Abstract: An inkjet print head and a method for manufacturing the same are provided. The inkjet print head includes: an upper board having a pressure chamber; and a lower board including an upper silicon layer, an insulating layer, and a lower silicon layer, wherein the lower board includes a projection formed of the upper silicon layer and protruded into the interior of the pressure chamber in order to reduce the space of the pressure chamber, and a lower surface of the upper board and an upper surface of the lower silicon layer are fixed.

Abstract: A liquid jet head is provided with an actuator substrate having grooves spaced apart from one another through an intermediation of partition walls. Drive electrodes are formed on confronting side surfaces of the partition walls so as not to be electrically connected to one another and are configured to be driven independently from one another to independently deform the partition walls. Each of the partition walls has a first portion made of a first material and extending from a base surface of the corresponding groove, and has a second portion extending from the first portion and being made of a second material having a higher permittivity than that of the first material. A cover plate is mounted on the actuator substrate so as to cover the grooves, and a nozzle plate has nozzles communicating with respective ones of the grooves.

Abstract: A substrate includes a substrate body having a semiconductor element formed thereon and at least either a recess or a protrusion formed on the surface thereof and a printed circuit formed on the substrate body and connected to the semiconductor element. At least a part of the printed circuit is formed in a region of the surface of the substrate including either the inner side surfaces of the recess or the outer side surfaces of the protrusion.

Abstract: A method of manufacturing a capacitive microphone comprises providing a substrate having at least one cavity. The method further comprises forming a backplate on the substrate, wherein the backplate has a plurality of holes, and forming a diaphragm on the backplate, wherein there are a first distance and a second distance between the diaphragm and the backplate. The method still further comprises forming an air gap between the backplate and the diaphragm through the first distance, and fastening the diaphragm to the backplate through the second distance.

Abstract: A liquid ejecting head contains a piezoelectric element having a piezoelectric layer and an electrode disposed on the piezoelectric layer, in which the piezoelectric layer contains a complex oxide containing bismuth, iron, barium, and titanium and having a perovskite structure, has a yield stress of 5.66 GPa or more, and has a Young's modulus of 114 GPa or more.

Abstract: A method for forming an ink jet print head can include attaching a plurality of piezoelectric elements to a diaphragm, dispensing a dielectric fill layer over the diaphragm and the plurality of piezoelectric elements to encapsulate the piezoelectric elements, curing the dielectric fill layer to form an interstitial layer, then removing the interstitial layer from an upper surface of the plurality of piezoelectric elements using a plasma etch.

Abstract: A liquid ejecting head includes a retention member with a liquid inlet path, a liquid ejecting head main body configured to dispense liquid droplets through a nozzle, and a fixing plate to which the liquid ejecting head main body is fixed. The fixing plate includes a first joint portion to which the nozzle surface is attached, and a second joint portion to which the retention member is attached. The retention member includes a head chamber. Portions of the retention member and the liquid ejecting head main body around the liquid inlet path and the liquid flow path are bonded, the liquid ejecting head main body being attached to the first joint portion via the nozzle surface and accommodated in the head chamber, and the second joint portion and a periphery of the opening of the head chamber in the retention member are attached to each other.

Abstract: A method and structure for an ink jet printhead, and a printer including the ink jet printhead. The printhead can include a polymer as a film spacer which separates an electrical interconnect such as a printed circuit board or a flexible circuit from a printhead diaphragm, such that the film spacer is interposed between the electrical interconnect and the diaphragm. In an embodiment, a piezoelectric actuator is free from contact with the film spacer. Embodiments of a process for forming the printhead may have reduced processing stages requiring fewer manufacturing tools than some other processes. Embodiments of the resulting printhead and printer may have fewer structural components than some other printheads and printers.

Abstract: According to one embodiment, an inkjet head comprises a main body which is adhered onto a substrate with an adhesive layer. The substrate includes inflow parts that are opened to a mounting surface. Side surfaces of the main body, internal surfaces of the grooves, an end part of the adhesive layer, and the mounting surface are covered with a conductive layer. The conductive layer is provided with insulating patterns. The insulating patterns run between the grooves and extending to the mounting surface.

Abstract: A liquid ejecting head having pressure chambers each communicating with a nozzle opening for liquid ejection and piezoelectric element having a first electrode, a piezoelectric layer consisting a perovskite oxide containing lead, zirconium, and titanium, and a second electrode. The piezoelectric layer has a carbon intensity ratio in the range of 8 to 28 in its inner region excluding the volume 20 nm in depth from the second electrodes. The carbon intensity ratio is defined as the ratio of the maximum carbon intensity to the minimum as measured by secondary ion mass spectrometry along the thickness of the piezoelectric layer.

Abstract: A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.

Abstract: A liquid ejecting head which discharges a liquid from nozzle openings includes: a piezoelectric element which is provided with a piezoelectric layer and an electrode provided on the piezoelectric layer, and the piezoelectric layer is formed of a complex oxide having a perovskite structure which contains bismuth, iron, barium, titanium, and at least one selected from the group consisting of copper, nickel, and zinc.

Abstract: An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.

Abstract: Ink solvent having reached a buffer chamber through a manifold and a flexible portion is discharged in a direction different from the direction in which a holder opening is provided. Accordingly, the ink solvent is less likely to reach a connecting portion of a lead electrode and a COF substrate through the holder opening, a through-hole, and a support hole, through which the COF substrate extends. Thus, it is possible to make the solvent take a long time to reach the connecting portion, achieving an ink jet recording head in which the time taken to cause poor contact between the lead electrode and the COF substrate occurs is longer than that in the case where the solvent is discharged in the same direction as the direction in which the holder opening is provided.

Abstract: Liquid ejecting head comprises a unit head bonded to a communication substrate. A plurality of liquid chamber forming portions are formed in the unit case, along a first direction at positions that are separated by a partition wall. A plurality of empty liquid chamber portions and supply-side communication paths are formed in the communication substrate. The supply-side communication paths include a common communication path formed in a opposite side with a thin thickness portion left in the surface side of the communication substrate, and individual communication paths. With a surface of the partition wall and a surface of the thin thickness portion bonded together, the empty liquid chamber forming portions and the empty liquid chamber portions communicate with each other so as to define a plurality of common liquid chambers.

Abstract: There is provided a piezoelectric actuator including: a substrate that is supported by a support portion; a piezoelectric element that includes a lower electrode formed on the substrate, a piezoelectric layer formed on the lower substrate, and an upper electrode formed on the piezoelectric layer; and a driving circuit that applies a voltage to the piezoelectric element. The upper electrode has a first upper electrode that is positioned on an outer peripheral side of the piezoelectric layer and at least one second upper electrode that is positioned on a center side of the piezoelectric layer, and a voltage applied to the first upper electrode is lower than a voltage applied to the second upper electrode.

Abstract: A printhead assembly includes an ink manifold having a plurality of ink outlets defined in a manifold bonding surface; one or more printhead integrated circuits, each printhead integrated circuit having a plurality of ink inlets defined in a printhead bonding surface; and an adhesive film sandwiched between said manifold bonding surface and said one or more printhead bonding surfaces, said film having a plurality of ink supply holes defined therein, each ink supply hole being aligned with an ink outlet and an ink inlet. The adhesive film is a laminated film comprising a central polymeric film sandwiched between a first adhesive layer and a second adhesive layer, the first adhesive layer has a melt temperature lower than that of the second adhesive layer.

Abstract: Disclosed herein is a microfluidic jetting device having a piezoelectric member positioned above a displaceable membrane. A voltage is applied across the piezoelectric member causing deformation of the piezoelectric member. The deformation of the piezoelectric member results in a displacement of the membrane, which is formed above a cavity. Displacement of the membrane creates pressure to jet or eject liquid from the cavity and suction liquid into the cavity through ports or apertures formed in the in membrane.

Abstract: A print head including a jet stack can be formed using semiconductor device manufacturing techniques. A blanket metal layer, a blanket piezoelectric element layer, and a blanket conductive layer can be formed over a semiconductor substrate such as a semiconductor wafer or wafer section. The piezoelectric element layer and the blanket conductive layer can be patterned to provide a plurality of transducer piezoelectric elements and top electrodes respectively, while the metal layer forms a bottom electrode for the plurality of transducers. Subsequently, the semiconductor substrate can be patterned to form a body plate for the print head jet stack. Forming a print head jet stack using semiconductor device manufacturing techniques can provide a high resolution device with small feature sizes.

Abstract: A method of assembly produces a printhead having a polymer aperture plate and outlet plate that are at least 25 mm in length. The method includes bonding the polymer aperture plate to the outlet plate, which is configured with outlets. A laser is aligned with the outlets in the outlet plate to ablate apertures in the polymer aperture plate and the outlet plate is bonded to an inkjet stack to couple the outlets in the outlet plate to pressure chambers in a body plate in the inkjet stack.

Abstract: Provided is a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode, wherein the piezoelectric layer is formed of a complex oxide having a perovskite structure containing bismuth, barium, iron and titanium, binding energy of C—C and C—H states of a peak due to C 1s in an X-ray photoelectron spectroscopy measurement is standardized as 284.8 eV, when a peak obtained in a range of the binding energy of 775 eV or more and 785 eV or less is separated using a Gauss function, the binding energy has the peak in 780.5±0.8 eV, and one or more peak having intensity lower than that of the peak is included at a low binding energy side.

Abstract: Provided is a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode, wherein the piezoelectric layer is formed of a complex oxide having a perovskite structure containing bismuth, barium, iron and titanium, binding energy of C—C and C—H states of a peak due to C 1s in an X-ray photoelectron spectroscopy measurement is standardized as 284.8 eV, when a peak obtained in a range of a binding energy of 775 eV or more and 785 eV or less is separated using a Gauss function, the binding energy has the peak in 779.0±0.8 eV, and one or more peak having intensity lower than that of the peak is included at the high binding energy side.

Abstract: A liquid ejecting head for discharging liquid from nozzle openings is provided. The liquid ejecting head includes a piezoelectric element comprising a piezoelectric film inserted between electrodes with buffer layer on one or two surfaces of the piezoelectric film, wherein the piezoelectric film is made from barium titanate-based composition having a perovskite structure containing barium, titanium as well as copper equal to or less than 3 mol % of titanium amount, lithium more than or equal to 2 mol % and less than or equal to 5 mol % of titanium amount, and boron more than or equal to 2 mol % and less than or equal to 5 mol % of titanium amount and the buffer layer is formed from a complex oxides with perovskite structure containing bismuth, iron, manganese, barium and titanium.

Abstract: A printhead includes a moveable membrane, a piezoelectric actuator to move the membrane, and electronic circuitry disposed on the moveable membrane. A method of fabricating a printhead includes fabricating CMOS circuitry on a first side of a circuit wafer, and forming a chamber in a second side of the circuit wafer such that a bottom of the chamber forms a moveable membrane and the CMOS circuitry is disposed on the moveable membrane opposite the bottom of the chamber. A printing system includes a printhead having CMOS circuitry formed on a first side of a moveable membrane, a chamber having a bottom comprising a second side of the moveable membrane, and a piezoelectric actuator formed over the CMOS circuitry, configured to cause displacement of the moveable membrane into the chamber.

Abstract: Disclosed is a process for preparing an ink jet printhead which comprises: (a) providing a diaphragm plate having a plurality of piezoelectric transducers bonded thereto; (b) aligning an electrical circuit board having a fill joint with the piezoelectric transducers and temporarily attaching the electrical circuit board to the piezoelectric transducers, thereby creating a layered structure having interstitial spaces between the diaphragm plate, the piezoelectric transducers, and the electrical circuit board; (c) applying a thermoset polymer through the fill joint and allowing it to fill the interstitial spaces via capillary action; and (d) curing the thermoset polymer to form an interstitial polymer layer.

Abstract: A piezoelectric actuator includes a piezoelectric member having piezoelectric pillars and grooves alternately arrayed. Each of the grooves has a first width at a bottom side of the piezoelectric pillars and a second width at an upper side of the piezoelectric pillars in a direction in which the piezoelectric pillars are arrayed. The first width is greater than the second width.

