Abstract: A machine for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.

Abstract: A method for drying wafers after a wet bench process is disclosed. In the method, a wafer is first immersed in a volume of DI water held in a container. A mixture of alcohol vapor/inert gas is then flown into the upper portion of the container that is not filled with the volume of DI water at a flow rate of less than 20 l/min. The wafer is then withdrawn from the DI water into the upper portion of the container filled with the alcohol vapor/inert gas mixture and thereby driving DI water molecules off the surface of the wafer without leaving organic residue on the wafer surface.

Abstract: A substrate dryer causing no water mark on a substrate having a refined·complicated structure and capable of suppressing increase of a cost required for a drying treatment is provided. Drying gas of low-molecular silicone generated in a drying gas generation part is heated by a heater and thereafter supplied from a drying gas supply nozzle. The drying gas is supplied to the main surface of a substrate being pulled up from de-ionized water stored in a cleaning bath as a stream. Silicone contained in the drying gas is condensed on the surface of the substrate, substitutes for moisture, and thereafter vaporizes. Silicone is excellent in permeability·dryability, and hence can suppress formation of a water mark also on a substrate having a refined·complicated structure. Further, silicone applies no load to the environment, and hence increase of a cost required for the drying treatment can be suppressed without requiring specific treatment for disposal.

Abstract: A semiconductor wafer (W) is mounted on top of a mounting stand (3) within a vacuum vessel of a vacuum processing apparatus such as a vacuum film-formation apparatus or an etching apparatus for semiconductor wafers. A heat-transfer gas such as helium is supplied to a gap between the wafer and the mounting stand, and film-formation or etching is performed while the wafer is held at a predetermined temperature. To ensure a simple and reliable detection of any leakage of the helium from between the wafer and the mounting stand during this process because of an abnormal state, the surface of a dielectric material such as aluminum nitride that configures the mounting stand (3) is given a mirror finish and the wafer (W) is attracted to the surface of the mounting stand (3) by an attractive force of at least 1 kg/cm2, whereby the helium from the gas supply path (5) is sealed in on the rear surface side of the wafer (W).

Abstract: An apparatus for drying the air inside of hermetically sealed electronic devices. The apparatus includes a desiccant part and an activation piece that is attached to the desiccant part. The desiccant part and activation piece are attached together and then covered, except for the portions where the two pieces are attached, with a polymer that has a low moisture vapor transmission rate, such as parylene. The apparatus may be added into an electronic device during assembly. The desiccant, or drying agent, is not activated, by removal of the activation piece, until prior to closure of the hermetically sealed electronic device.

Abstract: This invention discloses a dual fiber optical component that includes a first holding tube for containing and holding a dual fiber capillary and a collimator lens. The dual fiber capillary has first optical fiber and a second optical fiber with the first optical fiber transmits an input light beam for projecting through the collimator lens as a collimated beam. The dual fiber component further includes a second holding tube containing and holding an optical filter for receiving the collimated beam from the collimator lens. The filter further projecting a portion of the collimated beam back through the collimator lens for transmitting to the second optical fiber of the dual fiber capillary. The first holding tube has a first interface tube end forming with a convex spherical profile and the second holding tube has a second interface tube end forming with a concave spherical profile corresponding to the convex spherical profile of the first interface tube end.

Abstract: A method of and an apparatus for drying a wafer using the Marangoni effect quickly forms an isopropyl alcohol layer on a cleaning liquid in which the wafer is submerged. The isopropyl alcohol is first heated and then supplied in a fluid state onto the cleaning liquid. The isopropyl alcohol liquid thus diffuses rapidly to form the isopropyl alcohol layer. The wafer is thoroughly dried by removing it from the cleaning liquid through the isopropyl alcohol while only supplying more of the heated nitrogen gas into the ambient above the cleaning liquid.

