Abstract: A signal transmission device includes: a first substrate and a second substrate; a first resonance section including a first resonator and a second resonator electromagnetically coupled to each other; a second resonance section disposed side-by-side relative to the first resonance section, and electromagnetically coupled to the first resonance section to perform a signal transmission between the first and second resonance sections; and a first shielding electrode disposed between the first resonator and the second substrate and partially covering the first resonator to allow at least an open end of the first resonator to be covered therewith, and a second shielding electrode disposed between the second resonator and the first substrate and partially covering the second resonator to allow at least an open end of the second resonator to be covered therewith.

Abstract: A contactless power transfer system is proposed. The system includes a first coil coupled to a power source and configured to produce a magnetic field. A second coil is configured to receive power from the first coil via the magnetic field. A field focusing element is disposed between the first coil and the second coil and configured as a self resonant coil having a standing wave current distribution. The field focusing element is further configured to focus the magnetic field onto the second coil and enhance the coupling between the first coil and the second coil.

Abstract: Methods and devices for phase shifting an RF signal for a base station antenna are provided. The device includes a transmission line that has a stationary ground plane coupled to the top of a substrate and a signal line on the bottom of the substrate. The signal line has an input port and an output port. The input port receives the RF signal with a certain phase and travels across the bottom of the substrate to the output port. The RF signal has a different phase at the output port because defected ground structures etched on the stationary ground plane shift the phase of the RF signal. In addition, the device includes a movable ground plane that may cover a portion of the defected ground structures, the substrate, and the stationary ground plane such that the moveable ground plane further adjusts the phase of the RF signal.

Abstract: A circuit substrate has three wiring layers, wherein a signal line is formed in a first wiring layer; a ground plane is formed in a second wiring layer; a resonant line is formed in a third wiring layer. A circumferential slit is formed in the ground plane, wherein an island electrode separated from the ground plane is formed inside the slit. The left end of the resonant line is connected to the island electrode through an interlayer-connecting via, while the right end of the resonant line is connected to the ground plane through an interlayer-connecting via. A transmission line (or a microstrip line) is formed using the signal line and the ground plane, and therefore a complex resonator is formed to embrace the transmission line. This achieves band elimination with regard to a signal component of a resonance frequency among signals propagating through the microstrip line.

Abstract: An apparatus for wireless power transmission is disclosed. According to an exemplary aspect, the wireless power transmission apparatus includes a high Q low frequency near magnetic field resonator having characteristics of a metamaterial. Accordingly, manufacturing of a compact power supply capable of wirelessly supplying power to mobile communication terminals or multimedia terminals is possible. By using a zeroth-order resonator with a DNG or ENG structure, a small-sized power supply with a simple configuration may be manufactured.

Abstract: Provided is a composite resonator wherein two resonance frequencies can be set discretionarily to a certain extent. The composite resonator is provided with a grounding electrode (21) arranged on a lower surface of a laminated body wherein a plurality of dielectric layers (11) are laminated, and a composite resonant electrode (26) arranged on an upper surface or inside of the laminated body. The composite resonant electrode (26) is composed of a base section (27) and a plurality of strip-like protruding sections (28a, 28b). One end of the base section (27) is grounded. One end of each of the protruding sections (28a, 28b) is connected to the other end of the base section (27), and the protruding sections are arranged in parallel.

Abstract: A bandpass filter for a wide frequency band such as UWB is disclosed. The bandpass filter comprises a laminate of a plurality of dielectric layers, a first ground electrode connected to a ground potential, a plurality of resonant electrodes in a first inter-layer and a plurality of coupling electrodes in a second inter-layer. A transmission characteristic of the bandpass filter having flat and low loss over the entire region of the broad pass band can be achieved.

Abstract: Various embodiments of the present invention are directed to metamaterial-based devices and to methods of fabricating metamaterial-based devices. In one embodiment, a metamaterial-based device comprises a channel layer, a top metallic layer, and a bottom metallic layer. The channel layer has a top and a bottom surfaces, and at least one channel configured to transmit at least one material. The top metallic layer has a top surface and a bottom surface attached to the top surface of the channel layer and has a first lattice of openings extending between the top and bottom surfaces of the top metallic layer. The bottom metallic layer has a top surface and a bottom surface, wherein the top surface of the bottom metallic layer is attached to the bottom surface of the channel layer.