Abstract: [Object] There are provided a liquid jet head and a liquid jet apparatus that each include a piezoelectric element including a piezoelectric layer in which the occurrence of cracks is suppressed, and the piezoelectric element. [Solution] The liquid jet head ejects a liquid from a nozzle aperture. The liquid jet head includes a piezoelectric element including a piezoelectric layer and an electrode provided for the piezoelectric layer. The piezoelectric layer is made of a complex oxide containing bismuth, iron, barium and titanium and having a perovskite structure, and has an average crystal grain diameter of 120 nm or more and 252 nm or less.

Abstract: A liquid ejecting head for discharging liquid from nozzle openings is provided. The liquid ejecting head includes a piezoelectric film and piezoelectric element with electrodes on the piezoelectric film. The piezoelectric film includes barium titanate-based composition having a perovskite structure containing barium, titanium, and copper less than or equal to 3 mol % of titanium amount.

Abstract: A liquid ejecting head includes a piezoelectric element having a first electrode, a piezoelectric body layer, and a second electrode, in which the piezoelectric body layer is formed of complex oxide of a pevroskite structure including at least bismuth, barium, iron, and titanium, and the mole ratio of titanium to barium (Ti/Ba) is 1.17 or more, and 1.45 or less.

Abstract: A head array unit includes plural heads that discharge liquid droplets; a head supporting member on which the plural heads are disposed; and intermediate members, fixed to the head supporting member, having positioning reference parts configured to position the heads, wherein the heads are mounted on the intermediate members detachably from an opposite side of the intermediate members with respect to the head supporting member.

Abstract: According to the present invention, the size of a droplet ejected to a target area is minimized to obtain high printing resolution, and effects of attraction and adhesive forces acting between a nozzle and air resistance can be minimized so that the target area is finely controlled to obtain high printing precision. An inkjet printing apparatus according to the present invention includes an ejecting device ejecting a droplet of a solution to a target area; and a light irradiating device irradiating light onto the droplet at an acute angle with respect to a line going through the ejecting device and the target area to heat and evaporate a part of the droplet before the ejected droplet reaches the target area, so that the droplet is accelerated along the line.

Abstract: An inkjet head includes a channel substrate having multiple individual liquid chambers arranged in a shorter-side direction of the channel substrate, the individual liquid chambers being separated by multiple liquid chamber partition walls and communicating with ink supply openings; multiple diaphragms defining surfaces of the individual liquid chambers facing toward nozzle openings; multiple actuators formed on the diaphragms, each of the actuators being formed of a lower electrode, a piezoelectric element, and an upper electrode stacked in layers; and multiple individual electrode interconnects led out from the upper electrodes of the actuators, the individual electrode interconnects being connected to the corresponding upper electrodes on the nozzle opening side and on the ink supply opening side of the upper electrodes, the individual electrode interconnects being formed in regions where the liquid chamber partition walls are formed.

Abstract: A method for mounting a piezoelectric transducer layer to a diaphragm layer exposes an electrode for each piezoelectric transducer after thermoset polymer filling the interstitial space between the piezoelectric transducers has been cured. The method includes bonding a polymer layer to a diaphragm layer having a plurality of openings, bonding piezoelectric transducers to the diaphragm layer, filling areas between the piezoelectric transducers on the diaphragm layer with thermoset polymer, and removing the thermoset polymer from the piezoelectric transducers with a laser to expose a metal electrode on each piezoelectric transducer.

Abstract: A liquid ejection head includes a substrate having an energy-generating device configured to generate energy used for ejecting a liquid from an orifice; a transparent channel wall member forming an inner wall of a channel leading to the orifice; and an intermediate layer disposed between and in contact with a surface of the substrate and the channel wall member and having a refractive index different from a refractive index of the channel wall member. The intermediate layer has a first outer end surface forming contours of a symbol as viewed in a direction from the orifice toward the substrate and making a first angle with the surface of the substrate and a second outer end surface facing the channel and making a second angle with the surface of the substrate. The first angle is an obtuse angle. The second angle is smaller than the first angle.

Abstract: A method and structure for an ink jet print head which includes the use of two or more flexible circuits and a piezoelectric element array. A first pad array is included on a first flex circuit to power a first portion of the piezoelectric element array of the print head, and a second pad array is included on a second flex circuit to power a second portion of the piezoelectric element array of the print head. Using two flex circuits requires only half as many traces to be formed on each flex circuit, which can relax spacing requirements and design tolerances.

