Gas Or Vapor Pressure Is Subatmospheric Patents (Class 34/406)
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Publication number: 20020038520Abstract: A method for drying a polyacrylamide gel, the method comprising contacting the gel with an aqueous solution of a polyhydoxy alcohol other than a polyhydroxy alcohol having at least 3 vicinal hydroxy groups and drying the gel. Examples of suitable polyhydroxy alcohols include 1,2-ethane diol, 1,2-propane diol, 1,3-propane diol, 1,4-butane diol, 1,6 hexane diol, alkyl triol, 1,2,6-trihydroxy hexane, trimethylol propane and pentaerythritol. The gel may be dried between two cellophane sheets positioned in a drying frame arrangement.Type: ApplicationFiled: September 19, 2001Publication date: April 4, 2002Inventor: Grace Y. Chan
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Publication number: 20020032972Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 14, 2001Publication date: March 21, 2002Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Ito
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Patent number: 6339887Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: January 24, 2001Date of Patent: January 22, 2002Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6330756Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dirty-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: July 12, 2000Date of Patent: December 18, 2001Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6330755Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: December 16, 1999Date of Patent: December 18, 2001Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010049884Abstract: A heat treatment process for fiber feedstock, such as cotton in the baled form, comprises repeatedly subjecting the bale to a reduced pressure atmosphere followed by the introduction of steam which permeates the bale. The interior of the bale may ultimately reach a temperature of about 80° C., which conditions and sanitizes the cotton fibers. Reduced pressure in the range of 20-200 mbar and steam treatment time in the order of 5 minutes can be employed.Type: ApplicationFiled: April 27, 2001Publication date: December 13, 2001Inventor: Freddy Wanger
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Patent number: 6314658Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: November 29, 2000Date of Patent: November 13, 2001Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010037585Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: January 24, 2001Publication date: November 8, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6301802Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: January 22, 2001Date of Patent: October 16, 2001Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6301801Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: April 19, 2000Date of Patent: October 16, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010025431Abstract: A controller controls the temperature of a hot plate and the degree of vacuum in a tightly closed space to a temperature and a pressure at levels at which a thinner contained in a resist applied to a wafer volatilizes and an acid generator, a quencher, and a polymer chain protecting group practically remain in the resist, for example, during heat processing. More specifically, the controller controls the temperature of the hot plate and the degree of vacuum in the tightly closed space to bring the temperature of the hot plate to about 40° C., and the degree of vacuum in the tightly closed space to approximately 5 Torr. Thereby, the heat processing can be performed for the wafer so that the acid generator is uniformly dispersed in the resist, or the quencher is uniformly formed on the front face of the resist without breakage of the polymer chain protecting group.Type: ApplicationFiled: March 29, 2001Publication date: October 4, 2001Applicant: TOKYO ELECTRON LIMITEDInventors: Takahiro Kitano, Yuji Matsuyama, Junichi Kitano
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Publication number: 20010020340Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 14, 2001Publication date: September 13, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010020339Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 12, 2001Publication date: September 13, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010016990Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed, Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 14, 2001Publication date: August 30, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010015019Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.Type: ApplicationFiled: February 23, 2001Publication date: August 23, 2001Inventors: Shunji Miyakawa, Yasuhide Nakajima, Soichi Matsuo
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Publication number: 20010010126Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma.Type: ApplicationFiled: February 14, 2001Publication date: August 2, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010009074Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 13, 2001Publication date: July 26, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010009075Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 13, 2001Publication date: July 26, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010009073Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: January 23, 2001Publication date: July 26, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010009076Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 14, 2001Publication date: July 26, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010008051Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 13, 2001Publication date: July 19, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010008052Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 13, 2001Publication date: July 19, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010008049Abstract: The present invention provides a method of producing powder of e.g. a polycarboxylic acid-based copolymer efficiently at a high yield. The method of the present invention comprises forming a sticky thin-film of the polycarboxylic acid-based copolymer or the like on a support, reducing a stickiness of the said thin-film and powdering the said thin-film.Type: ApplicationFiled: January 12, 2001Publication date: July 19, 2001Inventors: Hiroshi Noro, Shigeaki Fujinami, Eiichiro Misaki
