Abstract: The invention provides a method for reducing ink corrosion of exposed metal layers on a chip surface of a semiconductor chip for an ink jet printhead. The method includes depositing a protective layer in a plasma process to the chip surface, the protective layer being deposited adjacent ink ejectors so that the protective layer substantially circumscribes an ink via in the chip. A thick film layer is applied to the protective layer and chip, whereby the protective layer and thick film layer are sufficient to promote increased adhesion between the thick film layer and a nozzle plate attached to the thick film layer thereby substantially reducing a tendency for the nozzle plate and thick film layer to delaminate from one another during printhead manufacture or use and interrupting contact between ink and the exposed metal layers on the chip surface.

Abstract: There is provided an ink jet head for ejecting an ink liquid drop from an ink jet nozzle onto a recording medium, wherein, on a substrate having a heat conductivity of 15 (W/m/K) or less, a heat-transfer layer having a thickness of 10 &mgr;m or more is formed, and a heat insulating layer is adjacently formed on top of the heat-transfer layer; and a heat generating heater, which has a thin film resistor for boiling a part of ink to generate a bubble and allow the ink liquid drop to be ejected from the ink jet nozzle by an expansion of the bubble and a thin film conductive electrode for supplying a current to the thin film resistor, is adjacently formed on top of the heat insulating layer. There is also provided an ink jet printer using the above ink jet head. The ink jet head and the ink jet printer as above make it possible to suppress the temperature elevation around the heat generating heater and yet enhance the printing speed upon the printing even if the ink liquid drop is continuously ejected.

Abstract: The present invention provides an ink jet head substrate comprising a heat generating resistance member forming a heat generating portion, an electrode wiring electrically connected to the heat generating resistance member, and an anti-cavitation film provided on the heat generating resistance member and the electrode wiring via an insulation protection layer, and wherein the anti-cavitation film is formed from different materials with more than two layers.

Abstract: An ink jet recording head in which a heating resistor forming a heating portion, a wiring electrically connected to the heating resistor, and a protective film formed on the heating resistor and the wiring to protect the heating resistor and the wiring are arranged on a substrate for the ink jet recording head. An ink path in communication with a discharging port for discharging ink is also formed on the substrate for the ink jet recording head.

Abstract: A semiconductor antifuse device that utilizes a resistive heating element as both a heating source or fuse blowing and as part of the fuse link. The antifuse device may also be utilized as a fuse and the antifuse or fuse embodiment can be programmed and read with the same two electrodes. The antifuse or fuse is well suited for use and efficient fabrication in a printhead apparatus or other circuit arrangements.

Abstract: A fluid-jet printhead has a substrate on which at least one layer defining a fluid chamber for ejecting fluid is applied. The printhead includes an elevation layer disposed on the substrate and aligned with the fluid chamber. The printhead also includes a resistive layer disposed between the elevation layer and the substrate wherein the resistive layer has a smooth planer surface interfacing with the resistive layer.

Abstract: A high quality inkjet printhead includes a substrate having a multiplicity of heater resistors formed thereon at a density of at least six heater resistors per square millimeter. Each of the heater resistors also has a total resistance of at least 70 &OHgr; and an overlaying passivation thermal barrier characteristic adjusted to enable ejection of an ink drop of less than 6.5 ng with an energy impulse equal to or less than 1.4 &mgr;joules.

Abstract: A base member for an ink jet head, the base member comprising a substrate, a heat generating resistor provided between electrodes which constitute a pair on the substrate an upper protection layer provided on an insulation layer which in turn is provided on the heat generating resistor, the upper protection layer having a contact surface contactable to ink, the improvement residing in that the upper protection layer is made of amorphous alloy having a following composition formula: Ta&agr;Fe&bgr;Ni&ggr;Cr&dgr; where 10 atomic %≦&agr;≦30 atomic %, &agr;+&bgr;<80 atomic % &agr;<&bgr;, &dgr;>&ggr; and, &agr;+&bgr;+&ggr;+&dgr;=100 atomic %, and at least the contact surface of the upper protection layer contains an oxide of a constituent component.

