Abstract: A housing comprises a first top cylindrical section having an internal hollow which is manifested by three concentric sections, each of a larger diameter to give the sidewall of the housing a step-like cross section. A transducer assembly is positioned within the hollow of the top section and bonded to the inner wall. An annular ring is positioned in the hollow within the second section and accommodates small diameter wires directed from said transducer assembly through the aperture and bonded to metallized land areas on the undersurface of the annular member. The metallized areas also contain a separate conductive post which is directed from the land areas. A second bottom housing accommodates tubular conductive members which are aligned with the post member. When the second housing is emplaced within the first housing the posts are positioned within the tubular conductor members where they are welded to the tubular members to form a permanent assembly.

Abstract: An oil filled pressure transducer has a housing which has a top peripheral flange defining a recess. The housing has a plurality of tapered apertures directed from the top surface within the recess to a bottom surface with the diameter of each aperture being larger at the top surface than at the bottom surface. A separate terminal pin is located in each aperture and is bonded to the header by means of a glass bond which insulates the pin from the header. A metal diaphragm is coupled to the peripheral flange and a pressure sensor is located within the recess. The pressure sensor has terminals connected to the pins located in the tapered aperture. The recess is filled with oil for coupling pressures or forces imparted to the metal diaphragm to the sensor. The tapered apertures allow the unit to withstand high pressures which normally would cause the pins to rupture or dislodge from the housing.

Abstract: A pressure sensor comprises: a pressure sensor chip including a diaphragm, a stationary support supporting said diaphragm, and a bed supporting said stationary support, said diaphragm, said stationary support and said bed being made of a semiconductor material and defining a space which is evacuated; a holding box having at least its bottom made of metal and having a hole for internal wiring, said holding box accommodating and holding said pressure sensor chip such that the opposite side to the diaphragm of said pressure sensor chip is in contact with the inner side of said bottom and that said pressure sensor chip is restricted from movement; and a package placing and adhering said holding box in position.

Abstract: A stress sensitive semiconductor die and housing means therefore comprising a ceramic base member having a recessed portion and a shoulder portion around the periphery. A washer-like support member is positioned within the recess, one face of which is bonded to the base member, said support member having a central aperture. A stress sensitive semiconductor die is bonded to the other face of the support member with the center of the die being in substantial register with the aperture in the support member. Finally, cover means are attached to the shoulder portion.

Abstract: A strain gauge pressure transducer comprising a housing having an internal pressure cavity across which is mounted a flexible elastomeric diaphragm that separates high and low pressure chambers in the gauge that the housing is arranged to separately connect the sources of high and low pressure, respectively. A range spring in the form of a leaf spring is anchored to the housing cantilever fashion in the high pressure chamber and to one side of the diaphragm to dispose the live length of same, as defined by a clamp device, in overlying relation to the diaphragm, to which the leaf spring live length is connected for deflecting movement thereof by the diaphragm.

Abstract: A deformable membrane is made by applying, by thick-film technology, a glass-ceramic paste over a vaporizable or burnable filler material, containing primarily carbon black in a binder which, in turn, is located on a substrate, for example of ceramic, glass, enameled metal or the like. The substrate for example is about 1.5 cm square, the membrane glass ceramic being applied as a circular dot of about 0.5 cm diameter. After solidifying the paste forming the membrane in a protective gas atmosphere, for example at about 950.degree. C., the filler is burned out in an oxidizing atmosphere, to escape through pores in the membrane material. By selecting a membrane material which has a lower thermal coefficient of expansion than that of the substrate, after burning, the membrane will assume a convex shape leaving a hollow space (8) beneath it and the substrate.

Abstract: A submersible pressure transducer package includes a housing having first and second separate chambers with a pressure responsive silicon transducer mounted in one of the chambers, an isolation fluid filling each chamber and sealed therein by means of a diaphragm with the separate bodies of fluid contacting separate portions of the pressure responsive silicon transducer with ports communicating working fluid pressure and ambient pressure to the bodies of fluid for transmittal thereof to the transducer.

