Exposure Device For Lithography Patents (Class 349/4)
  • Publication number: 20140368748
    Abstract: A light exposure system executes a light exposure process to an assembly cell, which includes a first substrate, a second substrate and a liquid crystal layer disposed between the first and second substrates. The light exposure system comprises a transmission device, two moving stages and a light source module. The moving stages are disposed on the transmission device and at least one of the moving stages carries the assembly cell. The light source module includes at least a light emitting element. The transmission device moves at least one of the moving stages carrying the assembly cell or the light source module and the light emitting element emits the light to the assembly cell. A light exposure process applied to the light exposure system is also disclosed.
    Type: Application
    Filed: May 19, 2014
    Publication date: December 18, 2014
    Applicant: InnoLux Corporation
    Inventors: Ker-Yih KAO, Tsan-Jen CHEN, Chen-Kuan KAO, Chien-Hsing LEE
  • Patent number: 8373810
    Abstract: A micro-array of optical vortex retarders is provided by forming an alignment layer having a plurality of discrete alignment patches with different orientations. A layer of birefringent material, including one of a liquid crystal and a liquid crystal polymer precursor material, is provided adjacent to the alignment layer. The aligning orientation and position of each discrete alignment patch in the plurality of discrete alignment patches is selected to induce the layer of birefringent material to form at least one optical vortex retarder adjacent to a substantially non-oriented region of the alignment layer.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: February 12, 2013
    Assignee: JDS Uniphase Corporation
    Inventors: David M. Shemo, Scott McEldowney
  • Patent number: 8159624
    Abstract: A projector capable of increasing in the contrast by reducing the amount of leakage of light due to reflection of light on the surface of a retarder is to be provided. A retarder is placed and tilted in a direction so that the following conditional expression is satisfied, denoting a distance between a point A where the normal drawn from the center of a substrate plane of the retarder and a substrate plane of a polarizing beam splitter intersect and a point C where the substrate plane of the polarizing beam splitter and the optical axis of a projection system as AC, and a distance between a point B where the substrate plane of the polarizing beam splitter and the system optical axis intersect and the point C as BC: AC>BC.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: April 17, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Takashi Endo
  • Patent number: 8012385
    Abstract: The present invention relates to a liquid crystal display (LCD) device, and more particularly, to a method of fabricating a color filter for an LCD device. A method of fabricating a color filter uses a mold (PDMS mold) having a plurality of grooves. Particularly, the mold (PDMS mold) is attached to a substrate such that the plurality of grooves face into the substrate. When a color resin is dropped into a side opening of each groove, the color resin is injected into each groove of the mold (PDMS mold) by a capillary force. After the mold (PDMS mold) having the injected color resin is cured, the mold (PDMS mold) is detached from the substrate and a color filter pattern is formed at a desired position.
    Type: Grant
    Filed: May 7, 2004
    Date of Patent: September 6, 2011
    Assignee: LG Display Co., Ltd.
    Inventor: Jin-Ook Kim
  • Publication number: 20110181798
    Abstract: An exposing device includes: a first light-emitting element that emits first light; a second light-emitting element that emits second light; and a liquid crystal panel that is disposed between the first and second light-emitting elements and a photoreceptor body to be exposed to the second light, and focuses the second light on the photoreceptor body by a convex refractive index distribution that is formed in the liquid crystal panel by an orientation variation that is caused by illumination with the first light.
    Type: Application
    Filed: September 13, 2010
    Publication date: July 28, 2011
    Applicant: FUJI XEROX CO., LTD.
    Inventors: Shin Yasuda, Keishi Shimizu
  • Patent number: 7948564
    Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
    Type: Grant
    Filed: June 17, 2008
    Date of Patent: May 24, 2011
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Moon Youn Jung, Dong Ho Shin, Young Jun Kim, Se Ho Park, Hyeon Bong Pyo, Chang Auck Choi
  • Patent number: 7777859
    Abstract: An apparatus (20) forms a latent indicium onto a sensitized medium, using an area energy source (26) for applying a substantially uniform sensitizing energy over an area of the sensitized medium and a pixel exposure source (30) for applying radiant energy to expose a pattern of pixels (14) onto the area of the sensitized medium for forming the indicium.