Abstract: Disclosed is a process for bonding a first article to a second article which comprises (a) providing a first article comprising a polymer having photosensitivity-imparting substituents; (b) providing a second article comprising metal, plasma nitride, silicon, or glass; (c) applying to at least one of the first article and the second article an adhesion promoter selected from silanes, titanates, or zirconates having (i) alkoxy, aryloxy, or arylalkyloxy functional groups and (ii) functional groups including at least one photosensitive aliphatic >C═C< linkage; (d) placing the first article in contact with the second article; and (e) exposing the first article, second article, and adhesion promoter to radiation, thereby bonding the first article to the second article with the adhesion promote. In one embodiment of the present invention, the adhesion promoter is employed in microelectrical mechanical systems such as thermal ink jet printheads.

Abstract: The invention provides an ink jet recording head in which a discharge port forming member including plural discharge ports for discharging droplets of recording liquid is provided on a substrate bearing thereon plural recording elements for providing the recording liquid with discharge energy and electrical circuit elements for driving the recording elements, the head comprising a first metal film covering the upper side of the recording elements and a second metal film covering the upper side of the electrical circuit elements; wherein the discharge ports are so arranged as to form plural arrays and the recording elements are so arranged as to form an array in the vicinity of each array of the discharge ports; the first metal film is provided over the plural arrays of the recording elements; and the first and second metal films are formed in the form of a mutually opposed pair of comb teeth.

Abstract: A heating element of a printhead has a conductive layer deposited over a substrate, and a resistive layer deposited over and in electrical contact with the conductive layer.

Abstract: To provide a substrate unit for liquid discharging head, a method for producing the same, a liquid discharging head, a cartridge, and an image forming apparatus. The substrate unit for liquid discharging head is for a head which gives thermal energy to the liquid for film boiling, to discharge droplets of the liquid from its discharge port.

Abstract: A system provides an optimum energy pulse to a resistive heating element in an ink jet print head. The optimum energy pulse provides an optimal energy density at a surface of the heating element to cause optimal nucleation of ink adjacent the surface of the heating element. The system includes storing in memory values related to heating element dimensions, heating element electrical characteristics, and ink characteristics. Also stored in memory are expressions that provide mathematical relationships between the heating element dimensional values, the heating element electrical values, the ink characteristics, and the amplitude and duration of the optimum energy pulse. The system also includes retrieving from memory the stored values and expressions, and determining, based on the expressions, the amplitude and duration of the optimum energy pulse. The system further generates the optimum energy pulse based on the determined amplitude and duration, and provides the optimum energy pulse to the heating element.

Abstract: In ink jet recording head in which a heating resistor forming a heating portion, a wiring electrically connected to the heating resistor, and a protecting film formed on the heating resistor and the wiring to protect the heating resistor and the wiring are arranged on a substrate for the ink jet recording head, and an ink path communicated with a discharging port for discharging ink is formed on the substrate for the ink jet recording head, the protecting film includes a first layer protecting film for covering the heating resistor and the wiring, a second layer protecting film formed on the first layer protecting film by a material different from that of the first layer protecting film and having an opening in a portion corresponding to the heating portion of the heating resistor and constructed by an inorganic material, and a third layer protecting film constructed by the same material system as the first layer protecting film and covering the second layer protecting film and the first layer protecting film

Abstract: An ink-jet head for ejecting ink droplets from a nozzle by the pressure caused by bubbles, includes: a pressure chamber; a multiple number of heating areas for generating bubbles inside the pressure chamber. Heater films arranged in the heating areas are electrically connected in parallel. The thermal conductivity of the insulating film in each heating area is made different from that of the other heating areas so as to produce difference in thermal efficiency between the surfaces facing the pressure chamber so that the heating area closest to the nozzle has the highest thermal efficiency. As a result, heating areas where bubbles should be generated can be selected by varying the applied energy level, whereby it is possible to perform multilevel control of the ejected amount of ink droplets.