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Publication number: 20010008050Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 13, 2001Publication date: July 19, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010004807Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 12, 2001Publication date: June 28, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010003873Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: February 13, 2001Publication date: June 21, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010002517Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: January 23, 2001Publication date: June 7, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010001902Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: January 24, 2001Publication date: May 31, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20010001901Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate a storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: January 23, 2001Publication date: May 31, 2001Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6192601Abstract: The present invention provides method and apparatus for reducing particulate contamination during the processing of a substrate. In one embodiment, the step of preheating a substrate in a preheater to a desired temperature. The preheated substrate is transferred from the preheater to a buffer region having a pressure therein that is between about two (2) Torr and about seven hundred and sixty (760) Torr. The preheated substrate is transferred from the buffer region to a reaction chamber. Thermophoretic forces help repel particles away from the substrate surface during substrate transfer.Type: GrantFiled: May 30, 2000Date of Patent: February 27, 2001Assignee: Applied Materials, Inc.Inventors: Steve G. Ghanayem, Madhavi Chandrachood
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Patent number: 6170171Abstract: A method and apparatus for drying semiconductor fragment material, has at least one vacuum-tight chamber with at least one receiving means for semiconductor fragment material, and there is a means for maintaining a vacuum in the apparatus.Type: GrantFiled: December 8, 1998Date of Patent: January 9, 2001Assignee: Wacker-Chemie GmbHInventors: Wilhelm Schmidbauer, Hanns Wochner, Werner Ott
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Patent number: 6151796Abstract: A substrate drying device includes a reduced pressure enclosure including an airproof door, and an exhaustion device. Inside of the enclosure is caused to be a sealed state when the airproof door is closed. After a substrate to which an application material is applied is received into the reduced pressure enclosure, the airproof door is closed to make inside of the reduced pressure enclosure be an airproof state. Subsequently, inside of the reduced pressure enclosure is exhausted by the exhaustion device to perform for eliminating air bubbles in the application material and drying the application material on the substrates. The exhaustion device may include a reserve tank that has a volume capable of rapidly reducing a pressure of the internal volume of the reduced pressure enclosure to maintain a predetermined negative pressure. A rapid exhaustion of the inside of the reduced pressure enclosure is performed by connecting the reserve tank to the reduced pressure enclosure.Type: GrantFiled: December 21, 1998Date of Patent: November 28, 2000Assignee: KEM-TEC Japan Co., Ltd.Inventors: Hamataro Karamatsu, Masanao Hori, Seiji Katayama
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Patent number: 6112431Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: September 3, 1999Date of Patent: September 5, 2000Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6070341Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: September 7, 1999Date of Patent: June 6, 2000Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6044576Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: September 7, 1999Date of Patent: April 4, 2000Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6012235Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: October 23, 1998Date of Patent: January 11, 2000Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 5950330Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: April 16, 1998Date of Patent: September 14, 1999Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 5939071Abstract: The present invention relates to a process for preparing dry plant extracts and pharmaceutical preparations containing such extracts having a high content of active plant ingredients such as essential oils and phenols wherein a fluid extract or a tincture of drugs is typically fed into the drying system Inox Maurer or Inox Glatt.RTM., e.g. IUT 20, IUT 50, IUT 100 or IUT 2000, and dried at a starting and return temperature between 120 and 5.degree. C., a preferred interior temperature between 10 and 80.degree. C., especially preferably between 25 and 70.degree. C., and a pressure between 0.5 and 1000 mbar, preferably between 5 and 100 mbar and especially preferably between 30 and 70 mbar, said drying being effected while the stirrer runs between 0 and 10 rpm, preferably between 2 and 5 rpm, and at a rotational speed of the chopper between 200 and 800 rpm.Type: GrantFiled: August 21, 1997Date of Patent: August 17, 1999Inventor: Heinz Walter Joseph
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Patent number: 5857840Abstract: The objects of the present invention are to remove the dust in a closed container, to keep the pressure in the closed container within a predetermined range, and to shorten the maintenance time of a vacuum pump system.The present invention provides a centrifugal dust collector 2 on main pipes which connects a furnace body 1, a mechanical press 9 and a dry pump 10, and a metal mesh dust collector 15 on a bifurcated pipe in a single-crystal semiconductor pulling apparatus. When the vacuum pump process begins, the metal mesh dust collector 15 collects amorphous silicon generated in the furnace 1. As the pressure in the furnace is reduced, the centrifugal dust collector 2 collects the dust particles instead. Since the gas flow rate increases as the vacuum state become higher, the critical diameter of collectable particles decreases, thereby improving the dust collection efficiency.Type: GrantFiled: September 4, 1996Date of Patent: January 12, 1999Assignee: Komatsu Electronic Metals Co., Ltd.Inventors: Ayumi Suda, Yoshinobu Hiraishi
