Abstract: A load cell is constructed with several strain gauges. Each of the strain gauges are formed with a meandering conductive portion on a substrate or base member. Portions of the meandering conductive layer defines a predetermined tab ratio. The base member is formed with a predetermined amount of filler and the tab ratio is pre-determined such that the creep characteristic of the strain gauge is substantially zero in a load cell having a generally low rated load.

Abstract: An electrical circuit having at least one electrical component, in particular a strain-sensitive resistor and conductor tracks which are applied to a metallic carrier with the intermediate positioning of at least one insulating layer, at least one further conductor track, which is connected to at least one conductor track of the circuit, is applied to the surface of the metallic carrier. The invention also relates to methods for manufacturing the electrical circuit.

Abstract: A conductive structure is used in electric variable resistance devices to provide changes in electrical resistance with movement and changes in pressure, the variable resistance device comprising externally connectable electrodes (10) bridged by an element (14) containing polymer and particles of metal, alloy or reduced metal oxide, said element (14) having a first level of conductance when quiescent and being convertible to a second level of conductance by change of stress applied by stretching or compression or electric field, the device further comprising by means (18) to stress the element (14) over a cross-sectional area proportional to the level of conductance required.

Abstract: A high-performance strain gauge has a high gauge factor and a decreased temperature coefficient of resistance (TCR). The strain gauge has a laminated structure that includes a first layer formed of a positive TCR material and a second layer formed of a negative TCR material.

Abstract: A foot switch for use in the control of medical apparatus comprises a pedal that is connected to and movably seated on a floor plate of a joint connection, a sensor linked to a switch element, and a repositioning device disposed between the floor plate and the pedal. The repositioning device ensures that an operating force must be applied to the upper surface of the pedal to produce a tilting movement of the pedal out of an initial position into an operating position in which a smaller angle is defined between the floor plate and the pedal than in the initial position and in which the sensor is activated to trigger the output of a switch pulse from the switch element. The improvement of the present invention consists of the combination of the repositioning device and the joint into an elastic joint device. The simplified foot switch is easily disinfected.

Abstract: A resistant based thermal probe including a nanometer sized four-leg filament integrated with a piezoresistive AFM type cantilever is created by depositing the filament structure onto the cantilever by a chemical vapor deposition technique where the cantilever is exposed to the flux of precursor gas. An incident electron beam causes a fragmentation of the gas molecules leaving a deposit behind which leads to a conductive deposit shaped as a multi-leg filament structure for thermal measurements of a sample. A deposited four leg filament structure has a mechanical rigidity, high spatial resolution, low thermal conductivity and thermal capacitance, fast response time, and in combination with a four point resistant measurement and lock-in technique, eliminates resistivity for increasing both the temperature sensitivity and the signal-to-noise ratio of the thermal probe.

Abstract: A strain-sensitive resistor including a resistance layer arranged on a support element and an electromechanical transducer produced with this transistor. The support element has a recess in its surface. When the support element is subjected to mechanical stress in at least one area in which the resistance layer is positioned, the recess produces a ratio between the two main strain directions of the resistance layer which differs in magnitude.

Abstract: A method of depositing a thin metal film using photolithography is disclosed. The method includes the deposition of a sacrificial metal layer on a substrate. Photolithography processing forms a pattern on the sacrificial metal layer that is removed prior to sputter deposition of the thin metal film.

Abstract: A rotary position sensor for sensing the position of an attached object. The sensor uses a strain gage to detect the position of the object. The sensor includes a housing and a helical shaped actuator located in the housing. The actuator is attachable to the object. A strain gage is positioned in contact with the actuator. The actuator applies a strain to the strain gage as the actuator is moved. The strain gage generates an electrical signal that is proportional to the position of the object.

Abstract: A piezoresistor having a base substrate with a quantum well structure formed on the base substrate. The quantum well structure includes at least one quantum well layer bounded by barrier layers. The barrier layers are formed from a material having a larger bandgap than the at least one quantum well layer.

Abstract: A pointing stick includes a substrate, an input pillar set vertically on the substrate, and at least one strain gauge for sensing pressure and producing pointing signals corresponding to the pressure. A portion of the strain gauge is set between the input pillar and the substrate. The strain gauge includes a first pressure resistor set on an upper surface of the substrate. A first electrode and a second electrode are electrically connected to the first pressure resistor. The first electrode and the second electrode form a loop to let current pass through the first pressure resistor. The first electrode and the second electrode are separated by a gap with a predetermined distance in a pressing direction, which is perpendicular to the surface of the substrate.