Abstract: A substrate for use of an ink jet head comprises a plurality of heat generating resistive elements formed on a substrate through insulation layer, electrode wiring electrically connected with said heat generating resistive elements, and protection layer to cover said heat generating resistive elements. Then, the protection layer of this substrate is made dielectric formed by plural atoms containing Si, and at the same time, the composition ratio of the dielectric of the portion of the protection layer at least nearest to the heat generating resistive elements is almost the stoichiometric composition ratio, and then, the composition ratio of the dielectric of the portion farthest from the heat generating resistive elements is richer in Si than the stoichiometric composition ratio.

Abstract: A fluid ejection device includes a substrate with a fluid drop generator, wherein the fluid drop generator is top coated with a first barrier layer. The device also has a second barrier layer substantially defining a chamber about the fluid drop generator, and at least one layer deposited in between the first and second barrier layers.

Abstract: A dual curable encapsulant is provided for use in protecting electrical components. The encapsulant contains from about 0 to about 20 percent by weight of a multifunctional epoxy material, from about 80 to about 95 percent by weight of a difunctional epoxy material, a catalytic amount of a photocurative catalyst and co-catalyst and a reactive diluent. Ink jet printer parts assembled and protected with the dual curable encapsulant exhibit enhanced ink corrosion protection.

Abstract: A manufacturing method of monolithic integrated thermal bubble inkjet print heads and the structure for the same. The method utilizes semiconductor manufacturing technologies to configure various elements in a thermal bubble inkjet print head, such as ink channels, an ink slot, an energy transducer, an orifice plate, on a single substrate. The ink channels are formed on an top surface of the substrate using the anisotropic etching technique. The ink slot is formed on a back surface of the substrate using the anisotropic etching technique. The energy transducer and the orifice plate are formed in order above the ink channels using the coating and etching techniques. This thermal bubble inkjet print head manufacturing method is particularly useful in the all batch process without employing the steps of precision alignment joint for the orifice plate in a conventional inkjet print head. Therefore, the method can greatly increase production efficiency and lower production costs.

Abstract: An ink jet printing head for effecting printing by ejection of ink includes a first electrothermal transducer having a heat generating resistor with a first area and wiring electrically connected with the heat generating resistor; a second electrothermal transducer having a second heat generating resistor with an area which is different from the area of the first heat generating resistor; wherein bubbles are produced in ink materials upon application of electric signals to the electrothermal transducers, by which different volumes of ink materials are ejected; wherein the first and second electrothermal transducers have substantially the same bubble production threshold voltage.

Abstract: A manufacturing method of monolithic integrated thermal bubble inkjet print heads and the structure for the same. The method utilizes semiconductor manufacturing technologies to configure various elements in a thermal bubble inkjet print head, such as ink channels, an ink slot, an energy transducer, an orifice plate, on a single substrate. The ink channels are formed on an top surface of the substrate using the anisotropic etching technique. The ink slot is formed on a back surface of the substrate using the anisotropic etching technique. The energy transducer and the orifice plate are formed in order above the ink channels using the coating and etching techniques. This thermal bubble inkjet print head manufacturing method is particularly useful in the all batch process without employing the steps of precision alignment joint for the orifice plate in a conventional inkjet print head. Therefore, the method can greatly increase production efficiency and lower production costs.

Abstract: The invention provides an ink jet recording head in which a discharge port forming member including plural discharge ports for discharging droplets of recording liquid is provided on a substrate bearing thereon plural recording elements for providing the recording liquid with discharge energy and electrical circuit elements for driving the recording elements, the head comprising a first metal film covering the upper side of the recording elements and a second metal film covering the upper side of the electrical circuit elements; wherein the discharge ports are so arranged as to form plural arrays and the recording elements are so arranged as to form an array in the vicinity of each array of the discharge ports; the first metal film is provided over the plural arrays of the recording elements; and the first and second metal films are formed in the form of a mutually opposed pair of comb teeth.

Abstract: A system is provided for use in a printer, the system including a media width sensor which is configured to sense the presence of media at a predetermined transverse position within the media path. By sensing media at such predetermined transverse position, it is possible to determine media width, and thus to identify media type. Correspondingly, it is possible to adapt media handling to address particular characteristics of the media, namely, thickness of the media and width of the media sheets.