Abstract: A contactless pressure switch 10 sensitive to fluid pressure rates of change includes a housing 36 and a diaphragm 42 secured in the housing defining first and second chambers. Ports 48, 50 are included in the first and second chambers to vent the chambers. A magnet 52 is secured to the diaphragm and a switching module 54 is secured to the housing within one of the first or second chambers at a position spaced from the diaphragm. A biasing magnet 53 is mounted with the module to provide symmetrical switching by the module. The other of the first or second chambers is coupled to a sensing tube 28 such that upon a pulse or rate change of pressure being introduced in the other of first and second chambers, the diaphragm is deflected. This moves the magnet 52 toward the module actuating it to switch the module and actuate a desired circuit. In an alternative embodiment, the position of the module may be varied relative to the diaphragm to vary the sensitivity of the switch.

Abstract: An indicator for measuring the liquid content of a container comprises a sensor disposed within the container. The sensor comprises a resistor disposed within a housing and in communication with a movable wall thereof, the movable wall located near the lower end of the housing. The housing resides in proximity with the bottom wall of the container and registers with the external ambient through an opening provided in one wall thereof.

Abstract: Two permanent magnets at an adjustably fixed distance from each other face each other with like poles and are mounted on the moveable portion of a pressure-sensitive membrane, with one magnet near the membrane, and the other one at some distance away, while a Hall-effect sensor of fixed position is located between the magnets. The null point of the output scale and the scope of the transducer characteristic can be set either by adjusting the position of the magnets or by adjusting the amount of their magnetization.

Abstract: In a differential pressure transducer, of the type having a cantilever beam mechanically linked to a pressure-sensitive diaphragm, and piezoelectric strain gauges diffused into or bonded onto the beam, the beam has a relatively high compliance as compared with the diaphragm to facilitate operation in low pressure ranges and to increase the overall operating range of the unit. In addition, the beam is constructed so that the total bending energy is transmitted to the area of the strain gauges so as to achieve near-perfect operating efficiencies.

Abstract: A corrugated membrane cavity has a flexible membrane, the center of which, in response to changes of pressure, varies of spacing between a magnet, for example carried on the membrane, and a Hall generator integrated circuit, in which the Hall generator is mounted coaxially with the polarity axis of the magnet and the flexible membrane. Another magnet on the other side of the Hall-IC faces the first magnet, so that like poles are facing each other, and so that the Hall-IC operates in a region of the induction field that is symmetrical with respect to the plane of zero induction that exists midway between the magnet. This working range makes possible a relatively high and linear variation of output voltge of the Hall-IC in response to variation of the magnetic induction which is particularly useful for pressure sensors for installation in the air intake duct of a motor vehicle engine.

Abstract: An improved pressure transducer and method of making the transducer is disclosed. Generally, the transducer is made from sheet materials and is designed to incorporate the advantages of both the beam-type and diffused diaphragm type transducer while reducing or eliminating many of the disadvantages. The product is designed so that multiple units can be provided from a single multi-sheet composite with a relatively high reproducibility at relatively low cost.

Abstract: A pressure transducer is arranged to mount a semiconductor pressure sensor in a housing such that the pressure of a high-pressure fluid is applied to one side of the semiconductor pressure sensor through a high pressure seal diaphragm and a sealed liquid in the high pressure side, while the pressure of a low-pressure fluid is applied to the other side of the sensor through a low-pressure seal diaphragm and a sealed liquid in the low pressure side, and a protecting member is provided closer to the low-pressure seal diaphragm.

Abstract: A semiconductor pressure sensor employing the piezoresistive effect of single crystal silicon resistors to measure the flexure of a semiconductor diaphragm. In the preferred embodiment, a Wheatstone bridge composed of a first pair of resistors disposed on the center of the diaphragm and a second pair of resistors disposed on the periphery of the diaphragm is employed. Due to the nature of the diaphragm flexure, the first and second pairs of resistors exhibit piezoresistivity in opposite directions enabling pressure measurement with greater sensitivity. The diaphragm is mounted on and supported by a silicon clamp ring. The diaphragm and the clamp ring together form a unitary semiconductor structure.

