Vacuum Patents (Class 34/92)
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Publication number: 20040250441Abstract: A chamber for a freeze-drying device with storage surfaces, whose temperature can be regulated, for containers containing the product that is to be freeze-dried. The chamber includes an optical shield comprised of shield components, whose temperature can be regulated. The shield is positioned between the storage surfaces and the interior wall surfaces of the chamber.Type: ApplicationFiled: August 4, 2004Publication date: December 16, 2004Inventors: Peter Haseley, Georg Wilhelm Oetjen
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Publication number: 20040237328Abstract: An apparatus capable of performing consecutively, independently and/or simultaneously the processes of quick freezing and/or freeze drying of produce. The apparatus is characterized by a central vacuum system operating over one or more independent vacuum chambers (10,11,12,13,14); said vacuum system being composed of at least two vacuum subsystems (40,50), connected to the chambers by means of independent manifolds (400,500). One vacuum subsystem (40) evacuates air from any of the chambers from atmospheric pressure to a pressure slightly above that of the triple point of water, and the other vacuum subsystem (50) further quickly evacuates any of the chambers from said pressure slightly above the triple point of water to the pressure corresponding to the thermodynamic equilibrium of ice and water vapor at a desired freezing temperature, in a desired freezing time.Type: ApplicationFiled: June 29, 2004Publication date: December 2, 2004Inventors: Ricardo Francisco Auer, Julian Diego Roberts, Michael Louis McGee, Mitsuru Masuda
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Publication number: 20040187337Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: March 10, 2004Publication date: September 30, 2004Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20040187338Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: March 10, 2004Publication date: September 30, 2004Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20040181961Abstract: A handler for testing semiconductor devices is provided, wherein a soaking plate is fitted on a handler body having temperature control means for heating and/or cooling semiconductor devices placed thereon. Loading/unloading shuttles are movably fitted, such that they can move in a forward/backward direction, for carrying the semiconductor deices to/from a test site, thereby simplifying a handler system and permitting accurate temperature testing under in high or low temperature environments.Type: ApplicationFiled: March 4, 2003Publication date: September 23, 2004Applicant: Mirae CorporationInventors: Ji Hyun Hwang, Gil Ho Bae, Hyun Joo Hwang, Sang Jeon Park, Hyun Joon Cho, Seung Hwan Kim, In Hee Oh, Yon Choul Baek, Young Mi Choi, Sung Hoe Kim, Jae Myeong Song
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Patent number: 6790291Abstract: In a substrate processing apparatus for use in performing a reduced-pressure pull up drying method, a liquid drainage pipe (46) for draining a drainage liquid containing an organic solvent from a processing chamber (26) including therein a processing bath (10) for rinsing a substrate (W) with water is provided with a buffer tank (50) inserted therein for separation between the drainage liquid and an organic solvent vapor. A vapor discharge pipe (62) is connected in communication with an interior space of the buffer tank, and is provided with pressure regulating valves (64a, 64b) inserted therein for regulating pressure in the processing chamber at a fixed pressure higher than atmospheric pressure.Type: GrantFiled: September 25, 2001Date of Patent: September 14, 2004Assignee: Dainippon Screen Mfg. Co. Ltd.Inventor: Masahiro Kimura
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Publication number: 20040163273Abstract: The gas components in thermoplastic norbornene resin pellets are suppressed below certain levels by drying the resin under vacuum or under the ordinary pressure and under vacuum. A substrate for magnetic recording media is manufactured by injection-molding the resin dried by the method according to the invention. The magnetic recording medium, employing the substrate manufactured according to the invention, includes at least a magnetic layer, a protection layer on the magnetic layer and a liquid lubricant layer on the protection layer. The magnetic recording medium is manufactured by forming these layers, one after another, on the substrate according to the invention.Type: ApplicationFiled: February 20, 2004Publication date: August 26, 2004Applicant: FUJI ELECTRIC CO., LTD.Inventors: Youichi Tei, Syoji Sakaguchi, Katsunori Suzuki
