Exposure Device For Lithography Patents (Class 349/4)
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Publication number: 20140368748Abstract: A light exposure system executes a light exposure process to an assembly cell, which includes a first substrate, a second substrate and a liquid crystal layer disposed between the first and second substrates. The light exposure system comprises a transmission device, two moving stages and a light source module. The moving stages are disposed on the transmission device and at least one of the moving stages carries the assembly cell. The light source module includes at least a light emitting element. The transmission device moves at least one of the moving stages carrying the assembly cell or the light source module and the light emitting element emits the light to the assembly cell. A light exposure process applied to the light exposure system is also disclosed.Type: ApplicationFiled: May 19, 2014Publication date: December 18, 2014Applicant: InnoLux CorporationInventors: Ker-Yih KAO, Tsan-Jen CHEN, Chen-Kuan KAO, Chien-Hsing LEE
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Patent number: 8373810Abstract: A micro-array of optical vortex retarders is provided by forming an alignment layer having a plurality of discrete alignment patches with different orientations. A layer of birefringent material, including one of a liquid crystal and a liquid crystal polymer precursor material, is provided adjacent to the alignment layer. The aligning orientation and position of each discrete alignment patch in the plurality of discrete alignment patches is selected to induce the layer of birefringent material to form at least one optical vortex retarder adjacent to a substantially non-oriented region of the alignment layer.Type: GrantFiled: September 10, 2009Date of Patent: February 12, 2013Assignee: JDS Uniphase CorporationInventors: David M. Shemo, Scott McEldowney
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Patent number: 8159624Abstract: A projector capable of increasing in the contrast by reducing the amount of leakage of light due to reflection of light on the surface of a retarder is to be provided. A retarder is placed and tilted in a direction so that the following conditional expression is satisfied, denoting a distance between a point A where the normal drawn from the center of a substrate plane of the retarder and a substrate plane of a polarizing beam splitter intersect and a point C where the substrate plane of the polarizing beam splitter and the optical axis of a projection system as AC, and a distance between a point B where the substrate plane of the polarizing beam splitter and the system optical axis intersect and the point C as BC: AC>BC.Type: GrantFiled: April 28, 2011Date of Patent: April 17, 2012Assignee: Seiko Epson CorporationInventor: Takashi Endo
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Patent number: 8012385Abstract: The present invention relates to a liquid crystal display (LCD) device, and more particularly, to a method of fabricating a color filter for an LCD device. A method of fabricating a color filter uses a mold (PDMS mold) having a plurality of grooves. Particularly, the mold (PDMS mold) is attached to a substrate such that the plurality of grooves face into the substrate. When a color resin is dropped into a side opening of each groove, the color resin is injected into each groove of the mold (PDMS mold) by a capillary force. After the mold (PDMS mold) having the injected color resin is cured, the mold (PDMS mold) is detached from the substrate and a color filter pattern is formed at a desired position.Type: GrantFiled: May 7, 2004Date of Patent: September 6, 2011Assignee: LG Display Co., Ltd.Inventor: Jin-Ook Kim
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Publication number: 20110181798Abstract: An exposing device includes: a first light-emitting element that emits first light; a second light-emitting element that emits second light; and a liquid crystal panel that is disposed between the first and second light-emitting elements and a photoreceptor body to be exposed to the second light, and focuses the second light on the photoreceptor body by a convex refractive index distribution that is formed in the liquid crystal panel by an orientation variation that is caused by illumination with the first light.Type: ApplicationFiled: September 13, 2010Publication date: July 28, 2011Applicant: FUJI XEROX CO., LTD.Inventors: Shin Yasuda, Keishi Shimizu
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Patent number: 7948564Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.Type: GrantFiled: June 17, 2008Date of Patent: May 24, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Moon Youn Jung, Dong Ho Shin, Young Jun Kim, Se Ho Park, Hyeon Bong Pyo, Chang Auck Choi
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Patent number: 7777859Abstract: An apparatus (20) forms a latent indicium onto a sensitized medium, using an area energy source (26) for applying a substantially uniform sensitizing energy over an area of the sensitized medium and a pixel exposure source (30) for applying radiant energy to expose a pattern of pixels (14) onto the area of the sensitized medium for forming the indicium.Type: GrantFiled: May 6, 2004Date of Patent: August 17, 2010Assignee: Eastman Kodak CompanyInventors: Robert J. Zolla, Paul W. Jones, John A. Heath, Thomas F. Powers, Scott P. MacKenzie
