensor and the temperature correction data.

Abstract: An analog computing system with coupled non-linear oscillators can solve complex combinatorial optimization problems using the weighted Ising model. The system is composed of a fully-connected LC oscillator network with low-cost electronic components and compatible with traditional integrated circuit technologies. Each LC oscillator, or node, in the network can be coupled to each other node in the array with a multiply and accumulate crossbar array or optical interconnects. When implemented with four nodes, the system performs with single-run ground state accuracies of 98% on randomized MAX-CUT problem sets with binary weights and 84% with five-bit weight resolutions. The four-node system can obtain solutions within five oscillator cycles with a time-to-solution that scales directly with oscillator frequency. A scaling analysis suggests that larger coupled oscillator networks may be used to solve computationally intensive problems faster and more efficiently than conventional algorithms.

Abstract: An oscillating device includes a first quartz crystal resonator, a driving circuit, a first waveform adjustment circuit, and at least two second quartz crystal resonators. The first quartz crystal resonator has a first resonant frequency. The driving circuit, coupled to the first quartz crystal resonator, drives the first quartz crystal resonator to generate a first oscillating signal having the first resonant frequency. The second quartz crystal resonators, coupled in parallel and coupled to the driving circuit and the first quartz crystal resonator, have a second resonant frequency and receive and rectify the first oscillating signal to generate a second oscillating signal having the second resonant frequency. The first waveform adjustment circuit, coupled to the second quartz crystal resonators, receives the second oscillating signal and adjusts the second oscillating signal to generate a first waveform adjustment signal.

Abstract: An oscillator includes a package having a plurality of external terminals disposed on a mounting surface, a circuit element housed in the package, and a resonator which is housed in the package, and is electrically coupled to the circuit element, wherein the circuit element is electrically coupled to the package with a plurality of pads each of which is bonded to the package via a bump member, the circuit element has a rectangular shape in a plan view, and at least three of closest ones to four corners of the circuit element out of the bump members are bonded to the package at respective positions overlapping the plurality of external terminals in the plan view.

Abstract: There is configured an oscillator including a resonator, and a circuit device, wherein the circuit device includes a first terminal, a storage circuit configured to store data corresponding to an external signal input from the first terminal, an oscillation circuit configured to generate an oscillation signal using the resonator, a counter circuit configured to count a period in which the external signal has a first polarity and a period in which the external signal has a second polarity using a clock signal generated based on the oscillation signal, and a processing circuit configured to write the data in the storage circuit based on a counting result of the counter circuit.

Abstract: In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer. The clock signal and the temperature signal are output from the integrated circuit device concurrently.

Abstract: A circuit device includes an oscillation circuit generating an oscillation signal by oscillating a vibrator, a temperature sensor circuit performing an intermittent operation, a logic circuit performing temperature compensation processing based on an output of the temperature sensor circuit, and a power supply circuit supplying power to the oscillation circuit. The oscillation circuit is disposed in a circuit region, the temperature sensor circuit and the logic circuit are disposed in a circuit region, and the power supply circuit is disposed in a circuit region, which is positioned between the circuit region and the circuit region.

Abstract: A circuit device includes an oscillation circuit generating an oscillation signal by oscillating a vibrator, a temperature sensor circuit performing an intermittent operation, a logic circuit performing temperature compensation processing based on an output of the temperature sensor circuit, and a power supply circuit supplying power to the oscillation circuit. Further, the logic circuit or the power supply circuit is disposed between the oscillation circuit and the temperature sensor circuit.

Abstract: A vibrating element includes a base and a first vibrating arm and a second vibrating arm extending from the base. The first vibrating arm includes a first arm and a first weight. The second vibrating arm includes a second arm and a second weight. In the vibrating element, 0.952<M2/M1<1.000, wherein M1 is mass on the second vibrating arm side of the first weight with respect to a first center line of the first arm and mass on the first vibrating arm side of the second weight with respect to a second center line of the second arm and M2 is mass on a side opposite to the second vibrating arm of the first weight with respect to the first center line and mass on a side opposite to the first vibrating arm of the second weight with respect to the second center line.

