Abstract: A cavitation structure for a print head has a first dielectric layer overlying at least a first portion of a substrate. A second dielectric layer has a first portion overlying at least a second portion of the substrate and a second portion, different from the first portion of the second dielectric layer, overlying at least a portion of the first dielectric layer. A cavitation layer has a first portion in contact with the first dielectric layer and a second portion in lateral contact with the second portion of the second dielectric layer. A third dielectric layer is disposed on only the first portion of the second dielectric layer.

Abstract: In a liquid jet recording head, a liquid is prevented from eroding a substrate, significant deformation of a discharge port forming member caused by absorption of the liquid is prevented even in long-term use, and reliability is improved in a discharging operation of a liquid droplet. The liquid jet recording head includes a substrate in which a plurality of heaters are formed; a plurality of discharge ports which are formed corresponding to the heaters, the discharge ports discharging liquid droplets; a liquid flow path; and a supply port. The liquid flow path is communicated with each discharge port, and a heater is provided in an inner wall surface of the liquid flow path. The supply port pierces through the substrate while communicating with the liquid flow path. All the inner surfaces of the supply port and a part of the inner surface of the liquid flow path are covered with the same protective layer.

Abstract: A method of making a micro-fluid ejection head structure and micro-fluid ejection heads made by the method. The method includes applying a tantalum oxide layer to a surface of a fluid ejection actuator disposed on a device surface of a substrate so that the tantalum oxide layer is the topmost layer of a plurality of layers including a resistive layer, and a protective layer selected from a passivation layer, a cavitation layer, and a combination of a passivation layer and a cavitation layer. The tantalum oxide layer has a thickness (t) that satisfies an equation t=(¼*W/n), wherein W is a wavelength of radiation from a radiation source, and n is a refractive index of the tantalum oxide layer. A photoimageable layer is also applied to the substrate. The photoimageable layer is imaged with the radiation source and then developed.

Abstract: An inkjet nozzle arrangement is provided having a substrate, an ink passivation layer on the substrate, a nozzle chamber on the passivation layer, and an arm anchored to the passivation layer. The substrate has an ink passage and incorporates drive circuitry. The passivation layer has a first aperture in fluid communication with the ink passage. The is in fluid communication with the first aperture and has second and third apertures. The arm extends into the nozzle chamber through the second aperture and is connected to the drive circuitry. The arm is displaced relative to the nozzle chamber upon receipt of a signal from the drive circuitry thereby causing ejection of ink from the third aperture of the nozzle chamber.

Abstract: Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes: a substrate, on which a plurality of heaters for heating ink to generated ink bubbles are formed; a chamber layer including a plurality of ink chambers formed on the substrate; and a nozzle layer including a plurality of nozzles formed on the chamber layer. In addition, at least one of the chamber layer and the nozzle layer is formed of an imide silicone resin.

Abstract: A thermal head in which battery effect-induced corrosion can be retarded while maintaining excellent anti-static capability in an upper conductive protective film, is provided. The thermal head includes a substrate, a heater element arranged on the surface of the substrate, an electrode layer connected to the heater element, and an upper conductive protective film for covering part of the electrode layer. In the thermal head, between the electrode layer and the upper conductive protective film is interposed a lower conductive protective film which is higher in specific resistance than the upper conductive protective film.

Abstract: A micromachined fluid ejector includes an ejector body having a fluid cavity for holding fluid to be ejected and a piezoelectric actuator for ejecting the fluid. A nozzle plate is placed in operable association with the ejector body. The configuration of the nozzle plate is selected to adjust a volume of the fluid cavity to obtain a desired mechanical impedance matching between the fluid and the actuator.

Abstract: The liquid ejection head comprises: a plurality of ejection ports which eject liquid; a plurality of pressure chambers which are communicated with the ejection ports; a plurality of piezoelectric elements which are arranged to sides of the pressure chambers opposite sides of the pressure chambers where the ejection ports are formed, the piezoelectric elements each having driving electrodes, the piezoelectric elements each deforming the pressure chambers when drive signals are applied through the driving electrodes; a protective member which covers the piezoelectric elements and has a first wiring layer electrically connected to a first external wiring; a common liquid chamber which is arranged on the protective member on the sides of the plurality of pressure chambers opposite the sides of the pressure chambers where the ejection ports are formed, a wall of the common liquid chamber opposite the protective member having a second wiring layer electrically connected to a second external wiring, the common liqui

Abstract: An ink-jet print head and a method of manufacturing the same capable of minimizing exfoliation or breakage of a protective layer. The ink-jet print head includes a heater layer which is provided on a substrate, a wire layer which is provided on the heater layer and is formed to expose a predetermined region of the heater layer, a protective layer which covers predetermined regions of the wire layer and the heater layer, and an over coat layer which covers evenly uneven portions on the protective layer.