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Publication number: 20040159005Abstract: A delivery system and method for vaporizing and delivery of vaporized solid and liquid precursor materials at sub-atmospheric pressures between a heatable vaporization vessel and a processing tool. The system includes a pressure regulator internally positioned within the vaporization vessel and in fluid communication with a downstream mass flow controller to maintain a consistent flow of vaporized source material. The system further comprises introducing a carrier/diluent gas for diluting the vaporized source material before entry into the processing tool. A venturi is positioned directly upstream of the processing tool and provides for mixing of the carrier gas with the vaporized source material while providing the negative pressure required to open the gas pressure regulator within the vaporization vessel.Type: ApplicationFiled: February 19, 2003Publication date: August 19, 2004Inventor: W. Karl Olander
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Patent number: 6766595Abstract: Apparatus and method for desolventizing particulate material having a solvent carried thereby wherein an upper indirect heating zone and a lower direct heating zone is provided. Each of the zones has a plurality of spaced apart horizontal trays for receiving particulate material. The trays define a vertical series of compartments through which the particulate material passes. Steam is provided to the particulate material indirectly in said indirect heating zone and directly in said direct heating zone are also included. An integral air tight flash chamber below the compartments enhances solvent recovery via vaporization of residual solvent from the condensed steam adhered to the particulate material traveling through the direct heating zone prior to discharge of the particulate material. The recovered residual solvent is delivered under pressure to a predetermined compartment in the direct heating zone provide heat for desolventizing the solvent-laden particulate material.Type: GrantFiled: August 28, 2001Date of Patent: July 27, 2004Assignee: Crown Iron Works CompanyInventor: George E. Anderson
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Publication number: 20040128852Abstract: The invention concerns a method for obtaining dry plant extracts under mild conditions, in which a liquid plant extract is introduced into a vacuum drying equipment having a multi-shaft stirrer extending through a cylindrical mixing and drying chamber and with its own drive, together with a chopper rotating through a stator, and the liquid plant extract is dried at a vessel shell temperature of 20° C. to 50° C., a product temperature between 20° C. and 40° C., a pressure between 0.Type: ApplicationFiled: February 23, 2004Publication date: July 8, 2004Inventor: Heinz-Walter Joseph
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Patent number: 6754978Abstract: A method of vacuum drying sludge or slurry input material comprises providing a closed-ended vacuum tunnel with at least two interior augers. The tunnel has an interior bed recessed with adjacent troughs separated by a low partition for accommodating the two augers in closely-spaced generally-horizontal side-by-side relation. The augers are driven counter-rotating such the input material re-circulates in an endless loop down one auger, over to the other and back again. The augers have screws formed with stubby flights to form a cut-and-fold arrangement and disintegrate the material. The chamber is heated up to or over 70° C. and a current of air is suctioned into the tunnel through inlets and out through ports in part pull a slight vacuum in the tunnel as well as to suction up and draw out disintegrating fractions of the material including gasified fractions, waftable finely divided particulate fractions and other waftable fractions.Type: GrantFiled: October 12, 2002Date of Patent: June 29, 2004Assignee: Micronics, L.L.C.Inventors: Randall G. Adams, Marshall R. Franklin
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Publication number: 20040111912Abstract: The invention provides an improved method of drying wet or water damaged surfaces using a vacuum source, a manifold, and a plastic sheet covered grid having a lattice formation with spaces to permit the passing of moisture and air from and beneath the surface to the vacuum source.Type: ApplicationFiled: September 18, 2003Publication date: June 17, 2004Applicant: INJECTIDRY SYSTEMS, INC.Inventor: Ernest J. Storrer
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Patent number: 6745490Abstract: This invention is concerned with a distributive ejection apparatus for liquid material in a freeze-drying apparatus for foodstuffs, medicaments, etc., wherein the liquid material adjusted from the starting material for foodstuffs, medicaments, etc. is caused to freeze onto the inner wall surface of the upright cylindrical tube, and the distributive ejection of the liquid material onto the tube at the time of its freeze-drying by sublimation of the moisture content in the material under the vacuum condition may be done in the state of supplying the liquid material over the entire surface of the inner wall surface of the tube with a substantially uniform thickness.Type: GrantFiled: January 4, 2002Date of Patent: June 8, 2004Assignee: Kyowa Vacuum Engineering Co., Ltd.Inventors: Hiromichi Akimoto, Ryoji Sunama