Abstract: An inertia measurement device, which is used in combination with a satellite positioning receiver that outputs a positioning result at every T seconds in a positioning system equipped on a vehicle, when a Z-axis angular velocity sensor, a position error P[m] based on the detection signal of the Z-axis angular velocity sensor while the vehicle moves at a moving speed V[m/sec] for T seconds satisfies Pp?P=(V/Bz)×(1?cos(Bz×T)) (where, a bias error of the Z-axis angular velocity sensor is Bz[deg/sec] and a predetermined allowable maximum position error during movement for T seconds is Pp[m]), and a bias error Bx and By of the Y-axis angular velocity sensor satisfies Bz<Bx and Bz<By.

Abstract: A circuit device includes an oscillation circuit that generates an oscillation signal by using a vibrator, a frequency adjustment circuit that adjusts an oscillation frequency of the oscillation circuit based on frequency adjustment data, a temperature sensor circuit that outputs temperature data, an arithmetic operation circuit, and a storage circuit. The arithmetic operation circuit outputs converted temperature data by performing, on the temperature data, conversion processing in which a slope of the converted temperature data with respect to the temperature data in a first temperature range is different from a slope of the converted temperature data with respect to the temperature data in a second temperature range. The storage circuit stores a lookup table representing a correspondence between the converted temperature data and the frequency adjustment data.

Abstract: An oscillator circuit includes an amplifying unit and a first feedback resistor. The amplifying unit includes an inverter at an input stage being connected to the one end of a crystal resonator, an inverter at an output stage being connected to the other end of the crystal resonator, and a linear amplifier. The linear amplifier is connected between an output terminal of the inverter at the input stage and an input terminal of the inverter at the output stage. The linear amplifier includes at least one inverter and a second feedback resistor. The second feedback resistor is connected in parallel to the at least one inverter. The linear amplifier has a conductance with a magnitude larger than a conductance of the inverter at the input stage and equal to or less than a conductance of the inverter at the output stage.

Abstract: A micro crystal oscillator includes: a tank body including a tank bottom and a side wall, the tank bottom including an inner surface and an outer surface, wherein the side wall is disposed on a periphery of the inner surface of the tank bottom to form a recess together with the tank bottom; a plurality of patterned electrodes arranged on the outer surface; a first patterned circuit arranged on the side wall; a plurality of vias disposed in the tank body for electrically connecting at least one of the patterned electrodes to the first patterned circuit; an oscillating chip arranged on the inner surface and located in the recess; and a plurality of connecting wires located in the recess and respectively connected to the oscillating chip and the first patterned circuit in a wire bonding manner; wherein the micro crystal oscillator is of millimeter level.

Abstract: An oscillator includes: an outer package; an inner package accommodated in the outer package and fixed to the outer package via a heat insulating member; a vibration element accommodated in the inner package; a temperature sensor; a first circuit element accommodated in the inner package and including an oscillation circuit configured to oscillate the vibration element and generate a temperature-compensated oscillation signal based on the temperature sensor; and a second circuit element fixed to the outer package and including a frequency control circuit configured to control a frequency of the oscillation signal.

Abstract: An oscillator circuit includes an oscillating circuit coupled to a vibrator, and a control circuit that controls the oscillating circuit. The oscillator circuit has a normal operation mode in which the oscillating circuit oscillates in a state where a negative resistance value is a first value, and a start mode in which the oscillator circuit shifts from a state where oscillation is stopped to the normal operation mode. In the start mode, the control circuit controls the negative resistance value to increase from a second value which is smaller than the first value.