Abstract: An evaporating system for evaporating solvents from chemical samples held in supply plates, which accelerate evaporation by warming the samples in a hot air bath. The system includes adapters to allow the use of supply plates of varying heights, such as either standard micro-plates or deep well micro-plates.

Abstract: A tank stores a drying liquid for drying a semiconductor wafer. A boat vertically holds a plurality of target semiconductor wafers to be dried. The semiconductor wafers which are held by the boat are entirely soaked in the drying liquid. After this, the semiconductor wafers are lifted from the drying liquid at a rate in a range from 1 to 3 mm/min, so as to be dried. At this time, the surface of the drying liquid is divided with using a dividing liquid at each side of the semiconductor wafer. The dividing plate divides the surface of the drying liquid, thereby to prevent particles, which are once removed from the semiconductor wafer, from being again adhered onto the semiconductor wafer.

Abstract: A system and method are disclosed including a vapor dryer chamber (12) with a lid (14). A heater (16) is disposed within the vapor dryer chamber to vaporize liquid drying medium (24), preferably isopropyl alcohol, in the bottom of the vapor dryer chamber (12). Cooling coils (18) disposed within an upper portion of the vapor drying chamber (12) condense the drying medium vapor. A vapor monitor assembly (30) is disposed within the vapor dryer chamber (12) to monitor the vapor concentration within vapor dryer chamber (12). A controller (40) is associated with the vapor monitor assembly (30) and evaluates vapor concentration measurements from the vapor monitor (38).

Abstract: A tank stores a drying liquid for drying a semiconductor wafer. A boat vertically holds a plurality of target semiconductor wafers to be dried. The semiconductor wafers which are held by the boat are entirely soaked in the drying liquid. After this, the semiconductor wafers are lifted from the drying liquid at a rate in a range from 1 to 3 mm/min, so as to be dried. At this time, the surface of the drying liquid is divided with using a dividing liquid at each side of the semiconductor wafer. The dividing plate divides the surface of the drying liquid, thereby to prevent particles, which are once removed from the semiconductor wafer, from being again adhered onto the semiconductor wafer.

Abstract: A substrate dryer causing no water mark on a substrate having a refined·complicated structure and capable of suppressing increase of a cost required for a drying treatment is provided. Drying gas of low-molecular silicone generated in a drying gas generation part is heated by a heater and thereafter supplied from a drying gas supply nozzle. The drying gas is supplied to the main surface of a substrate being pulled up from de-ionized water stored in a cleaning bath as a stream. Silicone contained in the drying gas is condensed on the surface of the substrate, substitutes for moisture, and thereafter vaporizes. Silicone is excellent in permeability·dryability, and hence can suppress formation of a water mark also on a substrate having a refined·complicated structure. Further, silicone applies no load to the environment, and hence increase of a cost required for the drying treatment can be suppressed without requiring specific treatment for disposal.

Abstract: A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.

Abstract: In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.

Abstract: A drying apparatus for washed objects is capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects during drying thereof, and attaining energy saving and a reduction in consumption of chemicals used. Mist of an organic solvent is generated by means of an ultrasonic wave in an organic solvent mist generating tank and the objects are immersed in a pure water tank, the pure water tank and organic solvent mist generating tank are then operated to communicate with each other to discharge pure water and place the objects in an atmosphere of the organic solvent mist, and then nitrogen gas is fed to the pure water tank to purge the organic solvent mist with the nitrogen gas.

Abstract: A portable purge system for transporting materials, such as semiconductor wafers used in the manufacture of ICs, comprises a carrier having compartments for releasably receiving and enclosing the materials therein. The carrier is flooded with an inert gas such as nitrogen so as to adsorb the nitrogen on the surface of the materials, dilute contaminants, and purge the contaminants from the carrier. The carrier and the flooding means are mounted in a transport case. A humidifier is connected to the flooding means so that the materials will adsorb water and thereby further resist adsorption of hydrocarbon contaminants.