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Patent number: 6739073Abstract: A method for performing multiple cleaning and vacuum drying operations in enclosed vessels uses cleaning and vacuum drying apparatus, low-dissolved-air cleaning solution, and drain-to-vacuum process to produce vacuum in a cleaning vessel, so that influence of air pressure on the operations is minimized. The method utilizes physical features that boiling points of general liquids lower with reduced pressure, that liquid saturated vapor pressure reduces with lowered temperature, and that two vacuum vessels of different working temperatures would have a pressure differential between their saturated vapor pressures, and uses heat control units and heat egress units to regulate temperature and pressure in the vacuumized cleaning vessel, so that wet clean, dry clean, vacuum heat drying, and vacuum freeze drying can be performed on the same apparatus, and low-pressure gas used in the dry clean and cleaning solution and waste solution can be recovered to achieve environment protection and energy saving.Type: GrantFiled: July 29, 2002Date of Patent: May 25, 2004Inventor: Cheng-Ming Chou
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Patent number: 6732448Abstract: The invention relates to a device including a vessel, a vacuum pump (10), at least one condenser (3 and/or 8) and a heat exchanger (16) for heating and drying parts (2) with cellulose or plastic based hygroscopic insulation in transformers, condensers, instrument transformers or electric leadthroughs by means of condensation heat from the steam of a heating fluid (a solvent, kerosine). During heating, at least one higher-boiling second liquid, such as transformer oil, is removed. In order to provide a mobile system enabling local treatment of transformers (2) which are already in operation, the heat exchanger (16) heats the heating fluid in the liquid phase and evaporation occurs near to or in the vessel, for example, via expansion valves (18) and/or in an expansion container or evaporator arranged directly on the vessel.Type: GrantFiled: April 30, 2002Date of Patent: May 11, 2004Assignee: Wilhelm Hedrich Vakuumanlagen GmbH & Co. KGInventor: Helmut Strzala
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Patent number: 6725565Abstract: A method for vacuum drying of a substrate which can eliminate not only the moisture adhered to the substrate surface but also the moisture impregnated inside of the films which form the devices in a shot time without deforming nor deteriorating the devices formed on the substrate in the drying. The method for vacuum drying of a substrate, concerning a method for drying a substrate by processing the substrate surface in a desired condition, cleaning the processed substrate with cleaning liquid, and drying the cleaned substrate, comprises the steps of heating the substrate surface to a predetermined temperature to vaporize the moisture of the surface as vapor and thereby detach the moisture from the substrate to outside, and vacuuming the detached vapor at a predetermined vacuum pressure to eliminate the moisture from the wafer.Type: GrantFiled: December 2, 2002Date of Patent: April 27, 2004Assignee: Sprout, Co., Ltd.Inventors: Riichiro Harano, Toru Watari
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Patent number: 6725566Abstract: The invention relates to drying equipment and can be used in wood and wood treatment industries, etc., whenever parameters and procedures necessary to dry materials such as wood are used. The invention allows the drying process to achieve a higher degree of environmental protection, a larger product output and power saving features on the account of the following design of the plant: the drying chamber (1) which contains the material to be dried includes a bottom (4) which has two cavities (5,6); hot combustion products are injected into one of these cavities (5) from the flue pipe (9) of the furnace (3) which is used to burn wood waste; hot air is supplied into the other cavity (6), whereby said air is heated in pipes which are located in the flue (9), and is used as a drying agent.Type: GrantFiled: April 15, 2002Date of Patent: April 27, 2004Inventors: Viktor Georgievich Skrotsky, Olga Panteleimonovna Skrotskaya
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Publication number: 20040074104Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed.Type: ApplicationFiled: October 14, 2003Publication date: April 22, 2004Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20040074103Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: ApplicationFiled: October 14, 2003Publication date: April 22, 2004Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6722057Abstract: The gas components in thermoplastic norbornene resin pellets are suppressed below certain levels by drying the resin under vacuum or under the ordinary pressure and under vacuum. A substrate for magnetic recording media is manufactured by injection-molding the resin dried by the method according to the invention. The magnetic recording medium, employing the substrate manufactured according to the invention, includes at least a magnetic layer, a protection layer on the magnetic layer and a liquid lubricant layer on the protection layer. The magnetic recording medium is manufactured by forming these layers, one after another, on the substrate according to the invention.Type: GrantFiled: July 25, 2001Date of Patent: April 20, 2004Assignee: Fuji Electric Co., Ltd.Inventors: Youich Tei, Syoji Sakaguchi, Katsunori Suzuki