Abstract: A printing head is intended to achieve high reliability and a production method of the printing head is intended to achieve high yield at low cost. A liquid ejecting printing head employs a base body, in which an electrothermal transducer element, a driving functional element for driving the electrothermal transducer element, a wiring electrode connecting between the electrothermal transducer element and the driving functional element, and an insulation layer provided on the wiring electrode are formed on a substrate. The electrothermal transducer element has a heat generating resistor formed of a material selected from the group consisting TaN, HfB2, Poly-Si, Ta—Al, Ta—Ir, Au and Ag. A protective layer above the heat generating body is formed of an insulative compound deposited to be low density to high density in order.

Abstract: An inkjet printhead chip structure and a method of estimating the working life through the detection of any defect on the chip structure. The method includes laying a metallic layer such as a tantalum layer over the chip and then shaping the metallic layer into a protective layer circuit. A portion of the metal protective layer covers the heating elements embedded in the chip. In printing, the heating elements heat up the ink to produce jets of ink. However, a portion of the heat is transferred to the metal protective layer thereby raising its temperature. Heat on the metal protective layer combined with any strayed residual ink bubbles that impinge upon the surface of the metal protective layer causes the metal to age. Since resistance of the metal protective layer will increase proportionally to the amount of aging, a measurement of the resistance is capable of estimating how much longer a given chip is suitable for use.

Abstract: The durability of ink jet print heads is improved when the intermediate photoresist layer contains a poly(amic acid) prepared from at least one dianhydride and at least one aliphatic diamine.

Abstract: This present invention is embodied in a system and a method for protecting an electrically-inactive component of a microsystem from an ESD event. The invention includes embodiments that protect the microsystem from ESD events that directly strike an electrically-inactive component and that are external to the electrically-inactive component. The present invention includes an ESD dissipation device having a connected chain of electrically-inactive components that are electrically floating. Alternatively, the electrically-inactive components can be held at the same potential as an electrical component. Further, a sacrificial ESD breakdown device is included that provides a preferential ESD breakdown site away from the protected component. Also, capacitively coupled thin-film layers can provide shielding to electrically-inactive components.

Abstract: There is disclosed an ink-jet print head comprising a heat acting portion communicated with a liquid discharge orifice, an electrothermal energy conversion element for generating thermal energy, and an upper protection layer, wherein the heat acting portion gives the thermal energy to the liquid so as to generate a bubble in the liquid, the upper protection layer being a film formed by means of chemical vapor deposition using an organic silicon source as a source material. There is also disclosed a method of producing such an ink-jet print head described above, in which the upper protection layer is formed by means of chemical vapor deposition using source gases including an organic silicon source, after forming the heat acting portion with a circuit pattern by means of photolithography. The ink-jet print head according to the present invention provides high performance in discharge durability and in thermal response.

Abstract: To provide an ink-jet head substrate enabling both highly koge. characteristic ink and corrosive ink to be used, an ink-jet head using the same basis and an inkjet recording apparatus equipped with the same head. The ink-jet head substrate includes: heat generating resistors forming heat generating sections on a base; electrode wires electrically connected to the heat generating resistors; and anti-cavitation films installed via an insulator protective layer on the heat generating resistors and the electrode wires, in which the anti-cavitation film is formed of materials varying with individual given areas on the base.

Abstract: The present invention provides an ink jet head substrate comprising a heat generating resistance member forming a heat generating portion, an electrode wiring electrically connected to the heat generating resistance member, and an anti-cavitation film provided on the heat generating resistance member and the electrode wiring via an insulation protection layer, and wherein the anti-cavitation film is formed from different materials with more than two layers.