Abstract: When a piezoelectric actuator, having a lower electrode, an intermediate electrode, and an upper electrode respectively on upper surfaces of a vibration plate, a lower piezoelectric layer, and an upper piezoelectric layer mutually stacked, is produced, a voltage of 30 V is applied to the upper and the intermediate electrodes, and ?30 V is applied to the lower electrode so that a second active portion, which is included in portions of the piezoelectric layers interposed between the upper and the lower electrodes and from which a portion opposed to the intermediate electrode is excluded, is polarized downwardly. After that, 0 V is applied to the upper and lower electrodes, and 30 V is applied to the intermediate electrode so that a first active portion, which is included in the upper piezoelectric layer and which is interposed between the upper and the intermediate electrodes, is polarized upwardly.

Abstract: A flow path regulating member for regulating an ink flow path leading into the channels is formed on the rear side of the head chip by exposure and development through lamination of the photo masks having an opening of a predetermined pattern, after a photosensitive resin film has been bonded on the rear side of the head chip by heat and pressure without using an adhesive; this head chip being characterized in that the channels, and drive walls made up of piezoelectric elements are arranged alternately, the apertures of the channels are arranged on the front side and rear side, respectively, and drive electrodes are formed in channels.

Abstract: Provided is a method of manufacturing a liquid ejecting head, the method including forming a piezoelectric element having a width in a reference direction longer than a width in an orthogonal direction orthogonal to the reference direction on a first substrate, and adhering a second substrate to a surface of the first substrate opposed to the piezoelectric element at a temperature lower than a normal temperature, wherein, in the adhering of the second substrate, the second substrate is adhered such that the first direction of the second substrate is adjusted to the reference direction, using a first thermal expansion coefficient in a first direction on an adhesion surface with the first substrate, the first thermal expansion coefficient is less than a second thermal expansion coefficient in a second direction orthogonal to the first direction and the first thermal expansion coefficient is less than a thermal expansion coefficient of the first substrate.

Abstract: An electromechanical transducer (1) has a pressurizing chamber (21) and a side-chamber (23) formed in a plate (11). On a driven film (13) forming the upper wall surface (21a) of the pressurizing chamber (21) and the side-chamber (23), a lower electrode (33), a driving member, and an upper electrode (35) are formed in this order. The driving member is composed of an operation section (31p) located over the pressurizing chamber (21), and an extended section (31a) extending from the operation section (31p) to over the side-chamber (23). The side-chamber (23) has a smaller width than the pressurizing chamber (21) in a second direction perpendicular to a first direction in which the side-chamber (23) is located beside the pressurizing chamber (21). The extended section (31a) of the driving member has a smaller width than the side-chamber (23) in the second direction.

Abstract: A printing apparatus includes: a flow channel plate including, a pressure chamber, a nozzle including an outlet through which ink contained in the pressure chamber is ejected, and a trench disposed around the nozzle, and the outlet extending into the trench; a piezoelectric actuator configured to provide a change in pressure to eject the ink contained in the pressure chamber; and an electrostatic actuator configured to provide an electrostatic driving force to the ink contained in the nozzle.

Abstract: An inkjet head includes: an ink tank plate that includes a nozzle to discharge a liquid; a drive circuit member connected to an electromechanical transducer to apply a voltage to the electromechanical transducer to generate a pressure in an ink tank to discharge a liquid from the nozzle; a liquid supply plate stacked approximately in parallel with the drive circuit member on the ink tank plate; and a sealing material that hermetically seals an electrical connection between the drive circuit member and the wiring member. The liquid supply plate is provided with a receptacle having a hole portion or a concave portion and a mount area surrounded by the receptacle. The drive circuit member is received in the mount area. The sealing material is filled inside the mount area after the liquid supply plate is bonded to the ink tank plate.

Abstract: A liquid ejecting head ejects a liquid from pressure generating chambers through nozzles by varying pressure of the pressure generating chambers. The liquid ejecting head includes a nozzle plate in which the nozzles are formed. A first passage forming board is joined to the nozzle plate. A first liquid passage, including the pressure generating chambers, is formed in the first passage forming board. A second passage forming board is joined to the surface of the first liquid passage forming board and has a second liquid passage communicating with the first liquid passage. A first electrode layer electrically connected to the liquid in the first liquid passage and a second, independent, electrode layer are disposed on a vibration plate. Each of the first and second electrode layers includes a terminal drawn to the outside of a junction portion joining the first and second passage forming boards to each other.