Abstract: A transmission line resonator includes a half-wavelength stepped-impedance resonator with two ends short-circuited to ground, and a capacitive element with one end connected to a center portion of the stepped-impedance resonator and the other end short-circuited to ground. The stepped-impedance resonator includes a first transmission line, a second transmission line, and a third transmission line. The second transmission line has a second line impedance and a second line length, with one end being connected to one end of the first transmission line and the other end being short-circuited to ground. The third transmission line has the second line impedance and the second line length, with one end being connected to the other end of the first transmission line and the other end being short-circuited to ground. The first line impedance is lowered in comparison with the second line impedance.

Abstract: A projected artificial magnetic mirror (PAMM) waveguide includes a substrate, metal patches, a metal backing, multiple dielectric materials, and a waveguide area. The metal patches are on a first layer of a substrate and the metal backing is on a second layer of the substrate. The first dielectric material is between the first and second layers of the substrate. The metal patches are electrically coupled to the metal backing to form an inductive-capacitive network that substantially reduces surface waves along a surface of the substrate within a given frequency band. The second dielectric material juxtaposed to the metal patches, where the waveguide area is between the second and third dielectric materials and includes the surface of the substrate. The inductive-capacitive network, the second dielectric material, and/or the third dielectric material facilitate confining an electromagnetic signal within the waveguide area.

Abstract: A band-pass filter has a plurality of frequency band channels each including a first inductor having a first terminal coupled to a first balanced port and a second terminal coupled to a second balanced port. A first capacitor is coupled between the first and second terminals of the first inductor. A second inductor has a first terminal coupled to a first unbalanced port and a second terminal coupled to a second unbalanced port. The second inductor is disposed within a first distance of the first inductor to induce magnetic coupling. A second capacitor is coupled between the first and second terminals of the second inductor. A third inductor is disposed within a second distance of the first inductor and within a third distance of the second inductor to induce magnetic coupling. A second capacitor is coupled between first and second terminals of the third inductor.

Abstract: A filter is provided with a multilayer board incorporating a resonator formed by two ground plates opposed to each other and conductive side walls connected to the ground plates; two signal vias provided through the resonator; and two terminals connected to the signal vias to receive a pair of signals. The resonator has a first face of symmetry vertical to the ground plates. The signal vias are disposed symmetrically with respect to the first face of symmetry on a distance from the first face of symmetry.

Abstract: An apparatus for improving transmission bandwidth is provided in the embodiments of the present disclosure, which includes: a signal transmission line, side grounds located at two sides of the signal transmission line, and a capacitor disposed between the signal transmission line and the side grounds. The signal transmission line comprises a microstrip line, and the signal transmission line and the side grounds form a coplanar waveguide transmission line together. On a transmission channel connected through a bonding wire, a capacitor is disposed between a signal transmission line and side grounds. An inductor-capacitor (LC) resonance circuit is formed by using inductance characteristics presented by the bonding wire and the capacitor connected in parallel with the bonding wire, and a resonance point is formed within a frequency band in a frequency domain.

Abstract: Provided is a resonator for a wireless power transmission, the resonator including a transmission line unit including a plurality of transmission line sheets arranged in parallel, and a capacitor provided at a predetermined position of the transmission line unit.

Abstract: An electromagnetic resonance coupler includes a transmission resonator provided on the transmission substrate and having a shape obtained by opening a loop shape including an inwardly recessed portion in part to make a transmission resonator slit, transmission wiring connected to the transmission resonator, a reception substrate, a reception resonator provided on the reception substrate and having the same size and shape as the transmission resonator, and reception wiring connected to the reception resonator. The transmission and reception resonators are symmetric with respect to a point and face each other so that their contours match. In the transmission resonator, at least part of wiring constituting the recessed portion is close to wiring other than the at least part of wiring at a distance less than or equal to four times the wiring width of the transmission resonator.

Abstract: In a filter structure for suppressing a spurious signal, a conductor layer in a printed circuit board includes a pattern with interconnected pattern elements (106 to 114). A pattern element includes a low-impedance conductive region (119) the capacitance of which against a second conductor layer of the printed circuit board is dominant over the inductance. A pattern element includes at least two adjacent high-impedance conductor strips (115, 116) in a first direction, connected to a low-impedance conductive region, and at least two adjacent high-impedance conductor strips (117, 118) in a second direction, connected to the low-impedance conductive region. The inductance of each high-impedance conductor strips is dominant over the capacitance against the second conductor layer. The high-impedance conductor strips form together with the low-impedance conductive region a plurality of resonance points in the frequency range, thus achieving sufficient stop-band width.