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Patent number: 5661913Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: January 30, 1996Date of Patent: September 2, 1997Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 5647143Abstract: Herein disclosed are a vacuum-degreasing cleaning method for degreasing a work by cleaning it with a solvent vapor under reduced pressure, and a vacuum-cleaning machine for practicing the method. This method comprises the vapor-cleaning step of cleaning the work under reduced pressure with a vapor of a petroleum solvent, and the drying step of drying the surface of the work under reduced pressure. This cleaning method can clean the work while preventing the deterioration of the working atmosphere and the air pollution and can reduce the initial cost and the running cost for the work cleaning operation. Moreover, the cleaning efficiency can be safely enhanced with neither any thermal influence upon nor any rust upon the work.Type: GrantFiled: January 5, 1996Date of Patent: July 15, 1997Assignee: Japan Hayes Ltd.Inventors: Ken Kubota, Kunihiko Ishikawa, Noboru Hiramoto
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Patent number: 5598643Abstract: Disclosed is a method for reducing the moisture content of a paper web in a papermaking process from in the range of 10% to 32% dry to the range of 33% to 50% dry wherein the embryonic web is supported on a knuckled through drier fabric and lightly pressed between the knuckled through drier fabric and a capillary membrane of a capillary dewatering roll. The capillary membrane has capillary pores therethrough which have a substantially straight through, non-tortuous path with a pore aspect ratio of from about 2 to about 20. A vacuum is drawn within the capillary dewatering roll which is not greater than the negative capillary suction pressure of the capillary pores.Type: GrantFiled: November 23, 1994Date of Patent: February 4, 1997Assignee: Kimberly-Clark Tissue CompanyInventors: Strong C. Chuang, Kenneth Kaufman, Robert H. Schiesser
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Patent number: 5561914Abstract: A mobile Sand Dryer is disclosed. This dryer is substantially made up of two portions. The first portion of the Sand Dryer is a wet sand tank. This tank is essentially divided into two distinct portions; an upper wet sand holding chamber and a lower sand drying chamber. The two chambers are divided by a grate. The upper wet sand holding chamber is supplied with a removable lid as well as a fan which may be used to create a vacuum in the chamber. The lower sand drying chamber is supplied with a propane burner and a hopper bottom. During use wet sand is placed in the upper wet sand drying chamber via the removable lid. The wet sand collects on the steel grate as it is placed into the chamber. Upon ignition of the burner and the fan the vacuum crated by the fan tends to draw the heat and moisture from the sand up and out the top of the chamber. As the sand on the grate is dried it falls through the grate before finally be moved via a vacuum tube to the second chamber.Type: GrantFiled: March 22, 1996Date of Patent: October 8, 1996Inventor: Charles L. Asplin
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Patent number: 5553396Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: May 17, 1995Date of Patent: September 10, 1996Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 5548905Abstract: A high speed negative pressure air stream from a sucking-out nozzle or a combination of a high speed negative pressure air stream from the sucking-out nozzle and a high speed air jet stream from a blowing nozzle are used for drying an article. Flanges can be installed at a tip end of the sucking-out nozzle and the blowing nozzle. The air jet stream can be injected obliquely to the surface of the article to be dried. Water adhered to an article to be dried, for example, a wet mat, is rapidly divided into minute water drops which are extracted. Vermin, lice and other contaminants are also removed. The article to be dried is rapidly dehydrated and dried in a low temperature. The sucking-out nozzle provided with a flange in a sucking-out pipe is placed so that it can slide on the surface of the article to be dried. A water drop separating vessel is installed between the sucking-out pipe and the inlet of a blower. A dehumidifier is installed between the outlet of the blower and the blowing pipe.Type: GrantFiled: April 28, 1995Date of Patent: August 27, 1996Assignee: Kabushiki Kaisha Seibu GikenInventors: Toshimi Kuma, Shinji Kakuya
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Patent number: 5457896Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: September 9, 1994Date of Patent: October 17, 1995Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 5352250Abstract: The invention relates to a process for treating (recycling) lacquer coagulum containing lacquer overspray and layered silicate containing coagulating agents, in which the layered silicate containing paint coagulum is vacuum dried, processed at low temperatures and then ground, and to the use of the processed paint coagulum as a basic component, additive, or filler in lacquers and paints, building materials, sealing materials, car underseal compositions or adhesives.Type: GrantFiled: April 30, 1993Date of Patent: October 4, 1994Assignee: Henkel Kommanditgesellschaft auf AktienInventors: Juergen Geke, Lutz Huesemann, Hans-Joergen Rehm
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Patent number: 5349762Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: July 26, 1993Date of Patent: September 27, 1994Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 5314509Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus.Type: GrantFiled: August 29, 1991Date of Patent: May 24, 1994Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou