Abstract: To solve a problem in that it is difficult to form drive electrodes (11), which are formed respectively on side surfaces of each of partition walls (7), each of the partition walls (7) in a drive region (DR) is made of a piezoelectric material (10) on a top surface side situated above substantially half a height from a bottom surface (12) of each groove (6) to a top surface (13) of each of the partition walls (7), and made of a low-permittivity material (9), which is lower in permittivity than the piezoelectric material (10), on a bottom surface (12) side situated below substantially half the height. Thus, deformation drive amounts of the respective partition walls (7) are equalized, variations in liquid droplet discharge rate among the channels are reduced, and a drive signal is prevented from leaking to the adjacent partition walls (7) and fluctuating the liquid droplet discharge characteristics.

Abstract: In one embodiment, a fluid ejector structure includes: a chamber for containing a fluid; a flexible membrane forming one wall of the chamber; a plurality of piezoelectric elements; a backing operatively connected to the piezoelectric elements such that an expansion and/or contraction of a piezoelectric element causes the piezoelectric element to bend; a rigid plate overlaying a center portion of the membrane; a post coupling the piezoelectric elements to the plate through the backing such that a movement of each piezoelectric element toward the chamber is transmitted to the plate through the post. The plate is configured to transmit movement of the post to the membrane in a rigid, or substantially rigid, piston-like manner.

Abstract: A liquid-droplet ejection head may include stacked plates that form therein a common liquid channel and a plurality of individual ink channels extending from exits from the common liquid channel to nozzles via pressure chambers. At least one of the stacked plates may include an island-shaped partial plate surrounded by the common liquid channel and configured to form at least a part of side walls of the common liquid channel. The stacked plates may also include a support portion that transverse the common liquid channel and configured to support the partial plate. At least a part of a side edge of the support portion on an upstream side of a flow direction of liquid in the common liquid channel may be inclined to the flow direction, as viewed in a direction perpendicular to the stacked plates.

Abstract: Methods, systems, and apparatus for drive a pumping chamber of a fluid ejection system are disclosed. In one implementation, the actuator for drive the pumping chamber includes a continuous piezoelectric layer between a pair of drive electrodes and a continuous reference electrode. The pair of drive electrodes includes an inner electrode and an outer electrode surrounding the inner electrode. The actuator is further coupled to a controller which, during a fluid ejection cycle, applies a negative voltage pulse differential to the outer electrode to expand the pumping chamber for a first time period, then applies another negative voltage pulse differential to the inner electrode during a second time period after the first time period to contract the pumping chamber to eject a fluid drop.

Abstract: An ink jet type recording head includes a substrate, a nozzle plate having nozzles, and a sealing sheet, and the substrate and the nozzle plate are bonded to each other through a bonding film, and the substrate and the sealing sheet are bonded to each other through a bonding film. These bonding films are each obtained by drying and/or curing a liquid material containing an epoxy-modified silicone material. Further, by applying energy to each bonding film, the surface thereof is activated, and therefore, each bonding film exhibits a bonding property. By this bonding property, the substrate is bonded to the nozzle plate and to the sealing sheet.

Abstract: A liquid ejecting head includes a pressure-generating chamber in fluid communication with a nozzle opening and a piezoelectric element having a piezoelectric layer and electrodes provided to the piezoelectric layer. The piezoelectric layer is composed of a complex oxide having a perovskite structure containing bismuth and cerium in the A site of the perovskite structure and at least one metallic element selected from the group consisting of iron, cobalt, and chromium in the B site of the perovskite structure, and the molar ratio of the metallic element or elements in the B site, the bismuth, and the cerium is 1:(1?x):(3x/4).

Abstract: A liquid ejecting head includes a reservoir forming substrate provided with a reservoir serving as a common liquid chamber; in which at least a portion of a wall surface of the reservoir is an inclined surface, a lower side of the reservoir in a vertical direction is provided with a lower portion of which a width is wider than an upper portion of the reservoir in the vertical direction thanks to the inclined surface, a compliance portion which absorbs pressure of the reservoir is disposed at an area which faces the lower portion and has a shape corresponding to the lower portion, and the reservoir communicates with an upper portion of each of the pressure generating chambers in the vertical direction rather than a lower portion of each of pressure generating chambers.

