Abstract: An installation for dehydrating products, the installation having an enclosure, a member for sucking out the air contained in the enclosure, and a container for products that is received inside the enclosure and that is provided with a top opening having an air- and water-permeable bottom of a cassette extending in register therewith. The cassette contains moisture-adsorption means. A sealing gasket extends between a perimeter of the bottom of the cassette and an edge of the container, defining the opening.

Abstract: This invention is directed to freeze dryers used in the pharmaceutical industry, and in particular, to a barrier system for freeze dryers located in an isolator or clean room facilitate sterilization of the isolator.

Abstract: A freeze-dryer and method of controlling the same is provided. The disclosed freeze-dryer includes a chamber adapted to hold material or product to be freeze-dried; one or more depressurization orifices; a gas pressurization circuit having a source of gas to pressurize the chamber to a prescribed pressure; a depressurization circuit coupled to the chamber via the one or more orifices and having a depressurizing control valve; and a control unit adapted to pressurize the chamber with the source of gas and actuate the depressurizing control valve to depressurize the chamber upon command. The ratio of total depressurization orifice area to the chamber volume is preferably between about 6×10?2 and about 4×10?4 m2/m3.

Abstract: An apparatus and method for microwave vacuum-drying of organic materials, such as food products. The apparatus has a microwave vacuum chamber 20, a loading module 36 to load containers 38 of the organic material into the vacuum chamber, a rotatable cylindrical cage 64 in the vacuum chamber for rotating the containers, a piston 114 for moving the rotating containers through the vacuum chamber, and means for unloading the containers of dehydrated material from the vacuum chamber. The apparatus may include an equilibration chamber 150 for cooling the dehydrated material under reduced pressure, and a transfer module 42 to transfer the containers from the vacuum chamber to the equilibration chamber. The apparatus has a microwave transparent window 54 for transmission of radiation into the vacuum chamber, and a gas jet 58, 60, 62 for blowing a stream of gas, such as air or nitrogen, into the vacuum chamber adjacent to the window.

Abstract: An improved system for processing a liquid manure and producing organic fertilizer includes equipment for separating various solid components of the liquid manure having different nitrogen to phosphorous ratios and then mixing these components so as to produce an organic fertilizer with a predetermined nitrogen to phosphorus ratio. The system includes equipment for separating solid manure components and clarified water. Solid manure components include fertilizer, fodder/bedding material, and biomass. Fertilizer and clarified water are used to fertilize and irrigate the farming soil. Fodder is used as a bedding material for the animals or as a feed source. Biomass is used as a fuel source for running farming equipment and processes that require energy.

Abstract: The invention provides an improved method of drying wet or water damaged surfaces using a vacuum source, a manifold, and a plastic sheet covered grid having a lattice formation with spaces to permit the passing of moisture and air from and beneath the surface to the vacuum source.

Abstract: A freeze dryer comprises a chamber having a rectangular slot through which vials are inserted into the chamber. An assembly for loading the chamber comprises a bar extending across the slot to engage vials to be inserted into the chamber. The bar is attached to a mechanism for moving the bar laterally into and out from the chamber. In a retracted position of the bar, at least part of the mechanism is wound around a sprocket. Rotation of the sprocket unwinds the mechanism to move the bar into the chamber.

Abstract: A freeze-drying apparatus comprises a vertical tube (2) and a spray device (4) for supplying liquid onto an inner surface of the vertical tube (2). Connected to the spray device (4) is a liquid-supply device (5) for supplying liquid material to be dried. The vertical tube (2) has a lower portion, to which a vertical guide cylinder (14) is connected. The guide cylinder (14) has a mid portion at which a roughly crushing device (15) and a first open-close valve (18) are arranged in order from above. The guide cylinder (14) has a portion above the first open-close valve (18), to which portion the liquid-supply device (5) is connected through a liquid-recovery passage (19) so as to recover excessive dried material to the liquid-supply device (5). The liquid-recovery passage (19) is additionally provided with a second open-close valve (20). A heating-freezing device (10) is disposed around the vertical tube (2) so as to control a temperature of the inner surface of the vertical tube (2).

Abstract: A dryer device having a receiving chamber for receiving textiles and drying agents including a vacuum pump for creating a vacuum in the receiving chamber. A drying method includes introducing textiles and drying agents, particularly based on zeolite, into the receiving chamber, followed by a vacuum being created in the receiving chamber.

Abstract: A freeze dryer comprises a chamber having a rectangular slot through which vials are inserted into the chamber. An assembly for loading and/or unloading the chamber comprises a transfer bar extending across the slot. The bar is pivotally attached at each end to first and second flat springs, each spring being wound on a respective rotatably mounted spool located proximate the slot. Drive means are provided for synchronously rotating the spools to effect movement of the bar into or out from the chamber and for selectively rotating the spools to raise or lower the bar.

Abstract: Described in the examples herein are devices for loading and unloading of an adjusting plate of a freeze-drying apparatus with a number of vials, with a transfer table provided upstream of the freeze-drying apparatus for temporary accommodation of the vials, with a shifting device for shifting the vials from the transfer table onto the adjusting plate or from the adjusting plate onto the transfer table, and with a right and/or left side limit. According to one example, the creation of a device, so that the vials can be brought into and out of the freeze-drying apparatus by maintaining their sequence and order, is achieved by the side limit being provided with elements which are movable with low friction by striking vials.

Abstract: Insect pests can be transported around the world in wooden shipping containers. To prevent the spread of wood-borne insect pests, it is necessary to kill insects within the wood. The wood is placed in a vacuum container having a flexible wall. The flexible wall presses against the wood and enables the wood to be heated by conduction. The wood and flexible wall can to be heated by contact with ambient or heated air, for example. Desiccant or dry air can be used to increase the rate of dehydration. Insects in the wood are typically killed after losing 25-50% of their body weight by dehydration. This technique will kill beetle larvae, nematodes and other invasive and destructive insects that live inside solid wood, and is particularly applicable for rendering wood acceptable for use in pallets and other containers shipped internationally.

Abstract: A vacuum drying apparatus and method to dry and cure paint is disclosed. The method provides a substantially particle free environment that shortens drying time, reduces cost and improves surface finish. The apparatus includes an enclosed drying tunnel that is maintained at a reduced pressure relative to ambient conditions. Heat lamps with the drying tunnel aid in curing and provide the desired particle free environment.

Abstract: The present invention relates to a method for screening of polycondensation catalysts, wherein at least two polycondensation catalysis reactions are performed simultaneously under substantially equivalent conditions in at least two reaction cells which are present in one and the same room, using a sample comprising material to be polycondensated and a catalyst to be screened, and wherein the performances of the catalysts are analyzed. The present invention further relates to an apparatus suitable for performing the method.

Abstract: An installation for drying organic matter, especially kitchen and food wastes or other biological matter, including matter that contains packaging residues, napkins, straws or the like. The installation comprises the following components: (a) a vacuum mixer (M) having a closable charging opening for introducing the organic matter and a closable discharge opening, disposed at the bottom or laterally towards the bottom, for the dried matter, (b) at least one vacuum pump (VP) for evacuating the air in the mixer to generate the vacuum, the pump being connected to at least one evacuation tube mounted above the maximum filling level in the housing of the mixer (M), (c) a heater (H) for heating the organic matter, (d) at least one condenser (K), connected to the air evacuation duct (AL) of the vacuum pump (VP) and having a cooling unit (KA) connected thereto to condense the evacuated air, and (e) a discharge duct (AW) for the condensate obtained from the evacuated air by cooling in the condenser (K).

Abstract: A vacuum freeze-drying apparatus capable of rapid drying is provided. A cold trap for drying, which is arranged inside a drying chamber, is set to a low temperature of ?70 degrees Celsius or below, and heat is supplied to frozen particles on a conveyor belt to a degree such that the frozen particles do not melt. The amount of the liquid component evaporating from the frozen particles increases, and the amount of the liquid component entering the frozen particles decreases so that the time for drying the frozen particles is shortened.

Abstract: A method of manufacturing a lyophilized reagent, including mounting a plurality of reagent cartridges in which a liquid reagent is loaded in a tray including one or more tunnel-shaped first rails having opened end portions in a lengthwise direction and an opening formed in the top of the one or more first rails; closing the opened end portions, placing the tray in a lyophilizer and lyophilizing the liquid reagent according to a lyophilizing program.

Abstract: A drying and storing apparatus for powdered or granular material and a feeding system for powdered or granular material. The apparatus comprises a heating and drying chamber having a discharge port at its lower end and a thermal conductive heating means therein and a hopper chamber connected to the upper end of the heating and drying chamber, in which the heating and drying chamber and the hopper chamber constitute a integrally combined material storage processing tank for powdered or granular material.

Abstract: A method for reconditioning Fire Control Radar APG-68 tactical radar systems (FCR) utilized in military aircraft and returning them to operation with extended useful life expectancies equivalent to or better than new of the FCR APG-68 unit high frequency, high voltage dual mode radar transmitters that are deployed in over 1000 state-of-the-art military aircraft such as the F-15, F-16 and F-18 fighter aircraft, and B-1 bombers. The novel method extends the mean lifetime of previously repaired and repairable FCR APG-68 tactical radar units and radar units and ageing transmitters from about 100 to a few hundred hours to about five hundred or more hours by the step of removing embedded moisture and absorbed moisture from the heterogeneous electronic components in the FCR APG-68 tactical radar unit.

Abstract: A paper machine dewatering system includes a first fabric, a second fabric, and an airflow device. The first fabric carries a fibrous web on a side thereof. The second fabric is in at least partial contact with the fibrous web, the fibrous web being between the first fabric and the second fabric. The airflow device moves air successively through the first fabric, the fibrous web, and the second fabric.

Abstract: A method for reconditioning Fire Control Radar APG-68 tactical radar systems (FCR) utilized in military aircraft and returning them to operation with extended useful life expectancies equivalent to or better than new of the FCR APG-68 unit high frequency, high voltage dual mode radar transmitters that are deployed in over 1000 state-of-the-art military aircraft such as the F-15, F-16 and F-18 fighter aircraft, and B-1 bombers. The novel method extends the mean lifetime of previously repaired and repairable FCR APG-68 tactical radar units and radar units and ageing transmitters from about 100 to a few hundred hours to about five hundred or more hours by the step of removing embedded moisture and absorbed moisture from the heterogeneous electronic components in the FCR APG-68 tactical radar unit.

Abstract: A sheet transfer assembly for use above an ultraviolet curing unit in a flexographic printing press used for printing corrugated sheets includes a vacuum plate with heat sinks. The vacuum plate includes openings for rollers that extend through the vacuum plate to drive printed sheets across the bottom of the transfer assembly. Heat sinks are formed on the top surface of the vacuum plate between rollers to remove heat from the vacuum plate. Heat from the UV curing unit is effectively dissipated from the vacuum plate into the air used to hold printed substrates against the rollers in the transfer assembly.

Abstract: A clothes drying device for using a vacuum to dry clothes includes a housing being positioned on a support surface. The housing includes a top wall, a bottom wall and a perimeter wall extending between the bottom wall and the top wall to define an interior space of the housing. A drum assembly is mounted in the interior space of the housing. The drum assembly receives clothes to be dried. A hole in the perimeter wall of the housing is in communication with the drum assembly to allow the clothes to be placed in the drum assembly. A vacuum pump is mounted in the interior space of the housing. The vacuum pump is in fluid communication with drum assembly to create a vacuum in the drum assembly to draw moisture out of the clothes in the drum assembly.

Abstract: A mobile surface drying apparatus includes a vacuum and blower assembly. The vacuum and blower assembly includes a vacuum head and a blower head. The vacuum head suctions moisture through an inlet of the vacuum and blower assembly, and the blower head communicates airflow through an outlet of the vacuum and blower assembly.

Abstract: An membrane drying system comprising: a chamber, a vacuum pump, a sweep gas source, and a membrane device, wherein the membrane device comprises a membrane, a first inlet in fluid communication with the chamber and the membrane, a first outlet in fluid communication with the membrane and the vacuum pump, a second inlet in fluid communication with the sweep gas source and the membrane, and a second outlet in fluid communication with the membrane.

Abstract: An apparatus for moving containers into or from a chamber provided with at least a supporting surface for the containers, comprises a pushing element for engaging the containers and a driving arrangement for moving the pushing element through the chamber along a sliding direction, the driving arrangement comprising, a modular rod assembly for supporting the pushing element and including a set of rod elements which can be mutually and removably associated, an assembling arrangement for connecting or disconnecting the rod elements to or from the modular rod assembly so as to change a length thereof and to move the pushing element.

Abstract: A spherical vacuum desiccator consists of two substantially identical shells which are connected together at an engagement region. A receiving segment and connecting segment are positioned in a spaced-apart relationship within the engaging region of each hemispherical shell. In the assembled condition of the invention, each hemispherical shell is disposed in an inverted position with respect to the other shell and the connecting segment of the two hemispherical shells engage at the receiving segment.

Abstract: A dryer system may include a dryer member to dry clothes or fabric, and a vacuum source member which is external to the dryer member and detachably connected to the dryer member. The dryer member may include a rotatable chamber which is in the fluid communication with the vacuum source member, and the dryer member may include a vent connector member. The vacuum source member may include an input line member which is detachably connected to the dryer member, and the vacuum source member may include a reducer member to connect to the vent connector member. The vacuum source member may include an elbow member to connect to the reducer member, and the vacuum source member may include a filter member to filter the fluid. The vacuum source member may include a output line member to output the fluid, and the vacuum source member may include an expander member to connect to the output line member. The expander member may be connected to a second elbow member.

Abstract: A method for preparing and a system containing freeze-dried plasma that will be reconstituted. Ascorbic acid is incorporated into the freeze-dried plasma prior to the plasma being reconstituted.

Abstract: An apparatus is disclosed for decontaminating cuttings produced from. a wellbore. The cuttings (11) are conveyed on a belt (13), made of a mesh material, to a decontamination region where, under reduced pressure and elevated temperature organic materials are removed, together with a quantity of water. In order to facilitate the process, a depth gate (14) is provided to control the depth of the cuttings (11) on the belt (13). The organic materials can be either collected and reused or alternatively burnt off. Once the cuttings (11) have been decontaminated they can be safely discharged or reused as part of the drilling process. To facilitate the process means (112,113) can be included which clean the belt (13) and remove compacted regions to prevent the mesh from becoming clogged up.

Abstract: An appliance 1 according to the present invention comprises a bottom tray 2, a middle housing 3, a transparent lid 4, a lid release button 5 for removing the lid from the housing 3, at least one finger hole 6 for receiving a user's finger, and a glittering switch 7 for activating an automatic glitter application sequence. A glittering tray 9 is housed inside of the middle housing 3 and has a plurality of separate chambers or can have a single chamber. A finger hole 10 corresponding to each chamber is provided and the tray 9 can be manipulated to line up the hole 10 with the finger hole 6. Glitter fragments are loaded into the one or more chambers 32 and, as described below, will be blown about and dispersed so that some settle on and adhere to freshly painted nails before they dry.

Abstract: A freeze dryer shelf with opposed, parallel first and second plates is disclosed. The plates have at least one flow channel located therebetween for conveying a diathermic fluid between the plates. One of the plates has a surface treated to inhibit the sticking to the shelf of a rubber stopper pressed against that surface during the application of pressure to the stopper to push the stopper into a container.

Abstract: A flexible container receives a liquid material, which is freeze-dried in situ within the flexible container. A gas permeable material that is separate from the flexible container provides gas transport for sublimation during drying and lyophilization. The gas permeable portion of the system can be isolated and removed from the flexible container post-lyophilzation The freeze-dried material is stored in the flexible container until administration is necessary. The flexible container receives a reconstituting liquid for mixing with the freeze-dried material, and conveys the reconstituted freeze-dried material from the flexible container for administration to an individual.

Abstract: Single unit human plasma is dispensed from a source transfer bag into a receptacle in which the plasma under goes freeze-drying. During the dispensing of the plasma from the source transfer container into the freeze-drying receptacle, an inline treatment device treats the plasma prior to freeze-drying, e.g., by the removal of cellular blood components, or by the removal of pathogens or viral or bacterial agents, or by the removal or neutralization of blood group specific antibodies.

Abstract: A hair dryer and vacuum device includes a housing having a nozzle, a handle, and a body portion situated between the handle and nozzle, the nozzle including a first channel extending from the body portion to an outlet port and a second channel extending from the body portion to an inlet port. A heating coil is mounted in the body portion for heating air and a dryer fan is positioned adjacent the heating coil that is configured to blow the heated air through the outlet port when energized. A vacuum fan is mounted in the second channel and configured to draw air into the second channel through the inlet port when energized. The device includes a collection chamber situated between the vacuum fan and the body portion and in communication with the second channel such that fallen hair is collected therein.

Abstract: A method for dehumidifying and drying resin pellets that can efficiently dry both non-crystallized resin pellets and crystallized resin pellets, the apparatus being adapted to downsizing. A control means 67 adapts to operate in a first drying mode of controlling the heating operation of the first heating member 25 for heating longitudinally divided regions of the first cylinder 5 section to produce differentiated respective heating effects and that of the second heating member 31 for uniformly heating the second cylinder 7 section so as to crystallize the supplied non-crystallized resin pellets NCRP and subsequently drying them and in a second drying mode of controlling the heating operation of the first heating member 25 and that of the second heating member 31 for uniformly heating the first and second cylinder 5,7 sections so as to drying the supplied crystallized resin pellets CRP.

Abstract: A method of controlling the pressure within a chamber (12) of a drying apparatus (10) from which air and vapour is removed by a pump (30), which is operated continuously during the drying process. If both of a vent valve (18) and a pressure control valve (32) is opened, air at atmospheric pressure is drawn by the pump (30) directly from the pressure control valve (32), and via the chamber (12) and a non-return valve (26) from the vent valve (18). When the pressure in the chamber (12) is to be reduced both vent and pressure control valves (18, 32) are closed to allow the pump (30) to remove air, gas and vapor from the chamber (12) via the non-return valve (26). After a required chamber pressure has been reached, the pressure control valve (32) is opened while the vent valve (18) remains closed.

Abstract: A target substance (8) is subject to a freeze drying process in which the substance is first passed into a freeze chamber (31) to reduce the temperature of the substance, and then passed into a separate vacuum chamber (32) in which a vacuum is applied to promote drying of the target substance. Because the carrier (10) and target substance (8) is moved from a freeze chamber (31) to a separate vacuum chamber (32) the environment can be more closely controlled and the cycling of freezing to drying can be more rapid. In this way the carrier (10) and target substance (8) is subject to the full temperature cycling without the surrounding chamber and apparatus being subject to the full cycle. This reduces time and energy costs. The technique is particularly suited to manufacturing biosensors using freeze dried reagents.

Abstract: A wood heat-treating method, a plant for carrying out the method, and the heat-treated wood. The heat-treating method consists in bringing each wood piece of a treatable lot into contact with a temperature controlled conductive press, whose temperature is accurately controllable in time and in intensity. The pieces are heated to or held at a desired temperature by any heat control for treatment and the wood is conductively heated to maintain the temperature and to cool the wood.

Abstract: A container is provided that realizes efficient freeze-drying while preventing contamination during freeze-drying. This freeze-drying container uses a nonporous moisture-permeable film in at least a portion thereof, and the nonporous moisture-permeable film can be formed from a polyurethane or a polyester elastomer.

Abstract: A reduced pressure drying apparatus includes a chamber that closes in an airtight manner during a reduced pressure drying operation, a stage on which a substrate is mounted; and an exhaust unit having an exhaust tube that opens at exhaust openings within the chamber. The stage is disposed within the chamber during the reduced pressure drying operation. The exhaust unit discharges atmosphere from the chamber via the exhaust openings during the reduced pressure drying operation to reduce the pressure within the chamber. The exhaust openings are formed such that a position of the exhaust openings is substantially the same as or no higher than a surface position of the substrate. The reduced pressure drying apparatus allows a film having a more uniform thickness to be formed on the substrate.

Abstract: Significant research is being done to develop and improve delivery mechanisms for biopharmaceuticals and vaccines, including pulmonary (inhalation), nasal, transdermal, and oral alternatives. Market projections indicate that the delivery of proteins and vaccines by inhalation and oral formulation has become and will continue to be increasingly important. These delivery mechanisms, to be effective, will require better stabilization of the biologicals so that they can maintain potency and effectiveness at ambient temperatures for extended periods of time. The novel Preservation by Vaporization (PBV) Technology described herein provides cost-effective and efficient industrial scale stabilization of proteins, viruses, bacteria, and other sensitive biologicals, thereby allowing a production of products that are not possible to be produced by existing methods. The suggested new PBV process comprises primary drying under vacuum from a partially frozen state (i.e.

Abstract: A freeze-drying apparatus has a chamber (3) in which are located superposed charging plates (4) as well as loading and unloading equipment. The chamber has a loading aperture (2) equipped with closing doors (11, 12) through which the charging plates (4) are loaded. Equipment for loading the charging plates (4) with containers (5) is positioned in front of the loading aperture (2) and comprises a conveyor belt (6) which serves to supply the containers (5) and a transfer table (7) which is movable between an operating position and an idle position. The transfer table bridges a gap between conveyor belt (6) and the charging plate (4). A loading slider (8) provides push-wise transfer of a plurality of the containers (5) from the conveyor belt (6) via the transfer table (7) onto the charging plate (4).

Abstract: A cost effective and environmentally sound method for quickly removing liquid from surfaces of a substrate under manufacture without leaving behind substantial residue (e.g., silicon elements from the substrate, commonly known in the field as “water marks”). The process includes first providing a substrate (e.g., a semiconductor wafer, glass flat panel, or disc media), which has undergone one or more liquid-based processes (e.g., cleaning, scrubbing, rinsing, etc.). An upper surface and a lower surface of the substrate are then subjected to vacuum suction, thereby removing liquid thereon. An apparatus for removing liquid from surfaces of a substrate is also provided. The apparatus includes a plurality of vacuum application members configured for applying vacuum suction to surfaces of a substrate, thereby removing liquid therefrom.

Abstract: A new combination hair dryer/vacuum that will permit vacuuming of debris using the same device. The inventors device includes a tubular main member as the hair dryer and the same structures as the vacuum and handle. The tubular main member has a hollow interior and operates by heat elements. The vacuum member of this device operates by suction. This device operates by electric or batteries and has three settings low, medium, and high.

Abstract: Methods for processing substrate through a head that is configured to be placed in close non-contact proximity to a surface of a substrate are provided. One method includes applying a first fluid onto the surface of the substrate from conduits in the head when the head is in close proximity to the surface of the substrate and removing the first fluid from the surface of the substrate. The removing is processed just as first fluid is applied to the surface of the substrate, and the removing ensures that the applied first fluid is contained between a surface of the head and the surface of the substrate and the first fluid being applied and removed defines a controlled meniscus. The method further includes moving the controlled meniscus over different regions of the surface of the substrate when movement of the head or the substrate is dictated. The moving of the controlled meniscus enables processing of part or all of the surface of the substrate using the first fluid.

Abstract: A freeze dryer (10) comprises a chamber (12) having a rectangular slot through which vials are inserted into the chamber (12). An assembly for loading the chamber (12) comprises a bar (32) extending across the slot to engage vials to be inserted into the chamber (12). The bar (32) is attached to a mechanism (34) for moving the bar (32) laterally into and out from the chamber (12). In a retracted position of the bar (32), at least part of the mechanism (34) is wound around a sprocket (106). Rotation of the sprocket (106) unwinds the mechanism (34) to move the bar (32) into the chamber (12).

Abstract: Vacuum concentrator, comprising a vacuum chamber with a closure which may be sealed in an airtight manner, a centrifuge rotor arranged in the vacuum chamber with at least one receiver for at least one vessel for samples to be dried, a drive motor arranged outside the vacuum chamber for driving the centrifuge rotor, a vacuum pump connected to the vacuum chamber, a tempering device associated with the vacuum chamber for tempering the at least one sample in the vacuum chamber, a pressure sensor associated with the vacuum chamber for detecting the pressure inside the vacuum chamber and an electrical control and evaluating device which is connected to the drive motor, the vacuum pump, the tempering device and the pressure sensor, for detecting the end point of the vacuum concentration by means of the pressures detected by the pressure sensor in the vacuum chamber and terminating the vacuum concentration when the end point is determined.

Abstract: This vacuum processing apparatus has a fixed processing chamber 24 and two movable load lock chambers 28a and 28b. A gate valve 26 is provided on the processing chamber 24, and gate valves 30 are respectively provided on the load lock chambers 28a and 28b. Each of the load lock chambers 28a and 28b is moved in a Y direction by a preparatory chamber moving mechanism 34. A vacuum seal 54, which is expandable and shrinkable so as to vacuum seal a gap G between the gate valves 26 and 30 which are set close to each other during the expansion, is provided around a peripheral edge portion of the processing chamber gate valve 26. Further, a substrate transporting mechanism for transporting a substrate 2 between the processing chamber 24 and each of the load lock chambers 28a and 28b set close thereto.

Abstract: A apparatus for drying a substrate includes a vacuum manifold positioned adjacent to an edge wheel. The edge wheel includes an edge wheel groove for receiving a peripheral edge of a substrate, and the edge wheel is capable of rotating the substrate at a desired set velocity. The vacuum manifold includes a proximity end having one or more vacuum ports defined therein. The proximity end is positioned at least partially within the edge wheel groove, and using supplied vacuum removes fluids that accumulate in the edge wheel groove and prevents re-deposit of trapped fluids around the peripheral edge of the substrate.