    Type: Grant
    Filed: May 6, 2004
    Date of Patent: August 17, 2010
    Assignee: Eastman Kodak Company
    Inventors: Robert J. Zolla, Paul W. Jones, John A. Heath, Thomas F. Powers, Scott P. MacKenzie
  • Patent number: 7675579
    Abstract: A liquid crystal display device of a multiple-domain in-plane switching mode applies to mutually engaged comb-shaped electrodes for each pixel region. The comb-shaped electrode has bent portions each in a double V shape which is formed as a comb-tooth pattern by causing a bent tip being bent into a V shape to protrude further outward. This structure stabilizes turning directions of liquid crystal molecules in the vicinity of a boundary between each two neighboring regions of multiple domains and suppresses display coloring attributable to a change in a view angle.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: March 9, 2010
    Assignee: NEC LCD Technologies, Ltd.
    Inventor: Teruaki Suzuki
  • Publication number: 20090296007
    Abstract: A liquid crystal blind includes a transparent first electrode layer, a transparent second electrode layer intersecting with the first electrode layer, and a liquid crystal cell formed between the first electrode layer and the second electrode layer, wherein the liquid crystal blind has an irradiation pattern, and a voltage is applied between the first electrode layer and the second electrode layer, thereby setting an irradiation area adapted to apply irradiation light to a semiconductor substrate and determining the irradiation pattern.
    Type: Application
    Filed: May 21, 2009
    Publication date: December 3, 2009
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Fumiaki USHIYAMA
  • Patent number: 7613538
    Abstract: A method of contact lithography includes predicting distortions likely to occur in transferring a pattern from a mold to a substrate during a contact lithography process; and modifying the mold to compensate for the distortions. A contact lithography system includes a design subsystem configured to generate data describing a lithography pattern; an analysis subsystem configured to identify one or more distortions likely to occur when using a mold created from the data; and a mold modification subsystem configured to modify the data to compensate for the one or more distortions identified by the analysis subsystem.
    Type: Grant
    Filed: July 24, 2006
    Date of Patent: November 3, 2009
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Wei Wu, Duncan Stewart, Shih-Yuan Wang, R. Stanley Williams
  • Patent number: 7596420
    Abstract: A method is provided wherein a lithographic projection apparatus is used to print a series of test patterns on a test substrate to measure printed critical dimension as function of exposure dose setting and focus setting. A full-substrate analysis of measured critical dimension data is modeled by a response model of critical dimension. The response model includes an additive term which expresses a spatial variability of the response with respect to the surface of the test substrate. The method further includes fitting the model by fitting model parameters using measured critical dimension data, and controlling critical dimension using the fitted model.
    Type: Grant
    Filed: June 19, 2006
    Date of Patent: September 29, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Antoine Gaston Marie Kiers, Johannes Anna Quaedackers
  • Patent number: 7542013
    Abstract: A system and method for patterning a beam of radiation based on a pupil field distribution. In an embodiment, the distribution of the field in an area of the pupil plane affecting an image and an illumination mode are selected so as to render an image with desired characteristics. Additionally and/or alternatively, an illumination mode is selected so as to render an image with desired characteristics. The distribution of the field in an area of the pupil plane affecting an image is then realized using the spatial light modulator The system and method include using an illumination system, a pattern generator, and a projector. The illumination system supplies a beam of radiation. The pattern generator patterns the beam of radiation based on a data set corresponding to a field distribution in a pupil plane. The projector projects the patterned beam onto a target portion of an object.
    Type: Grant
    Filed: January 31, 2005
    Date of Patent: June 2, 2009
    Assignee: ASML Holding N.V.
    Inventors: Azat M. Latypov, Wenceslao A. Cebuhar, Jason D. Hintersteiner
  • Publication number: 20090021656
    Abstract: When an image of a two-dimensional pattern is formed on a photosensitive material by performing spatial light modulation on light emitted from a light source by a spatial light modulation means including a multiplicity of arranged pixel units and by forming an image by a second imaging optical system after forming an image of each of light beams corresponding to the pixel units, on which the spatial light modulation has been performed, by a first imaging optical system, the imaging position of each of light beams is controlled separately for each of the light beams. Accordingly, the image of the two-dimensional pattern formed on the photosensitive material coincides with an intended two-dimensional pattern.
    Type: Application
    Filed: January 24, 2006
    Publication date: January 22, 2009
    Applicant: FUJIFILM Corporation
    Inventor: Takao Ozaki
  • Patent number: 7469058
    Abstract: Provided are a method and system for determining states of spatial light modulator (SLM) pixels in a lithography system configured to print a desired pattern. The method includes determining diffraction orders associated with an ideal mask of a pattern to be printed by the lithography system, and then configuring the states of the SLM pixels to match all the diffraction orders that are relevant in the image formation.
    Type: Grant
    Filed: January 27, 2006
    Date of Patent: December 23, 2008
    Assignee: ASML Holding N.V.