Abstract: A piezoelectric actuator is disclosed. The piezoelectric actuator includes a base member and three or more piezoelectric element members in which plural piezoelectric elements are formed by slits. The three or more piezoelectric element members are arrayed in a line on the base member and a gap is formed at the connection position between two adjacent piezoelectric element members.

Abstract: There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.

Abstract: A fluid ejection device includes a substrate having a fluid channel, a flexible membrane supported by the substrate and extended a length of the fluid channel, an actuator provided on a first portion of the flexible membrane, and a reinforcement member provided on a second portion of the flexible membrane such that the actuator is adapted to deflect the first portion of the flexible membrane relative to the fluid channel, and the reinforcement member supports the second portion of the flexible membrane.

Abstract: A liquid ejecting head comprises a pressure chamber communicating with nozzle and a piezoelectric actuator. The piezoelectric layer is composed of a solid solution containing bismuth sodium titanate and 0.2 mol % or more and 8.0 mol % or less of manganese.

Abstract: There is provided an inkjet head assembly that includes: an inkjet head plate including an ink path; a piezoelectric actuator facing a pressure chamber in the inkjet head plate and providing driving force for ejecting ink to a nozzle from the pressure chamber; a package part stacked on the inkjet head plate and including a path moving ink introduced from the outside to an inlet of the inkjet head plate; and an electrical connector filling a via penetrating the package part and electrically connected with the piezoelectric actuator.

Abstract: A plurality of pressure chambers are divided into a first pressure chamber group and a second pressure chamber group, and are arranged such that an interval of the first pressure chamber group and the second pressure chamber group is larger than an interval between nozzles, and sub ink supply passage which supplies the ink to the common liquid chambers through the space is formed. Accordingly, a liquid droplet jetting head which is capable of delivering the ink to all the nozzles without increasing a size is provided.

Abstract: Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers.

Abstract: A recyclable continuous ink jet print head is provided that includes a manifold formed from a metal such as stainless steel, a die having ink jet nozzles formed from a ceramic material such as silicon, a control circuit connected to the die via microwiring, and an interposing member disposed between the manifold and the die. The interposing member is formed from a composite material such as Al—SiC having a coefficient of thermal conductivity that is higher than that of the silicon die, and a coefficient of thermal expansion (CTE) that is between that of the die and the manifold. During manufacture, the CTE value of the interposing member allows long-lasting, heat-cured epoxy compositions to be used to bond the die to the manifold and to encapsulate the microwiring between the die and a control circuit with while maintaining proper alignment of the die ink jet nozzles on the manifold.

Abstract: A droplet ejection head comprises: a substrate having first through-holes forming reservoir chambers, a second through-hole forming a supply chamber, and a bonding film on one surface; a nozzle plate having nozzles for ejecting ejection liquid and a second bonding film on one surface, the first and second films being bonded together to cover the first through-holes and the second through-hole; a sealing plate on another surface of the substrate covering the first through-holes, one surface of the sealing plate contacting the substrate's another surface; and piezoelectric means on another surface of the sealing plate for driving the droplet ejection head. The bonding films contain an Si-skeleton of constituent atoms containing silicon atoms, with siloxane (Si—O) bonds and elimination groups bonded to the silicon atoms, the constituent atoms being randomly bonded together, and the elimination groups existing near a surface of the bonding films.

Abstract: A droplet ejection head comprises: a substrate having first through-holes forming reservoir chambers, a second through-hole forming a supply chamber, and a bonding film on one surface; a nozzle plate having nozzles for ejecting ejection liquid and one surface contacting the bonding film, the nozzle plate is bonded to the substrate through the bonding film to cover the first through-holes and the second through-hole; a sealing plate on another surface of the substrate covering the first through-holes, one surface of the sealing plate contacting the substrate's another surface; and piezoelectric means on another surface of the sealing plate for driving the droplet ejection head. The bonding film containing an Si-skeleton constituted of constituent atoms containing silicon atoms, with siloxane (Si—O) bonds and elimination groups bonded to the silicon atoms, the constituent atoms being randomly bonded together, and the elimination groups existing near a surface of the bonding film.