Abstract: In an ultra-wideband (UWB) band-pass filter, an equivalent circuit of a band-pass filter for direct frequency conversion is configured to have a series LC resonator and a parallel LC resonator, the parallel LC resonator is implemented as a short stub and an open stub, and the series LC resonator is implemented by modeling an inductor and a capacitor as a distributed constant circuit. The series LC resonator is implemented to have a 3D structure for effective designing of the band-pass filter by a new method of implementing a series resonator circuit. In the UWB band-pass filter, a low-pass filter for improving band-stop characteristics is additionally connected.

Abstract: Tunable resonator systems and methods for tuning resonator systems are disclosed. In one aspect, a resonator system includes an array of resonators disposed adjacent to a waveguide, at least one temperature sensor located adjacent to the array of resonators, and a resonator control electronically connected to the at least one temperature sensor. Each resonator has a resonance frequency in a resonator frequency comb and channels with frequencies in a channel frequency comb are transmitted in the waveguide. Resonance frequencies in the resonator frequency comb are to be adjusted in response to ambient temperature changes detected by the at least one temperature sensors to align the resonance frequency comb with the channel frequency comb.

Abstract: A bandpass filter for a wide frequency band such as UWB is disclosed. The bandpass filter can receive a pair of signals, namely a balanced signal, and output a pair of signals. The bandpass filter comprises a plurality of ½ wavelength resonance electrodes, a plurality of ¼ wavelength resonance electrodes and a plurality of coupling electrodes. A transmission characteristic of the bandpass filter having flat and low loss over the entire region of the broad pass band can be achieved.

Abstract: Methods and apparatus for measuring permittivity comprising: a meander-line ring resonator, which may be may be disposed on a substrate proximate to and separated from an input coupler and an output coupler thereon, the resonator ring further including a continuous conductive material having at least two turns to form a single congruent pattern, symmetrical along at least one axis.

Abstract: A method for producing a metamaterial including an electromagnetic wave resonator resonating with an electromagnetic wave. The method includes the steps of: (a) forming a support by a nanoimprint method or a photolithography method, the support including a portion on which an electromagnetic wave resonator is to be formed; and (b) vapor-depositing a material which can form the electromagnetic wave resonator on the portion of the support to thereby arrange the electromagnetic wave resonator on the support.

Abstract: A process for producing a metamaterial excellent in productivity is provided. The present invention relates to a process for producing a metamaterial including an electromagnetic wave resonator resonating with an electromagnetic wave, the process including: vapor-depositing a material which can form the electromagnetic wave resonator to a support having a shape corresponding to a shape of the electromagnetic wave resonator to thereby arrange the electromagnetic wave resonator on the support.

Abstract: A tunable inductor circuit is disclosed. The tunable inductor circuit includes a first inductor. The tunable inductor circuit also includes a second inductor in parallel with the first inductor. The tunable inductor circuit also includes a switch coupled to the second inductor. A resistance of the switch is added in parallel to the first inductor based on operation of the switch.

Abstract: A microwave circuit (1) in strip line technology contains metallic resonator strips (21,22,23,24,25,26,27,28,29) on one side of a dielectric layer. Alternately another end of consecutive resonator strips (21,22,23,24,25,26,27,28,29) is connected by means of at least one via (61,62,63,64,65,66,67,68,69; 61?,62?,63?,64?,65?,66?,67?,68?,69?; 6) to a metallic surface on an opposite side of said dielectric layer. Said end of each resonator strip (21,22,23,24,25,26, 27,28,29) is connected to at least one via (61,62,63,64,65,66,67,68,69,61?,62?,63?,64?,65?,66?,67?,68?,69) and is formed relative to said at least one via (61,62,63,64,65,66,67,68,69,61?,62?,63?,64?,65?,66?,67?,68?,69?; 6,6?; 6?, 6??; 6??) so that the effective electrical length of each resonator strip (21,22,23,24,25,26,27,28,29) connected through the via (61,62,63,64,65,66,67,68,69,61?, 62?,63?,64?,65?, 66?,67?,68?,69?) is identical.