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Patent number: 7675579Abstract: A liquid crystal display device of a multiple-domain in-plane switching mode applies to mutually engaged comb-shaped electrodes for each pixel region. The comb-shaped electrode has bent portions each in a double V shape which is formed as a comb-tooth pattern by causing a bent tip being bent into a V shape to protrude further outward. This structure stabilizes turning directions of liquid crystal molecules in the vicinity of a boundary between each two neighboring regions of multiple domains and suppresses display coloring attributable to a change in a view angle.Type: GrantFiled: June 16, 2006Date of Patent: March 9, 2010Assignee: NEC LCD Technologies, Ltd.Inventor: Teruaki Suzuki
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Publication number: 20090296007Abstract: A liquid crystal blind includes a transparent first electrode layer, a transparent second electrode layer intersecting with the first electrode layer, and a liquid crystal cell formed between the first electrode layer and the second electrode layer, wherein the liquid crystal blind has an irradiation pattern, and a voltage is applied between the first electrode layer and the second electrode layer, thereby setting an irradiation area adapted to apply irradiation light to a semiconductor substrate and determining the irradiation pattern.Type: ApplicationFiled: May 21, 2009Publication date: December 3, 2009Applicant: SEIKO EPSON CORPORATIONInventor: Fumiaki USHIYAMA
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Patent number: 7613538Abstract: A method of contact lithography includes predicting distortions likely to occur in transferring a pattern from a mold to a substrate during a contact lithography process; and modifying the mold to compensate for the distortions. A contact lithography system includes a design subsystem configured to generate data describing a lithography pattern; an analysis subsystem configured to identify one or more distortions likely to occur when using a mold created from the data; and a mold modification subsystem configured to modify the data to compensate for the one or more distortions identified by the analysis subsystem.Type: GrantFiled: July 24, 2006Date of Patent: November 3, 2009Assignee: Hewlett-Packard Development Company, L.P.Inventors: Wei Wu, Duncan Stewart, Shih-Yuan Wang, R. Stanley Williams
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Patent number: 7596420Abstract: A method is provided wherein a lithographic projection apparatus is used to print a series of test patterns on a test substrate to measure printed critical dimension as function of exposure dose setting and focus setting. A full-substrate analysis of measured critical dimension data is modeled by a response model of critical dimension. The response model includes an additive term which expresses a spatial variability of the response with respect to the surface of the test substrate. The method further includes fitting the model by fitting model parameters using measured critical dimension data, and controlling critical dimension using the fitted model.Type: GrantFiled: June 19, 2006Date of Patent: September 29, 2009Assignee: ASML Netherlands B.V.Inventors: Antoine Gaston Marie Kiers, Johannes Anna Quaedackers
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Patent number: 7542013Abstract: A system and method for patterning a beam of radiation based on a pupil field distribution. In an embodiment, the distribution of the field in an area of the pupil plane affecting an image and an illumination mode are selected so as to render an image with desired characteristics. Additionally and/or alternatively, an illumination mode is selected so as to render an image with desired characteristics. The distribution of the field in an area of the pupil plane affecting an image is then realized using the spatial light modulator The system and method include using an illumination system, a pattern generator, and a projector. The illumination system supplies a beam of radiation. The pattern generator patterns the beam of radiation based on a data set corresponding to a field distribution in a pupil plane. The projector projects the patterned beam onto a target portion of an object.Type: GrantFiled: January 31, 2005Date of Patent: June 2, 2009Assignee: ASML Holding N.V.Inventors: Azat M. Latypov, Wenceslao A. Cebuhar, Jason D. Hintersteiner
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Publication number: 20090021656Abstract: When an image of a two-dimensional pattern is formed on a photosensitive material by performing spatial light modulation on light emitted from a light source by a spatial light modulation means including a multiplicity of arranged pixel units and by forming an image by a second imaging optical system after forming an image of each of light beams corresponding to the pixel units, on which the spatial light modulation has been performed, by a first imaging optical system, the imaging position of each of light beams is controlled separately for each of the light beams. Accordingly, the image of the two-dimensional pattern formed on the photosensitive material coincides with an intended two-dimensional pattern.Type: ApplicationFiled: January 24, 2006Publication date: January 22, 2009Applicant: FUJIFILM CorporationInventor: Takao Ozaki
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Patent number: 7469058Abstract: Provided are a method and system for determining states of spatial light modulator (SLM) pixels in a lithography system configured to print a desired pattern. The method includes determining diffraction orders associated with an ideal mask of a pattern to be printed by the lithography system, and then configuring the states of the SLM pixels to match all the diffraction orders that are relevant in the image formation.Type: GrantFiled: January 27, 2006Date of Patent: December 23, 2008Assignee: ASML Holding N.V.Inventors: Azat Latypov, Sherman Poultney, Wenceslao Cebuhar