    Inventors: Azat Latypov, Sherman Poultney, Wenceslao Cebuhar
  • Publication number: 20080273128
    Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
    Type: Application
    Filed: June 17, 2008
    Publication date: November 6, 2008
    Inventors: Moon Youn Jung, Dong Ho Shin, Young Jun Kim, Se Ho Park, Hyeon Bong Pyo, Chang Auck Choi
  • Publication number: 20080259228
    Abstract: The invention relates to an illumination unit for point illumination of a medium comprising a plurality of light emitters in the form of light guides, which are arranged to illuminate at least one illumination face via a light valve arrangement, said light valve arrangement comprising a plurality of electrically controlled light valves, at least one of the light emitters (1) being arranged to illuminate a plurality of light valves.
    Type: Application
    Filed: April 10, 2008
    Publication date: October 23, 2008
    Applicant: DICON A/S
    Inventor: Henning HENNINGSEN
  • Publication number: 20080231765
    Abstract: The disclosure is directed to an electro-optical device. In one example, a plurality of pixels each has a pixel pitch and a light transmissible region. A light shielding unit is configured to restrict the light transmissible region of each of the pixels to a region a size of 1/M (M being an integer) of the pixel pitch in each of a horizontal direction and a vertical direction for each of the pixels.
    Type: Application
    Filed: March 15, 2008
    Publication date: September 25, 2008
    Applicant: Seiko Epson Corporation
    Inventor: Hirosada Horiguchi
  • Patent number: 7403236
    Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: July 22, 2008
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Moon Youn Jung, Dong Ho Shin, Young Jun Kim, Se Ho Park, Hyeon Bong Pyo, Chang Auck Choi
  • Patent number: 7362485
    Abstract: An image display medium comprising: a display layer; a pair of substrates that retain the display layer therebetween, with at least parts of the pair of substrates configuring a frame portion to which an electrical connection connector for electrical connection to the outside connects, and with at least one of the pair of substrates being transparent; a first scan electrode group; a second scan electrode group; a first electrical contact group; a second electrical contact group; a first connection wire group; and a second connection wire group, wherein the first electrical contact group and the second electrical contact group are disposed apart from each other a distance that is greater than the distance between two mutually adjacent contacts belonging to the first electrical contact group or the second electrical contact group along at least one of a thickness direction and a surface direction of the pair of substrates, is provided.
    Type: Grant
    Filed: March 21, 2007
    Date of Patent: April 22, 2008
    Assignee: Fuji Xerox Co., Ltd.
    Inventors: Yoshiro Yamaguchi, Yoshinori Yamaguchi, Takayuki Takeuchi, Takashi Ozawa, Shigehiko Sasaki
  • Patent number: 7116398
    Abstract: A method of manufacturing first and second substrates that are coupled together, e.g., an active and passive plate of a flat panel display. The active plate is formed according to a standard pattern and inspected. The passive plate is then formed by modifying the pattern data for the passive plate according to the actual pattern formed on the active plate to ensure that the patterns formed on the active and passive plates correspond closely.
    Type: Grant
    Filed: October 26, 2004
    Date of Patent: October 3, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Johan Christiaan Gerard Hoefnagels, Peter Spit
  • Patent number: 7106401
    Abstract: A superior reflex type vertically-aligned liquid crystal display device wherein the refractive index anisotropy ?n of its liquid crystal material is controlled to be more than 0.1, and the transmissivity of the liquid crystal is saturated with facility at a low voltage below 5 to 6V despite a reduction of the thickness of the vertically-aligned liquid crystal layer to 2.5 ?m or less, hence achieving satisfactory driving at a practically low voltage while attaining another advantage of remarkable improvement in the transmissivity itself. Therefore, the display device indicates a sufficient transmissivity, an excellent low-voltage driving characteristic and a fast response. Further improvements are realizable in a display apparatus, a projection optical system and a projection display system by the use of such display device.
    Type: Grant
    Filed: December 29, 2003
    Date of Patent: September 12, 2006
    Assignee: Sony Corporation
    Inventors: Shunichi Hashimoto, Tadaaki Isozaki, Minako Sugiura
  • Patent number: 7042530
    Abstract: The transfer apparatus includes a light source, a transmission type image display device in which a liquid crystal layer is held between two sets of substrates and polarizing plates and a photosensitive recording medium. The light source, the image display device and the photosensitive recording medium are arranged in series along a direction in which light from the light source advances and the image display device and the photosensitive recording medium are arranged in a non-contact state. A display image transmitted from the transmission type image display device is transferred to the photosensitive recording medium. A distance between the image display device and the photosensitive recording medium and a sum total of thicknesses of the substrate and the polarizing plate at least on a side of the photosensitive recording medium in the image display device are set in accordance with a definition of the display image.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: May 9, 2006
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Naoyoshi Chino, Yasunori Tanaka, Masato Mizuno
  • Patent number: 6856359
    Abstract: A biochip includes a liquid crystal panel having liquid crystal cells each corresponding to each sample on a substrate. The liquid crystal panel includes an upper polarization filter, an upper transparent electrode, an upper orientation film, a liquid crystal, a lower orientation film, a lower transparent electrode and a lower polarization filter in this order. By application of voltage to a desired liquid crystal cell, external light is selectively radiated onto the sample. Thus, it is possible to achieve downsizing, cost reduction and high-speed operation of a biochip reader.