Abstract: A foot switch for use in the control of medical apparatus comprises a pedal that is connected to and movably seated on a floor plate by means of a joint connection, a sensor linked to a switch element, and a repositioning means disposed between the floor plate and the pedal. The repositioning means ensures that an operating force must be applied to the upper surface of the pedal to produce a tilting movement of the pedal out of an initial position into an operating position in which a smaller angle is defined between the floor plate and the pedal than in the initial position and in which the sensor is activated to trigger the output of a switch pulse from the switch element. A common feature of known arrangements similar to this is that during operation corrosion develops in the foot switch, in particular in the joint region, which interferes with operation of the switch so that the arrangement does not move freely and therefore is in a deficient functional state.

Abstract: An analog sensor depressible by a single human finger/thumb. Depressive force is applied to a dome-cap and to analog materials for varying an analog output of the sensor responsive to varying force applied by a single finger or thumb. Depressive force causes the dome-cap to bow downward passing through a user discernable threshold, causing a snap-through tactile sensation. In some embodiments the dome-cap is metallic.

Abstract: An acceleration change detection system, which in a preferred embodiment is used as an impact detection system, detects whether a deflection sensor is deflected. The magnitude and/or direction of the impact may be considered. The system may include one or more than one deflection sensor. The invention may have particular use in a system that determines whether to deploy an air bag in a vehicle. The system may employ an open or enclosed chassis. The deflection sensors may deflect against deflection structures, which may be in various shapes. The deflection sensors have an electrical parameter (such as resistance) that changes upon deflection of the deflection sensor. In certain embodiments, the deflection sensor is ordinarily held in place by a movement inhibitor, which may include, for example, a magnetic, spring, clip, or stiff substrate. A large impact may create a force great enough to overcome the magnetic or mechanical force of the movement inhibitor.

Abstract: A linear position sensor for sensing the position of an attached object. The linear position sensor uses a strain gage to detect the position of the object. The sensor includes a housing and a ramp shaped actuator located in the housing. The actuator is attachable to the object. A strain gage is positioned in contact with the actuator. The actuator applies a strain to the strain gage as the actuator is moved. The strain gage generates an electrical signal that is proportional to the position of the object.

Abstract: A rotary position sensor for sensing the position of an attached rotating object. The rotary position sensor uses a strain gage to detect the position of the object. The sensor includes a housing and a rotor located in the housing. The rotor is attachable to the object. A strain gage is positioned in the housing adjacent the rotor. The rotor rotates so as to contact the strain gage and apply a strain to the strain gage. The strain gage generates an electrical signal that is proportional to the position of the object.

Abstract: A rotary position sensor for sensing the position of an attached rotating object. The rotary position sensor has a housing and a volute shaped rotor having a variable width that varies about the circumference of the rotor. The rotor is positioned within the housing and is attached to the object. The rotor rotates as the object rotates. A strain gage is positioned in the housing. The rotor contacts the strain gage and applies strain thereto such the strain gage deflects according to the variable width of the rotor. The strain gage generates a variable electrical signal that is proportional to the rotational position of the object.

Abstract: A piezoresistor having a base substrate with a quantum well structure formed on the base substrate. The quantum well structure includes at least one quantum well layer bounded by barrier layers. The barrier layers are formed from a material having a larger bandgap than the at least one quantum well layer.

Abstract: A deflection sensing system for detecting deflection includes one or more deflection sensors between opposing sets of extensions. When one set of extensions is moved toward an opposing set of extensions, the deflection sensors are deflected. A preferred deflection sensor is a flexible potentiometer, which has a resistance that changes as the flexible potentiometer is deflected A flexible potentiometer includes a variable resistance material on a substrate. In a preferred system, the flexible potentiometer includes a cantilevered section, which is deflected about an extension with respect to the remainder of the flexible potentiometer, or with respect to a portion of the substrate not including the variable resistance material. A flexible potentiometer experiences less stress when in cantilevered form than when stretched between two extensions. In either case, the extensions may be joined to first and second corrugated plates.