Abstract: A vacuum-type automatic dehumidifying and drying apparatus for powdered or granular material such as a pelletized or powdered resin or the like, provided with a drying hopper connected to an evacuating means having at its bottom a material discharge valve, and provided with a material collector communicating with the drying hopper via a material feeding valve above the drying hopper for collecting the powdered material therein. The apparatus comprises a double constructed drying hopper having a cylindrical main body made of a high heat conductivity material provided on its inner peripheral surface with plural fins, which define compartment walls, projecting inwardly and provided on its outer peripheral surface with a heating means surrounding the cylindrical main body.

Abstract: An apparatus for heat treating an object and specifically a substantially flat object described. The apparatus may be a hot plate post-baking apparatus for heat treating a substantially flat object such as a photomask used in a semiconductor photolithographic process. The apparatus is provided with an upper heat reflector plate that is equipped with upwardly curved edge portions such that the amount of heat reflected by the reflector can be controlled and the center region on the substantially flat object can be temperature compensated for achieving more uniform temperature profile across the entire surface of the mask. By utilizing the heat reflector plate in a post-baking apparatus, the normally observed 5.degree. C. temperature difference across a mask surface is substantially eliminated.

Abstract: A solvent recovery apparatus for recovering low volatility solvent from a washing fluid slop includes a settling system and a filtering system. The settling system includes one or more settling stages and an off-take by which settled, re-usable solvent may be recovered. The filtering system uses a single filter press to filter batches of wastewater, with solids, and batches of solvent sludge, with solids, such that cleaned wastewater filtrate may be discarded, benign removed solids may be dried and sent to landfill, and solvent filtrate may be returned to the input end of the solvent recovery apparatus for re-processing. The solvent recovery apparatus can use a two stage settling system which permits an initial separation of most of the wastewater, and a secondary settling of a solvent rich portion of the slop. The secondary settling can be performed with a system of alternating settling tanks in which one tank is allowed to settle while another is being filled.

Abstract: A device for cleaning exhaust air from clothes dryers has a housing, an element for connecting an interior of the housing with an outlet of a clothes dryer so as to supply in the interior of the housing air exiting the clothes dryer and containing impurities, an element for supplying liquid into the interior of the housing so that the impurities are washed off from the air by the liquid and entrained in the liquid, an element for withdrawing air after washing off from the impurities from the housing, and an element for withdrawing the liquid with entrained impurities from the housing.

Abstract: In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.

Abstract: A chemical vapor deposition system including a chemical vapor deposition chamber, an inlet line for directing reactant gases into the deposition chamber, and outlet line for discharging waste by-product from the deposition chamber, and a detachable trap position along the outlet line for trapping at least a portion of the waste by-product. The trap can include an array of baffles for increasing the surface area within the trap and disrupting flow within the trap. The trap can also include cooling structure for cooling at least a portion of the trap to enhance waste by-product deposition within the trap.

Abstract: The present invention relates to a continuous processing apparatus and method for cleaning articles with a liquified compressed gaseous solvent mixture. The continuous processing apparatus includes three processing chambers including an entrance chamber, a cleaning chamber, and an exit chamber. The chambers are provided with hatches which are opened and closed at appropriate times to allow the articles to be cleaned to pass into and out of the chambers. The entrance chamber is used for evacuation of the incoming articles to remove the majority of the air and moisture from the articles. After evacuation of the incoming articles, the entrance chamber is pressurized and the articles pass into the cleaning chamber. The cleaning chamber is maintained at a temperature and a pressure at which the liquified compressed gaseous solvent mixture is in a subcritical state and a liquid/gas interface exists between a liquid and a gas portion of the liquified compressed gaseous solvent mixture.

Abstract: Processing methods and systems using vapor phase processing streams made from a liquid phase source and feed gas. Some versions use multiple liquid sources and multiple vapor generators which each produce vapors which are mixed. Some of the vapor generators use metering pumps to inject a controlled flow of liquid into a controlled flow of feed gas. In some embodiments the vapors are exsiccated to reduce saturation before being introduced as a processing chamber vapor mixture into a processing chamber. The semiconductor pieces are preferably rotated within the processing chamber and can be processed in batches.

Abstract: Dishwashing machine including a washing tank (1) provided with an upper aperture (6) and a lower aperture (7) that are interconnected through a conduit (8) extending outside the tank. During drying, the vapor in the tank is caused to circulate along a closed-loop flow-path defined by the tank and the conduit (8), thereby reducing to a minimum the effect of thermal stratification of the vapor in the tank and, as a result, favoring a homogeneous drying effect of the washload items.

Abstract: A dry cleaning system particularly suited for employing supercritical CO.sub.2 as the cleaning fluid consisting of a sealable cleaning vessel containing a rotatable drum adapted for holding soiled substrate, a cleaning fluid storage vessel, and a gas vaporizer vessel for recycling used cleaning fluid is provided. The drum is magnetically coupled to a motor so that it can be rotated during the cleaning process. The system is adapted for automation which permits increased energy efficiency as the heating and cooling effect associated with CO.sub.2 gas condensation and expansion can be channeled to heat and cool various parts of the system.

Abstract: The device has a base plate (3) equipped to receive bulk material, composed by one or more gas distribution plates, which has gas outlet openings (10) distributed over the plate surface, further it has gas distribution chambers (6) provided on the bottom side of the gas distribution plates and in contact with the gas outlet openings (10), which are connected to a gas supply line (9) and water-fed spray nozzles (spray cones 12) for moistening the gas, which are distributed over the plate surface underneath the gas distribution plates (6) and abut directly in the gas distribution chambers (6). As a result the gas is moistened only immediately before it flows into the gas outlet openings.

Abstract: An apparatus and method are disclosed for preferentially separating a high vapor pressure component from a low vapor pressure component, wherein at least a portion of each component is volatilized from a matrix. A matrix, such as a sludge contaminated with volatilizable organic materials, is directed through a housing by a screw conveyor. Heat is applied to the matrix in an amount sufficient to volatilize at least a portion of the high and low vapor pressure components. A portion of a high vapor pressure component volatilizes at an inlet end of the housing while a portion of a low vapor pressure component volatilizes at an outlet end of the housing. The volatilized components are then preferentially separated by a hot gas, which is discharged over the matrix from a gas inlet tube, through separate outlet ports. The volatilizable components of the matrix are thereby preferentially separated.

Abstract: A dry cleaning system particularly suited for employing supercritical CO.sub.2 as the cleaning fluid consisting of a sealable cleaning vessel containing a rotatable drum adapted for holding soiled substrate, a cleaning fluid storage vessel, and a gas vaporizer vessel for recycling used cleaning fluid is provided. The drum is magnetically coupled to a motor so that it an be rotated during the cleaning process. The system is adapted for automation which permits increased energy efficiency as the heating and cooling effect associated with CO.sub.2 gas condensation and expansion can be channeled to heat and cool various parts of the system.

Abstract: A solvent recovery apparatus, in particular, for manufacturing apparatus of web-like materials, preferably sound tapes and video tapes, is equipped with a heat exchanger which returns a preferably larger portion of a gas prepurified of solvents downstream of a solvent separator via a line and heats it against the flow of the solvent-charged gas from the drier in order to return the preheated larger portion into the drier; a preferably smaller portion of the prepurified gas is freed from remaining solvent residues downstream of the solvent separator in a cryogenic apparatus, supplemented with a thereby vaporized part of inert gas in order to subsequently be supplied to transfer chambers of the drier to produce there a positive gas flow directed both into the drier and to the outside. The proposed method can be carried out on the apparatus describe.

Abstract: A method and apparatus are provided for handling the exhaust products produced during a treatment process in which treatment fluid is applied to a length of material. Several types of machines used in the textile industry and in the paper industry are operable to apply treatment fluid to a length of material in a treatment process during which exhaust products are created and some of the exhaust products comprise pollutants while other exhaust products are substantially pollutant-free. The present invention provides an exhaust products handling apparatus including an exhaust manifold connected to all the treatment zones of a treatment fluid applying machine, a discharge assembly connected to the exhaust manifold for drawing exhaust products away from the treatment zones, and a selective communicating device for selectively communicating the discharge assembly through the exhaust manifold, with a respective one of at least two different groups of treatment zones.

Abstract: A running substrate which is coated with a solvent-containing material is conveyed through several sections of a drying unit and is dried with a stream of inert gas which is conveyed counter to the direction of movement of the substrate. The temperature of inert gas is reduced during flow from section to section and the quantity of solvent in the inert gas is maintained slightly below saturation value during the initial stage of the drying operation to thus enhance the surface finish of the coating. The stream of inert gas is circulated along an endless path a portion of which coincides with the path for the substrate, and the inert gas is heated to maximum drying temperature before it enters the downstream end of the path for the substrate.

Abstract: There are disclosed a method and an assemblage for controlling and managing lower explosion levels of those products containing volatile or combustible materials which can create a potentially explosive or combustible atmosphere when such products are dried or subjected to further processing in an oven or furnace.

Abstract: Apparatus for drying plastic resin particles comprises a container, such as a hopper, for holding the resin particles to be dried and a first closed airflow loop communicating with the container for passing a heated airstream through the container to heat the particles and remove moisture therefrom. The heated airstream becomes moist and is returned to a plenum. A second closed airflow loop communicates with the plenum for receiving a portion of the moist return air under the control of an adjustable by-pass valve in the plenum. The second airflow loop includes a desiccant dryer communicating with the first airflow loop so that air dried by the desiccant dryer is mixed with moist air from the plenum for heating and return to the container.

Abstract: Applicant's invention relates to a rectangular shaped pad composed of a heat retentive, hydrophobic textile material encapsulating a heat retentive vinyl-like material together performing a desiccating function by wicking water away from wet drying clothes onto the adsorptive surface of the textile material and facilitating the drying mechanism of a clothes dryer by raising the ambient temperature in the dryer drum which expedites water vaporization for removal from the dryer drum by the exhaust vent. The rectangular shape and stabilizing units further coordinate to maintain the structural integrity of the entire drier pad unit by preventing the pad from collapsing-in upon itself which maximizes the surface area of the pad which communicates with the drying clothes, thus decreasing the standard drying time required for removing water vapor from the dryer drum and thereby conserving valuable energy.

Abstract: A heater equipped pre-trap chamber is provided at the upstream side of the inlet to a vacuum diaphragm pump so that gas products and solvent drawn from a specimen in a drying chamber can be subjected to a separation operation in the pre-trap chamber to remove liquid and readily condensable vapor forms of solvent. This thereby prevents entry of liquid solvent to the pump unit where it could cause damage. The inlet to the pump is located some distance above the outlet from the pre-trap chamber so that any liquid as may carryover in the flow from the pre-trap chambers towards the pump inlet, will return to the pre-trap as a gravity induced back flow. Solvent collected in the pre-trap chamber is heated to vaporize it and pass it out through the pump in that form to the outside atmosphere, making the pre-trap self-cleaning.

Abstract: An oven employing a group of identical modular oven units, each unit divided into a main cavity with a first upper auxiliary chamber and a second lower auxiliary chamber. A barrier plate separating the upper chamber from the main cavity is gas pervious and serves as a filter to separate micron size particles and larger from entering the main chamber as the particles are carried by heated inert gas or air passing into the main cavity. The barrier plate separating the lower chamber from the main cavity is also gas pervious and serves as a sink to adsorb particles of sizes up to 100 microns. The group of modular ovens is partially surrounded by a heat transfer wall which allows heat to be rejected from the modular ovens and removed by a fluid coolant in contact with the wall.