Abstract: Provided is a thermal flow rate meter capable of individually correcting different pulsation errors generated in an upstream side temperature sensor and a downstream side temperature sensor. A thermal flow rate meter 1 which measures a flow rate of a gas based on a temperature difference between an upstream side temperature sensor 12 and a downstream side temperature sensor 13, which are arranged on the upstream side and the downstream side of a heating element 11. The thermal flow rate meter includes: a detection element 10 that individually outputs an output signal of the upstream side temperature sensor 12 and an output signal of the downstream side temperature sensor 13; and compensator 20 that individually performs response compensation of the output signal of the upstream side temperature sensor 12 and the output signal of the downstream side temperature sensor 13.

Abstract: An oscillator includes: a bulk-acoustic wave (BAW) resonator having a first BAW resonator terminal and a second BAW resonator terminal; and an active circuit coupled to the first and second BAW resonator terminals and having a series resonance topology with: a first transistor; a second transistor; a first resistor; a second resistor; a capacitive network coupled to first and second BAW resonator terminals and to respective current terminals of the first and second transistors; and an inductor having a first inductor terminal and a second inductor terminal, the first inductor terminal coupled to the capacitive network, and the second inductor terminal coupled to ground terminal.

Abstract: An oscillator circuit comprises a crystal oscillator arranged to generate an oscillation signal, a bias current generator arranged to supply a bias current to the crystal oscillator, and a feedback stage arranged to generate a feedback signal in response to an amplitude of the oscillation signal reaching an amplitude threshold. The bias current generator is arranged to: in response to a supply of power to the oscillator circuit being switched on, generate the bias current at an increasing level commencing from a first level; in response to the feedback signal, terminate the increasing; and during subsequent oscillation of the crystal oscillator, supply the bias current at a second level dependent on a final level of the bias current reached when the increasing is terminated.

Abstract: In a crystal oscillator, a crystal resonator and an IC chip are hermetically sealed in a package. The crystal resonator includes: a crystal resonator plate including a first excitation electrode formed on a first main surface, and a second excitation electrode, which makes a pair with the first excitation electrode, formed on a second main surface; a first sealing member covering the first excitation electrode of the crystal resonator plate; and a second sealing member covering the second excitation electrode of the crystal resonator plate. A vibrating part including the first excitation electrode and the second excitation electrode of the crystal resonator plate is hermetically sealed by bonding the first sealing member to the crystal resonator plate, and the second sealing member to the crystal resonator plate.

Abstract: A system is provided for providing vibration isolation and acceleration compensation for a device such as a vibration-sensitive oscillator or sensor. The system has an assembly that moves or vibrates relative to an external component. The assembly includes a plurality of components mounted to either side of a PCB. One or more accelerometers are configured to detect acceleration of the PCB in at least one of an X-axis direction, a Y-axis direction, and a Z-axis direction. The system includes plurality of isolators coupled to the assembly and configured to isolate or dampen vibrations that would otherwise transfer to the assembly from an underlying component to which the assembly is configured to attach to. In certain embodiments, the isolators are located between the assembly and the underlying component within vertical confines of an exterior perimeter of the PCB.

Abstract: An oscillator circuit comprises a crystal oscillator and an inverter. The input of the inverter is connected to the first terminal of the crystal oscillator and the output of the inverter is connected to the second terminal of the crystal oscillator, oscillator circuit is arranged to operate the inverter in its linear operating region. An amplitude regulator has an input connected to the input of the inverter, arranged to provide a first supply current IAREG to the inverter, where the magnitude of the first supply current is inversely dependent on a magnitude of a voltage at the inverter input. A digital-to-analogue converter is arranged to provide a second supply current IDAC to the inverter having a magnitude determined by a digital signal applied to a digital input of the digital-to-analogue converter.

Abstract: A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.

Abstract: A controller and system for tuning a voltage tunable capacitor is provided. The controller may include at least one analog-to-digital converter configured to receive at least one input signal and convert the at least one input signal into at least one digital signal. The controller may include a processor configured to process the at least one digital signal using logic to generate an output signal. The controller may include a charge pump configured to boost the output signal to generate a boosted output signal. The controller may be configured to provide the boosted output signal to the voltage tunable capacitor to adjust a bias voltage of the voltage tunable capacitor.