Abstract: A bubble-jet type ink-jet printhead is provided. When forming a doughnut-shaped bubble, the printhead allows bubbles to be first grown around the heater that surrounds the central axis of the nozzle at regular angles followed by the formation of another bubble between the earlier formed bubbles, thereby forming a larger doughnut-shaped bubble. Accordingly, this can prevent the formation of an unbalanced doughnut-shaped bubble due to variations in local resistance of the heater, which may be caused by a process error. Furthermore, the printhead allows the center of the doughnut-shaped bubble to be set on the central axis of the nozzle thus causing a droplet formed within the doughnut-shaped bubble to be ejected in a normal manner, that is, in a direction vertical to the nozzle plate.

Abstract: A printhead is used to eject printing fluid, such as ink, onto a printing medium. This printhead has an integrated heat-sink used to cool energy dissipation elements which propel the printing fluid from the printhead. The printhead includes an amorphous substrate carrying a structure of plural thin-film layers. Upon the substrate is defined a metallic heat sink layer covering substantially the entire plan-view shape of the substrate, and serving during operation of the printhead to distribute excess heat for dissipation. During manufacturing of the printhead, this thin-film metallic heat sink layer performs the additional function of preventing an element or compound present in the substrate from migrating into the thin-film layers.

Abstract: A high efficiency thermal inkjet printhead which uses a novel resistor system. The printhead includes a support structure, at least one layer of material which comprises at least one opening therethrough, and at least one ink expulsion resistor located within the printhead between the support structure and the layer of material having the opening therein. The resistor is produced from at least one metal silicon nitride composition. Numerous benefits are achieved by this development including (A) reduced resistor current consumption and greater energy efficiency; (B) increased bulk resistivity of the resistor elements compared with prior systems; (C) cooler printhead operation; (D) multiple economic benefits including the ability to use lesscostly, high voltage/low current power supplies; and (E) improved reliability, stability, and longevity levels in connection with the printhead and resistor elements.

Abstract: A thin film structure is fabricated using photolithographic techniques and includes a plurality of substrates defining a resistor film, a conductor film and a passivation layer. The resistor film is etched to provide a plurality of individual heaters. The conductor film is etched to provide a plurality of conductive traces. At least one passivation layer covers the conductor film. A plurality of electrical contact pads are also formed that extend through etched holes in the passivation layer so that the electrical contact pads make electrical contact with the conductive traces. A nozzle plate is attached to the thin film structure. The nozzle plate has a plurality of individual nozzle orifices and also defines a plurality of corresponding ejection cavities for receiving ink from an ink reservoir via capillary action.

Abstract: A printhead for an inkjet or like printing apparatus having a passivation layer of varied thickness. The passivation layer is relatively thin over the ink expulsion element to reduce the energy required to expel ink. The passivation layer is relatively thick over other regions of the substrate, particularly those regions in which circuitry or the like is provided. The increased thickness over the circuitry protects against capacitive coupling and the like. Methods of forming the varied thickness passivation layer are also disclosed.

Abstract: In an ink jet recording head having a structure wherein grooves are formed on a piezo-electric ceramic substrate by a cutting work and the resulting side walls of the grooves are driven to thereby jet each ink in the grooves, fine cracks appears in the surface layer portion of the side wall during the time of the cutting work, accordingly the strength of the side walls is reduced, a long time driving of the side walls develops the cracks to end in the destruction and so on, which causes a problem of the reliability to be overcome. The cracks occurred in the surface layer portion of the side walls 4 are penetrated by an oxide 5 for being mended. The piezo-electric ceramic substrate with the grooves is coated with a solution obtained by solving the constituent elements of the oxide into a solvent and is fired so that the side walls are reinforced.

Abstract: A method of reducing the kogation of the surface of the heater of a recording head for applying thermal energy to the ink in the recording head in order to discharge the ink from the recording head can effectively reduce the kogation to make it possible to print high quality images and prolong the service life of the recording head. With the method of reducing the kogation of the surface of the heater of the ink-jet recording head of an ink-jet printer, the ink-jet recording head is provided with a heater for applying thermal energy to ink in order to discharge ink from an orifice and the heater has a top surface protecting layer containing a metal and/or a metal oxide, while the ink is adapted to ink-jet recording and contains (a) a coloring material, (b) a liquid medium and (c) diglycollic acid or iminodiacetic acid or salts thereof.