    Type: Grant
    Filed: April 24, 2003
    Date of Patent: February 15, 2005
    Assignee: Omron Corporation
    Inventors: Tomohiko Matsushita, Takeo Nishikawa, Shigeru Aoyama
  • Patent number: 6813082
    Abstract: The wavefront aberrator of the present invention includes a pair of transparent windows, or plates, separated by a layer of monomers and polymerization initiator, including a broad class of epoxies. This monomer exhibits a variable index of refraction across the layer, resulting from controlling the extent of its curing. Curing of the epoxy may be made by exposure to light, such as ultraviolet light. The exposure to light may be varied across the surface of the epoxy to create a particular and unique refractive index profile.
    Type: Grant
    Filed: June 4, 2001
    Date of Patent: November 2, 2004
    Assignee: Ophthonix, inc.
    Inventor: Donald G. Bruns
  • Publication number: 20040174467
    Abstract: A device for driving an LCD includes a timing control unit, a gate driving unit having a shift register and an output circuit, and a control signal transmission line for transmitting a data carry signal for enabling the shift register and a signal for controlling an data output by the output circuit using a single signal line. The data carry signal uses a rising edge trigger system, and the output control signal uses a level trigger system. In order to prevent an overlapping of the data carry signal and the output control signal, the output control signal is outputted after one clock from a time point where the data carry signal is latched using the shift register.
    Type: Application
    Filed: September 24, 2003
    Publication date: September 9, 2004
    Inventor: Woon Hyung Jung
  • Publication number: 20030228541
    Abstract: An electronically programmable mask for lithography comprises an array of individually controllable light sources aligned with an array of individually controllable liquid crystals, so that individual pixels may be turned on or off and phase-shifted to provide a desired light intensity distribution on a wafer. The mask may be used in a contact printing mode or in a reduction projection mode.
    Type: Application
    Filed: June 10, 2002
    Publication date: December 11, 2003
    Applicant: International Business Machines Corporation
    Inventors: Louis L. Hsu, Carl J. Radens, Li-Kong Wang, Kwong Hon Wong
  • Publication number: 20030214611
    Abstract: A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.
    Type: Application
    Filed: September 18, 2002
    Publication date: November 20, 2003
    Inventors: Moon Youn Jung, Hae Sik Yang, Chi Hoon Jun, Yun Tae Kim, Young Shin Kim, Dong Ho Shin
  • Publication number: 20030175625
    Abstract: A method for individualised marking of electronic components in electronics manufacture, such as circuit boards. On the photosensitive surface required for manufacturing the blanks is exposed, on each blank, a machine-readable pattern, which is subsequently used in the manufacture of the product itself, for individualising the blanks in question.
    Type: Application
    Filed: May 14, 2003
    Publication date: September 18, 2003
    Inventor: Rauno Salmi
  • Patent number: 6590635
    Abstract: A stepper for imaging integrated circuit and flat panel displays uses a thermoresist instead of photoresist and separates the mask into multiple masks, each one containing only part of the features which need to be imaged. The final image is generated by combining the images from all the masks on a single die taking advantage of the fact that thermal resists do not follow the reciprocity law. For maximum resolution each one of the multiple masks contains features of only one size.
    Type: Grant
    Filed: March 1, 2001
    Date of Patent: July 8, 2003
    Assignee: Creo Inc.
    Inventor: Daniel Gelbart
  • Patent number: 6556181
    Abstract: Provided are a color display driving principle obtained while taking into account a difference in eye sensitivity to the flickering of differently colored lights, a TFT liquid crystal display module structure that is adequate for this method, and a double-panel projection type display device. The count of the G (green) color data that can be written is increased compared with the count for the other primary colors, or the display period for green can be extended. The repetitive unit is set to R, G, B and G, so that a satisfactory refresh rate can be set for the important color G. Therefore, the overall refresh frequency and the power consumed by the display device can be reduced without deterioration of the display quality, and requests for the time response speeds by the display device can be reduced.