Abstract: An apparatus and process for heating and dehumidifying plastic materials in a container, such as a hopper, using a current of warm dry air. The apparatus having a desiccant for removing the moisture picked up from the material, and having a heater and cooler downstream from the desiccant. The dryer control operates in three modes to control the cooler only, to control the heater and cooler, and to control the heater only. Measured temperatures and operating conditions control the selection of specific modes.

Abstract: Disclosed is an apparatus for treating furniture that has been wet cleaned or damaged by water or smoke. The apparatus is a tent having a floor, a plurality of sides, and a top, forming an enclosed chamber. The furniture is placed on the floor within the sides, and the top is attached to the sides. Air or ozone is then blown into the chamber to inflate the tent. A plurality of holes in the top of the tent or exhaust boots in the sides of the tent allow the air or ozone to escape from the chamber at a selected rate to maintain the inflation of the tent.

Abstract: A domestic clothes dryer having ozone disinfectant features. The clothes dryer includes a rearwardly exposed air inlet providing a flow path for air to be drawn into and circulated interiorly of the dryer, and the air intake in turn includes an access region which is fitted with an ozone producing corona grid member positioned in the flow path so that the air is ozone charged prior to being circulated within the dryer.

Abstract: A novel pad assembly is provided for use with a standard hand-held hair dryer to aid in removing undesired odors from a beauty salon. The pad assembly of the present invention is provided for use with standard hand-held hair dryers which include an aperture for supplying a heated air stream and a barrier attached to the aperture for preventing objects from entering into or passing out of the hair dryer. The pad assembly includes a pad portion made of a flame retardant, liquid absorbent material which is sized to fit within the aperture of the hair dryer. The pad portion has a backing attached thereto. The backing has an outer surface on which is disposed an adhesive material for mounting the pad assembly to the barrier of the hair dryer. An oil based scented liquid material is disposed within and absorbed by the pad such that a scent is released to the heated air stream upon use of the hair dryer.

Abstract: The hot air dryer for plastic materials is disclosed. Three desiccant cartridges are carried on a rotatable turret and each cartridge is indexed successively from a process air station to a regeneration station and then to a cool down station. At each station, the cartridges are clamped between sets of upper and lower conduit fittings to provide a closed air flow path. A clamp spring acts on a lower conduit carrier to raise the cartridges against the set of upper conduit fittings to a clamped or closed position. The clamping actuator including a motor driven lead screw acts on the carrier to retract it against the resistance of the clamp spring to lower the turret and hence the cartridges away from the set of upper fittings to a stop position and the carrier is further retracted to separate the set of lower conduit fittings from the lower end of the cartridges thereby opening the clamp and the air flow path through the cartridges.

Abstract: The invention is directed to an apparatus vitrifying radioactive fission ducts in liquid solution. The liquid solution is pumped in metered quantities from a feed container to a vitrifying oven. The offgas occurring during vitrification is scrubbed of entrained radioactive dust particles and the like by a scrubbing liquid in a scrubber. In order to obtain a simplified sequence of method steps for metering the liquid solution and for scrubbing the offgas, the radioactive fission product solution from the feed container itself is used as the scrubbing liquid. This fission product solution is taken from the feed container and conducted to the counterflow scrubber through which it is passed in a direction opposite to the flow of the offgas. The fission product solution used as a scrubbing liquid is returned to the feed container after passing through the counterflow scrubber.

Abstract: A recirculating oven in which air and oxidized gases from a burner tube are directed to evaporation zone outlets at the bottom of the oven and curing zone outlets at the top and fed into a pair of wire work chambers, the gas streams mixing between the zones and return with volatile substances through a return duct to a burner mounted in the upper portion of the burner tube. The burner tube is mounted within a burner tube housing partitioned so that the volatile fumes returning to the burner are maintained separately from the oxidized gases and air exiting from the burner tube. The burner is electrically energized and has a cylindrical housing supporting a number of radial vanes supported between spaced baffle plates, the vanes imparting a vortex pattern to the gases entering holes in the housing periphery. A support plate on the top of the housing carries two high temperature ceramic igniter heater elements surrounded by a multiplicity of resistance type electrical heating elements.