Abstract: A highly-efficient thermal inkjet printhead. The printhead includes a primary layer of polycrystalline silicon (preferably doped) having at least one portion thereof which functions as an ink expulsion resistor. Positioned over and above the primary layer is a secondary layer of material having at least one section produced from a selected metal silicide compound and at least another section fabricated from undoped polycrystalline silicon. The metal silicide-containing section functions as an interconnect structure and is operatively connected to the resistor in the primary layer (which is positioned beneath the secondary layer). The undoped polycrystalline silicon section is at least partially aligned over and above the resistor. As a result, the resistor is “buried” beneath the secondary layer and the various portions thereof. This system provides improved reliability, greater dimensional simplicity, optimized electrical/thermal properties, and superior versatility.

Abstract: The new heater element design has a pit layer which protects the overglaze passivation layer, PSG step region, portions of the Ta layer and dielectric isolation layer and junctions or regions susceptible to the cavitational pressures. Further, the inner walls of the pit layer define the effective heater area and the dopant lines define the actual heater area. In alternative embodiments, the dopant lines define the actual and effective heater areas, and an inner wall and a dopant line define the actual and effective heater areas. Further, when the new heater element designs are incorporated into printheads having full pit channel geometry and open pit channel geometry, the operating lifetime of the printhead is extended because the added protection of the pit layer prevents: 1) passivation damage and cavitational damages of the heater elements; and 2) degradation of heater robustness, hot spot formations and heater failures well into the 109 pulse range.

Abstract: A high efficiency thermal inkjet printhead which uses a novel resistor system. The printhead includes a support structure, at least one layer of material which comprises at least one opening therethrough, and at least one ink expulsion resistor located within the printhead between the support structure and the layer of material having the opening therein. The resistor is produced from at least one metal silicon oxynitride composition. Numerous benefits are achieved by this development including (A) reduced resistor current consumption and greater energy efficiency; (B) increased bulk resistivity of the resistor elements compared with prior systems; (C) cooler printhead operation; (D) multiple economic benefits including the ability to use less-costly, high voltage/low current power supplies; and (E) improved reliability, stability, and longevity levels in connection with the printhead and resistor elements.

Abstract: An ink jet print head apparatus having a reduced thickness passivation layer. Passivation layer thickness is preferably below 7000 angstroms to permit operation at a lower turn-on-energy. The passivation layer is preferably formed in a discrete manner and may include a nitride layer and a SiC layer. Various other layer arrangements are also described including the provision of a cavitation layer over the passivation layer. A thermal or other type of ink expulsion mechanism may be utilized.

Abstract: A fluorine-containing epoxy resin composition at least contains: a fluorine-containing epoxy resin composition at least containing: a component (a) in an amount of from 5 to 80 parts by weight; a component (b) in an amount of from 5 to 40 parts by weight; and a component (c) in an amount of from 5 to 80 parts by weight, wherein the component (a) comprises a polyfunctional epoxy resin having two or more epoxy groups in one molecule and not containing F and Si; the component (b) comprises an epoxy compound having a perfluoro group at a terminal; and the component (c) comprises a compound containing in one molecule two or more of one kind or two or more kinds selected from an epoxy group, an alcohol group, a carboxylic acid group, and an amine group. The fluorine-containing epoxy resin composition is suitably usable for treating a specified surface of a member or device so as to impart a liquid repellent property thereto.

Abstract: A highly-efficient thermal inkjet printhead. The printhead includes at least one doped polycrystalline silicon resistor which communicates with an external signal source using a unique interconnection system. Specifically, a primary layer of electrically conductive material (optimally a metal silicide) is connected to the resistor. An additional layer of electrically conductive material is attached to and above the primary layer. The additional layer terminates at a position which is spaced outwardly and apart from the resistor to form a gap therebetween. However, the underlying primary layer electrically links the additional layer to the resistor. Alternatively, a dielectric layer is attached to and above the primary layer, with the additional layer being secured to the dielectric layer. At least one electrically conductive contact member is provided within the dielectric layer to link the primary and additional layers.