Abstract: A sensor block is disposed within a package and includes a semiconductor diaphragm and a circumferential support bonded to the inside of the package. The semiconductor diaphragm is provided with at least one diffused resistor layer formed thereon as a pressure-sensitive element, one surface of the diaphragm being subjected to a reference pressure whereas the other surface is subjected to a fluid pressure to be measured. A diaphragm breakage detecting element including an electrical conductor filament is provided zigzagging back and forth laterally across the boundary between the diaphragm and the circumferential support, the point subject to maximum stress, the conductor filament material being of substantially the same mechanical strength as the diaphragm material, so that, when the diaphragm is broken, the conductor filament is also broken, thus allowing immediate indication of the diaphragm breakage.

Abstract: A pressure sensor having a silicon diaphragm whose opposite surfaces are subjected to fluid pressures for measurement. The diaphragm includes a diffused resistor as a pressure-sensitive element on a silicon base, a protective layer composed of a silicon epitaxial layer opposite in conductive type to the resistor and formed on the diffused resistor in order to prevent the resistor from being exposed to a corresponding fluid pressure, and an electrically insulating layer formed on an outer surface of the protective layer.

Abstract: A pressure sensor of the type having a semiconductor diaphragm such as a silicon diaphragm which is formed with at least one diffused resistor in a surface region on one side thereof. A silicon block having the diaphragm is bonded to the inside of a box-like package such that the diffused resistor is exposed in a vacuum chamber defined in the package and that a fluid pressure can arrive at the back side of the diaphragm through a hole of the package. To minimize unwanted straining of the silicon diaphragm by thermal influences, the package is made of a material such as mullite whose linear expansion coefficient is close to that of silicon. To prevent an accidental change in the output characteristic of the sensor by the influence of an unintended external force, the package is supported above a base plate by pillar-like lead frames and confined in a space provided by fixing a cap to the base plate. A pressure introduction pipe is attached to either the base plate or the cap.

Abstract: A signal transducing unit which is compact and can be calibrated from outside its housing to provide zero and span adjustments after assembly with the components secured within its housing. The device has a pair of first and second elements movable with respect to each other and each having first and second ends and a conductive path, and the conductive paths of the elements electrically contact each other at a location which is displaced along their paths with the relative movement of the elements. Positioning means retains the elements for relative movement, while actuating means displaceable for moving and positioning the first element with respect to the first element controls the contact location of the elements.

Abstract: A pressure transducer comprising a silicon diaphragm on which a semiconductor strain gauge is formed and which has a diaphragm portion deformable in response to a pressure, an insulating support which is made of borosilicate glass having the silicon diaphragm rigidly mounted thereon and which is provided with a pressure introducing hole in its central part, a metallic support which is cylindrical, which is made of an iron-nickel alloy similar in the thermal expansion coefficient to the borosilicate glass and on which the glass insulating support is rigidly mounted, and a metallic housing within which the integrated structure consisting of the silicon diaphragm, the glass insulating support and the metallic support is arranged; the silicon diaphragm, the insulating support and the metallic support being joined by the anodic bonding, the metallic support being rigidly welded to the metallic housing at its lower end part.

Abstract: A semiconductor pressure detection device is provided which is adapted to detect pressure using resistors formed in the surface area of a semiconductor substrate and having a piezo-effect. A diode is formed in the surface area of the semiconductor substrate and a drive voltage corresponding to a temperature variation is supplied to a bridge circuit through the diode.