Abstract: In order to form a more homogenous heat generating resistive layer, the present invention provides a method of manufacturing a substrate for an ink jet recording head having a support which has an insulative layer on its surface, a pair of electrode layers disposed on the surface of the support, and a heat generating resistive layer which continuously covers the pair of electrode layers and a section between the pair of electrode layers. The method includes the step of forming an electrode layer on the support and the step of forming the pair of electrode layers by etching the electrode layer. In the step of forming the pair of electrode layers by etching the electrode layer, by etching a surface portion of the insulative layer positioned between the pair of insulative layers, a recess is formed in the surface portion of the insulative layer.

Abstract: A fluid jet device and a method for manufacturing the same are provided. The fluid jet device includes a substrate, a resistor layer and an orifice layer. The resistor layer is formed on the substrate. The resistor layer includes tantalum, silicon and nitrogen. The orifice layer is disposed on over the substrate to form a manifold between the orifice layer and the substrate. The manifold is used for containing a fluid. The orifice layer has a nozzle communicated with to the manifold. When the resistor layer is charged, the resistor layer heats the adjacent fluid to generate a bubble therein so as to allow the fluid to be pushed out of the nozzle.

Abstract: A multi-nozzle ink jet head using piezoelectric elements and a manufacturing method thereof are disclosed. A head (1) has a nozzle member (10) in which a plurality of nozzles (12) are formed, a pressure chamber wall member (14) in which a plurality of pressure chambers (15) are formed, and piezoelectric type actuators that have a diaphragm (18) and a plurality of piezo elements (19) and apply pressure to each of the plurality of pressure chambers for ejecting ink from the nozzles. A rigid coating member (23, 25) is provided on inner surfaces of the pressure chamber walls or on parts of the diaphragm in contact with the pressure chamber wall member, thus increasing the rigidity of the pressure chamber walls.

Abstract: Micro-fluid ejection heads and methods for extending the life of micro-fluid ejection heads. One such micro-fluid ejection head includes a substrate having a plurality of thermal ejection actuators. Each of the thermal ejection actuators has a resistive layer and a protective layer thereon. A flow feature member is adjacent the substrate and defines a fluid feed channel, a fluid chamber associated with at least one of the actuators and in flow communication with the fluid feed channel, and a nozzle. The nozzle is offset to a side of the chamber opposite the feed channel. A polymeric layer having a degradation temperature of less than about 400° C. overlaps a portion of the at least one actuator associated with the fluid chamber and positioned less than about five microns from at least an edge of the at least one actuator opposite the fluid feed channel.

Abstract: A heater chip has a plurality of heaters each having a length, width and thickness. The length multiplied by the width (heater area) is in a range from about 50 to about 500 micrometers squared while the thickness is in a range from about 500 to about 5000 or 6000 angstroms. The energy required to jet or emit a single drop of ink from the heater during use is in a range from about 0.007 to about 0.99 or 1.19 microjoules. The heater chip is formed as a plurality of thin film layers on a substrate. Energy ranges are taught for all heaters having an area from about 50 to about 4000 micrometers squared and thicknesses ranging from about 500 to about 16,000 angstroms. Printheads containing the heater chip and printers containing the printheads are also disclosed.

Abstract: For improving adhesion between a protective layer having a portion coming into contact with ink in a substrate for an ink jet head, and a resin layer thereby ensuring reliability in quality over a prolonged period, the invention provides a substrate for an ink jet head including a heat-generating resistor constituting a heat generating portion, an electrode wiring electrically connected with the heat-generating resistor and an upper protective layer provided on the heat-generating resistor and the electrode wiring across an insulating protective layer, wherein after forming an upper protective layer in which a Ta layer is laminated on a layer formed by a TaCr alloy, said Ta layer is selectively patterned and selectively removed so that the liquid flow path member is formed in a portion where the layer formed by said TaCr alloy is exposed by said removing.