Abstract: The present invention relates to a resonator device having a stacked arrangement of laminated layers including a plurality of dielectric layers, and at least one resonator comprising a short-circuit electrode, a first capacitor electrode and a second capacitor electrode. Each electrode comprises at least a portion of a layer of electrically conductive material provided on a surface of one of the dielectric layers. The second capacitor electrode is disposed spaced, in the stacking direction, from the short-circuit electrode and the first capacitor electrode. The short-circuit electrode and the second capacitor electrode are electrically interconnected by a first electrical connection comprising at least one via hole penetrating one or more of the dielectric layers.

Abstract: A metamaterial structure is provided, including a substrate and a plurality of resonators that are provided on different surfaces of the substrate or different layers of the substrate. The resonators have resonance characteristics different from each other, and the metamaterial structure has a permittivity, a permeability, and a refractive index respectively different from those of the substrate in a predetermined frequency bandwidth.

Abstract: A dual-band bandpass filter according to the present invention includes a plurality of dual-band bandpass resonators. The dual-band bandpass resonator includes a central conductor having a central axis aligned with an input/output direction, a pair of grounding conductors, a central conductor short-circuit part and a pair of stub conductors that are formed on a surface of a dielectric substrate. The pair of grounding conductors are disposed on the opposite sides of the central conductor with a space interposed therebetween. The central conductor short-circuit part short-circuits the pair of grounding conductors, and one end of the central conductor is connected to the central conductor short-circuit part.

Abstract: Disclosed are a resonator configured by a microstrip line and a filter. A ring resonator in accordance with an embodiment of the present invention includes a ring resonant unit configured by a microstrip line; and a via connecting the resonant unit with a ground surface. In accordance with the embodiment of the present invention, the ring resonator configured by a microstrip line including a via and a filter, thereby providing a smaller and cheaper resonator and filter.

Abstract: A resonance element according to an embodiment transmits a radio-frequency signal, and includes a first substrate, a second substrate, a first circuit element formed on the first substrate, a second circuit element formed on the second substrate, and a transmission line connecting the first circuit element and the second circuit element, and a peak of even mode resonance in which the first circuit element and the second circuit element resonate in the coordinated phase is within a bandwidth of a transmission signal, and a peak of odd mode resonance in which the first circuit element and the second circuit element resonate in a reverse phase is outside the bandwidth.

Abstract: An artificial microstructure made of conductive wires includes a split resonant ring with a split, and two curves. The two curves respectively start from first end and the second end of the split resonant ring and curvedly extend inside the split resonant ring, where the two curves do not intersect with each other, and do not intersect with the split resonant ring.

Abstract: In an exemplary embodiment, a spurline filter comprises a capacitive element connected to a spur and either a through-line of the spurline filter or ground. In another embodiment, multiple capacitive elements are connected to the spur. In an exemplary embodiment, the capacitively loaded spurline filter provides a band rejection frequency response similar to the band rejection frequency response of a similar spurline filter that does not comprise at least one capacitive element but the capacitively loaded spurline filter has half the layout area or less. In an exemplary embodiment, the spurline filter comprises capacitive elements, where the capacitive elements are configured to reduce the resonant frequency of the filter.

Abstract: A stripline filter that suppresses a fundamental wave frequency without increasing the size of a board and in which a harmonic frequency is easily set to a desired frequency. The stripline filter includes a glass layer having a relative dielectric constant lower than that of a dielectric board. A first top surface line is provided on a top surface of the dielectric board and has a resonant open end. A second top surface line and a side surface electrode are provided on the glass layer so as to extend from positions connected to the first top surface line.

Abstract: A resonator in the Swiss-roll structure, method of making the resonator structure and the system employing the resonator are disclosed. The resonator includes a plurality of layers, including a ceramic layer and a metallic layer. The ceramic and metallic layers are configured in a Swiss-roll form such that the neighboring ceramic layers are separated by the metallic layer. Further, the ceramic layer includes materials that have a dielectric constant of at least about 10 and dielectric loss tangent less than about 0.01 in the frequency range of about 1 KHz to about 100 MHz. The method of forming the resonator includes the steps of disposing a metallic layer, depositing a dielectric ceramic layer, and forming a Swiss-roll structure of the metallic and ceramic layers. Alternate method includes swaging the dielectric material filled metal tubes and forming into Swiss-rolls.