    Type: Grant
    Filed: May 14, 1999
    Date of Patent: April 29, 2003
    Assignee: International Business Machines Corporation
    Inventors: Fumiaki Yamada, Yoshitami Sakaguchi
  • Patent number: 6517055
    Abstract: In a printing device which prints a color image on a photosensitive material by allowing an exposing head to modulate light from a light source for each pixel in accordance with image information, the exposing head is constituted by superposing three LCS's in the light-axis direction. The respective LCS's control the transmission and interruption of only the respective blue, green and red color components so that color tones in the respective pixels with respect to an image printed on printing paper are controlled based upon the subtractive color process. Therefore, it is possible to eliminate the generation of pixel offsets in an image printed on the photosensitive material by using a simple structure, and consequently to provide a printing device having a superior processability.
    Type: Grant
    Filed: April 28, 2000
    Date of Patent: February 11, 2003
    Assignee: Noritsu Koki Co., Ltd.
    Inventor: Hidetoshi Nishikawa
  • Patent number: 6504581
    Abstract: Method for manufacturing a liquid crystal display apparatus including: a TFT array substrate having a plurality of scanning lines formed on a transparent insulating substrate by a metal film, a plurality of data lines formed on or beneath the scanning lines so as to be separated by an insulating film in such a manner as to intersect the scanning lines, switching elements that are formed by a semiconductor layer at respective intersections between the scanning lines and the data lines, and pixel electrodes that are formed by a transparent conductive film and electrically connected to the switching elements; and a counter substrate provided with a liquid crystal interposed between the TFT array substrate and the counter substrate; wherein a divisional exposing method is adopted as a patterning method on the TFT array substrate, so that adjacent exposing areas within a display area of the liquid crystal display apparatus have overlapped portions with each other, and so that a shot layout is defined in such a man
    Type: Grant
    Filed: May 26, 1999
    Date of Patent: January 7, 2003
    Assignee: Advanced Display Inc.
    Inventors: Miyuki Hirosue, Naoki Nakagawa, Hironori Aoki
  • Patent number: 6333780
    Abstract: The pattern of a spatial frequency filter including a liquid crystal element (1031-103n) is controlled without removing the filter from a projection lens system. Specifically, a spatial frequency filter (103) is disposed at the pupil surface in a projection lens system (10). A means for controlling the spatial frequency filter (103) includes a liquid crystal element controller (15b) and a filter information storage (16b). A pattern required for the spatial frequency filter (103) is transferred from the filter information storage (16b) to the liquid crystal controller (15b). The transmittance and phase shift of the spatial frequency filter (103) are previously designed by simulation, for example. Based on these data, an aspect of applying a voltage to the liquid crystal element (1031-103n) is stored in the filter information storage (16b).
    Type: Grant
    Filed: June 21, 2000
    Date of Patent: December 25, 2001
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Eiji Tsukuda
  • Patent number: 5777804
    Abstract: A projection-type display apparatus including an elliptical condenser mirror having a concave reflecting surface consisting of part of a substantially elliptical surface, a light source arranged near a first focal point of the elliptical surface, a collimator lens having a focal point near a second focal point of the elliptical surface, an optical modulation element array having a lens array on the collimator lens side, in which optical modulation elements each having an area S are two-dimensionally arranged, and a projection lens, wherein the following relations are satisfied: ##EQU1## (when said light source is arranged perpendicular to the elliptical condenser mirror) ##EQU2## (when said light source is arranged parallel to the elliptical condenser mirror).mu.=(B/A).sup.2(A: major axis, B: minor axis)where L is the length of a light-emitting portion of the light source, .mu.
    Type: Grant
    Filed: October 27, 1995
    Date of Patent: July 7, 1998
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroki Nakamura, Yoshihiro Watanabe
  • Patent number: 5734145
    Abstract: A method of driving a liquid crystal mask marker increases a marking speed, by reducing the time required for producing an image, and maintains marking accuracy at a high level. For this purpose, a laser beam (L11) is irradiated onto a non-light-permeable portion, such as a non-light-permeable surface and/or a non-liquid-crystal surface, of a liquid crystal mask (8), for example, a liquid crystal electrode member (81), before the liquid crystal mask completes the production of an image when the image is produced on the liquid crystal mask (8).
    Type: Grant
    Filed: August 7, 1996
    Date of Patent: March 31, 1998
    Assignee: Komatsu Ltd.
    Inventors: Masashi Ichihara, Akira Mori, Yukinori Matsumura, Yukihiro Tsuda