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Publication number: 20080273128Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.Type: ApplicationFiled: June 17, 2008Publication date: November 6, 2008Inventors: Moon Youn Jung, Dong Ho Shin, Young Jun Kim, Se Ho Park, Hyeon Bong Pyo, Chang Auck Choi
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Publication number: 20080259228Abstract: The invention relates to an illumination unit for point illumination of a medium comprising a plurality of light emitters in the form of light guides, which are arranged to illuminate at least one illumination face via a light valve arrangement, said light valve arrangement comprising a plurality of electrically controlled light valves, at least one of the light emitters (1) being arranged to illuminate a plurality of light valves.Type: ApplicationFiled: April 10, 2008Publication date: October 23, 2008Applicant: DICON A/SInventor: Henning HENNINGSEN
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Publication number: 20080231765Abstract: The disclosure is directed to an electro-optical device. In one example, a plurality of pixels each has a pixel pitch and a light transmissible region. A light shielding unit is configured to restrict the light transmissible region of each of the pixels to a region a size of 1/M (M being an integer) of the pixel pitch in each of a horizontal direction and a vertical direction for each of the pixels.Type: ApplicationFiled: March 15, 2008Publication date: September 25, 2008Applicant: Seiko Epson CorporationInventor: Hirosada Horiguchi
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Patent number: 7403236Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.Type: GrantFiled: April 7, 2005Date of Patent: July 22, 2008Assignee: Electronics and Telecommunications Research InstituteInventors: Moon Youn Jung, Dong Ho Shin, Young Jun Kim, Se Ho Park, Hyeon Bong Pyo, Chang Auck Choi
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Patent number: 7362485Abstract: An image display medium comprising: a display layer; a pair of substrates that retain the display layer therebetween, with at least parts of the pair of substrates configuring a frame portion to which an electrical connection connector for electrical connection to the outside connects, and with at least one of the pair of substrates being transparent; a first scan electrode group; a second scan electrode group; a first electrical contact group; a second electrical contact group; a first connection wire group; and a second connection wire group, wherein the first electrical contact group and the second electrical contact group are disposed apart from each other a distance that is greater than the distance between two mutually adjacent contacts belonging to the first electrical contact group or the second electrical contact group along at least one of a thickness direction and a surface direction of the pair of substrates, is provided.Type: GrantFiled: March 21, 2007Date of Patent: April 22, 2008Assignee: Fuji Xerox Co., Ltd.Inventors: Yoshiro Yamaguchi, Yoshinori Yamaguchi, Takayuki Takeuchi, Takashi Ozawa, Shigehiko Sasaki
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Patent number: 7116398Abstract: A method of manufacturing first and second substrates that are coupled together, e.g., an active and passive plate of a flat panel display. The active plate is formed according to a standard pattern and inspected. The passive plate is then formed by modifying the pattern data for the passive plate according to the actual pattern formed on the active plate to ensure that the patterns formed on the active and passive plates correspond closely.Type: GrantFiled: October 26, 2004Date of Patent: October 3, 2006Assignee: ASML Netherlands B.V.Inventors: Johan Christiaan Gerard Hoefnagels, Peter Spit
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Patent number: 7106401Abstract: A superior reflex type vertically-aligned liquid crystal display device wherein the refractive index anisotropy ?n of its liquid crystal material is controlled to be more than 0.1, and the transmissivity of the liquid crystal is saturated with facility at a low voltage below 5 to 6V despite a reduction of the thickness of the vertically-aligned liquid crystal layer to 2.5 ?m or less, hence achieving satisfactory driving at a practically low voltage while attaining another advantage of remarkable improvement in the transmissivity itself. Therefore, the display device indicates a sufficient transmissivity, an excellent low-voltage driving characteristic and a fast response. Further improvements are realizable in a display apparatus, a projection optical system and a projection display system by the use of such display device.Type: GrantFiled: December 29, 2003Date of Patent: September 12, 2006Assignee: Sony CorporationInventors: Shunichi Hashimoto, Tadaaki Isozaki, Minako Sugiura
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Patent number: 7042530Abstract: The transfer apparatus includes a light source, a transmission type image display device in which a liquid crystal layer is held between two sets of substrates and polarizing plates and a photosensitive recording medium. The light source, the image display device and the photosensitive recording medium are arranged in series along a direction in which light from the light source advances and the image display device and the photosensitive recording medium are arranged in a non-contact state. A display image transmitted from the transmission type image display device is transferred to the photosensitive recording medium. A distance between the image display device and the photosensitive recording medium and a sum total of thicknesses of the substrate and the polarizing plate at least on a side of the photosensitive recording medium in the image display device are set in accordance with a definition of the display image.Type: GrantFiled: November 12, 2003Date of Patent: May 9, 2006Assignee: Fuji Photo Film Co., Ltd.Inventors: Naoyoshi Chino, Yasunori Tanaka, Masato Mizuno
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Patent number: 6856359Abstract: A biochip includes a liquid crystal panel having liquid crystal cells each corresponding to each sample on a substrate. The liquid crystal panel includes an upper polarization filter, an upper transparent electrode, an upper orientation film, a liquid crystal, a lower orientation film, a lower transparent electrode and a lower polarization filter in this order. By application of voltage to a desired liquid crystal cell, external light is selectively radiated onto the sample. Thus, it is possible to achieve downsizing, cost reduction and high-speed operation of a biochip reader.Type: GrantFiled: April 24, 2003Date of Patent: February 15, 2005Assignee: Omron CorporationInventors: Tomohiko Matsushita, Takeo Nishikawa, Shigeru Aoyama
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Patent number: 6813082Abstract: The wavefront aberrator of the present invention includes a pair of transparent windows, or plates, separated by a layer of monomers and polymerization initiator, including a broad class of epoxies. This monomer exhibits a variable index of refraction across the layer, resulting from controlling the extent of its curing. Curing of the epoxy may be made by exposure to light, such as ultraviolet light. The exposure to light may be varied across the surface of the epoxy to create a particular and unique refractive index profile.Type: GrantFiled: June 4, 2001Date of Patent: November 2, 2004Assignee: Ophthonix, inc.Inventor: Donald G. Bruns
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Publication number: 20040174467Abstract: A device for driving an LCD includes a timing control unit, a gate driving unit having a shift register and an output circuit, and a control signal transmission line for transmitting a data carry signal for enabling the shift register and a signal for controlling an data output by the output circuit using a single signal line. The data carry signal uses a rising edge trigger system, and the output control signal uses a level trigger system. In order to prevent an overlapping of the data carry signal and the output control signal, the output control signal is outputted after one clock from a time point where the data carry signal is latched using the shift register.Type: ApplicationFiled: September 24, 2003Publication date: September 9, 2004Inventor: Woon Hyung Jung
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Publication number: 20030228541Abstract: An electronically programmable mask for lithography comprises an array of individually controllable light sources aligned with an array of individually controllable liquid crystals, so that individual pixels may be turned on or off and phase-shifted to provide a desired light intensity distribution on a wafer. The mask may be used in a contact printing mode or in a reduction projection mode.Type: ApplicationFiled: June 10, 2002Publication date: December 11, 2003Applicant: International Business Machines CorporationInventors: Louis L. Hsu, Carl J. Radens, Li-Kong Wang, Kwong Hon Wong
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Publication number: 20030214611Abstract: A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.Type: ApplicationFiled: September 18, 2002Publication date: November 20, 2003Inventors: Moon Youn Jung, Hae Sik Yang, Chi Hoon Jun, Yun Tae Kim, Young Shin Kim, Dong Ho Shin
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Publication number: 20030175625Abstract: A method for individualised marking of electronic components in electronics manufacture, such as circuit boards. On the photosensitive surface required for manufacturing the blanks is exposed, on each blank, a machine-readable pattern, which is subsequently used in the manufacture of the product itself, for individualising the blanks in question.Type: ApplicationFiled: May 14, 2003Publication date: September 18, 2003Inventor: Rauno Salmi
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Patent number: 6590635Abstract: A stepper for imaging integrated circuit and flat panel displays uses a thermoresist instead of photoresist and separates the mask into multiple masks, each one containing only part of the features which need to be imaged. The final image is generated by combining the images from all the masks on a single die taking advantage of the fact that thermal resists do not follow the reciprocity law. For maximum resolution each one of the multiple masks contains features of only one size.Type: GrantFiled: March 1, 2001Date of Patent: July 8, 2003Assignee: Creo Inc.Inventor: Daniel Gelbart
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Patent number: 6556181Abstract: Provided are a color display driving principle obtained while taking into account a difference in eye sensitivity to the flickering of differently colored lights, a TFT liquid crystal display module structure that is adequate for this method, and a double-panel projection type display device. The count of the G (green) color data that can be written is increased compared with the count for the other primary colors, or the display period for green can be extended. The repetitive unit is set to R, G, B and G, so that a satisfactory refresh rate can be set for the important color G. Therefore, the overall refresh frequency and the power consumed by the display device can be reduced without deterioration of the display quality, and requests for the time response speeds by the display device can be reduced.Type: GrantFiled: May 14, 1999Date of Patent: April 29, 2003Assignee: International Business Machines CorporationInventors: Fumiaki Yamada, Yoshitami Sakaguchi