Abstract: A magnetic field focusing assembly includes a magnetic field generating device configured to generate a magnetic field, and a split ring resonator assembly configured to be magnetically coupled to the magnetic field generating device and configured to focus the magnetic field produced by the magnetic field generating device.

Abstract: The present invention relates to a circuit arrangement (1) having a prescribed electrical capacitance, comprising a substrate (S) having at least one metallic, electrically conductive conductor (L, Lb, Ls). According to the invention, at least one first conductor strip segment (LA1) is disposed on the substrate (S) and at least some regions of at least one second conductor strip segment (LA2, LA3, LA4) are disposed on the first conductor strip segment (LA1), wherein an electrically insulating layer (iS) is disposed between the conductor strip segments (LA1, LA2, LA3, LA4), forming a dielectric. The invention further relates to a method and a device (2) for producing a circuit arrangement (1) having a prescribed electrical capacitance.

Abstract: In an embodiment, provided are nanoresonators, nanoresonator components and related methods using the nanoresonators to measure parameters of interest. In an aspect, provided is a nanoresonator component comprising an elongated nanostructure having a central portion, a first end, and a second end and an electrode having a protrusion ending in a tip that is positioned adjacent to the elongated nanostructure. The electrode is used to impart a highly-localized driving force in a perpendicular direction to the nanostructure to induce geometric non-linear deformation, thereby generating non-linear resonance having a broadband resonance range that spans a frequency range of at least one times the elongated nanostructure natural resonance frequency.

Abstract: In accordance with various aspects of the disclosure, a method and apparatus is disclosed that includes features of transmitting power from a transmitter of a wireless power system at a multiplicity of frequencies between a first transmission frequency and a second transmission frequency at a first power level and transmitting power from the transmitter at a second power level and at one or more frequencies between the first transmission frequency and the second transmission frequency if the one or more receiving devices are determined to be coupled to the transmitter.

Abstract: A material including a conductor may be rolled to form a resonant element.

Abstract: Disclosed is a resonator for wireless power transmission used in a mobile device. The resonator includes a substrate, at least one microstrip line, and a magnetic core. The microstrip line is formed on the substrate and is provided at one side thereof with a slit to have an open-loop shape. The magnetic core is formed on the substrate and is disposed on a space defined by the microstrip line to increase coupling strength.

Abstract: A resonator includes: a dielectric block; first and second ground electrodes provided on or in the dielectric block, and disposed to oppose each other; a first via conductor provided in the dielectric block orthogonally to the first and second ground electrodes, and having a short-circuit end connected to the first ground electrode and an open end extending toward the second ground electrode; a second via conductor interdigitally-coupled with the first via conductor, and provided in the dielectric block orthogonally to the first and second ground electrodes, and having a short-circuit end connected to the second ground electrode and an open end extending toward the first ground electrode; a first capacitor electrode provided in the dielectric block, and connected to the first via conductor; and a second capacitor electrode provided in the dielectric block, and connected to the second via conductor.

Abstract: In an electronic component, a first resonator includes a first quarter-wave strip line disposed on a dielectric layer and a second quarter-wave strip line disposed on another dielectric layer, the first and second quarter-wave strip lines being interdigitally coupled to each other. A second resonator includes a third quarter-wave strip line disposed on a dielectric layer and a fourth quarter-wave strip line disposed on another dielectric layer, the third and fourth quarter-wave strip lines being interdigitally coupled to each other. The first quarter-wave strip line and the third quarter-wave strip line are electromagnetically coupled to each other and are disposed on different dielectric layers. The second quarter-wave strip line and the fourth quarter-wave strip line are electromagnetically coupled to each other.

Abstract: A signal transmission device includes: a first substrate and a second substrate; a first resonance section including a first resonator and a second resonator electromagnetically coupled to each other; a second resonance section disposed side-by-side relative to the first resonance section, and electromagnetically coupled to the first resonance section to perform a signal transmission between the first and second resonance sections; and a first shielding electrode disposed between the first resonator and the second substrate and partially covering the first resonator to allow at least an open end of the first resonator to be covered therewith, and a second shielding electrode disposed between the second resonator and the first substrate and partially covering the second resonator to allow at least an open end of the second resonator to be covered therewith.