Abstract: A manufacturing method for a nozzle plate including a plurality of nozzle holes may include the step of forming a plurality of through-holes extending through a plate member in a thickness direction of the plate member. The manufacturing method may also include the step of forming a water repellant film in a region of one surface of the plate member where apertures of the through-holes are not positioned. The manufacturing method may further include the step of pressing individual regions on the one surface of the plate member, the individual regions respectively including the apertures of the through holes, to separate at least portions of the water repellant film formed in the individual regions from the water repellant film formed on the one surface.

Abstract: A liquid discharge device (1) has a pressure chamber (3), a nozzle (4), and a communication path (5) that interconnects the pressure chamber (3) and the nozzle (4). A region that has a specific length L1 and lies from the position (8) of the boundary between the communication path (5) of the pressure chamber (3) toward the nozzle (4) is formed as a narrow section (9) that has an opening area S1 smaller than the opening area S0 of a region closer to the nozzle (4) than the narrow section (9).

Abstract: A flow path regulating member for regulating an ink flow path leading into the channels is formed on the rear side of the head chip by exposure and development through lamination of the photo masks having an opening of a predetermined pattern, after a photosensitive resin film has been bonded on the rear side of the head chip by heat and pressure without using an adhesive; this head chip being characterized in that the channels, and drive walls made up of piezoelectric elements are arranged alternately, the apertures of the channels are arranged on the front side and rear side, respectively, and drive electrodes are formed in channels.

Abstract: A liquid ejecting head includes: a supply channel member including a plurality of supply channel plates, and the supply channel including supply holes provided through the respective supply channel plates and a supply groove formed by removing part of one of adjacent supply channel plates in terms of the direction of thickness thereof for communicating the respective supply holes; a pressure generating element that provides a pressure to the pressure generating chamber; a supply communication channel that connects a storage unit having the liquid stored therein and a reservoir, the supply communication channel being formed through a pressure chamber plate and the supply channel member in the direction of thickness thereof, the supply channel plates having the supply groove being formed with a recess having the substantially same depth as the supply groove at an area corresponding to the supply communication channel; and a filter unit having a plurality of filter holes provided on the bottom of the recess.

Abstract: An inkjet head comprises a plurality of individual electrodes each of which includes a first part and a second part connected to an end portion B of the first part. The end portion B is one of the end portions of a first part in a longitudinal direction of a pressure chamber. The second part of each of the individual electrodes corresponding to a first pressure chamber line is positioned between two first parts corresponding to two respective pressure chambers neighboring each other in a second pressure chamber line, so that an end portion C of the second part crosses over a line connecting each end portion D of the two first parts.

Abstract: Provided are a droplet-ejecting head having good displacement and a droplet-ejecting apparatus. The droplet-ejecting head includes a pressure chamber; a piezoelectric element which includes a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode, the piezoelectric layer being made of a lead zirconate titanate; and a nozzle plate having a nozzle orifice communicating with the pressure chamber. The first electrode includes at least one lanthanum nickelate layer which is located on the piezoelectric layer side. The piezoelectric layer has a distribution in which the concentration of lanthanum and nickel decrease from the interface between the lanthanum nickelate layer and the piezoelectric layer toward the second electrode. Lanthanum is locally distributed in the piezoelectric layer. Nickel is globally distributed in the piezoelectric layer so as to have a plurality of peaks. At least one of the peaks is split.

Abstract: There is provided a liquid discharge apparatus which includes a liquid channel which connects a discharge port and a pressure chamber; a piezoelectric layer one surface of which facing the pressure chamber; a power feeding electrode which applies a voltage to the piezoelectric layer; and a liquid electroconductive material which electrically connects the other surface of the piezoelectric layer and the power feeding electrode, and in an area on the other surface, of the piezoelectric layer, overlapping with the pressure chamber, a contact area which is an electrical contact between the piezoelectric layer and the liquid electroconductive material is formed. Accordingly, it is possible to provide a liquid discharge apparatus which is capable of realizing a small size channel unit and an improvement in a resolution of an image which is formed by a discharging liquid, and to change appropriately a shape of the piezoelectric layer.

Abstract: A printhead module is provided for an inkjet printhead assembly. The printhead module includes a support. An elongate carrier is mounted to the support. The carrier defines a plurality of transverse ribs and an ink channel located between the ribs. A subassembly includes a micro-electromechanical integrated circuit (IC) configured to eject ink. The subassembly is mounted to the carrier so that the support, carrier and subassembly define a plurality of sealed ink chambers which can feed ink to the IC via the ink channel.