Abstract: Sensing and electrical-signal characterization of fluid pressures is effected by a miniature precision transducer manufacturable at low cost from a combination of a pair of sub-assemblies, one of which consists of a single-piece metal transducer element having a flanged body with a blind-hole port leading from a mechanical pressure fitting to the inner side of a transverse thin diaphragm which forms the blunt flat end of the body except for a bonded covering of both the machined outer side of the diaphragm and its coplanar annular rigid rim by a foil-type rosette strain gage bridge array and its layer of supporting insulation.

Abstract: A semiconductor absolute pressure transducer assembly has a silicon diaphragm assembly and a covering member. The silicon diaphragm assembly has a circular pressure sensitive diaphragm, on the surface of which are diffused piezoresistors and conducting paths. The covering member composed of borosilicate glass has a circular well formed therein. On the surface of the silicon diaphragm assembly on which the piezoresistors and the conducting paths are diffused, a passivating layer of silicon dioxide is deposited. Further on the passivating layer, a conductive layer is formed by, for example, evaporating silicon. And the glass covering member is bonded on the silicon diaphragm assembly by anodic bonding. Namely, the silicon diaphragm assembly and the glass covering member are heated up to a certain high temperature and a relative high voltage applied across the conductive layer of the silicon diaphragm assembly and the glass covering members.

Abstract: A pair of semiconductor diaphragm blocks, each having a diaphragm on a front surface of which a diffused resistor is formed as a pressure-sensitive element, and a circumferential support integral therewith, are confined within a sealed hollow package and bonded at their circumferential supports to opposite inside surfaces of the package such that the front surfaces of the diaphragms are positioned within a vacuum space within the package. This package is provided with through holes through which fluid pressures subject to measurement are introduced so as to arrive at the back surfaces of the diaphragms.

Abstract: A diaphragm assembly includes a silicon diaphragm block which has a diaphragm at an eccentric position thereof, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the diaphragm. The diaphragm assembly is accommodated sealingly within and bonded to the inside of a hollow package at an end portion of the assembly remote from the diaphragm in the direction of extension of the bonded surfaces of the block and the support plate. The front surface of the diaphragm and the diffused resistor thereon are exposed to a vacuum while a fluid pressure subject to measurement is introduced through a passage extending through the package and the end portion of the assembly bonded to the package so as to arrive at a back surface of the diaphragm.

Abstract: A pressure transducer has at least one pressure transmitting space filled with liquid, a space for a pressure to be sensed connected to the pressure transmitting space through a diaphragm, and a pressure sensitive element in the pressure transmitting space for transducing a pressure transmitted from the space for the pressure to be sensed to the pressure transmitting space through the diaphragm to an electrical signal. A printed circuit board wired to electrically connect terminals of the pressure sensitive element is arranged closely to the element and thin temperature sensitive elements for temperature-compensating the pressure sensitive element are arranged on the printed circuit board.

Abstract: A Hall-effect sensor unit producing an electrical output is located between two permanent magnets of opposed polarity. The magnetic induction detected by the sensor unit is caused to vary with the pressure by variation of the spacing between the sensor unit and one or both magnets, or by variable introduction of a magnetically soft member between the sensor unit and one of the magnets, the motion being produced in each case by a membrane or a variable volume chamber which produces displacement in proportion to gas pressure to be sensed. The force converter is particularly designed to provide a highly linear pressure measurement signal for the air intake condition of an internal combustion engine.

Abstract: A displacement transducer comprises a rigid support, a flexible diaphragm having a periphery attached to the support, and an interior free to deflect, and a strain sensor on the diaphragm. The diaphragm has a circular periphery and a plurality of concentric annular corrugations coaxial with the periphery. A first pair of strain gauges sense the tangential strain on one of the crests of the corrugations and a second pair of strain gauges sense the tangential strain in one of the troughs of the corrugations. The strain gauges are connected in an electrical bridge to provide a displacement representative output.