Abstract: An ink cartridge for storing ink includes a thermal ink-jet head provided with a heating portion that generates thermal energy for discharging the ink. The heating portion has, on its surface in contact with the ink, a protective layer containing at least one of a silicon oxide, a silicon nitride, and a silicon carbide. The ink contains a substance that dissolves the protective layer and a compound represented by the following formula (1), and the content X (% by mass) of the compound of the formula (1) satisfies a relationship of 1?X?30: R1-A-R2 ??Formula (1) wherein A represents one selected from —S—, —S(?O)—, and —S(?O)2—, and R1 and R2 each independently represent a group selected from a hydrogen atom, a hydroxyl group, an alkyl group, a hydroxyalkyl group, an alkenyl group, an acyl group, a carbamoyl group, a carboxyl group, and a sulfonyl group.

Abstract: A device mounting structure includes: a base; a unit having a mounting area on which a device is mounted; a projection formed on a face of the unit; a first wiring disposed on the unit and between a top part of the projection and the mounting area; a groove provided in the base, the groove incorporating at least part of the projection; and a second wiring disposed at a bottom part of the groove in the base and electrically connected to the first wiring. The first wiring has a resin layer containing metallic particles, and a metal film on the resin layer.

Abstract: The present disclosure is directed to a micro-fluid ejection head for a micro-fluid ejection device. The head includes a semiconductor substrate, a fluid ejection actuator supported by the semiconductor substrate, a nozzle member containing nozzle holes attached to the substrate for expelling droplets of fluid from one or more nozzle holes in the nozzle member upon activation of the ejection actuator. The substrate further includes a thermal insulating barrier layer between the semiconductor substrate and the fluid ejection actuator. The thermal insulating barrier layer includes a porous, substantially impermeable material having a thermal conductivity of less than about 1 W/m-K.

Abstract: A microfluidic architecture is disclosed. The microfluidic architecture includes a substrate having an edge and a thin film stack established on at least a portion of the substrate adjacent the edge. The thin film stack includes a non-conducting layer and a seed layer, where the seed layer is positioned such that a portion of the non-conducting layer is exposed. A chamber layer is established on at least a portion of the seed layer. The non-conducting layer, the seed layer, and the chamber layer define a microfluidic chamber. A layer having a predetermined surface property is electroplated on the chamber layer and on at least one of another portion of the seed layer and the exposed portion of the non-conducting layer.

Abstract: A fluid ejection assembly includes a first layer, and a second layer positioned on a side of the first layer. The second layer has a side adjacent the side of the first layer and includes barriers defining a fluid chamber on the side, a drop ejecting element formed within the fluid chamber, and a thermal conduction path extended between the fluid chamber and the barriers.

Abstract: An inkjet printhead chip includes a substrate, transistors, isolation structures, a dielectric layer, a resistive layer and conductive sections. Each transistor includes a gate, a source, a drain and a gate oxide disposed between the gate and the substrate. The isolation structures are on the substrate surface and isolate the transistors. The dielectric layer covers the transistors and the isolation structures, and has openings exposed the source and the drain. Several heating regions are in the resistive layer that is on the dielectric layer. In the conductive sections, the first conductive section is on the resistive layer and exposes the heating regions for forming several heating devices. Each heating device has resistance less than 95 ohm and power density less than 2 GW/m2; the second conductive section and the third conductive section are electrically coupled to the drain and the source through the openings of the dielectric layer respectively.

Abstract: A method of etching a substrate and an article(s) formed using the method are provided. The method includes providing a substrate; coating a region of the substrate with a temporary material having properties that enable the temporary material to remain substantially intact during subsequent processing and enable the temporary material to be removed by a subsequent process that allows the substrate to remain substantially unaltered; removing a portion of the substrate to form a feature, at least some of the removed portion of the substrate overlapping at least a portion of the coated region of the substrate while allowing the temporary material substantially intact; and removing the temporary material while allowing the substrate to remain substantially unaltered.

Abstract: An ink jet recording head includes a substrate having a plurality of energy-generating elements that generate energy for discharging ink droplets and an ink supply port extending in a direction in which the energy-generating elements are arranged, a plurality of discharge ports that are provided correspondingly to the energy-generating elements, a discharge-port-forming member provided on the substrate and including a plurality of ink passages that include the energy-generating elements and connect the supply port and each of the discharge ports, and a rib provided on a surface of the discharge-port-forming member opposite the supply port and extending in a direction in which the energy-generating elements are arranged. A surface of the rib opposite the supply port has a protective layer.

Abstract: Heater chips for a micro-fluid ejection device, such as those having a reduced energy requirement and more efficient production process therefor. One such heater chip includes a resistive layer deposited adjacent to a substrate and a protective layer deposited adjacent to the resistive layer. The protective layer can be a tantalum oxide protective layer which has a high breakdown voltage. An optional cavitation layer of tantalum, which bonds well with the tantalum oxide layer, may be deposited adjacent to the protective layer. Alternatively, for example, the tantalum oxide layer may serve as both the protective layer and the cavitation layer.

Abstract: The present invention provides a substrate for ink jet including a heating resistor generating thermal energy for discharging an ink from an ink discharge port and an upper protective layer which is formed above the heating resistor and has a contacting surface with the ink. Furthermore, the upper protective layer is made of an amorphous alloy consisting of Ta and Cr in which the content of Ta is more than that of Cr. This constitution allows for the substrate excellent in cavitation resistance and corrosion resistance, and capable of high durability while having similar discharge performance to that of a conventional protective layer made of a Ta film. The present invention further provides an ink jet head comprising the above-mentioned substrate, and a manufacturing method thereof.

Abstract: A heat transfer type ink-jet print head and a method of fabricating the same. A method of fabricating an ink-jet print head includes operations of sequentially laminating a heat generation layer and an electrode layer on a substrate, laminating a protective layer on the top surfaces of the electrode layer and the heat generation layer by sequentially laminating a first protective layer and a second protective layer on the top surfaces of the electrode layer and the heat generation layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer to form an ink chamber, wherein defects such as “pin-holes” generated during the formation of the first protective layer are removed by applying a plasma on the first protective layer, and the second protective layer is laminated on the top surface of the first protective layer after any defect produced when laminating the first protective layer is removed.

Abstract: A liquid discharge head substrate has improved protection performance of protective films for protecting heaters while effective bubble-forming regions are being secured. The protective films for protecting a plurality of heating elements provided on a substrate are formed using a platinum group element and are separately provided for the respective heating elements.

Abstract: There is disclosed an ink jet printhead which comprises a plurality of nozzles (3) and one or more heater elements (10) corresponding to each nozzle. Each heater element is configured to heat a bubble (12) forming liquid in the printhead to a temperature above its boiling point to form a gas bubble therein. The generation of the bubble causes the ejection of a drop (16) of an ejectable liquid (such as ink) through respective corresponding nozzle, to effect printing. Each heater element is in the form of a beam suspended over at least a portion of the bubble forming liquid so as to be in thermal contact therewith. This configuration of printhead provides for a relatively high efficiency of operation.

Abstract: A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

Abstract: A thermal ink jet printhead (40) for the emission of drops of ink on a print medium (46) comprises a tank (103) containing ink (142), a lamina (67), a groove (45) and a plurality of ejectors (73), each of which comprises in turn a chamber (74) placed laterally with respect to the groove (45), and fluidly connected thereto by means of a plurality of elementary ducts (75) produced on said lamina (67).

Abstract: A circuit board for a liquid discharging apparatus in which coating performance of a protective layer and a cavitation resistive film on a heat generating element is excellent and durability is excellent and a manufacturing method of such a circuit board are provided. A surface portion of a wiring material layer is processed so that an etching speed of the surface portion is made higher than that of the material forming the wiring material layer. It is desirable to execute a process for forming at least one selected from a fluoride, a chloride, and a nitride of the material forming the wiring material layer into the surface portion of the wiring material layer.

Abstract: A structure is constructed having a through hole in a substrate of silicon or the like by a decreased number of steps in production and with improved reliability. A silicon nitride film is formed in contact with an upper surface of a silicon oxide film at least on a portion of the substrate near the edge of a through hole, thereby improving step coverage of the silicon nitride film. The silicon oxide film and silicon nitride film function as a membrane during formation of the through hole by etching from the back side of the substrate.