Abstract: A piezoelectric element includes a piezoelectric layer, and an electrode provided on the piezoelectric layer. The piezoelectric layer is composed of a compound oxide having a perovskite structure and containing bismuth lanthanum ferrate manganate and barium titanate. The molar ratio of the barium titanate to the total amount of the bismuth lanthanum ferrate manganate and the barium titanate is 0.09 or more and 0.29 or less. A liquid ejecting head includes a pressure-generating chamber communicating with a nozzle opening, and a piezoelectric element as described above. A liquid ejecting apparatus includes the above-described liquid ejecting head.

Abstract: A piezoelectric element includes a first electrode which is an individual electrode, a piezoelectric layer, and a second electrode which is a common electrode. The piezoelectric element is provided with a piezoelectric active section and a piezoelectric nonactive section so as to face the pressure generating chambers. The piezoelectric nonactive section extends to the outside of the pressure generating chambers. On the piezoelectric layer of the piezoelectric nonactive section, a stress controlling layer is provided which has the same direction of internal stress as internal stress of the second electrode and is electrically insulated from the second electrode.

Abstract: An ink jet head includes a head chip having driving walls made up of piezoelectric device, ink channels that eject ink, air channels that do not eject ink, driving electrodes formed inside of the of the channels, at least one common electrode that conducts with the driving electrodes of the air channels, and connection electrodes that conduct with the driving electrodes of the ink channels separately, wherein the ink channels and the air channels are alternatingly arranged in parallel and form channel rows arranged in parallels, and a nozzle plate joined to a front surface of the head chip and has a plurality of nozzles, wherein individual connection electrodes of any adjacent two channel rows formed at a side of an edge of the head chip are lead out and aligned at the edge of the head chip.

Abstract: A liquid discharging head includes a flow path unit having a common liquid flow path; an individual liquid flow path; and a plurality of plates that are stacked to form the common liquid flow path and the individual liquid flow path. The plurality of plates includes at least four manifold plates that include partial plates and support members, wherein the at least four manifold plates comprise: a first manifold plate that includes a first partial plate and a first support member that supports the first partial plate; a second manifold plate that includes a second partial plate and a second support member that is adjacent to the first support member in a direction in which the common liquid path extends, the second support member supporting the second partial plate; and at least one manifold plate that is interposed between the first manifold plate and the second manifold plate.

Abstract: A method for producing a liquid transport apparatus comprises positioning and joining a vibration plate formed with recesses and a flow passage unit formed with pressure chambers, detecting a positional deviation amount of the recess from a reference position in a predetermined direction, and forming an electrode having a length adjusted on the basis of the detected positional deviation amount. Accordingly, it is possible to avoid the decrease in the pressure to be applied in the pressure chamber. Further, it is possible to appropriately discharge a liquid such as an ink or the like from a discharge port.

Abstract: A liquid droplet ejection head includes: a substrate having first and second through-holes for reserving and supplying ejection liquid; a nozzle plate on one substrate surface and covering the first and second through-holes, a sealing plate on the other substrate surface and covering the first through-holes; a driver driving the liquid droplet ejection head to eject the ejection liquid from the nozzle plate; a first bonded portion bonding the substrate to the nozzle plate; and a second bonded portion bonding the substrate to the sealing plate, the first and/or second bonded portion including a bonding film formed by drying a liquid coating formed of a liquid containing a silicone material composed of silicone compounds, and the bonding film bonding the substrate to the nozzle plate and/or the sealing plate due to a bonding property developed in the bonding film by applying energy thereto.

Abstract: A liquid ejection head including a piezoelectric element having a piezoelectric layer and electrodes The piezoelectric layer is 3 ?m or less in thickness. The piezoelectric layer is made of a piezoelectric material including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane.

Abstract: A piezoelectric element having a piezoelectric layer and electrodes. The piezoelectric layer is 3 ?m or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane. A full width at half maximum of the X-ray diffraction peak attributed to the (110) plane is 0.24° or more and 0.

Abstract: A liquid-ejecting head includes a pressure-generating chamber communicating with a nozzle opening and includes a piezoelectric element including a piezoelectric layer and electrodes. The piezoelectric layer contains bismuth sodium potassium titanate and satisfies the inequality 0?Pr/Pm?0.25 at 25° C., where Pm and Pr are the saturation polarization and remanent polarization, respectively, of the piezoelectric layer.