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Patent number: 6722055Abstract: A supporting apparatus for supporting a substrate in drying a substrate surface of the substrate including a supporting rod having a hollow interior portion and a groove configured to support a substrate on the supporting rod, the groove communicating to the hollow interior portion, a porous material disposed in the hollow interior portion of the supporting rod such that the porous material contacts with the substrate being supported in the groove, and a vacuum device configured to provide suction in the hollow interior portion of the supporting rod.Type: GrantFiled: September 17, 2002Date of Patent: April 20, 2004Assignee: m·FSI Ltd.Inventor: Satoshi Shikami
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Patent number: 6722054Abstract: A process for lyophilizing a solution of an active agent in a delivery container is provided. Solution of active agent is deposited into a delivery container, the container is covered with a covering plate and placed inside a lyophilizing apparatus. Lyophilization is conducted to dryness by radiation, convection or both. Also provided is a device made by this process, an active agent-plastic administration device such as a syringe containing an active agent in the form of lyophilized cake, and an array of such administration devices.Type: GrantFiled: July 20, 2001Date of Patent: April 20, 2004Assignee: Atrix Laboratories, Inc.Inventors: Cody L. Yarborough, Dominic Gregory Madril, Rajan Bawa
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Publication number: 20040060195Abstract: A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.Type: ApplicationFiled: March 31, 2003Publication date: April 1, 2004Applicant: LAM RESEARCH CORPORATIONInventors: James P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker, Carl A. Woods
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Patent number: 6701638Abstract: A machine for the conditioning of laminar flexible products such as industrial hides and skins, including at least one conditioning unit crossed by the products to be processed, blowers for blowing and extracting air directed toward products, and a series of air jets blowing simultaneously on both sides of the products under treatment in a transverse direction with respect to the advancement direction of the products. The products are caused to advance along a substantially horizontal plane by means of pairs of annular threads uniformly distributed across the useful width of the conditioning paths. The threads of each pair are placed on opposite sides and in contact with the products to support and transfer them along the path leaving their side surfaces substantially free. As an alternative, the advancement means are formed by pairs of endless belts in mutually facing relationship to firmly hold the products while permitting passage of blown air.Type: GrantFiled: May 15, 2002Date of Patent: March 9, 2004Assignee: Officine di Cartigliano SpAInventor: Antonio Polato
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Publication number: 20030233764Abstract: An instantaneous pressure reducing heating and drying apparatus for an object, such as a wafer, includes a pressure reducing chamber; a vacuum pump for reducing a pressure in the pressure reducing chamber to below atmospheric pressure; a drying chamber installed within the pressure reducing chamber for drying the object that is loaded in the drying chamber; a pressure regulating valve installed in a wall of the drying chamber, wherein when the pressure regulating valve is opened a pressure in the drying chamber is instantaneously reduced to the pressure of the pressure reducing chamber; and a heating means for heating the drying chamber. In operation, the vacuum pump reduces a pressure of the pressure reducing chamber to below atmospheric pressure, and the pressure regulating valve installed in a wall of the drying chamber opens thereby instantaneously reducing the pressure the drying chamber to the reduced pressure of the pressure reducing chamber.Type: ApplicationFiled: June 19, 2003Publication date: December 25, 2003Inventors: Kwang-Wook Lee, Yong-Sun Ko, In-Seak Hwang