Abstract: A vibration element includes: a quartz crystal substrate having a first vibration part and a second vibration part; a pair of first excitation electrodes formed at two main surfaces of the quartz crystal substrate, at the first vibration part; and a pair of second excitation electrodes formed in such a way as to sandwich the second vibration part in a direction of thickness of the quartz crystal substrate, at the second vibration part. At least one second excitation electrode of the pair of second excitation electrodes is formed at an inclined surface inclined to at least one of the two main surfaces.

Abstract: An apparatus injects a start clock to a crystal at the beginning to increase an overall start up speed of the crystal. The apparatus relies on an impedance change inside the crystal itself instead of searching for a synchronization on the yet small crystal oscillation. The apparatus includes an oscillator (separate from the crystal) to search for the crystal's resonance frequency by detecting the crystal's impedance change. Once the frequency of the oscillator matches the crystal's resonance, there is significant change in the crystal's impedance. Using that information, the apparatus can lock the oscillator frequency at the crystal resonance frequency and inject the clock with high efficiency.

Abstract: A microelectromechanical system (MEMS) sensor includes a substrate having a piezoelectric layer thereon; a MEMS piezoelectric resonator including a reference electrode on a first side of the piezoelectric layer, a first port (port 1) including a capacitor coupling electrode on a side of the piezoelectric layer opposite the first side, and a second port (port 2) for excitation signal coupling including another electrode on the side opposite the first side. The MEMS piezoelectric resonator has a natural resonant frequency. A variable capacitor on the substrate is positioned lateral to the MEMS piezoelectric resonator having a first and a second plate are connected to port 1. An antenna or an oscillator circuit is connected to port 2. Responsive to a physical parameter a capacitance of the variable capacitor changes which changes a frequency of the MEMS piezoelectric resonator relative to the natural resonant frequency to generate a frequency shift.

Abstract: A piezoelectric resonator device having a sandwich structure is provided. A crystal oscillator includes: a crystal resonator plate; a first sealing member covering a first excitation electrode of the crystal resonator plate; and a second sealing member covering a second excitation electrode of the crystal resonator plate. A parallelepiped shaped package is formed by bonding: the first sealing member to the crystal resonator plate; and the second sealing member to the crystal resonator plate. The package includes an internal space in which is hermetically sealed a vibrating part of the crystal resonator plate including the first excitation electrode and the second excitation electrode. A bonding material hermetically sealing the vibrating part of the crystal resonator plate is formed to have an annular shape in plan view, and is disposed along an outer peripheral edge of the package.

Abstract: A piezoelectric resonator unit comprises a first enclosure portion that includes a first principal surface portion and a substantially curtain-shaped portion which cooperate to define a first recessed portion. The first principal surface portion has a first flat principal surface and the substantially curtain-shaped portion surrounds the first principal surface when viewed from a normal direction to the first principal surface. A second enclosure portion has a flat second principal surface and cooperates with the first recessed portion to define an enclosure which houses a piezoelectric resonator. A brazing material joins a distal end of the first enclosure portion to the second enclosure portion to hermetically seal the enclosure. An inner peripheral surface of the substantially curtain-shaped portion includes a stepped portion that is defined by adjacent thicker and a thinner portions of the substantially curtain-shaped portion. A surface of the stepped portion is formed of a single material.

Abstract: A method for manufacturing a piezoelectric vibration element that includes preparing a piezoelectric substrate; providing a first electrode layer on a first main surface of the piezoelectric substrate; arranging a mask on a side of the first main surface of the piezoelectric substrate, the mask including a center region and a peripheral region located along a periphery of the center region; and irradiating a radiation beam through the mask toward the first main surface of the piezoelectric substrate such that a larger amount of the radiation beam passes through the peripheral region than the center region of the mask so as to remove a part of the first electrode layer to form a first excitation electrode that decreases in thickness from the center region to the peripheral region of the mask on the first main surface of the piezoelectric substrate.

Abstract: A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.