Abstract: An inkjet printing device employs an inkjet printhead with a plurality of drop generators to eject drops of ink. Each drop generator includes a planar heater resistor, a protection layer having a first heating surface on the heater resistor and a second heating surface entirely surrounding the first heater surface on the heater resistor, and an ink ejection nozzle. The drop generator vaporizes ink at the first heating surface and ejects a drop of ink of a first mass from the nozzle when a first range of energies is applied to the heater resistor. The drop generator vaporizes ink at the first heating surface and the second heating surface and ejects a drop of ink of a second mass from the nozzle when a second range of energies is applied to the heater resistor.

Abstract: Disclosed is an ink jet printhead which comprises (i) an upper substrate with a set of parallel grooves for subsequent use as ink channels and a recess for subsequent use as a manifold, the grooves being open at one end for serving as droplet emitting nozzles, and (ii) a lower substrate in which one surface thereof has an array of heating elements and addressing electrodes formed thereon, said lower substrate having an insulative layer deposited on the surface thereof and over the heating elements and addressing electrodes and patterned to form recesses therethrough to expose the heating elements and terminal ends of the addressing electrodes, the upper and lower substrates being aligned, mated, and bonded together to form the printhead with the grooves in the upper substrate being aligned with the heating elements in the lower substrate to form droplet emitting nozzles, said upper substrate comprising a material formed by crosslinking or chain extending a polymer of formula I or II.

Abstract: The heat-generator supporting member of the present invention for an ink-jet head comprises a support comprising a metal, a heat-generating resistance layer for generating thermal energy to be utilized in ink discharge by supply of electric current, an electrode layer electrically connected to the heat-generating resistance layer, a heat-accumulating layer provided under and in direct contact with the heat-generating resistance layer, and a protective layer formed by surface modification of the heat-generating resistance layer and the electrode layer, wherein the heat accumulating layer comprises a plurality of layers comprising a lower layer formed from a silicon oxide film prepared by no-bias sputtering and an upper layer formed from a silicon nitride film or from a silicon oxide film prepared by bias sputtering.

Abstract: An ink jet head having a plurality of heat generating resistive elements arranged in an array for discharging ink, includes a base board having said heat generating resistive elements and a plurality of layers for electrical insulation or protection laminated on a substrate and liquid paths on said base board corresponding to said heat generating resistive elements. At least a part of said layers is removed between said heat generating resistive elements adjacent to each other.

Abstract: An inkjet printing device employs an inkjet printhead with a plurality of drop generators to eject drops of ink. Each drop generator includes a planar heater resistor, a protection layer having a first heating surface on the heater resistor and a second heating surface entirely surrounding the first heater surface on the heater resistor, and an ink ejection nozzle. The drop generator vaporizes ink at the first heating surface and ejects a drop of ink of a first mass from the nozzle when a first range of energies is applied to the heater resistor. The drop generator vaporizes ink at the first heating surface and the second heating surface and ejects a drop of ink of a second mass from the nozzle when a second range of energies is applied to the heater resistor.

Abstract: An ink jet recording head of high printing quality including a plurality of electro-thermal transducers arranged on a substrate corresponding to respective nozzles, wherein each protective layer placed on a resistor constituting each of the plurality of electro-thermal transducers has a thickness-reduced portion at a part thereof so as to increase the distance between the center point of the air bubble of each of the plurality of electro-thermal transducers to longer than the distance between the centers of gravity of each of the plurality of electro-thermal transducers. With the ink jet recording head, the relationship between the amount and the speed of ejected ink droplets can be optimized in accordance with the size of areas of the electro-thermal transducers.

Abstract: In an ink jet recording head, the thin-film thermal resistor is covered by an electrically-insulating oxidation film. An inorganic insulation layer is formed over a part of the thin-film thermal resistor and the thin-film conductor. An organic insulation layer is formed over at least a part of the inorganic insulation layer that covers the connecting edge of the connection portion between the thin-film thermal resistor and the thin-film conductor.