Abstract: An inkjet printhead heater chip includes a resistor layer, a dielectric layer on the resistor layer and a cavitation layer on the dielectric layer. A grounded-gate MOSFET electrically attaches to the cavitation layer to protect the dielectric layer from breakdown during an electrostatic discharge (ESD) event. Protection typically embodies the safe distribution of ESD current to ground during user printhead installation. Locations of the grounded-gate MOSFET(s) include terminal ends of one or more columns of ink ejecting elements formed by the resistor layer. Also, the MOSFET source electrically connects to the gate while the drain attaches to the cavitation layer. The drain attaches via first and second metallization lines, including attachment generally above the cavitation layer. The dielectric layer is diamond like carbon layer and is about 2000 angstroms thick. Inkjet printheads and printers are also disclosed.

Abstract: The present invention relates to a liquid jetting head, a liquid jetting apparatus, and a method of manufacturing the liquid jetting head. The invention can be particularly adopted to an ink jet printer of a thermal system. A treatment for building up a coating type insulating material film and a treatment for substantially removing the insulating material film in the forming regions of heating elements by etching are repeated at least a plurality of times, whereby deterioration of the heating elements can be prevented even in the case where generation of steps is prevented by an SOG film.

Abstract: An ink-jet print head and a method of making the same comprising the steps of sequentially laminating a heating layer and an electric conductive layer on a substrate, patterning the electric conductive layer to expose a predetermined area of the top surface of the heating layer, forming a protective layer on the top surfaces of the electric conductive layer and exposed heating layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer, thereby forming an ink chamber. The protective layer is provided by forming a cavitation layer by alternately laminating at least two types of thin film layers of different materials over the exposed heating layer and the electric conductive layer to resist fractures and oxidization resulting from use.

Abstract: A fluid ejection device comprises a substrate having a first surface; a fluid ejector formed over the first surface; and a cover layer defining a firing chamber formed about the fluid injector, and defining a nozzle over the firing chamber. The cover layer is formed by at least two SU8 layers.

Abstract: A base member for an ink jet head in which a heat accumulation layer, a heat generating member generating heat energy used to discharge ink, and protection film for protecting the heat generating member are formed in succession on a substrate, characterized in that the heat resistance value of a portion of the heat accumulation layer which is under the heat generating member is two times or greater and less than five times as great as the heat resistance value of a portion of the protection film which is on the heat generating member.

Abstract: A nozzle arrangement for an inkjet printhead includes a wafer substrate defining an ink passage and incorporating drive circuitry. A passivation layer is operatively positioned on the substrate and defines a first aperture of lesser cross sectional area than the ink passage and which is in fluid communication with the ink passage. A nozzle chamber wall extends from the passivation layer. A nozzle chamber roof is positioned on the nozzle chamber wall so as to define a nozzle chamber that is in fluid communication with the first aperture. The roof defines an ejection port that is in fluid communication with the nozzle chamber and the wall defines a second aperture. An actuator is anchored to the passivation layer, extends through the second aperture and terminates in a paddle. The actuator is connected to the drive circuitry and is configured so that, upon receipt of a drive signal from the drive circuitry, the actuator displaces the paddle to eject ink through the ejection port.

Abstract: To ensure satisfactory reliability even if the wiring pattern is formed of a wiring material having an enhanced electromigration resistance, by providing a protective layer for protecting heating elements from dry etching for forming a wiring pattern, on the ink chamber side or other liquid chamber side of each heating element.

Abstract: The present invention relates to an ink jet nozzle to eject ink. The nozzle comprises a body defining a chamber in which the ink to be ejected can be located and an aperture through which the ink is ejected in use. The nozzle further comprises an actuator member having shape memory which extends from the body into the chamber. The actuator member is arcuate in shape when in a quiescent state and straightens in shape when actuated. The actuator member is located in the chamber so as to push ink through the aperture when actuated to thereby eject ink from the body.

Abstract: A micro-fluid ejection device for ultra-small droplet ejection and method of making a micro-fluid ejection device. The micro-fluid ejection device includes a semiconductor substrate containing a plurality of thermal ejection actuators disposed thereon. Each of the thermal ejection actuators includes a resistive layer and a protective layer for protecting a surface of the resistive layer. The resistive layer and the protective layer together define an actuator stack thickness. The actuator stack thickness ranges from about 500 to about 2000 Angstroms and provides an ejection energy per unit volume of from about 10 to about 20 gigajoules per cubic meter. A nozzle plate is attached to the semiconductor substrate to provide the micro-fluid ejection device.