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Patent number: 6662465Abstract: A vacuum processing apparatus which includes a conveyor structure for transferring a substrate from a substrate storage device held on a substrate storage device mount table. The apparatus further includes a vacuum loader provided with an additional conveyor structure and a vacuum processing chamber for sequentially loading substrate to be processed. The conveyor structures are each provided with a robot.Type: GrantFiled: February 13, 2001Date of Patent: December 16, 2003Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6655044Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.Type: GrantFiled: January 23, 2001Date of Patent: December 2, 2003Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6643950Abstract: A cake resistance measuring system and method are used to measure the cake resistance of a freeze dried sample during or after processing, with the results of the measurement being used to improve that processing and/or subsequent freeze drying processes or formulations.Type: GrantFiled: December 4, 2001Date of Patent: November 11, 2003Assignee: Eisai Co., Ltd.Inventors: William J. Lambert, Zeren Wang
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Patent number: 6634116Abstract: A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure, and a robot apparatus is arranged on the transfer structure. The robot provides for rotation of the wafer in a horizontally from a position in a cassette to an opposite position of the cassette.Type: GrantFiled: February 13, 2001Date of Patent: October 21, 2003Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Patent number: 6634118Abstract: Wood is disposed in a container having at least one flexible wall, and vacuum is applied to the container. The flexible wall presses against a surface of the wood. The container and wood are them immersed in a heated bath (e.g. comprising water, air, or other fluids). The wood is heated by conduction through the flexible wall, and maintained at accurate temperature by the bath. The wood is thereby rapidly dried by heat and vacuum. The present invention is energy efficient, and provides rapid, uniform drying of the wood without checking.Type: GrantFiled: June 28, 2002Date of Patent: October 21, 2003Assignee: Virginia Tech Intellectual Properties, Inc.Inventors: Zhangjing Chen, Fred M. Lamb
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Publication number: 20030182819Abstract: The present invention relates to a process for preserving wood, said process comprising the following steps: (1) a modification step in which wood is heated to the modification temperature and is maintained at that temperature for a specific time; (2) a cooling step in which the wood is cooled; characterized in that the wood is heated and cooled by means of heating elements which are positioned in-between the wood. Prior to the modification step, a drying step can be carried out. According to further embodiments, the process is characterized in that one or more of the steps takes place under vacuum in a sealed chamber. Preferably, a pressure is applied to the wood during the steps, with the option of varying said pressure during the process. The invention also relates to an apparatus for implementing the process.Type: ApplicationFiled: November 7, 2002Publication date: October 2, 2003Inventor: Sander Germain Leon Michon
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Patent number: 6625899Abstract: A vacuum processing apparatus which includes a means for transferring substrates from a loader with a transferring device to a double lock chamber and then to a selected vacuum processing chamber. The substrates are then returned to a substrate by the vacuum loader and back into the substrate table. The surfaces of the substrates are maintained in a horizontal position during processing.Type: GrantFiled: January 23, 2001Date of Patent: September 30, 2003Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20030172543Abstract: A grooming device having a first unit and upper hand-held unit connected to the first unit. A vacuum unit in the first unit creates a vacuum air flow in a vacuum chamber in the hand-held unit, while a heating unit in the first unit generates a heated air flow to a heat chamber in the hand-held unit. The heat chamber and vacuum chamber are contained within a vessel in the hand-held unit. The heat chamber is separated from the vacuum chamber by a wall having regularly spaced pores. When both the vacuum unit and heating unit of the device are switched on, the vacuum flow in the vacuum chamber pulls heated air from the heat chamber through pores in the wall so that dry, heated air flows along the length of the vessel. Thus, hair placed in the vacuum chamber of the hand-held unit is exposed to the combined effect of the vacuum and flow of heated air. In a further embodiment, the wall of the vacuum chamber is heated by a heating element thereby causing the vacuum flow to be heated.Type: ApplicationFiled: March 10, 2003Publication date: September 18, 2003Inventors: Kathleen M. Busa, Caroline Busa, Mark Andre Colbert
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Publication number: 20030172542Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.Type: ApplicationFiled: March 11, 2003Publication date: September 18, 2003Applicant: TOKYO ELECTRON LIMITEDInventors: Tomohide Minami, Hiroshi Shinya, Takahiro Kitano