Abstract: A droplet ejecting apparatus, including: a head unit having a generally planar shape and including nozzles through which droplets are ejected, a holder holding the head unit, a reinforcing plate via which the head unit is held by the holder and which has an adhesion surface as at least a part of one of opposite surfaces thereof to which an adhesion surface of the head unit as at least a part of one of opposite surfaces thereof is adhered with an adhesive layer interposed between the adhesion surfaces, and an adhesion portion constituted by the adhesion surfaces and the adhesive layer, wherein the adhesion portion has a special region in which (a) first sections in each of which respective parts of the adhesion surfaces are opposed to each other with a part of the adhesive layer interposed therebetween and are adhered to each other and (b) second sections in each of which a part of the adhesion surface of one of the head unit and the reinforcing plate is opposed to a space and is not adhered to the adhesion su

Abstract: A frame and an ink-jet head including a nozzle plate and a fixed plate are placed on a first jig having a first face and a second face parallel to the first face and located outside the first face when seen in a direction perpendicular to the first face while being at a predetermined distance from the first face with respect to the direction perpendicular to the first face, in such a manner that a portion of the frame other than a portion formed with an adhesive layer is in contact with the second face, that an ink ejection face of the nozzle plate is opposed to the first face, and that both ends of the fixed plate are in contact with the adhesive layer. Thereafter, the adhesive layer is cured under a state where the ink ejection face is in contact with the first face, so that a head unit is manufactured.

Abstract: A microfluidic device includes first and second substrates bonded together. The first substrate has first and second opposed surfaces. A die pocket is formed in the first opposed surface, and a through slot extends from the die pocket to the second opposed surface. The second substrate is bonded to the second opposed surface of the first substrate whereby an outlet of a channel formed in the second substrate substantially aligns with the through slot. The channel of the second substrate has an inlet that is larger than the outlet.

Abstract: There is provided an inkjet print head including: a pressure chamber storing ink in order to eject the ink to a nozzle; a piezoelectric actuator receiving part being recessed in order to correspond to the pressure chamber in a direction of the pressure chamber; and a piezoelectric actuator received in the piezoelectric actuator receiving part, in which viscous liquid having piezoelectric properties is filled and hardened, and supplying the pressure chamber with a driving force for ejection of the ink.

Abstract: A first piezoelectric layer is formed with independent electrodes separated from one another and arranged at positions corresponding to openings of pressure chambers. The first layer has independent active portions at positions where the independent electrodes are located. The independent active portions can displace selectively. A second piezoelectric layer is formed with individual electrodes connected by connection electrodes and arranged at positions corresponding to the openings. The second layer has individual active portions at positions where the individual electrodes are located. The individual active portions cannot displace selectively. Each opening has a shape that is longer in one direction than in another direction intersecting the one direction. Each individual electrode has a shape that is longer in the one direction than in the another direction.

Abstract: A liquid jetting apparatus includes: a cavity unit having a plurality of nozzles and pressure chambers; and an actuator unit applying jetting pressures to the pressure chambers. The actuator unit has a plurality of stacked ceramics layers, individual electrodes corresponding to the pressure chambers, a common electrode common to all the pressure chambers, and a barrier layer preventing the liquid from being penetrated therethrough. The barrier layer is stacked on a position which is between a contact surface, of the actuator unit, making contact with the cavity unit and the individual electrodes closest to the contact surface, except a position on the contact surface. It is possible to prevent the individual electrodes and the common electrode from being electrically short-circuited due to the liquid even when the ceramics layer in contact with the cavity unit has a crack.

Abstract: A piezoelectric element substrate is provided with a support substrate, an insulating orientation auxiliary layer formed on the support substrate, a lower electrode layer formed on the orientation auxiliary layer so that an uncoated portion where the orientation auxiliary layer is not coated with the lower electrode layer is constituted at least a portion thereof, a piezoelectric substance layer formed on the lower electrode layer and the uncoated portion of the orientation auxiliary layer, and an upper electrode layer formed on the piezoelectric substance layer, wherein the orientation auxiliary layer and the piezoelectric substance layer comprise a material of the same crystal system.