Abstract: A method for sealing a transducer of a type having a diaphragm with an active region and an inactive region, a stress sensing network associated with the active region of the diaphragm, contacts associated with the inactive region of the diaphragm, and lead-outs for coupling the stress sensing network to the contacts. The method comprises oxidizing the transducer to provide a first oxide layer which covers the diaphragm, the stress sensing network, the lead-outs and the contacts. Next, a layer of semiconductive material is deposited over the first oxide layer and is then planarized to provide a planar surface having a substantially flat and bondable surface. Finally, a cover member is bonded to the planar surface of the layer which covers the inactive region of the diaphragm to hermetically seal the stress sensing network and thereby provide a sealed transducer.

Abstract: The object of the present invention is to obtain high-precision semiconductor pressure detecting devices without unevenness in gauge resistance values. When a recrystal silicone film 23 is formed by use of laser, a crystal subgrain boundary 27 generates, and crystal fault is included in (100) direction. A metallic wiring 51 of aluminum or gold is arranged on said crystal subgrain boundary 27 crossing a gauge resistance 3A. The current running through a gauge resistance formed by said recrystal silicone film 23 runs into said metallic wiring 51 at the portion of said crystal subgrain boundary 27. Therefore, the current running through said gauge resistance is unlikely to be affected by crystal fault. High-precision and high-sensitivity semiconductor pressure detecting devices are realized with reduced affection by crystal fault.

Abstract: The invention is embodied in a microstructural transducer including a microstructural platform, a movable microstructural member, a microstructural linkage elastically coupling the movable microstructural member to the microstructural platform, measuring apparatus for sensing displacement of the movable microstructural member relative to the platform and control apparatus for inducing at least one field near the movable member in accordance with a predetermined stimulus. The predetermined stimulus may be selected to perform any one of several functions, including caging, calibration, characterization and compensation.

Abstract: A motion transducer having a user moveable plunger which compresses a spring for generating a force proportional to plunger displacement and applying the generated force to an actuator telescoped onto the plunger. The actuator has an elastomeric pad on the surface which contacts and reacts the generated force onto a force/pressure sensitive resistive strip which varies its resistance with the changing force applied by the elastomeric pad. The changes in resistance may be electrically detected to give an indication of plunger travel.

Abstract: A sensor having a housing; two highly conductive elements fixed in-part within the housing and in-part exposed external of the housing; the conductive elements separated from one another within the housing in a normally open arrangement. A resilient dome-cap is positioned within the housing, and in some embodiments is conductive and in constant contact with one of the conductive elements, and in other embodiments the dome-cap need not be conductive. A depressible actuator is movably retained by the housing with a portion thereof external of the housing to be accessible for depressive force to be applied thereto by a mechanical device or human finger/thumb. The actuator also includes a portion positioned to allow depressive force applied thereto to be applied to the dome-cap. Pressure-sensitive variable-conductance material is contained within the housing and electrically positioned as a variably conductive element in a current flow path between the two conductive elements.

Abstract: A transparent strain sensitive surface is disclosed which is suitable for strain gages, video terminal touch panels, security panels (windows, display cases, etc.). The strain gage includes a transparent, strain sensitive conductor of indium tin oxide (ITO) or indium oxide (IO) on a transparent substrate. The strain sensitive panels include a crossed xy matrix of transparent IO or ITO strain sensitive conductors formed on the same side or on opposite sides of a transparent substrate.

Abstract: A thick-film strain-sensing structure for a media-compatible, high-pressure sensor. The strain-sensing structure generally includes a metal diaphragm, at least one electrical-insulating layer on the diaphragm, an interface layer on the electrical-insulating layer, and at least one thick-film piezoresistor on the interface layer for sensing deflection of the diaphragm. The interface layer and the electrical-insulating layers are preferably formed by thick-film processing, as done for the piezoresistors. For compatibility with the metal diaphragm, the electrical-insulating layer has a CTE near that of the diaphragm. The interface layer is formulated to inhibit and control diffusion of the electrical-insulating layers into the piezoresistors. For this purpose, the interface layer is formed from a composition that contains, in addition to a suitable organic media, alumina, zinc oxide, and at least one glass frit mixture comprising lead oxide, a source of boron oxide such as boric acid, silica and alumina.

Abstract: A force transducer includes an elongated lever arm attached to a substrate having a central portion and substantially planar tab regions that project outwardly from the central portion along first and second orthogonal force-detecting axes. The substrate undergoes localized strain approximately at the junctions of the tab regions and the central portion when an external force is applied to the free end of the lever arm. A thick film strain gauge material is screen printed directly onto the substrate in at least a first location and a second location and conductive pads on the substrate are electrically coupled to the thick film strain gauge material at each location to define a first strain gauge oriented along the first force detecting axis and a second strain gauge oriented along the second force detecting axis. The lever arm can be of a compliant construction to provide proprioreceptive feedback to a user.