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Patent number: 6615506Abstract: A pneumatic hair-conditioner system has a vacuum pump (1, 4, 6, 30) attached predeterminedly to a hair processor (2, 25, 28, 29, 31) which employs airflow to the vacuum pump for predetermined hair processing by the hair processor. The vacuum pump and the hair processor can be either a dedicated-process conditioner with permanently integral attachment and pneumatic communication of a single select processor for predeterminedly limited hair-processing use or a multi-process conditioner with detachable attachment and integral communication of a plurality of select processors for predeterminedly multiple hair-processing uses. Optionally, the vacuum pump can be reversible for blowing instead of sucking air in pneumatic communication with the hair processor. For blowing, application of heat also is optional.Type: GrantFiled: June 26, 2002Date of Patent: September 9, 2003Inventor: Elizabeth A. Miller
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Patent number: 6591515Abstract: An apparatus is disclosed for drying materials wet with one or more solvents, particularly hygroscopic materials and materials wet with a high boiling point (low vapor pressure) solvent that are sensitive to heat. Wet material is loaded into a chamber, which is then sealed and caused to oscillate back and forth. Vacuum is enlisted to provide rapid evaporation of solvent at a lower temperature than possible at standard atmospheric pressure. The material is oscillated until a sudden decrease in the residual pressure of the chamber, which indicates completion of the drying cycle. Because vacuum is applied to an oscillating chamber, a rotary vacuum seal is not required to accomplish drying in accordance with the practice of the instant invention.Type: GrantFiled: September 10, 2001Date of Patent: July 15, 2003Assignee: Kemet Electronics CorporationInventors: John Tony Kinard, Michael John Maich, Brian John Melody, Duane Earl Stenzinger, David Alexander Wheeler, Keith Lee Moore
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Patent number: 6588121Abstract: A vacuum processing apparatus includes a means for transferring wafer cassettes from a transferring chamber to a lock chamber. The wafer cassettes are mounted within a cassette table and are arranged in a single line. The vacuum processing apparatus further includes lock chambers connected to a plurality of processing chambers with each substrate being carried into and out of the lock chambers.Type: GrantFiled: February 12, 2001Date of Patent: July 8, 2003Assignee: Hitachi, Ltd.Inventors: Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou
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Publication number: 20030121171Abstract: A method for performing multiple cleaning and vacuum drying operations in enclosed vessels uses cleaning and vacuum drying apparatus, low-dissolved-air cleaning solution, and drain-to-vacuum process to produce vacuum in a cleaning vessel, so that influence of air pressure on the operations is minimized. The method utilizes physical features that boiling points of general liquids lower with reduced pressure, that liquid saturated vapor pressure reduces with lowered temperature, and that two vacuum vessels of different working temperatures would have a pressure differential between their saturated vapor pressures, and uses heat control units and heat egress units to regulate temperature and pressure in the vacuumized cleaning vessel, so that wet clean, dry clean, vacuum heat drying, and vacuum freeze drying can be performed on the same apparatus, and low-pressure gas used in the dry clean and cleaning solution and waste solution can be recovered to achieve environment protection and energy saving.Type: ApplicationFiled: July 29, 2002Publication date: July 3, 2003Inventor: Cheng-Ming Chou
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Publication number: 20030115770Abstract: A method for vacuum drying of a substrate which can eliminate not only the moisture adhered to the substrate surface but also the moisture impregnated inside of the films which form the devices in a shot time without deforming nor deteriorating the devices formed on the substrate in the drying. The method for vacuum drying of a substrate, concerning a method for drying a substrate by processing the substrate surface in a desired condition, cleaning the processed substrate with cleaning liquid, and drying the cleaned substrate, comprises the steps of heating the substrate surface to a predetermined temperature to vaporize the moisture of the surface as vapor and thereby detach the moisture from the substrate to outside, and vacuuming the detached vapor at a predetermined vacuum pressure to eliminate the moisture from the wafer.Type: ApplicationFiled: December 2, 2002Publication date: June 26, 2003Inventors: Riichiro Harano, Toru Watari
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Publication number: 20030115768Abstract: A material drying apparatus having a sealable chamber for receipt of wet material, such as clothing, and in particular fire-fighting outfits. In this embodiment clothing placed into the chamber is dried upon the evacuation of air from the chamber wherein moisture drawn from the clothes is condensed on a condensate coil placed in the chamber. Heating coils placed around the chamber elevate the temperature to enhance condensate operation providing an energy efficient material dryer requiring no make-up air. Condensed water is purged after the drying process although provisions provide for an interim purge should excess liquid be drawn from the material.Type: ApplicationFiled: December 18, 2002Publication date: June 26, 2003Inventor: Karl H. Hoffman
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Publication number: 20030115771Abstract: There is provided a method for drying wood which is capable of efficiently drying wood in a shorter period of time, by maintaining the concentration of a combustion gas contained in a drying room atmosphere for use in drying the wood to a high value and by maintaining the pressure of the drying room atmosphere to a high value. According to the method, wood fuels such as waste wood are put into a combustion chamber 4a provided in a lower area of a combustion gas generating furnace 4 and then the wood fuels are burned, followed by introducing the high-temperature combustion gas generated by the burning into an upper area of the drying room 1 housing the green wood, to thereby thermally dry the wood by the combustion gas. In this method, the thermal drying of the wood is carried out by maintaining the concentration of the combustion gas present in the drying room atmosphere to the high value and by maintaining the pressure of the drying room atmosphere to the high value.Type: ApplicationFiled: October 21, 2002Publication date: June 26, 2003Inventor: Sachio Ishii
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Patent number: 6564471Abstract: A method and an apparatus for effecting freeze-drying specimens containing solvents or condensing solvents having a shallow pan treatment chamber with little or no obstructions, holes or orifices. The treatment is effected by cooling the base of the chamber by using coolant-containing coils mounted beneath the base of the chamber. The direct thermal conduction of heat through the base of the chamber provides a more effective method of both cooling specimens and condensing solvents, typically water. A source of vacuum is provided to the chamber by a conduit located in the cover, sidewalls or base of the chamber. The method and apparatus may employ a moveable specimen holder positioned in the chamber. The moveable specimen holder may be mounted on a perforated tube which slidably engages a conduit in the base of the chamber. The perforated tube may a conduit to the source of vacuum.Type: GrantFiled: March 12, 2001Date of Patent: May 20, 2003Assignee: S. P. Industries, Inc., The Virtis DivisionInventors: David T. Sutherland, Miriam Blednick
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Patent number: 6543154Abstract: Freeze-dried products of high quality produced from materials to be freeze-dried in a freeze-drying apparatus comprising a sealed vessel enclosing a processing chamber provided therein with a rotary cage receiving a gas-permeable container containing one or more frozen products of the said material, prepared by freezing the said material with dry ice, and a heating device for heating the frozen product by radiant heat rays, wherein the freeze-dried product is produced by a process which can attain efficient sublimating removal of large amount of carbon dioxide gas evolved from dry ice and of moisture included in the material, while preventing adhesion of the frozen products to each other and while permitting reduction of the sublimation duration, wherein the frozen product retained in the gas-permeable container placed in the rotary cage is heated uniformly by the heating device under vacuum condition while holding it under rotational movement to thereby facilitate the sublimation of dry ice and of the frozenType: GrantFiled: October 17, 2001Date of Patent: April 8, 2003Assignee: National Agricultural Research OrganizationInventor: Akira Horigane
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Patent number: 6543155Abstract: Freeze-dried products of high quality produced from materials to be freeze-dried in a freeze-drying apparatus comprising a sealed vessel enclosing a processing chamber provided therein with a rotary cage receiving a gas-permeable container containing frozen pieces of the said material, prepared by freezing the said material with a refrigerant, and a heating device for heating the frozen material by radiant heat rays, wherein the freeze-dried product is produced by a process which can attain, even when dry ice is used as the refrigerant, efficient sublimating removal of large amount of carbon dioxide gas evolved from dry ice and of moisture included in the material, while preventing adhesion of the frozen pieces of the said material to each other and while permitting reduction of the sublimation duration, wherein the frozen material retained in the gas-permeable container placed in the rotary cage is heated uniformly by the heating device under vacuum condition while it is being maintained under rotational movType: GrantFiled: September 20, 2002Date of Patent: April 8, 2003Assignee: National Agricultural Research OrganizationInventor: Akira Horigane