Abstract: The purpose of the present invention is to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film. The present invention is directed to a piezoelectric film comprising a NaxLa1-xNiO3-x layer with a (001) orientation and a (Na,Bi)TiO3—BaTiO3 layer with a (001) orientation, wherein x is not less than 0.01 and not more than 0.1, and the NaxLa1-xNiO3-x layer (0.01?x?0.1) and the (Na,Bi)TiO3—BaTiO3 layer are laminated.

Abstract: An ink-jet head having a passage unit including pressure chambers each having one end coupled to a nozzle and the other end to be coupled to an ink supply source. The pressure chambers are arranged along a plane to neighbor each other. The ink-jet head further includes actuator units attached to a surface of the passage unit for changing the volume of each pressure chamber. Each actuator unit includes pressure generation portions respectively corresponding to pressure chambers, and is formed to extend over the pressure chambers. The actuator units are arranged along the longitudinal direction of the passage unit so that each neighboring actuator units partially overlap each other in the lateral direction of the passage unit. Each actuator unit has a basic region where many pressure generation portions are formed in a matrix, and an additional region neighboring the basic region in the lateral direction of the passage unit.

Abstract: A piezoelectric inkjet head structure includes an upper cover plate, a lower cover plate, a piezoelectric actuating module, a nozzle plate and a seal layer. The piezoelectric actuating module includes an upper piezoelectric chip, a lower piezoelectric chip, a first electrode, a second electrode, a conductive layer and a plurality of flow channels. The entrances of the flow channels of the upper piezoelectric chip and the lower piezoelectric chip are separated from each other by the same spacing interval. The entrances of the flow channels of the upper piezoelectric chip and the entrances of the flow channels of the lower piezoelectric chip are arranged in a staggered form. During operation of the piezoelectric actuating module, ink liquid is introduced into the flow channels of the piezoelectric actuating module from the upper cover plate and the lower cover plate, and then ejected out of the nozzles.

Abstract: A method of making an inkjet printhead comprises forming a first patterned layer 20 on a surface of a first substrate 10, forming a second patterned layer 28 on a surface of a second substrate 100, bonding the first and second layers in intimate face-to-face contact, and removing the second substrate 100 from the second patterned layer 28. The first and second patterned layers 20, 28 together define at least one ink ejection chamber having at least one ink ejection nozzle.

Abstract: Disclosed is an inkjet head including a fluid channel substrate on which individual liquid chambers are arranged, the individual liquid chambers being partitioned by liquid chamber partition walls; an oscillation plate that is formed on a surface facing openings of nozzles; actuators; wiring layer patterns that supplies driving signals to the actuators, the wiring layer patterns being formed above the corresponding liquid chamber partition walls; and a supporting substrate in which concave oscillation chambers are formed, the concave oscillation chambers being partitioned by supporting substrate partition walls. A width in the short direction of the supporting substrate partition wall is smaller than a width in the short direction of the liquid chamber partition wall and greater than a width of the wiring layer pattern.

Abstract: A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer.

Abstract: A liquid ejecting head includes a plurality of head bodies each having a nozzle plate, a flow channel forming substrate having a plurality of pressure generating chambers that communicate with the plurality of nozzles and a manifold that communicates with the plurality of pressure generating chambers, and pressure generating, and a fixation plate having an exposure aperture formed so that the plurality of nozzles are exposed therethrough and on which the plurality of head bodies are fixedly positioned, wherein the edges of the exposure aperture formed on the fixation plate are located in a region opposite the manifold, and a depression is formed on a side of the fixation plate facing the nozzle plate by depressing the edges of the exposure aperture in the region opposite the manifold.

Abstract: A piezoelectric actuator includes: a piezoelectric layer formed by a film formation method so as to have orientation in a prescribed orientation direction; and a pair of electrodes, disposed on a same surface which is substantially perpendicular to the orientation direction of the piezoelectric layer, for applying to the piezoelectric layer an electric field in a direction substantially perpendicular to the orientation direction.