Abstract: A sensor system for measuring physical properties of paper. The paper property sensor system includes a surface and a diaphragm opposed to each other. The small diaphragm includes a first pair and a second pair p-type piezoresistors. Each piezoresistor of the first pair has a longitudinal axis and is located perpendicular to and very close to one of the long edges of the diaphragm. Each piezoresistor of the second pair has a longitudinal axis and is located between and parallel to first pair of piezoresistors, and away from the short edges of the diaphragm. Coupling the first pair of piezoresistors with the second pair via a Wheatstone bridge produces a voltage representative of the shear force exerted by a sheet.

Abstract: An acceleration sensor (1) includes a parallelepiped case (2). A circuit board (3) is secured in the case (2). A sensor chip (5), on which a diffusion strain gauge (5b) is formed, is mounted on the circuit board (3). A cylindrical acceleration selecting element (13) is provided on the case (2). The axis of the acceleration selecting element (13) extends in the x direction. A cylindrical pressure transmitting element (14) is also provided on the case (2). The pressure transmitting element (14) communicates a hollowed part on the top of the sensor chip (5) with the interior of the acceleration selecting element (13). The hollowed part on the top of the sensor chip (5), the pressure transmitting element (14) and the acceleration selecting element (13) are filled with silicon gel (10).

Abstract: An improved resistor and connection region structure in which the geometries of the connection regions for a pair of radial resistors correspond to the connection region geometries for a pair of tangential resistors, thus inherently eliminating the need for varying connection regions to compensate for offset. In particular, the radial resistors are formed by placing two legs in parallel with each other and connecting those legs in series on opposite sides of the membrane, with the connection region on the interior of the membrane. The tangential resistors, on the other hand, are formed on the opposite sides by placing two legs in series with each other and connecting those legs in series, with an interior connection region connecting them.

Abstract: A user-manipulable sensor apparatus is provided for allowing a user to input, through hand manipulation of a movable member, motion in six degrees of freedom: translational motion in the X, Y, and Z axes, and rotation about each of those three axes. The apparatus includes a central member which acts as a stationary reference, and a user-manipulable member, such as a spherical, hollow member which substantially surrounds the central member. Flexible wire or in-line strain gauges are coupled between the central member and the inside surface of the user-manipulable member, to hold the user-manipulable member in a quiescent position, relative to a position of the central member. Accordingly, there is no need for additional support members for holding the user-manipulable member in position. Manipulation of the user-manipulable member causes tension on various ones of the strain gauges. The strain gauges produce signals, from which the motion of the user-manipulable member may be computed.

Abstract: Disclosed is the method of producing a piezo-device utilizing an ultra-thin Mo-C film as a piezoresistive material for a general class of improved piezo-device with the high sensitivity and the weak temperature dependence.

Abstract: An economical non-metallic strain gage insensitive to ambient temperature variations, and without a diode junction, which is suitable for general use and particularly for use in touch screens, wherein the gage is adapted to be directly adhered to the screen. The gage is metallized with a thin layer of a solderable metal for electrical soldering connection to strain measurement devices and for reliable mechanical support. The gage includes an etched polysilicon material on a substrate base, such as a silicon wafer, wherein the polysilicon is doped with a dopant material such that output measurements are independent of temperature changes.

Abstract: A strain gage includes, in stacked order, a backing film (1), a measuring resistor grid (2), and a cover (16) including a first layer (6) of an insulating material and a second layer (7) of a metallic material. At least the metallic second layer (7) of the cover is a metallic foil having a size or extension in the plane of the cover that is smaller than or equal to the size or extension of the backing film (1). The strain gage is simple to manufacture in a continuous strip or large sheet process, and is relatively insensitive to the effects of moisture or changes in humidity.

Abstract: A horn switch assembly including an airbag module cover, a bend sensor and a backing plate. The module cover has a front outer face and a rear inner face deformably depressible from the front face. A plurality of parallel, spaced-apart, elongated force concentration ribs are located on the rear inner face of the cover. The bend sensor is positioned under the force concentrators and includes a flexible substrate and a variable resistance circuit connectable to a horn control circuit. The variable resistance circuit has a plurality of spaced-apart resistive elements connected by a plurality of conductive strips. The variable resistance circuit is arranged in a plural of parallel spaced-apart columns adhered to the substrate so that the columns are generally perpendicular to the force concentration ribs and each resistive element is positioned under a force concentration rib. The generally rigid backing plate has a forward surface positioned under the bend sensor.