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Publication number: 20030056391Abstract: The present invention provides a drying method of a substrate surface and a supporting fixture of substrate used in such a method, which, in the drying treatment applied after a chemical and/or water dipping treatment of a semiconductor wafer or a liquid crystal substrate, permits improvement of substrate product yield and is excellent in economic merits, particularly without causing defective drying of the substrate surface near the carrier holding section.Type: ApplicationFiled: September 17, 2002Publication date: March 27, 2003Applicant: m .FSI LTD.Inventor: Satoshi Shikami
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Patent number: 6532684Abstract: The present invention relates to a system for cleaning a pressurized container having at least one chemical contained therein. More specifically, the container may store a quantity of a chemical that is reactive with water and forms dangerous reaction products, such as, for example, acids. The pressurized container may be any type of container able to store chemicals under pressure. Preferably, however, the container may be a rail tank car. The system includes the container that may have a plurality of valves for adding or removing gaseous or liquid material to or from the container. The container may be connected with a nitrogen tank or a fan for blowing air that may be heated via a heater. A vacuum pump is utilized for removing the contents of the container. The container may further be connected to a reaction tank for neutralizing the chemical that is be removed from the container.Type: GrantFiled: July 9, 2001Date of Patent: March 18, 2003Assignee: General Electric CompanyInventors: Joseph P. Tunney, Paul Buchan, Thomas J. Davis, Raymond Blaine Vermette
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Publication number: 20030046824Abstract: An apparatus is disclosed for drying materials wet with one or more solvents, particularly hygroscopic materials and materials wet with a high boiling point (low vapor pressure) solvent that are sensitive to heat. Wet material is loaded into a chamber, which is then sealed and caused to oscillate back and forth. Vacuum is enlisted to provide rapid evaporation of solvent at a lower temperature than possible at standard atmospheric pressure. The material is oscillated until a sudden decrease in the residual pressure of the chamber, which indicates completion of the drying cycle. Because vacuum is applied to an oscillating chamber, a rotary vacuum seal is not required to accomplish drying in accordance with the practice of the instant invention.Type: ApplicationFiled: September 10, 2001Publication date: March 13, 2003Inventors: John Tony Kinard, Michael John Maich, Brian John Melody, Duane Earl Stenzinger, David Alexander Wheeler, Keith Lee Moore
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Patent number: 6523278Abstract: The invention concerns a dryer section, comprising at least one dryer group (R) that makes use of single-wire draw and/or twin-wire draw and at least one suction roll (10) with which the web (W) to be dried is in direct contact. The surface construction of the suction roll (10) is of a fine structure so that the web (W) can be passed to run over the suction roll (10) in direct contact with the roll so that the web (W) is not damaged.Type: GrantFiled: February 20, 2001Date of Patent: February 25, 2003Assignee: Metso Paper, Inc.Inventors: Laurie Coulson, Kari Juppi, Jaakko Kallioniemi, Pekka Koivukunnas, Antti Komulainen, Juha Lipponen, Petri Norri
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Publication number: 20030019124Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.Type: ApplicationFiled: September 16, 2002Publication date: January 30, 2003Inventors: Shunji Miyakawa, Yasuhide Nakajima, Soichi Matsuo
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Publication number: 20030014879Abstract: Freeze-dried products of high quality produced from materials to be freeze-dried in a freeze-drying apparatus comprising a sealed vessel enclosing a processing chamber provided therein with a rotary cage receiving a gas-permeable container containing frozen pieces of the said material, prepared by freezing the said material with a refrigerant, and a heating device for heating the frozen material by radiant heat rays, wherein the freeze-dried product is produced by a process which can attain, even when dry ice is used as the refrigerant, efficient sublimating removal of large amount of carbon dioxide gas evolved from dry ice and of moisture included in the material, while preventing adhesion of the frozen pieces of the said material to each other and while permitting reduction of the sublimation duration, wherein the frozen material retained in the gas-permeable container placed in the rotary cage is heated uniformly by the heating device under vacuum condition while it is being maintained under rotational movType: ApplicationFiled: September 20, 2002Publication date: January 23, 2003Inventor: Akira Horigane