Abstract: An indicator for measuring the liquid content of a container comprises an attitude compensating sensor including at least two variable resistor assemblies disposed within the container. The resistor assemblies are located at opposite ends of the container and are electrically connected to each other in series. Each resistor assembly comprises a resistor disposed within a housing and in communication with a movable wall of said housing located near its lower end. The housing resides in proximity to the bottom wall of the container and registers with the external ambient through an opening provided in one wall thereof. The total resistance developed by the sensor comprises the sum of the resistances of the individual resistors, and remains constant for a particular quantity of liquid regardless of the distribution of the liquid within the container.

Abstract: A signal transducing apparatus comprising first and second elements movable with respect to each other and each having first and second ends and a conductive path, the conductive paths of the elements electrically contacting each other at a location which is displaced along their paths with the relative movement of the elements. A spring unit movably retains the second element having a first end fixed with respect to the first element and a second end secured with the second end of the second element, the spring unit urging the second end of the second element in a predetermined direction with respect to the first element and urging the first end of the second element in the direction toward the first element.

Abstract: There is disclosed an electromechanical transducer of the type employing a semiconductor diaphragm. The diaphragm is associated with an active area upon which is mounted at least one force responsive element. Surrounding the active area of the diaphragm is an annular ridge which is located on a surface opposite that containing the element. A cylindrical housing having a central aperture is secured to the diaphragm on the same surface as the element and with its aperture coaxially aligned with the active diaphragm area. The aperture in the housing being larger than the aperture of the annular ridge and underlies the same to provide an exposed area about the periphery of the element's active area. This area is used for the deposition or location of terminals which are coupled to the element. The area is insensitive to applied force due to relative size of the ridge and housing and thus conducting leads attached to the terminals do not interfere with the specifications associated with the transducer.

Abstract: A signal transducing device comprising a first element having a contact surface with a conductive path, a second element having an arcuate contact surface with an arcuate non circular conductive path and being movable with respect to and engaging by rocking action the contact surface of the first element, the conductive paths of the elements electrically contacting each other at a location which is displaceable along their paths with the movement of the second element. Positioning means retains the elements for relative movement and actuating means moves and positions the second element with respect to the first element and controls the contact location of the elements, while connecting means electrically joins with the conductive paths of the first and second elements for providing an output signal determined by the position of one element with respect to the other.

Abstract: In a differential pressure to electric current transducer, a short sapphire slab carries a strain sensitive resistive pattern. The sapphire slab is an element of a much larger beam as the beam moves to change the stress of the other surfaces of the sapphire slab and varies the resistance of the silicon resistive pattern to produce an electric current signal indicative of the differential pressure.

Abstract: An air flow transducer wherein the displacement of a diaphragm by a pressure differential at the opposite sides thereof is measured in terms of unit electrical resistance. The pressure differential is provided by supplying the air to the transducer through ports, one of which is in communication with one side of the diaphragm and the other of which is in communication with the opposite side of the diaphragm, and by providing a linear flow restrictor in the latter port which resists air flow in direct proportion to any increase in the air flow to thus produce a pressure drop from one side of the diaphragm to the other which is directly proportional to the increase in flow.

Abstract: A semiconductor pressure transducer comprising a disc-shaped pressure-responsive diaphragm; a pair of radial strain gauge units having a piezoresistance effect, formed by injecting an impurity in the radial direction in the surface of the diaphragm; and a pair of tangential strain gauge units having a piezoresistance effect, formed by injecting an impurity in the tangential direction in the surface of the diaphragm, wherein the distance from the pair of the radial strain gauge units to the center of the circular diaphragm is greater than the distance from the pair of the tangential strain gauge units to the center of the circular diaphragm.

Abstract: A liquid filled differential pressure transmitter includes a metallic measurement diaphragm within a pressure chamber and a pair of isolation diaphragms sealing the chamber from the process fluid which serve to transmit the applied pressure signals to the measurement diaphragm. The isolation diaphragms bottom against mating back-up surfaces to limit deflection of the diaphragm during overrange pressure conditions. An electrically conductive liquid fills the chamber so that measurable electrical resistances are established through the liquid between the measurement diaphragm and a pair of electrodes adjacent thereto formed on opposite walls of the chamber. As the measurement diaphragm deflects in response to applied pressure signals, the electrical resistance between the diaphragm and each of the electrodes changes providing an output signal which is a function of the applied differential pressure.