Abstract: A notebook computer or other electronic device has a flexible cable interconnecting electronic circuitry in a base with electronic circuitry in a cover. A flexible potentiometer is coupled to said flexible cable in a location which bends when said cover is opened and closed with respect to the base. The resistance of the flexible potentiometer has a first value when the cover is closed and has a second value when the cover is open. A detection circuit is responsive to the resistance of the flexible potentiometer and generates an output signal which indicates whether the cover is open or closed.

Abstract: A pressure transducer has a cylindrical body with a thread formed on at least part of the outer surface. A resistance element is wound in the thread and an internal bore receives pressurized fluid. The resistance element is strained by application of pressure to vary its resistance.

Abstract: The manipulator embodying the invention comprises a disk mounted rotatably about an axis by a shaft and capable of pivoting about a center of rotation with elastic return motion towards a home position, a detector which determines the angular position of the disk in relation of the axis, strain gauges detecting the orientation of the disk with respect to the center of rotation, a reversing switch for switching from an operating mode in which the data relating to the orientation of the shaft are taken into account, to an operating mode in which the data ralating to the angular position of the disk are taken into account, and a switch for validating one or other of these data. The invention applies notably to the remote control of a cursor on a screen.

Abstract: A pressure-adjusting device for adjusting an output of an integrated pressure sensor in which a silicon wafer is joined onto a seat that has pressure-adjusting passages formed therein, and which has formed in the silicon wafer a signal processing circuit with an adjusting resistor for each chip, a thin diaphragm for each chip and a piezo-resistance layer for each chip. The pressure-adjusting device includes a pressure-setting stage on which the seat is placed, the pressure setting stage having pressure-adjusting passages formed therein to adjust a pressure exerted on the respective thin diaphragm via the pressure-adjusting passages formed in the seat. A holding member is arranged on the pressure-setting stage as to surround at least an outer periphery of the seat. A first elastic air-tight member is arranged on the pressure-setting stage as to surround the outer periphery of the seat and be held compressed by the pressure-setting stage and by the holding member.

Abstract: Strain gage disposed on a flexible support and probe fitted with the gage. A gage with its creep being adapted according to the test body and the application required, without having to change the mask for etching the strain-sensitive thin film. A strain gage fitted to one of the surfaces of a test body capable of deformation under the action of a quantity to be measured. The gage comprises a strain-sensitive thin film (22) etched in the form of a resistance and fitted to a flexible support (20), the film (22) comprising at least two underlying films (24, 26) having different creep values.

Abstract: The semiconductor acceleration sensor comprises a thick weight 100 made of a semiconductor, a thick support member 120 surrounding the weight, and first and second sets of paired thin beams which connect the weight with the support member. The first and second sets consist of paired beams 111 and 113, and a pair of beams 112 and 114, respectively. In each of the beam sets, the two beams are positioned so that, when one of them is rotated by 180 degree about the center of the weight, this beam coincides with the other beam. On the upper faces of the beams, for example, on the upper faces in the side of connecting the beams with the support member, strain gauges 131, 133, 135 and 137 of a first type are formed in the longitudinal direction of the respective beam, and strain gauges 132, 134, 136 and 138 of a second type are formed in the width direction. Thereby it is possible to reduce the level of an interference output, and improve an impact resistance.

Abstract: In an acceleration detector for detecting three-dimensional components of acceleration applied thereto independently with respect to three axes X, Y and Z of an orthogonal coordinate system, a plurality of resistance elements having a piezo resistance effect are formed in a thin-sheet resilient member with an unique arrangement thereof for improving the sensitivity of the detector. Electric resistance of the resistance elements is varied in response to strain of the resistance elements accompanied with an elastic deformation of the resilient member. The resilient member is fixed at its periphery on a frame of the detector. A weight is connected with a center portion of the resilient member such that the elastic deformation is caused when the weight is displaced by receiving acceleration.