Abstract: An ink jet head base body in which a heat accumulation layer, a heater generating heat energy used for discharging ink, and a protection film protecting the heater are sequentially formed on a substrate. The ink jet head base body is characterized in that a total thickness of a portion above from the heater in the protection film ranges from 0.2 ?m to 0.6 ?m, a heat resistance value of the portion above from the heater in the protection film ranges from 5×10?9 m2·K/W to 50×10?9 m2·K/W, and the heat resistance value of a portion below from the heater in the heat accumulation layer is not lower than double the heat resistance value of the portion above from the heater in the protection film.

Abstract: A heater chip for a micro-fluid ejection device having enhanced adhesion between a resistor layer and a protective layer. The heater chip includes a substrate, a resistive layer deposited adjacent to the substrate, and a substantially non-conductive protective layer adjacent to the resistive layer. The protective layer is selected from a titanium-doped diamond-like carbon thin film layer, and a single thin film diamond-like carbon layer having at least a first surface comprised of more than about 30 atom % titanium.

Abstract: An organic insulating coating formed on a substrate is composed of two layers of a first parylene coating and a second parylene coating. Heat treatment is performed to at least the first parylene coating after being formed, at a temperature below 125° C. for two hours. Then the second parylene coating is formed on the first parylene coating. Occurrence of pinholes is thus prevented at least in one of the two layers of the organic coatings, with the result that insulating properties of the coatings are improved.

Abstract: A liquid dispenser includes a substrate and a plurality of liquid-dispensing portions, arranged on the substrate, including at least one liquid chamber for storing liquid, one nozzle, and one heating element, wherein the heating elements are energized to heat liquid stored in the corresponding liquid chambers to eject a droplet of the liquid from the corresponding nozzles; the heating elements and the liquid chambers have a protective layer and an insulating layer therebetween; each heating element, the insulating layer, the protective layer, and each liquid chamber are arranged in that order; the insulating layer isolates the protective layer from the heating elements; and the protective layer comprises an inorganic material, protects the heating elements, has a strip shape so as to cover some of the plurality of heating elements adjacent to each other, and has slits each disposed between the heating elements. A printer includes such a liquid dispenser.

Abstract: An individual electrode layer electrically connected to an individual electrode layer having an opening is formed beneath a heater layer and a common electrode layer along an ink flow path.

Abstract: A base plate for use in a recording head, which is used by an ink jet head for printing by discharging ink onto a recording medium, the recording head being provided with energy converting element for discharging the ink by generating a bubble in the ink by converting electric energy to thermal energy, and an anti-cavitation film to protect the energy converting element from shocks generated at the time of bubble growth and extinction, the anti-cavitation film being used as electrodes for detecting the state of the ink by energizing the ink. The base plate comprises a first diode having the a cathode thereof connected to the anti-cavitation film and an anode thereof connected to a ground potential; and a second diode having the anode thereof connected to the anti-cavitation film and the cathode thereof connected to a power supply potential.

Abstract: A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers.

Abstract: A method and an apparatus for manufacturing a device are provided. The method and the apparatus can form micro wiring without undesired wetting and spreading using an inexpensive functional-liquid supplying method. A method for forming a device, such as a radiofrequency identification tag, includes: making patterns at a plurality of sections having different degrees of affinity to the functional liquid on a substrate to form the device; and supplying the functional liquid to the selected section having high affinity to the functional liquid. Forming the plurality of sections having different degrees of affinity to the functional liquid includes, for example: supplying an organosiloxane film on the substrate, and exposing the organosiloxane film through an optical mask.

Abstract: An ink jet recording head and an ink jet recording apparatus using the ink jet recording head are disclosed. The adhesion between a substrate and a discharge port forming member can be improved. In order to further reduce the size of the substrate by further optimizing the arrangement of an inspection pad, at least a recording element protecting section covers the upper part of a recording element row with a conductivity, and at least an electrical circuit element protecting section covers the upper part of an electrical circuit element row with a conductivity. An inspection electrode pad is electrically connectable with the recording element protecting section and the electrical circuit element protecting section.