Abstract: A droplet discharge head including a nozzle substrate having nozzle openings, a cavity substrate having discharge chambers that communicate with the nozzle openings and discharge droplets from the nozzle openings, a reservoir substrate having a reservoir concave portion that serves as a reservoir which communicates commonly with the discharge chambers. The reservoir substrate is provided between the nozzle substrate and the cavity substrate and a resin thin film is formed on a whole inner face of the reservoir concave portion and on a bottom face of a second concave portion. The second concave portion is provided in a peripheral of the reservoir concave portion and has a depth which is smaller than the depth of the reservoir concave portion. The resin thin film is cut circularly so as to surround the reservoir concave portion, and a part of the resin thin film serves as a diaphragm buffering pressure variation. serves as a diaphragm buffering pressure variation.

Abstract: A piezoelectric actuator according to an aspect of the invention may include: upper and lower electrodes supplying a driving voltage; and a piezoelectric material formed by solidifying a piezoelectric liquid having viscosity between the upper and lower electrodes and providing a driving force to ink inside an ink chamber of an inkjet head.

Abstract: An actuator that includes a substrate; first conductive layers provided so as to extend in a first direction and to be disposed adjacent to each other on the substrate; a piezoelectric body layer having a first portion formed so as to cover the first conductive layers and openings between the first conductive layers, a second portion other than the first portions, and a contact to the first conductive layer; a second conductive layer having a third portion which overlap with the first conductive layers in the second direction, a fourth portion connected to the third portion being formed over the second portion of the piezoelectric body layer, and a fifth portion connected to the first conductive layer in the contact ; and a wiring having a sixth portion which is formed over the fourth portion of the second conductive layer and a seventh portion connected to the fifth portion.

Abstract: A liquid-jet head, including: a plurality of head bodies each furnished with a nozzle plate having a plurality of nozzles formed therein; a joining member, adhered to the nozzle plate via an adhesive agent, for binding and fixing the plurality of head bodies; an opening formed in a region of the joining member corresponding to the nozzles; and a protrusion formed in an edge portion of the opening facing the nozzle plate, and protruding toward the nozzle plate, wherein when the joining member is joined to the nozzle plate via the adhesive agent, the protrusion is allowed to bite into the nozzle plate.

Abstract: A liquid ejecting head includes a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element generating a pressure change in the pressure generating chamber. In this liquid ejecting head, the piezoelectric element includes a first electrode, a piezoelectric layer provided above the first electrode, and a second electrode provided above the piezoelectric layer at a side opposite to the first electrode. The first electrode has a diffusion-preventing layer containing iridium oxide as a primary component, and the diffusion-preventing layer has stress relieving holes that pass through in the thickness direction thereof and that is filled with a material other than iridium oxide.

Abstract: A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.

Abstract: A liquid delivering apparatus, including a flow-passage unit including an opening and a pressure chamber which accommodates liquid and which communicates with the opening; an oscillating plate which partially defines the pressure chamber; a piezoelectric material layer which is one of directly and indirectly stacked on the oscillating plate and which deforms upon application of an electric field thereto so as to oscillate the oscillating plate for delivering the liquid from the pressure chamber through the opening; and an electrode pattern and a drive circuit which apply the electric filed to the piezoelectric material layer. The drive circuit and the electrode pattern are one of directly and indirectly provided on the oscillating plate.

Abstract: The liquid ejection head comprises: a pressure chamber which is connected to a nozzle; a diaphragm which constitutes one face of the pressure chamber; and a piezoelectric element which deforms the diaphragm for ejecting liquid inside the pressure chamber through the nozzle, wherein the liquid is ejected by driving the piezoelectric element in a temperature region in which a tendency of increase or decrease in viscosity of the liquid with respect to temperature of the liquid and a tendency of increase or decrease in a piezoelectric d constant of the piezoelectric element with respect to temperature of the piezoelectric element have a prescribed relationship.

Abstract: A method of forming a fluid ejection device includes forming a pair of first glass layers and forming a second glass layer. Each first glass layer includes a first side and a second side with the second side defining a first fluid flow structure. The second glass layer includes a first side and a second side opposite the first side, with each respective first side and second side defining a second fluid flow structure. The second glass layer is bonded in a sandwiched position between the respective first glass layers with each respective second fluid flow structure of the second glass layer in fluid communication with the respective first fluid flow structure of the respective first glass layers to define a fluid flow pathway for ejecting a fluid.