Abstract: A metamaterial includes a dielectric substrate and an array of discrete resonators at the dielectric substrate, wherein each of the discrete resonators has a shape that is independently selected from: an F-type shape; an E-type shape; or a y-type shape. A parameter of a chiral metamaterial is determined and a chiral metamaterial having such a parameter is prepared by the use of a model of the chiral metamaterial. The metamaterial model includes an array of discrete resonators. In one embodiment, each of the discrete resonators has a shape that is independently selected from the group consisting of: an F-type shape; an E-type shape; and a y-type shape. To the metamaterial model, electromagnetic (EM) radiation, preferably plane-polarized EM radiation in a visible, ultraviolet or near-infrared region, having at least one wavelength that is larger than the largest dimension of at least resonator of the metamaterial model, is applied.

Abstract: A band-pass filter according to the present invention includes two or more resonant lines arranged side by side in a direction orthogonal to a laminating direction in a laminate substrate formed by laminating plural dielectric layers. Each of the resonant lines has a first coil pattern portion formed in the dielectric layers and a second coil pattern portion formed in the dielectric layers different from the dielectric layers in which the first coil pattern portion is formed. The first and second coil pattern portions are connected in series and formed in a spiral shape. At least one of the first and second coil pattern portions is formed as parallel lines in the plural dielectric layers. According to such a configuration, a band-pass filter that is reduced in size and reduced in loss is provided.

Abstract: Composite material, devices incorporating the composite material and methods of forming the composite material are provided. The composite material includes interstitial material that has at least one of a select relative permittivity property value and a select relative permeability property value. The composite material further includes inclusion material within the interstitial material. The inclusion material has at least one of a select relative permeability property value and a select relative permittivity property value. The select relative permeability and permittivity property values of the interstitial and the inclusion materials are selected so that the effective intrinsic impedance of the interstitial and the inclusion material match the intrinsic impedance of air. Devices made from the composite include metamaterial and/or metamaterial-inspired (e.g. near-field LC-type parasitic) substrates and/or lenses, front-end protection, stealth absorbers, filters and mixers.

Abstract: A resonator having respective electrode planes of first and second internal electrodes disposed so as to be substantially parallel to a line of magnetic force of a magnetic field. In the resonator, respective electrode planes of first and second external electrodes are disposed so as to be substantially parallel to the line of magnetic force of the magnetic field in planes different from the electrode planes of the first and second internal electrodes.

Abstract: A band-pass filter includes an input portion inputting an electromagnetic signal, an output portion outputting the electromagnetic signal, a plurality of transmission portions electrically connecting the input portion and the output portion to transmit the electromagnetic signal therebetween, and a pair of coupling members each shaping the frequency of the band-pass filter. Each of the coupling members includes a first coupling portion electrically connecting two of the transmission portions and a second coupling portion electrically connecting the first coupling portion. The first coupling portion includes a pair of parallel coupling microstrip lines of the same size. The second coupling portion includes a pair of transmission lines of different sizes.

Abstract: The resonator includes first high-impedance wiring plate-like, arranged parallel to top-surface ground electrode; second high-impedance wiring plate-like, arranged so as to face first high-impedance wiring; first columnar conductor electrically connecting first high-impedance wiring to second high-impedance wiring; first low-impedance wiring arranged between first high-impedance wiring and second high-impedance wiring; second columnar conductor electrically connecting first high-impedance wiring to first low-impedance wiring; second low-impedance wiring arranged between first low-impedance wiring and second high-impedance wiring; and third columnar conductor electrically connecting second high-impedance wiring to second low-impedance wiring, to reduce the area size the resonator.

Abstract: A transmission line type resonator has a low-loss characteristic and, in order to realize the low-loss characteristic, the transmission line type resonator includes a laminate body formed of a plurality of dielectric sheets, a transmission line of complex right hand left hand system disposed between the plurality of dielectric sheets, and an external connection terminal disposed at the end face of the transmission line type resonator and connected with the transmission line of complex right hand left hand system.

Abstract: A piezoelectric layer is coupled to a bottom electrode in a method of fabricating a piezoelectric resonator. A bottom metal layer of a top electrode is deposited on the piezoelectric layer. The bottom metal layer is patterned and etched. A top metal layer of the top electrode is deposited on the etched bottom metal layer. The top metal layer is patterned and etched. An interconnect metal layer is deposited on the etched top metal layer and the piezoelectric layer such that the interconnect metal layer isolates the bottom metal layer from subsequent etch steps.