Abstract: The present invention is a method of fabrication of a thin film of In.sub.x Ga.sub.1-x As.sub.y Sb.sub.1-y (0<x.ltoreq.1.0, 0.ltoreq.y.ltoreq.1.0) having no lattice disorder, and its use in a sensor layer to obtain a high sensitivity semiconductor sensor having excellent temperature characteristics. The semiconductor sensor has a high resistance first compound semiconductor layer, a layer of In.sub.x Ga.sub.1-x As.sub.y Sb.sub.1-y (0<x.ltoreq.1.0, 0.ltoreq.y.ltoreq.1.0) grown on this first layer, and an electrode formed on this layer. The first compound semiconductor layer has a lattice constant the same as or nearly the same as that of the crystal of the sensor layer, and a band gap energy greater than that of the crystal. A second compound semiconductor layer similar to the first compound semiconductor layer may be formed on top of the sensor layer. A manufacturing method of such a semiconductor sensor is also included.

Abstract: A semiconductor acceleration sensor includes at least two mutually independent electrodes on a surface of an acceleration sensing beam to which a weight is secured, the surface of the weight being electrically conductive and connecting the electrodes together. The electrodes are serially connected with a power supply for a bridge circuit. When the weight is separated from the acceleration sensing beam, disconnection of the electrodes on the beam occurs and the bridge is disconnected from the power supply, producing an abnormal output. Thus, it is possible to positively sense separation of the weight from the beam.

Abstract: An accelerometer device comprises a silicon semiconductor member having a mass mounted on a support by integral beams extending between the mass and support to permit movement of the mass in response to acceleration. Piezoresistive sensors are accommodated in the beams for sensing strain in the beams during movement of the mass to provide an output signal from the device corresponding to the acceleration. The beams each have an end secured to the support and an end secured to the mass and taper intermediate the beam ends to provide a high and substantially uniform strain throughout the tapered section of the beam. The piezoresistive sensor is accommodated in the tapered beam section to be responsive to that high, uniform strain.

Abstract: A foil strain gage or a transducer or load cell with such a strain gage has a backing to which a resistor grid is bonded, made of polyaryletherketone and preferably also a cover of polyaryletherketone.

Abstract: To avoid any deterioration of the surface properties of objects of ceramic, glass, or a single-crystal insulating material which are subjected to a vacuum temperature process, a thin layer of a spin-on glass solution with a silicon-dioxide equivalent of not more than 10% is applied to the objects by spinning or spraying prior to the vacuum temperature process. This is particularly important to avoid the strong moisture dependence of capacitive or resistive pressure sensors having a substrate and a diaphragm to be joined together, forming a chamber sealed at least at the edge.

Abstract: A taut wire perimeter fence intrusion detection system is disclosed. The taut wire deflection sensors in the system each include a flexible housing into which is disposed a full resistance bridge having strain gages for each leg. Opposing strain gages in the bridge circuit have predominant directions in common directions. The strain gages are formed directly onto a printed circuit board. An amplifier circuit is also mounted onto the circuit board, for amplifying the differential bridge voltage from the bridge. The taut wire is connected to the housing, for example by way of a slotted bolt and nut, so that horizontal deflection of the taut wire creates strain on the circuit board which is sensed by the strain gage bridge, amplified by the amplifier, and communicated to a data processing system which generates the appropriate alarm condition.

Abstract: A method of manufacturing individual strain sensors (20) each comprised of a generally rectangular substrate (21) having first and second major surfaces opposite to each other, a strain detecting element (23) formed on the first major surface of the substrate and having at least one pair of strain sensing areas (23a), and a pair of grooves (24) defining respective areas (21a) of low rigidity and formed in the second major surface of the substrate (21) at respective locations adjacent the opposite ends of the substrate (21) while extending across the width of the substrate with the strain sensing areas (23a) of the strain detecting element (23) positioned in register with the respective grooves (24). The strain sensors (20) are prepared from a single plate material (30) of any suitable size having first and second surfaces opposite to each other and eventually forming respective substrates (21) of the individual strain sensors (20).

Abstract: An acceleration sensor assembly is shown, which comprises a base board; a ceramic plate bonded to the base board, the ceramic plate having predetermined circuits printed thereon; an operational amplifier in the shape of Silicon-chip, the amplifier being mounted on the ceramic plate; an acceleration sensor proper mounted on the ceramic plate, the sensor proper being of a piezoresistance semiconductor type; a first group of bonding wires through which the operational amplifier and the circuits are connected; and a second group of bonding wires through which the acceleration sensor proper and the circuits are connected. In order to facilitate the bonding connection of the bonding wires to their associated parts, the bonding wires of the first and second groups are identical in diameter.