Abstract: Gas consisting of air mixed with varying concentrations of solvent vapors, drawn from a dryer, is passed through controllable heating means to a catalyst bed. In flow through the catalyst bed, for oxidation of the vapors, temperature rise of the gas depends upon solvent concentration. For control of the heating means, so that gas at the bed inlet will have a temperature high enough for complete vapor oxidation but not so high as to be unnecessarily hot at the bed outlet, thermocouples are located to sense gas temperature at the bed inlet and outlet. Like terminals of the thermocouples are connected to opposite ends of a potentiometer resistance element; its slider is connected with a comparison device that compares the potentiometer output (corresponding to a weighted average of bed inlet and outlet temperatures) with a demand value. The heating means consists of a controllable fuel burner and a heat exchanger wherein hot gas from the catalyst bed can heat gas flowing to the burner.

Abstract: A low-cost energy-conserving system for heating and cooling the equipment and environment of a manufacturing installation, and more particularly, a printing plant, including an incinerator for burning waste paper generated as a result of the printing process, a first heat exchanger for utilizing exhaust gases from the incinerator for heating air to be supplied to a heat treating device or apparatus, and more particularly, a web press oven, first ductwork for conducting heated air from the first heat exchanger to the web press oven for heating purposes, second ductwork for conducting solvent-laden air from the web press oven to the incinerator where the solvents are burned to utilize their heating value and to also produce pollution-free gases, a second heat exchanger utilizing exhaust gases from the incinerator for heating air to be provided to the plant for environmental heating purposes, an outside air duct for providing air to be heated by the second heat exchanger, third ductwork for conducting heated air

Abstract: A lateral exhaust manifold system for the preheat section of a tunnel kiln comprises a longitudinal duct and input tube. The duct is triangular in shape and has a plurality of spaced apart apertures and a corresponding plurality of cones, the large diameter end of each cone circumposing a respective one of said apertures. The input tube is disposed adjacent the opposite side of the tunnel kiln and has a plurality of spaced apart jets each disposed opposite a respective aperture in the longitudinal duct, and a plurality of spaced apart apertures each located intermediate the jets, the spaced apart apertures and for venting air laterally across the kiln and upwardly along the adjacent wall. A blower vents an exhaust stack connected to an end of the duct. Air curtains control the entrance and exit of the preheat section of the kiln.

Abstract: A process is provided for the efficient conversion of water-containing organic materials such as bark, peat and sludge as fuels into energy, including drying the materials to convert them into fuels and then combusting the fuels in order to recover as much energy as possible at the lowest possible cost; which comprises heating the material in a steam vessel while enveloping the material in steam at superatmospheric pressure, heating the steam by heat exchange with steam at a higher pressure and higher temperature than the steam in the vessel; mechanically dewatering the material; and then drying the material to convert the material into a fuel, converting water driven from the material into steam, and forming excess steam in the dryer, of which steam all or part is recycled and condensed directly on the material in the steam vessel; and then combusting the dry material in finely divided form in a steam boiler, utilizing the high pressure steam that is generated in a turbine, which in turn operates a generator

Abstract: An assembly for removing contaminants from gas, comprising a cylinder having therein a spiral path-forming member, a layer of absorbent fluid, and substantially filled with mass transfer media.

Abstract: Individual charges of silicon steel are passed through a tunnel type furnace provided with charge and discharge vestibules. The annealing takes place in a hydrogen atmosphere and the vestibules are purged with nitrogen and then with hydrogen. The hydrogen used for purging is taken from the hydrogen in the annealing atmosphere and additional new hydrogen is added to the annealing atmosphere at the same time to maintain the pressure constant.