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Patent number: 6517055Abstract: In a printing device which prints a color image on a photosensitive material by allowing an exposing head to modulate light from a light source for each pixel in accordance with image information, the exposing head is constituted by superposing three LCS's in the light-axis direction. The respective LCS's control the transmission and interruption of only the respective blue, green and red color components so that color tones in the respective pixels with respect to an image printed on printing paper are controlled based upon the subtractive color process. Therefore, it is possible to eliminate the generation of pixel offsets in an image printed on the photosensitive material by using a simple structure, and consequently to provide a printing device having a superior processability.Type: GrantFiled: April 28, 2000Date of Patent: February 11, 2003Assignee: Noritsu Koki Co., Ltd.Inventor: Hidetoshi Nishikawa
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Patent number: 6504581Abstract: Method for manufacturing a liquid crystal display apparatus including: a TFT array substrate having a plurality of scanning lines formed on a transparent insulating substrate by a metal film, a plurality of data lines formed on or beneath the scanning lines so as to be separated by an insulating film in such a manner as to intersect the scanning lines, switching elements that are formed by a semiconductor layer at respective intersections between the scanning lines and the data lines, and pixel electrodes that are formed by a transparent conductive film and electrically connected to the switching elements; and a counter substrate provided with a liquid crystal interposed between the TFT array substrate and the counter substrate; wherein a divisional exposing method is adopted as a patterning method on the TFT array substrate, so that adjacent exposing areas within a display area of the liquid crystal display apparatus have overlapped portions with each other, and so that a shot layout is defined in such a manType: GrantFiled: May 26, 1999Date of Patent: January 7, 2003Assignee: Advanced Display Inc.Inventors: Miyuki Hirosue, Naoki Nakagawa, Hironori Aoki
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Patent number: 6333780Abstract: The pattern of a spatial frequency filter including a liquid crystal element (1031-103n) is controlled without removing the filter from a projection lens system. Specifically, a spatial frequency filter (103) is disposed at the pupil surface in a projection lens system (10). A means for controlling the spatial frequency filter (103) includes a liquid crystal element controller (15b) and a filter information storage (16b). A pattern required for the spatial frequency filter (103) is transferred from the filter information storage (16b) to the liquid crystal controller (15b). The transmittance and phase shift of the spatial frequency filter (103) are previously designed by simulation, for example. Based on these data, an aspect of applying a voltage to the liquid crystal element (1031-103n) is stored in the filter information storage (16b).Type: GrantFiled: June 21, 2000Date of Patent: December 25, 2001Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Eiji Tsukuda
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Patent number: 5777804Abstract: A projection-type display apparatus including an elliptical condenser mirror having a concave reflecting surface consisting of part of a substantially elliptical surface, a light source arranged near a first focal point of the elliptical surface, a collimator lens having a focal point near a second focal point of the elliptical surface, an optical modulation element array having a lens array on the collimator lens side, in which optical modulation elements each having an area S are two-dimensionally arranged, and a projection lens, wherein the following relations are satisfied: ##EQU1## (when said light source is arranged perpendicular to the elliptical condenser mirror) ##EQU2## (when said light source is arranged parallel to the elliptical condenser mirror).mu.=(B/A).sup.2(A: major axis, B: minor axis)where L is the length of a light-emitting portion of the light source, .mu.Type: GrantFiled: October 27, 1995Date of Patent: July 7, 1998Assignee: Kabushiki Kaisha ToshibaInventors: Hiroki Nakamura, Yoshihiro Watanabe
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Patent number: 5734145Abstract: A method of driving a liquid crystal mask marker increases a marking speed, by reducing the time required for producing an image, and maintains marking accuracy at a high level. For this purpose, a laser beam (L11) is irradiated onto a non-light-permeable portion, such as a non-light-permeable surface and/or a non-liquid-crystal surface, of a liquid crystal mask (8), for example, a liquid crystal electrode member (81), before the liquid crystal mask completes the production of an image when the image is produced on the liquid crystal mask (8).Type: GrantFiled: August 7, 1996Date of Patent: March 31, 1998Assignee: Komatsu Ltd.Inventors: Masashi Ichihara, Akira Mori, Yukinori Matsumura, Yukihiro Tsuda