Abstract: A differential pressure sensor comprises a pressure-to-displacement transducer resiliently coupled to a cantilever beam strain gauge arrangement. The pressure-to-displacement transducer is provided with overrange protection permitting substantial displacement in the range of measurable pressure differentials and the more fragile cantilever beam is provided with separate overrange protection more narrowly constraining its displacement. The resilient coupling between the transducer and the beam absorbs the displacement differential. As a consequence of this structure, the device can provide high sensitivity readings in the measurable range of pressure differentials and is protected against pressure differentials greatly in excess of the measurable range.

Abstract: A semiconductor pressure converter includes a silicon pressure sensing element, a silicon base hermetically attached to the sensing element to bear the element and a metal pipe connected to the silicon base so as to introduce a pressure to the sensing element through the silicon base.

Abstract: A differential pressure transducer utilizing fluid-filled chambers as pressure transfer linkage to an isolated, fluid-filled aneroid sensing system. Isolation diaphragms are spread by means of internal fluid pressure fill of transfer chambers, thus providing elevated line pressure mode and pressure-biased operation. Construction offers media isolation from sensitive interior elements of the transducer. Material to come into physical contact with a pressure medium may thus be chosen for specific application. Dual, nested aneroid sensors cooperated to produce a linear displacement in response to an applied pressure differential. A cantilever beam assembly responds to the linear displacement so caused by flexing in a degree proportional to the applied pressure differential. The fluid-filled sensing system may comprise nested, aneroid capsule diaphragms, carrying a sufficient amount of incompressible fluid to support the capsule diaphragm for high line pressure use.

Abstract: Subterranean earth formations containing energy values are subjected to hydraulic fracturing procedures to enhance the recovery of the energy values. These fractures are induced in the earth formation by pumping liquid into the wellbore penetrating the earth formation until the pressure of the liquid is sufficient to fracture the earth formation adjacent to the wellbore. The present invention is directed to a transducer which is positionable within the wellbore to generate a signal indicative of the fracture initiation useful for providing a timing signal to equipment for seismic mapping of the fracture as it occurs and for providing a measurement of the pressure at which the fracture is initiated.

Abstract: Solid state dual leaf spring transducers are fabricated by batch photolithographic etching techniques from a monocystalline nonmetallic material, such as silicon. Each leaf spring structure includes a leaf spring portion surrounded by a support structure defined by an intervening region of the wafer disposed between adjacent leaf spring structures etched into the wafer. A pair of such leaf spring structures with their respective surrounding support structures are joined together in mutually opposed relation to form a composite dual leaf spring transducer structure of the type wherein a pair of leaf spring structures are mechanically coupled together in axially spaced relation along an axis of sensitivity for equal displacement along said axis of sensitivity in response to displacement of either one of the spring structures relative to the support structure.

Abstract: The pressure transducer includes a semiconductor cantilever beam, a diaphragm, a spacer, and a back plate. The diaphragm, spacer, and back plate are bonded together at their peripheries to form a cup. The ends of the beam are bonded, respectively, to the supported periphery of the diaphragm and to an intermediate deflecting portion thereof, whereby pressure forces within the cup are transmitted by the diaphragm to the beam. Piezoresistive elements are diffused into the surface of the beam to produce an electric signal in accordance with the strain produced in the beam as the result of the pressure forces. In one embodiment, the beam is a flat plate. In another embodiment, the beam includes a portion at the mounting end that is massive relative to the stress sensitive portion of the beam. The juncture of the massive mounting portion and the stress sensitive portion is an abrupt step, whereby a precise fulcrum for the stress sensitive beam portion is provided.

Abstract: A differential pressure transducer assembly which indicates pressure differences while remaining insensitive to variations in line pressure and overload pressure. The assembly has a transducer consisting of a semi-conductor sensor isolated from the medium being measured by mounting it on a resilient diaphragm between two small hydraulic chambers. The chambers are closed with a pair of diaphragms which isolate the two chambers from the external environment. The transducer sensor is comprised of a silicon chip having a large center boss area which is supported by a silicon back plate of similar material fused to the silicon chip at the periphery. The back plate is mounted by a hollow support stud to a threaded hub at the center of the resilient diaphragm separating the chambers. A space between the silicon chip and back plate communicates with the hydraulic fluid of one chamber through an inlet in the support stud. The opposite side of the silicon chip is immersed in the hydraulic fluid of the other chamber.

Abstract: A semiconductor transducer chip is flip-chip bonded to a semiconductor interface chip, which is mounted on the ceramic package. Thermal coupling between the package and the transducer chip is minimized by the small contact area between the transducer chip and interface chip. Micron size spacing between the spring membrane in the transducer chip and the interface chip produces squeeze film damping of the spring membrane.

Abstract: The limited temperature range for operation of conventional semiconductive force transducers is greatly extended in both directions, typically attaining a range from about 4.degree. Kelvin to at least about 400.degree. C. A piezoresistive strain gage is typically formed in a monocrystalline layer of semiconductive material grown epitaxially to a thickness of only a few microns on a monocrystalline support member which has high inherent resistivity and serves directly as force responsive member. For example, silicon is grown epitaxially on one face of a sapphire pressure responsive diaphragm with suitably oriented crystal axes. The diaphragm is typically mounted in hermetically sealed relation on an alumina support with an interlayer of fused glass having selected properties. Transition from the alumina support to a conventional housing is preferably made via a metal such as Kovar in described configuration.

Abstract: A transducer responsive to pressure or force, comprises a diaphragm secured around its periphery to the housing of the transducer and having a cup-shaped portion formed concentrically therein. Means are provided for applying, in use, a pressure or force to one surface of the diaphagm and means responsive to the resulting deflection of said diaphragm for providing an indication of the applied pressure or force. Strain gauges are mounted on an annular portion of the diaphragm which extends between the cup-shaped portion and the periphery of the diaphragm. An overload protection device may be provided to limit deflection of the diaphragm.

Abstract: The invention is concerned with a pressure diaphragm that is composed of a nonmetallic material that has been sculptured by etching a plate to form thick motes, or islands, and a thick rim interconnected by thin sheet material. The thick portions are separated by thin flexures in which the deflection of the diaphragm is concentrated, whereby the deflection yields a high value of electric output per unit pressure.

Abstract: A variable resistance pressure transducer having high resolution, a wide resistance range and usable in conjunction with a limited linear actuation movement is provided. The transducer basically comprises a helical resistance element and a circular ring shaped contact arm which are mounted around a central axis and are slideably movable with respect to each other in directions parallel to the central axis. The ring contact essentially forms the wiper arm of a potentiometer assembly and the ring is dimensioned and positioned so that varying portions of its inner circumferential surface will contact the resistive element during relative linear axial movement between the ring and resistive element. This results in moving the effective point of contact between the ring and resistive element continously along the surface of the helical resistive element in response to the relative axial movement.

Abstract: A pressure transducer of miniature design with a silicon diaphragm which is provided with a monolithic resistor arrangement, the resistance of which changes with the deformation of the diaphragm in which the diaphragm is arranged between two overload bodies, one of which rests on a support body, whose surfaces facing the diaphragm are each provided with a pressure chamber and pressure canals to obtain an overload-proof pressure transducer which is very small and can be used for measuring large pressure differences.

Abstract: .Badd.A pressure responsive device comprising a bridge pattern film bonded to the surface of an electrically non-conductive diaphragm. The bridge including active segment means near the center of the diaphragm in the region thereof where the distance radius ratio is less than about 0.6 and active segment means in the region of the diaphragm where the distance/radius ratio is at least about 0.7..Baddend.